Abstract: Methods for integrating quartz-based resonators with electronics on a large area wafer through direct pick-and-place and flip-chip bonding or wafer-to-wafer boding using handle wafers are described. The resulting combination of quartz-based resonators and large area electronics wafer solves the problem of the quartz-electronics substrate diameter mismatch and enables the integration of arrays of quartz devices of different frequencies with the same electronics.

Abstract: A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward.

Abstract: A micro-electromechanical package includes a casing and a microelectronic circuit. At least one portion of the casing includes a piezoelectric material arranged such that, in use, dynamically changing mechanical strain in the at least one portion produces an electrical charge usable as a power source by the microelectronic circuit.

Abstract: A drug delivery pump which uses a piezoelectric drive system to advance a small syringe piston to deliver a liquid drug and a method thereof are disclosed. The present invention has a cost and size advantage compared to traditional pumps and is a very compact and potentially disposable pump device design.

Abstract: A piezoelectric bimorph element two piezoelectric elements to produce an electromotive force by imparting a stress to respective piezoelectric elements. The piezoelectric bimorph element is arranged in an oscillator such that the piezoelectric bimorph element is deformed in the electromotive force generating direction. An electrode having a predetermined area connected with a good electric conductor which is connected to conduct a current generated from the piezoelectric bimorph element is arranged at a patting part interlocked with the oscillator to oscillate. An electrode of opposite pole is connected with the piezoelectric bimorph element through the good electric conductor and arranged at a handle to be coupled with the oscillator, and a rectifier for rectifying an AC electromotive force generated by oscillating the oscillator is arranged to connect the good electric conductors which are connected with both electrodes.

Abstract: A three-dimensional stack-type piezo element has at least one surface that is shaped perpendicular to layer planes of the stack, so that, at least in sections, it is not parallel to a stacking direction of the piezo element.

Abstract: To implement a piezoelectric actuator which can actuate a large object, such as an imaging element, in a predetermined direction at high power without involvement of rotational displacement; which can ensure a large amount of actuation; which is suitable for miniaturization and weight reduction; and which is advantageous in terms of mechanical durability and manufacturing cost. A piezoelectric actuator having a well-balanced mechanical structure is obtained by means of stacking a plurality of cross units, in each of which a pair of bimorph piezoelectric elements (21a and 21b, 21c and 21d) are crossed in the form of the letter X, into two layers (an even number of layers), and fixing the thus-stacked cross units. An imaging element 11 is stably supported by means of two movable ends (C-1, C-2) provided at the extremity of the piezoelectric actuator.

Abstract: A piezoelectric driven MEMS apparatus includes: a substrate; a support part provided on the substrate; a fixed electrode provided on the substrate; and an actuator having a first electrode film, a piezoelectric film formed on the first electrode film, and a second electrode film formed on the piezoelectric film, a first end of the actuator being supported by the support part, a second end of the actuator being disposed so as to be opposed to the fixed electrode. The second end of the actuator is divided into a plurality of electrode parts by a plurality of slits which pass through the first electrode film, the piezoelectric film and the second electrode film, at least a part of each electrode part is linked to parts of adjacent electrode parts, and each electrode part is capable of generating bending deformation individually.

Abstract: In a MEMS type variable capacity having a piezoelectric driving mechanism, a movable head having movable electrodes are arranged thereon, stationary electrodes is positioned to face the movable electrodes, and a piezoelectric driving beam structure is joined to the movable head and have one end fixed to the substrate. The movable electrode and the stationary electrode form a variable capacity. In the variable capacity, the distance and capacitance between the movable electrode and the stationary electrode of the variable capacity can be maintained constant so as to realize a reproducibility and a reliable controllability.

Abstract: A shock resistant and mode mixing resistant assembly for oscillating a device such as a MEMS mirror around a pivot axis by means of two pairs of piezoelectric elements or towers is provided. The resistance to mechanical shock and mode mixing is accomplished by mounting the broad faces or width of each piezoelectric element in a chevron shape so that the broad faces or width dimensions are not in parallel or aligned with each other. Mounting the piezoelectric elements so that the broad faces or width dimensions are at a 15 degree angle with respect to a line perpendicular to the pivot axis has been found to be especially effective.

