Abstract: Methods, arrays, and systems for the optical analysis of multiple chemical, biological, or biochemical reactions are provided. The invention includes methods for producing arrays of micromirrors on transparent substrates, each micromirror comprising a nanostructure or optical confinement on its top. The arrays are produced by a process in which lateral dimensions of both the nanostructures and micromirrors are defined in a single step, allowing for control of the relative placement of the features on the substrate, minimizing the process-related defects, allowing for improved optical performance and consistency. In some aspects, the invention provides methods of selectively etching large features on a substrate while not concurrently etching small features. In some aspects, the invention provides methods of etching large features on a substrate using hard mask materials.

Abstract: A piezoelectric actuator mechanism including: a screw-driven feeding mechanism that has a feed screw (11) and a feed screw nut (14); a disc-shaped rotor (17) mounted on the rear-end face of the feed screw nut (14); an ultrasonic motor (18) having a piezoelectric vibrator (19) that comes in contact with the circumference face of the rotor (17); and a driven mounting portion that is pressed against the leading end of the feed screw 11 by spring force, and displaced and positioned by the feeding operation of the feed screw. The driven mounting portion can be made to be a mirror holder (1) for use in an optical system, or a movable table (21) of a linear stage.

Abstract: An optical deflector has: a movable plate having a reflecting surface and a side surface; and a support portion that supports the movable plate in such a manner that the movable plate is able to rotate around a predetermined axis, in which the side surface of the movable plate is recessed toward the axis.

Abstract: A micro-movable device includes a frame, a movable section including a body section, and a torsion coupling section for coupling the frame with the movable section to define an axis of oscillation of the movable section, wherein the frame includes a first extending portion and a second extending portion that are spaced apart from each other in a direction parallel to the axis and extend along the body section, and oppose the body section via a gap.

Abstract: In a piezoelectric transducer element, on a base body having a fixing part and a movable part which are connected with each other, a piezoelectric body which is sandwiched between a lower electrode and an upper electrode is formed in a state where the piezoelectric body extends between and over the fixing part and the movable part of the base body. The piezoelectric body converts a change in potential between the lower electrode and the upper electrode into mechanical displacement of the movable part relative to the fixing part or the mechanical displacement into the change in potential. The upper electrode includes a pad electrode for connection which is formed above the fixing part, and the lower electrode is not formed in a region above the fixing part and below the pad electrode.

Abstract: The subject of the invention is a mechanical device for inserting one out of a multitude of optical components (such as filters) in an optical path and changing the angle of incidence between the incoming light and the selected optical component independently of the optical component selection.

Abstract: An oscillating device includes an oscillator, an elastic supporting member for movably supporting the oscillator, a first supporting frame for supporting the elastic supporting member, and a second supporting frame extending along the elastic supporting member with a spacing maintained therebetween, the second supporting member extending from the first supporting frame, wherein the second supporting frame is provided in a cantilever shape relative to the first supporting frame.

Abstract: A device for deflecting a light beam in two different directions includes a mirror and a first rotating actuator element configured to rotate about a first axis as a function of a first actuation signal. A second rotating actuator element is disposed opposite to the first rotating actuator element along the first axis and configured to rotate about the first axis as a function of a second actuation signal. A first spring element is connected to the first rotating actuator element and, off-axially with respect to the first axis at a predetermined first distance thereto, to the mirror in a rest position of the mirror. A second spring element is connected to the second rotating actuator element and to the mirror.

Abstract: A piezoelectric mirror device (11) comprises a frame portion (12) having a centrally located opening (13), a mirror portion (14) positioned at the opening (13), a pair of mirror support portions (15) adapted to support the mirror portion (14) rotatably relative the frame portion (12) and a pair of drive portions (16) that is a multilayer structure of lower electrodes (17), piezoelectric element (18) and an upper electrode (19). The mirror support portions (15) are formed of a material having a Young's modulus of up to 160 GPa, and the frame portion (12) includes a cutout (13a) at a part of a site wherein there are the drive portions (16) positioned. The cutout (13a) is in contact with the opening (13).

