Supplying Ionizable Material (e.g., Gas Or Vapor) Patents (Class 313/362.1)
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Patent number: 11848169Abstract: A field-emission type electron source includes (i) a single-crystal tungsten rod having a sharpened terminus and (ii) a mass of ZrO formed only on a portion of the surface, or the entire surface, of the sharpened terminus. In preferred design, the single-crystal tungsten rod is placed in a gaseous medium that consists of oxygen and a non-oxygen gas. The molar ratio between oxygen and the non-oxygen gas is greater than 1:1.Type: GrantFiled: January 21, 2023Date of Patent: December 19, 2023Inventors: Dazhi Chen, Zhongwei Chen
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Patent number: 11229887Abstract: An ozonated water supply method includes: feeding dissolving water contained in a circulation tank to an ozonation device at a given feed rate while feeding ultrapure water to the circulation tank, and returning ozonated water that has not been used at a use point to the circulation tank, dissolving ozone in the dissolving water using the ozonation device to obtain ozonated water, and feeding the ozonated water to the use point; feeding oxygen gas having a nitrogen gas content of 0.01 vol % or less to a discharge-type ozone gas-producer, and feeding the resulting ozone-containing gas to the ozonation device; adjusting the feed rate of the ultrapure water to the circulation tank; and adjusting the dissolved ozone concentration in the ozonated water. The method can reduce or suppress the accumulation of nitric acid in the recirculation system when a discharge-type ozone gas-producer is used as the ozone gas-producer.Type: GrantFiled: January 6, 2015Date of Patent: January 25, 2022Assignee: ORGANO CORPORATIONInventors: Yoshifumi Hayashi, Yukinari Yamashita, Koji Yamanaka
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Patent number: 11067065Abstract: The invention provides a plasma production and control device that may be used in propulsion (e.g., satellite propulsion) and/or industrial applications. The plasma production system comprises a unidirectional magnetic field.Type: GrantFiled: June 12, 2019Date of Patent: July 20, 2021Assignee: PHASE FOUR, INC.Inventors: Mohammed Umair Siddiqui, Joshua Robert Synowiec, Jason Jackson Wallace, Simon Rubin Halpern
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Patent number: 10751554Abstract: The invention comprises a method and apparatus for using a turning magnet of an accelerator of a cancer therapy system, the accelerator comprising first magnet coils and second correction coils wound about a magnet core where: (1) at a first time, the second correction coils are used to correct a magnetic field, resultant from the first magnet coils, used to turn cations and (2) at a second time, after reversing polarity of the correction coils, the correction coils are used to turn anions and/or electrons, the cations and electrons used to treat a tumor of a patient positioned in a treatment position relative to a treatment beam from the accelerator during the first and second time periods.Type: GrantFiled: February 21, 2018Date of Patent: August 25, 2020Inventors: Scott Penfold, Mark R. Amato, W. Davis Lee
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Patent number: 10337940Abstract: A cold cathode ionization gauge includes multiple cathodes providing different spacings between the cathodes and an anode. The multiple cathodes allow for pressure measurements over wider ranges of pressure. A first cathode with a larger spacing may provide current based on Townsend discharge; whereas, a second cathode having a smaller spacing may provide current based on both Townsend discharge at higher pressures and on Paschen's Law discharge at still higher pressures. A feature on the second cathode may support Paschen's Law discharge. Large resistances between the cathodes and a return to power supply enable control of output profiles to extend the pressure ranges with accurate responses and avoid output minima. Pressure measurements may be made based on currents from respective cathodes dependent on the outputs of the cathodes through the wide pressure range of measurement.Type: GrantFiled: April 27, 2017Date of Patent: July 2, 2019Assignee: MKS Instruments, Inc.Inventors: Timothy C. Swinney, Clinton L. Percy, Duane W. Marion, Brandon J. Kelly
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Patent number: 9897079Abstract: The invention is a Hall thruster that does not have any discharge channel, and magnetic pole piece. The Hall thruster utilizes permanent magnets to produce magnetic field with strong radial component in front of an annular anode, and expands propellant directly into vacuum through the anode acting also as a gas distributor. The invention reduces mass and complexity of conventional Hall thrusters, and offers a radical solution to discharge channel and magnetic pole piece erosion problem.Type: GrantFiled: December 22, 2016Date of Patent: February 20, 2018Inventor: Burak Karadag
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Patent number: 9821263Abstract: This technology relates to the enlargement by water condensation in a laminar flow of airborne particles with diameters of the order of a few nanometers to hundreds of nanometers to form droplets with diameters of the order of several micrometers. The technology presents several advanced designs, including the use of double-stage condensers. It has application to measuring the number concentration of particles suspended in air or other gas, to collecting these particles, or to focusing these particles.Type: GrantFiled: June 27, 2014Date of Patent: November 21, 2017Assignee: AEROSOL DYNAMICS INC.Inventors: Susanne V. Hering, Gregory S. Lewis, Steven R. Spielman
