Abstract: An apparatus (10) for microlithographic projection exposure, which includes: an optical system (18) for imaging mask structures (16) onto a surface (21) of a substrate (20) by projecting the mask structures (16) with imaging radiation (13) onto an exposure area of the substrate surface, and various structure defining a measurement beam path (36) for guiding measurement radiation (34). The measurement beam path (36) extends within the optical system (18) such that the measurement radiation (34) impinges on a measurement area on the substrate surface that is offset from the exposure area.

Abstract: A method for measuring flare information of a projection optical system includes arranging, on an object plane of the projection optical system, a sectoral pattern surrounded by a first side, a second side which is inclined at a predetermined angle with respect to the first side, and an inner diameter portion and an outer diameter portion which connect both ends of the first side and both ends of the second side; projecting an image of the sectoral pattern via the projection optical system; and determining the flare information based on a light amount of the image of the sectoral pattern and a light amount provided at a position away from the image. With the flare measuring method, it is possible to correctly measure the flare information in an arbitrary angle range of the sectoral pattern.

Abstract: An apparatus and method for determining optical center in camera module are provided, the method for determining optical center in camera module according to an exemplary embodiment comprising receiving a target image from a camera module including a lens; generating an error data, which is a difference between a pixel value of the target image and a pixel value of a Gaussian distribution image; and determining the optical center of the lens based on the error data.

Abstract: A measuring system (10) for measuring an imaging quality of an EUV lens (30) includes a diffractive test structure (26), a measurement light radiating device (16) which is configured to radiate measurement light (21) in the EUV wavelength range onto the test structure, a variation device (28) for varying at least one image-determining parameter of an imaging of the test structure that is effected by a lens, a detector (14) for recording an image stack including a plurality of images generated with different image-determining parameters being set, and an evaluation device (15) which is configured to determine the imaging quality of the lens from the image stack.

Abstract: A lens meter includes a measurement optical system having a light source, measurement target plate, and light receiving sensor. A lens table has an opening where a measurement optical axis of the measurement optical system passes. A frame support member includes a support plate that contacts a left rim and right rim of a spectacle frame. The support plate is moved toward the lens table by a guide mechanism. The frame support member further includes a cutout portion in the support plate that allow the lens, placed on the lens table, to measure a point near an edge of the lens located on the support plate side. A pad contacts and prevents the rim from entering the cutout portion. The pad is provided in at least a part of the cutout portion. A pad moving mechanism moves the pad from the contact surface.

Abstract: The present invention provides high-resolution wavefront measurement systems and methods for real-time inspection of optical and geometrical properties of specular and transparent objects, the systems of the invention comprising at least one illumination apparatus, at least one imaging apparatus constructed and configured to image the object onto an image plane, at least one gradient element disposed at one of the aperture stops of the imaging apparatus; and a sensor placed in the image plane of the imaging apparatus, wherein the sensor is capable of differentiating between different areas of the gradient element thereby being adapted to provide real-time optical and geometrical data of the object.

Abstract: According to a flare measuring method in an embodiment, a reflective mask, in which one reflective coordinate in a slit direction in a mask surface is determined when one scanning coordinate is determined, is placed on a scanner that includes a reflective projection optical system. Moreover, a light intensity of the exposure light is measured by performing a scanning exposure on an illuminance sensor moved to a predetermined position in the slit direction in a slit imaging plane. Then, an amount of flare at an intra-slit position corresponding to a position of the illuminance sensor in the slit direction is calculated by using a light intensity of exposure light received from an intra-slit position that does not correspond to the position of the illuminance sensor in the slit direction in the exposure light.

Abstract: An optical coupling lens includes a main portion and two reference portions. The main portion includes a first surface having at least one first converging lens formed thereon, a second surface having at least one second converging lenses formed thereon, and a reflecting surface. The second surface is substantially perpendicular to the first surface. An angle between the reflecting surface and the first surface is about 45 degrees. An optical axis of the first converging lens is substantially perpendicular to the first surface, and an optical axis of the second converging lens is substantially perpendicular to the second surface. Each reference portion includes a reference member. The reference member includes a reference point. A connecting line of the reference points of the reference portions is substantially parallel to the first surface and the second surface, and the connecting line is in a surface substantially coplanar with the reflecting surface.

