Abstract: An absolute distance measurement apparatus and method using laser interferometric wavelength leverage includes a light source system, a wavelength-leverage laser interferometric system and an interference signal processing and controlling system. The light source system outputs a orthogonally linearly polarized beam with the wavelength ?1 and the wavelength ?2. The orthogonally linearly polarized beam projects onto the wavelength-leverage laser interferometric system to form the interference beam. The interference beam projects onto the interference signal processing and controlling system. In the wavelength-leverage laser interferometric system, the synthetic wavelength and the single wavelength as well as the measured absolute distance and the moving displacement of the cube-corner prism in the reference arm form a wavelength-leverage absolute distance measurement relationship.

Abstract: A method and apparatus used for general purpose problem solving using entanglement properties of holography. Intelligent point-based entities having spatial and other electromagnetic properties called DROPLETS [Data-Representative-Object-Particle(s)-Liking-EnTanglement] are generated as delegate objects—avatars—connected to data sources representing situations, event or other problems. A DROPLET's properties are controlled by changes in input data, self-state, feedback, and/or changes of other DROPLETS. Coherent rays are introduced and interact with DROPLETS, generating an INTELLIGENCE WAVEFRONT. Interference patterns are recorded and converted to binary machine codes of a near-infinite set, instructing where to store human/machine-readable content within a plurality of associative memories. Said content includes waveforms, harmonics, codes, data, and other holograms, which are dispersed and stored wholistically throughout using spread spectrum techniques.

Abstract: Generating a composite image of a non-flat surface includes: acquiring, using a microscope, multiple images of different areas of the non-flat surface, where each image includes a region of overlap with at least one adjacent image, the microscope having sufficient resolution to image in three dimensions a microstructure on the non-flat surface having a lateral dimension of 10 microns or less and a height of 10 nm or less; determining, for each of the images, a set of rigid body parameters relating a position and orientation of the test object in the image to a common coordinate system, where the set of rigid body parameters is determined by fitting the resolved microstructure in the overlap region in the image with the corresponding microstructure in the overlap region of the adjacent image; and combining the images based on the sets of rigid body parameters to generate a composite image.

Abstract: A portable inspection probe for the inspection of a recessed mating surface of an optical fiber connector is provided. In one variant, the portable inspection probe includes a digital holographic detection module operable to digitally record a hologram of the recessed mating surface, and a rigid probe tip configured to be optically coupled to the digital holographic detection module and shaped to provide optical access to the recessed mating surface. In another variant, the portable inspection probe is to be used with a rigid probe tip connectable thereto, and the digital holographic detection module includes a probing optical assembly not traversed by a reference beam and configured to direct an object beam onto the recessed mating surface and to collect the object beam upon reflection thereof by the recessed mating surface. An inspection system and an inspection method are also provided.

Abstract: A display system (300) comprising an optical system and a processing system. The optical system comprising a spatial light modulator (380), a light source, a Fourier transform lens, a viewing system (320, 330) and a processing system. The spatial light modulator is arranged to display holographic data in the Fourier domain, illuminated by the light source. The Fourier transform lens is arranged to produce a 2D holographic reconstruction in the spatial domain (310) corresponding to the holographic data. The viewing system is arranged to produce a virtual image (350) of the 2D holographic reconstruction. The processing system is arranged to combine the Fourier domain data representative of a 2D image with Fourier domain data representative of a phase only lens to produce first holographic data, and provide the first holographic data to the optical system to produce a virtual image.

Abstract: A tunable light source having a temporal coherence length such that interference fringes are detected within the optical path difference of the interferometer is spectrally controlled to produce multiple wavelengths during sequential fractions of the integration time of the detector of the interferometer. The wavelengths are selected so as to produce a visible correlogram at each integration time according to spectrally controlled interferometry (SCI) principles. Such different wavelengths may be produced by stepwise or continuous modulation. The modulation step is repeated sequentially while changing the period of modulation to produce a succession of predetermined spatial patterns of interference fringes, as required for interferometric measurements. The approach enables the practice of SCI with common-path apparatus used for conventional phase shifting, thereby combining the advantages of high-coherence and white-light interferometry.

