Electronic Patents (Class 348/80)
  • Patent number: 8199191
    Abstract: There is provided an electron microscope which is capable of making a significant contribution to accomplishment of efficiency in investigating causes for pattern abnormalities found out. The electron microscope including an I/O for capturing image data on a microscopic image acquired by another electron microscope, a computation processing unit for generating a display signal based on the image data on the microscopic image acquired by another electron microscope and captured via the I/O and image data on a microscopic image acquired by the electron microscope itself, in order that the microscopic image acquired by another electron microscope and the microscopic image acquired by the electron microscope itself are displayed at the same scale and under the same display condition, and a display unit for displaying both of the microscopic images based on the display signal from the computation processing unit.
    Type: Grant
    Filed: January 29, 2007
    Date of Patent: June 12, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Hidetoshi Sato, Takumichi Sutani, Yutaka Hojo
  • Publication number: 20120138795
    Abstract: It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an image acquired by an optical microscope, an image area that should be acquired in a charged-particle beam device the representative of which is an electron microscope. In the present invention, in order to accomplish the above-described object, there are provided a method and a device for determining the position for detection of charged particles by making the comparison between a stained optical microscope image and an elemental mapping image formed based on X-rays detected by irradiation with the charged-particle beam.
    Type: Application
    Filed: February 16, 2012
    Publication date: June 7, 2012
    Applicant: Hitachi High-Technologies Corporation
    Inventors: Eiko NAKAZAWA, Masahiro Tomita, Hiroyuki Kobayashi
  • Publication number: 20120133757
    Abstract: For the microscopy of an object using a combination of optical microscopy and particle beam microscopy, a microscope slide system comprises an electrically conductive holder, wherein at least one window is configured in the holder, and wherein the holder has the dimensions of a standard glass microscope slide for the optical microscopy; a microscope slide element, which is designed to carry the object for the microscopy and which is designed such that the element can be placed over the window; and a fastening device, which is designed to fix the microscope slide element over the window. By means of said microscope slide system, the object can be analyzed using separate microscopes, without having to relocate the object.
    Type: Application
    Filed: May 7, 2010
    Publication date: May 31, 2012
    Applicant: Carl Zeiss AG
    Inventors: Christian Thomas, Torsten Sievers, Alexander Thesen
  • Publication number: 20120127299
    Abstract: A scanning electron microscope includes a main scanning electron microscope unit having an electron optical column and a sample chamber, a controller over the main scanning electron microscope unit, a single housing that houses both the main scanning electron microscope unit and the controller, and a bottom plate disposed under the single housing, the main scanning electron microscope unit and the controller. A first leg member is attached to a bottom face of the bottom plate on a side of the controller with a first opening hole provided through the bottom plate on a side of the main scanning electron microscope unit, and a damper is fixed to a bottom face of the main scanning electron microscope unit and disposed through the first opening hole.
    Type: Application
    Filed: July 20, 2010
    Publication date: May 24, 2012
    Inventors: Tomohisa Ohtaki, Masahiko Ajima, Sukehiro Ito, Mitsuru Onuma, Akira Omachi
  • Patent number: 8184150
    Abstract: A controlling unit obtains microscope information about each configuration unit configuring a microscope main body, transmits the microscope information, receives control information, and controls the operation of each configuration unit based on the received control information. A controller receives the microscope information transmitted from the controlling unit, displays an operation screen on which an operation button display used to obtain an instruction for the operation of each configuration unit is arranged based on the microscope information, obtains the instruction issued by using the operation button display, and transmits to the controlling unit the control information corresponding to the obtained instruction.
    Type: Grant
    Filed: December 19, 2007
    Date of Patent: May 22, 2012
    Assignee: Olympus Corporation
    Inventor: Daisuke Mizusawa
  • Publication number: 20120120226
    Abstract: In one aspect, the present invention relates to a microfluidic chamber. In one embodiment, the microfluidic chamber has a first sub-chamber and at least one second sub-chamber. The first sub-chamber has a first window and a second window. Both the first window and the second window are transparent to electrons of certain energies. The second window is positioned substantially parallel and opposite to the first window defining a first volume therebetween. The first window and the second window are separated by a distance that is sufficiently small such that an electron beam that enters from the first window can propagate through the first sub-chamber and exit from the second window. The at least one second sub-chamber is in fluid communication with the first sub-chamber and has a second volume that is greater than the first volume of the first sub-chamber.
