Abstract: An exposure apparatus configured to project each of a plurality of radiation beams onto a respective location on a target, the plurality of radiation beams forming a desired dose pattern via a plurality of spot exposures, the nominal position of a characteristic point in the dose distribution of each of the spot exposures lying at points defining a first grid. The apparatus has, or is provided data from, a controller configured to: calculate a target intensity value for each of the plurality of radiation beams to expose the target to the desired dose pattern, the calculation using as input a rasterized representation of the desired dose pattern, the rasterized representation including a dose value defined at each of a plurality of points on a second grid, the first and second grids having the same geometry, and control the exposure apparatus to emit beams with the target intensity values.

Abstract: Disclosed is a system and method for patterning internal and/or external doubly-curved surfaces by use of a light source, three-dimensional scanning optics, computer controller, and a multi-axis robot. The system is capable of digitally receiving shape, location, and pattern data of a three-dimensional doubly-curved surface and applying said pattern over large areas with high precision in a seamless fashion.

Abstract: A panel having a deployable cover for an airbag module is provided. The panel having: an outer layer having a show surface and an inner surface opposite the show surface; a tear seam formed in the outer layer, the tear seam defined by a plurality of holes formed in the outer layer extending from the inner surface towards the show surface, wherein a residual wall thickness of the outer layer is located between each of the plurality of holes and the show surface, wherein the outer layer includes at least one filler material, that exhibits an absorbance of a wavenumber of a laser used to form the plurality of holes.

Abstract: In controlling light condensing irradiation with laser light using a spatial light modulator, an incident pattern of the laser light and respective refractive indices of first and second propagation media on a propagation path are acquired, the number of light condensing points, and the light condensing position and the light condensing intensity at each light condensing point are set, an aberration condition caused by the first and second propagation media is derived, and by taking the aberration condition into account, a modulation pattern to be presented in the spatial light modulator is designed. Further, in designing the modulation pattern, a design method focusing on an effect of a phase value at one pixel is used, and in evaluating the light condensing state at the light condensing point, a propagation function that takes the aberration condition into account is employed.

Abstract: Performing an electrokinetic treatment on different samples includes identifying an electrical signal that is appropriate for use in the treatment of each sample. The identification of the electrical signals results in different electrical signals being identified for different samples. The electrokinetic treatment of a sample results in that sample being exposed to the electrical signal identified for that sample. Accordingly, different samples are exposed to different electrical signals. An electrokinetic treatment employs one or more electrokinetic phenomena to cause movement of one or more agents within the sample relative to the sample. In some instances, the method also includes using each of the electrokinetically treated samples to generate an electrochemical sample and then performing an electrochemical analysis on each of the electrochemical samples.

Abstract: A housing element of a product includes a foil having a decorated side, where this decorated side of the foil is covered by a grip layer for realizing a grip effect. The other side of the foil is covered by a supportive layer. The grip layer may have a rib structure. Each of the supportive layer and the grip layer is applied to the foil in an injection molding process. A processing temperature of the material of the grip layer is significantly lower than an activation temperature of printing ink of a decorative covering of the foil, so that washout of the printing ink is prevented. Further, material of an adhesive layer of the foil is configured to establish adhesion to the material of the grip layer at this relatively low temperature.

Abstract: The disclosure relates, in one aspect, to porous solid-state films with controlled pore structures obtained by laser perforation. A thin laser-perforated film can comprise a slab defining a plurality of pores distributed in a predetermined arrangement, the plurality of pores having a distribution of sizes bound by a predetermined magnitude. In an aspect, the plurality of pores are formed in the slab with a laser having a wavelength less than about 400 nm and the slab has a transmission of the laser light of equal to or less than about 70% measured at a thickness of the slab of 100 micrometer or less.

Abstract: The laser cutting method for cutting a pair of plate materials, each of which has a different thickness and melting point, by irradiating them with a laser is provided with a plate material placement process for placing the pair of plate materials side by side so that, out of the pair of plate materials, an opposite surface of a laser irradiated surface of a plate material with a lower melting point protrudes more than an opposite surface of a laser irradiated surface of a plate material with a higher melting point, a focus adjustment process for aligning a focus position of the laser with an undersurface opposite the laser irradiated surface of the plate material with a higher melting point out of the pair of plate materials, and a plate material cutting process for cutting the pair of plate materials through irradiation with the laser according to a series of operations while sustaining a focus position of the laser to the pair of plate materials.

