Non-dynamoelectric Patents (Class 310/300)
  • Publication number: 20150115767
    Abstract: Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions.
    Type: Application
    Filed: December 31, 2014
    Publication date: April 30, 2015
    Applicant: CLEAN ENERGY LABS, LLC
    Inventors: Joseph F. Pinkerton, David A. Badger, William Neil Everett, William Martin Lackowski
  • Publication number: 20150116893
    Abstract: An electrostatic actuator includes: a fixed driving electrode that is disposed on a silicon substrate; a movable driving electrode that is disposed so as to face the fixed driving electrode and approaches the fixed driving electrode with an electrostatic force generated between the movable driving electrode and the fixed driving electrode; and a pair of spacers that comes in contact with the movable driving electrode in an approaching state in which the fixed driving electrode and the movable driving electrode approach each other and forms a prescribed air gap between the fixed driving electrode and the movable driving electrode, wherein each of the spacers has a spacer electrode portion that comes in contact with the movable driving electrode via an insulator and has the same potential as one of the electrodes at least in the approaching state.
    Type: Application
    Filed: April 9, 2012
    Publication date: April 30, 2015
    Inventor: Koji Hanihara
  • Publication number: 20150107366
    Abstract: A sensor including a buffer material layer configured to at least partially deflect when a force or pressure is imparted on the buffer material layer; and an electroactive polymer (EAP) cartridge in operative contact with the buffer material layer, wherein the EAP cartridge is configured to generate an output signal that corresponds to an amount of strain imparted on the EAP cartridge. The EAP cartridge may be used in a variety of sensing applications including as a pressure sensor integrated into a fluid connector. One aspect of the invention provides for selection of a buffer material layer based upon a desired pressure range.
    Type: Application
    Filed: November 7, 2014
    Publication date: April 23, 2015
    Inventors: Jason Thomas Dunn, Shawn D. Ellis, Roger W. Briese, Tad N. Orstad, Todd D. Lambert, John E. Page, Mario A. Calvo, Timothy Skwiot
  • Publication number: 20150108872
    Abstract: Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions.
    Type: Application
    Filed: December 31, 2014
    Publication date: April 23, 2015
    Applicant: CLEAN ENERGY LABS, LLC
    Inventors: Joseph F. Pinkerton, David A. Badger, William Neil Everett, William Martin Lackowski
  • Publication number: 20150108871
    Abstract: There is provided a new type of ultrasound transducer, where a Dielectric Elastomer (DE) material is used as the active layer (actuation and/or sensing). Such a transducer operates by applying a combination of a DC and an AC voltage signal to achieve frequencies above 100 kHz. The DE material is typically sandwiched between two planar electrodes.
    Type: Application
    Filed: May 30, 2013
    Publication date: April 23, 2015
    Inventors: Benny Larsen, Morten Willatzen, Dan-Mihai Timofte
  • Publication number: 20150102866
    Abstract: A MEMS vibrator includes: a substrate; a base portion which is disposed on the substrate; and a plurality of vibration portions which extend in directions different from each other from the base portion. The MEMS vibrator has a curved surface between the adjacent vibration portions.
    Type: Application
    Filed: October 14, 2014
    Publication date: April 16, 2015
    Inventor: Ryuji KIHARA
  • Publication number: 20150102865
    Abstract: A MEMS vibrator includes: a substrate; a base portion which is disposed on the substrate; and a plurality of vibration portions which extends in a direction that intersects with a normal line of the substrate from the base portion. In a planar view, when a length of the vibration portion in a direction in which the vibration portion extends from the base portion is L, and a length of the vibration portion in a direction that intersects with a direction in which the vibration portion extends from the base portion is W, a dimension ratio (L/W) of the vibration portion satisfies a relationship in which 0.2?(L/W)?7.0.
    Type: Application
    Filed: October 14, 2014
    Publication date: April 16, 2015
    Inventors: Kazuyuki NAGATA, Ryuji KIHARA
  • Publication number: 20150097465
    Abstract: There is provided a system and method for harvesting electrical energy from interaction with papers. The system comprising an electret disposed between a first electrode and a second electrode, and an interactive device connected to one end of the first electrode and one end of the second electrode to provide an electrical potential, the interactive device configured to receive the electrical potential by moving the second electrode relative to the electret for generating electrical energy. Interactive devices that can be activated by the generator can include a light-emitting diode, an electronic paper display, an infrared communication, and a buzzer.
