Abstract: An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.

Abstract: An inspection system is disclosed. The system includes a controller communicatively couplable with an inspection sub-system configured to receive illumination from a sample and generate image data. The controller includes one or more processors configured to execute program instructions causing the one or more processors to receive the image data, wherein the image data comprises at least one image, downsample the at least one image using bicubic interpolation or bilinear interpolation, transform the at least one image from a spatial domain to a frequency domain using a Fourier transform, filter frequencies higher than a threshold frequency from the at least one image, transform the at least one image from the frequency domain to the spatial domain using an inverse Fourier transform, and detect one or more flat-pattern defects in the at least one image.

Abstract: A method for analyzing an interaction between a sample surface and a drop of liquid comprises applying the drop of liquid to the sample surface and illuminating the drop of liquid using at least two light sources. The at least two light sources are each arranged at a light source position surrounding the drop of liquid. Light reflected from the drop of liquid detecting and a sensor position on a sensor of a camera is determined for each detected light reflection. Light source positions are assigned to individual light source positions. A position of the drop of liquid is calculated relative to the sensor and an item of size information of the drop of liquid is determined. The position and the item of size information are calculated from the pairs of one sensor position and one associated light source position.

Abstract: Embodiments of the present disclosure provide an array substrate comprising a base substrate, a buffer layer disposed on the base substrate, an interlayer dielectric layer disposed on the buffer layer, and a protection layer disposed on the interlayer dielectric layer, where the array substrate further comprises a plurality of first test units and a plurality of test leads. The plurality of test leads are connected to the plurality of first test units in a one-to-one correspondence, and the plurality of test leads are disposed in at least two different layers. A method for manufacturing an array substrate, a display panel, and a display device are further provided.

Abstract: A climate control system for a vehicle comprises a defroster assembly having a temperature sensor that detects an interior temperature of an interior of the vehicle, a camera disposed within the interior that has a lens facing a windshield, and at least one vent directed at the windshield. A body controller that, responsive to a temperature of the interior being less than a temperature threshold, and a light refractive index of the windshield being less than an opacity threshold, outputs a status of the windshield. A telematics communication system that, responsive to the status from the body controller, transmits a notification to an application stored on a mobile telecommunications device.

Abstract: Dust accumulation monitors are provided to autonomously monitor dust accumulations. The dust accumulation monitors include a casing having a translucent portion, a light sensor configured to output a sensing signal based on sensed light penetrating through the translucent portion, a controller coupled to the light sensor to receive the sensing signal and configured to output a dust alert signal based on the received sensing signal, and a communication interface coupled to the controller and configured to output an alert based on the dust alert signal output by the controller. A dust accumulation monitoring system includes a plurality of dust accumulation monitors, and a central monitor communicatively connected to each of the plurality of dust accumulation monitors and configured to receive dust sensing signals from each of the plurality of dust accumulation monitors. The dust accumulation monitors may communicate through wired or wireless links with the central monitor.

Abstract: A vehicle window for separating a vehicle interior from outer surroundings, includes glass pane with a light guide body made of glass on a region of the interior-side surface of the glass pane, wherein the surface of the light guide body facing the glass pane and the surface facing away from the glass pane enclose a wedge angle such that the thickness of the light guide body decreases in the direction from a lower edge to an upper edge of the glass pane, wherein the light guide body is secured to the interior-side surface of the glass pane by means of laser welding.

Abstract: A method for detecting heavy rain in images includes providing a series of images as input information, the images relating to a scene external to a vehicle viewed through a pane of the vehicle. A measure of blur is evaluated in an area of interest in the images. The method also includes analyzing the course of the measured blur values over time in order to detect transitions between images with low blur values and images with high blur values or vice versa. Heavy rain may then be detected from the detected transitions and information output in response to the heavy rain being detected.

Abstract: During an assay, optical measurements are made at a sensing surface (112), and at least one “homogeneity-image” of the sensing surface (112) is generated. From this image, an “homogeneity-indicator” is determined for at least one region of interest, and the optical measurements are then evaluated in dependence on said indicator. The homogeneity-indicator may for example be a binary value which indicates if an inhomogeneity was detected or not. If an inhomogeneity was detected, all optical measurements may be rejected, only measurements for the involved region of interest may be rejected, or measurements for a selected sub-area of the involved region of interest (ROI) may be rejected.

