Abstract: In a surface shape measurement device that measures the surface shape of a sample (W1, W2) by moving a probe (16, 26) in a sliding fashion along the surface of the sample (W1, W2) and thereby detecting the amount of displacement of the probe (16, 26) caused by irregularities on the surface, an initial amount of displacement is detected which is the amount of displacement of the probe (16, 26) when the probe is first placed in contact with a measurement start point on the surface of the sample (W1, W2), and the amount of displacement of the probe (16, 26), detected as it is moved in a sliding fashion along the surface, is compared with the initial amount of displacement to determine whether the probe (16, 26) has reached a measurement end point.

Abstract: A contour measuring probe includes an air guide, a sliding member and a probe tip. The air guide defines a guide hole. The sliding member is slidably received in the guide hole. The probe tip is fixed on an end of the sliding member. A cross-section of the sliding member is non-circular, and the guide hole is a non-circular hole, such that the sliding member slides only along an axis of the air guide.

Abstract: An alignment mechanism includes: an adjusting plate having first and second adjustment ends parallel to an X axis direction; a probe fixing portion provided to the adjusting plate; a probe fixed to the probe fixing portion; a reinforcing plate having first and second base ends parallel to the X axis direction, displacement of the reinforcing portion in a Y axis direction being restricted; Y-direction adjusting screws for pressing the adjusting plate in the Y axis direction; and adjustment connectors for respectively connecting the first adjustment end with the first base end and the second adjustment end with the second base end. A stylus of the probe is disposed on a line of intersection of a first inclined surface including the first adjustment end and the first base end and a second inclined surface including the second adjustment end and the second base end.

Abstract: The invention relates to a feeler (1) having a shaft (2) and a coupling body (3) fixing the latter for coupling to a coordinate measuring device. It is provided here that the shaft is fixed in the receiving body by means of injection molding.

Abstract: A contact sensing probe having a stylus which is vibrated longitudinally by a piezoelectric transducer. Contact with a workpiece is detected from damping of the vibration. The stylus is mounted to a probe body via parallel diaphragm springs. These cooperate with a counter mass to form a mechanical low pass filter, which isolates the stylus vibrations from influences caused by the mounting or handling of the probe body.

Abstract: A surface sensing device for use in position determining apparatus has an elongate stylus (74) with a tip (82) for scanning the surface of a workpiece to be measured. Lateral displacements of the stylus tip are detected by a light beam which passes along the stylus from a light source (66) to a retroreflector (78). This reflects the beam back via a beamsplitter (70) to a position sensitive detector (76). The stylus is mounted for longitudinal displacement on a carriage (72). The longitudinal displacement is measured by another light beam projected by the beamsplitter (70) onto a second position sensitive detector (84).

Abstract: An alignment mechanism includes: an adjusting plate having first and second adjustment ends parallel to an X axis direction; a probe fixing portion provided to the adjusting plate; a probe fixed to the probe fixing portion; a reinforcing plate having first and second base ends parallel to the X axis direction, displacement of the reinforcing portion in a Y axis direction being restricted; Y-direction adjusting screws for pressing the adjusting plate in the Y axis direction; and adjustment connectors for respectively connecting the first adjustment end with the first base end and the second adjustment end with the second base end. A stylus of the probe is disposed on a line of intersection of a first inclined surface including the first adjustment end and the first base end and a second inclined surface including the second adjustment end and the second base end.

Abstract: There is provided a contact type measuring instrument in which the contact force of a probe is adjusted by a force created by compressed air and an attraction force between a permanent magnet and a magnetic body. This measuring instrument gives a pulling-in force or a pushing-out force to the probe by controlling a fluid pressure in a probe body. Also, between the permanent magnet attached to the tip end of a movable part of a micrometer attached to the probe body and a plate-shaped member attached to the end part on the side opposite to a contact of the probe, an attraction force according to a distance between the permanent magnet and the plate-shaped member is created.

