Ultraviolet Energy Patents (Class 34/275)
  • Patent number: 6630031
    Abstract: By a simple apparatus construction and process, it is made possible to “clean precisely” a surface at the molecular/atomic level, and the purification degree of the surface processed minutely is made into 1012 molecules/cm2 or less. A steam-spraying nozzle is disposed such that a line slit nozzle is in a diameter direction, and mist-containing steam is sprayed onto the surface of a substrate. Thereby, particles in the steam-spraying surface (the particles were made to adhere by dipping the substrate in a solution containing polystyrene (particle diameter of 0.6 &mgr;m) or alumina (particle diameter of 0.3 &mgr;m to 0.5 &mgr;m) particles at 105 particles/ml.) are removed by about 90% to 95% after ten-seconds spraying, and by 99% or more, that is, to less than the detection limit of a wafer inspection device, after twenty-seconds spraying.
    Type: Grant
    Filed: October 12, 1999
    Date of Patent: October 7, 2003
    Assignee: Sipec Corporation
    Inventors: Nobuhiro Miki, Takahisa Nitta
  • Patent number: 6630105
    Abstract: An apparatus and method for decontaminating chemical and biological agents using the reactive properties of both the single atomic oxygen and the hydroxyl radical for the decontamination of chemical and biological agents. The apparatus is self contained and portable and allows for the application of gas reactants directly at the required decontamination point. The system provides for the use of ultraviolet light of a specific spectral range to photolytically break down ozone into molecular oxygen and hydroxyl radicals where some of the molecular oxygen is in the first excited state. The excited molecular oxygen will combine with water vapor to produce two hydroxyl radicals.
    Type: Grant
    Filed: September 27, 2000
    Date of Patent: October 7, 2003
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventors: Hugh J. O'Neill, Kenneth L. Brubaker
  • Publication number: 20030159308
    Abstract: Machines and methods for curing ultraviolet (UV) curable floor coatings are provided. In one embodiment, the machine includes a UV radiation source having one or more lamps where each lamp is operable to simultaneously emit UV radiation at two or more wavelengths and at relatively low power consumption, e.g., no more than about 75 watts per inch of cured coating width. The floor coating includes components that are reactive to these two or more wavelengths such that substantial or complete curing of the floor coating may occur upon simultaneous exposure to the two or more wavelengths. Preferably, the UV radiation emitted by each of the one or more lamps is greater at the two or more wavelengths than at wavelengths other than the two or more wavelengths.
    Type: Application
    Filed: February 28, 2002
    Publication date: August 28, 2003
    Applicant: TENNANT COMPANY
    Inventors: Bruce F. Field, Earl O.F. Krueger
  • Publication number: 20030159309
    Abstract: The invention relates to a process for treating a hydrocarbonaceous waste material, in particular a rolling scale slurry and/or grinding slurry, the waste material being heated in a dryer, preferably moving, by the indirect supply of heat, and in the process hydrocarbons, if appropriate together with other volatile components, in particular H2O, being removed. In this process, in the dryer, at low temperature, the hydrocarbons are broken down in a specific way, the hydrocarbons being broken down by chemical and/or radiation means, which effect decomposition of the hydrocarbons of low volatility into highly volatile hydrocarbons, preferably decomposing high molecular weight hydrocarbons into lower molecular weight hydrocarbons, and the hydrocarbons, if appropriate together with the other volatile components in particular together with the H2O, are at least partially discharged, in particular by suction, from the vessel. The invention also relates to a apparatus for treating a hydrocarbonaceous waste material.
    Type: Application
    Filed: April 25, 2003
    Publication date: August 28, 2003
    Inventors: Werner Bsirske, Andreas Zobernig, Alexander Fleischanderl, Christopf Lanzerstorfer
  • Patent number: 6588122
    Abstract: A method and apparatus for the treatment of surfaces of substrates of organic or inorganic materials, reactive fragments such as radicals or ions are produced by ultraviolet radiation from at least one ultraviolet radiator disposed at a given distance. The apparatus has a gas-filled, elongated discharge chamber whose walls are formed by a dielectric, and the ultraviolet radiator is provided on the side facing away from the discharge chamber with at least one electrode. During irradiation, a translational and/or rotatory relative movement is performed between the substrate and the ultraviolet radiator at a comparatively slight distance between radiator and substrate surface, in order to achieve, in a simple manner, an intense and uniform illumination of the surface being irradiated. The treatment is directed especially to silicon substrates or glass substrates.