Abstract: An optical device equipped with a mirror which reflects light, include a plurality of first receiving parts that touch one face of one of ends in a lengthwise direction of the mirror; a plurality of first pressing parts that touch a face opposing to the face to which the first receiving parts touch, and press the mirror with elastic force toward the first receiving parts.

Abstract: An approach for obtaining a transducer mirror structure made from silicon. The structure may have a center portion and a perimeter portion that have an attachment between them which is made flexible after certain etching between the two portions. The attachment may be a web of links or legs. A force applied to the center portion at one end of the structure may cause the center portion to move relative to the perimeter portion. A piezo electric transducer or actuator may be attached to apply the force. An oxide layer, a thin layer of silicon and a mirror may be formed on the other end of the structure. The web of links or legs between the center and the perimeter portions may be established with an RIE etch of gaps through the structure to the oxide layer and an undercutting of the gaps with a KOH etch.

Abstract: A lens stage for use in a scanning system is provided. In certain embodiments, the lens stage comprises: a) a support comprising a first rail and a second rail, in which the first rail and the second rail are mounted to the support in parallel; and b) a linearly moveable lens assembly comprising: i) a voice coil comprising a moving coil that moves in a direction parallel to the rails; ii) a lens; iii) a bracket that is attached to: a) the moving coil and b) the lens, and moveably engaged with the rails via a set of bearing cars; and iv) means to reduce force exerted on the set of bearing cars due to thermal expansion of the moving coil.

Abstract: A mirror actuator has a first pivot portion which is pivotally supported on a base member, and a second pivot portion which is pivotally supported on the first pivot portion. A mirror is disposed in the second pivot portion. A first coil is disposed in the first pivot portion, and a second coil is disposed in the second pivot portion. A first elastic member connects between the base member and the first pivot portion. A second elastic member connects between the first pivot portion and the second pivot portion. The first elastic member and the second elastic member are connected by a circuit pattern. With the provision of the first elastic member, the second elastic member and the circuit pattern, a current is supplied to the first coil and to the second coil.

Abstract: An optical switch including a bistable component, a reflective component, the reflective component being operatively connected to the bistable component, a first electrothermal bent beam actuator, a first contacting component operatively connected to the first electrothermal bent beam actuator component, the first electrothermal bent beam actuator component and the first contacting component disposed such as to enable advancing the bistable component the reflective component from a first stable configuration to a second stable configuration, a second electrothermal bent beam actuator component and a second contacting component operatively connected to the second electrothermal bent beam actuator component, the second electrothermal bent beam actuator component and the second contacting component disposed such as to enable advancing the bistable component and the reflective component from the second stable configuration to the first stable configuration.

Abstract: A magnetic actuator includes: a plate having a main plane of extent and mounted rotatably about at least one first axis of rotation which is parallel to the main plane of extent, the plate having at least one conductor loop parallel to the main plane of extent; a magnetic bracket situated beneath the plate and having a U-shaped magnetic flux conducting rail and a hard magnet whose magnetization is perpendicular to the U-shaped opening, the magnetic bracket and the plate being aligned with one another in such a way that the opening in the magnetic bracket points toward the main plane of extent of the plate, the U-shaped magnetic flux conducting rail having a main direction of extent parallel to the first axis of rotation, and the plate being deflectable about the at least one axis of rotation by energizing the at least one conductor loop.

Abstract: The present invention relates to a method for producing a micro-mirror actuator and the corresponding actuator. In the method, the actuator is generated from a layered construction made of at least three main layers (101, 103, 107), which are at least sectionally electrically insulated from one another via intermediate layers (102, 104, 106). The layers are structured to form the micro-mirror element and the electrodes, the structuring being performed in such a way that a closed frame (310) is formed from at least the uppermost layer (107) around the inner area of the actuator, which allows a hermetic encapsulation of the inner area by application of a cover plate onto the frame.