Abstract: A probe head having a probe head base and a stylus is provided for contacting a surface point on a workpiece. The stylus is moveable relative to the probe head base and has a defined rest position relative to the probe head base. For the contacting, the probe head is moved relative to the workpiece until the stylus touches the surface point with a defined contacting force. A correction data record representing a hysteresis behavior of the stylus with respect to the rest position is provided, and the contacting force is determined using the correction data record.

Abstract: An approach controller (234) of a coordinate measuring instrument enables a position control loop (RP) and drives an actuator (133) so that a force sensor (1) is brought to a close position under a position control. When recognizing that the force sensor (1) reaches the close position, a contact controller (235) controls a switch (227) to enable a force control loop (RF) and drives the actuator (133) to bring the force sensor (1) into contact with a workpiece under a force control.

Abstract: A contour measuring probe includes an air guide, a sliding member and a probe tip. The air guide defines a guide hole. The sliding member is slidably received in the guide hole. The probe tip is fixed on an end of the sliding member. A cross-section of the sliding member is non-circular, and the guide hole is a non-circular hole, such that the sliding member slides only along an axis of the air guide.

Abstract: To provide a sensor having a long operational life. A sensor which senses contact with an object through tilting of a probe having a rod shape, the sensor including: a housing having a hollow columnar shape; the probe arranged to project from an inside of the housing to an outside of the housing, and capable of reciprocating and tilting with respect to the housing; connectors fixed to a part of the probe, which is located inside the housing; terminals fixed to positions inside the housing that come into contact with the connectors, and which conduct electricity through the contact with the connectors; a probe biasing unit configured to force the probe along a direction of the reciprocation so that the connectors come into contact with the terminals; and a releasing unit configured to release the contact between the connectors and the terminals brought upon by the probe biasing unit.

Abstract: A surface texture measuring instrument includes: a movement-estimating unit for estimating a movement condition of a drive mechanism based on a scanning vector command issued by a scanning vector commander to calculate an estimated operation state quantity; and a correction-calculating unit for correcting a detection value of a drive sensor in accordance with the estimated operation state quantity calculated by the movement-estimating unit. The movement-estimating unit includes: a nominal-model setting unit in which a nominal model representing signal transfer function of the scanning vector command from the issuance of the scanning vector command to a reflection on a movement position of the scanning probe is stored.

Abstract: In a machine tool having an on-board measuring machine and controlled by a numerical controller, a method of measuring a shape of a workpiece presets a reference point for temperature drift correction on the workpiece, moves a probe to the reference point, resets a coordinate system of the probe to correct a temperature drift of the probe, and carries out shape measurement of the workpiece along a first measuring path. Next, the method moves the probe to the reference point again, resets the coordinate system of the probe to correct a temperature drift of the probe again, and carries out shape measurement of the workpiece along a second measuring path. Thereafter, similar temperature drift correction is carried out for each measuring path until the shape measurement of the workpiece is carried out along the last measuring path.

Abstract: There is disclosed a micro surface shape measurement probe including a probe shaft 4 having at a distant end thereof a probe member 2 for contacting an object 1 to be measured, a probe body 21 provided with support means for movably supporting the probe shaft 4 in a non-contact manner, a pressing device for pressing and moving the probe shaft 4 toward the object 1 to be measured, a piezoelectric sensor 8a incorporated in the probe body 21 so that a reactive force acts to a pressing force applied to the probe shaft by the pressing device, a load detecting device 8b to measure a load acting on the piezoelectric sensor, a control device 9 for adjusting the pressing force applied by the pressing device based on the load detected by the load detecting device, and a displacement amount measuring device for measuring a position of the probe member 2 in contact with the object 1 to be measured by the pressing force adjusted by the control device 9.

Abstract: An exemplary base includes a first elastic element, a second elastic, two first adjustable spacers and two second adjustable spacers. The first elastic element includes two first spaced plates and a first connecting element for connecting the two first spaced plates. The second elastic element includes two second spaced plates and a second connecting element for connecting the two second spaced plates. The first connecting element and the second connecting element are not in a plane. Two first adjustable spacers connect the two first spaced plates and adjust a distance between the two first spaced plates. Two second adjustable spacers connect the two second spaced plates and adjust a distance between the two second spaced plates.

