Abstract: A PEFS (Piezoelectric Finger Sensor) acts as an “electronic finger” capable of accurately and non-destructively measuring both the Young's compression modulus and shear modulus of tissues with gentle touches to the surface. The PEFS measures both the Young's compression modulus and shear modulus variations in tissue generating a less than one-millimeter spatial resolution up to a depth of several centimeters. This offers great potential for in-vivo early detection of diseases. A portable hand-held device is also disclosed. The PEF offers superior sensitivity.

Abstract: A transducer is optimally driven at or near its resonant frequency by a driver system that adapts to variations and/or changes to the resonant frequency of the transducer due to variations in piezo materials, manufacturing, assembly, component tolerances, and/or operational conditions. The system may include an output controller, a phase track controller, a frequency generator, a drive, circuitry to determine a phase angle between the transducer voltage and transducer current, and circuitry to obtain transducer admittance from the transducer voltage and transducer current.

Abstract: The invention utilizes single and multiple frequency ultrasound generators driving single and multiple frequency resonant and harmonic transducer arrays at frequencies into the megasonic range. Generator signals that increase cavitation efficiency improve the performance of the cleaning, microbiological inactivation, sonochemistry or processing systems.

Abstract: An optical apparatus includes a vibrated member and a piezoelectric element. The piezoelectric element vibrates the vibrated member at a predetermined vibration mode to remove a foreign substance adhered to a surface of the vibrated member. A drive electrode, a first vibration detection electrode and a second vibration detection electrode are provided on a first face of the piezoelectric element, and a ground electrode is provided on a second face of the piezoelectric element. The first vibration detection electrode and the second vibration detection electrode have an axis-symmetrical shape, and are arranged on the first face of piezoelectric element so as to be symmetrical with respect to an axis along which a predetermined vibration node occurs when the vibrated member vibrates at the predetermined vibration mode.

Abstract: A piezoelectric/electrostrictive element with improved moisture resistance while having less degradation in its piezoelectric/electrostrictive properties and a method of manufacturing such a piezoelectric/electrostrictive element are provided. A laminated vibrator of a piezoelectric/electrostrictive element has a structure in which an electrode film, a piezoelectric/electrostrictive film, another electrode film, another piezoelectric/electrostrictive film, and another electrode film are laminated one above the other. In the manufacture of the piezoelectric/electrostrictive element, the laminated vibrator and a counter electrode are immersed in an electrodeposition coating fluid containing a coating component so that the electrodeposition coating fluid is brought into contact with the surfaces of the laminated vibrator and the counter electrode.

Abstract: An electrical waveform generating circuit has a programmable current source-driver. A digital switched current source is coupled to the programmable current source-driver and controlled by waveforms stored in the programmable current source-driver. A plurality of MOSFETs is coupled to the programmable current source driver. A center-tapped RF transformer is provided and has a primary coupled to the plurality of high voltage MOSFETs. A transducer is coupled to a secondary of the RF transformer.

Abstract: The disclosed is a piezoelectric phase shifter, which comprises: an input part for inputting input voltages; an output part for outputting output voltages; and a control part for tuning phase difference between the output and input voltages, which are made of a piezoelectric ceramic plate. Further, the input, output and control parts are separated by insulating gaps respectively. The wide phase shift range and good ability to manage high power and relatively high energy transmission efficiency may be obtained by the disclosure.

Abstract: There is provided an atomic force microscope (AFM) with increase the speed and sensitivity of detection of the resonant frequency shift in a cantilever. An AFM (1) extracts a reference signal and a phase shift signal from a detection signal from a displacement sensor of the cantilever. The reference signal is restrained from a phase change in accordance with the resonant frequency shift. The phase shift signal has a phase shifted in accordance with the resonant frequency shift. The AFM (1) determines the phase difference of the phase shift signal from the reference signal, as the resonant frequency shift. The AFM (1) may detect the phase difference between a plus-minus inversion point on the reference signal and a corresponding plus-minus inversion point on the phase shift signal. The AFM (1) may adjust phase before phase detection. The phase adjustment may move the detection point for the resonant frequency shift defined on the oscillation waveforms to the plus-minus inversion point.

Abstract: There is provided a scanning probe microscope that allows active damping to be advantageously carried out. A Z scan control section functions as a driving control section to control a Z scanner that is a controlled object. Driving control is performed by supplying the controlled object with a driving signal processed by an adjustment function. The adjustment function adjusts the driving signal by using a simulated transfer function that simulates an actual transfer function indicative of an actual frequency characteristic of the controlled object so that executing processing of the simulated transfer function on the adjusted driving signal results in decrease of vibration of an output signal from the simulated transfer function.