Abstract: A laser-engravable composition comprises one or more elastomeric rubbers including at least 10 parts of one or more CLCB EPDM elastomeric rubbers, based on parts per hundred of the total weight of elastomeric rubbers (phr). The laser-engravable composition further comprises 2-30 phr of a near-infrared radiation absorber and either 1-80 phr of an inorganic, non-infrared radiation absorber filler, or a vulcanizing composition that comprises a mixture of at least two peroxides. One first peroxide has a t90 value of 1-6 minutes as measured at 160° C., and a second peroxide has a t90 value of 8-20 minutes as measured at 160° C. This laser-engravable composition can be used to form a laser-engravable layer on a compressible layer that is disposed on a substrate, and to form various flexographic printing precursors. The compressible layer can also be laser-engravable.

Abstract: A system for forming an image on a flexographic media includes a digital front end that provides a screened image; locating transition points from data regions to non-data regions in said screened image; determining a distance between pixels in adjacent data and non-data regions; if the distance is greater than a predetermined distance modify said screened image to remove a shoulder of pixels at the transition point; and an imaging device the screen modified image on the flexographic media.

Abstract: There are provided an electronic component module in which an external terminal is disposed outwardly from a mold part by a plating process and a manufacturing method thereof. The electronic component module includes a substrate, at least one electronic component mounted on the substrate, a mold part sealing the electronic component, and at least one connection conductor having one end bonded to one surface of the substrate and formed in the mold part so as to penetrate through the mold part. The connection conductor is formed to have a form in which horizontal cross-sectional areas of the connection conductor are gradually reduced toward the substrate and includes at least one step.

Abstract: Microfluidic flow-through elements and methods for forming and using the same, particularly, low cost, easily sterilized, disposable microfluidic flow-through elements may include an orifice region suitable, for example, for fluid jet formation (such as in a droplet sorter or flow cell) or sample injection or hydrodynamic focusing (such as in a non-droplet flow cytometer). Laser drilling, for example laser ablation, may be used to form an orifice region extending through an orifice wall section of a base substrate. The base substrate may be unitarily-formed by injection molding a polymeric material. The orifice region may be advantageously configured to form a predetermined geometry by controlling the characteristics of the ablating beam.

Abstract: A method for making laser engravings on a web of paper, including prearranging a paper web conveying device; defining a working area along a path of the web; prearranging an emitter of laser pulses; prearranging a movable pointing device, selecting an engraving pattern to be engraved on the web; calculating an instruction file containing pointing instructions; selecting an emission power of the emitter of laser pulses; emitting laser pulses through the emission power; and operating the movable pointing device according to the instruction file.

Abstract: A laser material processing system which includes a pulsed fiber laser source having a continuous wavelength bandwidth of larger than 100 nm and pulse width of from 100 femtosecond to 1 microsecond, a broad band laser emitted from one core of an optical fiber, where the broad band laser is applied to a subject material to produce removal of the subject material and/or color change of the subject material.

Abstract: A covering cap, in particular for placing on a skin analyzer, contains an end wall bounded by a circumferential edge, and a circumferential wall adjoining the circumferential edge of the end wall. At least one part of the covering cap has a thickness that is less than a thickness of the circumferential wall in a portion of the circumferential wall that lies in the region or end of the circumferential wall remote from the end wall. The end wall is of a gas-permeable configuration.

Abstract: The present disclosure relates to methods of scoring packaging structures, including multi-layer polymeric films incorporating an encapsulated oxygen-impermeable layer, using laser energy. The methods are able to score structures which contain an oxygen-impermeable barrier without disrupting the permeability characteristics of the structure, and retain good printability, clarity, and gloss.

Abstract: A method of manufacturing an inlaid ceramic element for a timepiece including: a) forming a ceramic or cermet body; b) etching at least one recess in one face of the ceramic or cermet body, each at least one recess forming a pattern cavity for a decoration; c) changing a surface state of a bottom of the at least one recess to increase contact surface thereof; d) filling the at least one recess with a composite ceramic to form the decoration; e) flattening the composite ceramic so that the composite ceramic remains only in a hollow of the at least one recess.

Abstract: The present disclosure provides a touch panel, including a substrate, at least one sensing electrode layer, a wire layer, a first light-shielding layer and a second light-shielding layer. The substrate has a visible region and a non-visible region. The wire layer corresponds to the non-visible region, wherein the wire layer includes signal lines and at least one gap therebetween, the signal lines electrically connect the sensing electrode layer. The first light-shielding layer is disposed within the non-visible region and between the substrate and the wire layer, wherein the first light-shielding layer includes at least one recess and a position of the recess corresponds to a position of the gap. The second light-shielding layer corresponds to the recess, wherein an area covered by the second light-shielding layer is equal to or greater than an aperture of the recess. The present disclosure also provides a method for manufacturing a touch panel.

