Abstract: A photographing control unit comprising a drive signal generator, an analog front end, a synchronization signal generation unit, and a system control unit controls an imager under a predetermined photographing condition, so that the imager photographs an observation image of a sample observed by a microscope and formed on a light receiving surface of the imager. A computing unit obtains inputs of a plurality of photographing parameters, determines a photographing condition based on the obtained photographing parameters, and sets the photographing condition for the photographing control unit. A display unit displays the designable ranges of the photographing parameters. Here, when the computing unit obtains the input of a priority parameter, it changes the designable range of the plurality of photographing parameters other than the priority parameter based on the priority parameter and causes the display unit to display the designable range after the change.

Abstract: A microscope, which moves an objective lens along an observation optical axis with respect to a specimen, includes an imaging unit and a supporting unit. The imaging unit has an imaging lens, which is arranged on the observation optical axis and forms an observation image of the specimen, and an imaging element, which is arranged on the observation optical axis and takes the observation image, and is optically connected to the objective lens by a parallel light flux. The supporting unit fixedly supports the imaging unit, and movably supports the objective lens.

Abstract: It is an object of the present invention to make it possible to stably and correctly measure a changing amount of a beam position when a beam displacement is measured prior to a recording operation performed by an electron beam recording apparatus. A measuring device for measuring a displacement of an electron beam prior to a recording operation, comprises: a knife edge disposed at an irradiating position of the beam spot; detecting means (Farady cup or the like) for detecting an electron beam irradiating through the knife edge; filter means (high frequency cut filter or the like) for removing a changing frequency component of measurement subject from an output of the detecting means; and control means for controlling a reference position of the electron beam in accordance with an output from the filter means, in a manner such that the center of the beam spot will be at the front end position of the knife edge.

Abstract: An optical microscope is provided with an adjustable optical phase ring. The adjustable ring provides a way to compensate for distortion in the visible phase ring before the light reaches the sample. In an inverted microscope, when observing transparent cells under a liquid, the visible light phase ring is distorted. By the use of a Liquid Crystal Display (LCD) in place of a fixed ring, the projected ring is adjusted to realign the light and produce phase. In a typical micro plate, the meniscus formed produces a lens effect that is realigned by providing changes in the position and pattern, to allow phase imaging over a wider portion of the well. The realignment of the ring can be manual or automated and can be dynamically adjusted based upon an observed image of the sample.

Abstract: Provided is a technique for a wafer inspection conducted by simple operation, which is useful even when the inspection covers a variety of items and the inspection items are changed frequently with time like in a start-up period of a semi-conductor process. According to the technique, inspection images are collected, and then a template is prepared from the inspection images. A plurality of regions are defined on the template, and inspection methods and output indexes are registered in correspondence with the respective regions. In the inspection, by reference to the template images corresponding to the derived inspection images, the inspection is conducted based on the inspection information registered therein and the quantitative output levels are calculated.

Abstract: The present invention relates to a fluorescent microscope and a remote control system thereof. The present invention reduces the size of the fluorescent microscope to facilitate transportation and management and be disposed in a narrow place such as the inside of the incubator or the clean bench, etc. and observes the samples through a remote control, thereby making it possible to improve the user convenience.

Abstract: An imager head assembly for a remote inspection device includes an imager housing. A circuit board is positioned within the imager housing. The circuit board has a light emitting diode connected thereto. A thermally conductive material in contact with the circuit board and the imager housing creates a conductive heat transfer path to dissipate heat generated by the light emitting diode through the imager housing. A light transmissive light pipe unit can be positioned proximate the circuit board to permit light emitted by the light emitting diode to pass through the light pipe unit.

Abstract: Method for monitoring at least part of a comb-line (18) of a comb plate (14) having a plurality of teeth (16), of a people conveyor (2) having a movable transportation band (4) and the comb plate (14) located at the transition (20) between the movable transportation band (4) and the stationary comb plate (14), wherein the method includes (a) taking a picture of the comb-line (18) with a camera (12); (b) comparing the picture with a reference picture; (c) determining the safety state of the comb-line (18) based on such comparison.