Abstract: Embodiments of the invention provide a method of determining one or more characteristics of a target object, comprising determining a first phase map for at least a region of a target object based on radiation directed toward the target object, determining one or more further phase maps for a sub-region of the region of the target object, determining a number of phase wraps for the sub-region based on a plurality of phase maps for the sub-region, and determining a characteristic of the region of the target object based on the number of phase wraps for sub-region and the first phase map. Embodiments of the invention also relate to a method of determining one or more characteristics of a target object, comprising determining a phase map for at least a region of a target object based on one or more diffraction patterns, determining a wavefront at a plane of the object based upon the phase map, and determining a refractive property of the object based on the wavefront.

Abstract: An optical measuring instrument for measuring aspheric surfaces includes an optical measuring arm and a multi-axis drive platform. The optical measuring arm provides for illuminating and imaging the aspheric surfaces. The multi-axis drive platform relatively moves the optical measuring arm with respect to the aspheric surfaces through a plurality of subaperture measurement positions. A focus of adjustable focusing optic is maintained at a nominal center of curvature of the aspheric surfaces. A variable optical aberrator adds aberration to an illumination wavefront to match the illumination wavefront to the intended local shape of the aspheric surface. Fitted low-frequency shape information is distinguished from a remainder of the local shape information yielding mid-frequency topographic measurements of the subapertures, which can be assembled to construct a profile measurement of the aspheric surface.

Abstract: This optical system includes: a device (106) for generating a plane light wave, called a collimated light wave (OLcol); and a device (114) for deviating the collimated light wave so as to provide a light wave, called a test light wave (OLtest), the deviating device (114) having an adjustable focal length.

Abstract: Methods for measuring the image quality of a projection objective include providing a measuring structure on an image-side of the projection objective, providing an immersion fluid between the projection objective and the measuring structure, directing light through the projection objective and the immersion fluid to the measuring structure while shielding the measuring structure from the immersion fluid, detecting light transmitted by the measuring structure, and determining an image quality of the projection objective based on the detected light.

Abstract: A method for designing an optical component for shaping laser light according to one embodiment of this invention measures the intensity distribution of an incident laser light, obtains the shapes in the short and long axial directions of a pair of aspheric lenses for each of the short and long axial directions of the incident laser light from the measured intensity distribution of the incident laser light and a desired intensity distribution, performs approximation of a high-order polynomial of the shapes in the short and long axial directions of the pair of aspheric lenses, corrects the high-order polynomials for the short or long axial directions using a correction factor, and obtains the shapes of the pair of aspheric lenses on the basis of the corrected high-order polynomials.

Abstract: A system for holding and aligning spectacles such that mapping measurements of the optical properties of a lens can be performed with the lens held such that its optical axis is parallel to the incident measurement beam. This may be implemented using three points which define a plane with which a surface of the lens can be aligned. The frame gripper is constructed such that the lens to be measured is free to rotate in space around any axis until clamped by the three alignment pin support arrangement, with the exception of rotation around the optical axis of the lens. This freedom of rotation allows the lens to be positioned on the alignment pin support automatically without the need for operator intervention. The spectacle frame is clamped using a spring loaded caliper device, configured to sequentially align the mechanical center of each lens with the measuring beam.

Abstract: A source generates an optical test signal sweeping a bandwidth of wavelengths over time. The test signal is applied to a device under test (DUT) to generate a response signal. A timing signal generator connected to the source generates a timing signal having triggers at time instances corresponding to known wavelengths of the test signal. A DUT detector samples the DUT response signal generating sampled DUT data using a sampling period that is shorter than a shortest time between timing signal triggers. A correlator receives the timing signal, the known wavelengths associated with the timing signal triggers, the sampled DUT data and the DUT detector sampling period then correlates each sampled DUT datum to a wavelength of the test signal that was applied to the DUT when the DUT datum was sampled by interpolating the known wavelengths using the trigger time instances and the DUT detector sampling period.