Abstract: A diamond element (10) having a convex surface is disclosed, the convex surface including a spherical segment for which the maximum peak to valley deviation from a perfect spherical surface is less than about 5 ?m. The diamond element (10) may be a solid polycrystalline diamond material and/or may comprise base material which is coated with diamond. Alternatively or in addition, the RMS deviation from a perfect spherical surface may be less than about 500 nm, or the RMS roughness less than about 30 nm. A diamond element (10) with a radius of curvature less than about 20 mm is also disclosed. In one aspect a diamond element (10) having a conical half-angle greater than about 10° is described. Diamond elements (10) of this type are intended for use as metrology tips.

Abstract: A measurement probe, such as a touch trigger probe, is described that comprises a stylus module attachable to a base module. The stylus module comprising a housing and a stylus holder moveably attached to the housing. The base module comprises a measurement portion for generating measurement data indicative of movement of the stylus holder relative to the housing. The stylus module has an inbuilt failure mode and thereby a substantially predetermined operational lifetime. In one embodiment, the inbuilt failure mode is provided by integrating a battery into the stylus module. Providing a mechanical failure mode in which a component of the stylus module catastrophically fails after a certain amount of usage is also described.

Abstract: An exemplary contour measuring probe (10) includes a tube guide (12), a tip extension (20), a pair of hollow tubes (16), a plurality of pipes (104, 106), a linear measuring scale (18), and a displacement sensor (19). The tip extension (20) is configured to touch a surface of an object (50). The hollow tubes (16) are configured to be driven by a flux of air to push the tip extension (20) to move. The pipes (104, 106) are obliquely disposed in a tube guide (12) relative to the hollow tubes (16). The pipes (104, 106) allow the flux of air to be pumped on a sidewall of the hollow tubes (16). A part of the flux of air is ejected out of the tube guide (12). The linear measuring scale (18) and the displacement sensor (19) are respectively fixed relative to one of the tube guide (12) and the tip extension (20). The linear measuring scale (18) displays values of displacements of the tip extension (20). The displacement sensor (19) detects and reads the displacement values displayed by the linear measuring scale (18).

Abstract: A method for scanning a work piece surface uses a coordinate measurement device. A probe element is brought into contact with the surface and the probe element is moved along the surface. The coordinate measurement device has a plurality of degrees of freedom, which are independent of one another, in the possible movements of the probe element with respect to the work piece. Maximum speeds which describe the maximum of a movement speed component of the probe element based on the respective degree of freedom are defined for the degrees of freedom. An estimated path on which the probe element is intended to move during scanning is predefined. The actual scanning path can differ from the estimated scanning path. A maximum scanning speed at which the estimated scanning path can be traveled with a constant speed of the probe element is determined.

Abstract: An articulated arm portable coordinate measurement machine (PCMM) can be calibrated or recalibrated using a coordinate measurement machine (CMM). In one method for PCMM calibration, the CMM can be moved to one position, and the PCMM moved to a contact position where a probe head of the PCMM contacts a probe head of the PCMM. The PCMM and the CMM can be operatively coupled, for example, by a synchronizing cable such that position data from the PCMM and the CMM can be obtained at the contact position. The PCMM can be repositioned one or more times to obtain position data at multiple PCMM positions. The CMM can be repositioned as desired and additional contact position data sets obtained by subsequent positioning and repositioning of the PCMM. Various probe head types such as touch trigger probes, hard probes, and contact probes can be used in the calibration systems and methods.