Abstract: Current apparatuses and methods for analysis of spectroscopic optical coherence tomography (SOCT) signals suffer from an inherent tradeoff between time (depth) and frequency (wavelength) resolution. In one non-limiting embodiment, multiple or dual window (DW) apparatuses and methods for reconstructing time-frequency distributions (TFDs) that applies two windows that independently determine the optical and temporal resolution is provided. For example, optical resolution is provided. For example, optical resolution may relate to scattering information about a sample, and temporal resolution may be related to absorption or depth related information. The effectiveness of the apparatuses and methods is demonstrated in simulations and in processing of measured OCT signals that contain fields which vary in time and frequency. The DW technique may yield TFDs that maintain high spectral and temporal resolution and are free from the artifacts and limitations commonly observed with other processing methods.

Abstract: An optical test apparatus includes a three-dimensional dome, light sources and a control unit. The three-dimensional dome covers a field of view of an image acquisition device. The image acquisition device is a test target device. The light sources are dispersedly arranged on the three-dimensional dome and generate a predetermined image on the three-dimensional dome. The first control unit controls the light sources.

Abstract: A dual-modality apparatus for imaging of biological tissue includes a reflectance confocal microscopy (RCM) imaging apparatus and an optical coherence tomography (OCT) imaging apparatus. A first optical component reflects a first beam of light provided by a RCM imaging apparatus towards a sample and passes a second beam of light provided by an OCT imaging apparatus towards the sample, such that the first and second beam of lights share at least a portion of an imaging path.

Abstract: A device for real-time thickness inspection is provided. An optical interferometric technique is used. Measurement requirements in rapid online thickness inspection can be satisfied. An object is measured in a non-contact and non-destructive way. For measuring, an optical spherical wavefront is radiated on the object in an oblique angle. The interference fringe pattern (IFP) thus imaged on a screen is directly related to the thickness distribution of the object. The phase difference on the same horizontal cross section in the IFP monotonically decreases from the light source side to the other side. Accordingly, phase unwrapping can be effectively performed without using phase shift. The present invention achieves rapid on-line thickness inspection through the optical path of interference without using optical lens groups and special optical elements.

Abstract: The autofocus device for a sample observation device provided with an objective is provided with a photodetector, an autofocus optical system that includes a tube lens, that guides light to one of two regions of a pupil plane of the objective that has been divided into two, and that guides light that has passed through the other region after being reflected by a sample to the photodetector, and a light shielding member which is arranged between the tube lens and a light receiving plane of the photodetector and on which an aperture has been formed. The autofocus device satisfies 2.1<?AP/(2·?LD), where ?AP represents a diameter of the aperture and ?LD represents a light flux diameter, on the light shielding member, of light reflected by the sample in a state in which the light is condensed on the light receiving plane.

Abstract: A method includes loading a substrate into a sensing chamber; while the substrate is in the sensing chamber, performing a spectral analysis of the substrate; transferring the substrate between the sensing chamber and a processing chamber coupled to the sensing chamber; processing the substrate in the processing chamber to form at least a first layer and/or pattern on the substrate; and based on at least the spectral analysis, determining whether a parameter resulting from the formation of first layer and/or pattern is satisfied.

Abstract: A tunable light source having a temporal coherence length such that interference fringes are detected within the optical path difference of the interferometer is spectrally controlled to produce multiple wavelengths during sequential fractions of the integration time of the detector of the interferometer. The wavelengths are selected so as to produce a visible correlogram at each integration time according to spectrally controlled interferometry (SCI) principles. Such different wavelengths may be produced by stepwise or continuous modulation. The modulation step is repeated sequentially while changing the period of modulation to produce a succession of predetermined spatial patterns of interference fringes, as required for interferometric measurements. The approach enables the practice of SCI with common-path apparatus used for conventional phase shifting, thereby combining the advantages of high-coherence and white-light interferometry.

Abstract: An ophthalmic instrument for the application of laser radiation in a patient's eye, particularly for the examination and/or surgical laser treatment of the cornea and the lens of the eye, includes a femtosecond laser, an objective and optical assemblies. The optical assemblies are arranged in front of the objective selectively vary the focus position in the coordinate direction X,Y and Z either within the region of the cornea or within the region of the lens of the eye. The objective or at least one lens group is movable relative to the eye. The variation of the position of the lens group or objective shifts the focus position from the cornea to the lens of the eye and vice versa.