Abstract: A particle detection system includes a light source configured to emit a light beam into a cylindrical glass article when the cylindrical glass article is imaged by the glass particle detection system. The light beam is directed along a beam propagation axis that is perpendicular to a longitudinal axis of the cylindrical glass article. The particle detection system further includes a first polarizer positioned between the light source and the cylindrical glass, a camera configured to capture an image of the light beam reflected from the cylindrical glass article, and an analyzer positioned between the cylindrical glass article and the camera. An optical axis of the camera is perpendicular to the beam propagation axis of the light source.

Abstract: The present invention provides a meter and method of use for measuring an optical attenuation coefficient in a liquid medium. In operation, a collimated beam, produced by a laser of the attenuation meter apparatus, propagates thru the liquid medium with filtered back-scattered light arriving at a camera of the meter. A light image is formed at a focal plane of the camera. The light image is recorded and analyzed by a microcomputer to provide optical beam attenuations coefficients.

Abstract: The present disclosure describes methods and systems for passive detection of wide-spectral-band laser emissions. One method includes receiving optical energy from an emission source at a surface of an object, transmitting the received optical energy through the surface using a detection patch coupled to the surface, the detection patch incorporating an exterior terminating end of each of one or more of a plurality of optical fibers embedded in a casting, transmitting the optical energy to a light sensor using a light pipe coupled to interior terminating ends of the one or more optical fibers, and analyzing, by operation of a computer, the optical energy received at the light sensor.

Abstract: The present invention provides a meter and method of use for measuring an optical attenuation coefficient in a liquid medium. In operation, a collimated beam, produced by a laser of the attenuation meter apparatus, propagates thru the liquid medium with filtered back-scattered light arriving at a camera of the meter. A light image is formed at a focal plane of the camera. The light image is recorded and analyzed by a microcomputer to provide optical beam attenuations coefficients.

Abstract: A device and method for subaperture stray light detection and diagnosis. A test light beam is generated. Stray light is detected. Based on the detected stray light, potential paths that light may have taken to arrive at the detection surface are determined. A testing device comprises a test light beam source whereby the cross sectional area of the test light beam is made less than the cross sectional area of the system aperture. A relative lateral positioning stage and an angular beam directing stage launch the test light beam into the aperture. A detector and a data processing system produce a data set relating the stray light to the location and directional angles of the test light beam to identify the sources of stray light. A light trap and test light beam delivery system are provided.

Abstract: There is provided an optical raindrop detector including a light source, a light guide, an image sensor and a processing unit. The light source alternatively emits light with different brightness values. The light guide has an incident surface, a detection surface and an ejection surface, wherein the light source emits incident light into the light guide via the incident surface, and a plurality of microstructures are formed on the ejection surface to reflect the incident light to become scattered light toward the detection surface. The image sensor receives reflected light formed by raindrops in front of the detection surface reflecting the scattered light to penetrate the light guide and eject from the ejection surface, and generates image frames corresponding to the different brightness values of the light source. The processing unit calculates differential images of the image frames to accordingly identify rain intensity.

Abstract: The present invention discloses an inspecting device for detecting whether there is an appearance of debris on a surface of a glass substrate, including a laser unit, a platform, and an image sensor unit. The surface of the platform is coated with a light-absorbing material so as to absorb laser beams penetrating through the glass substrate to prevent the image sensor unit from receiving the reflected laser beam from the underside of the glass substrate. Besides, the present invention discloses an inspecting apparatus for detecting whether there is an appearance of debris on a surface of a glass substrate, using the inspecting device given above, and a method for conducting inspection. The inspecting device features a simplified configuration; the method is easy to operate; and the device can effectively prevent the background interference from the underside of glass substrates when determining whether there is an appearance of debris on top surfaces of glass substrates.

