Abstract: A unit comprises a quartz crystal resonator having a base portion, and first and second vibrational arms, each of the first and second vibrational arms having opposite main surfaces. At least two grooves are formed in at least one of the opposite main surfaces of each of the first and second vibrational arms so that a distance in the width direction of the at least two grooves measured from an outer edge of the one of the at least two grooves to an outer edge of the other of the at least two grooves is less than 0.05 mm.

Abstract: A piezoelectric bulk wave device that includes a piezoelectric thin plate that is made of LiTaO3, and first and second electrodes that are provided in contact with the piezoelectric thin plate. The piezoelectric bulk wave device utilizes the thickness shear mode of the piezoelectric thin plate made of LiTaO3. The first and second electrodes are each formed by a conductor having a specific acoustic impedance higher than the specific acoustic impedance of a transversal wave that propagates in LiTaO3. When the sum of the film thicknesses of the first and second electrodes is defined as an electrode thickness, and the thickness of the piezoelectric thin plate made of LiTaO3 is defined as an LT thickness, the electrode thickness/(electrode thickness+LT thickness) is in the range of not less than 40% and not more than 95%.

Abstract: An acoustic resonator structure comprises a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode and comprising aluminum scandium nitride, a second electrode disposed on the piezoelectric layer, and a temperature compensation feature having a temperature coefficient offsetting at least a portion of a temperature coefficient of the piezoelectric layer, the first electrode, and the second electrode.

Abstract: The present invention relates to one of energy conversion devices, actuator and a dielectric layer used in the actuator. The present invention provides a polymer blend composition capable of easily controlling the ability of converting electrical energy to mechanical energy, which is prepared by blending a piezoelectric polymer with a flexible elastomeric block copolymer showing an effective miscibility therewith, and a tunable actuator using the same.

Abstract: An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less.

Abstract: An actuator device and a method for manufacturing the actuator device, which is formed by stacking and rolling films of electrostrictive material into a cylindrical body and can ensure electrical connection with inner electrodes at both end portions of the cylindrical body. The actuator device is formed by stacking and rolling two films of electrostrictive material into a cylindrical body, the two films each having an inner electrode on one or both surfaces thereof. The cylindrical body has at least one cut portion at each end portion thereof, the cut portion being configured to reach the inner electrode (electrode pattern). By applying conductive ink to each of the cut portions, the conductive ink flows through the cut portions and reaches the inner electrodes on the films. By heat-hardening the conductive ink, it is possible to ensure electrical connection between outer and inner electrodes.

Abstract: An actuator device and a manufacturing method for the actuator device with which an outer electrode electrically connected to an inner electrode can be reliably formed even when using a film made of an electrostrictive material. An actuator device includes a plurality of stacked electrostrictive films each of which is made of an electrostrictive material and includes inner electrodes formed on one surface or both surfaces of the film. Lead electrodes are formed to be led out respectively from the inner electrodes toward the outside of the electrostrictive film 31. At least one cut portion is formed in each of the lead electrodes, and conductive ink is applied to the cut portion. The conductive ink reaches, from the cut portions, the lead electrodes formed on the electrostrictive film.

Abstract: A piezoelectric device prevents damage to a piezoelectric thin film caused by etching and the manufacturing cost of the piezoelectric device is reduced. On a surface of a support layer formed on a support substrate, an etching adjustment layer is formed. An etchant flows through etching windows to simultaneously form a through hole through which a portion of a sacrificial layer is exposed to a side of a piezoelectric thin film and an opening through which the etching adjustment layer, which is conductive with a lower electrode, is exposed to the side of the piezoelectric thin film. By making an etchant flow through the through hole, the sacrificial layer is removed. A lead-out wiring is formed between an upper electrode and a bump pad and a lead-out wiring is formed between the conductive etching adjustment layer, which is conductive with the lower electrode, and a bump pad.