Abstract: A system for measuring transparent optical elements includes a beam generator, optomechanics, an imaging module, and a logic unit. The beam generator is driven to emit a beam directed at a transparent optical element that is aligned by optomechanics. An image is captured of the beam after the beam reflects off of surfaces of the transparent optical element. The image is analyzed to measure tolerances of the transparent optical element.

Abstract: This invention discloses using one or more color-encoded fringe patterns for optically, three-dimensionally measuring an object's shape. In one embodiment, a color-encoded fringe pattern comprising a plurality of fringes that are modulated in intensity is configured as follows. An individual fringe selected from the fringes comprises a colored line at a location on the fringe width. The colored line has a line width that is substantially narrower than the fringe width in order that the colored line has a substantially similar intensity over the line width. The individual fringe excluding the colored line has a fringe color that is substantially uniform over the individual fringe. The fringe color is substantially different from the line color. Fringe colors of all the fringes are substantially similar, thereby enabling a major portion of the color-encoded fringe pattern to provide a substantially-uniform illumination color for projection onto the object.

Abstract: Methods and systems for measuring asymmetric surface topology are described. In one aspect, a method includes directing a test beam including a spherical wave front along an optical axis to reflect from a test surface; combining the test beam reflected from the test surface with a reference beam to form an interferogram on a detector, where the test and reference beams are derived from a common source; and recording the interferogram for each of multiple lateral displacements of the test surface relative to the optical axis. For each recorded interferogram, the curvature of the spherical wave front at the test surface substantially matches a local curvature of the test surface along a first axis orthogonal to the optical axis, and the multiple lateral displacements of the test surface each include a component along a second axis orthogonal to each of the first axis and the optical axis.

Abstract: An aberration-compensated image of an object field is created by generating a full-field complex hologram of the object field, generating a guide star complex hologram of a guide star selected from the object field, performing mathematical correlation between the guide star complex hologram and the full-field complex hologram, and generating from the correlation an aberration-compensated image of the object field from the correlation.

Abstract: The conventional white-light interferometer, confocal microscope, and ellipsometer are integrated as one device set in a functional sense, and the geometrical parameters conventionally measured may be deduced on the integrated device. Thus, the advantages and efficacies of equipment cost saving, on-line measuring, rapid monitoring, reduced manufacturing time, and reduced possibility of object damage during the manufacturing process may be secured, compared with the prior art.

Abstract: An interferometry system includes: a light source, defining a coherence length, an interferometer configured to combine measurement and reference beams to form an output beam, where the interferometer includes a dispersion imbalance between measurement and reference paths large enough to produce a coherence envelope for the system having a width more than twice the coherence length; a phase modulation device configured to introduce a variable phase between the measurement and reference beams; a detector; imaging optics to direct the output beam to the detector and produce an image of the measurement surface; and an electronic processor electronically coupled to the phase modulation device and the detector and configured to record multiple interference signals corresponding to different locations on the measurement surface, in which the interference signals are based on the intensity of the output beam as a function of the variable phase for the different locations of the measurement surface.

Abstract: In one embodiment, generating an aberration-compensated image of an object field includes generating a full-field complex hologram of the object field, generating a guide star complex hologram of a guide star selected from the object field, performing mathematical correlation between the guide star complex hologram and the full-field complex hologram, and generating from the correlation an aberration-compensated image of the object field from the correlation.

Abstract: Systems and methods are disclosed for optical coherence tomography (OCT). For example, imaging can use optical phase modulators based on optical delay lines that, in conjunction with a swept-source laser, can be used to achieve heterodyne swept source optical coherence tomography (SSOCT). These techniques resolve the complex conjugate ambiguity in SSOCT, thereby doubling the usable imaging range. This increased imaging range has numerous important clinical applications in ophthalmology, cardiology and radiology, as well as applications in small animal and non-biological imaging. These methods are superior to prior disclosed methods requiring acousto-optic or electro-optic modulators with respect to complexity, efficiency, imaging speed and image quality.