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Patent number: 9579662Abstract: A particle charging method and apparatus are provided. An ion source is applied to a particle laden flow. The flow is introduced into a container in a laminar manner. The container has at least a first section, a second section and a third section. The first section includes wetted walls at a first temperature. A second section adjacent to the first section has wetted walls at a second temperature T2 greater than the first temperature T1. A third section adjacent to the second section has dry walls provided at a temperature T3 equal to or greater than T2. Additional water removal and temperature conditioning sections may be provided.Type: GrantFiled: October 1, 2013Date of Patent: February 28, 2017Assignee: AEROSOL DYNAMICS INC.Inventors: Susanne Vera Hering, Steven Russel Spielman, Gregory Stephen Lewis
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Patent number: 9534497Abstract: A turbine section of a gas turbine engine is annular about a longitudinal axis. The turbine section includes a first turbine with a first inlet and a first outlet; a second turbine with a second inlet and a second outlet; and an inter-turbine duct extending from the first outlet to the second inlet and configured to direct an air flow from the first turbine to the second turbine. The inter-turbine duct has a first station with a first meridional area, a second station with a second meridional area, and a third station with a third meridional area. The first station is upstream of the second station and the second station is upstream of the third station, and the second meridional area is less than or equal to the first meridional area.Type: GrantFiled: May 2, 2012Date of Patent: January 3, 2017Assignee: HONEYWELL INTERNATIONAL INC.Inventors: Vinayender Kuchana, Balamurugan Srinivasan, Sujatha Guntu, Malak Fouad Malak, Paul Couey, Craig Mckeever
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Patent number: 9410539Abstract: A micro-nozzle thruster comprising a micro-nozzle having an inlet at a first end perpendicularly aligned gas supply channel at a first end, and a thruster outlet at a second opposed end; said inlet in fluid communication with a gas supply channel, said gas supply channel perpendicularly aligned with a longitudinal axis of the micro-nozzle; a cathode within the gas supply channel and an anode external to the gas supply channel and proximate to the inlet, so as to create a plasma flow from said gas.Type: GrantFiled: February 8, 2011Date of Patent: August 9, 2016Assignee: MICROSPACE RAPID PTE LTDInventor: Giulio Manzoni
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Patent number: 9347438Abstract: A Hall effect thruster includes at least one tank of gas under high pressure, a pressure regulator module, a gas flow rate control device, an ionization channel, a cathode placed in a vicinity of an outlet from the ionization channel, an anode associated with the ionization channel, an electrical power supply unit, an electric filter, coils for creating a magnetic field around the ionization channel, and an additional electrical power supply unit for applying a pulsating voltage between the anode and the cathode.Type: GrantFiled: May 23, 2012Date of Patent: May 24, 2016Assignee: SNECMAInventors: Stephan Joseph Zurbach, Frederic Marchandise, Michael Oberg
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Patent number: 9018829Abstract: An ion source includes an ion chamber housing defining an ion source chamber, the ion chamber housing having a side with a plurality of apertures. The ion source also includes an antechamber housing defining an antechamber. The antechamber housing shares the side with the plurality of apertures with the ion chamber housing. The antechamber housing has an opening to receive a gas from a gas source. The antechamber is configured to transform the gas into an altered state having excited neutrals that is provided through the plurality of apertures into the ion source chamber.Type: GrantFiled: July 31, 2013Date of Patent: April 28, 2015Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Bon-Woong Koo, Victor Benveniste, Christopher A. Rowland, Craig R. Chaney, Frank Sinclair, Neil J. Bassom
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Publication number: 20150047079Abstract: There is provided an iridium tip including a pyramid structure having one {100} crystal plane as one of a plurality of pyramid surfaces in a sharpened apex portion of a single crystal with <210> orientation. The iridium tip is applied to a gas field ion source or an electron source. The gas field ion source and/or the electron source is applied to a focused ion beam apparatus, an electron microscope, an electron beam applied analysis apparatus, an ion-electron multi-beam apparatus, a scanning probe microscope or a mask repair apparatus.Type: ApplicationFiled: August 8, 2014Publication date: February 12, 2015Applicant: Hitachi High-Tech Science CorporationInventors: Tomokazu Kozakai, Osamu Matsuda, Yasuhiko Sugiyama, Kazuo Aita, Fumio Aramaki, Anto Yasaka, Hiroshi Oba