Abstract: A method for marking an item including a shape memory polymer (SMP) having a visual readable and/or machine readable graphic element on the surface of the item. The method includes pretreating the surface of the item; colouring the surface of the item with a dye solution containing an organic dye and an organic solvent; cleaning and drying the surface of the item; and engraving by at least partially ablating the surface of the item. The dyeing process is suitable for colouring the surface of a shape memory polymer (SMP), wherein the information is engraved in a form of a code or other label on the coloured surface. The colouring causes an increased contrast and thus facilitates machine readability of marking and coding without affecting the other properties of the SMP.

Abstract: A cylindrical printing plate precursor of the present invention comprising a cured resin sheet formed into a cylindrical shape, the cylindrical printing plate precursor comprising an overlap margin part comprising opposite end parts of the cured resin sheet superimposed on one another, each end part of the cured resin sheet in the overlap margin part having a thickness that is smaller than the thickness of the cured resin sheet other than in the overlap margin part, and a joining part, in the overlap margin part, in which a hole providing communication between the opposite end parts of the cured resin sheet is filled with a cured resin, the overlap margin part having a specific width, the joining part having a specific size, and the joining part having a specific cross-sectional area in the plate surface direction.

Abstract: A tantalum capacitor includes a capacitor body containing tantalum powder and having a tantalum wire extending downwardly; a molded part enclosing the capacitor body and exposing an end portion of the tantalum wire; a positive electrode lead frame disposed on a lower surface of the molded part and connected to the end portion of the tantalum wire; a negative electrode lead frame disposed on the lower surface of the molded part; and a conductive adhesive layer disposed between the capacitor body and the negative electrode lead frame.

Abstract: Provided is a sample processing cartridge. The sample processing cartridge can include a housing and a channel disposed in the housing. The housing can include a sample inlet for receiving at least one biological sample. The channel can in fluidic communication with the sample inlet and can be defined by an upper surface and a lower surface. The upper surface can include a hydrophilic portion and a hydrophobic portion. The lower surface can include a hydrophilic portion and a hydrophobic portion. The hydrophilic and hydrophobic portions of the upper and lower surfaces of the channel can be configured to isolate at least one aqueous reagent.

Abstract: A method for producing a linear weakening in a flat decorative material having a point-like or spot-like area of action progressing along a machining direction of a laser light beam on the decorative material. The decorative material is set transversely with respect to the machining direction in the area of action in order to obtain a different weakening depth profile on the left and right of the weakening line predefined by the machining direction.

Abstract: A solar cell is formed using a solar cell ablation system. The ablation system includes a single laser source and several laser scanners. The laser scanners include a master laser scanner, with the rest of the laser scanners being slaved to the master laser scanner. A laser beam from the laser source is split into several laser beams, with the laser beams being scanned onto corresponding wafers using the laser scanners in accordance with one or more patterns. The laser beams may be scanned on the wafers using the same or different power levels of the laser source.

Abstract: A wiring substrate includes a substrate main body which is formed of a ceramic laminate and has a rectangular shape in plan view, and which has a front surface and a back surface and has four side surfaces, each being located between the front surface and the back surface, and having a groove surface located on a side toward the front surface and a fracture surface located on a side toward the back surface; and a metalized layer which is formed on the front surface of the substrate main body so as to extend along the four side surfaces, and which has a rectangular frame shape in plan view, wherein a horizontal surface of the ceramic laminate of the substrate main body is exposed between the metalized layer and the groove surface of each side surface of the substrate main body.

Abstract: A method for producing a thin film lithium battery is provided, comprising applying a cathode current collector, a cathode material, an anode current collector, and an electrolyte layer separating the cathode material from the anode current collector to a substrate, wherein at least one of the layers contains lithiated compounds that is patterned at least in part by a photolithography operation comprising removal of a photoresist material from the layer containing lithiated compounds by a process including a wet chemical treatment. Additionally, a method and apparatus for making lithium batteries by providing a first sheet that includes a substrate having a cathode material, an anode material, and a LiPON barrier/electrolyte layer separating the cathode material from the anode material; and removing a subset of first material to separate a plurality of cells from the first sheet.