    Type: Application
    Filed: November 17, 2011
    Publication date: May 17, 2012
    Applicant: VANDERBILT UNIVERSITY
    Inventor: Niels de Jonge
  • Publication number: 20120105617
    Abstract: In a method of measuring a critical dimension of a pattern, a pattern image is obtained from an object pattern. A design pattern of the object pattern and the pattern image are matched to determine a detection region on the pattern image. An optimum turning point of the pattern contour is determined in the detection region and a ROI (region of interest) is set within a predetermined range from the optimum turning point. A critical dimension of the pattern is measured in the ROI.
    Type: Application
    Filed: September 20, 2011
    Publication date: May 3, 2012
    Inventors: Han-June YOON, Hyung-Joo Lee, Won-Joo Park
  • Publication number: 20120105618
    Abstract: In accordance with the invention, there are imaging interferometric microscopes and methods for imaging interferometric microscopy using structural illumination and evanescent coupling for the extension of imaging interferometric microscopy. Furthermore, there are coherent anti-Stokes Raman (CARS) microscopes and methods for coherent anti-Stokes Raman (CARS) microscopy, wherein imaging interferometric microscopy techniques are applied to get material dependent spectroscopic information.
    Type: Application
    Filed: January 6, 2012
    Publication date: May 3, 2012
    Applicant: STC.UNM
    Inventors: Steven R. J. BRUECK, Yulia KUZNETSOVA, Alexander NEUMANN
  • Publication number: 20120098954
    Abstract: Provided are a semiconductor inspection device and a semiconductor inspection method such that in a specimen image in a single field of view obtained by an electron microscope, it is possible to suppress variations in the edge position measurement error attributable to the materials and structures of the lower layers of measured patterns by a first method, wherein the area in the field of view obtained by electron beam scanning is divided into a plurality of regions on the basis of information regarding the structures and materials of the object to be observed and the electron beam scanning conditions are changed for individual regions (805, 806), a second method, wherein, the image processing conditions are changed for individual regions resulting from division of the obtained images, or a third method, wherein the edge detection conditions are changed for individual regions resulting from the division within the edge inspection regions of the obtained images.
    Type: Application
    Filed: June 23, 2010
    Publication date: April 26, 2012
    Inventors: Atsuko Yamaguchi, Yoshinori Momonoi, Junichi Tanaka, Hiroki Kawada
  • Publication number: 20120098953
    Abstract: In a panoramic image construction technology of dividing a wide-range imaging area (EP) of semiconductor patterns into a plurality of imaging areas (SEP), and joining a group of images, which are obtained by imaging the SEPs using an SEM, through image processing, a fact that although a pattern serving as a key to joining is not contained in an overlap area between some of the SEPs, all the images can be joined in some cases is noted so that: although the number of patterns serving as keys to joining is small, SEPs whose images are all joined can be determined; or even if such SEPs cannot be determined, SEPs satisfying user's request items as many as possible can be determined. The cases are extracted by optimizing an SEP arrangement, whereby the number of cases in which SEPs whose images are all joined can be determined is increased.
    Type: Application
    Filed: July 1, 2010
    Publication date: April 26, 2012
    Inventors: Go Kotaki, Atsushi Miyamoto, Ryoichi Matsuoka
  • Patent number: 8164623
    Abstract: An unit for switchable arranging an arbitrary optical element on an optical path of fluorescence from among a plurality of types of the optical elements that transmit an excitation beam for exciting a sample and fluorescence emitted from the sample; an unit for picking up the observation image via the optical element arranged; and an unit for determining a type of the optical element arranged on the basis of the observation image picked up are prepared in order to provide a microscope image processing device, a program product, a program transmission medium and a method are provided, by which an optical element such as a fluorescence cube set on a fluorescence microscope can be identified on the basis of a detection result of an image pick up device that picks up an image of a sample to be observed by using the fluorescence microscope.
    Type: Grant
    Filed: December 18, 2007
    Date of Patent: April 24, 2012
    Assignee: Olympus Corporation
    Inventors: Shinichiro Aizaki, Yujin Arai
  • Patent number: 8164622
    Abstract: Systems and methods for microscope slide scanning using multiple sensor arrays that receive imagery data from a single optical axis are provided. A single, high quality, easily obtained microscope objective lens is used to project an image onto two or more sensor arrays. The sensor arrays can be linear or two dimensional and imaging takes place along a single optical axis. Simultaneous sensor acquisition and parallel data processing reduce the image acquisition time by a factor of N, where N represents the number of sensors employed.
    Type: Grant
    Filed: February 27, 2007
    Date of Patent: April 24, 2012
    Assignee: Aperio Technologies, Inc.