Abstract: Exemplary piezoelectric vibrating pieces have an excitation electrode and an extraction electrode having uniform thickness in the vibrating region to prevent unnecessary vibrations and degradation of vibration characteristics. An exemplary piezoelectric vibrating piece includes a vibrating portion having an excitation electrode of a first thickness (d1), an outer frame surrounding the vibrating portion with a gap therebetween, a joining portion connecting the vibrating portion and the outer frame, and an extraction electrode connected to the excitation electrode and extending on the vibrating portion, joining portion, and outer frame. The extraction electrode has the first thickness d1 throughout the vibrating portion and a second thickness (d2>d1) on the outer frame.

Abstract: A piezoelectric element 10 is a laminated type piezoelectric element including a plurality of piezoelectric layers laminated on each other; and an internal electrode layer disposed between adjacent piezoelectric layers. In the piezoelectric element 10, coating layers 12, 14 are disposed on a side surface of the piezoelectric element so as to cover at least an effective portion of the internal electrode layer that is exposed at the side surface. The coating layers 12, 14 contiguously extend from the side surface of the piezoelectric element to at least one of upper and lower surfaces of the piezoelectric element. A step is formed at the at least one of upper and lower surface of the piezoelectric element by the coating layers formed at an edge region.

Abstract: An acoustic resonator comprises a first electrode and second electrode comprising a plurality of sides. At least one of the sides of the second electrode comprises a cantilevered portion. A piezoelectric layer is disposed between the first and second electrodes. A bridge disposed adjacent to one of the sides of the second electrode.

Abstract: Contour-mode piezoelectric devices and methods of forming contour mode piezoelectric devices. The contour mode piezoelectric device includes a piezoelectric film having first and second surfaces and suspended so that it is spaced away from a substrate. The contour mode piezoelectric device also includes first and second patterned electrodes respectively disposed on the first and second surfaces of the piezoelectric film, at least one of the first and second patterned electrodes having variable width along a length thereof.

Abstract: A light transmittance adjusting device is provided, including a first electrode, a second electrode, and a first elastomer layer disposed between the first and second electrodes. A light transmittance of the first elastomer layer is variable depending on a voltage applied thereto.

Abstract: A three-dimensional woven active fiber composite is disclosed. The composite includes a plurality of actuating fibers configured in a three-dimensional arrangement. The composite further includes a plurality of conductive wire electrodes that are woven through the plurality of actuating fibers. The electrodes may be configured into two dimensional electrode mats that are spaced apart along the length of the composite. Filler fibers may be used between adjacent electrode mats to help reinforce the composite. A sleeve member can also be used to help provide compressive containment for the actuating fibers and conductive wire electrodes.

Abstract: Provided is an oriented piezoelectric material with satisfactory sintering property free of Pb that is a hazardous substance, and a water-soluble alkaline ion, and a production method therefor. To this end, provided is a compound, including a tungsten bronze structure metal oxide, in which: the tungsten bronze structure metal oxide contains at least metal elements of Ba, Bi, Ca, and Nb, the metal elements satisfying the following conditions in terms of molar ratio; and has a C-axis orientation. The compound shows Ba/Nb=a: 0.363<a<0.399, Bi/Nb=b: 0.0110<b<0.0650, and Ca/Nb=c: 0.005<c<0.105. The tungsten bronze structure metal oxide preferably includes (1-x)·Ca1.4Ba3.6Nb10O30-x·Ba4Bi0.67Nb10O30 (0.30?x?0.95).

Abstract: A bulk acoustic wave (BAW) resonator, comprises: a first electrode; a second electrode comprising a plurality of sides. At least one of the sides comprises a cantilevered portion. The bulk acoustic wave (BAW) resonator also comprises a piezoelectric layer disposed between the first and second electrodes. The piezoelectric layer comprises a piezoelectric material doped with a plurality of rare earth elements, and the cantilevered portion extends above the piezoelectric layer. The bulk acoustic wave (BAW) resonator comprises a gap between the cantilevered portion and the piezoelectric layer.

Abstract: A bulk acoustic wave (BAW) resonator, comprises: a first electrode; a second electrode comprising a plurality of sides. At least one of the sides comprises a cantilevered portion. The bulk acoustic wave (BAW) resonator also comprises a piezoelectric layer disposed between the first and second electrodes. The piezoelectric layer comprises a piezoelectric material doped with a plurality of rare earth elements, and the cantilevered portion extends above the piezoelectric layer. The bulk acoustic wave (BAW) resonator comprises a gap between the cantilevered portion and the piezoelectric layer.

