For Gate Of Heterojunction Field-effect Devices (epo) Patents (Class 257/E29.14)
  • Patent number: 11935944
    Abstract: The on-state characteristics of a transistor are improved and thus, a semiconductor device capable of high-speed response and high-speed operation is provided. A highly reliable semiconductor device showing stable electric characteristics is made. The semiconductor device includes a transistor including a first oxide layer; an oxide semiconductor layer over the first oxide layer; a source electrode layer and a drain electrode layer in contact with the oxide semiconductor layer; a second oxide layer over the oxide semiconductor layer; a gate insulating layer over the second oxide layer; and a gate electrode layer over the gate insulating layer. An end portion of the second oxide layer and an end portion of the gate insulating layer overlap with the source electrode layer and the drain electrode layer.
    Type: Grant
    Filed: September 2, 2022
    Date of Patent: March 19, 2024
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Hideomi Suzawa, Shinya Sasagawa, Motomu Kurata, Masashi Tsubuku
  • Patent number: 9640620
    Abstract: A method of fabricating a gate stack for a power transistor device includes thermally oxidizing a surface of a Group IIIA-N layer on a substrate to form a first dielectric layer of an oxide material that is >5A thick. A second dielectric layer being silicon nitride or silicon oxynitride is deposited on the first dielectric layer. A metal gate electrode is formed on the second dielectric layer.
    Type: Grant
    Filed: November 3, 2014
    Date of Patent: May 2, 2017
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventor: Nicholas Stephen Dellas
  • Patent number: 8785944
    Abstract: A high electron mobility transistor (HEMT) according to example embodiments includes a first semiconductor layer, a second semiconductor layer on the first semiconductor layer, and a reverse diode gate structure on the second semiconductor layer. A source and a drain may be on at least one of the first semiconductor layer and the second semiconductor layer. A gate electrode may be on the reverse diode gate structure.
    Type: Grant
    Filed: December 6, 2012
    Date of Patent: July 22, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: In-jun Hwang, Jae-joon Oh, Jae-won Lee, Hyo-ji Choi, Jong-bong Ha
  • Patent number: 8492840
    Abstract: An object is to provide a semiconductor device including an oxide semiconductor, which maintains favorable characteristics and achieves miniaturization. The semiconductor device includes an oxide semiconductor layer, a source electrode and a drain electrode in contact with the oxide semiconductor layer, a gate electrode overlapping with the oxide semiconductor layer, and a gate insulating layer provided between the oxide semiconductor layer and the gate electrode, in which the source electrode and the drain electrode each include a first conductive layer, and a second conductive layer having a region which extends in a channel length direction from an end portion of the first conductive layer.
    Type: Grant
    Filed: January 18, 2011
    Date of Patent: July 23, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Hiromichi Godo, Hideomi Suzawa, Shinya Sasagawa, Motomu Kurata, Mayumi Mikami
  • Patent number: 8222099
    Abstract: A semiconductor device and a method of manufacturing the same are provided. A multi-component high-k interface layer containing elements of the substrate is formed from a ultra-thin high-k dielectric material in a single-layer structure of atoms by rapid annealing in the manufacturing of a CMOS transistor by the replacement gate process, and a high-k gate dielectric layer with a higher dielectric constant and a metal gate layer are formed thereon. The EOT of the device is effectively decreased, and the diffusion of atoms in the high-k gate dielectric layer from an upper level thereof is effectively prevented by the optimized high-k interface layer at high-temperature treatment. Thus, the present invention may also avoid the growth of the interface layers and the degradation of carrier mobility.
    Type: Grant
    Filed: June 24, 2010
    Date of Patent: July 17, 2012
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Wenwu Wang, Kai Han, Shijie Chen, Xiaolei Wang, Dapeng Chen
  • Patent number: 8217456
    Abstract: Disclosed herein is a field effect transistor (FET), device including a FET, and a method of making the same. In embodiments of the disclosure, a semiconductor-on-insulator (SOI) substrate is provided. The SOI substrate includes a body having a first conductivity type formed in the semiconductor layer of the SOI substrate, the body including a first body region connecting a second body region to a third body region; and a source and a drain, each having a second conductivity type, disposed on opposite sides of the first body region. A first gate electrode having a second work function is disposed above the first body region; and a second gate electrode having a first work function disposed above the second and third body regions. A first gate dielectric layer may be disposed vertically between the first body region and the first gate electrode, and a second gate dielectric layer may be disposed vertically between the second and third body regions and the second gate electrode.
