Plural Magnetic Deposition Layers Patents (Class 29/603.14)
  • Patent number: 8056213
    Abstract: A PMR head comprises a substrate, a magnetic pole formed over the substrate, the pole having a pole tip having a cross-sectional tapered shape wherein the pole tip is surrounded by a write gap layer, an integrated shield comprising side shields on the substrate laterally surrounding the pole tip and a trailing shield overlying the pole tip and integral with the side shields.
    Type: Grant
    Filed: February 25, 2008
    Date of Patent: November 15, 2011
    Assignee: Headway Technologies, Inc.
    Inventors: Cherng-Chyi Han, Lijie Guan, Joe Smyth, Moris Dovek
  • Patent number: 8051551
    Abstract: A method for fabricating a magnetic head having multiple readers includes forming a plurality of generally laterally positioned lower shields; forming a lower gap layer above each lower shield; forming a sensor above each lower gap layer; forming an upper gap layer above each sensor; and forming an upper shield above each upper gap layer; wherein an overall gap thickness is defined between vertically aligned pairs of the upper and lower shields, wherein the overall gap thickness between one of the pairs of upper and lower shields is thicker than the overall gap thickness between another of the pairs of upper and lower shields.
    Type: Grant
    Filed: May 25, 2010
    Date of Patent: November 8, 2011
    Assignee: International Business Machines Corporation
    Inventor: Peter Vandersalm Koeppe
  • Patent number: 8042259
    Abstract: A magnetic recording head and a method of manufacturing the same. The magnetic recording head includes a stack containing a main pole and a return pole. The stack includes a first magnetic layer having a groove formed therein; an insulating layer covering a surface of the groove; and a second magnetic layer pattern filling the groove covered with the insulating layer.
    Type: Grant
    Filed: February 18, 2010
    Date of Patent: October 25, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hoo-san Lee, Young-hun Im, Yong-su Kim
  • Patent number: 8037593
    Abstract: A method for manufacturing a magnetoresistive sensor that decreases the stack height of the sensor. The method includes forming a sensor structure having at its top, a Ru layer and a Ta layer over the Ru layer. An annealing process is performed to set the magnetization of the pinned layer of the sensor structure. After the annealing process has been completed and the Ta layer is no longer needed, an ion milling process is performed to remove the Ta layer.
    Type: Grant
    Filed: December 28, 2007
    Date of Patent: October 18, 2011
    Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
    Inventors: Kuok San Ho, Ying Hong, Wipul Pemsiri Jayasekara, Daniele Mauri
  • Patent number: 8028399
    Abstract: Write elements and methods of fabricating magnetic write poles are described. For one method, a vertical mask structure is formed on a magnetic layer in locations of a pole tip and a yoke of a write pole. The vertical mask structure may be formed by coating vertical surfaces of resists with an atomic layer deposition (ALD) process or a similar process. A removal process is then performed around the vertical mask structure to define the pole tip and part of the yoke of the write pole, and the vertical mask structure is removed. A lower portion of the pole tip is them masked while the upper portion of the pole tip and the part of the yoke is exposed. The upper portion of the pole tip and the part of the yoke are then expanded with magnetic material, such as with a plating process.
    Type: Grant
    Filed: December 16, 2007
    Date of Patent: October 4, 2011
    Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
    Inventors: Amanda Baer, Jeffrey S. Lille, Aron Pentek
  • Patent number: 8028400
    Abstract: A method for forming a tapered, electroplated structure. The method involves forming a first mask structure having an opening. A shrink material is deposited into the opening, such that the thickness of the shrink material is less than the thickness of the first mask structure. The first mask structure and the shrink material are then heated causing the sides of the opening in the mask structure to bulge inward. The shrink material is then removed, and a first electrically conductive material can then be electroplated into the opening to a thickness that is much less than the thickness of the mask. The bulbous shaped of the deformed photoresist mask forms a taper on the first electrically conductive material. The first mask can then be removed and a second electrically conductive material can be electroplated over the first electrically conductive material.
    Type: Grant
    Filed: March 6, 2008
    Date of Patent: October 4, 2011
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Christian Rene Bonhote, Jeffrey S. Lille, Scott Arthur MacDonald
  • Patent number: 8015692
    Abstract: A method for providing a perpendicular magnetic recording head includes providing a metal underlayer and forming a trench in the metal underlayer. The trench has a bottom and a top wider than the bottom. The method also includes providing a PMR pole. At least a portion of the PMR pole resides in the trench. The method also includes providing a write gap on the PMR pole and providing a top shield on at least the write gap.