Abstract: In a surface shape measurement device that measures the surface shape of a sample (W1, W2) by moving a probe (16, 26) in a sliding fashion along the surface of the sample (W1, W2) and thereby detecting the amount of displacement of the probe (16, 26) caused by irregularities on the surface, an initial amount of displacement is detected which is the amount of displacement of the probe (16, 26) when the probe is first placed in contact with a measurement start point on the surface of the sample (W1, W2), and the amount of displacement of the probe (16, 26), detected as it is moved in a sliding fashion along the surface, is compared with the initial amount of displacement to determine whether the probe (16, 26) has reached a measurement end point.

Abstract: An attitude arm mounted to a support arm is rotatable about a pivot. The attitude arm holds a stylus gauge, which generates a signal representing deflection of the stylus in a measurement direction as the stylus follows a surface of a workpiece rotated on a turntable. An attitude switching mechanism allows switching between a first stylus attitude generally aligned with the turntable spindle axis and a second stylus attitude generally aligned perpendicular to the turntable spindle axis. To enable alignment of the measurement direction with the spindle axis, first and second adjusters enable the stylus tip to be moved perpendicular to the spindle axis and the measurement direction when in the first and second stylus attitudes, respectively. An orientation mechanism is provided to rotate the measurement direction of the stylus. A stylus tilt mechanism is provided to tilt the stylus about a tilt axis parallel with the measurement direction.

Abstract: There is provided a copying apparatus that copies a workpiece, includes a shoe that is brought into contact with the workpiece, an air cylinder that enables moving the shoe in a vertical direction, a clamping mechanism that grasps the workpiece from side surfaces placed in a direction orthogonal to a traveling direction and, and a lateral translatory slide guide that slides the clamping mechanism in the direction.

Abstract: There is provided a copying apparatus that copies a workpiece, including a shoe that comes into contact with a portion of the workpiece to be copied, and a first swiveling unit that swivels with the shoe in an arc pattern around a point, as a swiveling center, on a plane where the shoe comes into contact with the portion of the workpiece to be copied.

Abstract: An apparatus for measuring a surface of a workpiece is described. The apparatus comprises a support, attachable to the moveable arm of a machine, such as a coordinate positioning machine, and rotatable about first and second axes of rotation, the axes driven by first and second motors respectively. The apparatus additionally comprises a surface sensing device for sensing the surface of a workpiece, rotatable about a third axis of rotation. This third axis of rotation is alignable with the first axis of rotation, and when aligned, rotation of the support relative to the surface sensing device is actuatable by the first motor. A method for using an apparatus for measuring a surface of a workpiece is also described.

Abstract: A tool shank (18;38;138) is described that comprises a spindle attachment portion (20) that is removably attachable to the rotatable spindle (12) of a machine tool (10), a shank body portion (21;121) which extends beyond the end of the spindle when the tool shank (18;38;138) is attached to the spindle (12) of a machine tool (10) and the first part (26;38;148) of a separable electrical coupling (22;132). The shank body portion comprises a feature (28;128) suitable for engagement with a tool change device (29) and the first part (26;38;148) of the separable electrical coupling (22;132) is located on the shank body portion (21;121) between the feature (28;128) and the spindle attachment portion (20). A machine tool (10), and a kit for retrofitting a machine tool (10), that comprise the second part (24;148) of the separable electrical coupling (22;132) are also described.

Abstract: A sensor module for a probe of a tactile coordinate measuring machine has a stationary module base which defines a first measurement plane. The sensor module has a support, which is moveable relative to the module base, for holding a stylus. At least one deformable connecting element movably interconnects the support and the module base. The connecting element has at least a first and a second deformable material layer which, perpendicular to the first measurement plane, are arranged offset with respect to each other. In a preferred embodiment, the sensor module is made from two single-layer module parts arranged above and attached to one another.

Abstract: An exemplary contour measuring probe (10) includes a tip extension (16) and two driving members (13). The tip extension is configured for touching a surface of an object. The driving members are configured for driving the tip extension linearly moving along a first direction. The driving members are tapered and a diameter of each driving member increases along the first direction. The driving members are driven to move by gas pressure acting on an outer side surface thereof.