    Type: Grant
    Filed: April 26, 2002
    Date of Patent: July 8, 2003
    Assignee: Heraeus Noblelight GmbH
    Inventors: Angelika Roth-Fölsch, Erich Arnold
  • Publication number: 20030110658
    Abstract: An apparatus for spin drying a semiconductor wafer includes a hollow core spindle and a chuck assembly having grippers for supporting a wafer at an edge thereof. A sleeve is disposed in the central opening of the spindle and a manifold is disposed in the upper end of the sleeve. A capacitance sensor is affixed to the manifold. In another apparatus, an arm having a capacitance sensor mounted thereon is positioned such that the capacitance sensor is disposed above a space to be occupied by a wafer that is supported by the grippers. Yet another apparatus includes an arm having a light source and a detector mounted thereon. The light source directs light toward a surface of a wafer such that light that reflects off of the surface is substantially perpendicular to that surface. The detector is positioned to measure the intensity of the reflected light.
    Type: Application
    Filed: January 28, 2003
    Publication date: June 19, 2003
    Applicant: Lam Research Corporation
    Inventor: Randolph E. Treur
  • Patent number: 6514675
    Abstract: An optical disk is provided by bonding two substrates to each using a radiation-hardening resin, and leveling and hardening the resin. In an optical recording medium manufacturing apparatus including lamps for emitting radiation to two disks attached to each other with a radiation-hardening resin layer sandwiched therebetween, and a rotation arm for supporting and rotating the two disks to allow the disks to traverse the emission area of the lamps, light source centers of the lamps are positioned radially outside a rotation locus of the center of the disks attached to each other, said locus being drawn while the disks are supported by the rotation arm.
    Type: Grant
    Filed: September 27, 2000
    Date of Patent: February 4, 2003
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Toshiyuki Fujioka, Hideo Matsumoto, Norihide Higaki, Koji Muraoka, Hiroyuki Fukuno
  • Publication number: 20020174561
    Abstract: A UV curing module for use with a label printer. UV curing lamps/radiation emitters are located to cover the label media path. The UV curing module may be integrated into the label printer or similar devices including a label applicator or a label rewinder.
    Type: Application
    Filed: April 11, 2002
    Publication date: November 28, 2002
    Inventors: Kevin Girard Conwell, Matt Adams
  • Publication number: 20020112739
    Abstract: For the treatment of surfaces of substrates of organic or inorganic materials, reactive fragments—especially radicals or ions—are produced by ultraviolet radiation; the ultraviolet radiation is performed by at least one ultraviolet radiator disposed at a given distance, with a gas-filled, elongated discharge chamber whose walls are formed by a dielectric, which is provided on the side facing away from the discharge chamber with at least one electrode; during the irradiation a translational and/or rotatory relative movement is performed between the substrate and the ultraviolet radiator at a comparatively slight distance between radiator and substrate surface, in order to achieve, in a simple manner, an intense and uniform illumination of the surface being irradiated.
    Type: Application
    Filed: April 26, 2002
    Publication date: August 22, 2002
    Inventors: Angelika Roth-Folsch, Erich Arnold
  • Patent number: 6408535
    Abstract: A machine for processing semiconductor wafers and similar articles has an ozone remover connected to a processing chamber. The ozone remover has a light chamber surrounded by reflectors. Ozone and other processing gases and vapors flow out of the processing chamber and into the light chamber. Ultraviolet lights in the ozone remover flood the light chamber with ultraviolet light, converting ozone into oxygen. The amount of ozone released into the environment is reduced. A recirculation line receives the gases and vapors flowing out of the ozone remover. Oxygen and any remaining ozone are separated from other gas and vapor components and are recycled back to an ozone generator, to increase the ozone generator efficiency in supplying the machine with ozone.
    Type: Grant
    Filed: August 26, 1999
    Date of Patent: June 25, 2002
    Assignee: Semitool, Inc.
    Inventor: Ralph Wayne Thomas
  • Patent number: 6397491
    Abstract: Apparatus for curing ink, paint and coatings on containers and articles which includes a rotatably mounted assembly that includes a plurality of workstations disposed about the periphery thereof, an emitter disposed next to the periphery of the rotatably mounted assembly, and apparatus sequentially positioning respective workstations in front of the emitter. In some forms of the invention the emitter is an ultraviolet radiation emitter and the apparatus for sequentially positioning includes apparatus for causing the workstations to dwell next to the emitter. Some forms of the invention include apparatus for selectively rotating at least some of the workstations when that workstation is in front of the emitter. Some forms of the invention include an apparatus for holding an associated work piece on at least some of the workstations.