Abstract: Systems and methods for conformal imaging vibrometry capable of real-time measurements of the dynamic motions of any arbitrary two-dimensional or three-dimensional structure. The disclosed systems and methods are able to fully characterize the dynamic behavior of an object of any arbitrary geometry. The test object is illuminated with multiple laser beams whose directions conform to the local normal axis of the surface. The approach enables high-speed vibration imaging of whole-body dynamics of arbitrarily shaped structures in real-time, with no multiplexed data capture or synthesized motion reconstruction, as is currently practiced. By measuring the object's vibrations simultaneously at multiple points, the disclosed systems and methods are able to reproduce the structural behavior under operational conditions, which can then be spectrally decomposed to determine the modal, complex modal and transient nature of the true structural dynamics.

Abstract: Embodiments of the invention provide a method of determining one or more characteristics of a target object, comprising determining a first phase map for at least a region of a target object based on radiation directed toward the target object, determining one or more further phase maps for a sub-region of the region of the target object, determining a number of phase wraps for the sub-region based on a plurality of phase maps for the sub-region, and determining a characteristic of the region of the target object based on the number of phase wraps for sub-region and the first phase map. Embodiments of the invention also relate to a method of determining one or more characteristics of a target object, comprising determining a phase map for at least a region of a target object based on one or more diffraction patterns, determining a wavefront at a plane of the object based upon the phase map, and determining a refractive property of the object based on the wavefront.

Abstract: Current apparatuses and methods for analysis of spectroscopic optical coherence tomography (SOCT) signals suffer from an inherent tradeoff between time (depth) and frequency (wavelength) resolution. In one non-limiting embodiment, multiple or dual window (DW) apparatuses and methods for reconstructing time-frequency distributions (TFDs) that applies two windows that independently determine the optical and temporal resolution is provided. For example, optical resolution may relate to scattering information about a sample, and temporal resolution may be related to absorption or depth related information. The effectiveness of the apparatuses and methods is demonstrated in simulations and in processing of measured OCT signals that contain fields which vary in time and frequency. The DW technique may yield TFDs that maintain high spectral and temporal resolution and are free from the artifacts and limitations commonly observed with other processing methods.

Abstract: The present disclosure provides detection devices and methods using a diffraction wavefront of a pinhole stitching measurement of surface shape. The light emitted from the laser passes through a filter hole, a first condenser lens, a spatial filter, a beam expander, a half wave plate, a ?/4 wave plate, an attention plate and then is transmitted through a beam splitter, reflected by a reflecting mirror and is irradiated onto an pinhole through a first optical adjustable shelf and a second set of condenser lens. A part of diffraction light generated by the pinhole is irradiated to the mirror to be measured; the light reflected by the mirror to be measured is reflected by a frame of the pinhole and generate a diffraction fringe along with another part of the diffraction wavefront of the pinhole. The interference fringe is focused by the third set of condenser lens on the third optical adjustable shelf and is collected by the CCD detector.

Abstract: Provided are an apparatus and a method for measuring a three dimensional shape with improved accuracy. The apparatus includes a stage, at least one lighting unit, a plurality of image pickup units and a control unit. The stage supports an object to be measured. The lighting unit includes a light source and a grid, and radiates grid-patterned light to the object to be measured. The image pickup units capture, in different directions, grid images reflected from the object to be measured. The control unit calculates a three dimensional shape of the object from the grid images captured by the image pickup units. The present invention has advantages in capturing grid images through a main image pickup portion and sub-image pickup portions, enabling the measurement of the three dimensional shape of the object in a rapid and accurate manner.

Abstract: In-situ calibration of an interferometer includes making a sequence of phase measurements of a test object using the interferometer, each of the measurements having a same carrier fringe frequency, where at least some of the measurements are made at three or more different orientations of carrier fringes, and determining information about the test object based on at least some of the phase measurements, in which determining the information includes reducing errors in the measurements arising from imperfections in the interferometer based on the measurements made at the three or more different orientations.