Abstract: An imaging system for a microscope comprises: an imaging unit imaging an optical image from a microscope; a display unit displaying the imaged image; a specifying unit specifying at least a given position on the displayed image to set a measurement target; a measurement and drawing unit performing measurement of the measurement target and drawing of the measurement target, as well as making a measurement value obtained by the measurement displayed at a predetermined position on the screen; a magnification change determination unit determining whether there has been a change in an observation magnification of the microscope; a control unit performing, when it is determined that there has been a change in the observation magnification of the microscope after the measurement value is displayed, an output in accordance with the change.

Abstract: A method for measuring critical dimension (CD) includes steps of: scanning at least one area of interest of a die to obtain at least one scanned image; aligning the scanned image to at least one designed layout pattern to identify a plurality of borders within the scanned image; and averaging distances each measured from the border or the plurality of borders of a pattern associated with a specific type of CD corresponding to the designed layout pattern to obtain a value of CD of the die. The value of critical dimensions of dies can be obtained from the scanned image with lower resolution which is obtained by relatively higher scanning speed, so the above-mentioned method can obtain value of CD for every die within entire wafer to monitor the uniformity of the semiconductor manufacturing process within an acceptable inspection time.

Abstract: In order to provide a pattern dimension measurement method with a small measured error and excellent reproducibility even though defocus occurs and a charged particle beam microscope used in the same, in a method for applying a charged particle beam to a specimen formed with a pattern to measure a pattern dimension from a signal intensity distribution of signal charged particles from the specimen, edge index positions (X1) and (X2) on the right and left of the maximum point of signal intensity corresponding to a pattern edge are calculated by a threshold method, and a pattern edge position (Xe) is found from a mean value between the positions. Thus, it is possible to reduce the influence of defocus on the pattern edge position (Xe).

Abstract: In acquisition of an image of cells, a focal position is accurately set at highly active cells rather than focusing on dead cells. Provided is an automatic focusing apparatus (8) used in a microscope (1) that image captures fluorescence emitted from cells to acquire a cell image, the automatic focusing apparatus (8) including a setting unit (5) that sets a luminance range indicating a region where viable cells exist on the basis of a luminance distribution of the acquired cell image; and a focus-detecting unit that detects a focal position on the basis of a luminance of an image of nuclei of the cells within the luminance range set by the setting unit (5).

Abstract: A system for image analysis and a method thereof are disclosed. In one embodiment, the system includes a detector configured to receive an image of a sample, isolate particles from a background image of the sample image and detect positions of the isolated particles and a first operator configured to calculate a static degree of randomness values of the particles using Lennard-Jones potentials based on the detected positions. The system may further include a second operator configured to obtain a dynamic degree of randomness values of particles based at least in part on the sum of tensile forces between particles by implicit integration added until the particles reach a dynamic equilibrium, and calculate a positional degree of randomness of particles based at least in part on subtraction of the dynamic degree of randomness values from the static degree of randomness values.

Abstract: Disclosed is a pattern matching method whereby a testing point can be searched accurately while simplifying the work of presetting. An image region of a part of a captured image is extracted, and a divided image of the image region is set as a template image. A pattern matching is performed by rotating the template image. Moreover, the pattern matching determines whether a point-symmetric pattern exists inside the image region.

Abstract: An image acquisition apparatus 1A includes a sample stage 10 for placing a sample S thereon, an image pickup device 20 capable of acquiring a two-dimensional image and TDI driving, an image pickup optical system 30 including an objective lens 32, a scanning unit for acquiring an observation image while scanning the sample S by the image pickup device 20 and the image pickup optical system 30, and a focus oscillation control device 40 for controlling oscillation of a focus in the sample S so that an image pickup focus in the sample S oscillates at an oscillation frequency fs in an optical axis direction. The focus oscillation control device 40 sets the oscillation frequency fs so that the oscillation frequency fs substantially coincides with Ns times (Ns is an integer not less than 1) the basic frequency, which is a reciprocal 1/Ti of an image pickup period Ti of TDI driving in the image pickup device 20.

Abstract: A microscope device having dual emission capability, wherein detrimental effects of image-aberrations and -distortions are reduced. By providing the means for reflecting the one beam in a manner so as to invert its handedness and the means for reflecting the second beam in a manner so as to preserve its handedness, a fully symmetrical configuration is obtained, where corresponding image points in both color/polarisation channels all experience the same field-dependent aberrations.