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Patent number: 8878422Abstract: Device for producing an electron beam includes a housing, which delimits a space that is evacuatable and has an electron beam outlet opening; an inlet structured and arranged for feeding process gas into the space; and a planar cathode and an anode, which are arranged in the space, and between which, a glow discharge plasma is producible by an applied electrical voltage. Ions are accelerateable from the glow discharge plasma onto a surface of the cathode and electrons emitted by the cathode are accelerateable into the glow discharge plasma. The cathode includes a first part made of a first material at least on an emission side, which forms a centrally arranged first surface region of the cathode, and a second part made of a second material, which forms a second surface region of the cathode that encloses the first surface region.Type: GrantFiled: September 8, 2011Date of Patent: November 4, 2014Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung e.V.Inventors: Goesta Mattausch, Peter Feinaeugle, Volker Kirchhoff, Dieter Weiske, Henrik Flaske, Rainer Zeibe
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Publication number: 20140265858Abstract: An ion source for use in a radiation generator includes an active cathode configured to emit electrons on a trajectory away from the active cathode, at least some of the electrons as they travel interacting with an ionizable gas to produce ions. In addition, there is at least one extractor downstream of the active cathode having a potential such that the ions are attracted toward the at least one extractor.Type: ApplicationFiled: March 14, 2013Publication date: September 18, 2014Applicant: Schlumberger Technology CorporationInventor: Schlumberger Technology Corporation
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Patent number: 8771480Abstract: Biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) is processed to produce useful products, such as fuels. For example, systems can use feedstock materials, such as cellulosic and/or lignocellulosic materials and/or starchy materials, to produce ethanol and/or butanol, e.g., by fermentation.Type: GrantFiled: June 20, 2013Date of Patent: July 8, 2014Assignee: Xyleco, Inc.Inventor: Marshall Medoff
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Publication number: 20140184074Abstract: An ion source for use in a radiation generator tube includes a back passive cathode electrode, a passive anode electrode downstream of the back passive cathode electrode, a magnet adjacent the anode, and a front passive cathode electrode downstream of the passive anode electrode. The front passive cathode electrode and the back passive cathode electrode define an ionization region therebetween. At least one field emitter array (FEA) cathode is configured to electrostatically discharge due to an electric field in the ion source. The back passive cathode electrode and the passive anode electrode, and the front passive cathode electrode and the passive anode electrode, have respective voltage differences therebetween, and the magnet generating a magnetic field, such that a Penning-type trap is produced to confine electrons from the electrostatic discharge to the ionization region. At least some of the electrons in the ionization region interact with an ionizable gas to create ions.Type: ApplicationFiled: December 27, 2012Publication date: July 3, 2014Applicant: SCHLUMBERGER TECHNOLOGY CORPORATIONInventor: Luke Perkins
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Patent number: 8747624Abstract: Biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) is processed to produce useful products, such as fuels. For example, systems can use feedstock materials, such as cellulosic and/or lignocellulosic materials and/or starchy materials, to produce ethanol and/or butanol, e.g., by fermentation.Type: GrantFiled: June 20, 2013Date of Patent: June 10, 2014Assignee: Xyleco, Inc.Inventor: Marshall Medoff
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Publication number: 20130307405Abstract: A multi-sectional linear ionizing bar with at least four elements is disclosed. First, disclosed bars may include at least one ionization cell with at least one axis-defining linear ion emitter for establishing an ion cloud along the length thereof. Second, disclosed bars may include at least one reference electrode. Third, disclosed bars may include a manifold for receiving gas or air from a source and for delivering same past the linear emitter(s) such that substantially none of the gas/air flows into the ion cloud. Fourth, disclosed bars may include means for receiving the ionizing voltage and for delivering same to the linear emitter(s) to thereby establish the ion cloud. In this way, disclosed ionizing bars may transport ions from the plasma region toward a charge neutralization target without inducing substantial vibration of the linear emitter and without substantial contaminants from the gas/air flow reaching the linear emitter.Type: ApplicationFiled: July 22, 2013Publication date: November 21, 2013Applicant: ILLINOIS TOOL WORKS INC.Inventors: Aleksey KLOCHKOV, Peter GEFTER, Steven Bernard HEYMANN, Leslie W. PARTRIDGE, Greenberry Bedford BROWN, Matthew T. ANTONELLI