Abstract: There is provided a method of driving an ultrasonic motor configured so that two alternating voltages having a predetermined difference between respective phases and having predetermined drive frequencies are applied to a laminated piezoelectric body that has driving parts abutting a member to be driven, whereby simultaneous excitation of vertical and bending vibrations and hence excitation of an elliptical vibration occur in the piezoelectric body, and the driving parts receiving drive force from the elliptical vibration drive the driven member. The method includes performing wear particle removal drive at a fixed frequency during regular reciprocal drive so as to intermittently interrupt the regular drive, the regular drive being such that the driving parts repeatedly reciprocally drive the driven member within a predetermined range, and the wear particle removal drive being such that the driving parts reciprocally drive the driven member within a removal drive range wider than the predetermined range.

Abstract: A first oscillating portion is provided with a first piezoelectric element having a first drive electrode. A second oscillating portion has a central axis different from that of the first oscillating portion and is provided with a second piezoelectric element having a second drive electrode. The first drive electrode and the second drive electrode are connected together.

Abstract: A device for driving ultrasound piezoelectric actuators, on the basis of a DC voltage. The device includes an impedance matching branch mounted in parallel with the actuators and including a capacitor in series with a selection switch, which is closed and opened, at the same time as the selection switch of the actuator to be excited, so that the voltage across the terminals of the matching capacitor and the voltage across the terminals of the selected actuator are almost zero before the start and after the end of the injection. A method of controlling the matching switch makes it possible to benefit from the capacitive charge during the pulse train causing the injection, while circumventing abrupt discharges at the start of the train. Such a device and method may find application to the engines of motor vehicles, as one example.

Abstract: To generate a drive wave for driving a piezo-actuator. Drive data concerning the number of drive waves supplied through a serial bus is stored in a drive data storage unit. A comparing circuit detects whether or not the number of drive waves have been generated, the number being specified by the drive data, and the drive wave keeps being generated until such detection is made.

Abstract: In a piezoelectric actuator driver circuit, a resistor provided to detect current is inserted in a current path for a piezoelectric actuator. A signal of a decreased voltage of the resistor is subjected to positive feedback to an amplifier circuit via a band-pass filter. An output signal of the amplifier circuit is subjected to negative feedback to the amplifier circuit via a band-elimination filter. The band-pass filter allows a signal of a fundamental resonant frequency of a piezoelectric device, which includes the piezoelectric actuator, to pass therethrough, and the band-elimination filter blocks the signal of the fundamental resonant frequency. Thus, a loop gain at a higher-order resonant frequency with respect to the fundamental resonant frequency becomes very low and a higher-order resonant mode can be effectively suppressed.

Abstract: In a piezoelectric-actuator driving circuit for driving a piezoelectric actuator, an amplifier circuit amplifies a signal output from a feedback circuit and supplies the amplified signal to a non-inverting amplifier circuit and an inverting amplifier circuit. The non-inverting amplifier circuit amplifies the output voltage of the amplifier circuit with a predetermined gain and applies the amplified voltage to a first terminal of the piezoelectric actuator. The inverting amplifier circuit inverts and amplifies the output voltage of the amplifier circuit with the same gain as that of the non-inverting amplifier circuit and then applies the amplified voltage to a second terminal of the piezoelectric actuator through resistors. The feedback circuit amplifies a difference between voltages at respective ends of the resistor and supplies the amplified difference to the amplifier circuit.

Abstract: Energy converters and associated methods are disclosed herein. In one embodiment, an energy converter includes a first structural member spaced apart from a second structure member, a first piezoelectric element and a second piezoelectric element individually coupled to the first structural member and the second structural member, and a deflection member tensionally suspended between the first and second piezoelectric elements. The deflection member is substantially rigid.

Abstract: Disclosed are a method for operating a piezoelectric drive system (10) used for adjusting movable parts (12, 14), especially in a motor vehicle (13), as well as a piezoelectric drive unit (10) comprising at least one piezo motor (12) that is fitted with at least one piezo actuator (18). At least one frictional element (30) of the piezo motor (12) makes it possible to generate a relative movement in relation to a frictional surface (14) located across from the frictional element (30). The at least one piezo actuator (18) is triggered with an excitation signal (93) by means of an electronic unit (42). A response signal (130) of the drive system (10) is detected using the at least one piezo actuator (18), a change in the load of the drive system (10) being recognized as a result of a change in the response signal (130).