    Type: Grant
    Filed: November 7, 2007
    Date of Patent: September 13, 2011
    Assignee: Western Digital (Fremont), LLC
    Inventors: Lei Larry Zhang, Yong Shen, Honglin Zhu, Yizhong Wang
  • Patent number: 8015694
    Abstract: A “scissoring-type” current-perpendicular-to-the-plane (CPP) magnetoresistive sensor with dual ferromagnetic sensing or free layers separated by a nonmagnetic spacer layer has improved stability as a result of etch-induced uniaxial magnetic anisotropy in each of the free layers. Each of the two ferromagnetic free layers has an etch-induced uniaxial magnetic anisotropy and an in-plane magnetic moment substantially parallel to its uniaxial anisotropy in the quiescent state, i.e., the absence of an applied magnetic field. The etch-induced uniaxial anisotropy of each of the free layers is achieved either by direct ion etching of each of the free layers, and/or by ion etching of the layer on which each of the free layers is deposited. A strong magnetic anisotropy is induced in the free layers by the etching, which favors generally orthogonal orientation of the two free layers in the quiescent state.
    Type: Grant
    Filed: December 18, 2007
    Date of Patent: September 13, 2011
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Matthew J. Carey, Jeffrey R. Childress, Stefan Maat, Neil Smith
  • Patent number: 8011084
    Abstract: A method for manufacturing a manufacturing a magnetoresistive sensor that allows the sensor to be constructed with a very narrow and well controlled track width. The method includes depositing a layer of diamond like carbon over a series of sensor layers. A first mask is then formed to define a sensor, and an ion milling is performed to remove sensor material not protected by the first mask. Then, a second mask is formed, and a hard bias layer is deposited to the thickness of the sensor layers. The second mask is then lifted off and a CMP is performed to remove the first mask structure. Because all areas other than the area directly over the sensor are substantially planar a quick, gentle CMP can be used to remove the first mask layer even if the first mask is small, such as for definition of a very narrow track-width sensor.
    Type: Grant
    Filed: July 31, 2008
    Date of Patent: September 6, 2011
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Quang Le, Jui-Lung Li
  • Patent number: 7996986
    Abstract: An apparatus includes: a first layer having a near field transducer positioned in a waveguide cladding; a second layer having a magnetic pole piece; a third layer including a solid immersion mirror; a first lapping guide positioned in the first layer; a second lapping guide positioned in the second layer; and a third lapping guide positioned in the third layer.
    Type: Grant
    Filed: February 13, 2009
    Date of Patent: August 16, 2011
    Assignee: Seagate Technology LLC
    Inventor: Nils Jan Gokemeijer
  • Patent number: 7979978
    Abstract: A process for forming the write pole of a PMR head is described. This write pole is symmetrically located relative to its side shields, This is accomplished, not through optical alignment, but by coating the pole with a uniform layer of non-magnetic material of a predetermined and precise thickness, followed by the formation of the shield layer around this.
    Type: Grant
    Filed: March 27, 2007
    Date of Patent: July 19, 2011
    Assignee: Headway Technologies, Inc.
    Inventors: Cherng-Chyi Han, Min Li, Fenglin Liu, Chen-Jung Chien
  • Publication number: 20110146061
    Abstract: A method for manufacturing a magnetoresistive sensor that results in the sensor having a very flat top magnetic shield. The process involves depositing a plurality of sensor layers and then depositing a thin high density carbon CMP stop layer over the sensor layers and forming a mask over the CMP stop layer. An ion milling is performed to define the sensor. Then a thin insulating layer and magnetic hard bias layer are deposited. A chemical mechanical polishing is performed to remove the mask and a reactive ion etching is performed to remove the remaining carbon CMP stop layer. Because the CMP stop layer is very dense and hard, it can be made very thin. This means that when it is removed by reactive ion etching, there is very little notching over the sensor, thereby allowing the upper shield (deposited there-over) to be very thin.
    Type: Application
    Filed: December 22, 2009
    Publication date: June 23, 2011
    Inventors: Shin Funada, Quang Le, Thomas L. Leong, Jui-Lung Li, Chang-Man Park, Ning Shi, Hicham M. Sougrati
  • Patent number: 7963024
    Abstract: A method for manufacturing a magnetic write head for perpendicular magnetic data recording. The method allows an upper write coil to be formed directly on a conformally deposited layer of non-magnetic material such as alumina which has been deposited over a magnetic shaping layer and write pole. The method allows the write coil to be constructed without the need for the deposition of a thick alumina fill layer and subsequent chemical mechanical polishing. This, therefore, avoids the necessity of such a chemical mechanical polishing step.
    Type: Grant
    Filed: October 10, 2007
    Date of Patent: June 21, 2011
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventor: Aaron Neuhaus
  • Patent number: 7950137
    Abstract: A method for manufacturing a write pole for perpendicular magnetic recording for accurately defining a side shield throat height and write pole flare point. The magnetic structure includes a write pole portion and first and second side shield portions. The side shields portions are magnetically connected with the write pole portion in a region in front of an intended air bearing surface plane (e.g. in the direction from which lapping will progress). The side shields portions are each separated from the write pole portion in a region behind the intended air bearing surface plane by notches that terminate at a desired location relative to the intended air bearing surface plane and which open up in a region behind the intended air bearing surface plane.