Abstract: A MOEMS apparatus is provided for scanning an optical beam and a method for manufacturing it. The apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes two active layers separated by an insulating layer, and comprises an electro-static comb drive that includes a stator formed in a first of the two active layers and a rotor formed in a second of the two active layers, and wherein the electro-static comb drive is operative to impart a tilting motion to a micro-mirror formed in the second active layer. The MOEMS apparatus is characterized in that: a) at least one of the distances created between a tooth belonging to the rotor and an adjacent tooth belonging to the stator is less than 7 ?m; and the aspect ratio of the apparatus is higher than 1:20.

Abstract: A deflecting unit deflects a plurality of light fluxes from a light source including a plurality of light emitting elements arranged in two-dimensional array. An coupling optical system between the light source and the deflecting unit includes an optical coupling element that collimates the light fluxes and a line-imaging element that images the light fluxes near the deflecting unit in a sub-scanning direction. A holding unit holds the line-imaging element in a state that a position of the line-imaging element is adjusted with respect to a direction parallel to the sub-scanning direction. A scanning optical system condenses the deflected light fluxes on the scanning surface.

Abstract: A micro movable element array includes a first frame; a second frame; a first movable part row including plural first movable parts and a second movable part row including plural second movable parts. The first movable parts include first movable main parts. The second movable parts include second movable main parts. The first and second frames are stacked such that the first and second movable part rows are opposed to each other. In the first movable part row, the first movable parts are located such that the first movable main parts are arranged in a first direction and the first movable main parts and gaps are disposed alternately. In the second movable part row, the second movable parts are located such that the second movable main parts are arranged in the first direction and the second movable main parts are opposed to the corresponding gaps.

Abstract: A detection means (52) detects optimum driving voltages of a mirror device. A correction means (53) corrects driving voltage values in a table (54b) based on the optimum driving voltages. This makes it possible to drive the mirror to an optimum pivot angle even when the optimum pivot angle of the mirror changes due to, e.g., mirror drift or a change in the environment such as temperature.

Abstract: There is provided a display apparatus and an optical apparatus by which the generation of interfering pattern can be reduced while achieving miniaturization. The optical apparatus includes an optical device through which laser light passes; one or more holding members holding the optical device; and a driving section allowing the optical device to vibrate in a plane orthogonal to a light path of the laser light. Each of the holding members has an opening or a cutout through which the optical device passes at the time of vibration.

Abstract: A stereoscopic display apparatus and a display method are provided. The stereoscopic display apparatus includes a display panel, a dynamic-backlight module, a tracking panel, an optical lens array. The display has an updated region and a non-updated region during a frame period the display panel displays according a first synchro-signal. The dynamic-backlight module has a plurality of light-emitting regions and the light-emitting regions are turned-on according to a second synchro-signal. The first synchro-signal and the second synchro-signal are synchronal. During the frame period, parts of the light-emitting regions corresponding to the updated region are synchronally turned-on and parts of the light-emitting regions corresponding to the non-updated region are synchronally turned-off. A light provided by at least the part of the light-emitting regions turned-on passes through one silt set and the display panel such that one of the single-eye images is only displayed by the non-updated region.

Abstract: A Three Dimensional (3D) space scanner can obtain spatial data by scanning a mobile object not only in the horizontal direction but also in the vertical direction using a mirror that is driven to rotate as well as to tilt.

Abstract: A layered micro-electronic and/or micro-mechanic structure comprises at least three alternating electrically conductive layers with insulating layers between the conductive layers. There is also provided a via in a first outer layer, said via comprising an insulated conductive connection made of wafer native material through the layer, an electrically conductive plug extending through the other layers and into said via in the first outer layer in order to provide conductivity through the layers, and an insulating enclosure surrounding said conductive plug in at least one selected layer of said other layers for insulating said plug from the material in said selected layer. It also relates to micro-electronic and/or micro-mechanic device comprising a movable member provided above a cavity such that it is movable in at least one direction. The device has a layered structure according to the invention. Methods of making such a layered MEMS structure is also provided.