    Type: Grant
    Filed: October 19, 2000
    Date of Patent: June 4, 2002
    Inventor: Joseph J. Gilberti
  • Patent number: 6371631
    Abstract: The radiation source is provided with the lamps 3 for irradiating the inner walls 2 of the long hollow cavities 1 with continuous movement of the radiation along the axis 4 of the cavity 1, in particular for curing radiation-curable synthetic-resin laminates in conjunction with the restoration of pipes and sewer ducts by means of UV-radiation, comprising a chassis having a plurality of lamps 3 arranged on its circumference, whereby the chassis has a central support extending in the direction of the axis, the support being supported by means of the guide wheels 5, 6 on the inner wall 2 of the cavity 1 on the shock-absorbing struts 7. The chassis has an axial, centrally arranged threaded spindle 8, and the guide wheel 5, 6 are mounted with a lamp 33 and the temperature sensors 9 on a chassis frame, whereby the one end of the shock-absorbing strut 7 is pivot-mounted on the guide wheel 5, 6, and the other end on a receiving block 11 running on the threaded spindle 8.
    Type: Grant
    Filed: January 12, 2001
    Date of Patent: April 16, 2002
    Assignee: UV Reline.Tec GmbH & Co.
    Inventor: Thomas Reutemann
  • Publication number: 20020034594
    Abstract: Apparatus and method for curing coating on articles using multi wavelength IR and UV energy sources, which can be pulsed in a system for analyzing and producing in-line programmed production of the finished product.
    Type: Application
    Filed: May 9, 2001
    Publication date: March 21, 2002
    Inventor: James Thomas Shiveley
  • Patent number: 6272768
    Abstract: An apparatus for processing an object with ultra-violet light is provided. The apparatus generally comprises a container, a transducer, coupled to the container; and a source of ultraviolet light configured to deliver ultraviolet light to an object disposed within said container. The UV source is configured to deliver the ultraviolet light through the vapor to process the object. The vapor and UV light react with a surface of the object to process the object. The apparatus is particularly suited to wet processing substrates in a single substrate processing system having multiple wet processing chambers configured within a process bench. The apparatus can include a robot arm having a pick-up, such as a vacuum wand, that adheres to a back side of the substrate.
    Type: Grant
    Filed: November 12, 1999
    Date of Patent: August 14, 2001
    Inventor: Michael J. Danese
  • Patent number: 6243968
    Abstract: A turning device (8) for sludge and deposits (3) is proposed which moves along differing paths spread out on a floor (6), through the sludge or deposit (3). The turning device (8) can be used in a solar drier for sewage sludge or other deposits.
    Type: Grant
    Filed: November 17, 1999
    Date of Patent: June 12, 2001
    Inventors: Tilo Conrad, Markus Bux
  • Patent number: 6233841
    Abstract: A dehydration plant for dehydrating food products, including a microwave kiln (2), conveyor means (3) for conveying food products through the kiln (2), circulation means (21, 6) for circulating air through the kiln (2), refrigerated dehumidification means (7, 11) for dehumidifying the air to be circulated through the kiln (2), and heating means (12, 13, 14) for heating the air to be circulated through the kiln (2) such that food products conveyed through the kiln (2) are exposed to both microwave emissions and the flow of dehumidified heated air to thereby dehydrate the food products.
    Type: Grant
    Filed: November 29, 1999
    Date of Patent: May 22, 2001
    Assignee: Australian Rural Dehydration Enterprise Pty. Ltd.
    Inventor: Stephen Napier Beach
  • Patent number: 6185840
    Abstract: A layer which can be hardened by radiation is located on a substrate surface of paper, glass, plastics, wood or metal. The layer on the substrate, which is guided through a hardening stage, is subjected to radiation with ultraviolet light whilst the lamp chamber is flushed directly with a gas. The layer can be simultaneously tempered and rendered inert or treated in a chemically active manner.
    Type: Grant
    Filed: January 26, 1998
    Date of Patent: February 13, 2001
    Assignee: Noelle GmbH
    Inventors: Lutz Noelle, Georg Bolte
  • Patent number: 6074482
    Abstract: A device for coating disc-shaped information storage media with a coating medium has a drying station having an UV lamp for drying the applied coating medium. The UV lamp is arc-shaped and has a radius that is greater than a radius of the disc-shaped information storage media.