    Type: Grant
    Filed: June 21, 2007
    Date of Patent: May 31, 2011
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Christian Rene Bonhote, Thomas Dudley Boon, Jr., Ming Jiang, Jordan Asher Katine, Quang Le, Yinshi Liu, Xhavin Sinha, Sue Siyang Zhang, Yi Zheng
  • Patent number: 7950135
    Abstract: A manufacturing method of an MR element in which current flows in a direction perpendicular to layer planes, includes a step of forming on a lower electrode layer an MR multi-layered structure with side surfaces substantially perpendicular to the layer lamination plane, a step of forming a first insulation layer on at least the side surfaces of the formed MR multi-layered structure, a step of forming a second insulation layer and a magnetic domain control bias layer on the lower electrode layer, and a step of forming an upper electrode layer on the MR multi-layered structure and the magnetic domain control bias layer.
    Type: Grant
    Filed: May 31, 2007
    Date of Patent: May 31, 2011
    Assignee: TDK Corporation
    Inventors: Takeo Kagami, Takayasu Kanaya
  • Patent number: 7950138
    Abstract: A main pole layer is deposited within an opening in a patterned photoresist layer on a substrate. The photoresist is thinned to expose an upper portion of a pole tip region that is then trimmed to a rectangular shape while a lower portion retains an inverted trapezoidal shape. Thereafter, a second trimming process forms a pole tip with a first width in the upper rectangular portion and a second thickness and second width which is less than the first width in the lower portion. A CMP step subsequently thins the upper portion to a first thickness of 0.04 to 0.08 microns while the second thickness remains at 0.16 to 0.32 microns. The bottom surface of the lower portion along the ABS becomes the trailing edge in a recording operation. The pole tip has a consistent first width (track width) that is not influenced by CMP process variations.
    Type: Grant
    Filed: February 8, 2010
    Date of Patent: May 31, 2011
    Assignee: Headway Technologies, Inc.
    Inventors: Donghong Li, Yoshitaka Sasaki
  • Patent number: 7934310
    Abstract: Prior art designs of single pole writers have been limited by premature saturation at the tip. This limits the head field that can be achieved without simultaneously widening the write profile. This problem has bee solved by means of a vertical main pole whose thickness has its conventional value a short distance from the tip but that tapers down to a significantly reduced value as it approaches the tip. A process for manufacturing this tapered tip design is also presented.
    Type: Grant
    Filed: April 8, 2009
    Date of Patent: May 3, 2011
    Assignee: Headway Technologies, Inc.
    Inventors: Lijie Guan, Hung Liang Hu, Yaw Shing Tang
  • Patent number: 7921544
    Abstract: A thin-film magnetic head structure has a configuration adapted to manufacture a thin-film magnetic head configured such that a main magnetic pole layer including a magnetic pole end part on a side of a medium-opposing surface opposing a recording medium, a write shield layer opposing the magnetic pole end part so as to form a recording gap layer on the medium-opposing surface side, and a thin-film coil wound about the write shield layer or main magnetic pole layer are laminated. The main magnetic pole layer has an end face joint structure where respective end faces of the magnetic pole end part and a yoke magnetic pole part having a size greater than that of the magnetic pole end part are joined to each other, and a surface with a flat structure on a side closer to the thin-film coil.
    Type: Grant
    Filed: April 7, 2008
    Date of Patent: April 12, 2011
    Assignee: Headway Technologies, Inc.
    Inventors: Yoshitaka Sasaki, Hironori Araki, Shigeki Tanemura, Hiroyuki Ito, Lijie Guan
  • Patent number: 7918014
    Abstract: A CPP-GMR spin valve having a CoFe/NiFe composite free layer is disclosed in which Fe content of the CoFe layer ranges from 20 to 70 atomic % and Ni content in the NiFe layer varies from 85 to 100 atomic % to maintain low Hc and ?S values. A small positive magnetostriction value in a Co75Fe25 layer is used to offset a negative magnetostriction value in a Ni90Fe10 layer. The CoFe layer is deposited on a sensor stack in which a seed layer, AFM layer, pinned layer, and non-magnetic spacer layer are sequentially formed on a substrate. After a NiFe layer and capping layer are sequentially deposited on the CoFe layer, the sensor stack is patterned to give a sensor element with top and bottom surfaces and a sidewall connecting the top and bottom surfaces. Thereafter, a dielectric layer is formed adjacent to the sidewalls.
    Type: Grant
    Filed: July 13, 2005
    Date of Patent: April 5, 2011
    Assignee: Headway Technologies, Inc.