Abstract: A spark optical emission spectrometer comprising: a spark source for causing spark induced emission of light from a sample; a single entrance slit; a toroidal mirror for directing the light through the single entrance slit; a plurality of diffraction gratings for diffracting light that has been directed through the entrance slit by the mirror, whereby the plurality of diffraction gratings are simultaneously illuminated; and at least one array detector for detecting the diffracted light from the plurality of diffraction gratings, wherein the minor is for directing the light through the entrance slit such that light from different regions in the spark source is spatially separated in an image of the light at the gratings whereby a first diffraction grating is preferentially illuminated with light from a first region of the spark source and simultaneously a second diffraction grating is preferentially illuminated with light from a second region of the spark source.

Abstract: A property of a material is determined. The material is illuminated with a light beam of controlled spectral and coherence properties. A stack of speckle field images is recorded from speckle fields reflected from the illuminated material in multiple spectral channels. The stack of speckle field images includes multiple speckle field images each being recorded in a respectively different spectral channel. Statistical properties of the speckle field images in the stack of speckle field images are analyzed to determine at least one property of the illuminated material.

Abstract: A measurement apparatus including a convergence unit for converging the electromagnetic wave to the object; a detection unit for detecting electromagnetic waves from the object; and an adjustment unit for adjusting a relative position between the object and the convergence position set by the convergence unit in a detecting region selected by using interval information about an interval between a first electromagnetic wave from the first reflecting surface and a second electromagnetic wave from the second reflecting surface, the first and second electromagnetic waves being acquired by using a detection result of the detection unit, in which the detecting region is a region in which a measurement position of the object at the time of detecting electromagnetic waves from the object is determined based on relative position information selected from and by using a plurality of pieces of information on the relative position corresponding to the interval information.

Abstract: The present invention provides a method of measuring a shape of a target surface, including a step of obtaining shape data by causing a stage which holds the target surface to rotate the target surface about a rotation axis, positioning each of a plurality of partial regions of the target surface in a field of view of a measurement apparatus, and causing the measurement apparatus to measure each of the plurality of partial regions, a step of obtaining, for each of a plurality of partial contour regions, a central position of the target surface using data of a contour included in the shape data, and a step of obtaining, based on the obtained plurality of central positions, a position of the rotation axis of the target surface in positioning each of the plurality of partial regions.

Abstract: In-situ calibration of an interferometer includes making a sequence of phase measurements of a test object using the interferometer, each of the measurements having a same carrier fringe frequency, where at least some of the measurements are made at three or more different orientations of carrier fringes, and determining information about the test object based on at least some of the phase measurements, in which determining the information includes reducing errors in the measurements arising from imperfections in the interferometer based on the measurements made at the three or more different orientations.

Abstract: To eliminate influence of undesirable light component from an object when measuring optical characteristics such as shape and wavefront aberration of the object, light from light source (101) is separated by polarization beam splitter (103) into measuring light (L1) that irradiates and travels via the object (108) and is condensed on image plane (P) through microlenses (114a) of microlens array (114), and reference light (L2) that does not irradiate the object and is guided to the image plane by reference light optical system (109). A computer (113) acquires picked-up images sequentially from CCD image sensor (116) arranged on the image plane while changing optical path length of the reference light by movable stage (117), extracts interference light spots generated through interference between signal light component and the reference light from the picked-up images, calculates positions of the interference light spots, and calculates deviation amounts of positions from predetermined reference positions.

Abstract: The disclosure is directed to various apodization schemes for pupil imaging scatterometry. In some embodiments, the system includes an apodizer disposed within a pupil plane of the illumination path. In some embodiments, the system further includes an illumination scanner configured to scan a surface of the sample with at least a portion of apodized illumination. In some embodiments, the system includes an apodized pupil configured to provide a quadrupole illumination function. In some embodiments, the system further includes an apodized collection field stop. The various embodiments described herein may be combined to achieve certain advantages.