Abstract: Piezo-electric ceramic transducer 1 has upper piezo-electric active layer 5 and lower piezo-electric active layer 6. Upper insulating layer 2 and lower insulating layer 3, between which upper piezo-electric active layer 5 and lower piezo-electric active layer 6 are placed, are disposed on both surfaces of piezo-electric ceramic transducer 1 in a thickness direction thereof. Two electrode pads 8 and 9 are disposed on a surface of upper insulating layer 2. Electrode pads 8 and 9 are connected with upper electrode layers 7a and lower electrode layers 7b via connection members 12, and voltages are applied to upper piezo-electric active layer 5 and lower piezo-electric active layer 6 via electrode pads 8 and 9. Insulating layers 2, 3 and 4 and piezo-electric active layers 5 and 6 are made of the same material as one another and are integrated by sintering.

Abstract: A semiconductor device includes beam portions and piezoelectric portions. Each of the beam portions is formed to extend in a first direction with one end fixed at a substrate by use of a supporting member and warped by residual stress with the supporting member set as a starting point. Each of the piezoelectric portions is connected to the other end of the corresponding beam portion and formed to extend in a second direction intersecting with the first direction and moves parallel to the substrate in a first direction and in a direction opposite to the first direction by application of bias voltage.

Abstract: A broadband vibration energy harvesting apparatus and method. In one embodiment, a straight piezoelectric beam and a straight biasing beam are disposed parallel to one another and axially compressed by a support structure such that both of the beams are slightly bowed. This buckles and reduces the axial stiffness of both of the beams. The piezoelectric beam is secured to an external vibrating structure and supported by the structure. The flexing motion of the piezoelectric beam generates electrical signals that can be used to power a wide variety of devices. The apparatus is especially sensitive to small amplitude vibration signals and is able to harvest vibration energy over a wide range of frequencies, and is not limited to vibrations at discrete resonant frequencies. The apparatus is especially well suited for use in powering remotely located electrical sensors and actuators employed in automotive, aircraft and aerospace applications.

Abstract: Dithering mechanism and method for eliminating the effects of zero-rate bias in a rate sensor or gyroscope. Both continuously moving and indexing embodiments are disclosed. The mechanism includes a first part mounted in a fixed position centered about a dither axis perpendicular to the input axis of the gyroscope, a second part disposed coaxially of the first part and affixed to the sensing element of the gyroscope, and a plurality of piezoelectrically driven quartz flexure beams extending radially between the first and second parts for dithering the second part about the dither axis. In some embodiments, the dithering mechanism is formed separately from and affixed to the sensing element of the gyroscope, and in others it is formed integrally with the sensing element.

Abstract: The invention is a device for influencing the vibration of a planar element having two opposite surfaces and a neutral fiber plane running between the two surfaces including at least one actuator and at least one sensor which each are provided with transducer materials and are connected to at least one electronic component or an electronic module. The at least one actuator and at least one sensor are completely integrated in the planar element to be spaced from the two surfaces as well as from the neutral fiber plane.

Abstract: An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.

Abstract: The piezoelectric actuator has: a diaphragm made of silicon; an insulating layer formed on a front surface of the diaphragm; a plurality of individual electrodes formed on a surface of the insulating layer; a plurality of piezoelectric bodies formed respectively on surfaces of the plurality of individual electrodes; and a plurality of common electrodes which are respectively arranged across the plurality of piezoelectric bodies from the plurality of individual electrodes, wherein the plurality of piezoelectric bodies are polarized in a direction from the individual electrodes toward the plurality of common electrodes.

Abstract: There is disclosed a piezoelectric/electrostrictive porcelain composition capable of manufacturing, at a comparatively low sintering temperature, a piezoelectric/electrostrictive body which is dense and superior in crystallinity and which has satisfactory piezoelectric/electrostrictive characteristics so that deviation of the composition is not easily generated. The piezoelectric/electrostrictive porcelain composition contains as a major component a piezoelectric/electrostrictive porcelain composition component including a PbMg1/3Nb2/3O3—PbZrO3—PbTiO3 ternary solid solution system composition and NiO or including a Pb(Mg, Ni)1/3Nb2/3O3—PbZrO3—PbTiO3 ternary solid solution system composition, and further contains lead germanate.

Abstract: A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.