    Type: Application
    Filed: January 2, 2014
    Publication date: April 9, 2015
    Applicant: Disney Enterprises, Inc.
    Inventors: Mustafa Emre Karagozler, Ivan Poupyrev, Gary K. Fedder
  • Publication number: 20150097632
    Abstract: A MEMS vibrator includes: a base portion; a plurality of vibration reeds which extends from the base portion; a supporting portion which extends from a vibration node portion of the base portion; a fixing portion which is connected with the supporting portion; and a substrate in which the fixing portion is disposed on a main surface. The plurality of vibration reeds is separated from the substrate.
    Type: Application
    Filed: October 3, 2014
    Publication date: April 9, 2015
    Inventor: Akinori YAMADA
  • Publication number: 20150091411
    Abstract: A micro-device includes a substrate with a cavity. The cavity is covered with a porous layer that is permeable to vapor hydrofluoric acid (HF) etchant. The micro-device comprises a Microelectromechanical Systems (MEMS) device with a component that is moveable in operational use of the MEMS device. The component is arranged within the cavity.
    Type: Application
    Filed: December 8, 2014
    Publication date: April 2, 2015
    Inventors: Greja Johanna Adriana Maria Verheijden, Roel Daamen, Gerhard Koops
  • Publication number: 20150091911
    Abstract: Systems, methods and methods of manufacture for, among other things, a MEMS device may be provided with a pair of electrodes that are separated by a gap. At least one of the electrodes is movable toward the other electrode. The MEMS device may include a beam that is positioned within the gap and arranged between the electrodes. As the movable electrode moves toward the other electrode, a portion of the MEMS device also moves towards, comes into contact with, and deflects the beam. As the beam deflects, it applies a force upon the MEMS device that opposes the movement of electrode toward the other electrode.
    Type: Application
    Filed: January 7, 2014
    Publication date: April 2, 2015
    Applicant: PIXTRONIX, INC.
    Inventor: Wilhelmus A. de Groot
  • Publication number: 20150091477
    Abstract: The present invention relates to an electromechanical transducer capable of arbitrarily varying the amount of deflection of a vibrating membrane for every element. The electromechanical transducer includes a plurality of elements including at least one cell that includes a first electrode and a second electrode opposed to the first electrode with a gap sandwiched therebetween and a direct-current voltage applying unit configured to be provided for each element and to separately apply a direct-current voltage to the first electrodes in each element. The first electrodes and the second electrodes are electrically separated for every element.
    Type: Application
    Filed: December 5, 2014
    Publication date: April 2, 2015
    Inventors: Atsushi Kandori, Makoto Takagi, Masao Majima
  • Patent number: 8994246
    Abstract: Provided is an actuator simultaneously having better deformation response characteristics and larger generative force. The actuator includes a pair of opposing electrodes and an intermediate layer disposed therebetween. The intermediate layer contains at least an electrolyte and includes at least a polymer fiber layer. The polymer fiber layer includes a plurality of polymer fibers crossing each other and intertwined three-dimensionally. The polymer fiber layer has fused portions at intersections of the polymer fibers.
    Type: Grant
    Filed: September 26, 2011
    Date of Patent: March 31, 2015
    Assignee: Canon Kabushiki Kaisha
    Inventors: Tetsuo Hino, Amita Goyal, Sotomitsu Ikeda
  • Publication number: 20150087993
    Abstract: An ultrasound unit includes a plurality of elements each including N cells, in each of which a bottom electrode and a top electrode that constitutes a membrane are arranged facing each other with a cavity therebetween, wherein the element has N1 first cells and N2 (where N1?N2, N1+N2=N) second cells having higher reception sensitivity and lower transmission sensitivity than the first cells.
    Type: Application
    Filed: December 10, 2014
    Publication date: March 26, 2015
    Applicant: OLYMPUS CORPORATION
    Inventor: Ken SATO
  • Publication number: 20150084480
    Abstract: The invention relates to a device for converting heat energy into mechanical energy comprising a first (4) and a second (6) bistable area passing from a first stable state to a second stable state by means of a thermal effect or mechanical action, said areas (4, 6) being mechanically coupled such that the passage from one state to the other of one area (4, 6) by means of a thermal effect causes the other area (6,4) to pass from one state to the other, each area (4, 6) having a blistering temperature and an unblistering temperature, the blistering temperature being higher than the unblistering temperature. Said device is intended to be placed in contact with an environment (SC) having at least one given temperature, such that the temperature of the environment (SC) is lower than the blistering temperature of the first area (4) and is higher than the blistering temperature (Tc6) of the second area (6).
