Including Bulk Negative Resistance Effect Component (epo) Patents (Class 257/E27.002)
  • Patent number: 11765912
    Abstract: In an example, a memory array may include a plurality of first dielectric materials and a plurality of stacks, where each respective first dielectric material and each respective stack alternate, and where each respective stack comprises a first conductive material and a storage material. A second conductive material may pass through the plurality of first dielectric materials and the plurality of stacks. Each respective stack may further include a second dielectric material between the first conductive material and the second conductive material.
    Type: Grant
    Filed: February 26, 2021
    Date of Patent: September 19, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Agostino Pirovano, Andrea Redaelli, Fabio Pellizzer, Innocenzo Tortorelli
  • Patent number: 9040407
    Abstract: A method including depositing an alloying layer along a sidewall of an opening and in direct contact with a seed layer, the alloying layer includes a crystalline structure that cannot serve as a seed for plating a conductive material, exposing the opening to an electroplating solution including the conductive material, the conductive material is not present in the alloying layer, applying an electrical potential to a cathode causing the conductive material to deposit from the electroplating solution onto the cathode exposed at the bottom of the opening and causing the opening to fill with the conductive material, the cathode includes an exposed portion of the seed layer and excludes the alloying layer, and forming a first intermetallic compound along an intersection between the alloying layer and the conductive material, the first intermetallic compound is formed as a precipitate within a solid solution of the alloying layer and the conductive material.
    Type: Grant
    Filed: October 1, 2013
    Date of Patent: May 26, 2015
    Assignee: International Business Machines Corporation
    Inventors: Mukta G. Farooq, John A. Fitzsimmons, Troy L. Graves-Abe
  • Patent number: 8987870
    Abstract: A bridge rectifier including a common P-type diode, a common N-type diode, two first metal layers, two pairs of second metal layers, two AC inputs and two DC outputs. The P-type diode includes a common P-type doping region, a pair of first N-type substrate regions and a pair of P-type doping regions. The N-type diode includes a common N-type doping region, a pair of second N-type substrate regions and a pair of N-type doping regions. The first metal layers connect to the common N-type doping region and the common P-type doping region. The second metal layers connect to the P-type doping region and the N-type doping region. Two AC inputs connect to one of the second metal layers of the P-type diode and one of the second metal layers of the N-type diode respectively. Two DC inputs connect to the first metal layers respectively.
    Type: Grant
    Filed: July 5, 2013
    Date of Patent: March 24, 2015
    Assignee: Lite-On Semiconductor Corp.
    Inventor: Ching-Chiu Tseng
  • Patent number: 8969941
    Abstract: According to an embodiment, a semiconductor device, includes a semiconductor substrate, first and second transistors. The first transistor includes a first insulating film provided on the semiconductor substrate, a first conductive film provided on the first insulating film, a second insulating film provided on the first conductive film, and a second conductive film provided on the second insulating film. The second transistor is provided to be separated from the first transistor, the second transistor including a third insulating film provided on the semiconductor substrate, a third conductive film provided on the third insulating film, a fourth insulating film provided on the third conductive film, and a fourth conductive film provided on the fourth insulating film. The third conductive film is thicker than the first conductive film, and the second transistor has a through-portion piercing the fourth insulating film to connect the third conductive film and the fourth conductive film.
    Type: Grant
    Filed: February 21, 2013
    Date of Patent: March 3, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Wataru Sakamoto
  • Patent number: 8835898
    Abstract: A memory array including a plurality of memory cells. Each word line is electrically coupled to a set of memory cells, a gate contact and a pair of dielectric pillars positioned parallel to the word line with a spacer of electrically insulating material surrounding the gate contact. Also a method to prevent a gate contact from electrically connecting to a source contact for a plurality of memory cells on a substrate. The method includes depositing and etching gate material to partially fill a space between the pillars and to form a word line for the memory cells, etching a gate contact region for the word line between the pair of pillars, forming a spacer of electrically insulating material in the gate contact region, and depositing a gate contact between the pair of pillars to be in electrical contact with the gate material such that the spacer surrounds the gate contact.
    Type: Grant
    Filed: April 20, 2012
    Date of Patent: September 16, 2014
    Assignee: International Business Machines Corporation
    Inventors: Matthew J. BrightSky, Chung H. Lam, Gen P. Lauer
  • Patent number: 8729520
    Abstract: A method includes forming an electrical insulator material over an integrated circuit having a metal-containing conductive interconnect and activating a dopant in a semiconductor material of a substrate to provide a doped region. The doped region provides a junction of opposite conductivity types. After activating the dopant, the substrate is bonded to the insulator material and at least some of the substrate is removed where bonded to the insulator material. After the removing, a memory cell is formed having a word line, an access diode, a state-changeable memory element containing chalcogenide phase change material, and a bit line all electrically connected in series, the access diode containing the junction as a p-n junction. A memory device includes an adhesion material over the insulator material and bonding the word line to the insulator material.
