Abstract: This disclosure pertains to a microelectromechanical systems (MEMS) device with a tiltable structure, a fixed supporting structure, and an actuation structure with driving arms connected to the tiltable structure by elastic decoupling elements. Described herein, particularly, is a planar stop structure between the driving arms and the tiltable structure, which functions to limit movement in the tiltable plane. This stop structure includes a first projection/abutment surface pair formed by a projection extending from a driving arm and an abutment surface formed by a recess in the tiltable structure. The projection and abutment surface are adjacent and spaced apart in the device's rest condition.

Abstract: A bottom semiconductor region is formed to include a main sub-region, extending through a bottom dielectric region that coats a semiconductor wafer, and a secondary sub-region which coats the bottom dielectric region and surrounds the main sub-region. First and second top cavities are formed through the wafer, delimiting a fixed body and a patterned structure that includes a central portion which contacts the main sub-region, and deformable portions in contact with the bottom dielectric region. A bottom cavity is formed through the bottom semiconductor region, as far as the bottom dielectric region, the bottom cavity laterally delimiting a stiffening region including the main sub-region and leaving exposed parts of the bottom dielectric region that contact the deformable portions and parts of the bottom dielectric region that delimit the first and second top cavities. The parts left exposed by the bottom cavity are selectively removed.

Abstract: An optical apparatus includes an array of lasers, which are arranged in a grid pattern having a predefined spatial pitch and are configured to emit respective beams of pulses of optical radiation. Projection optics having a selected focal length project the beams toward a target with an angular pitch between the beams defined by the spatial pitch and the focal length. A scanner scans the projected beams over a range of scan angles that is less than twice the angular pitch. Control circuitry drives the lasers and the scanner so that the pulses cover the target with a resolution finer than the angular pitch. A receiver receives and measures a time of flight of the pulses reflected from the target.

Abstract: An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.

Abstract: What is proposed is: a micromirror arrangement which comprises: a first spring-mass oscillator, which has an oscillatory body forming a mirror plate (1) and first spring elements (2); a second spring-mass oscillator, which has a drive plate (3) and second spring elements (4) and which is connected to a carrier arrangement (5, 8, 9) via the second spring elements (4), wherein the first spring-mass oscillator is suspended in the second spring-mass oscillator via the first spring elements (2); and a drive arrangement (11), which is assigned to the drive plate and is designed to cause the drive plate (3) to oscillate.

Abstract: An apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer. The comb drive may be used to impart a tilting motion to a micro-mirror. The method of manufacturing provides comb teeth exhibiting an aspect ratio greater than 1:20, with an offset distance between comb teeth of the first and second combs that is less than about 6 ?m.

Abstract: An optical switch includes: a semiconductor substrate, including a first rotation part and a first torsion beam disposed at two ends of the first rotation part, where the first torsion beam is configured to drive the first rotation part to rotate; a microreflector, disposed on a surface of the first rotation part of the semiconductor substrate; a first latching structure, disposed on a surface of the first torsion beam, the first latching structure including a form self remolding (FSR) material layer and a thermal field source, where the thermal field source is configured to provide a thermal field for the FSR material layer and the FSR material layer is configured to undergo form remolding under the thermal field, so as to latch the first rotation part and the microreflector in a position after rotation.

Abstract: On/off digital drive signals are used to create arbitrary spatial and temporal ribbon movement patterns in MEMS ribbon arrays.

Abstract: A micromirror and micromirror array may have a first stationary structure, and a mirror structure connected to a first pivoting structure that pivots the mirror structure relative to the first stationary structure about a first axis of rotation. A first comb drive pivots the mirror structure about the first axis of rotation. The first comb drive has a first portion attached to the stationary structure and a second portion attached to the mirror structure, the first portion being electrically isolated from the second portion. The micromirror or micromirror array may be mounted to a Through Silicon Via (TSV) wafer having electrical connections that extend between a first side and a second side of the TSV wafer such that the first and second portions of each comb drive are electrically connected to the electrical connections.

Abstract: A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.