    Type: Application
    Filed: April 29, 2013
    Publication date: March 26, 2015
    Applicant: Commissariat a l'energie atomique et aux ene alt
    Inventors: Guillaume Savelli, Philippe Coronel
  • Publication number: 20150076962
    Abstract: Method for harvesting energy using an EAP based deformable body. The EAP based deformable body is an elastically deformable body including an arrangement of stretchable synthetic material and electrodes being arranged as a variable capacitor with a capacitance that varies as the deformable body stretches and relaxes. The method includes: looping through an energy harvesting cycle with a) stretching the deformable body from a minimal relaxed size L1 to a maximal stretched size L2; b) at the maximal stretched size electrically charging of the variable capacitor to create an electric field over the capacitor with an upper electric field level value; and subsequently c) a relaxation step from maximal stretched size to the minimal relaxed size; d) at the minimal relaxed size of the deformable body, electrically discharging the capacitor to a minimal charge level and a minimal electric field level value.
    Type: Application
    Filed: May 7, 2013
    Publication date: March 19, 2015
    Applicant: SINGLE BUOY MOORINGS INC.
    Inventor: Rick Van Kessel
  • Publication number: 20150076961
    Abstract: A system and method reduce stiction while manipulating micro objects on a surface. The system and method employed a field generator configured to generate a driving force at a frequency and amplitude to at least partially overcome stiction between the micro objects and the surface. The field generator is further configured to generate a manipulation force to manipulate the micro objects on the surface in two dimensions. The manipulation force is spatially programmable.
    Type: Application
    Filed: September 19, 2013
    Publication date: March 19, 2015
    Applicant: Palo Alto Research Center Incorporated
    Inventors: Jason Thompson, Eugene M. Chow, JengPing Lu, Gregory L. Whiting, David K. Biegelsen, Janos Veres
  • Publication number: 20150069880
    Abstract: A vibration power generator configured to generate power by displacement between an electret group having a plurality of electrets and an electrode group having a plurality of electrodes in a relative movement direction in response to an external vibration, includes a casing in which the electret group and the electrode group are disposed, a fixed member in which one of the electret group and the electrode group is disposed, the fixed member being fixed to a side of the casing, and a movable member in which the other of the electret group and the electrode group is disposed. The movable member is disposed in the casing such that the movable member is relatively movable in response to the external vibration while opposed to the fixed member.
    Type: Application
    Filed: February 8, 2013
    Publication date: March 12, 2015
    Applicant: OMRON Corporation
    Inventors: Misato Nabeto, Masayo Ikuta, Tatsuakira Masaki
  • Publication number: 20150070793
    Abstract: In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame, and an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame.
    Type: Application
    Filed: November 17, 2014
    Publication date: March 12, 2015
    Inventors: Robert J. Calvet, Guiqin Wang, Roman C. Gutierrez, Xiaolei Liu
  • Publication number: 20150070941
    Abstract: An electrostatic induction conversion device includes: an input-side electrostatic actuator that includes a first fixed electrode and a first movable electrode facing the first fixed electrode; and an output-side electrostatic actuator that includes a second movable electrode linked to the first movable electrode via a link mechanism member, which increases or decreases a displacement quantity representing an extent of displacement occurring at the first movable electrode, and a second fixed electrode facing the second movable electrode, wherein: a permanently charged layer is deposited on an electrode surface either on a movable electrode side or on a fixed electrode side, at the input-side electrostatic actuator and the output-side electrostatic actuator.