    Type: Grant
    Filed: May 7, 2013
    Date of Patent: May 20, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Jun Liu, Gurtej S. Sandhu
  • Patent number: 8680500
    Abstract: A phase change memory device includes an impurity region on a substrate, the impurity region being in an active region, a metal silicide pattern at least partially buried in the impurity region, a diode on the impurity region, a lower electrode on the diode, a phase change layer pattern on the lower electrode, and an upper electrode on the phase change layer pattern.
    Type: Grant
    Filed: June 13, 2012
    Date of Patent: March 25, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Gyu-Hwan Oh, Byoung-Jae Bae, Dong-Hyun Im, Doo-Hwan Park
  • Publication number: 20140061576
    Abstract: Memory devices and methods for forming a device are disclosed. A substrate prepared with a lower electrode level with bottom electrodes is provided. Fin stack layers are formed on the lower electrode level. Spacers are formed on top of the fin stack layers. The spacers have a width which is less than a lithographic resolution. The fin stack layers are patterned using the spacers as a mask to form fin stacks. The fin stacks contact the bottom electrodes. An interlevel dielectric (ILD) layer is formed on the substrate. The ILD layer fills spaces around the fin stacks. An upper electrode level is formed on the ILD layer. The upper electrode level has top electrodes in contact with the fin stacks. The electrodes and fin stacks form fin-type memory cells.
    Type: Application
    Filed: September 3, 2012
    Publication date: March 6, 2014
    Applicant: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Eng Huat TOH, Elgin QUEK, Shyue Seng TAN
  • Patent number: 8659002
    Abstract: A phase change memory element and method of forming the same. The memory element includes a phase change material layer electrically coupled to first and second conductive material layers. A energy conversion layer is formed in association with the phase change material layer, and electrically coupled to a third conductive material layer. An electrically isolating material layer is formed between the phase change material layer and the energy conversion layer.
    Type: Grant
    Filed: July 19, 2012
    Date of Patent: February 25, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Jun Liu, Mike Violette, Jon Daley
  • Publication number: 20130299769
    Abstract: A non-volatile memory device includes first wiring structures elongated in a first direction and separated by a first gap region in a second direction, the first gap region comprising first dielectric material formed in a first process, second wiring structures elongated in a second direction and separated by a second gap region in a first direction, the second gap region comprising second dielectric material formed in a second process, and a resistive switching devices comprising active conductive material, resistive switching material, and a junction material, wherein resistive switching devices are formed at intersections of the first wiring structures and the second wiring structures, wherein the junction material comprising p+ polysilicon material overlying the first wiring material, wherein some resistive switching devices are separated by the first gap region and some resistive switching devices separated by the second gap region.
    Type: Application
    Filed: May 10, 2012
    Publication date: November 14, 2013
    Applicant: Crossbar, Inc.
    Inventor: Steven Patrick MAXWELL
  • Patent number: 8581225
    Abstract: A manufacturing method includes forming, on a substrate, lower layer copper lines each being shaped into a strip, forming electrode seed layers each being shaped into a strip, on the respective lower layer copper lines using electroless plating, forming an interlayer insulating layer above the electrode seed layers, forming, in the interlayer insulating layer, memory cell holes, penetrating through the interlayer insulating layer and extending to the electrode seed layers, forming noble metal electrode layers on the electrode seed layers exposed in the respective memory cell holes using the electroless plating, forming, in the respective memory cell holes, variable resistance layers connected to the noble electrode layers, and forming, above the interlayer insulating layer and the variable resistance layers, upper layer copper lines each being shaped into a strip, connected to a corresponding one of the variable resistance layers, and crossing the lower layer copper lines.
    Type: Grant
    Filed: April 26, 2011
    Date of Patent: November 12, 2013
    Assignee: Panasonic Corporation
    Inventors: Atsushi Himeno, Haruyuki Sorada, Takumi Mikawa
  • Publication number: 20130277639
    Abstract: A memory array including a plurality of memory cells. Each word line is electrically coupled to a set of memory cells, a gate contact and a pair of dielectric pillars positioned parallel to the word line with a spacer of electrically insulating material surrounding the gate contact. Also a method to prevent a gate contact from electrically connecting to a source contact for a plurality of memory cells on a substrate. The method includes depositing and etching gate material to partially fill a space between the pillars and to form a word line for the memory cells, etching a gate contact region for the word line between the pair of pillars, forming a spacer of electrically insulating material in the gate contact region, and depositing a gate contact between the pair of pillars to be in electrical contact with the gate material such that the spacer surrounds the gate contact.