Abstract: A torsional electrostatic combdrive with increased stiffness is disclosed. The torsional electrostatic combdrive includes a movable combteeth group, a stationary combteeth group, and a stationary link group. The stiffness of the torsional electrostatic combdrive is increased by coupling the stationary link group to the stationary combteeth group. Advantageously, the present invention promotes reduced gaps of engaging combteeth, increased snap-in voltage of combteeth, and reduced driving voltage of the combdrive.

Abstract: A scanning projection apparatus is provided with a first light source module which includes a laser light source to emit a laser beam and a mirror unit which can be oscillated. Further, a light deflection unit which performs a two-dimensional scanning with the laser beam emitted from the first light source module by the mirror unit, a light detection unit which detects a distance from the mirror unit to an image projection surface or a difference in distance in the image projection surface, and a control unit which controls an oscillation angle of the mirror unit based on distance information from the light detection unit are included.

Abstract: In an optical deflector apparatus, an optical deflector chip includes a mirror, an actuator adapted to rock the mirror, and first pads on a front surface of the optical deflector chip and connected to the actuator. A first substrate includes second pads on a back surface of the first substrate, and an opening is formed in the first substrate. The front surface of the optical deflector chip is adhered to the back surface of the first substrate in such a way that the first pads of the optical deflector chip are in contact with respective ones of the second pads of the first substrate and the mirror opposes the opening. A back surface of said optical deflector chip is adhered to a front surface of a second substrate.

Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.

Abstract: A MEMS mirror device includes a semiconductor substrate, a mirror provided on the semiconductor substrate, a first cavity, a second cavity, and a frame portion to define the first cavity and the second cavity. The semiconductor substrate further includes a swing portion formed just above the first cavity to support the mirror, a straight beam provided just above the first cavity to extend between the frame portion and the swing portion, a comb-teeth-like fixed electrode, and a comb-teeth-like movable electrode, the movable electrode meshing with the fixed electrode with a gap left therebetween, the swing portion configured to swing about the beam as a swing axis in response to movement of the movable electrode.

Abstract: Disclosed herein is a dielectric microstructure with a substantially unit dielectric constant K for use in microelectromechanical systems.

Abstract: A Micro Electro Mechanical Systems (MEMS) device comprising: a rotor, comprising a first plurality of rotor teeth and a second plurality of rotor teeth, formed in at least two layers of silicon-on-insulator (SOI) substrate, wherein each rotor tooth belonging to the first plurality of rotor teeth is formed in a first layer and each rotor tooth of the second plurality of rotor teeth is formed in a second layer; and a stator comprising a first plurality of stator teeth and a second plurality of stator teeth, formed in at least two layers of SOI substrate, wherein each stator tooth belonging to the first plurality of stator teeth is formed in a first layer, and each stator tooth of the second plurality of stator teeth is formed in a second layer.

Abstract: A MEMS micromirror (30) is presented including a frame (60) with a mirror body (50) arranged therein. The mirror body (50) is rotatable around a rotation axis (58) extending in a plane (x-y) defined by the frame (60). The MEMS micromirror (30) further includes at least one cantilever beam assembly (70) having a longitudinal direction and extending within said plane. The MEMS micromirror (30) also includes vertical support beams (40) connected between the mirror body (50) and the frame (60) along the rotation axis (58). The at least one cantilever beam assembly (70) has a cantilever beam (72) with a first and a second end (721, 722) and a relief means (74) at the first end (721) allowing for a translation of the cantilever beam (72) at its first end (721) in said longitudinal direction. The first end (721) is coupled via the relief means (74) to the frame (60) and the second end (722) is fixed to the mirror body (50).

Abstract: A tunable tilting device is described. The device includes a tilting element and a suspension structure that has one or more flexures coupled to the tilting element. The suspension structure has a variable bending stiffness and configured to bend due to a tilting motion of the tilting element around a pivot axis. The suspension structure is responsive to a tuning force actuating a variation of an extension stress or a compression stress of the suspension structure, and thereby can vary the bending stiffness of the suspension structure.

