With Inverted Transistor Structure (epo) Patents (Class 257/E29.291)
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Patent number: 7525120Abstract: A thin film transistor array substrate includes a gate line formed on a substrate, a data line formed on the substrate intersecting with the gate line to define a pixel region, a thin film transistor formed at the intersection of the gate line and the data line, the thin film transistor including gate electrode formed on the substrate, a gate insulating layer formed on the gate electrode and the substrate, a semiconductor layer formed on the gate insulating layer, an ohmic contact layer on the semiconductor layer, and a source electrode and a drain electrode on the ohmic contact layer, and a transparent electrode material within the pixel region and connected to the drain electrode of the thin film transistor, wherein the gate insulating layer includes a gate insulating pattern underlying the data line and the transparent electrode material, and covering the gate line.Type: GrantFiled: March 12, 2007Date of Patent: April 28, 2009Assignee: LG Display Co., Ltd.Inventors: Kyoung Mook Lee, Seung Hee Nam, Jae Young Oh
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Publication number: 20090057668Abstract: A display element and a method of manufacturing the same are provided. The method comprises the following steps: forming a first patterned conducting layer with a gate on a substrate and a dielectric layer thereon; forming a patterned semiconductor layer on the dielectric layer, wherein the patterned semiconductor layer has a channel region, a source and a drain, and wherein the source and the drain lie on the opposite sides of the channel region; selectively depositing a barrier layer, which only wraps the patterned semiconductor layer; forming a second patterned conducting layer on the barrier layer and above the source and the drain. In the display element manufactured by the method, the barrier layer only wraps the patterned semiconductor layer.Type: ApplicationFiled: May 6, 2008Publication date: March 5, 2009Applicant: AU Optronics corp.Inventors: Po-Lin Chen, Wen-Ching Tsai, Chun-Nan Lin, Kuo-Yuan Tu
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Publication number: 20090047761Abstract: An object is to provide a manufacturing method of a microcrystalline semiconductor film with favorable quality over a large-area substrate. After forming a gate insulating film over a gate electrode, in order to improve quality of a microcrystalline semiconductor film formed in an initial stage, glow discharge plasma is generated by supplying high-frequency powers with different frequencies, and a lower part of the film near an interface with the gate insulating film is formed under a first film formation condition, which is low in film formation rate but results in a good quality film. Thereafter, an upper part of the film is deposited under a second film formation condition with higher film formation rate, and further, a buffer layer is stacked on the microcrystalline semiconductor film.Type: ApplicationFiled: August 12, 2008Publication date: February 19, 2009Applicant: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Sachiaki Teduka, Satoshi Toriumi, Makoto Furuno, Yasuhiro Jinbo, Koji Dairiki, Hideaki Kuwabara
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Publication number: 20090047759Abstract: After a gate insulating film is formed over a gate electrode, in order to improve the quality of a microcrystalline semiconductor film which is formed in an early stage of deposition, a film near an interface with the gate insulating film is formed under a first deposition condition in which a deposition rate is low but the quality of a film to be formed is high, and then, a film is further deposited under a second deposition condition in which a deposition rate is high. Then, a buffer layer is formed to be in contact with the microcrystalline semiconductor film. Further, plasma treatment with a rare gas such as argon or hydrogen plasma treatment is performed before formation of the film under the first deposition condition for removing adsorbed water on a substrate.Type: ApplicationFiled: August 1, 2008Publication date: February 19, 2009Applicant: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Sachiaki Teduka, Satoshi Toriumi, Makoto Furuno, Yasuhiro Jinbo, Koji Dairiki, Hideaki Kuwabara
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Patent number: 7479417Abstract: A method for manufacturing a pixel electrode contact structure of a thin-film transistors liquid crystal display is disclosed. First, a transparent substrate having a first insulating layer thereon is provided. Afterward, a first metal layer and a second metal layer are sequentially formed on the substrate and then be patterned by a halftone technology and an etching process, wherein the second metal layer is removed within the pixel electrode contact area. In the meantime, the drain lines of the thin-film transistor comprising the first metal layer and the second metal layer are formed. Next, a patterned passivation layer is formed on the substrate. Finally, a pixel electrode layer directly connecting the first metal layers within the pixel electrode contact structure is formed on the substrate. This invention provides the pixel electrode contact structure with low contact resistance and prevents the current leakage from the drain line to the storage capacitor.Type: GrantFiled: October 23, 2007Date of Patent: January 20, 2009Assignee: Au OptronicsInventor: Wen-Yi Shyu
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Patent number: 7476898Abstract: A TFT of the present invention includes a gate electrode, a gate insulating film and a first semiconductor film which are sequentially formed on an insulating substrate, a second semiconductor film including a high density impurity which is formed on the first semiconductor film while being separated into portions at grade and a first electrode and a second electrode, each of which is formed on the separated second semiconductor film. Further, a peripheral portion of the first semiconductor film includes a protruded portion toward the outside from an edge of the second semiconductor film, and a surface of the protruded portion is roughened. By roughening the surface of the protruded portion, an on-current of the TFT can be maintained and the leakage current can be suppressed.Type: GrantFiled: April 13, 2005Date of Patent: January 13, 2009Assignee: NEC LCD Technologies, Ltd.Inventors: Mitsuma Oishi, Masayuki Uehara