Abstract: Solution casting a nanostructure. Preparing a template by ablating nanoholes in a substrate using single-femtosecond laser machining. Replicating the nanoholes by applying a solution of a polymer and a solvent into the template. After the solvent has substantially dissipated, removing the replica from the substrate.

Abstract: A method of fabricating a skin system or its elements using a laser cutter. The laser cutter is controlled to perform multiple passes to selectively cut away layers of material on a surface of a sheet of cellular foam materials. Each layer of material to be removed is defined by a cut or texture pattern. The laser cutter is operated to cut deeper with each layer of material removed by setting a different resolution for the laser cutter for each layer. For example, a laser cutter may be selectively controlled to operate within a resolution range, and each layer defined by the same or different cut pattern is cut using a different resolution. The method includes associating lower resolution settings for the first or outer layers to remove a first depth of material from the skin sheet's surface and associating higher and higher resolution settings for additional layers.

Abstract: Embodiments of the invention are directed to resin-soluble thermoplastic veils for use in liquid resin infusion processes, methods of manufacturing resin-soluble thermoplastic veils for use in liquid resin infusion processes, and methods of manufacturing composite articles using resin-soluble thermoplastic veils for use in liquid resin infusion applications. The resin-soluble thermoplastic veils according to embodiments of the invention and of which function as a toughening agent in composites having the veil incorporated therein have improved characteristics including, but not limited to, increased uniformity and decreased thickness relative to prior art veils. These characteristics translate into improvements in the processing of a composite article including, but not limited to, a substantial or complete elimination in premature dissolution of the veil during cure.

Abstract: Disclosed is a method of producing a chemically pure and stably dispersed organic nanoparticle colloidal suspension using an ultrafast pulsed laser ablation process. The method comprises irradiating a target of an organic compound material in contact with a poor solvent with ultrashort laser pulses at a high repetition rate and collecting the nanoparticles of the organic compound produced. The method may be implemented with a high repetition rate ultrafast pulsed laser source, an optical system for focusing and moving the pulsed laser beam, an organic compound target in contact with a poor solvent, and a solvent circulating system to cool the laser focal volume and collect the produced nanoparticle products. By controlling various laser parameters, and with optional poor solvent flow movement, the method provides stable colloids of dispersed organic nanoparticles in the poor solvent in the absence of any stabilizing agents.

Abstract: According to one general aspect of the invention, a keyboard of a computing device includes a keycap and a light source. The keycap is configured to actuate a switch of the computing device. The keycap includes a metal material and has an upper surface and a lower surface. The upper surface of the keycap is configured to be viewed by a user while operating the computing device and defines one or more openings in the keycap. The one or more openings in the upper surface is patterned in the shape of a single alphanumeric character. The lower surface of the keycap defines one or more openings in the keycap. The keycap defines one or more passageways extending from the one or more openings defined by the upper surface of the keycap through the keycap to the one or more openings defined by the lower surface of the keycap.

Abstract: A method of manufacturing a flexographic printing plate includes designing a patterned design that includes a plurality of lines and a plurality of support structures and laser-ablating the patterned design into a thermal imaging layer. A support structure of the plurality of support structures is disposed at an offset relative to a line of the plurality of lines.

Abstract: A relief printing plate precursor for laser engraving is provided. The precursor has high ink resistance toward both an aqueous ink and a solvent ink and is excellent in terms of engraving sensitivity. A process for producing the precursor is also provided. Further, a resin composition for laser engraving is provided which can suitably be used for such a printing plate precursor. The resin composition for laser engraving includes (Component A) a compound that has a crosslinkable group and that is a plastomer at 20° C. and (Component B) a crosslinking agent, Component A and Component B having a (meth)acryloyl group as a crosslinkable group, and at least one of Component A and Component B having an ionic group.

Abstract: The present invention discloses a method of manufacturing a housing and an electronic device. The method comprises the following steps: preparing a mold according to a predetermined shape of the housing, wherein the mold comprises at least one moving die and at least one fixed die, a first texture structure is formed on the inner surface of the mold, and the first texture structure comprises a plurality of projections arranged in a first arrangement, and a groove recesses inwardly is formed between any two adjacent projections, and the groove is formed by etching and removing a part of the moving die and/or the fixed die by the laser engraving method; closing the moving die and the fixed die, and heating the mold to a predetermined mold temperature; and injecting a raw material in a melting state into the mold cavity of the mold; retaining a pressure of the raw material in the mold cavity of the mold; cooling the mold; opening the mold to complete the housing.