Abstract: An optical reflection element includes a frame, a meandrous vibrating part having an outer end connected with an inside of the frame, and a mirror part supported by an inner end of the meandrous vibrating part. The meandrous vibrating part has a meandrous shape that includes curved portions and vibrating beams alternately connected with the curved portions. A curvature of respective one of the curved portions is smaller than a curvature of at least one of the curved portions which is located closer to the inner end than the respective one of the curved portions. This optical reflection element has a large deflection angle of the mirror part.

Abstract: The present invention provides an electromechanical transducer which can prevent light from being incident on a receiving face, without deteriorating mechanical characteristics of a vibration film. The electromechanical transducer has at least one cell 2 in which the vibration film 7 containing one electrode 8 out of two electrodes 3 and 8 that are provided so as to interpose a space 5 therebetween is vibratably supported. The electromechanical transducer has a stress relaxation layer 9 formed on the vibration film 7, which has an acoustic impedance matching that of the vibration film 7, and has a light reflection layer 6 formed on the stress relaxation layer 9.

Abstract: An electroosmotic movable device is provided, which includes a liquid chamber that houses a liquid, a conductive movable structure that is placed in the liquid chamber and has a rotating shaft or a supporting point and further has a conductive portion, and an electrode for applying an electric field to the conductive movable structure. The conductive movable structure is enabled to move by an electroosmotic flow which occurs in an electric double layer portion formed by being paired with an electric charge induced in the conductive movable structure owing to the electric field which is applied from the electrode.

Abstract: In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units of ladder shape with honeycombed portions are formed by twin supporting rods and crosspieces bridged between the twin supporting rods so as to support the moving plate rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units by the honeycombed portions of the hinge units.

Abstract: A display system able to reduce interpixel intensity gaps caused by the use of pulsed laser sources having relatively short optimum pulse duration. The interpixel intensity gaps are reduced by temporally offsetting multiple laser pulses for a display pixel during a corresponding pixel-scan period. The temporally offset pulses for the display pixel are then scanned to different locations on a viewing surface such that the display pixel has an improved intensity distribution. Additional reduction in the interpixel gaps may be accomplished by de-focusing the temporally offset pulses in a scan direction, increasing the duty cycle of the source lasers, and shifting the location of alternating frames on the viewing surface.

Abstract: A method for manufacturing a micromechanical component is described, including the steps of: forming a first etch stop layer on a base substrate, the first etch stop layer being formed in such a way that it has a first pattern of through-cutouts; forming a first electrode-material layer on the first etch stop layer; forming a second etch stop layer on the first electrode-material layer, the second etch stop layer being formed in such a way that it has a second pattern of through-cutouts differing from the first pattern; forming a second electrode-material layer on the second etch stop layer; forming a patterned mask on the second electrode-material layer; and carrying out a first etching step in a first direction and a second etching step in a second direction counter to the first direction in order to etch at least one first electrode unit out of the first electrode-material layer and to etch at least one second electrode unit out of the second electrode-material layer.

Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Abstract: A layered micro-electronic and/or micro-mechanic structure comprises at least three alternating electrically conductive layers with insulating layers between the conductive layers. There is also provided a via in a first outer layer, said via comprising an insulated conductive connection made of wafer native material through the layer, an electrically conductive plug extending through the other layers and into said via in the first outer layer in order to provide conductivity through the layers, and an insulating enclosure surrounding said conductive plug in at least one selected layer of said other layers for insulating said plug from the material in said selected layer. It also relates to micro-electronic and/or micro-mechanic device comprising a movable member provided above a cavity such that it is movable in at least one direction. The device has a layered structure according to the invention. Methods of making such a layered MEMS structure is also provided.