Abstract: An electromechanical actuator comprises at least two actuating portions of electromechanically active material extending by a generally elongated shape from a back portion. The actuating portions are bimorphs, attached by a first end to a first side of the back portion and positioned parallel to each other one after the other in a first direction. The bimorphs are arranged to provide movements of the second end along the first direction and along the extension of the actuating portion, thereby being able to move relative a body in the first direction. The actuating portions have generally flat internal electrode layers arranged inside the electromechanically active material directed substantially perpendicular to the first direction. The internal electrode layers extend continuously through the actuating portions and into the back portion.

Abstract: Embodiments of making an energy harvesting device are described. In one embodiment, a case and integrated piezoelectric cantilever to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device. The entire assembly can be encapsulated in plastic.

Abstract: A mechanism for capturing mechanical energy and converting it to electrical energy for use continually charging or providing emergency power to mobile, battery-powered devices comprises a plurality of elongated piezoelectric elements mounted at one or support points to one or more support structures. The plurality of piezoelectric elements are preferably structured and arranged so that at least each three-dimensional coordinate axis has at least one element with a dominant mode of deflection in a plane normal to the axis, in order to permit harvesting energy from forces applied in any direction without regard to the orientation of the energy harvesting mechanism to the source of forces. This results in improved coupling of the transducer with the random movements or vibrations that may not confined to any particular plane or in a plane that is not necessarily aligned with the plane in which a piezoelectric element is designed to bend, thus improving the efficiency of energy capture.

Abstract: A piezoelectric/electrostrictive device is provided with a stationary portion, a thin-plate portion supported by the stationary portion, and piezoelectric/electrostrictive element formed by alternately laminating a plurality of electrodes and a plurality of piezoelectric/electrostrictive layers. The piezoelectric/electrostrictive device is produced by cutting a thin-plate body that composes the thin-plate portion afterward and a laminated body comprising the piezoelectric/electrostrictive layers and thereafter applying prescribed specific processing (for example, heat treatment) to the cut plane (the lateral end surfaces).

Abstract: An actuator device includes a piezoelectric element including a lower electrode, a piezoelectric layer, and an upper electrode that are displaceably provided in sequence on a substrate. The lower electrode includes a flat center portion and an inclined end portion that descends toward the substrate. The piezoelectric layer is disposed above the lower electrode and the substrate, and includes a first, second, and third piezoelectric layer portion constituted by a plurality of columnar crystals. The columnar crystals of the first and second piezoelectric layer portions are orthogonal to the flat portion of the lower electrode and surface of the substrate, while the columnar crystals of the third piezoelectric layer portion extend orthogonally from a surface of the inclined portion and bend to be orthogonal to the surface of the upper electrode, giving the grains of the columnar crystals of the third piezoelectric layer portion larger widths and increased stress resistance.

Abstract: A hybrid electromechanical actuator has two different types of electromechanical elements, one that expands in a transverse direction when electric power is applied thereto and one that contracts in a transverse direction when electric power is applied thereto. The two electromechanical elements are (i) disposed in relation to one another such that the transverse directions thereof are parallel to one another, and (ii) mechanically coupled to one another at least at two opposing edges thereof. Electric power is applied simultaneously to the elements.

Abstract: There is provided a substrate supporting vibration structure which is a vibration structure for supporting a substrate. The substrate supporting vibration structure includes a spacer member, fixed between a first substrate and a second substrate, having at least one form selected from a pillar form and a long strip form; and a piezoelectric element, formed at a predetermined position between the first substrate and the second substrate or at a predetermined position of the long strip-form portion of the spacer member, having a vibration supporting portion and a vibration applying portion. In the structure, the vibration supporting portion and vibration applying portion of the piezoelectric element are disposed in the thicknesswise direction of the first and second substrates stacked.

Abstract: A high performance piezoelectric actuator. The actuator includes a piezoelectric material exhibiting a selectively tapered width sufficient to enhance actuator fracture load capabilities. A passive material is disposed on or integrated with the piezoelectric material. A drive system is connected to the piezoelectric material. The drive system is capable of selectively applying an electric field to the piezoelectric material. In specific embodiment, the piezoelectric material includes a curved piezoelectric layer exhibits a default state of compression along a surface of the piezoelectric layer.