    Type: Grant
    Filed: March 11, 2011
    Date of Patent: July 10, 2012
    Assignee: International Business Machines Corporation
    Inventors: Brent A. Anderson, Andres Bryant, Edward J. Nowak
  • Patent number: 7829916
    Abstract: Source and drain electrodes are each formed by an alternation of first and second layers made from a germanium and silicon compound. The first layers have a germanium concentration comprised between 0% and 10% and the second layers have a germanium concentration comprised between 10% and 50%. At least one channel connects two second layers respectively of the source electrode and drain electrode. The method comprises etching of source and drain zones, connected by a narrow zone, in a stack of layers. Then superficial thermal oxidation of said stack is performed so a to oxidize the silicon of the germanium and silicon compound having a germanium concentration comprised between 10% and 50% and to condense the germanium Ge. The oxidized silicon of the narrow zone is removed and a gate dielectric and a gate are deposited on the condensed germanium of the narrow zone.
    Type: Grant
    Filed: May 23, 2006
    Date of Patent: November 9, 2010
    Assignee: Commissariat a L'Energie Atomique
    Inventors: Yves Morand, Thierry Poiroux, Maud Vinet
  • Patent number: 7671383
    Abstract: A semiconductor device, includes: a first conductivity type semiconductor base having a main face; a hetero semiconductor region contacting the main face of the semiconductor base and forming a hetero junction in combination with the semiconductor base, the semiconductor base and the hetero semiconductor region in combination defining a junction end part; a gate insulating film defining a junction face in contact with the semiconductor base and having a thickness; and a gate electrode disposed adjacent to the junction end part via the gate insulating film and defining a shortest point in a position away from the junction end part by a shortest interval, a line extending from the shortest point to a contact point vertically relative to the junction face, forming such a distance between the contact point and the junction end part as to be smaller than the thickness of the gate insulating film contacting the semiconductor base.
    Type: Grant
    Filed: March 6, 2007
    Date of Patent: March 2, 2010
    Assignee: Nissan Motor Co., Ltd.
    Inventors: Tetsuya Hayashi, Masakatsu Hoshi, Yoshio Shimoida, Hideaki Tanaka, Shigeharu Yamagami
  • Patent number: 7566918
    Abstract: Field effect transistors having a power density of greater than 5 W/mm when operated at a frequency of at least 30 GHz are provided. The power density of at least 5 W/mm may be provided at a drain voltage of 28 V. Transistors with a power density of at least 8 W/mm when operated at 40 GHz at a drain voltage of 28 V are also provided.
    Type: Grant
    Filed: February 23, 2006
    Date of Patent: July 28, 2009
    Assignee: Cree, Inc.
    Inventors: Yifeng Wu, Primit Parikh, Marcia Moore
  • Publication number: 20090050936
    Abstract: A nitride semiconductor device includes a RESURF layer containing p-type InxGa1?xN (0<x?1); a channel layer, formed on this RESURF layer, containing InyGa1?yN (0?y<x); a barrier layer including a nitride semiconductor layer, formed on this channel layer, having a wider energy gap than the channel layer; and a prescribed electrode.
    Type: Application
    Filed: August 21, 2008
    Publication date: February 26, 2009
    Inventor: Tohru OKA
  • Publication number: 20090039448
    Abstract: A thin film transistor disposed on a substrate is provided. The thin film transistor includes a gate, a semi-conductive layer, a gate insulator, a source and a drain. The gate insulator is located between the gate and the semi-conductive layer. A light shows a specific color after passing through the gate insulator. The source and the drain are disposed on the semi-conductive layer. A pixel structure and a liquid crystal display panel having the pixel structure are also provided. The liquid crystal display panel can display colorful images without disposing a color filter array additionally so that the manufacturing process of the liquid crystal panel is simple and the manufacturing cost of the liquid crystal panel is low.
    Type: Application
    Filed: October 26, 2007
    Publication date: February 12, 2009
    Applicant: AU OPTRONICS CORPORATION
    Inventors: Chiao-Shun Chuang, Fang-Chung Chen, Han-Ping David Shieh
  • Publication number: 20080296621
    Abstract: A III-nitride heterojunction semiconductor device having a III-nitride heterojunction that includes a discontinuous two-dimensional electron gas under a gate thereof.