    Inventor: Greg Crandall
  • Publication number: 20120092482
    Abstract: A composite image creating method and device are provided which, when images separately captured a plurality of times are panoramically synthesized, can prevent deformation of a pattern due to multiple irradiation of the electron beam. One image is generated by overlapping joining areas of rims of two adjacent images when a plurality of images are joined to generate one image. Of two adjacent images, the joining area of an image of an earlier image capturing order is left, and the joining area of an image of a later image capturing order is removed. The joining area of the image of an earlier image capturing order is obtained with irradiation of electron beam a less number of times than the joining area of the image of a later image capturing order, and therefore deformation of a pattern due to irradiation of the electron beam is little.
    Type: Application
    Filed: April 2, 2010
    Publication date: April 19, 2012
    Inventors: Shinichi Shinoda, Yasutaka Toyoda, Ryoichi Matsuoka
  • Publication number: 20120092483
    Abstract: A scanning electron microscope comprises an image processing system for carrying out a pattern matching between a first image and a second image. The image processing system comprises: a paint-divided image generator for generating a paint divided image based on the first image; a gravity point distribution image generator for carrying out a smoothing process of the paint divided image and generating a gravity point distribution image; an edge line segment group generation unit for generating a group of edge line segments based on the second image; a matching score calculation unit for calculating a matching score based on the gravity point distribution image and the group of edge line segments; and a maximum score position detection unit for detecting a position where the matching score becomes the maximum.
    Type: Application
    Filed: December 21, 2011
    Publication date: April 19, 2012
    Applicant: Hitachi High-Technolgies Corporation
    Inventors: Akiyuki SUGIYAMA, Hiroyuki Shindo
  • Patent number: 8159531
    Abstract: Apparatus and methods are provided which allow the rapid collection of image data in situations where ancillary equipment must be controlled and co-ordinated as part of an image formation process, such as confocal microscopy for example. The apparatus includes control means (20?) for co-ordinating the operation of the apparatus, and operable to receive a first trigger signal (33, 33?, 37) indicating the completion of an operation from one component and transmit a second trigger signal (27, 27?) to start an operation by another component in response to the first trigger signal. Such a configuration is operate to reduce delays encountered in operation of the apparatus.
    Type: Grant
    Filed: April 22, 2005
    Date of Patent: April 17, 2012
    Assignee: PerkinElmer Singapore Pte Ltd.
    Inventor: Shab Ladha
  • Patent number: 8143562
    Abstract: An autofocus device, comprises: a stage for mounting a sample; an objective lens; a focusing unit driving stage or the objective lens in an optical axis direction in order to control the position relative to each other of the stage and the objective lens; a lighting unit onto the sample; a detection unit detecting an optical image; a projection state changing unit being provided in an optical path, changing a state of the optical image projected onto the detection unit; a first in-focus state determination unit determining an in-focus state of the sample on the basis of a detection result; and a first in-focus state adjustment unit controlling a position of the projection state changing unit such that a state in which the stage and the objective lens are held at prescribed positions under control of the driving unit is determined to be an in-focus state.
    Type: Grant
    Filed: November 9, 2007
    Date of Patent: March 27, 2012
    Assignee: Olympus Corporation
    Inventor: Hideyuki Kawanabe
  • Patent number: 8139106
    Abstract: Provided with a time-lapse imaging unit which repeatedly captures a specimen at predetermined time intervals and generates a plurality of images, and a recording unit which records at least one of an image group including one or more of the images captured during a predetermined period among a period of a time-lapse capturing performed by the time-lapse imaging unit or an image group including one or more of the images picked at predetermined time intervals among the period of the time-lapse capturing performed by the time-lapse imaging unit. Thus, data generated in time-lapse photography are managed favorably in a microscope apparatus provided with a time-lapse imaging unit which repeatedly captures a specimen at predetermined time intervals and generates a plurality of images.
    Type: Grant
    Filed: May 27, 2009
    Date of Patent: March 20, 2012
    Assignee: Nikon Corporation
    Inventor: Nobuhiko Maiya
  • Publication number: 20120057015
    Abstract: In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.
    Type: Application
    Filed: September 20, 2011
    Publication date: March 8, 2012
    Applicant: CARL ZEISS NTS, LLC
    Inventor: Billy W. Ward
  • Patent number: 8125518
    Abstract: Provided is a scanning electron microscope including: an image recording unit (112) which stores a plurality of acquired frame images; a correction analyzing handling unit (113) which calculates a drift amount between frame images and a drift amount between a plurality of field images constituting a frame image; and a data handling unit (111) which corrects positions of respective field images constituting the plurality of fields images according to the drift amount between the field images and superimposes the field images on one another so as to create a new frame image. This provides a scanning electron microscope which can obtain a clear frame image even if an image drift is caused during observation of a pattern on a semiconductor substrate or an insulating object.
