Abstract: An optical multi-ring scanner is disclosed, which comprises: a substrate; an outer ring driving element, disposed inside the substrate and configured symmetrically at two sides thereof with a pair of first arms that are connected respectively to the substrate; at least one inner ring driving element, each configured with a first inner ring driver in a manner that the first inner ring driver has a pair of second arms symmetrically disposed at a top side and a bottom side thereof while being connected to the outer ring driving element; and a mirror element, disposed inside the first inner ring driver and having a pair of third arms symmetrically disposed at a top side of a bottom side thereof; wherein, the third arm is disposed coaxial with the second arm while enabling the first arm to be disposed perpendicular to the second arm and the third arm.

Abstract: An optical multi-ring scanner is disclosed, which comprises: a substrate; an outer ring driving element, disposed inside the substrate and configured symmetrically at two sides thereof with a pair of first arms that are connected respectively to the substrate; at least one inner ring driving element, each configured with a first inner ring driver in a manner that the first inner ring driver has a pair of second arms symmetrically disposed at a top side and a bottom side thereof while being connected to the outer ring driving element; and a mirror element, disposed inside the first inner ring driver and having a pair of third arms symmetrically disposed at a top side of a bottom side thereof; wherein, the third arm is disposed coaxial with the second arm while enabling the first arm to be disposed perpendicular to the second arm and the third arm.

Abstract: A lightweight, compact image projection module, especially for mounting in a housing having a light-transmissive window, is operative for sweeping a composite laser beam as a pattern of linear scan lines on a planar projection surface and for causing selected pixels arranged along each linear scan line to be illuminated to produce an image of high quality and in color.

Abstract: An optical deflecting device including a mirror member having a light reflective area. The optical deflecting device includes a plurality of electrodes that are formed on a substrate, a fulcrum member that functions as an electrode and a regulation member. The range of movement to a respect direction of the substrate is regulated by the regulation member, which includes a conductive material at least in the surface thereof.

Abstract: A control section of an optical switch calculates information relating to a polarization amount in an insulating film at each predetermined time, to update the information relating to the polarization amount in the insulating film. On the other hand, when a drive voltage is applied to a MEMS mirror, an initial value of the drive voltage corresponding to an input setting command is read out from an initial value memory, and also, the information relating to the polarization amount in the insulating film is read out from the polarization amount memory, and the initial value of the drive voltage is corrected according to the read information relating to the polarization amount in the insulating film, to thereby set a new drive voltage, and the new drive voltage is applied on electrodes of the MEMS mirror.

Abstract: A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.

Abstract: The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and protection during mirror snapping with over voltage.

Abstract: A micro-electro-mechanical-system (MEMS) micromirror for use in high fill factor arrays which includes at least one stationary body and a movable body. The movable body has opposed ends and is secured to the stationary body at each of the opposed ends by a resilient primary axis pivot. A mirror support is supported by and movable with the movable body. The mirror support has a first unfettered side and a second unfettered side. A primary axis actuator is provided including a fixed portion connected to the stationary body, and a movable portion corrected to the movable body. The movable portion is adapted to move away from the fixed portion in response to an electrical potential difference between the fixed portion and the movable portion, such that the movable body rotates about the primary axis resilient pivot. A mirror is supported by the mirror support.

Abstract: A micromechanical component includes: a mirror element with a reflective surface on a first outer side of the mirror element, which is designed in such a way that a first potential is applied to a first electrode surface on a second outer side of the mirror element opposite from the first outer side; a counterelectrode situated adjacent to the second outer side of the mirror element and which is designed in such a way that a second potential is applied to a second electrode surface of the counterelectrode; and a voltage control unit configured to apply a temporally varying voltage signal between the first electrode surface and the second electrode surface

Abstract: Provided are forward-imaging optical coherence tomography (OCT) systems and probes.

Abstract: Disclosed are a scanner and an image forming apparatus employing the same. The scanner may produce bidirectional scanning of light by oscillating a deflecting mirror about a first axis substantially parallel to the mirror surface, and may compensate for skewing of the scan lines by rotating the mirror about a second axis that is substantially perpendicular to the first axis so as to allow the light to be scanned at an angle.

