Abstract: A vibration-actuated micro mirror device comprises a substrate, a swinging frame, a reflection mirror, and a vibration part. The swinging frame is rotatably arranged within a first accommodating space formed on the substrate. The reflection mirror is rotatably arranged within a second accommodating space formed on the swinging frame. The vibration part further comprises a plate coupled to the substrate, and a first and a second vibration structures. The first and the second vibration structures are coupled to the plate and are spaced a distance away from each other, wherein the first vibration structure receives a first driving signal having a first frequency and the second vibration structure receives a second driving signal having a second frequency smaller than the first frequency, thereby enabling the swinging frame to rotate about the first axis while enabling the reflection mirror to rotate about the second axis.

Abstract: A clipping detection device calculates an amplitude distribution of an input signal for each predetermined period, calculates a deflection degree of the distribution on the basis of the calculated amplitude distribution, and then detects clipping of a communication signal on the basis of the calculated deflection degree of the distribution.

Abstract: Disclosed are a light scanning unit and a method of synchronizing the scanning operation of such light scanning unit. The light scanning unit includes a deflection mirror that is driven to oscillate so as to deflect and scan a light beam in a bidirectional scanning path. The synchronization of a scanning operation may be made at least in part in consideration of the direction of flow of the current that is supplied to drive the deflection mirror to oscillate.

Abstract: A mirror driving circuit applies a voltage to drive a mirror and switches an optical path of light output from a channel of an input port to a channel of an output port. The mirror driving circuit includes an offset-voltage applying unit that applies an offset voltage to the mirror, an applied-voltage determining unit that determines an applied voltage to be applied to the mirror based on a relation between the channel of the input port and the channel of the output port forming a path of the light, and a voltage applying unit that applies to the mirror a remaining voltage obtained by subtracting the offset voltage from the applied voltage.

Abstract: A method for providing feed forward compensation in a drive signal for a rapid resonant frequency change due to a rapid LASER intensity change upon a micro-electro-mechanical system (MEMS) mirror and/or a surrounding MEMS structure in a MEMS scanner causing a mirror temperature change is provided. The method includes determining an intensity factor for at least one laser beam projected onto the MEMS scanner and adjusting a drive frequency of the drive signal based on the intensity factor. The intensity could represent a single intensity factor for multiple laser beams projected onto the MEMS scanner. The method could also include delaying the adjustment of the drive frequency to allow the resonant frequency change to take affect in the MEMS scanner. Delaying the adjustment could include delaying delivery of the intensity factor such that the intensity factor is provided coincident with the resonant frequency change of the MEMS scanner.

Abstract: An optical deflector has: a movable plate having a reflecting surface and a side surface; and a support portion that supports the movable plate in such a manner that the movable plate is able to rotate around a predetermined axis, in which the side surface of the movable plate is recessed toward the axis.

Abstract: The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.

Abstract: A light scanning device includes a movable section having a light reflecting section adapted to reflect light, oscillating around an oscillation axis, and having a variable magnitude of a maximum deflection angle of the oscillating, and a detection section adapted to detect the maximum deflection angle of the movable section, and the detection section includes a light source adapted to emit light to the light reflecting section, a light receiving section adapted to receive reflected light, which is the light emitted from the light source and then reflected by the light reflecting section, and a displacement driving section adapted to change a position of the light source in accordance with the maximum deflection angle of the movable section.

Abstract: An optical scanning device of the invention includes: a substrate main body; two cantilever beam portions which protrude from both-side portions of one side of the substrate main body; a mirror portion whose both-sides are supported by torsion bar portions between the cantilever beam portions; a drive source which causes the substrate main body to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to a substrate by the drive source, and a direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, and where a fixed end portion of the substrate main body which is located on the opposite side thereof from the mirror portion side is fixed to a supporting component, and the drive source is provided on a portion of the substrate main body.

Abstract: An optical scanning device of the present invention includes: an oscillating mirror that reflects incident light; a first beam unit that is coupled to one end of the oscillating mirror; a second beam unit that is coupled to another end of the oscillating mirror; a first driving unit that is coupled to the first beam unit, is disposed between the first beam unit and the first adjusting unit, and that causes the oscillating mirror to oscillate; and a first adjusting unit that is coupled to the first driving unit, and adjusts a modulus of elasticity of the first beam unit by elastically deforming the first beam unit.