Abstract: Various beam selectors for selectively placing one of at least two beams of light along the same output path are disclosed. In one aspect, a beam selector receives at least two substantially parallel beams of light. The beam selector includes a plate with an aperture so that when one of the at least two beams is selected for transmission, the beam selector directs only the selected beam along an output path through the aperture. The plate can also serve to block transmission of unselected beams. The output path through the aperture is the same for each of the at least two beams when each beam is selected. Beam selectors can be incorporated into fluorescence microscopy instruments to selectively place particular excitation beams along the same path through the microscope objective lens and into a specimen to excite fluorescence of fluorescent probes attached to a particular component of the specimen.

Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Abstract: A drive circuit includes a generator and a driver. The generator generates a signal having a period and a varying amplitude during a driving portion of the period, and the driver is coupled to the generator and drives a plate of an electrostatically drivable plant with the signal. The drive circuit may be used to drive a mirror plate of a comb-drive MEMS mirror.

Abstract: A scanning projector includes a MEMS device with a scanning mirror that sweeps a light beam in two dimensions. A laser limit comparison circuit determines a metric from measured peak scan angles and measured light output. The metric is compared to a threshold and a light source is shut down when the metric exceeds the threshold.

Abstract: A device for deflecting light beams is provided, which includes a swing-mounted light exit segment of an optical waveguide and a swing-mounted mirror. The device features a first rotation device that is set up to rotate the light exit segment of the optical waveguide, from which light is able to strike the mirror, in a rotational plane, and a second rotation device that is set up to rotate the mirror around a rotational axis situated in the mirror plane, which deviates from the vertical to the rotational plane.

Abstract: Briefly, in accordance with one or more embodiments, an electric comb drive scanner comprises a scanning body comprising a mirror supported by one or more flexures along a first axis and one or more support structures coupled to the one or more flexures. One or more drive combs are disposed on the one or more support structures, wherein the drive combs cause the mirror to rotate about the first axis in response to a drive signal applied to the drive combs. The one or more support structures are tuned to reduce non-uniformity of warping of the support structures to reduce variation in disengagement of the drive combs along a length of the drive combs.

Abstract: The invention concerns a micromechanical element including a frame, a moving part rotating inside said frame, about an axis, two torsion beams connecting the moving part to said frame , aligned along the axis and provided with a portion of reinforced width, and stop members arranged on both sides of the reinforced portions, so as to limit the lateral movement of the moving part . According to the invention, the portions of reinforced width are integral with the frame , and the stop members are integral with the moving part.

Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Abstract: A tunable tilting device is described. The device includes a tilting element and a suspension structure that has one or more flexures coupled to the tilting element. The suspension structure has a variable bending stiffness and configured to bend due to a tilting motion of the tilting element around a pivot axis. The suspension structure is responsive to a tuning force actuating a variation of an extension stress or a compression stress of the suspension structure, and thereby can vary the bending stiffness of the suspension structure.

Abstract: The present invention provides an improved electrostatic micro actuator array system comprising a plurality of electrostatic micro actuators, each of the micro actuators further comprising at least one hold-down electrode and at least two pull-down electrodes positioned to actuate the micro actuator. A hold-down signal line is then coupled to each of the hold-down electrodes of each of the plurality of micro actuators and a plurality of first pull-down signal lines coupled to one of the at least two pull-down electrodes of each micro actuator and a plurality of second pull-down signal lines coupled to another of the at least two pull-down electrodes of each micro actuator, the first pull-down signal lines and the second pull-down signal lines configured in a cross-point matrix such that a unique pair of first pull-down signal lines and second pull-down signal lines is associated with each of the plurality of micro actuators.

Abstract: A micro-structure produced by utilizing a MEMS technology or the like includes: a frame including a portion having a first layer and a portion having a second layer on the lower side of the first layer; a movable body including a portion having the first layer and a portion having the second layer; and at least one swing supporting portion which is having the first layer, and connects the portion having the first layer in the frame and the portion having the first layer in the movable body, to support the movable body to be capable of swinging. A frame side end portion of the swing supporting portion is supported from underneath by the portion having the second layer in the frame, and a movable body side end portion of the swing supporting portion is supported from underneath by the portion having the second layer in the movable body.