    Inventors: Kunliang Zhang, Min Li, Yu-Hsia Chen, Chyu-Jiuh Torng
  • Patent number: 7900342
    Abstract: Magnetoresistance sensors with magnetic pinned layers that are pinned by anisotropic etch induced magnetic anisotropies and methods for fabricating the magnetoresistance sensors are provided. The method comprises forming a seed layer structure. The seed layer is etched to form an anisotropic etch along a top surface of the seed layer. A magnetic pinned layer is formed on the top surface of the seed layer structure. The anisotropic etch on the top surface of the seed layer structure induces a magnetic anisotropy in the magnetic pinned layer, which pins the magnetization of the magnetic pinned layer structure.
    Type: Grant
    Filed: February 23, 2007
    Date of Patent: March 8, 2011
    Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
    Inventors: James M. Freitag, Mustafa M. Pinarbasi
  • Patent number: 7895732
    Abstract: An embodiment of the present invention relates to a method of manufacturing a perpendicular magnetic recording having a main pole, return pole and trailing side shield disposed on the trailing side and the cross track direction side of said main pole. A process is described where the main pole has an etching layer in the upper part. The top and sides of the main pole having the etching signal layer in the upper part are covered with a nonmagnetic gap layer while leaving open a region forming the side shield. The nonmagnetic gap layer is then etched until a signal from the etching signal layer is detected by an etching signal detector. The trailing side shield on the top and sides of the nonmagnetic gap layer are then formed after the etching is halted.
    Type: Grant
    Filed: March 15, 2007
    Date of Patent: March 1, 2011
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Tomohiro Okada, Isao Nunokawa, Kimitoshi Etoh, Kikuo Kusukawa
  • Patent number: 7895731
    Abstract: A method for manufacturing a magnetic field detecting element having a free layer whose magnetization direction is variable depending on an external magnetic field and a pinned layer whose magnetization direction is fixed and these are stacked with an electrically conductive, nonmagnetic spacer layer sandwiched therebetween, wherein sense current flows in a direction perpendicular to film planes of the magnetic field detecting element. The method comprises: forming a spacer adjoining layer adjacent to the spacer layer, Heusler alloy layer, and a metal layer successively in this order; and forming either at least a part of the pinned layer or the free layer by heating the spacer adjoining layer, the Heusler alloy layer, and the metal layer. The spacer adjoining layer has a layer chiefly made of cobalt and iron. The Heusler alloy layer includes metal which is silver, gold, copper, palladium, or platinum, or an alloy thereof. The metal layer is made of the same.
    Type: Grant
    Filed: June 22, 2007
    Date of Patent: March 1, 2011
    Assignee: TDK Corporation
    Inventors: Tomohito Mizuno, Yoshihiro Tsuchiya, Koji Shimazawa, Kei Hirata, Keita Kawamori
  • Patent number: 7885042
    Abstract: A giant magneto-resistive effect device having a CPP structure comprising a spacer layer, and a fixed magnetization layer and a free layer stacked one upon another with the spacer layer interposed between them, with a sense current applied in a stacking direction. The spacer layer comprises a first nonmagnetic metal layer and a second nonmagnetic metal layer, each made of a nonmagnetic metal material, and a semiconductor layer formed between the first and the second nonmagnetic metal layer. The semiconductor layer is an n-type oxide semiconductor. When the first and second nonmagnetic metal layers are formed in order, the first nonmagnetic metal layer is formed prior to the second nonmagnetic metal layer, and an anti-oxidizing layer is formed between the first nonmagnetic metal layer and the semiconductor layer. The anti-oxidizing layer is formed of a material incapable of producing a Schottky barrier upon joining to the semiconductor layer.
    Type: Grant
    Filed: October 10, 2007
    Date of Patent: February 8, 2011
    Assignee: TDK Corporation
    Inventors: Koji Shimazawa, Yoshihiro Tsuchiya, Tomohito Mizuno, Kei Hirata
  • Patent number: 7882618
    Abstract: Methods of fabricating magnetic read heads are provided which reduce the width of the scratch exposure region of a read head. During normal fabrication processes, a read head is formed with a first shield, a read element formed on the first shield, and hard bias layers formed on either side of the read element. The width of the read elements and the hard bias layers define an initial scratch exposure region. According to embodiments herein, a mask structure is formed to protect the read element and first portions of the hard bias layers proximate to the read element. A removal process is then performed to remove second portions of the hard bias layers that are not protected by the mask structure, which defines a final scratch exposure region that is smaller than the initial scratch exposure region.
    Type: Grant
    Filed: December 16, 2007
    Date of Patent: February 8, 2011
    Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
    Inventors: David P. Druist, Mohamad T. Krounbi, David J. Seagle
  • Patent number: 7874062
    Abstract: A method of making a magnetic head according to one embodiment comprises forming a shield layer having first and second recesses in first and second end regions which surround a central region; depositing first and second lead layers in the first and the second recesses; and forming a read sensor in the central region such that a first edge of the read sensor is positioned above an edge of the first lead layer and a second edge of the read sensor is positioned above an edge of the second lead layer.