Abstract: A laser processing apparatus which performs a predetermined processing by irradiating a laser beam (2) emitted from a laser oscillator onto a surface of a workpiece (1) through a condenser lens (3). There are provided microdeformation lenses (4), (5) for changing the beam shape in the vertical direction and the horizontal direction in a laser beam (2), for example, and a lens deformation control device for controlling the amount of deformation of the microdeformation lenses (4), (5) which are to adjust the beam shape of the laser beam (2) to a predetermined shape. The microdeformation lenses (4), (5) have a structure such that they can be caused to change to a desired shape by means of a plurality of actuators (4b), (5b) disposed around the outer periphery of the lenses.

Abstract: An optical device includes: a movable plate disposed in a distribution range of light input from outside, and having alight reflecting surface adapted to reflect the light; a shaft member adapted to support the movable plate so that the movable plate can swing around a predetermined axis; a ferromagnetic member provided to the movable plate; and a drive section configured to generate electromagnetic force between the drive section and the ferromagnetic member to thereby swing the movable plate, wherein a portion of the drive section, included in the distribution range of the light, is formed of a surface having a normal vector with which the light is reflected to outside of a predetermined range.

Abstract: In order to keep the entire unit compact e.g. in a laser inscribing unit in spite of the laser beam impacting the card to be inscribed in an orthogonal manner a relatively large amount of beam deflections is necessary partially through mirrors that are fixated relative to one another. In order to minimize the assembly and adjustment complexity plural beam deflections are caused subsequent to one another through a prism element where the beam deflections are implemented through particular reflection surfaces. The prism element is received in a prism support which is configured to be pivoted and rotated in its entirety for assembly and adjustment purposes.

Abstract: The present invention discloses a stereoscopic image display system and a method of controlling the same. An eye tracking module locates current 3D spatial positions of the viewer's eyes, and generates the information of both left and right eyes' current 3D spatial positions. A control module controls a display device that can alter the direction of the light outputted, and outputs images on the display device in time multiplex mode. The light containing the left eye image is outputted to the position of left eye instead of right eye at one time point, and the light containing the right eye image is outputted to the position of right eye instead of left eye at another time point, so that a stereoscopic image is perceived according to the parallax theory. The present invention enlarges the visual range of stereoscopic image and achieves a better stereoscopic image visual experience for viewers.

Abstract: An apparatus for reducing fringe interference of light created in the optical system of a laser spectroscopy system comprising an electromagnetic actuator for generating, along a laser path, physical translational vibration of an optical element of the optical system and a control device for controlling the amplitude and frequency of said vibration. The optical element is arranged on a cantilever body which is, at one end, attached to a base by a flexural pivot and, at the other free end, coupled to the electromagnetic actuator, and the control device includes a controller that controls the amplitude of the vibration and a vibration sensor attached to the cantilever body and providing the actual vibration value to the controller to improve fringe interference reduction, especially with longer wavelengths.

Abstract: A microstructure includes a substrate, a fixed supporting portion fixed to the substrate, a first movable portion, a second movable portion enhancing the rigidity of the first movable portion, and an elastic supporting portion elastically interconnecting the first movable portion and the fixed supporting portion. The second movable portion is secured to the first movable portion with a gap interposed therebetween and in such a manner as to cover the elastic supporting portion and the fixed supporting portion. The first movable portion and the second movable portion are elastically supported by the elastic supporting portion in such a manner as to be displaceable together relative to the fixed supporting portion.

Abstract: Provided is a Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device including a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second degree of freedom.

