Abstract: Using a local-potential-driving probe drives a conductor to a known potential while adjacent lines are grounded through the sample body reduces electrostatic scanning microscope signal from adjacent lines, allows imaging of metal lines deeper in the sample. Providing different potentials locally on different conductive lines using multiple local-potential-driving probes allows different conductors to be highlighted in the same image, for example, by changing the phase of the signal being applied to the different local-potential-driving probes.

Abstract: A diode model and conductive-probe measurements taken at the wafer lever are used to predict the characterization parameters of a semiconductor device manufactured from the wafer. A current-voltage curve (I-V) model that expresses a current-voltage relationship as a function of resistance, ideality factor, and reverse saturation current is fitted to a number of conductive-probe measurement data. The current-voltage curve (I-Vd) for the device is then estimated by subtracting from the (I-V) model the product of current times the resistance produced by fitting the (I-V) model.

Abstract: An integrated current sensing apparatus includes a magnetic-field sensing element, a power supply circuit, an offset adjustment circuit, a gain adjustment circuit and a regulating unit. The magnetic-field sensing element is configured for sensing magnetic field, and correspondingly generating a sensing voltage. The power supply circuit is electrically coupled to the magnetic-field sensing element, for generating a constant current to the magnetic-field sensing element to control the sensing voltage. The offset adjustment circuit is electrically coupled to the magnetic-field sensing element, for adjusting an offset of the sensing voltage. The gain adjustment circuit is electrically coupled to the offset adjustment circuit, for amplifying the sensing voltage to a rated output voltage. The regulating unit is electrically coupled to the power supply circuit, the offset adjustment circuit and the gain adjustment circuit, for controlling the constant current, the offset and a gain value.