Abstract: The present invention discloses an inspecting device for detecting whether there is an appearance of debris on a surface of a glass substrate, including a laser unit, a platform, and an image sensor unit. The suface of the platform is coated with a light-absorbing material so as to absorb laser beams penetrating through the glass substrate to prevent the image sensor unit from receiving the reflected laser beam from the underside of the glass substrate. Besides, the present invention discloses an inspecting apparatus for detecting whether there is an appearance of debris on a surface of a glass substrate, using the inspecting device given above, and a method for conducting inspection. The inspecting device features a simplified configuration; the method is easy to operate; and the device can effectively prevent the backgrotmd interference from the underside of glass substrates when determining whether there is an appearance of debris on top surfaces of glass substrates.

Abstract: Disclosed is an apparatus for characterizing attributes of a moving glass sheet comprising complementary mechanical material handling technologies that progressively stabilize, position, capture, flatten, and release the lower portion of glass sheets traveling past the apparatus while posing minimal constraint on the top section of the sheet. The apparatus includes a pressure-vacuum (PV)-type device comprising distinct regions such that the glass sheets experience a non-contact but gradual increase in constraining force until the point where measurements can be performed, then a gradual decrease in constraining force until the glass sheets are released from the inspection station. This graduated force technique is applied along the direction of travel of the sheets and may also be applied vertically upwards along the height of the sheet to restrict the motion of the sheet without constraining it at pinch points near the conveyor.

Abstract: A method for detecting a foreign particle trapped between substrates of a liquid crystal display panel, by which a potential short caused by the particle can be made into a short with reliability, and thus it is possible to make a display defect manifest itself that is caused by the particle. The method is for detecting the presence of a foreign particle trapped between flexible substrates (21, 26) of a liquid crystal display panel (20), between the substrates liquid crystals filled, and the method includes making the panel pass between supporting rollers (3) arranged to support one surface of the panel, and a pressing roller (4) disposed at a position opposed to a space between the supporting units and arranged to press the other surface of the panel, bending the panel, and displacing the substrates with respect to each other in their surface directions.

Abstract: During rain, including a light source (5) for radiating light such that the light is transmitted through a vehicle window (2), a light receiving element (6) for sensing an optical signal when the light radiated from the light source (5) is reflected from the raindrop fallen on the vehicle window (2) and performing a photoelectric transduction, and a receiver (9) for receiving the photoelectrically transduced signal from the light receiving element (6) and judging the level of rainfall. The light source (5) and the light receiving element (6) are inclined with respect to the surface of the vehicle window (2) such that the light of the light source (5) directly reflected from the vehicle window (2) exits to the outside of the light receiving element (6) and the light reflected from a raindrop (8) on the vehicle window (2) is received by the light receiving element (6) to operate a vehicle wiper.

Abstract: A monitoring system is disclosed, designed to detect the depth of deposition of a substance on a? surface (12), such as the depth of dust in a ventilation shaft. The monitoring system includes a light source (14) and a sensor (16, 30). The light source is arranged to transmit light across a detection surface and the sensor is on the other side of the detection surface. When a substance, such as dirt or grease, is deposited on the surface it obstructs the light and the amount of light reaching the sensor decreases. A processing means (26) detects the decrease in light and from this the depth of the deposition on the surface can be calculated. Preferably the sensor comprises a CCD array (32), and the substance throws a shadow on the array. The processing means can then determine the depth of the substance from the position on the array of the edge of the shadow. Preferably the monitoring system is placed in a low power ‘sleep’ mode in between intermittent operations for detecting the depth of the substance.

Abstract: A fire alarm consists of a housing in which sensors, a radiation source, and an optical window are disposed. A reflector protection basket or ring is disposed above the optical window. The basket or ring is suitable for protecting the optical window against mechanical influences, allows UV and IR radiation to pass through to a sufficient degree, and reflects UV and IR radiation from the housing interior, on its inside. Monitoring of the contamination of the window, function monitoring of the sensors and of the signal processing electronics, as well as easy replaceability of the components in the fire alarm are provided.

Abstract: A photomask inspection method that identifies a foreign particle such as dirt on a photomask with high sensitivity by suppressing erroneous identification due to an influence of noise is provided. The photomask inspection method includes acquiring image data of a photomask having regions with different layer structures on a surface thereof, creating inverted image data by subtracting the image data from pixel value data of the regions, creating offset inverted image data by raising pixel values of the inverted image data by a fixed amount, creating normalized correlation image data by computing a normalized correlation of the offset inverted image data and an offset Gaussian distribution-type kernel, and identifying foreign particles by comparing the normalized correlation image data and a predetermined threshold.