Abstract: Apparatus for a CMM Arm with Exoskeleton is provided comprising an Internal CMM Arm with a base end and a probe end, and an Exoskeleton driving the Internal CMM Arm through a plurality of transmission. One or more contact probes, optical probes and tools are mounted on the probe end. The CMM Arm with Exoskeleton is provided in manually operable and automated embodiments. The CMM Arm with Exoskeleton is operable for accurate measurement or for performing accurate operations. Methods are provided for operation of the CMM Arm with Exoskeleton.

Abstract: A contour follower includes a plurality of sensors spaced around a waterjet nozzle, each of the sensors being configured to measure a distance between a working surface and a first plane, perpendicular to a longitudinal axis of the nozzle. The sensors may include hall-effect sensors lying in the first plane and magnets lying in a second plane, parallel to the working surface. A detecting circuit processes signals from the sensors to determine an angle of the working surface, relative to the first plane, and a distance between an aperture of the nozzle and the working surface. A collision detection sensor provides a signal in the event the device approaches to within a selected distance of an obstruction in the plane of the working surface. A shield plate blocks and dampens secondary spray-back of cutting fluid occurring at low angles above the working surface.

Abstract: A stylus for key duplicating machine with replaceable segmented stylus comprising a cylindrical body; a spring-loaded tracer having a slide spindle movably engaged in one end of the cylindrical body, and a replaceable segmented stylus releasably secured on the front end of the slide spindle for replacement of the worn replaceable segmented stylus damaged during key duplicating by new one easily; and a regulating grip angularly movably engaged in the other end of the cylindrical body.

Abstract: A measurement probe 1 for measuring a surface of sample S comprises a base section 10, a head section 30 having a probe tip 31, and a support structure section 15 which supports the head section 30 with the base section 10 along a support axis substantially orthogonal to the vertical axis in the direction of protrusion of the probe tip 31. The support structure section 15 includes two spring structure sections of a first spring structure section 20 deformable in the direction of the vertical axis; and a second spring structure section 25 deformable in the direction of the lateral axis, and a reflection surface 32 which is formed with a reflection pattern varying the reflectance within the surface is provided at the side opposite to the probe tip 31 of the head section 30.

Abstract: An exchanging device is for exchangeably holding a sensor, probe element or tool on a machine or on a machine part or a rotation-pivot unit on a machine or a machine part, preferably, a coordinate measuring apparatus. The exchanging device includes a take-up holder having a first bearing part and a counter piece (22) having a second bearing part corresponding to the first bearing part. A releasable clamping unit (42), for example, a magnetic clamping unit, is provided with which a clamping force is generated between the first and second bearing parts when the counter piece is accommodated on the take-up holder. A locking device having a first locking element (29) is provided on the take-up holder and a counter piece corresponding to the locking element (29) of the take-up holder is provided on the counter piece (22), for example, in the form of a slider (30). With the locking device, the counter piece can be mechanically coupled to the take-up holder in the state when it is taken up by the take-up holder.

Abstract: A form measuring instrument measures a form of a surface of an object to be measured using a contact to follow the surface. A pseudo-measurement point acquirer acquires positional coordinates of the reference point of the contact as pseudo-measurement points when the contact touches the object at a plurality of locations. A normal vector generator estimates a surface or line along the pseudo-measurement points from the pseudo-measurement points to calculate normal vectors extending from the pseudo-measurement points to the surface or line. A contact model locator locates contact models which specify the surface form of the contact so as to coincide the pseudo-measurement points with reference points of the contact models and so as to coincide attitudes of the contact on measurement with attitudes of the contact models. A measurement point calculator calculates cross points as measurement points, at which the normal vectors cross the surfaces of the located contact models.

Abstract: A three-dimensional measurement probe that is less likely to break, that is of long lifespan, and that is of low cost, capable of measuring the shape and the like of a measuring object such as an aspheric lens with higher precision is realized. A magnetic force for preventing rotation and axial displacement of a small slidably moving shaft part is generated by constructing a magnetic circuit by a magnet attached to a small air bearing part, a yoke, and a magnetic pin attached to the small slidably moving shaft part. The three-dimensional measurement probe is able to perform measurement from below and from the side since the magnetic force is non-contacting.

