Vertical Direct Transistor Of The Same Conductivity Type Having Different Characteristics, (e.g. Darlington Transistor) (epo) Patents (Class 257/E27.056)
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Patent number: 9520388Abstract: In one embodiment, a semiconductor device may include a first transistor having a first current carrying electrode, a second current carrying electrode, and a control electrode; a first bipolar transistor having a collector coupled to the first current carrying electrode of the first transistor, a base coupled to the second current carrying electrode of the first transistor, and an emitter of the first bipolar transistor coupled to a first node of the semiconductor device. In an embodiment, the first node is connected to a terminal of a semiconductor package. An embodiment may include a semiconductor component coupled between the base of the first bipolar transistor and the emitter of the second bipolar transistor.Type: GrantFiled: November 3, 2014Date of Patent: December 13, 2016Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: David M. Heminger, Thomas Keena
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Patent number: 8536642Abstract: A vertical transistor comprises a semiconductor region, a pillar region formed on the semiconductor region, a gate insulating film formed so as to cover a side surface of the pillar region, a gate electrode formed on the gate insulating film, a first impurity diffusion region formed in an upper portion of the pillar region, and a second impurity diffusion region formed in the semiconductor region so as to surround the pillar region. The first impurity diffusion region is formed so as to be spaced from the side surface of the pillar region.Type: GrantFiled: October 12, 2010Date of Patent: September 17, 2013Assignee: Elpida Memory, Inc.Inventor: Kazuo Ogawa
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Patent number: 8450179Abstract: A method for fabricating a semiconductor device having a first and second bipolar devices of the same dopant type includes: depositing a dielectric layer over a semiconductor layer, depositing a gate conductor layer over the dielectric layer, defining base regions of both bipolar devices, removing the gate conductor layer and dielectric layer in the base regions, depositing a base layer on the gate conductor layer and on the exposed semiconductor layer in the base regions, depositing an insulating layer over the base layer, forming a photoresist layer and defining emitter regions of both bipolar devices, removing the photoresist layer in the emitter regions thereby forming two emitter windows, masking the emitter window of the first bipolar device and exposing the base layer in the base region of the second bipolar device to an additional emitter implant through the associated emitter window.Type: GrantFiled: February 2, 2007Date of Patent: May 28, 2013Assignee: Texas Instruments Deutschland GmbHInventors: Badih El-Kareh, Hiroshi Yasuda, Scott Balster
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Patent number: 8227836Abstract: A technology which allows a reduction in the thermal resistance of a semiconductor device and the miniaturization thereof is provided. The semiconductor device has a plurality of unit transistors Q, transistor formation regions 3a, 3b, and 3e each having a first number (e.g., seven) of the unit transistors Q, and transistor formation regions 3c and 3d each having a second number (e.g., four) of the unit transistors Q. The transistor formation regions 3c and 3d are located between the transistor formation regions 3a, 3b, 3e, and 3f, and the first number is larger than the second number.Type: GrantFiled: October 15, 2009Date of Patent: July 24, 2012Assignee: Murata Manufacturing Co., Ltd.Inventors: Satoshi Sasaki, Yasunari Umemoto, Yasuo Osone, Tsutomu Kobori, Chushiro Kusano, Isao Ohbu, Kenji Sasaki
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Publication number: 20120133025Abstract: An apparatus includes an electrostatic discharge (ESD) protection device configured to protect a circuit from ESD conditions. The protection device includes an emitter region having a first diffusion polarity; a collector region laterally spaced apart from the emitter region, and having the first diffusion polarity; and a barrier region interposed laterally between the emitter region and the collector region while contacting the emitter region. The barrier region has a second diffusion polarity opposite from the first diffusion polarity. The device can further include a base region having the second diffusion polarity, and laterally surrounding and underlying the emitter region and the barrier region. The barrier region can have a higher dopant concentration than the base region, and block a lateral current flow between the collector and emitter regions, thus forming a vertical ESD device having enhanced ESD performance.Type: ApplicationFiled: November 29, 2010Publication date: May 31, 2012Applicant: ANALOG DEVICES, INC.Inventors: David Clarke, Paul Daly, Patrick McGuinness, Bernard Stenson, Anne Deignan