    Type: Grant
    Filed: November 24, 2009
    Date of Patent: February 28, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Nobuhiro Okai, Yasunari Sohda
  • Patent number: 8125534
    Abstract: It is an object to provide an image pickup apparatus capable of changing over the operation mode between a magnification observation mode and a high-speed photographing mode without increasing the fabrication cost.
    Type: Grant
    Filed: December 18, 2008
    Date of Patent: February 28, 2012
    Assignee: Keyence Corporation
    Inventor: Shuji Shimonaka
  • Patent number: 8120649
    Abstract: A microscope system having a selectively mountable optical element, comprises: a first noncontact type storage medium, being equipped in the optical element, for enabling a noncontact readout of information externally; and a first readout unit for reading information non-contactingly from the first noncontact type storage medium, wherein the first noncontact type storage medium stores information related to the optical element.
    Type: Grant
    Filed: November 6, 2006
    Date of Patent: February 21, 2012
    Assignee: Olympus Corporation
    Inventors: Yuichiro Hashimoto, Hideyuki Kawanabe, Ryuichi Hirano, Tetsuya Shirota
  • Publication number: 20120019648
    Abstract: An electron microscope according to the present invention includes: a backscattered electron detector provided with a backscattered electron detecting element (9); a low-vacuum secondary electron detector provided with a bias electrode (11) and a specimen stage (12); and a signal switch (14) that switches signals detected by the detectors. Optimal observation conditions are stored in an observation condition memory (20) for each of the detectors. A CPU (19) calls observation conditions stored in the observation condition memory (20) on the basis of the switching of the detectors, and sets conditions of the electron microscope to the called observation conditions. An image processing device (22) converts a plurality of the detected signals obtained on the basis of the switching of the detectors into two-dimensional image signals and evaluates the qualities of images of the two-dimensional image signals.
    Type: Application
    Filed: January 19, 2010
    Publication date: January 26, 2012
    Inventors: Yoshinobu Hoshino, Shigeru Kawamata
  • Patent number: 8102418
    Abstract: This is a microscope observation system comprising a microscope, a camera unit, a light-amount adjustment unit for controlling adjustment parts included the microscope in order to suppress the amount of reflected light of a specimen image formed on the camera unit, a camera adjustment unit for controlling an adjustment part group of the camera unit in order to adjust image signals photo-electrically converted by the camera unit to a desired state, a light measurement unit for measuring the brightness of the specimen, a display unit for displaying a captured image, a control unit for controlling continuous display speed indicating the continuous display interval of an image continuously displayed on the display unit and at least one of an observation position shifting unit for changing the observation position or observation magnification of the specimen or an observation state detection unit for detecting the observation position or the observation magnification.
    Type: Grant
    Filed: November 21, 2008
    Date of Patent: January 24, 2012
    Assignee: Olympus Corporation
    Inventor: Jitsunari Kojima
  • Patent number: 8081208
    Abstract: A high tone image is saved in a versatile image file format to enhance usability. There are provided an imaging unit that images an original image having a predetermined dynamic range, which is a ratio between minimum luminance and maximum luminance; a synthesized image generating part that generates a synthesized image data that is higher in tone than a tone width of the original image by synthesizing a plurality of original images imaged under different imaging conditions at the same observation position; a display unit that displays the images imaged by the imaging unit; a tone conversion part that converts the synthesized image data generated by the synthesized image generating part to low tone image data having a tone width capable of being displayed on the display unit; and a tone data saving part that generates a high tone data-attached display file including a high tone image region for saving the synthesized image data serving as a basis as an image file for saving the low tone image data.
    Type: Grant
    Filed: May 5, 2008
    Date of Patent: December 20, 2011
    Assignee: Keyence Corporation
    Inventors: Masahiro Inomata, Kang Woobum
  • Publication number: 20110304724
    Abstract: A physical properties measuring method includes: acquiring an experimental convergent beam electron diffraction image of a sample by using a transmission electron microscope; calculating Zernike moment intensities of the experimental convergent beam electron diffraction image; and comparing the Zernike moment intensities of the experimental convergent beam electron diffraction image with Zernike moment intensities of calculated convergent beam electron diffraction images calculated on changed physical properties of the sample.
