Abstract: The electric potential measuring instrument comprises an electrode arranged on a semiconductor substrate at a position opposite to the object of measurement and a modulator for modulating the coupling capacitance between the object of measurement and the electrode. The electrode is the gate electrode of a field effect type transistor. The modulated electric current that flows between the source diffusion region and the drain diffusion region of the field effect type transistor is synchronously detected by a detection circuit with the modulation frequency of the modulator. The output signal that appears on the gate electrode of a field effect transistor can be measured with ease by changing the coupling capacitance between the electrode of an electric potential measuring instrument and an object of measurement.

Abstract: To provide an electric potential measuring device which is useful in realizing size reduction, high sensitivity, and high reliability. The electric potential measuring device includes: an oscillating device which includes torsion springs, and an oscillating body axially supported by the springs to oscillate; and signal detecting unit which is located on a surface of the oscillating body. A capacitance between the detection electrode and a surface of an electric potential measuring object is varied by varying a distance therebetween by the oscillating device, whereby an output signal appearing on the detection electrode is detected.

Abstract: An integrator circuit (110) is provided including an amplifier element (170) configured to receive an input signal at an input node, amplify the input signal, and provide an amplified input signal at an output node; a feedback capacitor element (175) connected between the output node and the input node; and a current matching circuit (120) connected to the output node, and configured to sense an output voltage of the amplifier element and to provide a supplemental current (IM) to the input node that is less than or equal to a feedback current (IF) charging the feedback capacitor element. This supplemental current is substantially equal and opposite in polarity to a feedback current when the output voltage satisfies a set criterion.

Abstract: An electrostatic voltmeter has an input sensing terminal, a first operational amplifier, a second operational amplifier, a first reference voltage terminal electrically connected to the non-inverting input of the second operational amplifier, a low reference voltage terminal electrically connected to the output of the second operational amplifier, and a voltage indicator, electrically connected between the low reference voltage terminal and the first reference voltage terminal.

Abstract: In a surface voltmeter (1), a surface voltage on a measurement area on a semiconductor substrate (9) on which an insulating film is formed is measured while applying light to the measurement area. With this operation, a voltage induced on a main body of the substrate (9) by charge which is charged on a surface of the insulating film is balanced out. Consequently, it is possible to measure a surface voltage on the measurement area with high accuracy. Since an electrode wiring (164) used for application of an electrode voltage to an electrode (12) extends from the electrode (12) in a direction away from the substrate (9) along a vibration direction, it is possible to prevent influences of noises caused by vibration of the electrode wiring (164) in vibrating the electrode (12) and to measure the surface voltage on the measurement area more accurately.

Abstract: A grammage measuring apparatus including a dielectric resonator which is arranged only at one side surface of a sample; a shielding container with which the dielectric resonator is substantially covered except for a sample measuring surface; a microwave excitation device which causes the dielectric resonator to generate an electric field vector; a detection device which detects transmission energy or reflection energy by the dielectric resonator; a storage device in which a calibration curve indicating a resonance frequency shift amount for a grammage is stored; and a data processing device which calculates the grammage of a measuring sample from the calibration curve and measurement result of the resonance frequency shift amount of the measuring sample.

Abstract: An electrical potential sensor device comprises sensor electrodes arranged to measure a voltage based on a change in electrical charge induced in the sensor electrodes by exposure to an electrical potential of a source to be measured. An electro-thermally operated mechanism, adjacent to the sensor electrodes, is movable between a first position in which only first ones of the sensor electrodes are exposed to the electrical potential of the source to be measured and other sensor electrodes are shielded from the electrical potential, and a second position in which other ones of the sensor electrodes are exposed to the electrical potential and the first ones are substantially shielded from the electrical potential. A controller combines the output from the two sets of electrodes which are alternately exposed to the electrical potential to calculate a resulting measured/sensed voltage or measured/sensed electrical potential of the device.

Abstract: A potential measuring apparatus has a detection electrode on which an electric charge is induced according to a potential of a detection object, and a modulator for altering the generated quantity of the electric charge. The detection electrode has at least one depressed portion on a surface opposite to the detection object.