Abstract: In a method for re-imaging a printing form that has been used for printing in a prior printing process a substrate of the printing form is cleaned globally of ink or varnish and the substrate is treated abrasively globally in order to erase a preceding printing image. The substrate to be imaged with a new printing image is treated locally in image regions with a pulsed laser beam and, in the process, a nanoscopic and hydrophobic surface structure is produced locally. The substrate is treated globally with a hydrophilicity intensifier, as a result of which the substrate becomes hydrophilic locally in the previously hydrophobic image regions. An apparatus has a corresponding erasing unit and an imaging unit with a femtosecond laser.

Abstract: A cover glass element can extend to the edges of an electronic device while maintaining the optical flatness and thickness needed for the cover glass. A first glass sheet with the desired thickness and flatness can be thermally bonded to a second glass sheet machined to include an opening to be received by the edges of the electronic device. The resulting three-dimensional cover element forms a uni-body frame that is significantly stiffer than a single sheet of glass, and the larger surface area of the edge provides for enhances pressure distribution, particularly after chemical strengthening, thus enhancing the durability of the electronic device. Further, the thermal bonding process uses lower temperatures than processes such as slumping or pressing, which could potentially affect the flatness and optical clarity of the original sheet glass.

Abstract: A system and method for making golf balls is disclosed. The system may include laser cutting dimples into a golf ball cover layer. Laser cutting may also be used to add texture to the surface of a golf ball. Laser cutting dimples may provide flexibility in quickly creating different shapes, sizes, and patterns of dimples. Thus, during golf ball testing, a certain pattern of dimples may be made, tested, and then quickly adjusted. For example, the dimples may be adjusted by cutting away more cover material to make the dimples larger, deeper, and/or in a different shape. After further testing, the golf ball dimples may be adjusted again multiple times.

Abstract: A thermoplastic elastomer (TPE) is disclosed which is markable by a laser operating at an ultra-violet wavelength because of the presence of between about 0.05 and about 0.1 weight percent of titanium dioxide or between about 0.1 and 0.3 weight percent of zinc oxide.

Abstract: An object of the present invention is to provide a relief printing plate precursor for laser engraving that is excellent in rinsing properties for engraving residue and engraving sensitivity and can give a sharp engraved shape. Disclosed is a relief printing plate precursor for laser engraving comprising a relief-forming layer formed of a resin composition for laser engraving, or a crosslinked relief-forming layer obtained by crosslinking the relief-forming layer formed of the resin composition for laser engraving, wherein the resin composition for laser engraving comprises a binder polymer as Component A, and carbon black of which pH is higher than 6 and an average particle size when being dispersed into water is equal to or less than 500 nm as Component B.

Abstract: The present invention provides a laser processing method comprising the steps of attaching a protective tape 25 to a front face 3 of a wafer 1a, irradiating a substrate 15 with laser light L while employing a rear face of the wafer 1a as a laser light entrance surface and locating a light-converging point P within the substrate 15 so as to form a molten processed region 13 due to multiphoton absorption, causing the molten processed region 13 to form a cutting start region 8 inside by a predetermined distance from the laser light entrance surface along a line 5 along which the object is intended to be cut in the wafer 1a, attaching an expandable tape 23 to the rear face 21 of the wafer 1a, and expanding the expandable tape 23 so as to separate a plurality of chip parts 24 produced upon cutting the wafer 1a from the cutting start region 8 acting as a start point from each other.

Abstract: Multilayer flexible element (10), preferably made of wood, and related production process (50) by laser engraving and/or cutting, preferably applied in fashion, furniture and design industries, characterized in that said element is composed of:—a layer of rigid material (11), supplied in sheets or plates, preferably made of wood;—a layer of flexible support material (12), in example a tissue, onto which is connected said layer of rigid material (11);—means of connection (13) of said layer of rigid material (11) to said layer of flexible support material (12), in example by glue, characterized by high elasticity and resistance to temperature changes;—a texture in vector graphics (14) which will define the cutting of the workpiece material, his flexibility and the consequent modeling and softness; wherein said process (50) comprises the following steps:—connection (51) of said layer of rigid material (11) to said layer of flexible support material (12), in example by glue;—design (52) of said texture in vector

Abstract: Device surfaces are rendered superhydrophobic and/or superoleophobic through microstructures and/or nanostructures that utilize the same base material(s) as the device itself without the need for coatings made from different materials or substances. A medical device includes a portion made from a base material having a surface adapted for contact with biological material, and wherein the surface is modified to become superhydrophobic, superoleophobic, or both, using only the base material, excluding non-material coatings. The surface may be modified using a subtractive process, an additive process, or a combination thereof. The product of the process may form part of an implantable device or a medical instrument, including a medical device or instrument associated with an intraocular procedure.