Abstract: Systems and methods for facilitating focusing of an image scanner, such as a confocal microscope, are disclosed. Measurement of optical characteristics in certain areas of a test sample are compared to stored or baseline optical characteristic profiles to determine an appropriate correction to properly focus the scanner. In one aspect, the method includes obtaining a dynamic profile at a current detection region of a test sample and associating the dynamic profile to a profile selected from a set of stored baseline profiles. Each of the stored baseline profiles is associated with a correction.

Abstract: Methods for inspecting ophthalmic lenses with different wavelengths of radiation are disclosed herein.

Abstract: A method comprises providing a lens blank, a precision positioning device, an illumination device, and a vision system, wherein the lens blank includes at least one feature whose position is known relative to a position of an optic center of the lens blank, and wherein the vision system comprises an image sensor and a processor; mounting the lens blank on the precision positioning device; illuminating the lens blank with the illumination device; viewing the lens blank with image sensor of the vision system; determining the position of the at least one feature using the processor; and determining the position of the optic center of the lens blank based on the position of the at least one feature using the processor.

Abstract: The wavefront aberration measuring method includes measuring an intensity distribution of a measuring light transmitted through or reflected by an object to be measured, by using a light-receiving sensor, calculating a first differential wavefront which is a differential wavefront of the measuring light on the light-receiving sensor, and calculating a second differential wavefront by performing a correction process on the first differential wavefront depending on an incident angle of the measuring light to the light-receiving sensor. The method further includes calculating a wavefront aberration of the object by using the second differential wavefront.

Abstract: A device for the optical measurement of an optical system, in particular an optical imaging system, is provided. The device includes at least one test optics component arranged on an object side or an image side of the optical system. An immersion fluid is adjacent to at least one of the test optics components. A container for use in this device, a microlithography projection exposure machine equipped with this device, and a method which can be carried out with the aid of this device are also provided. The device and method provide for optical measurement of microlithography projection objectives with high numerical apertures by using wavefront detection with shearing or point diffraction interferometry, or a Moiré measuring technique.

Abstract: A device is provided for demonstrating and testing the cosmetic qualities of an ophthalmic lens by viewing, the device comprising both a bearing wall (2) for bearing against a fixed surface and provided on its face opposite from its bearing face with a viewing target (3), and also a support wall (4) for supporting said lens and placed at a distance lying in the range 20 mm to 50 mm from said face of said bearing wall (2) that is provided with the target. According to the invention, the device is constituted by a support part (1) constituted by a channel-section member having its flanges forming said bearing surface (2) and said support wall (4), the support wall being provided with at least one orifice (5) of dimensions smaller than the dimensions of said lens, and said bearing surface and said support surface being inclined relative to each other by an angle lying in the range 0° to 25°.

Abstract: A method and an apparatus serve for visualizing a signature mark on a spectacle lens. In order to identify the signature mark, an illumination light beam is directed onto the spectacle lens, which impinges on the spectacle lens, after impinging on the spectacle lens is reflected at a retroreflector, impinges once again on the spectacle lens, and finally is passed as an observation light beam to a camera. A reflection region of the illumination light beam on the reflector is varied by means of a moved first optical element.

Abstract: A lens testing method is disclosed which comprises the following three steps. First, test a lens under test to obtain a testing characteristic value of the lens under test for a first object distance. Second, provide a correction datum. Third, calculate a simulated characteristic value for a second object distance according to the testing characteristic value and the correction datum.

Abstract: This invention provides for a method and an ophthalmic lens thickness profile measuring apparatus. More specifically, the apparatus which is capable of measuring the ophthalmic lens in a precursor state after it is free-formed on an optic forming mandrel on which it can be formed. Additionally, the present invention can also allow for a design profile of the formed ophthalmic lens to be compared to the resulting free-formed ophthalmic lens to ensure it meets specified convergence design criteria.