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Publication number: 20130175459Abstract: A multi-sectional linear ionizing bar with at least four elements is disclosed. First, disclosed bars may include at least one ionization cell with at least one axis-defining linear ion emitter for establishing an ion cloud along the length thereof. Second, disclosed bars may include at least one reference electrode. Third, disclosed bars may include a manifold for receiving gas or air from a source and for delivering same past the linear emitter(s) such that substantially none of the gas/air flows into the ion cloud. Fourth, disclosed bars may include means for receiving the ionizing voltage and for delivering same to the linear emitter(s) to thereby establish the ion cloud. In this way, disclosed ionizing bars may transport ions from the plasma region toward a charge neutralization target without inducing substantial vibration of the linear emitter and without substantial contaminants from the gas/air flow reaching the linear emitter.Type: ApplicationFiled: April 3, 2012Publication date: July 11, 2013Inventors: Aleksey KLOCHKOV, Peter GEFTER, Steven Bernard HEYMANN, Leslie W. PARTRIDGE, Greenberry Bedford BROWN, Matthew T. ANTONELLI
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Patent number: 8299713Abstract: A method of accelerating charged particles using a laser pulse fired through a plasma channel contained in a capillary, wherein the plasma waveguide has deviations along its length that cause deviations in the plasma density contained therein, the deviations in plasma density acting to promote charged particle injection into a wake of a passing laser pulse. A radiation source based on a laser-driven plasma accelerator in a plasma waveguide in which the plasma waveguide and/or laser injection process is/are controlled so as to produce an undulating path for the laser pulse through the waveguide, the undulation exerting a periodic transverse force on charged particles being accelerated in the wake of the laser pulse, the resulting charged particle motion causing controlled emission of high frequency radiation pulses.Type: GrantFiled: September 11, 2007Date of Patent: October 30, 2012Assignee: Isis Innovation LimitedInventors: Simon Martin Hooker, Anthony Joseph Gonsalves, Dino Anthony Jaroszynski, Wim Pieter Leemans
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Publication number: 20120200613Abstract: To obtain effective luminance and light efficiency while avoiding discharge, it is necessary to sufficiently increase a current luminous efficiency of gas and an electron emission efficiency of an electron source. In a fluorescent lamp, an anode electric field is increased by setting a pressure of a noble gas or a molecular gas enclosed to 10 kPa or higher, setting an anode voltage to 240 V or lower, and setting a substrate distance to 0.4 mm or smaller. Furthermore, the resulting effect that the current luminous efficiency is increased in proportion to the electric field is used. Also, by applying a MIM electron source having an electron emission efficiency exceeding 10% as an electron source, a non-discharge fluorescent lamp having a light emission luminance equal to or larger than 104 [cd/m2] and a light emission efficiency equal to or larger than 120 [lm/W] is achieved.Type: ApplicationFiled: February 23, 2010Publication date: August 9, 2012Inventors: Masakazu Sagawa, Shin Imamura, Toshiaki Kusunoki
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Patent number: 8143590Abstract: An ion source apparatus has an ion source assembly and a neutralizer. The ion source assembly has a body, a heat-dissipating device, an anode chunk and a gas distributor. The heat-dissipating device has a thermal transfer plate and a first thermal side sheet. The thermal transfer plate has a top, a protrusion and an annular disrupting recess. The protrusion is formed at the top of the thermal transfer plate. The disrupting recess is radially formed around the protrusion. The first thermal side sheet surrounds the protrusion. The gas distributor is mounted securely in the protrusion. Because the protrusion is located between the gas distributor and the first thermal side sheet and the disrupting recess is radially formed around the protrusion, accumulated ions, molecules and deposition film particles are longitudinally disrupted and do not form a short circuit between the gas distributor and the first thermal side sheet.Type: GrantFiled: July 16, 2010Date of Patent: March 27, 2012Inventors: Tsai-Cheng Wang, Chin-Chung Yang, An-Ting Hsiao, Yu-Li Tsai
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Patent number: 8080930Abstract: Spindt-type field-emission cathodes for use in electric propulsion (EP) systems having self-assembling nanostructures that can repeatedly regenerate damaged cathode emitter nanotips. A nanotip is created by applying a negative potential near the surface of a liquefied base metal to create a Taylor cone converging to a nanotip, and solidifying the Taylor cone for use as a field-emission cathode. When the nanotip of the Taylor cone becomes sufficiently blunted or damaged to affect its utility, the base metal is re-liquefied by application of a heat source, a negative potential is reapplied to the surface of the base metal to recreate the Taylor cone, and a new nanotip is generated by solidifying the base metal.Type: GrantFiled: September 7, 2007Date of Patent: December 20, 2011Assignee: Michigan Technological UniversityInventor: Lyon Bradley King