    Type: Application
    Filed: August 26, 2013
    Publication date: March 12, 2015
    Applicant: National University Corporation Shizuoka Universit y
    Inventors: Masato Suzuki, Hiroki Hayashi, Gen Hashiguchi, Tatsuhiko Sugiyama
  • Patent number: 8975801
    Abstract: Thermionic solar converter with a linear arrangement of the components, suitable for the direct conversion of solar energy into electrical energy and the combined generation of heat and energy, in the form of an elongated transparent vacuum tube comprising: a cathode (5) and at least one anode (6), said cathode and anode being arranged longitudinally alongside each other along the tube: grid electrodes (10, 11, 13, 14, 15, 16) for generating electric fields; means (18) for directly cooling the at least one anode; means (7) for electrically connecting the electrodes from the inside to the outside; an optical access window (4) along the surface area of the tube; wherein: the cathode is made of conductive refractory material, is suspended centrally inside the tube with an elongated form and forms the element for capturing the solar energy, on which the sunlight is directly focused in order to perform the thermionic conversion, without any intermediate heat transfer means; the electrical connection means form a l
    Type: Grant
    Filed: February 24, 2012
    Date of Patent: March 10, 2015
    Assignee: Consiglio Nazionale Delle Richerche
    Inventor: Massimo Adriani
  • Publication number: 20150061455
    Abstract: A vibration device including a supporting portion formed to cover both ends of a vibration region, and a method of manufacturing the vibration device are provided. The vibration device may include a lower substrate on which an insulating layer is formed, an upper substrate connected onto the insulating layer, and including a vibration region that vibrates and that is separated from the lower substrate by at least a predetermined distance, and a supporting portion formed to cover both ends of the vibration region, to support the vibration region.
    Type: Application
    Filed: September 2, 2014
    Publication date: March 5, 2015
    Inventors: In Bok BAEK, Han Young YU, Yark Yeon KIM, Young Jun KIM, Chang Geun AHN, Yong Sun YOON, Bong Kuk LEE, Ji Eun LIM, Won Ick JANG
  • Publication number: 20150061464
    Abstract: Provided are an energy harvester using a mass, and a mobile device including the energy harvester. The energy harvester includes: a mass; first and second substrates spaced apart from each other, wherein one of the first and second substrates is connected to the mass; first and second electrodes provided on the first and second substrates; and an energy generator provided between the first and second electrodes, wherein the energy generator generates electric energy upon a relative movement between the first substrate and the second substrate caused by a movement of the mass.
    Type: Application
    Filed: November 13, 2014
    Publication date: March 5, 2015
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Young-jun PARK, Jin S. HEO
  • Patent number: 8966985
    Abstract: A resonator has a body of silicon-based material with at least one resonant part having at least one portion covered in an electrical conduction layer and at least one portion not covered in a conduction layer. The portion of the resonator not covered in a conduction layer is covered in a passivation layer in such a manner that, in the resonant part, the silicon-based material is completely covered by the conduction layer and by the passivation layer in combination. A vibrating sensor is also provided which includes such a resonator and a method of fabricating the resonator.
    Type: Grant
    Filed: November 10, 2010
    Date of Patent: March 3, 2015
    Assignee: Sagem Defense Securite
    Inventor: Paul Vandebeuque
  • Patent number: 8970087
    Abstract: Provided is an ion conducting actuator that easily allows reduction in size and integration thereof, compared to existing one, and gives a large generating force. The columnar ion conducting actuator includes a tubular member serving as a first electrode, an ion-supplying material disposed inside the tubular member, and linear second electrodes disposed inside the tubular member. The ion-supplying material lies between the inner wall of the tubular member and the second electrodes and includes a polymer gel containing positive ions and negative ions. The tubular member contains a plurality of the second electrodes. Either the positive ions or the negative ions contained in the polymer gel move toward the plurality of second electrodes side and the other ions move toward the inner wall side of the tubular member by applying a voltage between the tubular member and the plurality of the second electrodes to elongate the ion conducting actuator.
    Type: Grant
    Filed: May 11, 2011
    Date of Patent: March 3, 2015
    Assignee: Canon Kabushiki Kaisha
    Inventors: Tetsuo Hino, Sotomitsu Ikeda
  • Publication number: 20150048714
    Abstract: An electroactive polymer structure includes a first flexible electrode, a second flexible electrode, and a polymer dielectric layer with ionic liquid on top of the first electrode including at least two regions. Each region of the polymer dielectric layer includes a different ionic liquid concentration. The polymer dielectric layer is in between the first flexible electrode and the second flexible electrode.
    Type: Application
    Filed: August 13, 2013
    Publication date: February 19, 2015
    Applicant: Palo Alto Research Center Incorporated
    Inventors: Tse Nga Ng, Kye-Si Kwon
  • Publication number: 20150048715
    Abstract: A paper-base flexible power-generation apparatus, and a manufacturing method thereof. The flexible power-generation apparatus comprises: a first assembly (1) formed by a paper-base insulation layer (11) and a first metal conductive layer (12) deposited on the surface of the paper-base insulation layer, and a second assembly (2) formed by a paper-base insulation layer (21), a second metal conductive layer (22) deposited on the surface of the paper-base insulation layer, and an electret material layer (23) coating on the surface of the second metal conductive layer. The two edges of the two assemblies are each provided with an electrode (13, 24) and the electrodes are connected through a packaging process. The first metal conductive layer is opposite to and spaced from the electret material layer. The flexible power-generation apparatus has a low cost, is easy to manufacture, has high output power, and is especially suitable for being integrated with other flexible electronic devices.