    Type: Grant
    Filed: June 8, 1998
    Date of Patent: June 13, 2000
    Assignee: Steag Hamatech AG
    Inventors: Klaus Weber, Jurgen Kallis
  • Patent number: 6016612
    Abstract: To dry semiconductor substrates, especially silicon wafers subsequent to rinsing after etching, the substrate is exposed to the action of radiation which contains an IR portion and a UV portion, the IR portion being greater than the UV portion. The IR-UV radiation quickly dries the substrate and prevents contamination of the substrate with undesirable particles or limits it to a nondisruptive degree. To execute drying with IR-UV radiation, an arrangement is proposed in which the substrate is moved through directly from the treatment liquid (rinsing medium) between two rod-shaped radiators which emit IR-UV radiation.
    Type: Grant
    Filed: October 1, 1997
    Date of Patent: January 25, 2000
    Inventor: Hans-Jurgen Kruwinus
  • Patent number: 5732477
    Abstract: The disclosed invention is an ultraviolet curing process that causes a wrinkle pattern to appear on the surface of a curing layer. Initially, the primary stage of the process is generated by irradiating a photopolymerizable layer with far ultraviolet light wherein the dominant wavelength emitted is 254 nanometers. Then, the second stage of the process is performed by heating the photopolymerizable layer. Finally, the third stage of the process irradiates the layer with high pressure vapor ultraviolet light.
    Type: Grant
    Filed: September 12, 1996
    Date of Patent: March 31, 1998
    Inventor: Hideo Toyama
  • Patent number: 5664340
    Abstract: A U.V. Anti-Bacterial, Anti-Fungal Dryer Light is provided designed to eliminate bacteria and fungus-causing germs from the laundry. The present invention consists of ultraviolet mechanisms situated within the door of typical gas and electric dryers thereby eliminating germs from the laundered clothing. Ultraviolet lights are contained within a dryer door-mounted plate and covered with clear glass or polycarbonate plastic. When the dryer is on, the ultraviolet lights will illuminate, thus beginning the process of abolishing the germs of the laundry.
    Type: Grant
    Filed: March 18, 1996
    Date of Patent: September 9, 1997
    Inventor: Clay A. Brown
  • Patent number: 5655312
    Abstract: An apparatus including both an ultraviolet curing unit and a hot air dryer, either one of which may be operated at a given time. A wall of the dryer has an opening through which the ultraviolet radiation emitted by the curing unit passes when the curing unit is activated. A moveable slide plate covers the opening when the dryer is activated, creating the proper hot air dryer chamber volume for effective dryer operation.
    Type: Grant
    Filed: October 2, 1995
    Date of Patent: August 12, 1997
    Assignee: Fusion UV Systems, Inc.
    Inventor: Edward Scott Sevcik
  • Patent number: 5546678
    Abstract: A dryer has an internal drying chamber for accommodating articles that are subjected to heated circulating air to remove moisture from the articles. An air mixing chamber contains a first fan for moving air through a heater into the drying chamber. A second fan draws air out of the drying and mixing chambers and discharges air back into the mixing chamber through a filter into the external environment. The heated air in the drying chamber is mixed with fresh air and recirculated through the drying chamber to minimize heat losses and increase drying effectiveness. Ultraviolet lamps within the drying chamber destroy contaminants in the air and articles within the chamber. A boot dryer, located in the drying chamber, has fans that move air through tubes used to support boots, shoes, skates and socks. Ultraviolet light in the boot chamber destroys contaminants in the air in the boot chamber. One modification of the dryer has a bench to permit the dryer to be used as a dry sauna.
    Type: Grant
    Filed: December 5, 1994
    Date of Patent: August 20, 1996
    Inventor: Gregory L. Dhaemers
  • Patent number: 5524358
    Abstract: The instant invention is a ventilation filtration kit for use with residential and commercial dishwashers. The filtration kit consists of a flexible duct that is coupled to the ventilation intake of the dishwasher having a filter located on one end of the duct to provide clean air into the dishwasher. The flexible duct allows for placement of the filter in a remote position such as adjacent to the dishwasher. Placement of the filter in a cabinet allows for the induction of air free of debris which typically accumulates beneath a dishwasher. Additional provisions are made for placement of a germicidal lamp within the flexible duct made operational by a sail switch providing operation of the ozonator upon demand. An electric fan may also be placed within the duct for drawing air into a convection type dishwasher or for use in drawing air from a distant location.
    Type: Grant
    Filed: March 24, 1995
    Date of Patent: June 11, 1996
    Inventor: Warren W. Matz
  • Patent number: 5515621
    Abstract: The present invention disclosed and claimed herein comprises an apparatus and method for curing and drying coatings on nails of the human hand. A housing (12) is provided having two elongated solid sides (14), one elongated solid top (15), two solid ends (16), and an elongated underneath side (18) having a length. Restrictive air vents (22) are provided along the length of the elongated underneath side (18) of the housing (12), such that the housing (12) and air vents (22) define a substantially closed air pressure chamber (34). An ultraviolet light source (20) is disposed along the underneath side (18). A flat surface (26) running the length of the underneath side (18) is disposed a distance beneath the restrictive air vents (22) and the ultraviolet light source (20).