Abstract: A light source is configured to be mounted to a vision measuring instrument that includes a primary image capture unit capturing an image of an object to be measured, and an auxiliary image capture unit providing a means to aim the primary image capture unit at a determined position. The light source includes a main body defining a through hole for receiving the primary image capture unit, and a mounting hole for readily mounting an auxiliary image capture unit. A luminescent surface is formed on an inner wall bounding the through hole of the main body. A number of light-emitting diodes (LEDs) is disposed on the luminescent surface.

Abstract: A method and system for size calibration of an electronically generated image of a specimen that is generated by an optical instrument having a downstream digital camera operable in different reproduction modes is disclosed. In order to enhance image analysis reliability and decrease access times, it is proposed that firstly, for a specified reproduction mode of the camera, a reference calibration value indicating the ratio of a specimen dimension to an image dimension be determined and stored together with the specified reproduction mode; and that for size calibration, a correction factor regarding the reproduction mode be derived by comparing the stored reproduction mode to the reproduction mode of the camera currently in use, and from that correction factor, together with the stored reference calibration value, the current calibration value be calculated.

Abstract: A microscope image processing method includes applying a computing operation to at least one part of a microscope image, having the following steps: (a) providing the image in the mass storage device, (b) breaking down the microscope image into at least two image segments that can be loaded into the working memory and that have a dimension m, where m?n, (c) for one image segment, determining all pixels that are located in the image segment and in at least one of the partial images, so that a filled image segment results, (d) providing the filled image segment in the working memory, (e) applying the computing operation to the pixels located in the filled image segment so that an image segment result is created, (f) repeating steps (c), (d), and (e) for all image segments, and (g) combining all image segment results to create an overall result.

Abstract: A method and apparatus are provided for obtaining a sub-resolution spatial information of a sample labeled with at least one type fluorescent label. The sub-resolution spatial information has localization information about the positions of fluorescent molecules of the at least one type fluorescent label in at least one spatial direction. The method acquires localization image data by employing fluorescence localization microscopy. The acquired localization image data is processed to obtain the localization information about the positions of fluorescent molecules of the at least one type fluorescent label in at least one spatial direction. The step of processing includes determining in each of the detected images of the series the positions of the barycenters of the detected fluorescence emission distributions from the single fluorescent molecules of the one or more fluorescent labels in at least one spatial direction.

Abstract: A defect detected by a wafer inspection tool is reliably captured by a defect review tool. A defect review condition in the defect review tool is varied depending on defect attributes provided by the wafer inspection tool so as to optimize the review process. For example, review magnification is varied depending on the size of the defect, or the frame addition number is varied depending on the maximum gray level difference.

Abstract: It is an object of the present invention to provide an observation unit which efficiently cools apparatus members in a reaction chamber of a semiconductor manufacturing apparatus in a high-temperature atmosphere and reduces overexposure. An observation unit comprising: an imaging apparatus for imaging the inside of a reaction chamber of a semiconductor manufacturing apparatus in an atmosphere of a high temperature; a housing case which houses the imaging apparatus and is attached with a translucent member which guides an optical image of the inside of the reaction chamber to the imaging apparatus; and a cooling medium supplying apparatus for supplying a cooling medium to the inside of the housing case, wherein the translucent member is a silica glass plate having a gold film on both sides or one side.

Abstract: There is provided an electron microscope which is capable of making a significant contribution to accomplishment of efficiency in investigating causes for pattern abnormalities found out. The electron microscope including an I/O for capturing image data on a microscopic image acquired by another electron microscope, a computation processing unit for generating a display signal based on the image data on the microscopic image acquired by another electron microscope and captured via the I/O and image data on a microscopic image acquired by the electron microscope itself, in order that the microscopic image acquired by another electron microscope and the microscopic image acquired by the electron microscope itself are displayed at the same scale and under the same display condition, and a display unit for displaying both of the microscopic images based on the display signal from the computation processing unit.

Abstract: It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an image acquired by an optical microscope, an image area that should be acquired in a charged-particle beam device the representative of which is an electron microscope. In the present invention, in order to accomplish the above-described object, there are provided a method and a device for determining the position for detection of charged particles by making the comparison between a stained optical microscope image and an elemental mapping image formed based on X-rays detected by irradiation with the charged-particle beam.