    Type: Application
    Filed: March 25, 2011
    Publication date: December 15, 2011
    Applicant: FUJITSU LIMITED
    Inventors: Takashi YAMAZAKI, Takeshi SOEDA
  • Publication number: 20110298915
    Abstract: In conventional methods, efficient analyses with respect to detected defects were not given consideration. A detected image is matched against pre-obtained partial images of a normal part and a defect part to determine a defect in the detected image. Then, the partial images and the detected image are synthesized to generate a review image in which the identifiability of the detected image is improved. Thus, the operator is able to readily make a determination with respect to the detected defect.
    Type: Application
    Filed: February 1, 2010
    Publication date: December 8, 2011
    Inventors: Takashi Hiroi, Takeyuki Yoshida, Masaaki Nojiri
  • Publication number: 20110285839
    Abstract: An imaging region of a high-magnification reference image capable of being acquired in a low-magnification field without moving a stage from a position at which a defective region has been imaged at a low magnification is searched for and if the search is successful, an image of the imaging region itself is acquired and the high-magnification reference image is acquired. If the search is unsuccessful, the imaging scheme is switched to that in which the high-magnification reference image is acquired from a chip adjacent to the defective region.
    Type: Application
    Filed: November 27, 2009
    Publication date: November 24, 2011
    Applicant: Hitachi High-Technologies Corporation
    Inventors: Go Kotaki, Atsushi Miyamoto, Ryo Nakagaki, Takehiro Hirai
  • Publication number: 20110279667
    Abstract: The invention relates to a method for carrying out measurements on at least one region of interest within a sample via a laser scanning microscope having focusing means for focusing a laser beam and having electro-mechano-optic deflector for deflecting the laser beam, the method comprising: providing a scanning trajectory for the at least one region of interest; providing a sequence of measurements and the corresponding scanning trajectories; providing cross-over trajectories between the scanning trajectories of two consecutive measurements; deflecting the laser beam via the electro-mechano-optic means for moving a focus spot of the focused laser beam along a scanning trajectory at an average scanning speed; and deflecting the laser beam via the electro-mechano-optic means for moving the focus spot of the laser beam along a cross-over trajectory at a cross-over speed having a maximum, the maximum of the cross-over speed being higher than the average scanning speed.
    Type: Application
    Filed: November 17, 2009
    Publication date: November 17, 2011
    Inventors: E. Szilveszter Vizi, Gergely Katona, J. Balazs Rozsa, Attila Kaszas, Gergely Turi
  • Publication number: 20110254944
    Abstract: When a scanning image of a scanning charged particle microscope is impaired by an external disturbance, a disturbance frequency can be simply and precisely analyzed from the image in order to specify the external disturbance. The maximum frequency analyzable by the scanning charged particle microscope can also be increased up to several kHz, which is the rotation frequency of, for example, a turbo-molecular pump commonly used as an exhaust pump of the scanning charged particle microscope. In an FFT analysis of a stripe pattern which is an impairment of the scanning image, the scanning charged particle microscope performs a one-dimensional FFT (1D-FFT) in the Y-direction (sub-deflection direction of the charged particle beam) or a one-dimensional DFT (1D-DFT) in the X-direction (main deflection direction of the charged particle beam).
    Type: Application
    Filed: October 2, 2009
    Publication date: October 20, 2011
    Inventors: Tohru Ishitani, Isao Nagaoki
  • Publication number: 20110249110
    Abstract: Provided is a scanning electron microscope including: an image recording unit (112) which stores a plurality of acquired frame images; a correction analyzing handling unit (113) which calculates a drift amount between frame images and a drift amount between a plurality of field images constituting a frame image; and a data handling unit (111) which corrects positions of respective field images constituting the plurality of fields images according to the drift amount between the field images and superimposes the field images on one another so as to create a new frame image. This provides a scanning electron microscope which can obtain a clear frame image even if an image drift is caused during observation of a pattern on a semiconductor substrate or an insulating object.
    Type: Application
    Filed: November 24, 2009
    Publication date: October 13, 2011
    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Nobuhiro Okai, Yasunari Sohda
  • Publication number: 20110228073
    Abstract: A synthetic aperture optics (SAO) imaging method minimizes the number of selective excitation patterns used to illuminate the imaging target, based on the objects' physical characteristics corresponding to spatial frequency content from the illuminated target and/or one or more parameters of the optical imaging system used for SAO. With the minimized number of selective excitation patterns, the time required to perform SAO is reduced dramatically, thereby allowing SAO to be used with DNA sequencing applications that require massive parallelization for cost reduction and high throughput. In addition, an SAO apparatus optimized to perform the SAO method is provided. The SAO apparatus includes a plurality of interference pattern generation modules that can be arranged in a half-ring shape.
    Type: Application
    Filed: March 19, 2010
    Publication date: September 22, 2011
    Applicant: LIGHTSPEED GENOMICS, INC.