Abstract: A potential sensor is provided in which the adhesion of toner particles to the potential sensor is reduced or prevented from occurring, reducing or preventing the occurrence of a situation that accurate detection cannot be performed. The potential sensor has a movable member, detecting electrodes formed on the movable member, a support which movably supports the movable member, a driving mechanism which drives the movable member, and a stationary member which supports the support. Between the movable member and the stationary member, a first gap is so formed as to make the movable member 101 movable. The first gap has a part that is not larger in width than the maximum size of toner particles when the movable member is not elastically deformed and is at a neutral position.

Abstract: An electric potential measuring apparatus includes a detecting electrode, a modulator for changing an electrostatic capacitance between a measurement object and the detecting electrode by mechanical vibration, a charge detector for detecting the amount of charges electrostatically induced in the detecting electrode by the modulator, and a vibration generating-detecting unit for selectively performing either a vibration generating function of exciting the mechanical vibration, or a detecting function of detecting the condition of the mechanical vibration.

Abstract: An electrostatic voltmeter has an input sensing terminal, a first operational amplifier, a second operational amplifier, a first reference voltage terminal electrically connected to the non-inverting input of the second operational amplifier, a low reference voltage terminal electrically connected to the output of the second operational amplifier, and a voltage indicator, electrically connected between the low reference voltage terminal and the first reference voltage terminal.

Abstract: An integrator circuit (110) is provided including an amplifier element (170) configured to receive an input signal at an input node, amplify the input signal, and provide an amplified input signal at an output node; a feedback capacitor element (175) connected between the output node and the input node; and a current matching circuit (120) connected to the output node, and configured to sense an output voltage of the amplifier element and to provide a supplemental current (IM) to the input node that is less than or equal to a feedback current (IF) charging the feedback capacitor element. This supplemental current is substantially equal and opposite in polarity to a feedback current when the output voltage satisfies a set criterion.

Abstract: A potential sensor (101) including first and second detection electrodes (121 a, b) opposed to an object of which a potential is to be measured, and a movable shutter (125) so positioned between the detection electrodes and the potential-measured object with gaps thereto; wherein the movable shutter can assume a first state and a second state, the first detection electrode is exposed to the potential-measured object wider when the movable shutter assumes the first state than when the movable shutter assumes the second state, and the second detection electrode is exposed to the potential-measured object narrower when the movable shutter assumes the first state than when the movable shutter assumes the second state.

Abstract: A surface voltmeter comprises a stage having a conductive surface, a vibrating electrode, a vibration part, and an elevation mechanism. While vibrating the vibrating electrode, displacement current from the conductive surface is acquired. A control part controls electrode voltage so that the displacement current becomes a value specified by a computer, and acquires a relationship between the displacement current and the electrode voltage while changing the displacement current. Acquisition of the relationship is performed a plurality of times while changing distance between the vibrating electrode and an object, the electrode voltage which is independent from the distance between the vibrating electrode and the object is obtained as reference voltage, and surface voltage on the object is obtained on the basis of the reference voltage.

Abstract: An electric potential measuring device includes a detection electrode of a conductive material disposed in opposition to an object and a movable structure includes a first solid material portion of another dielectric and a second solid material portion of another dielectric or a conductive material. A charge induced on the detection electrode by electric lines of force from the object is modulated by moving the movable structure with a drive mechanism, to measure an electric potential of the object. An image forming apparatus includes the electric potential measuring device and an image forming means for performing a control of an image formation by using the electric potential measuring device.

Abstract: An electric-field meter provided with a housing, an electrode assembly, a shield assembly, a movement assembly, a position detection assembly, a charge measurement circuit, and a leakage current compensation circuit. The electric-field meter can be characterized as a field mill, an induction voltmeter, an electrostatic fluxmeter or an agrimeter. The electrode assembly is selectively exposed to the electric field. The shield assembly alternately covers and exposes the electrode assembly to the electric field. The movement assembly has a source of motive force and a linkage operably connected to one of the shield assembly and the electrode assembly for alternately covering and exposing the electrode assembly to the electric field. The charge measurement circuit receives charge on the electrode assembly. The charge measurement circuit provides a charge detection signal indicative of the charge induced on the electrode assembly as the electrode assembly is selectively exposed to the electric field.