Abstract: A mechanical energy generating apparatus is provided. The apparatus includes a shape changing flexure beam connected at opposing distal ends to first lever arms of a pair of opposing tilt connectors. The apparatus additionally includes a bias beam connected at opposing ends to second lever of the tilt connectors. The tilt connectors are pivotally connected to an adjustable length base such that a distance between the tilt connectors can be adjusted to flex the bias beam and exert a force on the second lever arms of the tilt connectors. The force exerted by the bias beam is transferred to the first lever arms and flexes the flexure beam to approximately a critical buckling stress point of the flexure beam.

Abstract: A piezoelectric/electrostrictive including a pair of mutually opposing vibration plates, each having a first portion and a second portion, a fixation section joined to the first portion of each of the vibration plates, and at least one piezoelectric/electrostrictive element arranged on at least one of the vibration plates. A surface of the device between the fixation section and the second portion of at least one of the vibration plates is curved.

Abstract: An electromechanical motor (1), using at least two bimorph, monomorph or multimorph electromechanical actuating elements (6) interconnected by a common actuator backbone (5) is disclosed. The actuating elements (6) are controllable in both a longitudinal direction (L), i.e. in the main extension direction of the actuating element (6), and a flexural direction, i.e. bending of the actuating element (6), separately. The different actuating elements (6) can be controlled individually as well. The actuator (3) dimensions are preferably selected to resonance frequencies in vicinity of a certain frequency. The actuating elements (6) are provided with interaction portions (7) at which any contact between the actuator and a body (2) to be moved is made. In order to operate well both in fine-positioning and resonant motion, the interaction portions (7) are arranged to partially suppress the transfer of acoustic waves between the actuating elements (6) and the body (2) to be moved.

Abstract: A method of fabricating a micro electromechanical switch on a substrate comprising piezoelectric layers, metal electrodes alternated with the layers and contact pads. Cross voltages are applied to the electrodes, in order to obtain an S-shaped deformation of the switch and allow contact between the contact pads. Additionally, a further electrode can be provided on a substrate where the switch is fabricated, to allow an additional electrostatic effect during movement of the piezoelectric layers to obtain contact between the contact pads. The overall dimensions of the switch are very small and the required actuation voltage is very low, when compared to existing switches.

Abstract: Piezoelectrical bending converter with at least one monolithic layered composite, includes a piezoelectric-active ceramic layer with a lateral dimension change which may be generated by application of an electrical field and at least one further piezoelectric-active ceramic layer with a further lateral dimension change, different from the lateral dimension change. An electrode layer is arranged between the ceramic layers, for generation of the electric fields. The layered composite preferably comprises several piezoelectric-active layers and electrode layers arranged between the above. The shift is thus obtained as a gradient of the dimension changes in the direction of the stack of the layered composite. The dimension changes for the ceramic layers and the gradient may be adjusted by the generation of the electrical fields. In order to achieve a shift it is necessary not to have a piezoelectric-inactive layer.

Abstract: A method of manufacturing a tactile sensor, which is capable of implementing a wide range of senses, including sensing contact pressure (vertical force and horizontal force) with an external object and heat caused by the contact pressure, comprises forming a side block formation pattern of a force sensor and forming a piezo-resistor formation pattern of a heat sensor; forming a piezo-resistor and depositing an oxide film on the piezo-resistor; forming contact holes and forming a line hole formation pattern; forming a metal line, a temperature measurement metal line, and a heater; depositing an oxide film on the metal line, the temperature measurement metal line, and the heater, and forming a load block on the oxide film; and forming a side block by etching a bottom surface of the wafer on which the load block is formed.

Abstract: A motion actuator comprises a cylindrical movable shaft and a stage that contains an expansible/contractible device and two clamps. The expansible/contractible device can be controlled to drive the axial motion of the movable shaft, and the two clamps can be controlled to grip/release the shaft. The two clamps and the expansible/contractible device are each controlled by a bimorph structure, which comprises a cut cylindrical piezoelectric tube section in a hole enclosed by a thin wall in the stage. By sequentially activating the three piezoelectric tube sections, axial motions of the movable shaft relative to the stage in small steps are made. Each of the two clamps can be adjusted by a screw, which presses a spring structure that makes contact with the top surface of the movable shaft, so that the clamps can grip the movable shaft firmly when actuated, but not when not actuated. The flat top surface of the movable shaft is designed to inhibit the possible rotation along its axis during its axial motion.