Abstract: A micro mirror device includes a first hinge supported by a substrate, a mirror plate tiltable around the first hinge and having a first set of arms facing the substrate, and a second set of arms on the substrate. The first set of arms and the second set of arms can be interdigitated when the mirror plate is tilted. The micro mirror device includes a first lateral guard on the substrate (or the mirror plate). The first lateral guard can limit movement of the mirror plate to a position in a first direction substantially parallel to an upper surface of the substrate to prevent the first set of arms from contacting the second set of arms when the arms are in the interdigitated position.

Abstract: A hybrid electro-static actuator for rotating a two-dimensional micro-electro-mechanical micro-mirror device about two perpendicular axes includes a vertical comb drive for rotating the micro-mirror about a tilt axis, and a parallel plate drive for rotating the micro-mirror about a roll axis. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which is only rotatable about the tilt axis, while one of the parallel plate electrodes is mounted on the underside of a main platform, which generally surrounds the sub-frame. The vertical comb drive rotates both the sub-frame and the main platform about the tilt axis, while the parallel plate drive only rotates the main platform about the roll axis.

Abstract: An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface (10BS) of a mirror plate (10B) is formed by removing an insulating layer (I) thereon.

Abstract: The present invention is directed to a bi-axial pivoting type actuator having a first movable section, a second movable section supporting the first movable section, and backlining. A first conductive portion and a second conductive portion for independently applying a driving voltage to each of the first movable section and the second movable section are provided on the second movable section, in a state of being split by isolation trenches and being stabilized by the backlining provided under the second movable section. By providing such backlining, mutual stabilization of the first conductive portion and the second conductive portion in an electrically isolated state, and simplification of the production steps for the actuator are realized. By providing a mirror on the first conductive portion of the actuator of the present invention as such, it becomes possible to provide a bi-axial pivoting type mirror device through a simple production process.

Abstract: There is provided an electrostatic actuator with the interdigitated electrode structure comprising a movable rod 11 disposed in parallel with an alignment axis line Ox predetermined on a substrate; a movable interdigitated electrode 12 fixed on the both sides of a coupling point 11C on the movable rod 11 and having a plurality of movable electrode fingers 12b; fixed interdigitated electrodes 21, 22 fixed to the substrate and having a plurality of fixed electrode fingers 21b, 22b; and four hinges 23, 24 whose one ends are anchored respectively to the movable rod and the other ends are anchored to anchoring points 32A-32D of the substrate. Lengths of those hinges are longer than distances from anchoring points to the alignment axis line and a displacement Lc of a coupling point 11C in a direction orthogonal to the alignment axis line is reduced to be smaller than a distance between the respective movable electrode fingers and the closest fixed electrode finger.

Abstract: An image scanning apparatus for embodying an image using visible lights apparatus includes a scanning unit for irradiating line scan light; a power source for generating voltage for driving the scanning unit; a light detector for detecting duty that is a variation ratio of line scan light with respect to time; and a servo-loop for comparing the detected duty with a preset value, calculating a magnitude of the voltage for driving the scanning unit, and applying voltage, which is controlled depending on the calculated voltage magnitude, to the scanning unit.

Abstract: A method of driving a MEMS mirror scanner having an electrostatic actuator, comprising a step of driving the electrostatic actuator according to an input signal in accordance with a driving waveform obtained by the following equation, when C + ? ? ( ? ) ? 0 V V ? ( t ) = 1 C + ? ? ( ? ) I [ - C - ? ? ( ? ) I ? V B + - ( 1 I ? ? C L ? ( ? ) ? ? ) ? ( 1 I ? ? C R ? ( ? ) ? ? ) ? V B 2 + C + ? ? ( ? ) I ? ( ? ¨ + 2 ? B I ? ? . + ? I ? ? ) ] when C + ? ? ( ? ) = 0 V V ? ( t ) = ? ¨ + 2 ? B I ? ? .