Abstract: To provide an electric potential measuring device which is useful in realizing size reduction, high sensitivity, and high reliability. The electric potential measuring device includes: an oscillating device which includes torsion springs, and an oscillating body axially supported by the springs to oscillate; and signal detecting unit which is located on a surface of the oscillating body. A capacitance between the detection electrode and a surface of an electric potential measuring object is varied by varying a distance therebetween by the oscillating device, whereby an output signal appearing on the detection electrode is detected.

Abstract: An aerosol particle spectrometer utilizes a high voltage central electrode and a series of annular, axially arranged collector electrodes maintained at ground, for collecting positively charged particles suspended in an aerosol flowing between the electrodes. Each collector electrode provides current to an integrating electrometer including circuitry that rapidly charges and discharges the integrating capacitor during a brief reset cycle, to generate accurate particle characterizing information based on low currents, with high bandwidth and high dynamic range, virtually in real time.

Abstract: Disclosed in a non-contacting electric potential sensor capable of being readily reduced in its size, which includes a detecting electrode, an electrically-conductive movable shutter, and a driving unit for driving the electrically-conductive movable shutter. The detecting electrode is to be placed facing a measurement object whose electric potential is to be measured. The electrically-conductive movable shutter is disposed so as to be movably located in a spacing formed between the detecting electrode and the measurement object when the detecting electrode is placed facing the measurement object, so that an exposure degree of the detecting electrode against the measurement object can be controlled. The driving unit includes a current injecting unit for selectively injecting current into the electrically-conductive movable shutter in a direction approximately perpendicular to a moving direction of the electrically-conductive movable shutter.

Abstract: For simplified supply of potentiometric sensors with a reference electrolyte, a sensor plug head for connecting to a cable connection piece of a potentiometric sensor is provided. The sensor plug head including, besides the usual electric connections, a supply connection for connecting to a reference container of the potentiometric sensor. The supply connection includes, preferably, an electrolyte line and the reference container an opening, with the electrolyte line being connectable to the opening, in order to supply the reference container with electrolyte.

Abstract: An electric potential sensor includes a detecting electrode, a capacitor modulating unit for modulating a coupling capacitance between the detecting electrode and a measurement object by using an electrostatic force, and a shielding unit for electrically shielding the detecting electrode from electric fields due to the electrostatic force of the capacitor modulating unit. An electric potential of the measurement object is measured based on a change caused by the capacitor modulating unit in the amount of electrical charge induced in the detecting electrode. Entrance of lines of electric force due to the electrostatic force of the capacity modulating unit into the detecting electrode is prevented or reduced, so that an unfavorable mixture of driving noise into an output signal of the detecting electrode can be prevented or reduced.

Abstract: A fault condition monitoring apparatus for use with a fuse cutout includes a housing operable to be supported by the fuse cutout. The housing has first and second contacts operable to make electrical contact with fuse contacts on the fuse cutout when the housing is supported by the fuse cutout. A current sensor is mounted inside the housing and is connected to the first and second contacts. A signaling device is coupled to the current sensor and is operable to cause a signal to be produced when current sensed by the current sensor meets a criterion.

Abstract: An electric-field meter provided with a housing, an electrode assembly, a shield assembly, a movement assembly, a position detection assembly, a charge measurement circuit, and a leakage current compensation circuit. The electric-field meter can be characterized as a field mill, an induction voltmeter, an electrostatic fluxmeter or an agrimeter. The electrode assembly is selectively exposed to the electric field. The shield assembly alternately covers and exposes the electrode assembly to the electric field. The movement assembly has a source of motive force and a linkage operably connected to one of the shield assembly and the electrode assembly for alternately covering and exposing the electrode assembly to the electric field. The charge measurement circuit receives charge on the electrode assembly. The charge measurement circuit provides a charge detection signal indicative of the charge induced on the electrode assembly as the electrode assembly is selectively exposed to the electric field.