Abstract: A conductive polymer doped with a dopant can be expanded and contracted when electrically oxidized and reduced in a driving electrolytic solution containing an anion, and thereby can act as an actuator element in an actuator. The anion is a fluorine-containing ion derived from a strong acid, and the dopant is an aromatic sulfonate ion free of fluorine. The conductive polymer is a polymer containing a 5-membered heterocyclic moiety as a repeating unit, such as a polypyrrole or a polythiophene. When the conductive polymer is in an oxidized state, at least part of the 5-membered heterocyclic moieties has a carbonyl group.

Abstract: A method of producing a piezoelectric actuator includes a first electrode film forming process; a monomolecular film forming process; a pattering process of removing a monomolecular film having a rectangular shape; an application process of applying a precursor solution to the first electrode film exposed in the rectangular shape; a piezoelectric film forming process of converting the applied precursor solution into a piezoelectric film; and a second electrode film forming process. Materials of the precursor solution, the first electrode film, and the monomolecular film are adjusted so that the first electrode film is lyophilic and the monomolecular film is lyophobic to the precursor solution. The piezoelectric film forming process includes a drying and thermally decomposing process of drying and thermally decomposing the precursor solution; and a crystallizing process of crystallizing a thermally decomposed piezoelectric material.

Abstract: A method of fabricating a crystal unit fills an adhesive from a first opening in a front surface of a mask of each of penetration holes in the mask in a state in which the mask is set on a base, into each penetration hole, and heats, by a heating element, a sidewall region defining a second opening in a back surface of the mask, in order to cure a sidewall part of the adhesive in the sidewall region defining each penetration hole in contact with the adhesive filling each penetration hole. A crystal blank is bonded on the base using the adhesive in order to form the crystal unit, after removing the mask from the base.

Abstract: This disclosure provides systems, methods and apparatus related to acoustic resonators that include composite transduction layers for enabling selective tuning of one or more acoustic or electromechanical properties. In one aspect, a resonator structure includes one or more first electrodes, one or more second electrodes, and a transduction layer arranged between the first and second electrodes. The transduction layer includes a plurality of constituent layers. In some implementations, the constituent layers include one or more first piezoelectric layers and one or more second piezoelectric layers. The transduction layer is configured to, responsive to signals provided to the first and second electrodes, provide at least a first mode of vibration of the transduction layer with a displacement component along the z axis and at least a second mode of vibration of the transduction layer with a displacement component along the plane of the x axis and they axis.

Abstract: A configuration is provided in which at least one end of a piezoelectric body active portion is defined by an end of a second electrode, a portion of configuring the piezoelectric body active portion of a first electrode is covered with a piezoelectric body layer, the first electrode and the piezoelectric body layer are extended to the outside of the end of the second electrode which defines the end of the piezoelectric body active portion, the first electrode includes an exposure portion which is not covered with the piezoelectric body layer and extends further outside than the end of the second electrode, and on the end of the piezoelectric body layer which forms the exposure portion, an independent electrode which is electrically independent from the second electrode is provided.

Abstract: A method is provided for forming a piezoelectric ultrasonic transducer apparatus having a first electrode deposited on a dielectric layer disposed on a primary substrate. A piezoelectric material is deposited between the first electrode and a second electrode, to form a transducer device. At least the piezoelectric material is patterned such that a portion of the first electrode extends laterally outward therefrom. The primary substrate and the dielectric layer are etched to form a first via extending to the laterally outward portion of the first electrode, and a first conductive material is deposited to substantially fill the first via and form an electrically-conductive engagement with the laterally outward portion of the first electrode. The primary substrate is etched to define a second via extending therethrough, wherein the second via is laterally spaced apart from the first via. An associated method and apparatus are also provided.

Abstract: A piezoelectric element includes a substrate, a lower electrode layer, a piezoelectric layer, and an upper electrode layer. The lower electrode layer is fixed to the substrate and the piezoelectric layer is formed on the lower electrode layer. The upper electrode layer is formed on piezoelectric layer. The lower electrode layer contains pores therein and has a larger thermal expansion coefficient than the piezoelectric layer.