    Type: Application
    Filed: December 3, 2013
    Publication date: February 19, 2015
    Inventors: Jun Zhou, Qize Zhong, Junwen Zhong, Bin Hu, Qiyi Hu
  • Patent number: 8952594
    Abstract: An actuator includes an electrolyte membrane, first and second driving electrodes that are disposed on the opposite surfaces and that give a potential difference to the electrolyte membrane, a sensor that is formed on the electrolyte membrane and that detects a force acting on the electrolyte membrane, and a driving control circuit that supplies a drive voltage to the first and second driving electrodes on the basis of an instruction signal and a detection output of the sensor. The driving control circuit applies a PWM drive voltage with a duty ratio corresponding to a difference between the instruction signal and the detection output of the sensor across the first driving electrode and the second driving electrode.
    Type: Grant
    Filed: April 11, 2011
    Date of Patent: February 10, 2015
    Assignee: Seiko Epson Corporation
    Inventor: Tetsuro Matsumoto
  • Patent number: 8946971
    Abstract: The present invention provides an actuator which uses a cationically conductive polymer electrolyte and shows a large deformation response. The actuator has a pair of opposing electrodes and an intermediate layer arranged between the pair of the electrodes, which actuator being curved and displaced when voltage is applied to the electrodes, wherein the intermediate layer has at least: the cationically conductive polymer electrolyte having an ether bond site and an anion site in its molecule; and a weakly acidic material which interacts with the ether bond site.
    Type: Grant
    Filed: December 6, 2011
    Date of Patent: February 3, 2015
    Assignee: Canon Kabushiki Kaisha
    Inventors: Tetsuo Hino, Jun Yamamoto
  • Patent number: 8941285
    Abstract: In one aspect, the present invention provides nanosized systems for generating electrical energy based on the use of a chemically reactive composition to generate a thermoelectric wave. For example, the system can include at least one nanostructure (e.g., a carbon nanotube) extending along an axial direction between a proximal end and a distal end. A chemically reactive composition is dispersed along at least a portion of the nanostructure, e.g., along its axial direction, so as to provide thermal coupling with the nanostructure. The chemical composition can undergo an exothermic chemical reaction to generate heat. The system can further include an ignition mechanism adapted to activate the chemical composition so as to generate a thermal wave that propagates along the axial direction of the nanostructure, where the thermal wave is accompanied by an electrical energy wave propagating along the axial direction.
    Type: Grant
    Filed: April 23, 2012
    Date of Patent: January 27, 2015
    Assignee: Massachusetts Institute of Technology
    Inventors: Michael S. Strano, Won Joon Choi, Joel T. Abrahamson, Jae-Hee Han
  • Patent number: 8941192
    Abstract: A method for making an actuator device includes forming a substantially planar structure having a stage resiliently supported for movement within a plane of the structure, an actuator coupled to an outer periphery of the stage and operable to apply a force acting in the plane and tangentially to the stage when actuated, the actuator comprising a fixed frame and a moving frame resiliently supported for reciprocal movement relative to the fixed frame by a motion control flexure, and an outer frame surrounding and supporting the stage and the actuator. The moving frame is moved to a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance, and the moving frame is then fixed at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.
    Type: Grant
    Filed: September 28, 2011
    Date of Patent: January 27, 2015
    Assignee: DigitalOptics Corporation MEMS
    Inventors: Robert J. Calvet, Xiaolei Liu, Ankur Jain, Lakshminarayan Hariharan, Roman C. Gutierrez
  • Patent number: 8941284
    Abstract: The present invention relates to an electromechanical converter, in particular an electromechanical sensor, actuator and/or generator, which comprises a polymer element obtainable from a reaction mixture comprising a polyisocyanate, a polyisocyanate prepolymer and a compound having at least two isocyanate-reactive hydroxy groups. The present invention additionally relates to a process for the production of such an electromechanical converter and to the use of a polymer element according to the invention as an electromechanical element. The present invention relates further to an electronic and/or electrical device comprising an electromechanical converter according to the invention and to the use of an electromechanical converter according to the invention in an electronic and/or electrical device.