Abstract: A phacoemulsification system includes a phacoemulsification handpiece including a cutting tip ultrasonically vibrated by an ultrasonic transducer. A power supply is provided for driving the ultrasonic transducer at a resonant frequency of the transducer and cutting tip and varying power to the transducer, in response to loading of the cutting tip, by phase shifting voltage and current supplied to the transducer.

Abstract: A prestress-adjustable piezoelectric gripping device is provided, in which a prestressing device adjusts a prestressing force applied to a piezoelectric element of a piezoelectric unit on the basis of a feedback signal from a force-sensing unit, so as to adjust the friction between the piezoelectric unit and a gripping unit. By utilizing the deformation of the piezoelectric element to drive the gripping unit many times, the gripping velocity and gripping force of the gripping unit can be controlled, and the prestress-adjustable piezoelectric gripping device of the invention can achieve a long driving displacement while maintaining high precision.

Abstract: A drive apparatus for an ultrasonic motor is provided wherein a diphase alternating drive signal having a predetermined phase difference and a predetermined drive frequency is applied to an ultrasonic vibrator equipped with a driver to be in contact with a driven member, such that longitudinal vibration and bending vibration are simultaneously generated in the ultrasonic vibrator to generate elliptical vibration, and drive force is obtained from the elliptical vibration to drive the driven member by the ultrasonic vibrator. The drive apparatus for the ultrasonic motor includes drive unit for generating the alternating drive signal and applying the alternating drive signal to the vibrator to drive the driven member, and burst drive unit for performing burst drive by applying, to the vibrator, a burst signal to inhibit residual vibration in the driven member after the driving of the driven member by the drive unit has been stopped.

Abstract: A method for driving an ultrasonic motor having an actuator section includes: a step of starting the ultrasonic motor by applying an AC voltage with a first frequency to the actuator section; a voltage detection step of detecting a voltage generated at the actuator section while lowering a driving frequency from the first frequency to a second frequency at which the ultrasonic motor stops; a starting step of starting the ultrasonic motor with a third frequency; and a driving step of changing the driving frequency from the third frequency to a lower frequency such that the driving frequency has a value within an operation frequency range, wherein the operation frequency range is within a range on a higher frequency side than the driving frequency at which a maximum voltage is detected in the voltage detection step.

Abstract: An electroacoustic transducer assembly and probe for emitting and receiving acoustic radiation beams. The transducer assembly comprising a plurality of transducer elements, each one composed of an electroacoustic element, arranged side by side and spaced apart along a row having a first end. Starting from transducer element proximate to the first end, adjacent transducer elements are constructed and arranged create an electroacoustic pair. A first element of the electroacoustic pair is constructed and arranged to only transmit acoustic pulses and a second element of the electroacoustic pair is constructed and arranged to only receive acoustic pulses. Each electroacoustic pair share a common connection line which branches off into a transmit branch connected to the first element and a receive branch connected to the second element.

Abstract: A controller for a high-frequency agitation source includes a signal generator to generate a drive signal having a variable duty cycle. The drive signal is used to drive the high-frequency agitation source. The controller also includes a temperature detector to detect the temperature of the high-frequency agitation source. The controller is configured to vary the duty cycle of the drive signal in response to the temperature of the high-frequency agitation source. By varying the duty cycle of the drive signal, the average power supplied to the piezoelectric crystal can be varied while still maintaining a fixed amplitude of oscillation. This allows the temperature of a high-frequency agitator, for example, a piezoelectric crystal, to be controlled.

Abstract: An optical apparatus includes a vibrated member and a piezoelectric element. The piezoelectric element vibrates the vibrated member at a predetermined vibration mode to remove a foreign substance adhered to a surface of the vibrated member. A drive electrode, a first vibration detection electrode and a second vibration detection electrode are provided on a first face of the piezoelectric element, and a ground electrode is provided on a second face of the piezoelectric element. The first vibration detection electrode and the second vibration detection electrode have an axis-symmetrical shape, and are arranged on the first face of piezoelectric element so as to be symmetrical with respect to an axis along which a predetermined vibration node occurs when the vibrated member vibrates at the predetermined vibration mode.