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Patent number: 8022362Abstract: An ionization device includes an ionization chamber (1) and a charging chamber (20) separately prepared therefrom. The ionization chamber (1) has a discharge electrode (6) and an opposing electrode (10) in an interior (4) of a case having an ionizing gas introducing inlet (14). The opposing electrode (10) has an orifice (8) communicating with outside and formed at a position opposing the tip end of the discharge electrode (6). The charging chamber (20) is arranged adjacent to the orifice (8) side of the ionization chamber (1). An introduction inlet (28) of a charge object introduction portion of the charging chamber (20) is arranged at the position near the exit of the orifice (8). The size of the orifice (8) is set so that the charge object is sucked therein by a negative pressure generated when a gas containing ions is sprayed from the exit of the orifice (8) into the charging chamber (20) and the ionization chamber (1) has a higher pressure than the charging chamber (20).Type: GrantFiled: December 13, 2007Date of Patent: September 20, 2011Assignees: Shimadzu Corporation, Osaka Prefecture University Public CorporationInventors: Daiji Okuda, Shigeru Kimoto, Hiroshi Okuda, Motoaki Adachi
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Patent number: 7994474Abstract: An innovative ion source is disclosed that in some embodiments provides an injected independent ion beam to increase the ionization efficiency of the ion source.Type: GrantFiled: May 4, 2007Date of Patent: August 9, 2011Assignee: Andreas HiekeInventor: Andreas Hieke
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Patent number: 7911120Abstract: The invention concerns a source supplying an adjustable energy electron beam, comprising a plasma chamber (P) consisting of an enclosure (1) having an inner surface of a first value (S1) and an extraction gate (2) having a surface of a second value (S2), the gate potential being different from that of the enclosure and adjustable. The invention is characterized in that the plasma is excited and confined in multipolar or multidipolar magnetic structures, the ratio of the second value (S2) over the first value (S1) being close to: D=1/? ?2?me/mi exp (?½), wherein: ? is the proportion of electrons of the plasma P, me the electron mass, and mi is the mass of positively charged ions.Type: GrantFiled: December 6, 2002Date of Patent: March 22, 2011Assignee: Centre National de la Recherche ScientifiqueInventors: Ana Lacoste, Jacques Pelletier, Yves Alban-Marie Arnal
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Patent number: 7870719Abstract: A plasma enhanced rapidly expanded duct system includes a gas turbine engine inter-turbine transition duct having radially spaced apart conical inner and outer duct walls extending axially between a duct inlet and a duct outlet. A conical plasma generator produces a conical plasma along the outer duct wall. An exemplary embodiment of the conical plasma generator is mounted to the outer duct wall and including radially inner and outer electrodes separated by a dielectric material. The dielectric material is disposed within a conical groove in a radially inwardly facing surface of the outer duct wall. An AC power supply is connected to the electrodes to supply a high voltage AC potential to the electrodes.Type: GrantFiled: October 13, 2006Date of Patent: January 18, 2011Assignee: General Electric CompanyInventors: Ching-Pang Lee, Aspi Rustom Wadia, David Glenn Cherry, Scott Michael Carson
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Publication number: 20100264825Abstract: An ion source for generating a particle beam includes a plasma chamber and an electrode, which extends up to the plasma chamber. A gas that is to be ionized is introduced into the ion source via a gas line, which extends over the entire length of the electrode in parallel with the electrode such that the gas flows out of the gas line in immediate proximity to an entry to the plasma chamber.Type: ApplicationFiled: April 12, 2010Publication date: October 21, 2010Inventor: THOMAS UHL
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Publication number: 20100188000Abstract: In a closed electron drift thruster, a magnetic circuit for creating a magnetic field in a main annular channel comprises at least one axial magnetic core surrounded by a first coil and an inner upstream pole piece forming a body of revolution, together with a plurality of outer magnetic cores surrounded by outer coils. The magnetic circuit further comprises an essentially radial outer first pole piece defining a concave inner peripheral surface and an essentially radial second pole piece defining a convex outer peripheral surface. The concave inner peripheral surface and the convex outer peripheral surface present respective adjusted profiles that are distinct from circular cylindrical surfaces so as to form between them a gap of varying width presenting zones of maximum value in register with the outer coils and zones of minimum value in between the outer coils so as to create a uniform radial magnetic field.Type: ApplicationFiled: January 26, 2010Publication date: July 29, 2010Inventors: Olivier Duchemin, Dominique Valentian
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Patent number: 7667379Abstract: In accordance with one embodiment of the present invention, the hollow-cathode apparatus comprises a small-diameter tantalum tube with a plurality of tantalum-foil radiation shields, wherein the plurality of shields in turn comprise one or more spiral windings external to that tube and approximately flush with the open end from which electron emission takes place. The axial length of at least one of the inner windings (closer to the tantalum tube) is equal to or less than approximately half the length of the tantalum tube. An enclosed keeper surrounds the cathode. To start the cathode, a flow of ionizable inert gas, usually argon, is initiated through the cathode and out the open end. An electrical discharge is then started between the keeper and the hollow cathode. When heated to operating temperature, electrons exit from the open end of the hollow cathode.Type: GrantFiled: January 25, 2006Date of Patent: February 23, 2010Assignee: Kaufman & Robinson, Inc.Inventors: Harold R. Kaufman, James R. Kahn