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Publication number: 20080308808Abstract: An exemplary TFT array substrate includes an insulating substrate, a gate electrode provided on the insulating substrate, a gate insulating layer covering the gate electrode and the insulating layer, an amorphous silicon (a-Si) pattern formed on the gate insulating layer, a heavily doped a-Si pattern formed on the a-Si pattern, a source electrode formed on the gate insulating layer and the heavily doped a-Si pattern and a drain electrode formed on the gate insulating layer and the heavily doped a-Si pattern. The source electrode and the drain electrode are isolated by a slit formed between the source electrode and the drain electrode, and the a-Si pattern includes a high resistivity portion corresponding to the slit whose resistance is higher than a resistance of the a-Si material.Type: ApplicationFiled: June 16, 2008Publication date: December 18, 2008Inventors: Chih-Chieh Hsu, Shuo-Ting Yan
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Patent number: 7446337Abstract: A thin film transistor substrate structure for using a horizontal electric field includes a substrate; a gate line and a first common line formed on the substrate parallel to each other from a first conductive layer; a gate insulating film formed on the substrate, the gate line, and the first common line; a data line formed from a second conductive layer on the gate insulating film crossing the gate line and the common line with the gate insulating film therebetween to define a pixel area; a thin film transistor connected to the gate line and the data line; a protective film covering the data line and the thin film transistor; a common electrode formed from a third conductive layer connected to the common line through a hole passing through the protective film and the gate insulating film; and a pixel electrode formed from the second conductive layer connected to the thin film transistor to define a horizontal electric field between the pixel electrode and the common electrode.Type: GrantFiled: October 10, 2006Date of Patent: November 4, 2008Assignee: LG Display Co., Ltd.Inventors: Soon Sung Yoo, Oh Nam Kwon, Heung Lyul Cho
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Publication number: 20080258146Abstract: A fabrication method of a TFT includes successively forming four thin films containing a first conductive layer, an insulation layer, a semiconductor layer, and a second conductive layer on a substrate, performing a first PEP process to pattern the four thin films for forming a semiconductor island and a gate electrode with the semiconductor layer and the first conductive layer respectively. Then, a laser ablation process is performed to define a channel pattern in the four thin films and remove a portion of the second conductive layer so that unconnected source electrode and drain electrode are formed with the second conductive layer.Type: ApplicationFiled: June 26, 2008Publication date: October 23, 2008Inventor: Han-Tu Lin
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Patent number: 7432564Abstract: A method for fabricating a pixel structure is provided. First, a gate, a scan line, and a first terminal are formed on a substrate. A gate insulating layer is formed over the substrate to cover the gate, the scan line, and the first terminal. After defining the semiconductor layer, the gate insulating layer is patterned to exposure the first terminal. A transparent conductive layer is formed over the substrate and a patterned photoresist layer is formed on the transparent conductive layer. The transparent conductive layer is patterned using the patterned photoresist layer as a mask, so as to define a source, a drain, a data line, a pixel electrode, a second terminal, and a contact pad. Because only four photomasks are used to implement the above method for fabricating the pixel structure, the cost of manufacturing can be reduced.Type: GrantFiled: December 20, 2007Date of Patent: October 7, 2008Assignee: Chunghwa Picture Tubes, Ltd.Inventors: Ta-Jung Su, Yea-Chung Shih, Cheng-Fang Su
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Publication number: 20080237596Abstract: A liquid crystal display (LCD) includes: a first substrate divided into a pixel part and first and second pad parts; a gate electrode and a gate line formed at the pixel part of the first substrate; an active pattern formed as an island on the gate electrode and having a width smaller than the gate electrode; an insulation film formed on the first substrate and having first and second contact holes exposing source and drain regions of the active pattern, respectively; source and drain electrodes formed at the pixel part of the first substrate and electrically connected with the source and drain regions of the active pattern via the first and second contact holes; a data line formed at the pixel part of the first substrate and crossing the gate line to define a pixel region; an etch stopper positioned between the source and drain electrodes and formed as an insulation film; a pixel electrode electrically connected with the drain electrode; and a second substrate attached with the first substrate in a facing maType: ApplicationFiled: December 18, 2007Publication date: October 2, 2008Applicant: L.G.PHILIPS LCD CO., LTD.Inventors: Dong-Yung KIM, Chang-Bin LEE
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Patent number: 7413940Abstract: A fabrication method of a TFT includes successively forming four thin films containing a first conductive layer, an insulation layer, a semiconductor layer, and a second conductive layer on a substrate, performing a first PEP process to pattern the four thin films for forming a semiconductor island and a gate electrode with the semiconductor layer and the first conductive layer respectively. Then, a laser ablation process is performed to define a channel pattern in the four thin films and remove a portion of the second conductive layer so that unconnected source electrode and drain electrode are formed with the second conductive layer.Type: GrantFiled: September 11, 2006Date of Patent: August 19, 2008Assignee: AU Optronics Corp.Inventor: Han-Tu Lin