Abstract: A single element of an ultrasonic transducer includes at least one combination of an equivalent series capacitor C1, an equivalent series inductor L1, and an equivalent series resistance R1. The ultrasonic transducer further includes an equivalent parallel capacitor C0. An inductor L2 is connected in series between the ultrasonic transducer and the drive circuit. A first resonance frequency of the equivalent series capacitor C1 and the equivalent series inductor L1 is F0. A second resonance frequency determined by at least the equivalent parallel capacitor C0 and the inductor L2 is Fp. A drive circuit drives the ultrasonic transducer while switching the driving frequency of the ultrasonic transducer to one of the resonance frequency F0 and the resonance frequency Fp.

Abstract: For tuning a piezo electric fan, a controller measures a natural frequency of the piezo electric fan by applying a stress and measuring a response to the stress. A frequency of an alternating current (AC) input signal is adjusted by the controller to substantially match the natural frequency. The adjusted AC input having the natural frequency is provided to the piezo electric fan for improved efficiency.

Abstract: Oscillators include a resonator having first and second electrodes and configured to resonate at a first frequency at which the first and second electrodes carry in-phase signals and at a second frequency at which the first and second electrodes carry out-of-phase signals. A driver circuit is configured to selectively sustain either the in-phase signals on the first and second electrodes or the out-of-phase signals on the first and second electrodes so that the resonator selectively resonates at either the first frequency or the second frequency, respectively. Related oscillator operating methods are also disclosed.

Abstract: A phase-locked loop for controlling an electromechanical component comprises a digitally controlled oscillator (10), a phase comparator (20), and a digital loop filter (30). The digitally controlled oscillator (10) has an output (11), at which an oscillator signal (SOSC) can be picked up and which can be coupled to a first terminal (51) of the electromechanical component (50). The phase comparator (20) comprises a first input (21), which is coupled to the output (11) of the digitally controlled oscillator (10), and a second input (22), which can be coupled to the first terminal (51) or to a second terminal (52) of the electromechanical component (50) for feeding a current signal (S3). The digital loop filter (30) is connected between the phase comparator (20) and the digitally controlled oscillator (10).

Abstract: A micromotion mechanism includes: a fixing base; a movable element supported by the fixing base and movable thereon; an ultrasonic actuator for relatively moving the movable element and the fixing base; and a control device for outputting a drive signal of the ultrasonic actuator. The drive signals of the ultrasonic actuator during the micromotion drive are two types of burst signals equal in frequency and different in phase, and amplitude of the start and end of each of the two burst signals changes, and the maximum amplitude of at least one of the two burst signals is lower than in the normal driving operation.

Abstract: An ultrasound system for providing megasonics and ultrasonics to a liquid at different frequencies and/or sweeping frequencies with associated generators, transducers, operations between resonance and anti-resonance, non-resistive output with phase shift, multiple/sweep/single frequency modes, individually controlled sections, gate drive power control, variable inductive compensation for temperature changes, parallel inductor matching, stacked ceramics and non-volatile memory storage of fault, error and failure history.

Abstract: One embodiment of the present invention features a circuit for driving a piezoelectric actuator, comprising a first transmission line to provide an input signal having a time-varying voltage; a second transmission line to provide a predetermined voltage current; a piezoelectric element; and a switch coupled to the second transmission line and the piezoelectric element, the switch configured to electrically connect and disconnect the predetermined voltage current to and from the piezoelectric element based on the input signal.

Abstract: A vibration wave driven apparatus capable of preventing a resonance frequency of a vibrator from being shifted to a frequency side higher than a fixed drive frequency of the vibrator during the execution of phase difference control or voltage control. Driving signals are supplied from a control apparatus to a vibration-type actuator having a piezoelectric element that functions as an electro-mechanical energy conversion element. To control the drive of the vibration-type actuator, either a phase difference between the driving signals or a voltage of the driving signals is changed. When either the phase difference or the driving signal voltage is changed, the frequency of the driving signals is set to a predetermined frequency higher than the frequency for use when neither the phase difference nor the driving signal voltage is changed.

Abstract: Driving techniques are provided for achieving a sufficiently low-speed drive and smooth change in the drive speed. Voltage is applied to an electromechanical element by repeating an output cycle in which one voltage value out of a first voltage value is output during a first period, a second voltage value lower than the first voltage value is output during a second period, a third voltage value lower than the second voltage value is output during a third period, and finally the second voltage value is output during a fourth period. Further, a mechanism for changing the lengths of the respective periods is provided to allow for a sufficiently low-speed drive and smooth change in the drive speed.