Abstract: A voltmeter measures an unknown voltage on a target surface using multiple sampling stages or a parallel reference capacitor. A movable shutter may alternately be closed during resetting of a voltage measuring circuit and opened so as to expose a detector plate to the target surface during two sampling stages. Alternatively, the shutter may be used to modulate exposure of a detector plate to the target surface.

Abstract: A modular keypad assembly for use with a projection device is provided. This modular keypad assembly may include a user input through which a user may operate the projection device. Such a modular keypad assembly may include a elastomer keypad, a keypad support plate; and a keypad circuit board.

Abstract: Disclosed in a non-contacting electric potential sensor capable of being readily reduced in its size, which includes a detecting electrode, an electrically-conductive movable shutter, and a driving unit for driving the electrically-conductive movable shutter. The detecting electrode is to be placed facing a measurement object whose electric potential is to be measured. The electrically-conductive movable shutter is disposed so as to be movably located in a spacing formed between the detecting electrode and the measurement object when the detecting electrode is placed facing the measurement object, so that an exposure degree of the detecting electrode against the measurement object can be controlled. The driving unit includes a current injecting unit for selectively injecting current into the electrically-conductive movable shutter in a direction approximately perpendicular to a moving direction of the electrically-conductive movable shutter.

Abstract: An electrostatic instrument for measuring particle concentrations and possibly sizes in aerosols, such as an Electrostatic Low Pressure Impactor or Differential Mobility Analyser suffers from errors which limit the useful response bandwidth of the device. The invention minimises or eliminates these transient errors which are caused by changing particle concentrations in the aerosol. A system may be added to an otherwise conventional instrument to compensate for the transient effects based on a model of the charge production mechanism. Alternatively, a screening electrode placed over the sense electrodes in the instrument, and held at controlled electrical potential difference, is added to the instrument to eliminate the effect. A third embodiment adds compensating electrodes which provide a direct measurement of the transient effect which can be subtracted from the signal.

Abstract: An electrostatic type voltmeter for measuring the potential on a surface, the voltmeter including a probe; a support for supporting the probe in spaced relationship with the surface, the probe having a plurality of spacing element sites thereon for measuring a distance between each of the plurality of spacing element sites and a corresponding area on the surface opposite of each of the plurality of spacing element sites; a plurality of electrostatic element sites, intermixed and adjacent to the plurality of spacing element sites on the probe, for measuring a voltage between each of the plurality of spacing element sites and an area on the surface adjacent to the corresponding area opposite of each of the plurality of spacing element sites. A processor for compensating an output signal of the probe in response to the measurements received from the plurality of spacing element sites and the plurality of electrostatic element sites.

Abstract: Disclosed in a non-contacting electric potential sensor capable of being readily reduced in its size, which includes a detecting electrode, an electrically-conductive movable shutter, and a driving unit for driving the electrically-conductive movable shutter. The detecting electrode is to be placed facing a measurement object whose electric potential is to be measured. The electrically-conductive movable shutter is disposed so as to be movably located in a spacing formed between the detecting electrode and the measurement object when the detecting electrode is placed facing the measurement object, so that an exposure degree of the detecting electrode against the measurement object can be controlled. The driving unit includes a current injecting unit for selectively injecting current into the electrically-conductive movable shutter in a direction approximately perpendicular to a moving direction of the electrically-conductive movable shutter.

Abstract: An ESD and transient signal monitoring system and method are provided wherein an ESD monitoring device may be used to continuously monitor ESD events and generate an indicating of the magnitude of the ESD events. A method for protecting an electronic device from ESD events is also described.