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Patent number: 7408198Abstract: A thin film transistor (TFT) including a gate, a semiconductor layer, a source and a drain is provided. The gate has a control part, a connection part and a capacitance compensation part. The connection part is disposed between the control part and the capacitance compensation part for joining the two parts together. The semiconductor layer is disposed over the gate, the source and the drain are disposed on the semiconductor layer. An end of the drain overlaps the control part of the gate with a first region for composing a first parasitic capacitance; while another end of the drain overlaps the capacitance compensation part of the gate with a second region for composing a second parasitic capacitance. In a TFT array with the TFT, the sum of the first parasitic capacitance and the second parasitic capacitance is a constant.Type: GrantFiled: February 13, 2006Date of Patent: August 5, 2008Assignee: Chunghwa Picture Tubes, Ltd.Inventor: Wen-Hsiung Liu
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Patent number: 7405120Abstract: Disclosed herein is a method of manufacturing a gate insulator and a thin film transistor (“TFT”) incorporating the gate insulator, including forming an oxygen-containing, conductive gate on a substrate; forming a gate insulator material layer on the substrate so as to cover the gate; and applying a heat treatment so as to diffuse oxygen from the oxygen-containing gate layer into the gate insulating material layer thereby forming the gate insulator.Type: GrantFiled: March 26, 2007Date of Patent: July 29, 2008Assignee: Samsung Electronics Co., Ltd.Inventors: Ho-nyeon Lee, Ick-hwan Ko
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Patent number: 7365817Abstract: The present invention relates to a multi-domain, specifically 4-domain, liquid crystal display and a method for manufacturing the same. In one aspect, the liquid crystal display includes a pair of opposed substrates and a liquid crystal injected and sealed between the substrates. A first region and a second region on the first substrate have different alignment directions due to a photosensitive alignment film formed on the first substrate. Each pixel on the second substrate exhibits four different liquid crystal alignment directions when an electric field is applied. This occurs because a fringe field is generated by a slit-patterned pixel electrode of the second substrate, and different alignment directions are formed in the first substrate.Type: GrantFiled: October 4, 2001Date of Patent: April 29, 2008Assignee: LG.Philips LCD Co., Ltd.Inventors: Do Hee Kwon, Jang Jin Yoo
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Patent number: 7361929Abstract: A field-effect transistor includes source, drain, and gate electrodes; a crystalline or polycrystalline layer of inorganic semiconductor; and a dielectric layer. The layer of inorganic semiconductor has an active channel portion physically extending from the source electrode to the drain electrode. The inorganic semiconductor has a stack of 2-dimensional layers in which intra-layer bonding forces are covalent and/or ionic. Adjacent ones of the layers are bonded together by forces substantially weaker than covalent and ionic bonding forces. The dielectric layer is interposed between the gate electrode and the layer of inorganic semiconductor material. The gate electrode is configured to control a conductivity of an active channel part of the layer of inorganic semiconductor.Type: GrantFiled: April 4, 2007Date of Patent: April 22, 2008Assignees: Lucent Technologies Inc.Inventors: Ernst Bucher, Michael E. Gershenson, Christian Kloc, Vitaly Podzorov
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Patent number: 7338846Abstract: A method for fabricating a pixel structure is provided. First, a gate, a scan line, and a first terminal are formed on a substrate. A gate insulating layer is formed over the substrate to cover the gate, the scan line, and the first terminal. After defining the semiconductor layer, the gate insulating layer is patterned to exposure the first terminal. A transparent conductive layer is formed over the substrate and a patterned photoresist layer is formed on the transparent conductive layer. The transparent conductive layer is patterned using the patterned photoresist layer as a mask, so as to define a source, a drain, a data line, a pixel electrode, a second terminal, and a contact pad. Because only four photomasks are used to implement the above method for fabricating the pixel structure, the cost of manufacturing can be reduced.Type: GrantFiled: January 12, 2006Date of Patent: March 4, 2008Assignee: Chunghwa Picture Tubes, Ltd.Inventors: Ta-Jung Su, Yea-Chung Shih, Cheng-Fang Su
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Patent number: 7298013Abstract: Embodiments of the invention provide a semiconductor component and a method of manufacture thereof. A semiconductor component comprises: a gate electrode layer adjacent a substrate, and a gate dielectric layer adjacent the gate electrode layer. The gate dielectric layer comprises a monolayer of at least one compound, wherein the compound has an aromatic or a condensed aromatic molecular group. The molecular group is capable of ?-? interactions, which stabilize the monolayer. In an embodiment, the semiconductor component is an organic field effect transistor (OFET). In an embodiment of the invention, a method includes forming the monolayer using a liquid phase immersion process.Type: GrantFiled: December 20, 2005Date of Patent: November 20, 2007Assignee: Infineon Technologies AGInventors: Guenter Schmid, Marcus Halik, Hagen Klauk, Ute Zschieschang, Franz Effenberger, Markus Schutz, Steffen Maisch, Steffen Seifritz, Frank Buckel