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Techniques for improving the performance and extending the lifetime of an ion source with gas mixing
Patent number: 7655931Abstract: Techniques improving the performance and extending the lifetime of an ion source with gas mixing are disclosed. In one particular exemplary embodiment, the techniques may be realized as a method for improving performance and extending lifetime of an ion source in an ion implanter. The method may comprise introducing a predetermined amount of dopant gas into an ion source chamber. The dopant gas may comprise a dopant species. The method may also comprise introducing a predetermined amount of diluent gas into the ion source chamber. The diluent gas may dilute the dopant gas to improve the performance and extend the lifetime of the ion source. The diluent gas may further comprise a co-species that is the same as the dopant species.Type: GrantFiled: March 29, 2007Date of Patent: February 2, 2010Assignee: Varian Semiconductor Equipment Associates, Inc.Inventor: Atul Gupta -
Patent number: 7622721Abstract: A focused ion source based on a Hall thruster with closed loop electron drift and a narrow acceleration zone is disclosed. The ion source of the invention has an ion focusing system consisting of two parts. The first part is a ballistic focusing system in which the aperture through which the beam exits the discharge channel is tilted. The second is a magnetic focusing system which focuses the ion beam exiting the discharge channel by canceling a divergent magnetic field present at the aperture through which the beam exits the discharge channel. The ion source of the invention also has an in-line hollow cathode capable of forming a self-sustaining discharge. The invention further reduces substrate contamination, while increasing the processing rate. Further the configuration disclosed allows the ion source to operate at lower operational gas pressures.Type: GrantFiled: February 9, 2007Date of Patent: November 24, 2009Inventors: Michael Gutkin, Alexander Bizyukov, Vladimir Sleptsov, Ivan Bizyukov, Konstantin Sereda
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Patent number: 7602111Abstract: A plasma accelerating apparatus and a plasma processing system having the same are provided. The apparatus includes a channel comprising an inner wall, an outer wall spaced apart from the inner wall by a distance for encircling the inner wall, and an end wall connected to an end of the inner wall and the outer wall to form an outlet port at the other ends of the walls; a gas supply portion to supply a gas to an inside of the channel; and a plasma generating and accelerating portion to supply ionization energy to the gas to generate a plasma beam and to accelerate the generated plasma beam toward the outlet port, wherein a coating layer comprising a first layer composed of a carbon nano tube is formed on at least one of the inner wall, the outer wall, and the end wall of the channel.Type: GrantFiled: April 19, 2006Date of Patent: October 13, 2009Assignee: Samsung Electronics Co., Ltd.Inventor: Won-tae Lee
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Patent number: 7589474Abstract: A closed drift ion source is disclosed. The ion source has an open end 1 and a central axis 150 around which are arranged outer magnetic pole piece 3, inner magnetic pole piece 5, anode 2, shield 6 and back magnetic shunt 17. In one embodiment the anode 2 and inner magnetic pole piece 5 are annular. Permanent magnets 7 are located behind the shield 6 and in contact with outer magnetic pole piece 3 and the back magnetic shunt 17. As a result the magnetic field lines pass through the magnetic pole pieces and a mirror magnetic field is set up in the discharge region between them. The inner magnetic pole piece 5 is hollow which facilitates production of the mirror magnetic field.Type: GrantFiled: December 6, 2006Date of Patent: September 15, 2009Assignee: City University of Hong KongInventors: Paul K. Chu, Deli Tang, Shihao Pu, Honghui Tong, Qingchuan Chen
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Patent number: 7584601Abstract: Several methods of increasing the thrust and energy efficiency of charged particle jet engines operating in a gaseous or liquid medium have been developed. We identify the three main components of charged particle thrust generation and show how to take maximum advantage of each. We also describe several structures and techniques to reduce the energy associated with the generation of charged particles and to minimize the number of charged particles needed to further increase energy efficiency. In addition to the structures and techniques used to increase thrust and energy efficiency, we have also developed several structures and techniques for efficiently controlling the amount and direction of thrust. Finally, we show many uses of these charged particle jet engines and ways to control them.Type: GrantFiled: September 1, 2005Date of Patent: September 8, 2009Inventors: Tristram Walker Metcalfe, III, Walter Timmons Cardwell, Jr.