Abstract: An electrostatic instrument for measuring particle concentrations and possibly sizes in aerosols, such as an Electrostatic Low Pressure Impactor or Differential Mobility Analyser suffers from errors which limit the useful response bandwidth of the device. The invention minimises or eliminates these transient errors which are caused by changing particle concentrations in the aerosol. A system may be added to an otherwise conventional instrument to compensate for the transient effects based on a model of the charge production mechanism. Alternatively, a screening electrode placed over the sense electrodes in the instrument, and held at controlled electrical potential difference, is added to the instrument to eliminate the effect. A third embodiment adds compensating electrodes which provide a direct measurement of the transient effect which can be subtracted from the signal.

Abstract: A surface potential detection apparatus in which surface potential sensors are provided independently of one another. A switching circuit individually selects and outputs signals provided from the surface potential sensors with varied timing for individual surface potential sensors. A single signal processing circuit connected to the surface potential sensors via the switching circuit is shared by the surface potential sensors.

Abstract: An alternating voltage detector having a sensor for the detection of an electric alternating field, an electrical signal transducer connected to the sensor for signaling an electrical alternating field detected by the sensor, and an indicator unit connected to the electrical signal transducer for the indication of the signaled electrical alternating field, has an interference pulse filter arranged between the sensor and the electrical signal transducer which filters out electrical pulses or pulse packets detected by the sensor which have an average pulse duration or average pulse packet duration less than a predetermined time.

Abstract: An ESD and transient signal monitoring system and method are provided wherein an ESD monitoring device may be used to continuously monitor ESD events and generate an indicating of the magnitude of the ESD events. A method for protecting an electronic device from ESD events is also described.

Abstract: A hand truck like frame has a pair of wheels, each of which is coated with an electrically conductive material so that in a selected operating mode the wheels define electrodes. A separate pair of electrodes is mounted to the frame and the electrodes and the wheels are electrically connected through switching circuits to an ohmmeter. The ESD potential between the electrodes and/or the wheels may be measured in several selected modes for point to point, point to ground and point to bench top measurements.

Abstract: An apparatus is provided for determining the response of an electrometer used in an electrophotographic recording apparatus. The apparatus includes a movable base disposed adjacent said electrometer. The base includes a non-conductive material. A conductive pattern is disposed on the base. The conductive pattern is electrically connected to a variable power supply. A motor moves or drives the base past the electrometer. The motor is controlled by a motor control to vary the speed of movement of said base. A method is also provided for determining the response of an electrometer used in an electrophotographic recording apparatus. An electrometer to be tested is selected and the operational parameters of the electrometer are dynamically tested.

Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device includes sensors for detecting the parameters and converting them to sensor outputs, a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device also includes an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.

Abstract: Disclosed an open type electricity meter having an open type communication module.

Abstract: An electrostatic field sensor configuration and supporting signal processing electronics provides a wider bandwidth than prior art sensors, thus enabling the present sensor to replace three prior art instruments in the application of measuring atmospheric electricity. The quadrature, differential characteristics of the present sensor also provide suppression of unwanted disturbances and more accurate electrostatic field measurements. Besides application in the geophysical instrument known as a field mill, the present sensor may be employed in any system for measuring quasi-static and rapidly changing electrostatic fields.

Abstract: A sensor for an electrostatic detector including an elongated vibratory element supported at a mechanical node at one end in the manner of a cantilever beam, a sensitive electrode on the vibratory element near the other end and adapted to be disposed toward an electrical charge, field or potential being measured, and a driver transducer on the vibratory element for vibrating the element in a direction to vary the capacitive coupling between the electrode and the electrical charge, field or potential being measured. An amplifier and the sensitive electrode are combined in an assembly on the vibratory element thereby providing a low impedance amplifier output which in turn allows a narrow spacing around the vibratory element to prevent entry of contaminants. The vibratory element can be provided with a structure which allows measurements with various spatial resolution characteristics.

Abstract: An ion mobility spectrometer is disclosed which includes a sample input port, an ion generator, an ionization chamber receiving and ionizing samples, an ion gate for causing the ionized samples to travel in a direction, and a drift region for receiving the directed ionized samples and for subjecting the ionized samples to an electric potential. The ionized samples then separate according to their electric charge and mass and are detected by a sensor having an output with linear, non-linear, and logarithmic characteristics. The ion mobility spectrometer further includes circuitry coupled to the sensor for linearizing the output such that the non-linear and logarithmic characteristics are linearized while preserving the linear characteristics.