Abstract: An optical scanning device includes: a first scanning; a first scanning mirror driving unit; a light emission signal output unit; a light receiving unit; and a phase control unit which controls the first scanning mirror driving unit so as to delay a phase of the oscillation of the first scanning mirror when the light receiving unit outputs the detection signal before intermediate time in a case where the light receiving unit does not output the detection signal during a predetermined period of time, the phase control unit controlling the first scanning mirror driving unit so as to advance a phase of the oscillation of the first scanning mirror when the light receiving unit outputs the detection signal after the intermediate time in the case where the light receiving unit does not output the detection signal during the predetermined period of time.

Abstract: An optical scanning element is provided and includes: a substrate; a first movable section supported on the substrate so as to be capable of rocking displacement about a first axis parallel to a surface of the substrate; a second movable section arranged integrally on the first movable section and supported so as to be capable of rocking displacement about a second axis perpendicular to the first axis, the second movable section having a micro mirror on an upper surface thereof; and a driving section that applies a physical action force on the first movable section and the second movable section so as to cause the micro mirror to perform rocking displacement in two axial directions about the first axis and the second axis.

Abstract: Methods and apparatus include improving print quality of a bi-directionally scanning electrophotographic (EP) device, such as a laser printer or copy machine, according to ambient pressure in which operated. A moving galvanometer or oscillator reflects a laser beam to create scan lines of a latent image in opposite directions. A damping of the motion occurs per air density implicated by temperature and pressure, where the pressure changes occurring especially from altitude changes. During use, a drive signal, such as a pulse train, moves the galvanometer or oscillator at or near its resonant frequency. Based on a parameter of the drive signal, such as pulse width, the ambient pressure can be made known. In general, a high-pressure environment requires a relatively longer pulse width to resonate the galvanometer or oscillator in comparison to a shorter pulse width for a low-pressure environment. Corrections to print quality stem from the determined ambient pressure.

Abstract: An optical reflecting element includes a mirror, and a pair of high-frequency vibrators and a pair of low-frequency vibrators for vibrating the mirror. The high-frequency vibrators include a substrate, a bottom electrode layer formed on the substrate, a piezoelectric layer, and a drive electrode and a first monitor electrode as the top electrode layer. One end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, and a second monitor electrode as the top electrode layer. The other end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, a first monitor electrode, and an insulator layer as a dead zone for preventing a piezoelectric effect due to the piezoelectric layer from reaching the first monitor electrode.

Abstract: In a two-dimensional optical deflector comprising a mirror and a support body surrounding the mirror, first and second piezoelectric actuators of a meander-type are provided opposite to each other with respect to a first axis of the mirror. Each of the first second piezoelectric actuators comprising a plurality of piezoelectric cantilevers folded at every piezoelectric and connected from the support body to the mirror. Each of the piezoelectric cantilevers are in parallel with the first axis. Each of the piezoelectric cantilevers includes first and second piezoelectric cantilever elements in parallel with each other combined by a substrate. The second piezoelectric cantilever elements are divided into a first group of piezoelectric cantilever elements and a second group of piezoelectric cantilever elements alternating with the first group of piezoelectric cantilever elements.

Abstract: In a piezoelectric transducer element, on a base body having a fixing part and a movable part which are connected with each other, a piezoelectric body which is sandwiched between a lower electrode and an upper electrode is formed in a state where the piezoelectric body extends between and over the fixing part and the movable part of the base body. The piezoelectric body converts a change in potential between the lower electrode and the upper electrode into mechanical displacement of the movable part relative to the fixing part or the mechanical displacement into the change in potential. The upper electrode includes a pad electrode for connection which is formed above the fixing part, and the lower electrode is not formed in a region above the fixing part and below the pad electrode.

Abstract: An oscillating device includes an oscillator, an elastic supporting member for movably supporting the oscillator, a first supporting frame for supporting the elastic supporting member, and a second supporting frame extending along the elastic supporting member with a spacing maintained therebetween, the second supporting member extending from the first supporting frame, wherein the second supporting frame is provided in a cantilever shape relative to the first supporting frame.

Abstract: The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.

Abstract: A micro-electro-mechanical system (MEMS) mirror device has a mirror, a frame rotatively coupled to the mirror, and a biaxial actuator rotatively coupled to the frame where the actuator is able to rotate about the rotational axes of the mirror and the frame with the mirror.

Abstract: A MEMS device, a printer and a method of printing is presented including providing a light source producing a modulated beam of light, positioning a mirror with a reflective surface to intercept the modulated beam of light. Allowing the mirror to rotate on a single-axis hinge structure such that the resultant reflected beam is swept in a scan plane and creating an image at an intersection of the scan plane and an image plane. Causing the mirror to rotate about the single-axis hinge structure and to oscillate at a tilt about the single-axis hinge structure, wherein the resultant reflected beam of light forms a lemniscate pattern along the image plane, and wherein the lemniscate pattern has an inner angle between a left sweep segment and a right sweep segment of the image.