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Patent number: 7581380Abstract: An improved air-breathing electrostatic ion thruster specially configured for use in low-Earth atmosphere comprises a housing having an electrically conductive inner surface defining an ionization chamber. Ambient atmospheric gas passes through a forward screen electrode at the chamber inlet to be ionized by an inner electrode disposed in the chamber. The ions are directed rearward through the aligned apertures of a rearward screen electrode and an accelerator electrode at the chamber outlet to generate thrust. A source of electrical power, which can be solar cells, a battery and/or a generator, provides current of a first polarity to the inner surface, forward screen electrode and rearward screen electrode and current of a second polarity to the inner electrode and accelerator electrode. A controller controls the amount and/or polarity of the current. Magnets disposed about the chamber improve ionization. A neutralizing mechanism near the chamber outlet keeps the ion thruster electrically neutral.Type: GrantFiled: August 7, 2006Date of Patent: September 1, 2009Inventor: Eric L. Wahl
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Patent number: 7566883Abstract: One or more thermal transfer sheets are easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal transfer sheets, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal transfer sheets may be interposed between the consumable components within the anode assembly. The thermal transfer sheets may be thermally conductive and either electrically insulating or conductive.Type: GrantFiled: January 12, 2007Date of Patent: July 28, 2009Assignee: Veeco Instruments, Inc.Inventors: David M. Burtner, Scott A. Townsend, Daniel E. Siegfried
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Publication number: 20090121148Abstract: Ion sources or generators for focused ion beam emission (FIB) applications emitting ion beams into vacuum or a gas are used in industry and research for the characterization and processing of surfaces. With appropriate focusing, such ion beams can be confined to diameters of a few nanometers. The tip of technical FIB generators for producing such focused beams consists of a liquid metal, gallium in general, which tends to fluctuate during operation. This has a negative influence on the stability of the emission current and the focus definition. It is also possible to generate an FIB with solid tips, consisting of a solid metal, but such tips deteriorate rapidly during operation due to erosion of material from the tip apex. The present invention concerns a novel FIB source generating free space ion beams from a solid source but does not exhibit the above-mentioned erosion effect at the apex.Type: ApplicationFiled: March 29, 2006Publication date: May 14, 2009Applicants: UNIVERSITY OF BASEL, UNIVERSITY OF ZUERICHInventors: Dieter Pohl, Hans-Werner Fink, Julien Toquant, Conrad Escher, Sandra Thomann, Cornel Andreoli
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Patent number: 7498586Abstract: A gridless ion source operates from a control system (201) that generates an anode voltage (215) comprising a mains rectified signal such that the anode voltage modulates between a first voltage above a threshold and a second voltage below the threshold. The mains rectified signal is provided by transformer (210) receiving a mains input (211). The output of the transformer (213) is rectified by a bridge rectifier (214). In preferred embodiments, the threshold is an ionization threshold such that the ion current is initiated and extinguished in every cycle.Type: GrantFiled: August 13, 2004Date of Patent: March 3, 2009Assignee: Saintech Pty, Ltd.Inventors: Wayne Sainty, William Vince Waller
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Patent number: 7476869Abstract: A gas distributor is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the gas distributor, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The gas distributor may be mounted to a thermal control plate in the anode assembly with several set screws. The gas distributor may be disk-shaped with counterbores in a surface to recess the heads of the set screws. Alternately, the gas distributor may be clamped or held in place by other structures or components of the ion source.Type: GrantFiled: January 12, 2007Date of Patent: January 13, 2009Assignee: Veeco Instruments, Inc.Inventors: David M. Burtner, Scott A. Townsend, Daniel E. Siegfried
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Patent number: 7439521Abstract: An ion source has a removable anode assembly that is separable and from a base assembly to allow for ease of servicing the consumable components of the anode assembly. Such consumables may include a gas distributor, a thermal control plate, an anode, and one or more thermal transfer sheets interposed between other components. A pole piece and a cathode may also be part of the anode assembly. The anode assembly may be attached to the base assembly via the pole piece.Type: GrantFiled: January 12, 2007Date of Patent: October 21, 2008Assignee: Veeco Instruments, Inc.Inventors: David M. Burtner, Scott A. Townsend, Daniel E. Siegfried
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Patent number: 7425711Abstract: A thermal control plate is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal control plate, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal control plate may support a gas distributor and an anode in the anode assembly. The thermal control plate may have a port for passing working gas from one side of the thermal control plate to the other. An interface surface on the thermal control plate may have a pattern of recesses to allow the working gas to disperse underneath the gas distributor.Type: GrantFiled: January 12, 2007Date of Patent: September 16, 2008Assignee: Veeco Instruments, Inc.Inventors: David M. Burtner, Scott A. Townsend, Daniel E. Siegfried