    Type: Grant
    Filed: July 20, 2010
    Date of Patent: January 27, 2015
    Assignee: Bayer MaterialScience AG
    Inventors: Werner Jenninger, Sebastian Dörr, Joachim Wagner
  • Publication number: 20150022431
    Abstract: A Micro-Electro-Mechanical System (MEMS) accelerometer employing a rotor and stator that are both released from a substrate. In embodiments, the rotor and stator are each of continuous a metal thin film. A stress gradient in the film is manifested in capacitive members of the rotor and stator as a substantially equal deflection such that a relative displacement between the rotor and stator associated with an acceleration in the z-axis is substantially independent of the stress gradient. In embodiments, the stator comprises comb fingers cantilevered from a first anchor point while the rotor comprises comb fingers coupled to a proof mass by torsion springs affixed to the substrate at second anchor points proximate to the first anchor point.
    Type: Application
    Filed: March 11, 2013
    Publication date: January 22, 2015
    Inventors: Rashed Mahameed, Mohamed A. Abdelmoneum
  • Publication number: 20150022053
    Abstract: The invention relates to a device including: a movable element (1) comprising teeth (11; 11i, i, 11i+1, 11i+2, 11i+3, 11i+4); a driving element (2) for engaging with the teeth (11; 11i, 11i+1, 11i+2, 11i+3, 11i+4) of the movable element (1) so as to set the movable element (1) in motion in a direction of movement; an actuator element (3) capable of generating an alternating movement so as to move the driving element (2) according to at least two phases, i.e.
    Type: Application
    Filed: January 11, 2013
    Publication date: January 22, 2015
    Inventors: Patrice Minotti, Gilles Bourbon, Patrice Le Moal
  • Publication number: 20150016221
    Abstract: A transducer includes a plurality of elements each including at least one cell structured in such a way that a diaphragm including one of a first electrode and a second electrode disposed facing each other via a space is vibratably supported, bias wiring for supplying a bias voltage to the first electrode to provide a potential difference between the first and the second electrodes, and for electrically connecting the first electrodes of the elements to each other, and signal wiring lines each connected to a different one of the elements. The bias wiring includes a plurality of branch wiring lines to each of which the first electrodes of a part of the elements are connected, a plurality of first common wiring lines for connecting the branch wiring lines to each other, and a second common wiring line for connecting the first common wiring lines to each other.
    Type: Application
    Filed: July 8, 2014
    Publication date: January 15, 2015
    Inventors: Eiji Takeuchi, Takahiro Akiyama, Kazutoshi Torashima
  • Publication number: 20150016222
    Abstract: An electrostatic capacitance transducer includes: multiple elements each having a cell including a first electrode, and a vibrating film including a second electrode, formed across a gap from the first electrode; a first flexible printed circuit having multiple first lines; and a second flexible printed circuit having multiple second lines. Part of the multiple elements are grouped into a first element group, each one thereof being electrically connected to a different one of the first lines. Part of the multiple elements other than the first element group are grouped into a second element group, each one thereof being electrically connected to a different one of the second lines. The intervals between adjacent lines in at least part of the plurality of first and second lines are wider at an opposite side from a connection side where the lines have been connected to the multiple elements, than at the connection side.
    Type: Application
    Filed: July 9, 2014
    Publication date: January 15, 2015
    Inventor: Atsushi Kandori
  • Patent number: 8933596
    Abstract: A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro actuator. A micro tool is coupled to the micro shaft and is operable to perform work in response to motion of the micro shaft.
    Type: Grant
    Filed: April 16, 2012
    Date of Patent: January 13, 2015
    Assignee: MicroZeus, LLC
    Inventor: Harold Stalford
  • Patent number: 8933611
    Abstract: Electricity generated by a vibration power generator 200 can be extracted efficiently by providing the vibration power generator 200, a rectifier circuit bridge 205, an output controlling circuit 201, a load detecting circuit 202 and a frequency detecting circuit 204 and detecting a frequency of the vibration power generator 200 and then controlling an impedance of an output controlling circuit 101 depending on the frequency.