Abstract: The present invention discloses a wavelength scanning interferometer and a method for an aspheric surface measurement. The wavelength scanning interferometer comprises a set of tunable lasers (7) used as a light source, a Twyman-Green interferometer used for generating interference fringes, a translation platform (1) used for scanning an optical path difference along an optical axis, an image card (11) used for converting interference data to a digital signal and transmitting the digital signal to a computer (12), and a data card (13) used for synchronizing the actions of a CCD camera (9) and the translation platform (1). Different from the traditional aspheric surface measurement method, the interferometer is capable of measuring a surface with a high aspheric surface degree or a wavefront, and without the need of a zero compensation mirror. In addition, the method does not need a complex and usually expensive multi-dimensional movement platform.

Abstract: An image forming apparatus comprises: a sensor that includes a light-emitting part for emitting light to a moving body and a light-receiving part; a light-incidence adjusting mechanism that is able to alternatively select from a first state where the light-incidence adjusting mechanism causes light which have been emitted from the sensor and then reflected by the moving body to enter the sensor and a second state where the light-incidence adjusting mechanism causes a reflected light of light emitted from the sensor not to enter the sensor; and a processing unit that causes the sensor to emit light, and corrects output of the sensor when the light-incidence adjusting mechanism is in the first state on the basis of output of the sensor when the light-incidence adjusting mechanism is in the second state.

Abstract: Systems, methods, and software for determining a set of analytical or numerical polynomials that is orthonormal over circular or noncircular pupils are described. Closed-form orthonormal polynomials for circular, annular, hexagonal, elliptical, rectangular, and square pupils are derived. Such techniques can be applied to ray tracing as in the optical design and wavefront fitting from measurement as in the optical testing. These approaches can also be applied to wavefront reconstruction in adaptive optics.

Abstract: A micro-machined optical measuring device including: a set of photosensitive detector elements situated on a given face of a first support; a second support, assembled to the first support, forming a prism and including a first face through which a visible radiation is intended to penetrate and a second face, forming a non-zero angle ? with the first face and a non-zero angle ? with the given face of the first support, the second face being semi-reflective, the first support and the second support being positioned such that an interferometric cavity is made between the second face and the given face, the distance between the given face of the first support and the second face of the second support varying regularly.

Abstract: A system for generating extreme ultraviolet light may include a chamber, a target supply device configured to supply a target material into the chamber, a laser apparatus configured to output a laser beam to irradiate the target material, a wavefront adjuster configured to adjust a wavefront of the laser beam, an imaging optical system configured to focus the laser beam reflected by the target material, an image detector configured to capture an image of the laser beam focused by the imaging optical system, and a controller configured to control the wavefront adjuster based on the captured image.

Abstract: The method for measuring profile of an aspheric surface projects an illumination light onto the aspheric surface and introduces a reflected light reflected by the aspheric surface to a sensor through an optical system. The method provides, to a wavefront of the illumination light, a curvature bringing an absolute value of an angle of the reflected light to a smaller value than a maximum value of absolute values of angles of optical system side peripheral rays, locates an exit pupil such that the absolute value of the reflected light angle is smaller than the maximum value, provides, to a sensor conjugate surface, a curvature and a position causing rays of the reflected light not to intersect on the sensor conjugate surface. The sensor conjugate surface, the wavefront of the illumination light and the aspheric surface have a same one of convex and concave surfaces toward a same direction.

Abstract: The method includes: measuring a first wavefront of a reference light on a sensor by using the sensor; calculating a second wavefront of the reference light on the sensor by using a parameter of an optical system; changing an optical system parameter in calculation such that a difference between rotationally symmetric components of the first and second wavefronts becomes smaller; calculating, by using the changed parameter, a magnification distribution of rays of the reference light between on the sensor and on a sensor conjugate surface; measuring a first ray angle distribution of the reference light by using the sensor, and measuring a second ray angle distribution of a measurement light by using the light-receiving sensor. The method calculates the profile of the measurement object aspheric surface by using the profile of the reference aspheric surface, the first and second ray angle distributions and the magnification distribution.

Abstract: The present invention is directed to a system and method for on-line real-time measuring the surface topography and out-of-plane deformation by using phase-shifting shadow moiré method. Digital Phase-Shifting Shadow Moiré Method is applied to a system, which receives the reflected images from the surface of transparent or non-transparent plate projected under a light beam passing through a grating. Next, by image correction program, the skewed interference fringe pattern is recovered to the image as if the image acquisition equipment is placed normal to the surface. Furthermore, the received images are processed with Phase-Shifting to show the surface topography of the plate.