    Type: Grant
    Filed: June 23, 1994
    Date of Patent: May 14, 1996
    Assignee: ASR Affiliates, Inc.
    Inventor: Ira G. Bloom
  • Patent number: 5498394
    Abstract: A bioconditioning germicidal dryer for the hands and lower arms has two portals which allows the hands and forearms to be comfortably extended laterally into the chamber. The working chamber has a source of ultraviolet light with a spectral output weighted at a 253.7 nm. Air is introduced through one or more vents in a second heated chamber connected to said working chamber. Preheated air is then drawn past the ultraviolet light source, where it is germicidally cleansed, into the working chamber, and leaves the working chamber through the portals. Because of the combination of (a) ultraviolet light, (b) closed chamber environment, (c) warm air and (d) chamber geometry induced turbulent air flow patterns, the hands and arms are germicidally cleansed and gently dried without dehydration of the skin normally found in germicidal washing.
    Type: Grant
    Filed: June 15, 1994
    Date of Patent: March 12, 1996
    Assignee: Molecucare, Inc.
    Inventor: Arthur L. Matschke
  • Patent number: 5411588
    Abstract: The invention relates to a device for processing disc-shaped registration carriers, provided with a number of processing stations in which the disc-shaped registration carriers are supported, and with a transport assembly by which said disc-shaped registration carriers can be moved from one processing station to another processing station. The transport assembly is fitted with interconnected, jointly driven holders for simultaneously taking hold of and moving the registration carriers between the processing stations. The processing stations are at least partially fitted with readily exchangeable processing units.
    Type: Grant
    Filed: June 16, 1993
    Date of Patent: May 2, 1995
    Assignee: OD & ME B.V.
    Inventors: Petrus J. F. Diepens, Joost Van Erp, Michael A. T. Hompus
  • Patent number: 5392529
    Abstract: A bulk material processor includes a tray assembly with a panel subassembly having an upper panel section and a lower panel section. The upper panel section is adapted to receive bulk material and pass it to the lower panel section for discharge. A heater panel is mounted over the tray assembly for radiantly heating the bulk material passing thereunder. A vibrator is coupled to the tray assembly for vibrating the bulk material whereby it advances along the tray assembly. A control system is provided for controlling the operation of the vibrator and for controlling the output of the heater panel. A method of bulk material processing includes cascading the bulk material from an upper panel section to a lower panel section by vibration and subjecting it to infrared radiation.
    Type: Grant
    Filed: June 11, 1991
    Date of Patent: February 28, 1995
    Assignee: Flakee Mills, Inc.
    Inventors: Richard G. Bailey, Merton R. Leggott
  • Patent number: 5377427
    Abstract: An automatic hand drying apparatus is disclosed. The apparatus comprises a housing defining an inner space; in one embodiment, at least one arm member is attached to and extends away from said housing; a rotating towel device is supported on the arm member; a drive is disposed in the housing for rotating the rotating towel means. In another embodiment, the rotating towels or rollers are supported on a turntable. The preferred drive means include an electro-motor and a transmission connects the motor with the towel. The apparatus may also include a warm air blower disposed in the housing and the housing has warm air nozzle openings formed therein for directing warm air from the warm air blower towards the rotating towel means.
    Type: Grant
    Filed: July 27, 1993
    Date of Patent: January 3, 1995
    Inventor: Moshe Mashata
  • Patent number: 5369892
    Abstract: A dryer has an internal drying chamber for accommodating articles that are subjected to a heated circulating air to remove moisture from the articles. An air mixing chamber contains a first fan for moving air through a heater into the drying chamber. A second fan draws air out of the drying and mixing chambers and discharges air through a filter into the external environment. The heated air in the drying chamber is mixed with fresh air and recirculated through the drying chamber to minimize heat losses and increase drying effectiveness. Ultraviolet lamps within the drying chamber destroy contaminants in the air and articles within the chamber. A boot dryer, located in the drying chamber, has fans that move air through tubes used to support boots, shoes, skates and socks. Ultraviolet light in the boot chamber destroy contaminants in the air in the boot chamber. One modification of the dryer located within a locker room is used to remove moisture and odors from the air in the locker room.
    Type: Grant
    Filed: June 4, 1993
    Date of Patent: December 6, 1994
    Inventor: Gregory L. Dhaemers