    Type: Application
    Filed: April 20, 2012
    Publication date: October 24, 2013
    Applicant: International Business Machines Corporation
    Inventors: Matthew J. BrightSky, Chung H. Lam, Gen P. Lauer
  • Patent number: 8551830
    Abstract: There is provided a small-type semiconductor integrated circuit whose circuit area is small and whose wiring length is short. The semiconductor integrated circuit is constructed in a multi-layer structure and is provided with a first semiconductor layer, a first semiconductor layer transistor formed in the first semiconductor layer, a wiring layer which is deposited on the first semiconductor layer and in which metal wires are formed, a second semiconductor layer deposited on the wiring layer and a second semiconductor layer transistor formed in the second semiconductor layer. It is noted that insulation of a gate insulating film of the first semiconductor layer transistor is almost equal with that of a gate insulating film of the second semiconductor layer transistor and the gate insulating film of the second semiconductor layer transistor is formed by means of radical oxidation or radical nitridation.
    Type: Grant
    Filed: April 28, 2008
    Date of Patent: October 8, 2013
    Assignees: Advantest Corporation, National University Corporation Tohoku University
    Inventors: Tadahiro Ohmi, Koji Kotani, Kazuyuki Maruo, Takahiro Yamaguchi
  • Publication number: 20130242649
    Abstract: Embodiments disclosed herein may relate to forming an interface between a selector transistor and a phase change material storage cell in a memory device.
    Type: Application
    Filed: March 16, 2012
    Publication date: September 19, 2013
    Applicant: Micron Technology, Inc.
    Inventor: Agostino Pirovano
  • Publication number: 20130193402
    Abstract: A phase-change random access memory (PCRAM) device and a method of manufacturing the same. The PCRAM device includes memory cells that each include a semiconductor substrate having a switching element, a lower electrode formed on the switching element, a phase-change layer formed on the lower electrode, and an upper electrode formed on the phase-change layer; and a porous insulating layer arranged to insulate one memory cell from another memory cell of the memory cells.
    Type: Application
    Filed: May 29, 2012
    Publication date: August 1, 2013
    Inventor: Choon Kun RYU
  • Publication number: 20130175496
    Abstract: A semiconductor memory device and a method for fabricating the same capable of easily controlling a contact area between a conductive line and a memory layer even at the high degree of integration. The semiconductor memory device includes a plurality of first conductive lines, a memory layer contacting with a first sidewall of each of the first conductive lines, and a plurality of second conductive lines crossing the first conductive lines and contacting with the memory layer.
    Type: Application
    Filed: August 27, 2012
    Publication date: July 11, 2013
    Inventor: Hye-Jung CHOI
  • Publication number: 20130168631
    Abstract: The disclosure provides a non-volatile memory structure and a method for fabricating the same. The non-volatile memory structure includes a first contact connected to a first transistor. A second contact is connected to a second transistor. A resistance-changing memory material pattern covers and contacts the second contact but not the first contact. A top electrode contacts both the resistance-changing memory material pattern and the first contact. An area of the resistance-changing memory material pattern is substantially larger than an area of its interface with the second contact.
    Type: Application
    Filed: January 2, 2012
    Publication date: July 4, 2013
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventor: Frederick T. Chen
  • Patent number: 8455853
    Abstract: A method includes forming an electrical insulator material over an integrated circuit having a metal-containing conductive interconnect and activating a dopant in a semiconductor material of a substrate to provide a doped region. The doped region provides a junction of opposite conductivity types. After activating the dopant, the substrate is bonded to the insulator material and at least some of the substrate is removed where bonded to the insulator material. After the removing, a memory cell is formed having a word line, an access diode, a state-changeable memory element containing chalcogenide phase change material, and a bit line all electrically connected in series, the access diode containing the junction as a p-n junction. A memory device includes an adhesion material over the insulator material and bonding the word line to the insulator material.
    Type: Grant
    Filed: April 9, 2012
    Date of Patent: June 4, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Jun Liu, Gurtej S. Sandhu
  • Publication number: 20130134377
    Abstract: Semiconductor memory devices are provided. The device may include may include first and second selection lines connected to each other to constitute a selection line group, a plurality of word lines sequentially stacked on each of the first and second selection lines, vertical electrodes arranged in a row between the first and second selection lines, a plurality of bit line plugs arranged in a row at each of both sides of the selection line group, and bit lines crossing the word lines and connecting the bit line plugs with each other.