    Inventors: Chun-Sheu Lee, Jong Buhm Park
  • Publication number: 20110211060
    Abstract: A defect detected by a wafer inspection tool is reliably captured by a defect review tool. A defect review condition in the defect review tool is varied depending on defect attributes provided by the wafer inspection tool so as to optimize the review process. For example, review magnification is varied depending on the size of the defect, or the frame addition number is varied depending on the maximum gray level difference.
    Type: Application
    Filed: March 4, 2011
    Publication date: September 1, 2011
    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Tomohiro FUNAKOSHI, Junko KONISHI, Yuko KARIYA, Noritsugu TAKAHASHI, Fumiaki ENDO
  • Patent number: 8009189
    Abstract: A high speed, high-resolution flow imaging system is modified to achieve extended depth of field imaging. An optical distortion element is introduced into the flow imaging system. Light from an object, such as a cell, is distorted by the distortion element, such that a point spread function (PSF) of the imaging system is invariant across an extended depth of field. The distorted light is spectrally dispersed, and the dispersed light is used to simultaneously generate a plurality of images. The images are detected, and image processing is used to enhance the detected images by compensating for the distortion, to achieve extended depth of field images of the object. The post image processing preferably involves de-convolution, and requires knowledge of the PSF of the imaging system, as modified by the optical distortion element.
    Type: Grant
    Filed: June 3, 2008
    Date of Patent: August 30, 2011
    Assignee: Amnis Corporation
    Inventors: William Ortyn, David Basiji, Keith Frost, Luchuan Liang, Richard Bauer, Brian Hall, David Perry
  • Publication number: 20110205353
    Abstract: A sample observation method of the present invention comprises a step of defining, with respect to an electron microscope image, an outline of an observation object with respect to a sample (3), or a plurality of points located along the outline, and a step of arranging a plurality of fields of view for an electron microscope along the outline, wherein electron microscope images of the plurality of fields of view that have been defined and arranged along the shape of the observation object through each of the above-mentioned steps are acquired. It is thus made possible to provide a sample observation method that is capable of selectively acquiring, with respect to observation objects of various shapes, an electron microscope image based on a field of view definition that is in accordance with the shape of the observation object, as well as an electron microscope apparatus that realizes such a sample observation method.
    Type: Application
    Filed: October 19, 2009
    Publication date: August 25, 2011
    Inventors: Akiko Fujisawa, Hiroyuki Kobayashi, Eiko Nakazawa
  • Publication number: 20110205352
    Abstract: Embodiments of the present invention relate to a high-resolution imaging device with wide field and extended focus comprising a beam generator for generating a plurality of nondiffracting beams and a scanning mechanism for moving the plurality of nondiffracting beams relative to the object to illuminate a volume of the object. The high-resolution imaging device also comprises surface element and a body having a light detector layer outside the surface element. The light detector layer has a light detector configured to measure light data associated with the plurality of nondiffracting beams illuminating the volume of the object. In some cases, the high-resolution imaging device also includes a lens inside of the light detector layer. The lens is configured to focus the light on the light detector surface.
    Type: Application
    Filed: February 22, 2011
    Publication date: August 25, 2011
    Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY
    Inventors: Sri Rama Prasanna Pavani, Changhuei Yang, Jigang Wu
  • Publication number: 20110187847
    Abstract: The present method comprises the steps of imaging the sample under different imaging conditions to acquire multiple images, generating degradation functions for the multiple acquired images, and then generating an image with an improved resolution using the multiple acquired images and the degradation functions corresponding to the acquired images to process the image with the improved resolution.
    Type: Application
    Filed: July 3, 2009
    Publication date: August 4, 2011
    Inventors: Jie Bai, Kenji Nakahira, Atsushi Miyamoto
  • Patent number: 7964846
    Abstract: A lens-coupled camera for an electron microscope is disclosed. The camera includes a CCD, a scintillator, at least one lens, and a mirror, such that at least the CCD and scintillator are housed in the vacuum chamber of the electron microscope, which has only one vacuum chamber. In a further embodiment, the CCD, scintillator, lens and mirror are affixed to a fixed mechanical linkage such that the CCD, scintillator, lens and mirror move together when the camera is retracted.
    Type: Grant
    Filed: July 31, 2009
    Date of Patent: June 21, 2011
    Assignee: Gatan, Inc.