    Type: Grant
    Filed: June 10, 2010
    Date of Patent: January 13, 2015
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventors: Hiroshi Nakatsuka, Masaaki Kuranuki, Keiji Onishi
  • Publication number: 20150009778
    Abstract: An electromechanical transducer includes a plurality of cells arranged on a substrate, each cell having a first electrode and a second electrode disposed opposite to the first electrode with a gap interposed between them. A plurality of elements, each including at least two cells with their first electrodes or second electrodes electrically connected to each other, are arranged in the transducer. Vibration film structures that includes respective vibration films disposed above the substrate with a gap between them are arranged in the intervals which are devoid of elements separating the plurality of elements. With this structure, the non-uniformity of the radiation impedances of the plurality of elements due to the intervals separating the regions where the elements are respectively arranged can be reduced and hence the influence of the intervals separating the elements on the transmission/reception characteristics can also be reduced.
    Type: Application
    Filed: October 25, 2012
    Publication date: January 8, 2015
    Inventors: Atsushi Kandori, Takahiro Akiyama
  • Publication number: 20150008788
    Abstract: A method of providing microelectromechanical structures (MEMS) that are compatible with silicon CMOS electronics is provided. The method providing for processes and manufacturing sequences limiting the maximum exposure of an integrated circuit upon which the MEMS is manufactured to below 350° C., and potentially to below 250° C., thereby allowing direct manufacturing of the MEMS devices onto electronics, such as Si CMOS circuits. The method further providing for the provisioning of MEMS devices with multiple non-conductive structural layers such as silicon carbide separated with small lateral gaps. Such silicon carbide structures offering enhanced material properties, increased environmental and chemical resilience whilst also allowing novel designs to be implemented taking advantage of the non-conductive material of the structural layer.
    Type: Application
    Filed: February 20, 2014
    Publication date: January 8, 2015
    Inventors: Mourad El-Gamal, Frederic Nabki, Paul-Vahe Cicek
  • Publication number: 20150002916
    Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.
    Type: Application
    Filed: September 8, 2014
    Publication date: January 1, 2015
    Applicant: STMICROELECTRONICS INTERNATIONAL N.V.
    Inventors: Sason Sourani, Moshe Medina
  • Publication number: 20150001987
    Abstract: An electromechanical transducer includes a first electromagnetic element and a second electromagnetic element, such as electrodes, disposed opposite to each other with a sealed cavity therebetween. The sealed cavity is formed by removing a sacrifice layer and then performing sealing. A sealing portion is formed by superposing a film of a hardened second sealing material that has fluidity at normal temperature on a film of a first sealing material that does not have fluidity at normal temperature.
    Type: Application
    Filed: September 17, 2014
    Publication date: January 1, 2015
    Inventors: Yuichi Masaki, Yoshihiro Hasegawa
  • Patent number: 8922094
    Abstract: A nanopositioning system for producing a coupling interaction between a first nanoparticle and a second nanoparticle. A first MEMS positioning assembly includes an electro-static comb drive actuator configured to selectively displace a first nanoparticle in a first dimension and an electrode configured to selectively displace the first nanoparticle in a second dimensions. Accordingly, the first nanoparticle may be selectively positioned in two dimensions to modulate the distance between the first nanoparticle and a second nanoparticle that may be coupled to a second MEMS positioning assembly. Modulating the distance between the first and second nanoparticles obtains a coupling interaction between the nanoparticles that alters at least one material property of the nanoparticles applicable to a variety of sensing and control applications.
    Type: Grant
    Filed: February 7, 2011
    Date of Patent: December 30, 2014
    Assignee: UChicago Argonne, LLC
    Inventors: Omar Daniel Lopez, Gary Wiederrecht, David J. Gosztola, Derrick C. Mancini
  • Patent number: 8921957
    Abstract: A MEMS microphone. The MEMS microphone includes a back plate, a membrane, a support structure, a substrate, and an overtravel stop. The membrane is coupled to the back plate. The support structure includes a support structure opening and a first side of the support structure is coupled to a second side of the back plate. The substrate includes a substrate opening and a first side of the substrate is coupled to a second side of the support structure. The overtravel stop limits a movement of the membrane away from the back plate and includes at least one of an overtravel stop structure coupled to the substrate, an overtravel stop structure formed as part of a carrier chip, and an overtravel stop structure formed as part of the support structure in the support structure opening.