    Type: Application
    Filed: September 7, 2012
    Publication date: May 30, 2013
    Inventors: Jintaek PARK, Youngwoo PARK, Jungdal CHOI
  • Patent number: 8445319
    Abstract: A nonvolatile memory element comprises a first electrode layer (103), a second electrode (107), and a resistance variable layer (106) which is disposed between the first electrode layer (103) and the second electrode layer (107), a resistance value of the resistance variable layer varying reversibly according to electric signals having different polarities which are applied between the electrodes (103), (107), wherein the resistance variable layer (106) has a first region comprising a first oxygen-deficient tantalum oxide having a composition represented by TaOx (0<x<2.5) and a second region comprising a second oxygen-deficient tantalum oxide having a composition represented by TaOy (x<y<2.5), the first region and the second region being arranged in a thickness direction of the resistance variable layer.
    Type: Grant
    Filed: August 8, 2011
    Date of Patent: May 21, 2013
    Assignee: Panasonic Corporation
    Inventors: Yoshihiko Kanzawa, Koji Katayama, Satoru Fujii, Shunsaku Muraoka, Koichi Osano, Satoru Mitani, Ryoko Miyanaga, Takeshi Takagi, Kazuhiko Shimakawa
  • Patent number: 8415651
    Abstract: Memory devices and methods for manufacturing are described herein. A memory device as described herein includes a memory element and a first electrode having an inner surface surrounding the memory element to contact the memory element at a first contact surface. The device includes a second electrode spaced away from the first electrode, the second electrode having an inner surface surrounding the memory element to contact the memory element at a second contact surface.
    Type: Grant
    Filed: June 12, 2008
    Date of Patent: April 9, 2013
    Assignee: Macronix International Co., Ltd.
    Inventor: Hsiang-Lan Lung
  • Publication number: 20130082232
    Abstract: A memory cell including a two-terminal re-writeable non-volatile memory element having at least two layers of conductive metal oxide (CMO), which, in turn, can include a first layer of CMO including mobile oxygen ions, and a second layer of CMO formed in contact with the first layer of CMO to cooperate with the first layer of CMO to form an ion obstruction barrier. The ion obstruction barrier is configured to inhibit transport or diffusion of a subset of mobile ion to enhance, among other things, memory effects and cycling endurance of memory cells. At least one layer of an insulating metal oxide that is an electrolyte to the mobile oxygen ions and configured as a tunnel barrier is formed in contact with the second layer of CMO.
    Type: Application
    Filed: September 30, 2011
    Publication date: April 4, 2013
    Applicant: UNITY SEMICONDUCTOR CORPORATION
    Inventors: JIAN WU, RENE MEYER
  • Patent number: 8354661
    Abstract: A variable resistance memory element and method of forming the same. The memory element includes a substrate supporting a bottom electrode having a small bottom contact area. A variable resistance material is formed over the bottom electrodes such that the variable resistance material has a surface that is in electrical communication with the bottom electrode and a top electrode is formed over the variable resistance material. The small bottom electrode contact area reduces the reset current requirement which in turn reduces the write transistor size for each bit.
    Type: Grant
    Filed: June 22, 2011
    Date of Patent: January 15, 2013
    Assignee: Micron Technology, Inc.
    Inventor: Hasan Nejad
  • Publication number: 20130001506
    Abstract: According to one embodiment, a resistance change memory includes resistance change elements, vias and sidewall insulating layers, the elements and the vias provided alternately in a first direction and a second direction orthogonal to the first direction, and the sidewall insulating layers provided on sidewalls of the elements. The elements are provided in a lattice pattern having a constant pitch. A thickness of each of the sidewall insulating layers in a direction orthogonal to the sidewalls is a value for contacting the sidewall insulating layers each other or more to form holes between the sidewall insulating layers. The vias are provided in the holes respectively.
    Type: Application
    Filed: January 23, 2012
    Publication date: January 3, 2013
    Inventors: Motoyuki SATO, Yoshiaki Asao, Takashi Obara, Takashi Nakazawa
  • Patent number: 8338816
    Abstract: A nonvolatile memory element of the present invention comprises a first electrode (503); a second electrode (505); and a resistance variable layer (504) which is disposed between the first electrode (503) and the second electrode (505), a resistance value of the resistance variable layer being changeable in response to electric signals which are applied between the first electrode (503) and the second electrode (505), wherein the first electrode and the second electrode comprise materials which are made of different elements.