Abstract: An electromechanical tilting device including a first and a second electrode structures, shaped, positioned and oriented to define at least partially interdigitated electrodes, and a suspension defining a tilt-containing motion path for the second structure with respect to the first structure. The motion path is selected to cause changes in overlapping regions and overlapping regions' gaps of the interdigitated electrodes. The device is configured such that an increase in one or more voltage bias applied to interdigitated driving electrodes makes a decrease in a total area of overlapping regions of the driving electrodes electrically energetically favorable.

Abstract: A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.

Abstract: A pseudo bipolar method for driving a MEMS ribbon device reduces charging effects in the device.

Abstract: In a biaxial mirror device where beams for connecting a first movable frame to a second movable frame and the second movable frame to a fixed frame pass a center of the mirror along an axis, an actuator for moving the second movable frame is composed of two first and second actuators and in a state that rotational angles of the movable frames are zero, the first actuator permits the second movable frame to start rotation and when it reaches a specific rotational angle, the second actuator permits the second movable frame to rotate, thus a large deflection angle is obtained even by the dissonance drive.

Abstract: MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. In an embodiment, a minor substrate is affixed to a member partially released from a first substrate and a through hole formed in the second substrate is accessed to complete release of the member.

Abstract: A MOEMS apparatus for scanning an optical beam is formed from a double active layer silicon on insulator (DSOI) substrate that includes two active layers separated by an insulating layer. The apparatus includes an electro-static comb drive having a stator formed in a first of the two active layers and a rotor formed in a second of the two active layers. The electro-static comb drive is operative to impart a tilting motion to a micro-mirror formed in the second active layer. The MOEMS apparatus is designed such that: a) at least one of the distances created between a tooth belonging to the rotor and an adjacent tooth belonging to the stator is less than 7 ?m; and the aspect ratio of the apparatus is higher than 1:20.

Abstract: An optical scanning element is provided and includes: a substrate; a first movable section supported on the substrate so as to be capable of rocking displacement about a first axis parallel to a surface of the substrate; a second movable section arranged integrally on the first movable section and supported so as to be capable of rocking displacement about a second axis perpendicular to the first axis, the second movable section having a micro mirror on an upper surface thereof; and a driving section that applies a physical action force on the first movable section and the second movable section so as to cause the micro mirror to perform rocking displacement in two axial directions about the first axis and the second axis.

Abstract: The present invention provides an electromechanical transducer which can prevent light from being incident on a receiving face, without deteriorating mechanical characteristics of a vibration film. The electromechanical transducer has at least one cell 2 in which the vibration film 7 containing one electrode 8 out of two electrodes 3 and 8 that are provided so as to interpose a space 5 therebetween is vibratably supported. The electromechanical transducer has a stress relaxation layer formed on the vibration film 7, which has an acoustic impedance matching that of the vibration film 7, and has a light reflection layer 6 formed on the stress relaxation layer 9.

Abstract: An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface (10BS) of a mirror plate (10B) is formed by removing an insulating layer (I) thereon.

Abstract: The present invention relates to a method and apparatus for speckle noise reduction in laser scanning display. In particular, a MEMS device which can superpose vibrational motion onto a biaxial scanning mirror is provided for reducing the effect of speckling.

Abstract: A micro-electro-mechanical system (MEMS) mirror device has a mirror, a frame rotatively coupled to the mirror, and a biaxial actuator rotatively coupled to the frame where the actuator is able to rotate about the rotational axes of the mirror and the frame with the mirror.

Abstract: The invention relates to a micromechanical actuator, especially a micro-mirror scanner, comprising an actuator unit in an outer frame which unit is suspended in the outer frame via two torsion elements, and electrostatic tilt drives from intermeshing first and second comb-type electrodes which are off-set from each other vertically. The first electrodes are rigidly connected to the outer frame and the second electrodes to the outer frame via an outer connecting element and to the actuator unit via an inner connecting element. The inner connecting element has a spring which extends in parallel to the outer tilting axis, which is connected to the same in a section of the actuator unit close the outer tilting axis, and which is designed and arranged to be rigid in the vertical direction and flexible at a right angle to the vertical direction.