Abstract: A measuring method and system involving a measuring coordinate probe, which can be moved precisely, by appropriate actuators, with respect to a positioning platform (60) on which the probe is mounted; and whose position relative capable to said positioning platform (60) can be measured, by suitable encoders (780). The invention can be carried out with probes, actuators and encoders of different nature. The actuators (730) preferably allow the motion of the probe according to two or more independent degrees of freedom, so that the probe itself can be moved in a plane, or in a three-dimensional region of space, and its orientation can be chosen, within some suitable limits. The method and system of the invention provide very exact local measurement, even if the platform (60) does not deliver the very best precision.

Abstract: A measurement probe for use in coordinate measuring machines, which probe comprises a base (1) connected to a coordinate measuring machine, a measurement tip (4) and a ball (5) arranged at the first end of the measurement tip (4). The measurement tip (4) is supported at its second end with the aid of at least three rigid supports (2) supported by the base (1), whereby the supports (2) are connected to the measurement tip by means of spherical connections and where the supports (2) can be displaced along their longitudinal directions relative to the base (1). The supports (2) are arranged such that they pass through the base (1), and can be displaced along their longitudinal directions by protruding to a greater or lesser degree on the side of the base (1) that is opposite relative to the measurement tip holder (3).

Abstract: An exemplary base includes a first elastic element, a second elastic, two first adjustable spacers and two second adjustable spacers. The first elastic element includes two first spaced plates and a first connecting element for connecting the two first spaced plates. The second elastic element includes two second spaced plates and a second connecting element for connecting the two second spaced plates. The first connecting element and the second connecting element are not in a plane. Two first adjustable spacers connect the two first spaced plates and adjust a distance between the two first spaced plates. Two second adjustable spacers connect the two second spaced plates and adjust a distance between the two second spaced plates.

Abstract: Apparatus for a co-ordinate positioning machine is described that comprises an articulating probe head for supporting a measurement probe. The articulating probe head comprises at least one electric motor. Heating means are provided for generating heat in the articulating probe head. The heating means may be the motors or discrete heating elements. Temperature sensing means, such as one or more temperature sensors, is also provided for determining the temperature at the articulating probe head. The apparatus allows the temperature of the articulating probe head to be controlled.

Abstract: A method of measurement using a measurement probe system includes the steps of (i) providing a measurement probe system having a measurement probe to a user, the measurement probe system being suitable for use with co-ordinate positioning apparatus and (ii) monitoring usage of the measurement probe system.

Abstract: A measurement probe, such as a touch trigger probe, is described that comprises a stylus module attachable to a base module. The stylus module comprising a housing and a stylus holder moveably attached to the housing. The base module comprises a measurement portion for generating measurement data indicative of movement of the stylus holder relative to the housing. The stylus module has an inbuilt failure mode and thereby a substantially predetermined operational lifetime. In one embodiment, the inbuilt failure mode is provided by integrating a battery into the stylus module. Providing a mechanical failure mode in which a component of the stylus module catastrophically fails after a certain amount of usage is also described.

Abstract: A device measures a measurement object surface shape, and includes a base to which the measurement object is secured; a slide movable in at least three different directions and secured to the base; a probe holding unit mounted to the slide; and a contact probe resiliently supported by the holding unit so as to be movable with respect to the holding unit. Additional features include a unit measuring the position and posture of the probe with respect to the holding unit; a unit calculating a contact-force vector, which the probe receives from the measurement object, from a measurement result of the measuring unit; and a controlling unit moving the probe along the surface of the measurement object. The controlling unit also controls a position of the holding unit so that a magnitude of the contact-force vector comes closer to a control target value thereof in accordance with the magnitude of the contact-force vector.