Abstract: A digital camera is constructed with multiple lenses mounted in a pair of tubular elements which are nested together for relative axial movement. Movement is provided by piezoelectric actuators mounted externally to a support tube on flexible printed circuit board elements. Each lens tube is provided with a drive rail which extends at least partially over the length of the lens tube and projects radially outward from the periphery of each of the tubes. The rails are accessible to the engagement pads of the piezoelectric actuators to allow the transmission of drive forces to each of the tubes.

Abstract: A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to the first lower electrode and the first upper electrode; a second actuator having a second fixed end, being disposed in parallel with the first actuator, including a stacked structure of a second lower electrode, a second piezoelectric film, and a second upper electrode, and being able to be operated by applying voltages to the second lower electrode and the second upper electrode; and an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator.

Abstract: A method of manufacturing a piezoelectric vibrator comprises providing a piezoelectric vibrator piece inside a hermetic container. A gettering metal film is formed inside the hermetic container on an inner surface of the container or on a surface of the piezoelectric vibrator piece, and a weight is formed separate from the metal film on the piezoelectric vibrator piece. A laser beam is irradiated on the metal film to heat the same to getter gas contained inside the hermetic container, and after completion of gettering, the laser beam is irradiated on the weight to adjust the frequency of vibration of the piezoelectric vibrator piece.

Abstract: An actuator is disclosed, which includes a piezoelectric bimorph. The actuator also includes a substantially moisture impervious and electrically insulating packaging having a cavity around the bimorph providing for a clearance around the bimorph. The packaging includes a carrier having first and second surfaces and an aperture wherein the bimorph is disposed, the packaging further includes first and second cover films selectively attached to the first and second surfaces respectively, and at least one flex circuit connected to the bimorph for supplying electrical energy thereto.

Abstract: A piezoelectric linear motor apparatus and method is provided. The apparatus comprises a carriage configured to be actuated and a stator configured to actuate the carriage. The stator comprises a meander line structure and a gear teeth structure, coupled to the top of the meander line structure and a contact layer underneath the carriage. Furthermore, the meander line structure comprises a series of bimorph actuators laid linearly in the meander line structure. Each pair of neighboring bimorph actuators being linked with a corresponding connector on both sides of top and bottom. The meander line structure also comprises an odd series of connectors and an even series of connectors, interleaved with each individual connector, applied with phase-splitter's alternating current (AC) power to deform the bimorph actuators for generating traveling wave. The gear teeth structure is configured to transport traveling wave from the meander line structure to the carriage.

Abstract: A piezoelectric vibrator having excellent shock resistance and high reliability is offered. The centers of first and second piezoelectric vibrating plates are supported by pillars on a main surface of an enclosure and nearly or substantially parallel to the main surface of the enclosure. Spacers having a Young's modulus of less than 2 GPa are mounted on both end sides of the second piezoelectric vibrating plate to prevent contact between the vibrating plates, thus preventing damage. Other spacers are mounted on the main surface of the enclosure in positions corresponding to the first-mentioned spacers to prevent contact with the main surface of the enclosure, thus preventing damage to the second piezoelectric vibrating plate.

Abstract: A head assembly includes a suspension having a gimbal, a flexible printed wiring sheet having a plurality of conductor patterns and adhered to the suspension, first and second piezoelectric actuators mounted on the gimbal, and a head slider mounted on the first and second piezoelectric actuators. The first and second piezoelectric actuators are adhered to the gimbal at end portion adhesion portions symmetrical with respect to the center of pivotal motion thereof and are adhered to the head slider at end portion adhesion portions on the opposite side disposed symmetrically with respect to the center of pivotal motion similarly. Consequently, when a voltage is applied to the first and second piezoelectric actuators through the flexible printed wiring sheet, a couple of forces can be generated which vary the posture of the head slider only in one direction around the center of pivotal motion.