    Type: Grant
    Filed: October 4, 2007
    Date of Patent: January 25, 2011
    Assignee: International Business Machines Corporation
    Inventor: Hugo Alberto Emilio Santini
  • Patent number: 7870659
    Abstract: A method for defining a perpendicular magnetic head is provided. The method includes forming a portion of the read and write head including depositing a sensor film on a surface only over a region of the read head to form a sensor; depositing a full-film shaping pole layer over the write head; defining a track width of the sensor; patterning a photoresist to define a pole tip of the write head including write track width and flare position, and at the same time to define a back edge of the sensor; removing material of the sensor and pole tip from the areas not covered by the photoresist; completing the fabrication of the write and read head layers; and lapping the write pole concurrently with the sensor to define the flare position of the pole tip and to define a sensor height with accurate positioning of write head flare.
    Type: Grant
    Filed: September 7, 2007
    Date of Patent: January 18, 2011
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Vladimir Nikitin, Samuel Wei-san Yuan
  • Patent number: 7866029
    Abstract: A method for forming a pattern film with a narrower width than the resolution of an exposure machine and a resist used independently of etching is provided. The method comprises the steps of: forming a first frame layer having end surfaces facing each other across a space having a width W1; forming a second frame layer having end surfaces facing each other across a space having a width W2 that is larger than the width W1, the space having the width W2 being located right above the space having the width W1; forming a trench-forming film provided with a trench having a minimum width W3 that is smaller than the width W1 so as to fill at least a part of the spaces having the width W1 and the width W2 respectively; and forming a pattern film so as to fill at least a part of the trench.
    Type: Grant
    Filed: March 22, 2007
    Date of Patent: January 11, 2011
    Assignee: TDK Corporation
    Inventors: Hirotaka Gomi, Mitsuharu Isobe, Noriyuki Ito, Hiroaki Funada, Takeshi Yamana, Makoto Terasawa, Yasuhiro Hasegawa
  • Patent number: 7861400
    Abstract: Write heads and corresponding methods of fabrication are provided using multiple electronic lapping guides to collect information regarding multiple distances of a write head, such as a throat height and a flare point distance of a write pole. A method of fabricating a write head includes fabricating a write pole and a corresponding write pole ELG. The method further includes fabricating a trailing shield and a corresponding trailing shield ELG. The method further includes performing a lapping process on the write head, and monitoring a lapping depth of the lapping process based on the resistance of the write pole ELG and the resistance of the trailing shield ELG.
    Type: Grant
    Filed: May 4, 2007
    Date of Patent: January 4, 2011
    Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
    Inventor: Jeffrey S. Lille
  • Patent number: 7841067
    Abstract: A method for forming a head having a trailing shield that includes forming a gap layer above a pole, forming a mask above the gap layer, and forming a trailing shield above the gap layer and adjacent the mask, a throat height of the trailing shield being defined between the mask.
    Type: Grant
    Filed: February 26, 2007
    Date of Patent: November 30, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventor: Jeffrey S. Lille
  • Patent number: 7841068
    Abstract: A method of fabricating a single-pole perpendicular magnetic recording head to contain a bevel angle promotion layer that facilitates the fabrication of the bevel angle in a trapezoidal main pole. The bevel angle promotion layer is made of a non-magnetic material that is softer than the material (e.g., Al2O3) that normally underlies the main pole. In one embodiment, the bevel angle promotion layer is formed between an end of the yoke and the air bearing surface (ABS), with the top surface of the bevel angle promotion layer being substantially coplanar with the top surface of the yoke. In other embodiment the bevel angle promotion layer is integrated with a leading edge taper material, which is formed of a magnetic material, to broaden the magnetic flux path between the yoke and the main pole.
    Type: Grant
    Filed: July 2, 2007
    Date of Patent: November 30, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Tsung Yuan Chen, Yimin Hsu, Yinshi Liu
  • Patent number: 7841069
    Abstract: A method of manufacturing thin closure magnetic read/write heads, such as magnetic tape heads is provided. The method provides improved flexural strength of the closure so that the closure breakage during fabrication of the heads is mitigated and closure thickness is reduced. An array of chips is fabricated on a wafer. The array is closed, with a closure strip bonded to each row of the array. Closures span only the length of a row, so that the closures are not subjected to flexure during processing and breakage due to flexure is mitigated. Side bars are bonded to the array to form a column with dimensions similar to prior art columns. This allows columns manufactured by the invention to undergo additional processing using existing processes.
    Type: Grant
    Filed: August 30, 2007
    Date of Patent: November 30, 2010
    Assignee: International Business Machines Corporation
    Inventors: Robert G. Biskeborn, Calvin S. Lo
  • Patent number: 7832084
    Abstract: A method of recording servo information includes writing servo information in a data storage medium using a compound magnetic recording head. The compound magnetic recording head has a substrate including first and second magnetically permeable substrate portions and a substantially non-magnetic member interposed between the first and second magnetically permeable substrate portions. A magnetically permeable layer is provided over the first and second magnetically permeable substrate portions of the substrate and includes first and second writing gap features associated with the first and second substrate portions. The writing gap features are formed using a patterned mask layer over the magnetically permeable layer, wherein the patterned mask layer comprises first and second patterned gap features corresponding to the first and second writing gap features.