    Type: Grant
    Filed: March 31, 2008
    Date of Patent: December 25, 2012
    Assignee: Panasonic Corporation
    Inventors: Yoshihiko Kanzawa, Shunsaku Muraoka, Satoru Mitani, Zhiqiang Wei, Takeshi Takagi
  • Publication number: 20120300533
    Abstract: A memory cell is provided that includes a first conductor, a second conductor, and a semiconductor junction diode between the first and second conductors. The semiconductor junction diode is not in contact with a material having a lattice mismatch of less than 12 percent with the semiconductor junction diode. In addition, no resistance-switching element having its resistance changed by application of a programming voltage by more than a factor of two is disposed between the semiconductor junction diode and the first conductor or between the semiconductor junction diode and the second conductor. Numerous other aspects are provided.
    Type: Application
    Filed: August 7, 2012
    Publication date: November 29, 2012
    Inventors: S. Brad Herner, Abhijit Bandyopadhyay
  • Publication number: 20120281453
    Abstract: The variable resistance nonvolatile storage device includes a memory cell (300) that is formed by connecting in series a variable resistance element (309) including a variable resistance layer (309b) which reversibly changes based on electrical signals each having a different polarity and a transistor (317) including a semiconductor substrate (301) and two N-type diffusion layer regions (302a, 302b), wherein the variable resistance layer (309b) includes an oxygen-deficient oxide of a transition metal, lower and upper electrodes (309a, 309c) are made of materials of different elements, a standard electrode potential V1 of the lower electrode (309a), a standard electrode potential V2 of the upper electrode (309c), and a standard electrode potential Vt of the transition metal satisfy Vt<V2 and V1<V2, and the lower electrode (309a) is connected with the N-type diffusion layer region (302b), the electrical signals being applied between the lower and upper electrodes (309a, 309c).
    Type: Application
    Filed: June 27, 2012
    Publication date: November 8, 2012
    Inventors: Kazuhiko SHIMAKAWA, Yoshihiko KANZAWA, Satoru MITANI, Shunsaku MURAOKA
  • Publication number: 20120273747
    Abstract: According to one embodiment, a semiconductor device includes a fin type stacked layer structure which has first to third semiconductor layers, and first to third layer select transistors to select one of the first to third semiconductor layers. The second layer select transistor is normally on in the second semiconductor layer, and is controlled to be on or off in the first and third semiconductor layers. A channel region of the second semiconductor layer which is covered with a gate electrode of the second layer select transistor has a metal silicide.
    Type: Application
    Filed: April 27, 2012
    Publication date: November 1, 2012
    Inventors: Masumi SAITOH, Toshinori NUMATA, Kiwamu SAKUMA, Haruka KUSAI, Takayuki ISHIKAWA
  • Publication number: 20120241715
    Abstract: Manufacturing processes for phase change memory have suffered from the problem of chalcogenide material being susceptible to delamination, since this material exhibits low adhesion to high melting point metals and silicon oxide films. Furthermore, chalcogenide material has low thermal stability and hence tends to sublime during the manufacturing process of phase change memory. According to the present invention, conductive or insulative adhesive layers are formed over and under the chalcogenide material layer to enhance its delamination strength. Further, a protective film made up of a nitride film is formed on the sidewalls of the chalcogenide material layer to prevent sublimation of the chalcogenide material layer.
    Type: Application
    Filed: June 11, 2012
    Publication date: September 27, 2012
    Inventors: YUICHI MATSUI, Nozomu Matsuzaki, Norikatsu Takaura, Naoki Yamamoto, Hideyuki Matsuoka, Tomio Iwasaki
  • Publication number: 20120193601
    Abstract: The semiconductor device includes a memory cell including a plurality of magnetoresistive elements disposed therein, and a peripheral circuit region disposed around the memory cell region. The magnetoresistive element includes a magnetization fixed layer, a magnetization free layer, and a tunneling insulation layer. The semiconductor device includes, above the magnetoresistive elements, a plurality of first wires extending in the direction along the main surface. In the peripheral circuit region, there is disposed a multilayer structure of lamination of a layer equal in material to the magnetization free layer, a layer equal in material to the tunneling insulation layer, and a layer equal in material to the magnetization fixed layer so as to overlap a second wire formed of the same layer as the first wire in plan view. The multilayer structure does not overlap both of a pair of adjacent second wires in plan view in the peripheral circuit region.