Abstract: In the present invention, a half-value width of a rocking curve, an average roughness of a surface, and an average grain diameter are all specified at one time with respect to a Pt layer that constitutes a lower electrode for a piezoelectric element, thereby stably film-forming the Pt layer having excellent characteristics, and stably forming, on the Pt layer, a piezoelectric thin film having excellent characteristics.

Abstract: A piezoelectric sensing device is described for measuring material thickness of targets such as pipes, tubes, and other conduits that carry fluids. The piezoelectric sensing device includes a piezoelectric element mounted to a flexible circuit with glass reinforced polyimide C-stage cover layers surrounding a pure polyimide C-stage core.

Abstract: There is provided a method for testing a piezoelectric/electrostrictive actuator, wherein the displacement of a piezoelectric/electrostrictive actuator is estimated on the basis of the relations between one or more frequency characteristic values selected from the group consisting of the heights and areas of the peaks of the resonance waveforms and the difference of the maximum and minimum of the first order or first to higher orders of the resonance frequency characteristic values of the piezoelectric/electrostrictive actuator and the k-th order (k=1 to 4) of the first or first to higher orders of resonance frequencies. According to this piezoelectric/electrostrictive actuator testing method, a piezoelectric/electrostrictive actuator can be tested with high precision without actually driving the same as a product and without being accompanied by any disassembly/breakage.

Abstract: A manufacturing method for a Zinc Oxide (ZnO) piezoelectric thin-film with high C-axis orientation comprises the steps of providing a substrate having a base, a SiO2 layer and a Si3N4 layer; forming a bottom electrode layer on the Si3N4 layer; patterning the bottom electrode layer; sputtering a Zinc Oxide layer on the Si3N4 layer and the bottom electrode layer; forming a photoresist layer on the Si3N4 layer and the Zinc Oxide layer; patterning the photoresist layer to reveal the Zinc Oxide layer; forming a top electrode layer on the Zinc Oxide layer and the photoresist layer; removing the photoresist layer and the top electrode layer formed on the photoresist layer, and the top electrode layer formed on the Zinc Oxide layer can be remained; and patterning the Si3N4 layer to form a recess that reveals the base of the substrate.

Abstract: A resonance apparatus that processes an electrical loss using a conductive material and a method of manufacturing the resonance apparatus are provided. The resonance apparatus includes a lower electrode formed at a predetermined distance from a substrate, and a piezoelectric layer formed on the lower electrode. The resonance apparatus further includes an upper electrode formed on the piezoelectric layer, and a conductive layer formed on the upper electrode or the lower electrode.

Abstract: A piezoelectric actuator includes a thin film sheet, a first electrode, and a second electrode. The thin film sheet is to physically deform in response to an electric field induced within the thin film sheet. The first electrode is embedded within the thin film sheet. The second electrode is embedded within the thin film sheet, and is interdigitated in relation to the first electrode. The electric field is induced within the thin film sheet via application of a voltage across the first and the second electrodes.

Abstract: A piezoelectric actuator, in particular for injectors in internal combustion engines, is provided which includes a piezoelectric module including a ceramic body and two end pieces which clamp the ceramic body axially in place, and an electrical connecting element which is secured on the piezoelectric module and which includes two contact plates leading to the ceramic body. To increase the robustness of the connecting element and to avoid fractures in the contact plates under high vibrational stresses, the contact plates are designed as one-piece metal stampings including at least partially embossed stamped edges.

Abstract: A liquid jetting apparatus includes a channel unit in which a liquid channel including a nozzle for jetting a liquid is formed, and a piezoelectric actuator provided on the channel unit and configured to apply jetting energy to the liquid inside the liquid channel. The piezoelectric actuator has a piezoelectric element and a wiring substrate in which a first electrode and a wire electrically connected to the first electrode are formed and which is joined to one surface of the piezoelectric element. The first electrode is configured to make contact with the piezoelectric element.

Abstract: A piezoelectric element comprising a piezoelectric layer containing bismuth, lanthanum iron manganese and titanium and a electrode formed above the piezoelectric layer.