Abstract: A display apparatus to be inspected includes: a display panel in which pixel groups are arranged; and an optical element for providing image display for N viewpoints (N is a natural number more than one) from the pixel groups. An inspection apparatus includes: a image output device for outputting a test pattern including image signals different in the respective viewpoints to the display apparatus; and an extraction device for extracting the slope and the position of a boundary line segment in an inspection image displayed on the display apparatus. The extraction device detects positional accuracy between the display panel and the optical element on the basis of the slope and the position extracted by the extraction device.

Abstract: A wavefront aberration measuring apparatus which measures an wavefront aberration of an optical system to be inspected includes a point light source which supplies a measuring light; a photodetector which has a detection surface arranged at a position optically conjugate with the point light source; a wavefront change applying section which is arranged in an optical path between the point light source and the photodetector and which applies a wavefront change to the light outcome from the optical system; and a measuring section which measures the wavefront aberration of the optical system based on an output of the photodetector and the wavefront change applied by the wavefront change applying section. It is possible to measure the wavefront aberration of the optical system with a relatively simple construction, without using the interference method.

Abstract: A device for testing a camera module with an actuator is provided. The testing device includes a light emitter, a testing lens member, a light receiver, and a processor. The light receiver emits test light to the camera module. The testing lens member serves as a lens unit of the camera module in a testing process. The testing lens member includes a first lens, and a second lens detachably connected to the first lens. The first lens and the second lens respectively insert into the camera module from two opposite sides of the camera module, and abut two opposite sides of the actuator. The light receiver receives test light emitted from the light emitter and passed through the camera module. The processor determines a quality of the camera module according to the test light received by the light receiver.

Abstract: The present disclosure describes techniques for testing optical devices in a manner that, in some implementations, simulates the environment in which the devices will be used when they are integrated into the end-product or system. For example, one aspect includes providing a transparent sheet that is positioned near the optical device in a manner that simulates at least some aspects of the environment when the device is incorporated into the end-product or system. The testing can be performed, for example, while the optical devices are in production or at some other time prior to their being integrated into an end-product or system.

Abstract: A clamping device includes a first plate and a second plate. The first plate includes an upper surface, a lower surface facing away from the upper surface and a first side surface. The upper surface is substantially parallel with the lower surface. The first side surface perpendicularly connects the upper surface and the lower surface. The first plate defines a receiving cavity at a joint of the upper surface and the first side surface. The second plate is detachably connected to the first plate. The second plate includes a top surface and a second side surface. The second side surface perpendicularly connects to the top surface. The second plate defines a sloped surface extending from the top surface to the second side surface. The sloped surface aligns with the receiving cavity. The second plate includes a reflective layer positioned on the sloped surface.

Abstract: An inspecting system for inspecting a lens module includes an inspection device; and a transmitting and loading device. The transmitting and loading device includes a grasping assembly, a supporting assembly, a sliding assembly loaded on the supporting assembly, and a control unit for controlling the grasping assembly and the sliding assembly. The grasping assembly is configured to clamp the lens module and to load the lens module on the sliding assembly, and the sliding assembly is adapted to transfer the lens module to a testing position of the inspection device.

Abstract: An eyeglass support is adapted for pinch-holding the eyeglass (5) between three first contact portions (41-43) and three second contact portions (61-63). The first contact portions form a height reference for positioning the eyeglass whereas the second contact portions ensure application of the eyeglass against the first contact portions while conforming to any possible shape for the eyeglass. The support suits for being incorporated in a reflection measurement apparatus. In particular, it is useful for measuring reflection of eyeglasses provided with antireflecting coatings or for rating a protection against UV hazards which is provided by an eyeglass to a wearer of the eyeglass.

Abstract: A method and an apparatus serve for visualizing a signature mark on a spectacle lens. In order to identify the signature mark, an illumination light beam is directed onto the spectacle lens, which impinges on the spectacle lens, after impinging on the spectacle lens is reflected at a retroreflector, impinges once again on the spectacle lens, and finally is passed as an observation light beam to a camera. A reflection region of the illumination light beam on the reflector is varied by means of a moved first optical element.