    Inventors: Paul Mooney, Daniel Moonen
  • Publication number: 20110134234
    Abstract: An electronic microscope includes a handle having an outer body enclosing a main body and an image sensor, a lens controller fixed to the front end of the outer body of the handle, and a light guide coupled to the front end of the lens controller. The lens controller includes an inner case having a guide slot in the circumference and a flange on one end to which the handle is coupled, an outer case rotatably coupled with the inner case from outside and having a spiral passage in the circumference communicating with the guide slot, and a lens unit inserted into the inner case. The lens unit moves back and forth in response to rotation of the outer case. The light guide includes a LED board, LEDs radially mounted on the LED board, and an observation filter detachably provided on the front end of the lens controller.
    Type: Application
    Filed: December 9, 2009
    Publication date: June 9, 2011
    Applicant: Omega vision CO., LTD.
    Inventor: Chang Hyun Kim
  • Publication number: 20110102573
    Abstract: A method and apparatus for reviewing defects of a semiconductor device is provided which involves detecting a defect on a SEM image taken at low magnification, and reviewing the defect on a SEM image taken at high magnification, and which can review a lot of defects in a short period of time thereby to improve the efficiency of defect review. In the present invention, the method for reviewing defects of a semiconductor device includes the steps of obtaining an image including a defect on the semiconductor device detected by a detection device by use of a scanning electron microscope at a first magnification, making a reference image from the image including the defect obtained at the first magnification, detecting the defect by comparing the image including the defect obtained at the first magnification to the reference image made from the image including the defect at the first magnification, and taking an image of the detected defect at a second magnification that is larger than the first magnification.
    Type: Application
    Filed: January 7, 2011
    Publication date: May 5, 2011
    Inventors: Masaki KURIHARA, Toshifumi Honda, Ryo Nakagaki
  • Publication number: 20110063431
    Abstract: A cross-section processing and observation method includes: forming a first cross section in a sample by etching processing using a focused ion beam; obtaining image information of the first cross section by irradiating the focused ion beam to the first cross section; forming a second cross section by performing etching processing on the first cross section; obtaining image information of the second cross section by irradiating the focused ion beam to an irradiation region including the second cross section; displaying image information of a part of a display region of the irradiation region from the image information of the second cross section; displaying the image information of the first cross section by superimposing it on the image information being displayed; and moving the display region within the irradiation region. Observation images in which display regions are aligned can be obtained while reducing damage to the sample.
    Type: Application
    Filed: September 13, 2010
    Publication date: March 17, 2011
    Inventors: Masahiro KIYOHARA, Makoto SATO, Haruo TAKAHASHI, Junichi TASHIRO
  • Publication number: 20110001816
    Abstract: A microstructure inspection method which inspects an angle of a sidewall of a sample microstructure pattern, the method including: taking SEM photographs of the sample microstructure pattern under plural SEM conditions; measuring a width of a white band at an edge portion of the sample microstructure pattern in the SEM photographs; and calculating the angle of the sidewall of the sample microstructure pattern on the basis of an amount of change in the width of the white band due to the change between the plural SEM conditions.
    Type: Application
    Filed: March 19, 2009
    Publication date: January 6, 2011
    Applicant: Toppan Printing Co., Ltd.
    Inventors: Isao Yonekura, Hidemitsu Hakii
  • Publication number: 20100315503
    Abstract: The present invention relates to a digital microscope device that is mainly an innovative electronic equipment for observing, inspecting, and recording minute structures. It is including a digital microscope body set with a LCD on its top, and set with an optical lens and a main electrical circuit board in the main body. By utilizing the main electrical circuit board to link with the optical lens and LCD to display the images inspected by the optical lens directly on a LCD, a portable digital microscope that can be carried to any locations is formed, is convenient for the observation of users, and can store the observed images directly to obtain the better effectiveness.
    Type: Application
    Filed: June 16, 2009
    Publication date: December 16, 2010
    Inventor: James Chen
  • Patent number: 7848636
    Abstract: A microscope digital camera includes a camera head unit and an operation display unit. A display portion of the operation display unit displays an observed image acquired by a microscope body. A CPU in an operated portion of the operation display unit detects a change of the observed image. By turning on an objective warning LED provided for the operated portion, notification information indicating a detection result of a change of the observed image by the CPU is output.
    Type: Grant
    Filed: September 25, 2008
    Date of Patent: December 7, 2010
    Assignee: Olympus Corporation
    Inventor: Tomohiro Uchida
  • Patent number: 7838829
    Abstract: There is provided a charged particle beam device which can prevent a specimen from not being able to be observed due to entering of a part of a grid of a mesh in a field of view, each pixel of a scanning transmission electron microscope image is displayed on the basis of a gray value of a predetermined gradation scale. In the case where the number of pixels of a predetermined gray value is less than a predetermined percentage, it is decided that a mesh image is not included in the scanning transmission electron microscope image. In the case where the number of pixels of the predetermined gray value is not less than a predetermined percentage, it is judged that the mesh image is included in the scanning transmission electron microscope image.