Abstract: Passivated micromechanical resonators and related methods are described. Applicants have appreciated that polycrystalline conductive layers used as electrodes for some MEMS resonators are a source of mechanical and electrical instability. To inhibit or prevent contamination of such conductive layers, which may exacerbate the instabilities, passivation structures are used. The passivation structures can be grown, deposited, or otherwise formed.

Abstract: An ultrasonic device is configured to transmit ultrasonic waves and includes a substrate, a diaphragm, a piezoelectric member and a control unit. The substrate has an opening. The diaphragm covers the opening of the substrate. The piezoelectric member is coupled to the diaphragm, and includes a first piezoelectric part and a second piezoelectric part. The control unit controls a voltage applied to the first piezoelectric part to be a vibration voltage and controls a voltage applied to the second piezoelectric part to be a constant voltage when the ultrasonic device transmits the ultrasonic waves.

Abstract: A piezoelectric device includes a piezoelectric vibrating piece, a base plate, which has a connecting electrode on one principal surface and a mounting terminal on another principal surface, in a rectangular shape, and a lid plate. The another principal surface of the base plate includes a pair of sides that face one another. At least the pair of sides has a level difference portion depressed toward the one principal surface side and a castellation passing through from the another principal surface to the one principal surface. A wiring electrode extracted from the mounting terminal to the one principal surface of the base plate is at a part of the level difference portion and the castellation. The wiring electrode and the mounting terminal include a metal film formed by sputtering or vacuum evaporation and an electroless plating film formed on the metal film by electroless plating.

Abstract: In a piezoelectric actuator including a lower electrode layer, a first PZT piezoelectric layer having a first relative permittivity is formed on the lower electrode layer, and a second PZT piezoelectric layer having a second relative permittivity smaller than said first relative permittivity is formed on the first PZT piezoelectric layer.

Abstract: A piezoelectric element includes a substrate, and a lower electrode layer, a piezoelectric film represented by a general formula of (NaxKyLiz)NbO3 (0<x?1, 0<y?1, 0?x?0.2, x+y+z=1) and an upper electrode layer formed on the substrate. The piezoelectric film has a crystal structure of pseudo-cubic crystal, tetragonal crystal, orthorhombic crystal, monoclinic crystal or rhombohedral crystal, or has a state that at least two of the crystal structures coexist. A difference between the maximum value and the minimum value of an energy of Na-K absorption edge measured by an electron energy loss spectroscopy or an X-ray-absorption fine-structure spectroscopy in a direction of the film thickness of the piezoelectric film is not more than 0.8 eV.

Abstract: A multilayer piezoelectric element includes a plurality of piezoelectric layers and a plurality of metal layers stacked alternately. The plurality of metal layers include a plurality of low-filled metal layers having a lower filling rate of metal composing the metal layers than oppositely disposed metal layers adjacent to each other in a stacking direction. The plurality of metal layers may include a plurality of thin metal layers having a smaller thickness than oppositely disposed metal layers adjacent to each other in a stacking direction. Where the plurality of metal layers are composed mainly of an alloy, the plurality of metal layers may include a plurality of high-ratio metal layers having a higher ratio of a component constituting the alloy than oppositely disposed metal layers adjacent to each other in a stacking direction.

Abstract: A piezoelectric device according to the present invention is provided with a pair of electrode films, a piezoelectric film sandwiched in between the pair of electrode films, and a stress control film which is in direct contact with a surface of at least one of the pair of electrode films, on the side where the electrode film is not in contact with the piezoelectric film, and which has a linear expansion coefficient larger than those of the relevant electrode film and the piezoelectric film.

Abstract: A vibration piece includes a pair of base sections which are disposed with spaces in between each other, and a pair of vibration arms which are disposed between the pair of base sections. In addition, the vibration arms, respectively have three vibration areas of a pair of end areas positioned on both ends in an extending direction and a center area positioned between the end areas. Electrode pieces straddling from the side surfaces of the vibration arms to a main surface are disposed in the areas, respectively. An average width of portions of the electrode pieces positioned on the main surface which are disposed in the end areas is greater than an average width of portions of the electrode pieces positioned on the main surface which are disposed in the center area.