Abstract: For the microscopy of an object using a combination of optical microscopy and particle beam microscopy, a microscope slide system comprises an electrically conductive holder, wherein at least one window is configured in the holder, and wherein the holder has the dimensions of a standard glass microscope slide for the optical microscopy; a microscope slide element, which is designed to carry the object for the microscopy and which is designed such that the element can be placed over the window; and a fastening device, which is designed to fix the microscope slide element over the window. By means of said microscope slide system, the object can be analyzed using separate microscopes, without having to relocate the object.

Abstract: A scanning electron microscope includes a main scanning electron microscope unit having an electron optical column and a sample chamber, a controller over the main scanning electron microscope unit, a single housing that houses both the main scanning electron microscope unit and the controller, and a bottom plate disposed under the single housing, the main scanning electron microscope unit and the controller. A first leg member is attached to a bottom face of the bottom plate on a side of the controller with a first opening hole provided through the bottom plate on a side of the main scanning electron microscope unit, and a damper is fixed to a bottom face of the main scanning electron microscope unit and disposed through the first opening hole.

Abstract: A controlling unit obtains microscope information about each configuration unit configuring a microscope main body, transmits the microscope information, receives control information, and controls the operation of each configuration unit based on the received control information. A controller receives the microscope information transmitted from the controlling unit, displays an operation screen on which an operation button display used to obtain an instruction for the operation of each configuration unit is arranged based on the microscope information, obtains the instruction issued by using the operation button display, and transmits to the controlling unit the control information corresponding to the obtained instruction.

Abstract: In one aspect, the present invention relates to a microfluidic chamber. In one embodiment, the microfluidic chamber has a first sub-chamber and at least one second sub-chamber. The first sub-chamber has a first window and a second window. Both the first window and the second window are transparent to electrons of certain energies. The second window is positioned substantially parallel and opposite to the first window defining a first volume therebetween. The first window and the second window are separated by a distance that is sufficiently small such that an electron beam that enters from the first window can propagate through the first sub-chamber and exit from the second window. The at least one second sub-chamber is in fluid communication with the first sub-chamber and has a second volume that is greater than the first volume of the first sub-chamber.

Abstract: In accordance with the invention, there are imaging interferometric microscopes and methods for imaging interferometric microscopy using structural illumination and evanescent coupling for the extension of imaging interferometric microscopy. Furthermore, there are coherent anti-Stokes Raman (CARS) microscopes and methods for coherent anti-Stokes Raman (CARS) microscopy, wherein imaging interferometric microscopy techniques are applied to get material dependent spectroscopic information.

Abstract: In a method of measuring a critical dimension of a pattern, a pattern image is obtained from an object pattern. A design pattern of the object pattern and the pattern image are matched to determine a detection region on the pattern image. An optimum turning point of the pattern contour is determined in the detection region and a ROI (region of interest) is set within a predetermined range from the optimum turning point. A critical dimension of the pattern is measured in the ROI.

Abstract: In a panoramic image construction technology of dividing a wide-range imaging area (EP) of semiconductor patterns into a plurality of imaging areas (SEP), and joining a group of images, which are obtained by imaging the SEPs using an SEM, through image processing, a fact that although a pattern serving as a key to joining is not contained in an overlap area between some of the SEPs, all the images can be joined in some cases is noted so that: although the number of patterns serving as keys to joining is small, SEPs whose images are all joined can be determined; or even if such SEPs cannot be determined, SEPs satisfying user's request items as many as possible can be determined. The cases are extracted by optimizing an SEP arrangement, whereby the number of cases in which SEPs whose images are all joined can be determined is increased.

Abstract: Provided are a semiconductor inspection device and a semiconductor inspection method such that in a specimen image in a single field of view obtained by an electron microscope, it is possible to suppress variations in the edge position measurement error attributable to the materials and structures of the lower layers of measured patterns by a first method, wherein the area in the field of view obtained by electron beam scanning is divided into a plurality of regions on the basis of information regarding the structures and materials of the object to be observed and the electron beam scanning conditions are changed for individual regions (805, 806), a second method, wherein, the image processing conditions are changed for individual regions resulting from division of the obtained images, or a third method, wherein the edge detection conditions are changed for individual regions resulting from the division within the edge inspection regions of the obtained images.