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Patent number: 7723781Abstract: A method is provided for forming a low-temperature vertical gate insulator in a vertical thin-film transistor (V-TFT) fabrication process. The method comprises: forming a gate, having vertical sidewalls and a top surface, overlying a substrate insulation layer; depositing a silicon oxide thin-film gate insulator overlying the gate; plasma oxidizing the gate insulator at a temperature of less than 400° C., using a high-density plasma source; forming a first source/drain region overlying the gate top surface; forming a second source/drain region overlying the substrate insulation layer, adjacent a first gate sidewall; and, forming a channel region overlying the first gate sidewall, in the gate insulator interposed between the first and second source/drain regions. When the silicon oxide thin-film gate insulator is deposited overlying the gate a Si oxide layer, a low temperature deposition process can be used, so that a step-coverage of greater than 65% can be obtained.Type: GrantFiled: April 23, 2008Date of Patent: May 25, 2010Assignee: Sharp Laboratories of America, Inc.Inventors: Pooran Chandra Joshi, Apostolos T. Voutsas, John W. Hartzell
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Patent number: 7670911Abstract: A method for manufacturing a vertical MOS transistor comprising forming a protrusion-like region, forming a silicon oxide film on an exposed surface of the protrusion-like region and a surface of the silicon semiconductor substrate, increasing a film thickness of at least the silicon oxide film on the silicon semiconductor substrate by thermal oxidation to form a first insulating film, forming a lower impurity diffusion region, removing the silicon oxide film to expose a silicon side of the protrusion-like region, thermally oxidizing the silicon side to form a second insulating film having a thinner film thickness than a film thickness of the first insulating film, forming a gate electrode over a side of the protrusion-like region, and forming an upper impurity diffusion region.Type: GrantFiled: July 31, 2008Date of Patent: March 2, 2010Assignee: Elpida Memory, Inc.Inventor: Kiyonori Oyu
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Patent number: 7586130Abstract: A vertical field effect transistor includes: an active region with a bundle of linear structures functioning as a channel region; a lower electrode, functioning as one of source and drain regions; an upper electrode, functioning as the other of the source and drain regions; a gate electrode for controlling the electric conductivity of at least a portion of the bundle of linear structures included in the active region; and a gate insulating film arranged between the active region and the gate electrode to electrically isolate the gate electrode from the bundle of linear structures. The transistor further includes a dielectric portion between the upper and lower electrodes. The upper electrode is located over the lower electrode with the dielectric portion interposed and includes an overhanging portion sticking out laterally from over the dielectric portion. The active region is located right under the overhanging portion of the upper electrode.Type: GrantFiled: February 1, 2006Date of Patent: September 8, 2009Assignee: Panasonic CorporationInventors: Takahiro Kawashima, Tohru Saitoh, Takeshi Takagi
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Patent number: 7521733Abstract: For the integration of an npn bipolar transistor with a hetero bipolar transistor, a placeholder layer is generated in a base region of the hetero bipolar transistor after structuring a collector structure for both types of transistors, wherein the placeholder layer is not present in a base region of the bipolar transistor. After generating the base of the bipolar transistor, the base of the bipolar transistor is covered, whereupon the placeholder layer is removed and the base of the hetero bipolar transistor is generated in the places where the placeholder layer has been removed. The emitter structure is again generated equally for both types of transistors so that an integrated circuit results which includes bipolar transistors and hetero bipolar transistors whose collector structures and/or whose emitter structures consist of identical production layers. Thus, space-saving and cost-effective integrated circuits may be produced benefiting from the advantages of both types of transistors.Type: GrantFiled: November 12, 2004Date of Patent: April 21, 2009Assignee: Infineon Technologies AGInventors: Claus Dahl, Karl-Heinz Mueller, Cajetan Wagner
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Patent number: 7495312Abstract: A method for producing vertical bipolar transistors having different voltage breakdown and high-frequency performance characteristics on a single die comprises forming, for each of the vertical bipolar transistors, a buried collector region, and base and emitter regions above the buried collector region. The lateral extensions and locations of the base and emitter regions and of the buried collector region are, for each of the vertical bipolar transistors, selected to create an overlap between the base and emitter regions, and the buried collector region, as seen from above, wherein at least some of the overlaps are selected to be different.Type: GrantFiled: September 30, 2005Date of Patent: February 24, 2009Assignee: Infineon Technologies AGInventors: Patrick Algotsson, Hans Norström, Karin Andersson