    Type: Grant
    Filed: August 28, 2006
    Date of Patent: November 16, 2010
    Assignee: Advanced Research Corporation
    Inventors: Matthew P. Dugas, Theodore A. Schwarz, Gregory L. Wagner
  • Patent number: 7818875
    Abstract: A method of manufacturing a magnetic write head that provides improved pole critical dimension control, such as improved track width control (improved sigma) and improved flare point control. The method involves a combination of several process improvements, such as photolithographically patterning a P2 pole tip defining photoresist frame using a zero print bias and also using a small flash field. The method also involves the use of a non-reactive ion etch to notch the first pole (P1) using the second pole (P2) as a mask.
    Type: Grant
    Filed: December 7, 2005
    Date of Patent: October 26, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Hamid Balamame, Daniel Wayne Bedell, Mary Kathryn Gutberlet, Clarence Kai-Sheng Hsieh, Aron Pentek, Yi Zheng
  • Patent number: 7810227
    Abstract: Using a beam of xenon ions together with a suitable mask, a GMR stack is ion milled until a part of it, no more than about 0.1 microns thick, has been removed so that a pedestal, having sidewalls comprising a vertical section that includes all of the free layer, has been formed. This is followed by formation of the dielectric and conductive lead layers in the usual way. Using xenon as the sputtering gas enables the point at which milling is terminated to be more precisely controlled.
    Type: Grant
    Filed: October 18, 2007
    Date of Patent: October 12, 2010
    Assignees: Headway Technologies, Inc., TDK Corporation
    Inventors: Stuart Kao, Chunping Luo, Chaopeng Chen, Takahiko Machita, Daisuke Miyauchi, Jeiwei Chang
  • Patent number: 7810228
    Abstract: An example method for manufacturing a magneto-resistance effect element involves irradiating inert gas ions to enhance an adhesive force between an area around an oxide layer and a metallic layer.
    Type: Grant
    Filed: July 5, 2007
    Date of Patent: October 12, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hiromi Yuasa, Hideaki Fukuzawa, Yoshihiko Fuji
  • Patent number: 7805828
    Abstract: A method of manufacturing a thin-film magnetic head including forming the first shield layer; forming the magnetoresistive device, carried out after forming the first shield layer, a heat treatment providing exchange coupling between the ferromagnetic layer and the antiferromagnetic layer so as to magnetize the ferromagnetic layer in a predetermined direction; forming the domain control layer so as to hold the magnetoresistive device in a track width direction; magnetizing the domain control layer in a direction yielding a magnetic field in the same direction as with a magnetic field received by the ferromagnetic layer upon exchange-coupling with the antiferromagnetic layer, forming the second shield layer, carried out after magnetizing the domain control layer, and remagnetizing the domain control layer in a direction yielding the longitudinal bias magnetic field, carried out after forming the second shield layer.
    Type: Grant
    Filed: May 23, 2007
    Date of Patent: October 5, 2010
    Assignee: TDK Corporation
    Inventors: Koji Shimazawa, Yoshihiro Tsuchiya
  • Patent number: 7788796
    Abstract: A method for constructing a magnetic write head using an electrical lapping guide to carefully control critical dimensions during a lapping operation used to define an air bearing surface. The lapping guide is photolithograhically patterned in a common photolithographic step with another write head structure so that special relation between the lapping guide and critical dimensions of the write head structure can be carefully maintained. The electrical lapping guide can be patterned in a common photolithographic step as the write pole so that the location of the flare point can be carefully controlled with respect to the location of the lapping guide. A stitched flare structure can also be built together with the electrical lapping guide, then a self-aligned shield can be further built over this stitched flare structure so that both flare point and shield throat can be controlled tightly together by this electrical lapping guide during lapping process.
    Type: Grant
    Filed: December 15, 2006
    Date of Patent: September 7, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Wen-Chien David Hsiao, Ming Jiang, Vladimir Nikitin, Aron Pentek, Yi Zheng
  • Patent number: 7788797
    Abstract: A method for making a perpendicular magnetic recording write head that has a write pole, a trapezoidal-shaped trailing shield notch, and a gap between the write pole and notch uses a reactive ion beam etching (RIBE) process in CHF3 that removes filler material at the side edges of the write pole and thus widens the opening at the side edges. The gap is formed of a nonmagnetic mask film, such as alumina, a nonmagnetic metal protective film and a nonmagnetic gap layer. The nonmagnetic metal film is substantially less reactive to CHF3 than the filler material and protects the underlying mask film and write pole during the widening of the opening. The gap layer and trailing shield notch are deposited into a widened opening above the write pole, so the sides of the notch diverge to cause the generally trapezoidal shape.