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Patent number: 7420182Abstract: This invention features a combined radio frequency (RF) and Hall Effect ion source and plasma accelerator system including a plasma accelerator having an anode and a discharge zone, the plasma accelerator for providing plasma discharge. A gas distributor introduces a gas into the plasma accelerator. A cathode emits electrons attracted to the anode for ionizing the gas and neutralizing ion flux emitted from the plasma accelerator. An electrical circuit coupled between the anode and the cathode having a DC power source provides DC voltage. A magnetic circuit structure including a magnetic field source establishes a transverse magnetic field in the plasma accelerator that creates an impedance to the flow of the electrons toward the anode to enhance ionization of the gas to create plasma and which in combination with the electric circuit establishes an axial electric field in the plasma accelerator.Type: GrantFiled: April 27, 2006Date of Patent: September 2, 2008Assignee: Busek CompanyInventors: Vladimir Hruby, Kurt Hohman, Thomas Brogan
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Publication number: 20080174225Abstract: A stable cold field electron emitter is produced by forming a coating on an emitter base material. The coating protects the emitter from the adsorption of residual gases and from the impact of ions, so that the cold field emitter exhibits short term and long term stability at relatively high pressures and reasonable angular electron emission.Type: ApplicationFiled: September 14, 2007Publication date: July 24, 2008Applicant: FEI CompanyInventors: Theodore Carl Tessner, Gregory A. Schwind, Lynwood W. Swanson
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Patent number: 7382087Abstract: An ozone generating system and an ozone generating method producing ozone at a high concentration and operating at high efficiency, in which a raw material gas with no nitrogen added and mainly containing oxygen is used. The amount of generation of NOX by-product is null. A raw material gas not containing nitrogen and mainly containing oxygen is supplied to an ozone generator, an AC voltage is applied to produce discharge light having a wavelength of 428 nm to 620 nm, a catalytic material containing a photocatalytic material with a band gap energy of 2.0 eV to 2.9 eV is provided on an electrode or a dielectric in a discharge region, gas pressure is kept at 0.1 MPa to 0.4 MPa, and ozone is generated.Type: GrantFiled: December 14, 2004Date of Patent: June 3, 2008Assignee: Toshiba Mitsubishi-Electric Industrial Systems CorporationInventors: Yoichiro Tabata, Yujiro Okihara, Masayuki Ishikawa, Tetsuya Saitsu, Hatsuo Yotsumoto
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Patent number: 7372195Abstract: An electron beam source for use in an electron gun. The electron beam source includes an emitter terminating in a tip. The emitter is configured to generate an electron beam. The electron beam source further includes a suppressor electrode laterally surrounding the emitter such that the tip of the emitter protrudes through the suppressor electrode and an extractor electrode disposed adjacent the tip of the emitter. The extractor electrode comprises a magnetic disk whose magnetic field is aligned with an axis of the electron beam.Type: GrantFiled: November 22, 2005Date of Patent: May 13, 2008Assignee: Applied Materials, Inc.Inventors: Steven T. Coyle, Michael R. Scheinfein, William J. Devore
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Patent number: 7342236Abstract: An ion source is cooled using a cooling plate that is separate and independent of the anode. The cooling plate forms a coolant cavity through which a fluid coolant (e.g., liquid or gas) can flow to cool the anode. In such configurations, the magnet may be thermally protected by the cooling plate. A thermally conductive material in a thermal transfer interface component can enhance the cooling capacity of the cooling plate. Furthermore, the separation of the cooling plate and the anode allows the cooling plate and cooling lines to be electrically isolated from the high voltage of the anode (e.g., using a thermally conductive, electrically insulating material). Combining these structures into an anode subassembly and magnet subassembly can also facilitate assembly and maintenance of the ion source, particularly as the anode is free of coolant lines, which can present some difficulty during maintenance.Type: GrantFiled: February 18, 2005Date of Patent: March 11, 2008Assignee: Veeco Instruments, Inc.Inventors: David Matthew Burtner, Scott A. Townsend, Daniel E. Siegfried, Viacheslav V. Zhurin
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Patent number: 7335896Abstract: An emitter for an ion source, such as a liquid metal alloy ion source (LMAIS). The emitter includes a binary alloy PrSi as a source material.Type: GrantFiled: July 26, 2005Date of Patent: February 26, 2008Assignee: ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbHInventors: Wolfgang Pilz, Lothar Bischoff
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Patent number: 7238952Abstract: A metal ion emission device for emitting a metal ion by applying voltage to a molten liquid metal includes a needle-like part having an internal opening in which the liquid metal can be moved. The needle-like part has a first opening for supplying the liquid metal to the opening and a second opening for emitting the liquid metal as a metal ion.Type: GrantFiled: November 16, 2004Date of Patent: July 3, 2007Assignee: Canon Kabushiki KaishaInventor: Mitsuru Ohtsuka