Abstract: A monitoring system and method detects electrical parameters associated with a conductive strap attached to a user to detect electrical characteristics which may be destructive of sensitive electrical components being manipulated by the user.

Abstract: A sensor for an electrostatic detector including an elongated vibratory element supported at a mechanical node at one end in the manner of a cantilever beam, a sensitive electrode on the vibratory element near the other end and adapted to be disposed toward an electrical charge, field or potential being measured, and a driver transducer on the vibratory element for vibrating the element in a direction to vary the capacitive coupling between the electrode and the electrical charge, field or potential being measured. The driver transducer is at a location along the beam and is operated at a vibratory frequency such that a virtual mechanical node appears along the beam. This, in turn, reduces vibration at the mechanical attachment node so that the degree of stiffness of the mechanical node does not affect the operating frequency and/or the displacement at the free end of the cantilever.

Abstract: An ESD and transient signal monitoring system and method are provided wherein an ESD monitoring device may be used to continuously monitor ESD events and generate an indicating of the magnitude of the ESD events. A method for protecting an electronic device from ESD events is also described.

Abstract: A hand truck like frame has a pair of wheels, each of which is coated with an electrically conductive material so that in a selected operating mode the wheels define electrodes. A separate pair of electrodes is mounted to the frame and the electrodes and the wheels are electrically connected through switching circuits to an ohmmeter. The ESD potential between the electrodes and/or the wheels may be measured in several selected modes for point to point, point to ground and point to bench top measurements.

Abstract: A method and apparatus for automated testing of a plurality of electrostatic discharge (ESD) devices on a wafer. The wafer has M padsets and N conductive pads on each padset, where m is at least 1, and n is at least 2, and each ESD device is conductively coupled to a unique plurality of pads of a padset of the M padsets. Testing sequences, under program control of a computer system, implement the testing of the ESD devices.

Abstract: A sensor for an electrostatic detector comprising an elongated vibratory element supported at a mechanical node at one end in the manner of a cantilever beam, a sensitive electrode on the vibratory element near the other end and adapted to be disposed toward an electrical charge, field or potential being measured, and a driver transducer on the vibratory element for vibrating the element in a direction to vary the capacitive coupling between the electrode and the electrical charge, field or potential being measured. The driver transducer is at a location along the beam and is operated at a vibratory frequency such that a virtual mechanical node appears along the beam. This, in turn, prevents vibration of the mechanical node so that the degree of stiffness of the mechanical node does not affect the operating frequency and/or the displacement at the free end of the cantilever.

Abstract: A sensor for an electrostatic detector comprising an elongated vibratory element supported at a mechanical node at one end in the manner of a cantilever beam, a sensitive electrode on the vibratory element near the other end and adapted to be disposed toward an electrical charge, field or potential being measured, and a driver transducer on the vibratory element for vibrating the element in a direction to vary the capacitive coupling between the electrode and the electrical charge, field or potential being measured. The driver transducer is at a location along the beam and is operated at a vibratory frequency such that a virtual mechanical node appears along the beam. This, in turn, reduces vibration at the mechanical attachment node so that the degree of stiffness of the mechanical node does not affect the operating frequency and/or the displacement at the free end of the cantilever.

Abstract: A system for electrostatically measuring the shape or pattern of objects comprising an array of sensor devices having the capability of responding, due to variable electrostatic coupling, to produce differentiated output signals when a sensor element forming part of each device is present and when it is not.

Abstract: A non-vibrating capacitance probe for use as a non-contact sensor for tribological wear on a component. The device detects surface charge through temporal variation in the work function of a material. A reference electrode senses changing contact potential difference over the component surface, owing to compositional variation on the surface. Temporal variation in the contact potential difference induces a current through an electrical connection. This current is amplified and converted to a voltage signal by an electronic circuit with an operational amplifier.