Abstract: An optical keyless entry sensor system and method includes an optical sensor in association with a mirror that reflects light transmitted from the optical sensor, wherein reflected light is detectable by the optical sensor. An attenuation filter can be located between the mirror and the optical sensor, wherein the attenuation filter is configured to simulate a contamination of the optical sensor in order to determine an exact level of attenuation representative of contamination that causes a performance failure of the optical sensor, thereby providing data which is indicative of a dynamic range of the optical sensor, such that the dynamic range is utilized to enhance the performance of the optical keyless entry sensor system.

Abstract: A spatial mask printer may be used in conjunction with an optical inspection tool. The tool can be used to obtain a Fourier image of an inspected object, and a filter mask image can be designed to block certain aspects of the object's image in the Fourier plane corresponding to repetitive aspects of the imaged object. The filter mask image can then be printed and used in the tool during the inspection process. The mask image may be designed by hand or by computer and may be stored for later use. Filters may be automatically placed into the optical path of the inspection tool by a filter wheel, or may be housed in other filter banks. The printer may be configured to operate in a clean room environment, and may be integrated into the optical inspection tool.

Abstract: An apparatus for detection of the existence of a film on a surface comprises a lens, a light emitter and a light sensor. The light emitter is preferably disposed in spaced relation to the lens and is configured to emit light toward the lens such that the light is incident thereupon. The light sensor is also preferably disposed in spaced relation to the lens and is mounted adjacent to the light emitter. The light sensor is configured to measure light reflected back from the lens. The presence or absence on the film on the surface is based upon the amount (i.e., intensity) of light that is reflected back from the lens. The apparatus may further comprise a temperature sensor or atmospheric sensor for measuring a temperature of the lens and atmospheric conditions in order to determine whether conditions are appropriate for the formation of ice, frost and other frozen contaminants.

Abstract: An inspection apparatus includes a projecting unit, a first receiving unit, a second receiving unit, and a controller. The projection unit is configured to project linear light on a surface of an object. The first and second receiving units are configured to receive scattered light of the projected linear light. The controller is configured to scan the projecting unit, the first and second receiving units and determine the present or absence of a foreign substance on the surface based on intensity distribution signals output from the first and second receiving units.

Abstract: The invention is directed to a method for illuminating an object and projecting its image on a ground glass screen. Optical comparators conventionally use incandescent illumination, either mercury arc or halogen. The use of an array of high intensity LED devices, provides many options for packaging the required optical components used in comparators.

Abstract: The present invention relates to an apparatus for detecting defects on a disk surface which projects light on the disk surface by a light transmitting system, receives specula reflection light and scattered light by a light receiving system, exposes defects by performing a two-dimensional frequency filter process on a signal, and performs a defect determination process to extract a linear-shaped isolative defect candidate. Next, the present invention performs a periodicity determination process to classify and detect the periodically generated linear and circular arc defects and the isolatively generated linear and circular arc defects.

Abstract: An optical sensor device for detecting ambient light is adapted to be coupled to a pane (10), in particular to a windshield of a motor vehicle. The optical sensor device has a sensor unit which includes at least one light receiver (26) and a lens plate (12). By means of the sensor unit, an ambient light beam having entered the pane (10) is coupled out of the pane (10) and directed onto the light receiver (26). On a surface (12b) which faces the pane (10), the lens plate (12) includes a first Fresnel prism structure (22) having a plurality of individual structures (24). The individual structures (24) of the first Fresnel prism structure (22) are designed such that they deflect the light beam at different angles.

Abstract: An inspection apparatus includes a stage allowing an inspection subject to be mounted thereonto, an illumination unit for emitting diffused light to the inspection subject, an imaging unit disposed to face the illumination unit with the inspection subject interposed therebetween, for taking the diffused light that is emitted from the illumination unit and is transmitted through the inspection subject, a first prism sheet disposed between the inspection subject and the illumination unit and having a first prism surface with a plurality of prisms aligned in a stripe pattern to face the illumination unit, a second prism sheet disposed between the illumination unit and the first prism sheet and having a second prism surface with a plurality of prisms aligned in a stripe pattern to face the first prism surface.