    Type: Application
    Filed: January 11, 2012
    Publication date: August 2, 2012
    Inventor: Keisuke TSUKAMOTO
  • Publication number: 20120187363
    Abstract: A nonvolatile memory cell includes first and second electrodes. Programmable material and a select device are received in series between and with the first and second electrodes. Current conductive material is in series between and with the programmable material and the select device. An array of vertically stacked tiers of such nonvolatile memory cells is disclosed. Methods of forming arrays of nonvolatile memory cells are disclosed.
    Type: Application
    Filed: January 20, 2011
    Publication date: July 26, 2012
    Inventors: Zengtao T. Liu, David H. Wells
  • Publication number: 20120104341
    Abstract: According to one embodiment of the present invention, a solid state electrolyte memory cell includes a cathode, an anode and a solid state electrolyte. The anode includes an intercalating material and first metal species dispersed in the intercalating material.
    Type: Application
    Filed: January 10, 2012
    Publication date: May 3, 2012
    Applicants: ALTIS SEMICONDUCTOR, SNC, ADESTO TECHNOLOGY CORPORATION
    Inventor: Sandra Mege
  • Publication number: 20120104350
    Abstract: A step of forming, on a substrate (11), lower layer copper lines (18) each being shaped into a strip, a step of forming electrode seed layers (21) each being shaped into a strip, on the surfaces of the respective lower layer copper lines (18) using electroless plating, a step of forming interlayer insulating layer (19) above the electrode seed layers (21) and the substrate (11), a step of forming, in the interlayer insulating layer (19), memory cell holes (20), penetrating through the interlayer insulating layer (19) and extending to the electrode seed layers (21), a step of forming noble metal electrode layers (29) on the surfaces of the electrode seed layers (21) exposed in the respective memory cell holes (20) using the electroless plating, a step of forming, in the respective memory cell holes (20), variable resistance layers (23) connected to the noble electrode layers (29), and a step of forming, above the interlayer insulating layer (19) and the variable resistance layers (23), upper layer copper lines
    Type: Application
    Filed: April 26, 2011
    Publication date: May 3, 2012
    Inventors: Atsushi Himeno, Haruyuki Sorada, Takumi Mikawa
  • Patent number: 8164081
    Abstract: A method includes forming an electrical insulator material over an integrated circuit having a metal-containing conductive interconnect and activating a dopant in a semiconductor material of a substrate to provide a doped region. The doped region provides a junction of opposite conductivity types. After activating the dopant, the substrate is bonded to the insulator material and at least some of the substrate is removed where bonded to the insulator material. After the removing, a memory cell is formed having a word line, an access diode, a state-changeable memory element containing chalcogenide phase change material, and a bit line all electrically connected in series, the access diode containing the junction as a p-n junction. A memory device includes an adhesion material over the insulator material and bonding the word line to the insulator material.
    Type: Grant
    Filed: November 22, 2010
    Date of Patent: April 24, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Jun Liu, Gurtej S. Sandhu
  • Patent number: 8158965
    Abstract: Memory devices are described along with manufacturing methods. A memory device as described herein includes a bottom electrode and a first phase change layer comprising a first phase change material on the bottom electrode. A resistive heater comprising a heater material is on the first phase change material. A second phase change layer comprising a second phase change material is on the resistive heater, and a top electrode is on the second phase change layer. The heater material has a resistivity greater than the most highly resistive states of the first and second phase change materials.
    Type: Grant
    Filed: February 5, 2008
    Date of Patent: April 17, 2012
    Assignee: Macronix International Co., Ltd.
    Inventor: Shih-Hung Chen
  • Patent number: 8153471
    Abstract: A phase change memory structure and method for forming the same, the method including providing a substrate comprising a conductive area; forming a spacer having a partially exposed sidewall region at an upper portion of the spacer defining a phase change memory element contact area; and, wherein the spacer bottom portion partially overlaps the conductive area. Both these two methods can reduce active area of a phase change memory element, therefore, reducing a required phase changing electrical current.
    Type: Grant
    Filed: November 14, 2010
    Date of Patent: April 10, 2012
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Li-Shyue Lai, Chao-Hsiung Wang, Denny Tang, Wen-Chin Lin
  • Publication number: 20120012809
    Abstract: A switchable junction (600) having intrinsic diodes with different switching thresholds is disclosed. The switchable junction comprises a first electrode (610) formed of a first conductive material and a second electrode (630) formed of a second conductive material. The junction (600) further includes a memristive matrix (615) configured to form a first and a second electrical interface with the first and second electrodes to form a first rectifying diode interface (626) with a first switching threshold and a second rectifying diode interface (628) with a second switching threshold.