Abstract: An unit for switchable arranging an arbitrary optical element on an optical path of fluorescence from among a plurality of types of the optical elements that transmit an excitation beam for exciting a sample and fluorescence emitted from the sample; an unit for picking up the observation image via the optical element arranged; and an unit for determining a type of the optical element arranged on the basis of the observation image picked up are prepared in order to provide a microscope image processing device, a program product, a program transmission medium and a method are provided, by which an optical element such as a fluorescence cube set on a fluorescence microscope can be identified on the basis of a detection result of an image pick up device that picks up an image of a sample to be observed by using the fluorescence microscope.

Abstract: Systems and methods for microscope slide scanning using multiple sensor arrays that receive imagery data from a single optical axis are provided. A single, high quality, easily obtained microscope objective lens is used to project an image onto two or more sensor arrays. The sensor arrays can be linear or two dimensional and imaging takes place along a single optical axis. Simultaneous sensor acquisition and parallel data processing reduce the image acquisition time by a factor of N, where N represents the number of sensors employed.

Abstract: A composite image creating method and device are provided which, when images separately captured a plurality of times are panoramically synthesized, can prevent deformation of a pattern due to multiple irradiation of the electron beam. One image is generated by overlapping joining areas of rims of two adjacent images when a plurality of images are joined to generate one image. Of two adjacent images, the joining area of an image of an earlier image capturing order is left, and the joining area of an image of a later image capturing order is removed. The joining area of the image of an earlier image capturing order is obtained with irradiation of electron beam a less number of times than the joining area of the image of a later image capturing order, and therefore deformation of a pattern due to irradiation of the electron beam is little.

Abstract: A scanning electron microscope comprises an image processing system for carrying out a pattern matching between a first image and a second image. The image processing system comprises: a paint-divided image generator for generating a paint divided image based on the first image; a gravity point distribution image generator for carrying out a smoothing process of the paint divided image and generating a gravity point distribution image; an edge line segment group generation unit for generating a group of edge line segments based on the second image; a matching score calculation unit for calculating a matching score based on the gravity point distribution image and the group of edge line segments; and a maximum score position detection unit for detecting a position where the matching score becomes the maximum.

Abstract: Apparatus and methods are provided which allow the rapid collection of image data in situations where ancillary equipment must be controlled and co-ordinated as part of an image formation process, such as confocal microscopy for example. The apparatus includes control means (20?) for co-ordinating the operation of the apparatus, and operable to receive a first trigger signal (33, 33?, 37) indicating the completion of an operation from one component and transmit a second trigger signal (27, 27?) to start an operation by another component in response to the first trigger signal. Such a configuration is operate to reduce delays encountered in operation of the apparatus.

Abstract: An autofocus device, comprises: a stage for mounting a sample; an objective lens; a focusing unit driving stage or the objective lens in an optical axis direction in order to control the position relative to each other of the stage and the objective lens; a lighting unit onto the sample; a detection unit detecting an optical image; a projection state changing unit being provided in an optical path, changing a state of the optical image projected onto the detection unit; a first in-focus state determination unit determining an in-focus state of the sample on the basis of a detection result; and a first in-focus state adjustment unit controlling a position of the projection state changing unit such that a state in which the stage and the objective lens are held at prescribed positions under control of the driving unit is determined to be an in-focus state.

Abstract: Provided with a time-lapse imaging unit which repeatedly captures a specimen at predetermined time intervals and generates a plurality of images, and a recording unit which records at least one of an image group including one or more of the images captured during a predetermined period among a period of a time-lapse capturing performed by the time-lapse imaging unit or an image group including one or more of the images picked at predetermined time intervals among the period of the time-lapse capturing performed by the time-lapse imaging unit. Thus, data generated in time-lapse photography are managed favorably in a microscope apparatus provided with a time-lapse imaging unit which repeatedly captures a specimen at predetermined time intervals and generates a plurality of images.

Abstract: In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.

Abstract: Provided is a scanning electron microscope including: an image recording unit (112) which stores a plurality of acquired frame images; a correction analyzing handling unit (113) which calculates a drift amount between frame images and a drift amount between a plurality of field images constituting a frame image; and a data handling unit (111) which corrects positions of respective field images constituting the plurality of fields images according to the drift amount between the field images and superimposes the field images on one another so as to create a new frame image. This provides a scanning electron microscope which can obtain a clear frame image even if an image drift is caused during observation of a pattern on a semiconductor substrate or an insulating object.