Abstract: A drive signal generator includes: a first storage part which stores data related to a primary processing signal acquired by subjecting a linearly changing saw-tooth signal to the low-pass filter processing; a parameter decision part which decides a parameter for the notch filter processing; a filter part which generates a secondary processing signal by subjecting the primary processing signal read from the first storage unit to the notch filter processing using the decided parameter decided by the parameter decision part; a second storage part which stores data related to the secondary processing signal generated by the filter unit; and a drive signal generation part which reads the data related to the secondary processing signal with a clock having a predetermined frequency and generates the drive signal by subjecting the data related to the secondary processing signal to analog conversion.

Abstract: A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.

Abstract: An optical scanning device, having: a substrate main body; two cantilever beams protruded from the respective side portion of one side of the substrate main body; a mirror supported by torsion bars from the respective side, between the cantilever beams; a drive source to causes the substrate main body to vibrate; and a light source to project light onto the mirror, wherein a fixed end of the substrate main body is fixed to a supporting member, on the opposite side from the mirror side, and wherein the mirror resonantly vibrates according to vibration applied to the substrate by the drive source, thereby to change a direction of reflection light of the light projected onto the mirror from the light source according to the vibration of the mirror, characterized in that a Si mirror is attached to and fixed on the mirror.

Abstract: The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.

Abstract: For enabling to prevent ill effects from being generated in the structures of a reflection mirror, even if increasing an output energy from a light source, thereby preventing ill influences from being exerted on the driving condition thereof, a mirror drive controller unit 7 reads out history data of the past, relating to temperature changes on a micro mirror 1, from a first LUT holder unit 19. Upon basis of the read-out history data of the past is presumed the temperature on the micro mirror 1 at the present time. The presumed temperature on the micro mirror 1 is temperature P temp of the micro mirror 1 at the present time, and upon that P temp are changed vibration (or oscillation) condition of the micro mirror 1 in the horizontal (H) direction and vibration (or oscillation) condition thereof in the vertical (V) direction.

Abstract: An amplified bimorph scanning mirror for use in various optical systems, an optical coherence tomography scanner incorporating the amplified bimorph scanning mirror, and a method for manufacturing the foregoing are described. A method for optically scanning a target site using the amplified bimorph scanning mirror is further provided. The scan range which can be obtained by exemplary implementations of the present invention can be larger than the scan range made available by conventional scanners.

Abstract: An oscillator device includes at least one movable element supported for oscillatory motion around a rotational axis, and a first rectifying member for suppressing generation of a spiral airflow during oscillation of the movable element, the first rectifying member being provided to occupy a space of at least a portion of a spiral airflow generating region which might otherwise be created when the first rectifying member is not provided there.

Abstract: An oscillator device includes a supporting member, an oscillation system having plural oscillators and plural torsion springs, a driving device for oscillating the oscillation system, a drive control device for controlling the driving device, an oscillation detecting device for detecting a state of oscillation of an oscillator of the oscillation system, a resonance frequency calculating device for calculating a resonance frequency of the oscillation system based on an output of the oscillation detecting device, and a control parameter adjusting device for adjusting a control parameter of the drive control device, wherein the control parameter adjusting device adjusts a control parameter based on an output of the resonance frequency calculating device.

Abstract: A method for generating a drive signal for a micro-electro-mechanical system (MEMS) scanner is provided. The method includes generating the drive signal for the MEMS scanner using a direct digital synthesis, numerically-controlled oscillator. For a particular embodiment, the drive signal is generated by receiving a summation of (i) an initial control word and (ii) an accumulated correction signal generated based on a comparison of a horizontal drive signal for the MEMS scanner and a horizontal sensor signal received from the MEMS scanner. The summation is added to a phase accumulator output, an address is extracted from the phase accumulator output, and a digital lookup table output is addressed based on the extracted address. The digital lookup table output is converted into an analog signal with a digital-to-analog converter, the analog signal is filtered to generate the drive signal, and the horizontal drive signal is generated based on the drive signal.

Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Abstract: A Micro Electronic Mechanical System (MEMS) scan controller generating clock frequency and a control method thereof are disclosed. The MEMS scan controller is for a MEMS mirror in a bi-direction laser scanning units (LSU). By detecting resonant frequency of the MEMS mirror, the scan controller sends frequency modulation signal and amplitude modulation signal of the MEMS mirror to a bridge circuit of the MEMS mirror for adjusting and stabilizing the MEMS mirror. A clock signal corresponding to the resonant frequency of the MEMS mirror at the moment is also sent so that scan data is sent within the effective scanning window in forward direction/reverse direction. Thus high-precision scanning is achieved.

Abstract: A drive mechanism @is comprised with a set comprising a plurality of magnetic bodies, means for supplying a frequency signal to said set, and means for producing movement caused by the attraction/repulsion between the magnetic bodies. The movement is the driving source of the drive mechanism.

Abstract: Implementations of actuators that use flexures to provide support to the actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that include a magnet stator and a coil rotor mounted on a flexure.

Abstract: An optical scanning device of the invention includes: a substrate; a torsion bar portion which is connected to the substrate; a mirror portion which is supported by the torsion bar portion; a drive source which causes the substrate to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to the substrate by the drive source, a direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, the drive source is provided on a portion of the substrate at a distance from a connected portion where the substrate is connected to the torsion bar portion, and a substrate shape control device which controls the shape of the substrate itself is provided on the substrate.

Abstract: A light scanning unit includes: a light source; a beam deflector to form forward direction and reverse direction scanning lines on an image section and first and second non-image sections respectively disposed at opposite sides of the image section; a reflecting member to reflect the light beam input from the beam deflector; a light detector to receive a first light beam directly input from the beam deflector and a second light beam input via the reflecting member; a control unit to determine whether the scanning line is a forward direction scanning line or a reverse direction scanning line based on signals respectively corresponding to the first and second light beams detected in the light detector, and to control the light source so that a light beam including image information corresponding to a scanning direction of the scanning line can be emitted; and a synchronization adjusting unit to correct an alignment error between the forward direction scanning line and the reverse direction scanning line due to

Abstract: An optical reflection element has a frame-shaped supporting body, a first oscillator and a second oscillator each having a meander shape, and a mirror portion. A line segment connecting a joining position between the mirror portion and the first oscillator to a joining position between the supporting body and the first oscillator, and a line segment connecting a joining position of the mirror portion and the second oscillator to a joining position of the supporting body and the second oscillator cross a mirror portion central axis. An outer circumference of at least any one of turn portions of the first oscillator and the second oscillator is deviated from a first end portion axis that is parallel to the mirror portion central axis and extends along a first side of the mirror portion.

Abstract: An optical scanning device includes a dot clock generator which generates a dot clock having a dot clock cycle corresponding to a scanning direction of an optical flux by dividing master clocks which constitute basic clocks with frequency-dividing-number corresponding to a scanning position. The dot clock generator changes, with respect to a group of dot clocks which is formed of plural sets of dot clocks in which a frequency-dividing-number sequence pattern of the set of dot clocks which is constituted of two or more continuous dot clocks is repeated plural times on one scanning line, the frequency-dividing-number sequence pattern of each set of dot clocks while maintaining a total value of frequency dividing numbers necessary for generating each set of dot clocks at a constant value.

Abstract: The resonance frequency of a forced torsionally oscillating mirror MEMS device can be controlled in the presence of perturbations by means of a closed loop feedback device and method of using it. The method is implemented through a simple algorithm, implemented in either software or hardware, that maintains the condition of resonance, or another selected frequency, by recursively determining that the center of the driving voltage pulse is positioned at a point on the measured positional waveform of the oscillating system.

Abstract: A mirror device drive control apparatus adapted to perform drive control of a mirror device having a hysteresis characteristic.

Abstract: An optical reflection element includes a mirror portion and an oscillator coupled to the mirror portion. The oscillator includes a base, an insulating layer, a drive element, and a monitor element. The insulating layer is formed on the base. The drive element and the monitor element are formed on the insulating layer, and are separated from each other by a separation groove. Each of the drive element and the monitor element includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in that order on the insulating layer. The monitor element has high detection accuracy, allowing the optical reflection element to perform self-excited driving with high accuracy.

Abstract: An oscillating element which can improve the adhesiveness thereof with an actuator is disclosed. In an oscillating element which includes a substrate which is configured to support an oscillation portion in an oscillating manner, and a driving layer which is configured to oscillate the oscillation portion, the driving layer including an adhesive layer formed on a substrate side thereof, an intermediate layer is positioned between the substrate and the driving layer. The intermediate layer is made of a material which allows surface activation bonding with the substrate, and the surface roughness of the intermediate layer on the adhesive layer side is set coarser than the surface roughness of the intermediate layer on the substrate side thus allowing the intermediate layer to easily acquire an anchoring effect with the adhesive layer.