    Type: Application
    Filed: June 25, 2009
    Publication date: January 19, 2012
    Inventors: Jianhua Yang, Shih-Yuan(SY) Wang, R. Stanley Williams
  • Publication number: 20110303889
    Abstract: A variable resistance memory element and method of forming the same. The memory element includes a substrate supporting a bottom electrode having a small bottom contact area. A variable resistance material is formed over the bottom electrodes such that the variable resistance material has a surface that is in electrical communication with the bottom electrode and a top electrode is formed over the variable resistance material. The small bottom electrode contact area reduces the reset current requirement which in turn reduces the write transistor size for each bit.
    Type: Application
    Filed: June 22, 2011
    Publication date: December 15, 2011
    Inventor: Hasan Nejad
  • Patent number: 8049201
    Abstract: A semiconductor memory device includes first conductive lines on a substrate, an interlayer insulating layer with a plurality of via holes on the substrate, second conductive lines on the interlayer insulating layer, and a resistive memory material in the via holes and electrically connected to the first and second conductive lines, the resistive memory material having a vertically non-uniform specific resistance profile with respect to the substrate.
    Type: Grant
    Filed: January 29, 2008
    Date of Patent: November 1, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Chang-wook Jeong
  • Patent number: 8022502
    Abstract: A nonvolatile memory element comprises a first electrode layer (103), a second electrode (107), and a resistance variable layer (106) which is disposed between the first electrode layer (103) and the second electrode layer (107), a resistance value of the resistance variable layer varying reversibly according to electric signals having different polarities which are applied between the electrodes (103), (107), wherein the resistance variable layer (106) has a first region comprising a first oxygen-deficient tantalum oxide having a composition represented by TaOx (0<x<2.5) and a second region comprising a second oxygen-deficient tantalum oxide having a composition represented by TaOy (x<y<2.5), the first region and the second region being arranged in a thickness direction of the resistance variable layer.
    Type: Grant
    Filed: March 26, 2008
    Date of Patent: September 20, 2011
    Assignee: Panasonic Corporation
    Inventors: Yoshihiko Kanzawa, Koji Katayama, Satoru Fujii, Shunsaku Muraoka, Koichi Osano, Satoru Mitani, Ryoko Miyanaga, Takeshi Takagi, Kazuhiko Shimakawa
  • Publication number: 20110220860
    Abstract: Bipolar memory cells and a memory device including the same are provided, the bipolar memory cells include two bipolar memory layers having opposite programming directions. The two bipolar memory layers may be connected to each other via an intermediate electrode interposed therebetween. The two bipolar memory layers may have the same structure or opposite structures.
    Type: Application
    Filed: February 15, 2011
    Publication date: September 15, 2011
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Chang-jung Kim, Young-bae Kim, Ji-hyun Hur, Dong-soo Lee, Man Chang, Chang-bum Lee, Seung-ryul Lee
  • Patent number: 7995380
    Abstract: A memory cell includes a pull-up element that exhibits a refresh behavior that is dependent on the data value stored in the memory cell. The pull-up element is an NDR FET connected between a high voltage source and a storage node of the memory cell. The NDR FET receives a pulsed gate bias signal, wherein each pulse turns on the NDR FET when a logic HIGH value is stored at the storage node, and further wherein each pulse does not turn on the NDR FET when a logic LOW value is stored at the storage node. In this fashion a DRAM cell (and device) can be operated without a separate refresh cycle.
    Type: Grant
    Filed: October 13, 2008
    Date of Patent: August 9, 2011
    Assignee: Synopsys, Inc.
    Inventor: Tsu-Jae King Liu
  • Publication number: 20110140070
    Abstract: Provided are three-dimensional semiconductor devices and methods of fabricating and operating the same. A device includes a connection node interposed between first and second nodes, a semiconductor pattern connected to the connection node, a plurality of memory elements connected to the semiconductor pattern, word lines connected to the memory elements, and a control electrode disposed opposite the semiconductor pattern. The control electrode selectively controls an electrical connection between the connection node and the memory element, thereby preventing an un-intended current path in a cross-point 3D memory device.
    Type: Application
    Filed: September 25, 2008
    Publication date: June 16, 2011
    Inventor: Sung-Dong Kim
  • Patent number: 7800092
    Abstract: A phase change memory element and method of forming the same. The memory element includes a phase change material layer electrically coupled to first and second conductive material layers. A energy conversion layer is formed in association with the phase change material layer, and electrically coupled to a third conductive material layer. An electrically isolating material layer is formed between the phase change material layer and the energy conversion layer.