Abstract: It is an object to provide an image pickup apparatus capable of changing over the operation mode between a magnification observation mode and a high-speed photographing mode without increasing the fabrication cost.

Abstract: A microscope system having a selectively mountable optical element, comprises: a first noncontact type storage medium, being equipped in the optical element, for enabling a noncontact readout of information externally; and a first readout unit for reading information non-contactingly from the first noncontact type storage medium, wherein the first noncontact type storage medium stores information related to the optical element.

Abstract: An electron microscope according to the present invention includes: a backscattered electron detector provided with a backscattered electron detecting element (9); a low-vacuum secondary electron detector provided with a bias electrode (11) and a specimen stage (12); and a signal switch (14) that switches signals detected by the detectors. Optimal observation conditions are stored in an observation condition memory (20) for each of the detectors. A CPU (19) calls observation conditions stored in the observation condition memory (20) on the basis of the switching of the detectors, and sets conditions of the electron microscope to the called observation conditions. An image processing device (22) converts a plurality of the detected signals obtained on the basis of the switching of the detectors into two-dimensional image signals and evaluates the qualities of images of the two-dimensional image signals.

Abstract: This is a microscope observation system comprising a microscope, a camera unit, a light-amount adjustment unit for controlling adjustment parts included the microscope in order to suppress the amount of reflected light of a specimen image formed on the camera unit, a camera adjustment unit for controlling an adjustment part group of the camera unit in order to adjust image signals photo-electrically converted by the camera unit to a desired state, a light measurement unit for measuring the brightness of the specimen, a display unit for displaying a captured image, a control unit for controlling continuous display speed indicating the continuous display interval of an image continuously displayed on the display unit and at least one of an observation position shifting unit for changing the observation position or observation magnification of the specimen or an observation state detection unit for detecting the observation position or the observation magnification.

Abstract: A high tone image is saved in a versatile image file format to enhance usability. There are provided an imaging unit that images an original image having a predetermined dynamic range, which is a ratio between minimum luminance and maximum luminance; a synthesized image generating part that generates a synthesized image data that is higher in tone than a tone width of the original image by synthesizing a plurality of original images imaged under different imaging conditions at the same observation position; a display unit that displays the images imaged by the imaging unit; a tone conversion part that converts the synthesized image data generated by the synthesized image generating part to low tone image data having a tone width capable of being displayed on the display unit; and a tone data saving part that generates a high tone data-attached display file including a high tone image region for saving the synthesized image data serving as a basis as an image file for saving the low tone image data.

Abstract: A physical properties measuring method includes: acquiring an experimental convergent beam electron diffraction image of a sample by using a transmission electron microscope; calculating Zernike moment intensities of the experimental convergent beam electron diffraction image; and comparing the Zernike moment intensities of the experimental convergent beam electron diffraction image with Zernike moment intensities of calculated convergent beam electron diffraction images calculated on changed physical properties of the sample.

Abstract: In conventional methods, efficient analyses with respect to detected defects were not given consideration. A detected image is matched against pre-obtained partial images of a normal part and a defect part to determine a defect in the detected image. Then, the partial images and the detected image are synthesized to generate a review image in which the identifiability of the detected image is improved. Thus, the operator is able to readily make a determination with respect to the detected defect.

Abstract: An imaging region of a high-magnification reference image capable of being acquired in a low-magnification field without moving a stage from a position at which a defective region has been imaged at a low magnification is searched for and if the search is successful, an image of the imaging region itself is acquired and the high-magnification reference image is acquired. If the search is unsuccessful, the imaging scheme is switched to that in which the high-magnification reference image is acquired from a chip adjacent to the defective region.

Abstract: The invention relates to a method for carrying out measurements on at least one region of interest within a sample via a laser scanning microscope having focusing means for focusing a laser beam and having electro-mechano-optic deflector for deflecting the laser beam, the method comprising: providing a scanning trajectory for the at least one region of interest; providing a sequence of measurements and the corresponding scanning trajectories; providing cross-over trajectories between the scanning trajectories of two consecutive measurements; deflecting the laser beam via the electro-mechano-optic means for moving a focus spot of the focused laser beam along a scanning trajectory at an average scanning speed; and deflecting the laser beam via the electro-mechano-optic means for moving the focus spot of the laser beam along a cross-over trajectory at a cross-over speed having a maximum, the maximum of the cross-over speed being higher than the average scanning speed.