Abstract: There is provided an electronic component in which sealing members are bonded with a resin adhesive and the resin adhesive rarely spreads before curing, and a manufacturing method for an electronic component in which a resin adhesive rarely spreads before curing. An electronic component having a first sealing member and a second sealing member bonded to a principal surface of the first sealing member to form a sealed space, a resin adhesive layer that bonds the first sealing member and the second sealing member on a frame-shaped bonding region of the principal surface, a frame-shaped glass layer provided between the frame-shaped bonding region and a peripheral edge portion of the first sealing member, and an electronic component body provided in the sealed space.

Abstract: A tuning fork vibrator includes a package having an internal space having a rectangle column shape; a tuning fork vibration piece including a base, two vibration arms extending in parallel form the base and a first arm and a second arm extending obliquely from the base so as to interpose the two vibration arms, the tuning fork vibration piece having a length from the base to a tip in an extended direction of the two vibration arms which is longer than each side of the bottom surface of the internal space, wherein the tuning fork vibration piece is placed in the internal space with the extended direction set along a diagonal direction of the internal space, and a tip part of the first arm and a tip part of the second arm of the tuning fork vibration piece are fixed to the bottom surface of the internal space.

Abstract: An additive that contains an emulsion binder resin substantially free of non-emulsion binder resin, such as an emulsion acrylic resin, is mixed into a ceramic raw material powder containing, as its main constituent, a perovskite-type compound to form a ceramic slurry. Then, an orientational ceramic is prepared by subjecting the slurry to a forming process while simultaneously or sequentially applying a magnetic field and drying the slurry. An orientational ceramic, even formed from a substance which has small magnetic anisotropy, such as PZT, is obtained.

Abstract: A barium titanate piezoelectric ceramic having good piezoelectric properties and mechanical strength and a piezoelectric element that includes the ceramic are provided. A method for making a piezoelectric ceramic includes forming a compact composed of an oxide powder containing barium titanate particles, sintering the compact, and decreasing the temperature of the compact after the sintering. The sintering includes (A) increasing the temperature of the compact to a first temperature within a temperature range of a shrinking process of the compact; (B) increasing the temperature of the compact to a second temperature within a temperature range of a liquid phase sintering process of the compact after (A); (C) decreasing the temperature of the compact to a third temperature within the temperature range of the shrinking process of the compact after (B); and (D) retaining the third temperature after (C).

Abstract: A component (1) is proposed wherein the suspension of the component (1) is effected in a stress-reduced manner. The component (1) can rest on a membrane (4) or be held by a spring element (2). The membrane (4) or the spring element (2) is situated above a depression (6) or an opening (7) partially spanned by the membrane (4). Preferably, the membrane (4) has a modulus of elasticity that is less than or equal to the modulus of elasticity of the component (1) or of the substrate (3). The component (1) can be covered with metal electrodes (10) wholly or partially over the area on two sides.

Abstract: Provided are a polymer and a polymer actuator including the polymer. The polymer is cross-linked by a cross-linking agent. When the polymer is used in the polymer actuator, the polymer actuator shows a high strain and may be stably operated at high temperatures.

Abstract: A piezoelectric assembly is described. In accordance with one embodiment, there is provided a piezoelectric assembly comprising: an electrode assembly; a signal electrical connector electrically connected to the electrode assembly; a reference electrical connector electrically connected to the electrode assembly; and a spacer positioned about a perimeter of the electrode assembly and disposed between the signal electrical connector and the reference electrical connector such that no electrical communication is provided between the signal electrical connector and the reference electrical connector through the spacer; wherein a humidity barrier space is defined between the signal electrical connector, the reference electrical connector and the spacer, and wherein the electrode assembly is disposed in the humidity barrier space.

Abstract: The invention relates to an electronic component having a layer sequence, which comprises at least a first electrode (10), a second electrode (20) and an active region (30) and contains monoatomic carbon layers at least in sub-regions.

Abstract: A resonating element includes a resonator element that includes a vibrating portion and an excitation electrode provided on both main surfaces of the vibrating portion, an intermediate substrate in which the resonator element is mounted so as to be spaced from the excitation electrode, and a spiral electrode pattern that is provided on at least one main surface of the intermediate substrate, in which the electrode pattern is electrically connected to the excitation electrode.