Abstract: A relief printing plate manufacturing method includes: generating binary image data based on multivalued image data representing a printing image; generating, from the binary image data, target stereoscopic shape data; calculating, based on the target stereoscopic shape data, exposure amount data; providing a predetermined exposure amount to an outside image adjacent pixel in a range of predetermined pixels adjacent to an ON pixel; and applying laser light to an area of OFF pixels based on the exposure amount data to engrave a portion outside of an area, and applying laser light to the outside image adjacent pixel based on the predetermined exposure amount to form a relief having a projecting shape with a corner part of a flange part of a top face of the relief at least partially chamfered.

Abstract: Objects of the present invention are to provide a process for producing a flexographic printing plate precursor for laser engraving that has excellent rinsing properties for engraving residue and can give a plate having excellent printing durability, to provide a flexographic printing plate precursor obtained by the process, and to provide a flexographic printing plate and a process for making the flexographic printing plate.

Abstract: A mouthpiece lining paper of a filter cigarette, which mouthpiece lining paper is provided on surface regions to be adhesively bonded with a three-dimensional surface structure, that is to say with a surface which has elevations and/or depressions, wherein the elevations and depressions protrude from and are set back from the film/foil surface only locally, respectively. The mouthpiece lining paper is a film/foil. In one preferred embodiment, a row of elevations and/or depressions runs along an edge of the mouthpiece lining paper of the type which runs along the overlap region of the mouthpiece lining paper with itself on the finished cigarette.

Abstract: Approaches for making a light-transmitting panel are disclosed. A panel is positioned on a support structure, and a stencil is positioned between a surface of the panel and a laser head. The stencil includes a plurality of openings. A defocused laser beam generated by the laser head is scanned over the openings in the stencil. The width of the defocused laser beam at a location at which the laser beam strikes the panel is at least as large as a size of the desired disruption, and the laser head is powered at a level and moved at a rate that creates a disruption in the surface of the panel at each opening.

Abstract: A process for producing a laminated glass pane made up of a base pane, a first laminating film, a coated polymer film with a coating, a second laminating film, and a top pane having at least one sensor window is described. The process has steps a) to d), wherein a) the coated polymer film with the coating is tensioned pointing upward by way of a vacuum table, b) at least one region from which the coating is removed is produced on the coated polymer film by means of laser treatment, c) the first laminating film is arranged on the base pane, the coated polymer film is arranged on the first laminating film, the second laminating film is arranged on the coated polymer film and the top pane is arranged on the second laminating film, and d) the arrangement is autoclaved. The region from which the coating is removed is produced by way of glass plates with which the vacuum table is equipped.

Abstract: To provide a method for forming a thin film pattern 14 having a predetermined shape on a surface of a substrate 1 having an electrode formed in advance in a thin film pattern forming region, there are included the steps of: bringing a resin film 2, which transmits visible light, into close contact with the substrate 1; irradiating the thin film pattern forming region 11 on the substrate 1 with laser light L, thereby forming an opening pattern 21 having the same shape as the thin film pattern 14 in the film 2; forming the thin film pattern 14 in the thin film pattern forming region 11 on the substrate 1 through the opening pattern 21 of the film 2; and peeling off the film 2.

Abstract: A method of forming a pattern on a mask sheet using a laser beam includes determining a target scan line with respect to the mask sheet, which corresponds to a position of the pattern on a final mask sheet, determining a correction scan line with respect to the mask sheet, along which the laser beam is scanned to form the pattern of the final mask sheet, applying a counter force to the mask sheet, fixing the mask sheet onto a mask frame while the counter force is applied to the mask sheet, scanning the laser beam along the correction scan line, and releasing the counter force which is applied to the mask sheet.

Abstract: A modified region 7 to become a starting point region for cutting is formed in a GaAs substrate 12 along a line to cut 5 upon radiation with laser light L which is pulsed laser light. As a consequence, the modified region 7 formed in the GaAs substrate 12 along the line to cut 5 is likely to generate fractures in the thickness direction of an object to be processed 1. Therefore, the modified region 7 having an extremely high function as a starting point region for cutting can be formed in the planar object to be processed 1 comprising the GaAs substrate 12.