    Type: Grant
    Filed: April 16, 2007
    Date of Patent: September 7, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: John I. Kim, Aron Pentek
  • Patent number: 7784170
    Abstract: A resist pattern for lift-off is formed on a first film composed of one or more layers deposited on a substrate. The first film is patterned by dry-etching using the resist pattern as a mask. Subsequently, a second film is deposited with presence of the resist pattern on the first film. Then, the resist pattern for lift-off is removed for conducting lift-off. Subsequently, the resulting substrate is etched. In the etching, the substrate is dry-etched using etching particles which are oriented at an incident angle set in a range of 60 ° to 90 ° relative to the normal direction of the substrate.
    Type: Grant
    Filed: May 11, 2007
    Date of Patent: August 31, 2010
    Assignee: TDK Corporation
    Inventors: Takeo Kagami, Kazuki Sato
  • Patent number: 7784171
    Abstract: A method is provided for manufacturing a magneto-resistive device. The magneto-resistive device is for reducing the deterioration in the characteristics of the device due to annealing. The magneto-resistive device has a magneto-resistive layer formed on one surface side of a base, and an insulating layer formed of two layers and deposited around the magneto-resistive layer. The layer of the insulating layer closest to the base is made of a metal or semiconductor oxide. This layer extends over end faces of a plurality of layers made of different materials from one another, which make up the magneto-resistive device, and is in contact with the end faces of the plurality of layers with the same materials.
    Type: Grant
    Filed: May 4, 2007
    Date of Patent: August 31, 2010
    Assignee: TDK Corporation
    Inventors: Takeo Kagami, Tetsuya Kuwashima, Norio Takahashi
  • Patent number: 7779534
    Abstract: The present invention provides a thin film magnetic head capable of suppressing unintentional wiring to a neighboring track and preventing information recorded on a recording medium from being erased. A main magnetic pole layer is constructed so that height of a widened end surface in a lower main magnetic pole layer specifying a wide portion is smaller than height of an exposed surface in an upper main magnetic pole layer (front end portion) specifying a uniform width portion.
    Type: Grant
    Filed: June 18, 2007
    Date of Patent: August 24, 2010
    Assignee: SAE Magnetics (H.K.) Ltd.
    Inventor: Naoto Matono
  • Patent number: 7770283
    Abstract: A multi-step process for notching the P1 pole of the write head element of a magnetic head. In a first step following the fabrication of the P2 pole tip, a layer of protective material is deposited on the approximately vertical side surfaces of the P2 pole tip. Thereafter, a first ion milling step, utilizing a species such as argon, is performed to mill through the write gap layer and to notch into the P1 pole layer therebelow. The removal of redeposited material from the side surfaces of the P2 pole tip is thereafter accomplished and the protective material formed on the side surfaces of the P2 pole tip protects the P2 pole tip during the redeposition clean up step. Thereafter, the protective material is removed from the side surfaces of the P2 pole tip, and a second ion milling step is performed to further notch the P1 pole material.
    Type: Grant
    Filed: February 3, 2006
    Date of Patent: August 10, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Daniel Wayne Bedell, Vladimir Nikitin, Aron Pentek, Sue Siyang Zhang
  • Patent number: 7770285
    Abstract: A magnetic read/write head is produced with an insert layer between the substrate and the magnetic transducer. The insert layer has a lower coefficient of thermal expansion than the substrate, which reduces the temperature pole tip recession (T-PTR) of the head because the insert layer is an intervening layer between the substrate and magnetic transducer. The insert layer is produced by plating, e.g., an Invar layer over the substrate prior to fabricating the magnetic transducer. The Invar layer is annealed and the structure planarized prior to depositing a non-magnetic gap layer followed by the fabrication of the magnetic transducer.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: August 10, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Christian R. Bonhote, Malika D. Carter, David A. Dudek, Wen-Chien D. Hsiao, John W. Lam, Vladimir Nikitin
  • Patent number: 7770284
    Abstract: A manufacturing method of an MR element in which current flows in a direction perpendicular to layer planes, includes forming on a lower electrode layer an MR multi-layered film having a cap layer at a top thereof, forming a mask on the cap layer of the MR multi-layered film, patterning the MR multi-layered film by milling through the mask to form an MR multi-layered structure, forming a magnetic domain control bias layer by using a lift off method using the mask, after forming the magnetic domain control bias layer, forming an additional cap layer on the cap layer and a part of the magnetic domain control bias layer, planarizing a top surface of the additional cap layer and the magnetic domain control bias layer, and forming an upper electrode layer on the planarized top surface.