    Type: Grant
    Filed: October 11, 2013
    Date of Patent: December 30, 2014
    Assignee: Robert Bosch GmbH
    Inventors: Yujie Zhang, Andrew J. Doller, Thomas Buck
  • Publication number: 20140375168
    Abstract: The present invention relates to a method of manufacturing a capacitive micro-machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), and depositing a second electrode layer (50) on the second dielectric film (40), wherein the first dielectric film (20) and/or the second dielectric film (40) comprises a first layer comprising an oxide, a second layer comprising a high-k material, and a third layer comprising an oxide, and wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.
    Type: Application
    Filed: January 18, 2013
    Publication date: December 25, 2014
    Inventors: Peter Dirksen, Ruediger Mauczok, Koray Karakaya, Johan Hendrik KlooTwijk, Bout Marcelis, Marcel Mulder
  • Publication number: 20140361660
    Abstract: A transducing apparatus that is sensitive to physical vibrations. The transducing apparatus converts physical manifestations into electrical signals.
    Type: Application
    Filed: June 6, 2013
    Publication date: December 11, 2014
    Inventors: EDWIN L. HALL, JR., HAMPTON HOLLIS TANNER
  • Publication number: 20140362460
    Abstract: The present invention employs an actuator including: a movable portion connected to a reflecting member having a reflective surface; a movable comb electrode disposed at a distance from the reflecting member, supported by the movable portion, and extended in a direction parallel to the reflective surface; a stationary comb electrode supported by a supporting portion, extends in the direction parallel to the reflective surface, and disposed alternately with the movable comb electrode; and a voltage controller that applies a voltage to the movable comb electrode and the stationary comb electrode to displace the movable comb electrode and the movable portion in a direction normal to the reflective surface. A portion that supports the movable comb electrode and a portion that supports the stationary comb electrode are disposed such that the movable comb electrode and the stationary comb electrode pass each other.
    Type: Application
    Filed: December 28, 2012
    Publication date: December 11, 2014
    Inventors: Kyota Nozu, Yasuhiro Shimada, Koichiro Nakanishi
  • Publication number: 20140360272
    Abstract: Provided is a capacitive transducer drive device capable of adjusting a potential difference applied between electrodes of a cell with a simple configuration. A capacitive transducer to be driven by the drive device includes a cell including: a first electrode included in a vibrating membrane; and a second electrode formed to oppose the first electrode through intermediation of a gap. One of the first electrode and the second electrode of the cell is electrically connected to a first DC voltage applying unit, and the other of the first electrode and the second electrode of the cell is electrically connected to a second DC voltage applying unit. A voltage to be applied by the second DC voltage applying unit is set to be lower than a voltage to be applied by the first DC voltage applying unit. The voltage to be applied by the second DC voltage applying unit is variable.
    Type: Application
    Filed: May 29, 2014
    Publication date: December 11, 2014
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Atsushi Kandori
  • Publication number: 20140339953
    Abstract: A MEMS resonator active temperature compensation method is provided. The MEMS resonator active temperature compensation method includes: a MEMS resonator is provided, wherein a structural resistance of the MEMS resonator is varied with an environmental temperature; a structural resistance shift value is formed by a variation of the environmental temperature; an electrical circuit is provided, wherein the electrical circuit is electrically connected with the MEMS resonator for providing an adjustment mechanism to the MEMS resonator; and a compensation value is provided from the adjustment mechanism for controlling the structural resistance shift value.
    Type: Application
    Filed: February 12, 2014
    Publication date: November 20, 2014
    Applicant: NATIONAL TSING HUA UNIVERSITY
    Inventors: Sheng-Shian LI, Cheng-Chi CHEN
  • Publication number: 20140339954
    Abstract: A vibration power generator includes: a fixed substrate; a first fixed electrode piece disposed on the fixed substrate, the first fixed electrode piece having a first width of 2w; a second fixed electrode piece disposed on the fixed substrate, the second fixed electrode piece having a second width of 2w; a cover substrate disposed with a space g from the fixed substrate, the cover substrate being opposed to the fixed substrate; a vibrating body disposed between the fixed substrate and the cover substrate; and an electret electrode piece disposed on a side opposed to the first fixed electrode piece and the second fixed electrode piece of the vibrating body, the electret electrode piece having a width that is greater than 2w and less than or equal to 2w+s.
    Type: Application
    Filed: May 12, 2014
    Publication date: November 20, 2014
    Applicant: PANASONIC CORPORATION
    Inventors: Takehiko YAMAKAWA, Yasuyuki NAITO, Keiji ONISHI