Abstract: A circuitry comprises a converter means for generating an alternating current signal from an energy from an energy source, a piezo transformer with an input and an output, wherein the input of the piezo transformer is electrically coupled to the converter means, to receive the alternating current signal as an excitation on the input side from the converter means, and wherein the output of the piezo transformer is designed to provide an output current, and a load, which is coupled to the output of the piezo transformer, so that output current flows through the same. The load is designed to convert at least part of the electrical energy supplied by the output current flowing through the load into another form of energy. The load is further designed such that a useful power provided in the form of useful energy is substantially proportional to the output current. The circuitry is designed to adjust the output current to a predetermined value.

Abstract: The invention utilizes multiple frequency megasonic generators driving multiple frequency harmonic transducers. Generator signals that increase cavitation efficiency and that have successive time periods with predominantly stable cavitation and predominantly transient cavitation further improve the performance of the cleaning, microbiological inactivation, sonochemistry or processing systems. Probes that monitor the megasonics and feedback the information to the generator provide consistency of process.

Abstract: An ultrasonic transducer is configured to transmit or receive ultrasonic waves. The ultrasonic transducer includes a vibrating member and a piezoelectric member coupled to the vibrating member. The piezoelectric member includes a first piezoelectric part configured and arranged to be deformed by applied voltage to vibrate the vibrating member or configured and arranged to be deformed by vibration of the vibrating member to produce a potential difference, and a second piezoelectric part configured and arranged to be deformed by applied voltage to statically deflect the vibrating member.

Abstract: An ultrasonic actuator includes: an actuator body (5) including an actuator body (50); a control circuit (150) for setting a driving frequency; power supply sources (191, 192) for applying a driving voltage having the driving frequency to the actuator body; and a memory (170) for storing data related to a difference between antiresonance and resonance frequencies of the actuator body (50). The control circuit (150) determines, based on a reference frequency where a current value of a current fed to the piezoelectric element (50) is local minimum and the data stored in the memory (170), a lower limit of a control range of the driving frequency so that the lower limit is equal to or higher than a frequency where the current value of the current fed to the piezoelectric element (50) is local maximum and determines the driving frequency to be a frequency in the control range.

Abstract: To provide an inertial drive actuator that is easy to assemble and achieves high accuracy in position detection, the actuator has a fixed member, a vibration substrate, a piezoelectric element (movement unit), first and second moving bodies that moves relative to the vibration substrate by inertia, a first electrode provided on the surface of each of the first and second moving bodies, a second electrode provided on a surface of the vibration substrate, an insulating film provided between the first electrode and the second electrode, a drive unit, and a position detection unit that detects the position of the moving body with respect to the vibration substrate based on capacitance of the portion in which the first electrode and the second electrode are opposed to each other.

Abstract: A device for controlling a capacitive charge, in particular a piezoelectric actuator (2) has a signal generator (6) which is used to control a first end step (1) which is used to produce a discrete signal on the capacitive charge. Device has a second end step (3, 4) which is used to generate a continuous signal on the capacitive charge. A counter-coupling of a deviation of an actual discrete signal is produced by a continuous signal required on the capacitive charge.

Abstract: A device for the vibrational detection of a fill-level limit state and a process for the vibrational detection of a fill-level limit state The invention relates to a device for the vibrational detection of a fill-level limit state, and to a corresponding process, with a vibrational resonator (10), at least one piezoelement (11) that is loaded with a piezo-capacitance in order to induce a vibration in the vibrating resonator (10) by providing a drive frequency, and in order to detect a vibration in the vibrating resonator (10); two connecting conductors (12, 13) for the piezoelement (11), and circuit components (18-20) for evaluating a vibration in the vibrating resonator (10) detected by the piezoelement (11), where a branch with a compensating capacitor (2) is connected in parallel to a branch exhibiting the piezoelement (11) in order to compensate a recharging current in the piezoelement (11), which recharging current is dependent on the piezo-capacitance.

Abstract: The invention relates to a method and a circuit arrangement for the precise, dynamic, digital control of especially piezoelectric actuators for micropositioning systems, comprising a regulator, whereby in order to minimise position order deviations the future system behaviour is estimated and current correction signals for the purpose of a feedforward correction are obtained. According to the invention, the signal of the command variable is passed via a switchable bypass to a digital/analog converter with highest resolution for the purpose of reducing the latency times in the feedforward loop of the sampling system, with said converter being operated at the sampling rate of the sampling system. The feedforward loop leads to a fast digital/analog converter which is controlled independent of the sampling system.