Abstract: A camera module test and focus controlling apparatus includes: a base with four actuators therein; a socket frame on one upper side of the base, and rotated by a first actuator; socket boards on both sides of the frame, lifted and lowered by a second actuator, and mounted with a camera module; a collet unit on the upper part of the base, disposed in vertical alignment with the boards, and rotated by a fourth actuator on the base; a rotational shaft on the base upper part, and connected to one side of a third actuator; a plate on an upper part of the shaft rotated by the third actuator, having a lens and an illuminating unit thereon; a first chart unit on the plate; and a second chart unit parallel with the base upper part, fixed to an upper part of a connection member vertically extended from the base.

Abstract: An aberration detector for a lithographic apparatus is used. An imaging device captures an image of at least one pinhole feature of a target projected onto the imaging device by the projection system of the lithographic apparatus at two different locations separated in a direction parallel to the optical axis of the projection system. A controller obtains a representation of the aberration of the projection system from the captured images.

Abstract: An apparatus for measuring a thickness of a lens is disclosed. The apparatus includes a first support, a second support, a third support, a first positioning element, a second element and a measuring element. The lens is disposed on the third support. The first positioning element is fixed to the first support to press against a first face of the lens beforehand. The second positioning element is movably mounted to the second support. The second positioning element can move towards the lens to press against a second face of the lens. The measuring element calculates the thickness of the lens according to the moving distance of the second positioning element.

Abstract: A pupil splitting lens that splits a pupil of a light beam from a deflector into a plurality of light beams in a main scanning direction of the deflector and a pupil splitting lens that splits the light beam into a plurality of light beams in a sub-scanning direction are disposed relative to a light detection element. The light detection element detects image forming positions of the four light beams formed as a result of the splitting by the plurality of pupil splitting lenses. A CPU determines the amount of focus shift and the amount of image forming position shift from these four image forming positions.

Abstract: A lens module testing device includes a base substrate, a supporting assembly, a bearing assembly, a receiving element, and an operation element. The supporting assembly is positioned on the base substrate and includes two supporting plates parallel with each other. One of the supporting plates defines an arc shaped slot. The bearing assembly is rotatably received between the two supporting plates. The receiving element is positioned on the bearing assembly and configured for receiving a lens module. The operation element penetrates the slot and connects to the bearing assembly; the bearing assembly is driven by the operation element to move along the slot and thereby adjusting the angle of the lens module which is presented to a light source.

Abstract: An apparatus for measuring a thickness of a lens is disclosed. The apparatus includes a first support, a second support, a third support, a first positioning element, a second element and a measuring element. The lens is disposed on the third support. The first positioning element is fixed to the first support to press against a first face of the lens beforehand. The second positioning element is movably mounted to the second support. The second positioning element can move towards the lens to press against a second face of the lens. The measuring element calculates the thickness of the lens according to the moving distance of the second positioning element.

Abstract: A method of controlling a light beam in an optical system includes a light source that directs a collimated light beam along a path, through a sample, and toward the active area of a stationary detector. The method includes the step selectively moving a lens into the path of the light beam for spreading the beam in instances where the path of the beam is altered by the sample between the source and the stationary detector. The detector, therefore, is held stationary. Adjustment means are provided for increasing the intensity characteristic of the light that reaches the detector to account for a decrease in intensity that occurs when the lens is in the path of the light beam to spread the beam.

Abstract: An embodiment of a system and a method for inspecting a contact lens is provided. The illumination system illuminates the center zone and the peripheral zone of the contact lens when it is inside a cavity between a male mold and a female mold. The imaging optical system has two channels to capture two images or a composite single image to inspect the entire contact lens. The imaging optical system of the first channel has its entrance pupil far away from the mold tool. The camera of the first channel is used to capture the image of the center zone of the contact lens. The image optical system of the second channel is located outside the mold tool but its entrance pupil is located inside the mold tool or outside but substantially close to it. This enables the camera of the second channel to capture the image of the peripheral zone of the contact lens.