Abstract: A system for suppressing undesirable oscillations in a micro-electro-mechanical system (MEMS) scanner is provided. The system includes a tunable notch filter and a MEMS scanner. The tunable notch filter is operable to receive an original drive signal and to generate a compensated drive signal based on the original drive signal. The MEMS scanner, which is coupled to the tunable notch filter, is operable to receive the compensated drive signal and to be driven by the compensated drive signal without oscillating at a first mode resonance frequency.

Abstract: In a galvano scanner system (1), a light position detection unit (30) is mounted so as to match the scanning center of the workpiece surface (7), the light position detection unit being provided with a two-dimensional light position sensor (32) disposed in the center and four one-dimensional light position sensors (33(1)) to (33(4)) concyclically disposed at equal angles about the center of the two-dimensional light position sensor. An origin position command is given to galvano scanners (3, 4), laser light is irradiated at low output, and the offset adjustment value is calculated based on the detection output of the two-dimensional light position sensor (32).

Abstract: A method includes generating a plurality of beams that each illuminate a separate portion of a spatial light modulator. The spatial light modulator has a first dimension of a first length and a second dimension of a second length. Each of the beams spans a portion of the first length of the first dimension and a portion of the second length of the second dimension. The method also includes scrolling the plurality of beams along the second dimension of the spatial light modulator while maintaining at least a first gap between each of the plurality of beams.

Abstract: A method for displaying or capturing an image comprises directing an illumination beam onto a mirror of a highly resonant, mirror-mount system and applying a drive signal to a transducer to deflect the mirror. In this method, the drive signal has a pulse frequency approaching a resonance frequency of the mirror-mount system. The method further comprises reflecting the illumination beam off the mirror so that the illumination beam scans through an area where the image is to be displayed or captured, and, addressing each pixel of the image in synchronicity with the drive signal to display or capture the image.

Abstract: A mirror device drive control apparatus adapted to perform drive control of a mirror device having a hysteresis characteristic.

Abstract: A micro-electro-mechanical system (MEMS) mirror device has a mirror, a frame rotatively coupled to the mirror, and a uniaxial actuator rotatively coupled to the frame where the rotational axis of the actuator is offset from the rotational axes of the mirror and the frame. Another MEMS mirror device has a mirror, a frame rotatively coupled to the mirror, and a biaxial actuator rotatively coupled to the frame where the actuator is able to rotate about the rotational axes of the mirror and the frame with the mirror.

Abstract: A galvano motor 10 includes a motor shaft 1, a coil 5 which rotationally drives the motor shaft 1, and an encoder scale 6 which is joined to one end of the rotating shaft, the motor shaft 1 is configured so that a mirror 9 which is heavier than the encoder scale 6 at the other end opposite to the one end to which the encoder scale 6 is joined, a phase crossover frequency fphase in open-loop characteristics of the galvano motor 10, a torsion resonance frequency fscale between a center part of the motor shaft 1 and the encoder scale 6, and a torsion resonance frequency fmirror between the center part of the motor shaft 1 and the mirror 9 satisfy the relation of fphase<fscale?fmirror, and phases at the torsion resonance frequencies fscale and fmirror are other than ?180 degrees.

Abstract: A scanner driver of a galvanometric scanner system includes an analog drive circuit; a control unit 31 for storing and holding optimized data formed from combinations of optimal values of circuit constants set in advance in accordance with a plurality of drive modes of a galvanometric scanner; and an electronic trimmer for changing the circuit constants of the analog drive circuit. The control unit selects one of the optimized data in accordance with an external input, and sets or updates parameters of the circuit constants via the electronic trimmer in accordance with the selected optimized data. When a drive mode of the galvanometric scanner system is changed, the scanner driver can accordingly be optimized readily and quickly.

Abstract: An oscillator device includes an oscillation system having an oscillator and an elastic supporting member, a detecting member for detecting oscillation amplitude of the oscillator, a driving member for driving the oscillator, and a control unit for generating a driving signal for driving the oscillator and for supplying the driving signal to the driving member, wherein the control unit reciprocally sweeps a driving frequency of the driving signal so that a resonance frequency of the oscillation system is included within a frequency range swept, wherein the control unit determines a resonance frequency based on at least two frequencies with which an oscillation amplitude value obtainable by the reciprocal sweeping reaches a maximum, and wherein the control unit generates the driving signal based on the determined resonance frequency.