    Type: Grant
    Filed: March 11, 2008
    Date of Patent: November 23, 2010
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Akiko Fujisawa, Eiko Nakazawa, Isao Nagaoki
  • Publication number: 20100208054
    Abstract: Various embodiments for providing removable, pluggable and disposable opto-electronic modules for illumination and microscopic imaging are provided, for use with portable display devices. Generally, various medical or industrial miniature microscopes can include one or more solid state or other compact electro-optic illuminating elements, electronic vision systems and means of scanning located thereon. Additionally, such opto-electronic modules may include illuminating optics, imaging optics, and/or image manipulation and processing elements. The illuminating elements may have different wavelengths and can be time-synchronized with an image sensor to illuminate an object for imaging or detecting purpose or other conditioning purpose. All control and power functions of such disposable microscope units can be made in the control unit that the disposable microscopes are plugged into.
    Type: Application
    Filed: April 30, 2010
    Publication date: August 19, 2010
    Applicant: Vivid Medical, Inc.
    Inventor: Mina Farr
  • Publication number: 20100194875
    Abstract: A particle image-capturing method includes controlling a light-emitting diode unit to emit light so as to illuminate a fluid through an annular condenser, particles in which scattering the light, and controlling an image-capturing unit to capture images of the scattered light through a microscope. A micro particle image velocimetry that performs the method is also disclosed.
    Type: Application
    Filed: August 21, 2009
    Publication date: August 5, 2010
    Inventors: Shenq-Yuh JAW, Jyh-Jong SHEEN, Tsu-Hung HUANG
  • Publication number: 20100194874
    Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.
    Type: Application
    Filed: June 7, 2007
    Publication date: August 5, 2010
    Applicant: FEI COMPANY
    Inventors: Mart Petrus Maria Bierhoff, Bart Buijsse, Cornelis Sander Kooljman, Hugo Van Leeuwen, Hendrik Gezinus Tappel, Colin August Sanford, Sander Richard Marie Stocks, Steven Berger, Ben Jacobus Marie Bormans, Koen Arnoldus Wilhelmus Driessen, Johannes Antonius Hendricus W.G. Persoon
  • Publication number: 20100188498
    Abstract: A microscope system includes a light amount ratio changing unit for changing a ratio of the amount of light directed to a first optical path for directing an optical image of the sample to an eyepiece lens and a second optical path for directing an optical image of the sample to an image capturing unit, an image capturing controlling unit for controlling an exposure time of the image capturing unit, and a controlling unit for obtaining a first exposure time from the image capturing controlling unit, for calculating a second exposure time on the basis of the first exposure time and a second ratio of the amount of light, and for controlling the image capturing controlling unit to set the second exposure time as the exposure time if the light amount ratio changing unit changes to the second ratio of the amount of light.
    Type: Application
    Filed: January 13, 2010
    Publication date: July 29, 2010
    Applicant: OLYMPUS CORPORATION
    Inventor: Takeshi MINAMIDE
  • Publication number: 20100128119
    Abstract: A defect review apparatus includes a storage device which stores data about a defect of an inspection target object; a first imaging device which captures an image located in a position on a surface of the inspection target object, the position being specified by information regarding the position of the inspection target object which has been input; and a control device which controls the first imaging device. The storage device stores: first defect detection data including a defect number as which the defect of the inspection target object detected by a first defect detection process is labeled, and information regarding the position of the defect; and second defect data including a defect number as which the defect of the inspection target object detected by a second defect detection process is labeled, and information regarding its position.
    Type: Application
    Filed: November 9, 2009
    Publication date: May 27, 2010
    Applicant: FUJITSU MICROELECTRONICS LIMITED
    Inventor: Naohiro Takahashi
  • Patent number: 7701481
    Abstract: A video magnifier includes a body including a base, a table on which an object to be read is placed, the table being disposed on the base, a video camera disposed over the table, an illumination lamp illuminating the object placed on the table and a pointer irradiating a part of the object photographed by the video camera, and a monitor television displaying a video image delivered from the video camera. In the video magnifier, in synchronization with irradiation of the photographed part of the object by the pointer, an illuminance of the illumination lamp is rendered lower than an illuminance of the pointer.
    Type: Grant
    Filed: May 25, 2004
    Date of Patent: April 20, 2010
    Assignees: Elmo Co., Ltd., Times Corporation Ltd.
    Inventors: Katsuya Mizukami, Seiji Yamaguchi