Abstract: The condition of a glazing panel (2) is investigated using a viewing device (1) to view an illuminating electromagnetic radiation profile at a target zone. Data relating to the viewed radiation profile is compared to datum data, to produce an output related to the condition of the glazing panel at the target zone.

Abstract: A method for detecting raindrops on a windscreen, which uses a camera, which is fitted inside the vehicle opposite the windscreen and which is focused at infinite. The method comprises steps of acquiring images by a camera through the windscreen, camera preferably focused at infinite, retrieving the contours of the spots present on the acquired images, and realizing the histogram of the widths of contours of the spots.

Abstract: Apparatus and methods for detecting residue on a glass substrate and method of use are disclosed. The apparatus comprises a substrate support, a sensor, a controller and a peripheral device in communication with the controller. The apparatus measures the height or thickness of a main surface and an edge delete surface of a substrate to determine if film residue is present on the edge delete surface.

Abstract: A method for inspecting a transparent substrate provides an index-matching fluid between an index-matched optical coupler and a surface of the transparent substrate. The method repeats, at two or more positions along the surface of the transparent substrate, steps of illuminating an inspection volume within the transparent substrate by directing a ribbon of light through the optical coupler and into the transparent substrate and detecting scattered light from the inspection volume at a detector that is optically conjugate with the inspection volume.

Abstract: Scratches, pits and particles which are smaller or larger than the beam size may be measured and identified by a single and dual multiple beam techniques. In one embodiment, this the invention uses a pair of orthogonally oriented white light beams, one in the radial and one in the circumferential direction. The scattered light from the radial and circumferential beams allows the detection and classification of particles, pits and scratches. In other embodiments, single beam techniques are used to classify radial and circumferential defects.

Abstract: Computer-implemented methods for detecting defects in reticle design data are provided. One method includes generating a first simulated image illustrating how the reticle design data will be printed on a reticle using a reticle manufacturing process. The method also includes generating second simulated images using the first simulated image. The second simulated images illustrate how the reticle will be printed on a wafer at different values of one or more parameters of a wafer printing process. The method further includes detecting defects in the reticle design data using the second simulated images. Another method includes the generating steps described above in addition to determining a rate of change in a characteristic of the second simulated images as a function of the different values. This method also includes detecting defects in the reticle design data based on the rate of change.

Abstract: A device for optoelectronic monitoring of an object (26) contains a transmitting unit (12) and a receiving unit (14) that are located in a housing (10) covered by a faceplate (16). The transmitting unit (12) emits light beams (24) in a structured illuminating pattern. The illuminating pattern of the illuminated object (26) is recorded on an image recorder (28) by the receiving unit (14). Soiling (38) on the faceplate (16) is indicated by recording the light beams (24) diffusely scattered at the faceplate (16) on the image recorder (28).

Abstract: When measuring an edge region, a photo detector with an angle not influenced by the diffracted light, the diffracted light causing noise, is selected to thereby allow for inspection that minimizes the sensitivity reduction. This allows for the management of foreign matters in the outer peripheral portion, which conventionally could not be measured, and this also eliminates the oversight of critical defects on the wafer, thus leading to reduction of failures of IC.

Abstract: An optoelectronic sensor device is described for recording of soiling on a transparent cover, with at least one light source that emits at least two light beams, a test surface arranged in the cover, having a concave surface exposed to environmental effects, through which the light beams emerge and reenter, as well as at least one receiver that measure the radiation powers of the light beams, on which the light beams are imaged independently of each other after reentry.

Abstract: The invention generally relates to a compact, inexpensive-to-manufacture, device of few components for optically inspecting a surface and a method for same employing the device. The section of the surface to be investigated is illuminated by a semitransparent mirror and a field lens, employing a telecentric beam path, and at least part of the light reflected or scattered by the surface is imaged onto the entrance pupil of the optics of an electronic camera by the field lens, via the semitransparent mirror. All optical and electronic components, along with a light- and dust-tight housing, are carried on a specially configured mounting block such that they are self-aligning. The method for inspecting a surface involves automatically recording a series of images of the surface under various types of illumination situations. Those images are assembled into an image of the entire section of the surface to be investigated and analyzed using known image-processing methods.