Abstract: Conventional drivers for transducers oftentimes did not provide an efficient driving mechanism because the driving signal was not “close enough” to the natural frequency of the transducer. Here, a driver for a transducer is provided that measures the natural frequency of the transducer and generates a driving signal accordingly. Thus, a more efficient driver is provided.

Abstract: An piezo actuator loading signal is determined and generated according to an output value and a pilot control value which depends on at least one operational parameter. The loading signal causes that a valve member moves into a valve seat. A first value characteristic of the electric power fed to the actuator when the valve member hits the valve seat is determined while a second value characteristic of the energy delivered to the actuator is determined when the loading process of the actuator has been completed. A real value characteristic of a sealing force with which the valve member is pressed onto the valve seat is determined according to the first and second value. The real value and a predefined setpoint value are fed to the controller which accordingly adjusts a pilot control value assignment instruction which is used for determining the pilot control value if a predefined condition is met.

Abstract: A drive stage for a scanning probe apparatus includes a supporting member, a plurality of movable portions fixed to the supporting member, and a plurality of drive elements configured and positioned to drive the plurality of movable portions. The drive stage is driven in a direction in which inertial forces of the plurality of movable portions are mutually canceled during drive of the plurality of drive elements. The drive stage further includes an inertial force difference detection member configured and positioned to detect a difference in inertial force between the plurality of movable portions, and an inertial force adjustment member configured and positioned to effect inertial force adjustment so that the difference in inertial force between the plurality of movable portions is decreased on the basis of a detection output of the inertial force detection member.

Abstract: The present invention discloses a high-voltage lamp-ignition piezoelectric oscillator, wherein a piezoelectric capacitor is connected to an LC resonance circuit in parallel to transform power. The LC resonance circuit is used to generate resonance. Voltage is applied to the piezoelectric capacitor to deform the piezoelectric material due to the inverse-piezoelectric effect and then generate electricity after deformation due to the piezoelectric effect. The combination of piezoelectric and inverse-piezoelectric effects generates additional charge and boosts the voltage. Thereby, the present invention decreases power consumption and reduces cost.

Abstract: The present invention is a driving circuit applied to a piezoelectric activation element, which comprises: a driving period generation unit and a switch circuit unit.

Abstract: An object of the present invention is to provide a sensing device capable of easily grasping whether or not a concentration of a sensing target is equal to or less than a standard value.

Abstract: This invention relates to a system for exciting oscillations of micromechanical cantilever sensors and for measuring and evaluating the corresponding oscillations. Such sensors can e.g. be used to detect chemical substances, biomolecules, microorganisms or viruses, or to analyze surface-related phenomena and processes such as conformational changes or phase transitions in thin layers, or to measure physical properties of their surrounding, such as viscoelastic properties of liquids. In the so-called dynamic operation mode, cantilever oscillations are excited and the frequency shift of the ground frequency and/or of one or some higher harmonics, occurring because of a process taking place at the cantilever surface, are measured. In the so-called static mode, the deflection of the cantilever is determined. The setup described in this invention allows measurements in gases as well as liquids.

Abstract: An ultrasonic actuator according to an embodiment of the present invention includes: a stator generating a rotational driving force in accordance with a driving signal having a train pulse, which is used, for example, an AF mechanism; and a rotor converting the rotational driving force into actual movement. In the thus-structured ultrasonic actuator of the present invention, the driving signal is obtained by removing a predetermined number of pulses from the pulse train upon deceleration, and the remaining number of consecutive pulses is set to at least 2 or 4 or more.

Abstract: An angular rate sensor system [10] comprising a vibratory sensing element [12] and signal processing circuit [14]. The element [12] is preferably a polymorphic rectangular bar fabricated from two layers of piezoceramic material [26, 28] divided by a thin center electrode [Ec], and a plurality of electrodes [E1-E4] scored onto the planar conductive surfaces [30, 32]. The element [12] is suspended at its acoustic nodes [N, N?] to vibrate in one direction [V] normal to the physical plane of the electrodes [Ec, E1-E4] using any suitable mounting structure such as parallel crossed filaments [34] or inwardly angled support arms [64] that provide predetermined degrees of lateral [S?] and longitudinal [S] stiffness. The circuit [14] may optionally constitute totally shared [FIG. 7], partially shared [FIG. 8], or totally isolated [FIG. 9] driving and sensing functions, the corresponding element [12] being configured with dual-pair, single-pair, or single-triple outer electrodes [E1-E4], respectively.