    Type: Grant
    Filed: August 15, 2006
    Date of Patent: September 21, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Jun Liu, Mike Violette, Jon Daley
  • Patent number: 7615810
    Abstract: An electro-optical device includes first and second substrates that are bonded to each other, the first substrate having an extended portion extended from the second substrate on a first side thereof in plan view, a plurality of pixel units that are disposed in a pixel region on the first substrate and individually have pixel electrodes, a data line driving circuit that is disposed along the first side in a peripheral region around the pixel region so as to supply an image signal to the pixel units, a plurality of external circuit connecting terminals that are arranged along the first side in a region of the peripheral region on the extended portion, an image signal line that is relayed around the data line driving circuit from the plurality of external circuit connecting terminals and has a first wiring line portion wired in a direction along the first side between the data line driving circuit and the pixel region, and a sealant that bonds the first and second substrates to each other in a sealing region ar
    Type: Grant
    Filed: February 7, 2006
    Date of Patent: November 10, 2009
    Assignee: Seiko Epson Corporation
    Inventor: Masao Murade
  • Publication number: 20090034319
    Abstract: A phase change memory device includes wordlines extending along a direction on a semiconductor substrate. Low concentration semiconductor patterns are disposed on the wordlines. Node electrodes are disposed on the low concentration semiconductor patterns. Schottky diodes are disposed between the low concentration semiconductor patterns and the node electrodes. Phase change resistors are disposed on the node electrodes.
    Type: Application
    Filed: May 14, 2008
    Publication date: February 5, 2009
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Dae-Won HA, Gi-Tae JEONG
  • Patent number: 7482621
    Abstract: A bistable electrical device that is convertible between a low resistance state and a high resistance state. The device includes at least one layer of organic low conductivity material that is sandwiched between two electrodes. A buffer layer is located between the organic layer and at least one of the electrodes. The buffer layer includes particles in the form of flakes or dots of a low conducting material or insulating material that are present in a sufficient amount to only partially cover the electrode surface. The presence of the buffer layer controls metal migration into the organic layer when voltage pulses are applied between the electrodes to convert the device back and forth between the low and high resistance states.
    Type: Grant
    Filed: February 2, 2004
    Date of Patent: January 27, 2009
    Assignee: The Regents of the University of California
    Inventors: Yang Yang, Liping Ma
  • Publication number: 20080303013
    Abstract: An integrated circuit includes a contact, a first spacer, and a first electrode including a first portion and a second portion. The second portion contacts the contact and is defined by the first spacer. The integrated circuit includes a second electrode and resistivity changing material between the second electrode and the first portion of the first electrode.
    Type: Application
    Filed: June 11, 2007
    Publication date: December 11, 2008
    Inventors: Thomas Happ, Jan Boris Philipp, Ulrike Gruening-von Schwerin
  • Publication number: 20080203374
    Abstract: A phase-change memory is provided. The phase-change memory comprises a substrate. A first electrode is formed on the substrate. A circular or linear phase-change layer is electrically connected to the first electrode. A second electrode formed on the phase-change layer and electrically connected to the phase-change layer, wherein at least one of the first electrode and the second electrode comprises phase-change material.
    Type: Application
    Filed: January 30, 2008
    Publication date: August 28, 2008
    Applicants: Industrial Technology Research Institute, Powerchip Semiconductor Corp., NANYA TECHNOLOGY CORPORATION, ProMOS Technologies Inc., Winbond Electronics Corp.
    Inventors: Yen Chuo, Hong-Hui Hsu
  • Patent number: 7323349
    Abstract: A method of fabricating resistor memory array includes preparing a silicon substrate; depositing a bottom electrode, a sacrificial layer, and a hard mask layer on a substrate P+ layer; masking, patterning and etching to remove, in a first direction, a portion of the hard mask, the sacrificial material, the bottom electrode; depositing a layer of silicon oxide; masking, patterning and etching to remove, in a second direction perpendicular to the first direction, a portion of the hard mask, the sacrificial material, the bottom electrode;, and over etching to an N+ layer and at least 100 nm of the silicon substrate; depositing of a layer of silicon oxide; etching to remove any remaining hard mask and any remaining sacrificial material; depositing a layer of CMR material; depositing a top electrode; applying photoresist, patterning the photoresist and etching the top electrode; and incorporating the memory array into an integrated circuit.
    Type: Grant
    Filed: May 2, 2005
    Date of Patent: January 29, 2008
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Sheng Teng Hsu, Jong-Jan Lee, Jer-Shen Maa, Douglas J. Tweet, Wei-Wei Zhuang