Abstract: An optical sensor device includes a photoconductor structure having first and second partial members (16, 18) and a coupling surface (20) for coupling the optical sensor device to an opposing counter surface of a pane (22), particularly a windscreen of a motor vehicle. The optical sensor device further includes an optical transmitter (10) coupling a beam of rays into the first partial member (16), an optical receiver (12) receiveing a beam of rays emerging from the second partial member (18), and a printed circuit board (14) arranged parallel to the coupling surface (20). The transmitter (10) and the receiver (12) are arranged on the printed circuit board (14). The photoconductor structure is designed so that the central ray (28) of the transmitter (10) enters into the first partial member (16) perpendicularly to the coupling surface (20) and emerges from the second partial member (18) perpendicularly to the coupling surface (20).

Abstract: An apparatus and method for detecting defects in a transparent substrate by simultaneously using a combination of bright field and dark field light sources for illuminating the substrate. The apparatus is capable of detecting both inclusions and surface defects simultaneously while the substrate is in motion, simplifying the characterization of substrates in a manufacturing setting.

Abstract: Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.

Abstract: Inclusions in a transparent panel (5) are detected by placing a light transmissive interface (3) in contact with the panel (5), and transmitting a beam of light (1) through interface (3) into panel (5). Within the panel (5), the light beam (7) propagates along a path including total internal reflections at surfaces of panel (5). When the light beam (1) intercepts inclusions (10) or other defects at least some of it is scattered, and leaves the panel (5). This scattered light is then observed. Thus, a large zone of the panel (5) can be inspected, with light only being detected in the case that it arises from scattering by inclusions or other defects.

Abstract: A dark field surface inspection tool and system are disclosed herein. The tool includes an illumination source capable of scanning a light beam onto an inspection surface. Light scattered by each inspection point is captured as image data by a photo detector array arranged at a fourier plane. The images captured are adaptively filtered to remove a portion of the bright pixels from the images to generate filtered images. The filtered images are then analyzed to detect defects in the inspection surface. Methods of the invention include using die-to-die comparison to identify bright portions of scattering patterns and generate unique image filters associated with those patterns. The associated images are then filtered to generate filtered images which are then used to detect defects. Also, data models of light scattering behavior can be used to generate filters.

Abstract: In order to accurately measure a shape feature of a minute droplet arranged on a substrate by a simple method, with respect to the droplet, the substrate is perpendicularly irradiated with laser light to cause diffracted light fluxes generated during passage of the laser light through the droplet to interfere with each other, so that a diffraction pattern is obtained. The diffraction pattern formed on a screen of a detector as an image is picked up by an image pickup apparatus. The shape feature of the droplet is measured by using the resultant diffraction pattern and a refractive index of the droplet.

Abstract: The present invention relates to a sheet-surface analyser (10) including illuminating means (32) for casting shadows on the sheet-surface; capturing means (36) for capturing an image of the shadows; analysing means (40) for analysing the captured image to thereby analyse the sheet surface; and curving means (22) for curving the sheet, wherein the illuminating means and the curving means are configured to enable the illuminating means to cast shadows on a curved part of said sheet-surface, and the capturing means is configured to capture said shadow-image.

Abstract: A conventional problem in which inspection performance deteriorates as a transparent plate material becomes larger is solved.

Abstract: A method and apparatus for measuring the particle diameter of foam on a malt alcoholic drink, which can detennine the quality of the foam of the malt alcoholic drink objectively, are provided. The apparatus for measuring the particle diameter of foam on a malt alcoholic drink according to the present invention includes a laser light source for irradiating a linear laser beam onto the surface of a foam layer created on a malt alcoholic drink, an imaging device for imaging a laser line reflected on the surface of the foam layer to obtain an image of the laser line, and a calculating device for obtaining edge information of the laser line from the image of the laser line to calculate the particle diameter of foam in the foam layer based on the edge information.