    Type: Application
    Filed: May 22, 2008
    Publication date: December 4, 2008
    Inventors: Paul Bridger, Robert Beach
  • Publication number: 20080203433
    Abstract: A high electron mobility transistor includes first, second and third compound semiconductor layers. The second compound semiconductor layer has a first interface with the first compound semiconductor layer. The third compound semiconductor layer is disposed over the first compound semiconductor layer. The third compound semiconductor layer has at least one of lower crystallinity and relaxed crystal structure as compared to the second compound semiconductor layer. The gate electrode is disposed over the third compound semiconductor layer. Source and drain electrodes are disposed over the second compound semiconductor layer. The two-dimensional carrier gas layer is generated in the first compound semiconductor layer. The two-dimensional carrier gas layer is adjacent to the first interface. The two-dimensional carrier gas layer either is absent under the third compound semiconductor layer or is reduced in at least one of thickens and carrier gas concentration under the third compound semiconductor layer.
    Type: Application
    Filed: February 27, 2008
    Publication date: August 28, 2008
    Applicant: SANKEN ELECTRIC CO., LTD.
    Inventor: Ken Sato
  • Patent number: 7402844
    Abstract: A unit cell of a metal-semiconductor field-effect transistor (MESFET) is provided. The unit cell includes a MESFET having a source, a drain and a gate. The gate is between the source and the drain and on a channel layer of the MESFET. The channel layer has a first thickness on a source side of the channel layer and a second thickness, thicker than the first thickness, on a drain side of the channel layer. Related methods of fabricating MESFETs are also provided herein.
    Type: Grant
    Filed: November 29, 2005
    Date of Patent: July 22, 2008
    Assignee: Cree, Inc.
    Inventor: Saptharishi Sriram
  • Patent number: 7388236
    Abstract: Field effect transistors having a power density of greater than 40 W/mm when operated at a frequency of at least 4 GHz are provided. The power density of at least 40 W/mm may be provided at a drain voltage of 135 V. Transistors with greater than 60% PAE and a power density of at least 5 W/mm when operated at 10 GHz at drain biases from 28 V to 48 V are also provided.
    Type: Grant
    Filed: March 29, 2006
    Date of Patent: June 17, 2008
    Assignee: Cree, Inc.
    Inventors: Yifeng Wu, Primit Parikh, Umesh Mishra, Marcia Moore
  • Patent number: 7355215
    Abstract: High electron mobility transistors (HEMT) are provided having an output power of greater than 3.0 Watts when operated at a frequency of at least 30 GHz. The HEMT has a power added efficiency (PAE) of at least about 20 percent and/or a gain of at least about 7.5 dB. The total width of the HEMT is less than about 6.0 mm.
    Type: Grant
    Filed: December 6, 2004
    Date of Patent: April 8, 2008
    Assignee: Cree, Inc.
    Inventors: Primit Parikh, Yifeng Wu, Adam William Saxler
  • Patent number: 7329909
    Abstract: A multi-layered structure in which a p-3C-SiC layer 102 is formed above a p-Si substrate 101 is formed, above which an I-GaN layer (channel layer) 103, an n-AlGaN layer (barrier layer) 104 are formed. A source electrode 201, a drain electrode 202, and a gate electrode 203 are formed above the n-AlGaN layer 104. The source electrode 201 and the drain electrode 202 form an ohmic contact with the n-AlGaN layer 104. The gate electrode 203 forms a Schottky junction with the n-AlGaN layer 104.
    Type: Grant
    Filed: June 10, 2005
    Date of Patent: February 12, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Wataru Saito, Ichiro Omura, Kouhei Morizuka
  • Patent number: 7304330
    Abstract: A nitride semiconductor device, which includes a III-V Group nitride semiconductor layer being composed of a III Group element consisting of at least one of a group containing of gallium, aluminum, boron and indium and V Group element consisting of at least nitrogen among a group consisting of nitrogen, phosphorus and arsenic, including a first nitride semiconductor layer including the III-V Group nitride semiconductor layer being deposited on a substrate, a second nitride semiconductor layer including the III-V Group nitride semiconductor layer being deposited on the first nitride semiconductor and not containing aluminum and a control electrode making Schottky contact with the second nitride semiconductor layer wherein the second nitride semiconductor layer includes a film whose film forming temperature is lower than the first nitride semiconductor layer.
    Type: Grant
    Filed: November 26, 2004
    Date of Patent: December 4, 2007
    Assignee: New Japan Radio Co., Ltd.
    Inventor: Atsushi Nakagawa