Abstract: A wavefront aberration measuring method forms a plurality of spot images by causing light, which is transmitted through a test optical system, to be incident on a lenslet array, and measures positions of the spot images. Optical paths from the positions of the measured spot images toward a light source are calculated, parameters of the test optical system when light rays from the positions of the spot images converge at the light source are specified, and a wavefront aberration of the test optical system corresponding to the parameters of the test optical system is calculated.

Abstract: A wavefront aberration measuring method forms a plurality of spot images by causing light, which is transmitted through a test optical system, to be incident on a lenslet array, and measures positions of the spot images. Based on the measured positions of the spot images, a wavefront aberration of the test optical system is calculated. When the positions of the spot images are measured, at least one lenslet forming the lenslet array is shielded from light, and the spot images are measured.

Abstract: A detection apparatus and method for testing optical performance of beam shaping element used in ultraviolet lithography machine; The apparatus comprises visible wavelength laser and other optical units placed along the optical axis including, in order from laser side, (a) beam expander lens group, (b) beam splitter, (c) first far field imaging lens, (d) adjustable aperture or (e) CCD image sensor, (f) second far field imaging lens and (g) energy sensor. The detection apparatus is suitable be employed to detect the optical performance of beam shaping element working at any ultraviolet band, and provides the features of low cost, easy operation and quick measurement.

Abstract: A method and apparatus provide identification of a spherical error of a microscope imaging beam path in a context of microscopic imaging of a sample using a microscope having an objective. A coverslip that carries or covers the sample is arranged in the imaging beam path. A measurement beam is guided through the objective onto the sample in a decentered fashion that is outside an optical axis of the objective. The measurement beam is reflected at an interface of the coverslip with the sample and the reflected measurement beam is guided through the objective onto a detector. An intensity profile of the reflected measurement beam is detected with the detector and a presence of a spherical error from the intensity profile is determined qualitatively and/or quantitatively.

Abstract: Cavity enhanced absorption spectroscopy systems and methods for detecting trace gases using a resonance optical cavity, which contains a gas mixture to be analyzed, and a laser coupled to the cavity by optical feedback. The cavity has any of a variety of configurations with two or more mirrors, including for example a linear cavity, a v-shaped cavity and a ring optical cavity. The cavity will have multiple cavity resonant modes, or a comb of frequencies spaced apart, as determined by the parameters of the cavity, including the length of the cavity, as is well known. Systems and methods herein also allow for optimization of the cavity modes excited during a scan and/or the repetition rate.

Abstract: A device for supporting an optical coupling lens for testing includes a platform, a first contacting member fixedly mounted on the platform, a second contacting member moveably mounted on the platform, and a pressing member positioned on the platform. The platform defines a supporting recess which is configured for supporting the optical coupling lens firmly and in a particular orientation during testing, by means of spring pressure.

Abstract: A measuring member has a first face and a plurality of first marks arranged on the first face. The first marks have respective orientations corresponding to their positions in a first direction.

Abstract: Improving the optical state of a progressive addition lens along a principal line of vision through which the line-of-sight of a wearer passes by making the displacement of a position at which an optical state becomes the best to be the same as the amount of inward movement of line-of-sight, when the wearer moves his line-of-sight from the front far distance to the front near distance. An expression OI<DH may be satisfied to improve such an optical state of the progressive addition lens.

Abstract: An examination kit allows for discovery of the axis of direction and stress areas of polarized lenses. The kit comprises a lower light box with a transparent work surface, two polarized film sheets, a dial gauge with notches defining allowable variation of axis direction and an upper polarized lens for viewing the tested polarized lens in various states and positions.

Abstract: A schematic eye is used for the evaluation of the optical system of an optical coherence tomography apparatus which captures a tomogram of the fundus. The eye includes a first optical member which irradiated light from the optical system strikes and a second optical member which irradiated light from the first optical member strikes. A plurality of layers having different scattering intensities in the incident direction of irradiated light are formed on the second optical member.