Abstract: A grazing incidence interferometer includes a light source, a light beam divider configured to divide original light coming from the light source, an illuminator configured to apply measurement light to a measurement subject, a light beam combining module configured to combine the measurement light reflected from the measurement subject with reference light, and a photodetector configure to detect a combined light beam. The grazing incidence interferometer includes an interferometer main body, a stage configured to hold the measurement subject, a moving mechanism capable of moving the interferometer main body along the measurement subject, and an auxiliary reflector disposed on an extension of an axis of movement of the interferometer main body, an auxiliary light beam separator configured to separate auxiliary light from the original light and to apply the auxiliary light to the auxiliary reflector, and an auxiliary photodetector configured to detect the auxiliary light reflected by the auxiliary reflector.

Abstract: A method distributing data in a network is provided. The method comprises measuring the path lengths between a reference clock and a plurality of remote destinations and sending a timing signal from the reference clock to the plurality of remote destinations. The method further comprises measuring the phase between the reference clock and a return signal from each of the plurality of remote destinations and adjusting the phase of the data such that each remote destination receives the data within a skew tolerance.

Abstract: Provided herein is a TSV measuring interferometer that uses a variable field stop that adjusts such that a light is focused at an inlet and at a bottom surface of a TSV when measuring a diameter and depth of the TSV, thereby reducing a measurement time and result data, the interferometer also using a telecentric lens that adjusts the light injected into the TSV to be a straight line, so as to obtain a sufficient amount of light reaching the bottom surface to improve the accuracy of measurement even in a TSV having a large aspect ratio.

Abstract: Apparatus and methods for performing wavefront-based and profile-based measurements of an aspheric surface are disclosed. The apparatus includes an interferometric wavefront measurement system that collects wavefront-based measurement data of the aspheric surface. The apparatus also includes a profile measurement system that performs at least one non-contact profile-based measurement of the aspheric surface to collect profile-based measurement data of the aspheric surface. The measurements are performed without removing the aspheric element from a rotatable base. The two measurements are then used to form a combined measurement of the aspheric surface.

Abstract: An Integrated Laser Field Conjugation System (ILFCS) for end-to-end compensation of high-energy laser for propagation through turbulence with non-cooperative target. ILFCS using interferometric slaving technique and stand-alone adaptive optical systems to effect pre-compensation of amplitude and phase aberrations in turbulent medium, providing pre-compensation for aberrations in a laser amplifier. Performing compensation functions in low-power beam paths, increasing capability, reducing cost, reducing size compensation components for phase correction devices. Pre-compensating low-power master oscillator beam for aberrations in both high-power amplifier and turbulent propagation path-to-target with configuration enabling wavefront sensing of aberrations. Can be configured to perform phase compensation, or compensation of phase/amplitude aberrations. Capability to compensate aberrations in master oscillator beam.

Abstract: Apparatus and methods for detecting optical profile are disclosed herein. In one embodiment, an apparatus includes a laser, a beam splitter, a collimation optical unit, first and second holders respectively holding a first test flat mirror and a second test flat mirror, a phase shifter connected with the first holder, and an angular measurement unit for measuring an angular error of the first test flat mirror and the second test flat mirror on the two holders. The first test flat mirror has a first test flat and the second test flat mirror has a second test flat. The apparatus further includes a planar imaging unit for generating the interfered test light having a direction generally along an x-axis direction of the first test flat and an x-axis direction of the second test flat and a convergence optical unit for projecting the interfered test light onto a detector.

Abstract: The properties of a surface of an object in presence of thin transparent films are determined by generating a library of model signals and processing a measurement signal via searching the library to evaluate films properties and topography. The library may be reduced with principal component analysis to enhance computation speed. Computation enhancement may also be achieved by removal of the height contributions from the signal leaving only the film contribution in the signal. The film measurement signal is compared to a library of film signals to determine the film parameters of the sample. The library of film signals is produced by processing each full signal in a library to similarly remove the height contributions leaving only the film contributions. Additionally, a post-analysis process may be applied to properly evaluate local topography.