Abstract: A method of producing at least one thick film element, including depositing a material on a surface of at least one first substrate to form at least one thick film element structure having a thickness of approximately greater than 10 ?m to 100 ?m. Then, then the at least one thick film element structure is bonded to a second substrate, and the at least one first substrate is removed from the at least one thick film element structure using a lift-off process employing radiation energy. The lift-off process including emitting, from a radiation source, a radiation beam through the first substrate to an attachment interface formed between the first substrate and the at least one thick film element structure at the first surface of the first substrate. The first substrate being substantially transparent at the wavelength of the radiation beam, permitting the radiation beam to generate sufficient energy at the interface to break the attachment.

Abstract: A piezoelectric switch for tunable electronic components comprises piezoelectric layers, metal electrodes alternated with the layers and contact pads. Cross voltages are applied to the electrodes, in order to obtain an S-shaped deformation of the switch and allow contact between the contact pads. Additionally, a further electrode can be provided on a substrate where the switch is fabricated, to allow an additional electrostatic effect during movement of the piezoelectric layers to obtain contact between the contact pads. The overall dimensions of the switch are very small and the required actuation voltage is very low, when compared to existing switches.

Abstract: A digital camera is constructed with multiple lenses mounted in a pair of tubular elements which are nested together for relative axial movement. Movement is provided by piezoelectric actuators mounted externally to a support tube on flexible printed circuit board elements. Each lens tube is provided with a drive rail which extends at least partially over the length of the lens tube and projects radially outward from the periphery of each of the tubes. The rails are accessible to the engagement pads of the piezoelectric actuators to allow the transmission of drive forces to each of the tubes.

Abstract: The present invention presents a system for a compound actuator. The system includes first and second electrode layers each including two electrode sections, an intermediate electrode layer between the first and second electrode layers, and first and second electrostrictive materials that change length in an applied electrical field. The first electrostrictive material is positioned between the first and intermediate electrode layers. The second electrostrictive material is positioned between the intermediate and second electrode layers. The first electrostrictive material has a first length adjoining the first electrode section and a second length adjoining the second electrode section. The second electrostrictive material has a third length adjoining the fourth electrode section and a fourth length adjoining the fifth electrode section.

Abstract: A thin film piezoelectric element has a laminate including a piezoelectric film and a pair of electrode films placed so as to sandwich the piezoelectric film in between, a resin film formed so as to cover the laminate, and an electrode formed on the resin film and electrically connected to the electrode film. The resin film is formed so that a thickness of a region where the electrode is formed is larger than a thickness of a region corresponding to a displaced portion of the laminate.

Abstract: A piezoelectric vibrator having excellent shock resistance and high reliability is offered. The centers of first and second piezoelectric vibrating plates are supported by pillars on a main surface of an enclosure and nearly or substantially parallel to the main surface of the enclosure. Spacers having a Young's modulus of less than 2 GPa are mounted on both end sides of the second piezoelectric vibrating plate to prevent contact between the vibrating plates, thus preventing damage. Other spacers are mounted on the main surface of the enclosure in positions corresponding to the first-mentioned spacers to prevent contact with the main surface of the enclosure, thus preventing damage to the second piezoelectric vibrating plate.

Abstract: A bimorph switch electrically connecting a traveling contact and a fixed contact. The switch comprises a substrate having a front face, a rear face, and a through hole penetrating from the front face to the rear face; a fixed contact extending from an edge portion of the aperture of the through hole towards the inside of the aperture; and a bimorph section holding the traveling contact at a position facing the aperture and driving the traveling contact. One end of the bimorph section may be formed on a silicon oxide layer formed on a front face of the substrate.

Abstract: An actuator includes a movable beam supported on a substrate by a supporting portion, and having a first movable end and a second movable end. The second movable end is opposite to the first movable end with respect to the supporting portion. A first drive beam is connected to the movable beam at around the second movable end. The first drive beam is fixed on the substrate at an end portion of the first drive beam. A second drive beam is connected to the movable beam at a location between the supporting portion and the first movable end. The second drive beam is fixed on the substrate at another end portion of the second drive beam.

Abstract: The present invention provides a piezo-electric/electrostrictive device including a pair of thin plate sections in an opposed relation to each other, a fixing section for supporting the thin plate sections, and at least one pair of piezo-electric/electrostrictive elements are provided to the pair of thin plate sections. The thin plate sections include movable sections having end surfaces in an opposed relation. Recesses are formed between the thin plate sections and the fixing section and/or the movable sections.