Abstract: A probe head includes a stationary component and pressure-sensitive sensors, the sensors being stationary relative to the fixed component, and a deflectable probe element. The probe element has a longitudinal axis, a first contact point and a second contact point. Because of contact of the probe element, pressure forces are able to be introduced into the sensors via the first contact point. In response to a further deflection of the probe element, the latter is able to be transferred to a stop position, in which the second contact point of the probe element touches the stationary component in a supporting manner. The probe element is arranged such that the pressure forces that are able to be introduced into the sensors in the stop position are limited, a first distance between the first contact point and the longitudinal axis being shorter than a second distance between the second contact point and the longitudinal axis.

Abstract: An avalanche probe for locating and rescuing people buried by an avalanche is collapsible, having several probe segments which allow the probe to be folded to a compact unit that can be quickly and easily assembled for use. A connecting cord passes through the probe segments and fastens to a probe tip. Applying tension to the cord draws the segments into alignment. A clamping mechanism maintains the tension on the cord in such a manner that the probe segments are fixedly and securely held against one another. The clamping mechanism provides two interpenetrating elements, an outer element and an inner element having a passage therethrough. At least one clamping element passes into the central passage and is forcibly engaged with the cord as the interpenetration of the elements increases.

Abstract: A brightness measurement apparatus which includes a placement unit on which an object to be measured is placed, a measurement unit for measuring brightness or chromaticity from an upper surface of the object placed on the placement unit, a placement unit moving mechanism for moving the placement unit in an x-axis direction, and a measurement unit moving mechanism for moving the measurement unit in a y-axis direction orthogonal to the x-axis direction.

Abstract: Orientable probe (10) comprising a probe feeler (6) capable of being oriented along a plurality of indexed directions around a rotation center (O), thanks to two mobile elements (4, 5) that can turn: the first around a first axis (B) and relatively to a fixed support (3); the second around a second axis (A) and relatively to the first mobile element. The feeler (6) is fixed in a shifted position relatively to the rotation center (O).

Abstract: In a measuring tool, following operations are carried out. In a preset operation, a displacement is detected in response to an instruction from an operating section, and the detected displacement is stored in a storage as a measurement reference value (Xc). In a measurement value computing operation, a measurement value is calculated based on a difference between the present displacement and the measurement reference value (Xc). A judgment operation belongs to the preset operation. In the judgment operation, a movable member is judged to be stationary relative to a stationary member when a variation of the displacement detected by the detector at an interval of a predetermined time (T1) has continuously been within a permissible range for a predetermined time. When the movable member is judged to be stationary with respect to the stationary member in the judgment operation, the displacement is stored in the storage as a measurement reference value (Xc).

Abstract: An exemplary distance measuring probe (100) includes a tube track (12), a tip extension (16), a pair of hollow tubes (14), a pair of air discharge systems (115), a linear measuring scale (18), and a displacement sensor (19). The tip extension is configured to touch a surface of an object (50). The linear measuring scale and the displacement sensor are respectively fixed relative to one of the tube track and the tip extension. The hollow tubes contain a flux of air, and are configured to cooperatively push the tip extension to move. Each air discharge system ejects part of air in the corresponding hollow tube out of the hollow tube. The linear measuring scale displays values of displacements of the tip extension. The displacement sensor detects and reads the displacement values displayed by the linear measuring scale.

Abstract: A strain detector for in-situ lift-out, comprises a nano-manipulator probe shaft; a strain gauge mounted on the probe shaft; and a first cut-out on the probe shaft. The first cut-out has a rectangular cross-section. There is a second cut-out on the probe shaft; the second cut-out having a semicircular cross-section. The second cut-out is positioned on the shaft opposite from the first cut-out; the first and second cut-out, thus defining a thinned region in the probe. The strain gauge is mounted on the probe shaft at the location of the thinned region. There is detecting circuitry for detecting, amplifying and conditioning the output of the strain gauge; and, wires electrically connecting the strain gauge to the detection circuitry. The wires are preferably located in a trench in the probe shaft. Other embodiments are disclosed having multiple strain gauges and detectors.