    Type: Grant
    Filed: May 30, 2007
    Date of Patent: August 10, 2010
    Assignee: TDK Corporation
    Inventors: Naoki Ohta, Takeo Kagami
  • Patent number: 7770282
    Abstract: A magnetic sensing device for use in a magnetic head includes a sensor stack structure having a sensing layer structure and an insulator structure formed adjacent the sensing layer structure. The insulator structure includes a plurality of oxidized metallic sublayers, a plurality of nitrided metallic sublayers, or a plurality of oxynitrided metallic sublayers. The insulator structure may be a capping layer structure of a giant magnetoresistance sensor or, alternatively, a tunnel barrier layer structure of a tunneling magnetoresistance sensor or a magnetic random access memory. Advantageously, each treated metallic sublayer is sufficiently uniformly treated so as to increase the magnetoresistive effect and improve soft magnetic properties of the magnetic sensing device.
    Type: Grant
    Filed: September 1, 2005
    Date of Patent: August 10, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Alexander M. Zeltser, Jinshan Li, Brian York
  • Patent number: 7765677
    Abstract: A method of manufacturing a write pole that prevents P2 pedestal consumption during ion milling removal of coil and pole seed layers. The write head can be constructed by forming a first pole and then forming a magnetic pedestal (P2) over the first pole. A protective layer of, for example, alumina is deposited over a portion of the pedestal in the pole tip region, leaving a portion of the pedestal uncovered in the flare region. A coil seed layer can then be deposited and a coil formed. When the coil seed layer is removed, such as by ion milling, the pole tip region of the pedestal is protected from the ion milling by the protective layer. Similarly, a top pole can be deposited by first depositing an electrically conductive, magnetic seed layer and then plating the top pole. When the top pole seed layer is removed by ion milling, the pole tip region of the pedestal is protected from removal by the protective layer.
    Type: Grant
    Filed: April 18, 2006
    Date of Patent: August 3, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Hamid Balamane, Yvette Chung Nga Winton, Yi Zheng
  • Patent number: 7748104
    Abstract: A method and structure for reducing corrosion during the manufacture of perpendicular write heads is disclosed. Auxiliary pole structures (otherwise known as trailing shields and wrap around shields) are susceptible to corrosion due to their iron containing composition and small dimensions. The impact of corrosion can be reduced by utilizing a gap material comprising an upper surface of noble metals, which extends from underneath the auxiliary pole and is exposed to the same corrosive environment during processing. The area of the exposed gap material is limited to optimize corrosion protection.
    Type: Grant
    Filed: April 25, 2006
    Date of Patent: July 6, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Christian Rene Bonhote, Quang Le, Jui-Lung Li, Scott Arthur MacDonald
  • Patent number: 7712206
    Abstract: A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield. After forming a magnetic write pole such as by masking and ion milling a magnetic write pole layer, a thin layer of alumina is deposited. This is followed by the deposition of a thin layer of Rh. Then, a thick layer of alumina is deposited, having a thickness that is preferably at least equal to the height of the write pole layer. A chemical mechanical polish is then performed until a portion of the Rh layer over the top (trailing edge) of the write pole is exposed. A material removal process such as ion milling is then performed to remove the exposed Rh layer exposing the thin alumina layer there beneath. Since the Rh trailing gap layer is electrically conductive it can also serve as a seed layer for electroplating the magnetic trailing shield.
    Type: Grant
    Filed: May 22, 2006
    Date of Patent: May 11, 2010
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Ming Jiang, Aron Pentek, Yi Zheng
  • Patent number: 7703194
    Abstract: A method for creating a write element of a magnetic head according to one embodiment includes forming a first pole pedestal; forming a write gap layer above the first pole pedestal; forming a second pole pedestal above the write gap layer; and forming at least one of: a cap layer of CoFeON between the first pole pedestal and the write gap, and a seed layer of CoFeON between the write gap layer and the second pole pedestal. Note that other layers may be interspersed between those set forth here.
    Type: Grant
    Filed: March 19, 2007
    Date of Patent: April 27, 2010
    Assignee: International Business Machines Corporation
    Inventors: Brian E. Brusca, Joel S. Forrest, Richard Hsiao, James D. Jarratt, Brian R. York
  • Patent number: 7698807
    Abstract: Formation of the magnetic sensor layers of a magnetic sensor are separated into at least two depositions to reduce the dimension of the sensor. The free layer portion of the sensor is deposited at a different process step than the pinned layer portion. The top of the free layer stack can be a tunnel barrier, the free layer, or part of the free layer. The free layer stack also may contain an in-stack bias layer. The longitudinal bias layer may be patterned in a separate processing step, which allows the stack containing the free layer to be effectively thinner and allow smaller track width dimensions.
    Type: Grant
    Filed: January 20, 2006
    Date of Patent: April 20, 2010
    Assignee: Hitachi Global Storage Technologies, Netherlands B.V.
    Inventors: Jeffrey Robinson Childress, Robert E. Fontana, Jr., Jeffrey S. Lille