Abstract: A wafer-level manufacturing method produces stress compensated x-y gimbaled comb-driven MEMS mirror arrays using two SOI wafers and a single carrier wafer. MEMS structures such as comb drives, springs, and optical surfaces are formed by processing front substrate layer surfaces of the SOI wafers, bonding together the processed surfaces, and removing the unprocessed SOI layers to expose second surfaces of the front substrate layers for further wafer-level processing. The bonded SOI wafers are mounted to a surface of the carrier wafer that has been separately processed. Processing wafer surfaces may include formation of a stress compensation layer to counteract physical effects of MEMS mirrors. The method may form multi-layered conductive spring structures for the mirrors, each spring having a first conducting layer for energizing a comb drive, a second conducting layer imparting a restoring force, and an insulating layer between the first and second conducting layers.

Abstract: A micromirror of a micromirror array in an illumination system of a microlithographic projection exposure apparatus can be tilted through a respective tilt angle about two tilt axes. The micromirror is assigned three actuators which can respectively be driven by control signals in order to tilt the micromirror about the two tilt axes. Two control variables are specified, each of which is assigned to one tilt axis and which are both assigned to unperturbed tilt angles. For any desired combinations of the two control variables, as a function of the two control variables, one of the three actuators is selected and its control signal is set to a constant value, in particular zero. The control signals are determined so that, when the control signals are applied to the other two actuators, the micromirror adopts the unperturbed tilt angles as a function of the two control variables.

Abstract: A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.

Abstract: A micro-mirror includes stiffer end sections for limiting curvature, and thin middle sections forming ground electrodes and a hinge. Spacers arc provided beneath the thin middle sections of the micro-mirror for supporting hot electrodes, which attract the ground electrodes for rotating the micro-mirror about a tilt axis. The spacers enable the gap between the hot electrode and the micro-mirror to be designed separately from the thickness of the micro-mirror, and the gap between the ends of the micro-mirror and the substrate.

Abstract: A system and method of correcting a light pathway is provided. A system for correcting a light pathway, the system including: a light pathway change amount measurement unit to measure a light pathway change amount using a movement amount of an image when a light pathway of incident light is changed due to shaking of a camera; and a curved prism driving unit to drive a curved prism, composed of a refraction surface, based on a light pathway correction amount determined by the light pathway change amount.

Abstract: A micromechanical component includes a micromechanical unidimensional optical lattice structure for diffracting an incident light beam, and a linear drive connected to the lattice structure for compressing and/or stretching the lattice structure in the plane of the lattice structure. The lattice structure is of elastic design with regard to a change of shape resulting from the compressing and/or stretching. The micromechanical component may be incorporated in a device for beam deflection of monochromatic light or in a spectrometer.

Abstract: A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.

Abstract: A nonvolatile nano-electromechanical system device is provided and includes a cantilever structure, including a beam having an initial shape, which is supported at one end thereof by a supporting base and a beam deflector, including a phase change material (PCM), disposed on a portion of the beam in a non-slip condition with a material of the beam, the PCM taking one of an amorphous phase or a crystalline phase and deflecting the beam from the initial shape when taking the crystalline phase.

Abstract: A light deflecting element includes: a movable plate provided with a light reflecting section having light reflectivity; a support section; a coupling section adapted to couple the movable plate rotatably to the support section; and a magnet disposed on an opposite surface of the movable plate to the light reflecting section, wherein the coupling section has a shape having a width gradually increasing in a direction from a side of the light reflecting section toward a side of the magnet in a cross-sectional view perpendicular to a rotational axis of the movable plate.

Abstract: Provided is an optical switch member including a bi-stable mechanism, and first and second electro-thermal actuators. The bi-stable mechanism includes a curved-beam disposed on a bending portion of a first cantilever, one end of the first cantilever having a driven portion disposed thereon. The first electro-thermal actuator includes a first beam of a first driven arm disposed on the bending portion. The second electro-thermal actuator includes a second beam of a second driven arm disposed on the bending portion. The ends of the first and second driven arms are adjacent to first and second sides of the driven arm, respectively. Also proposed is an optical switch device including a substrate, a third thermal actuator, and the optical switch member disposed on the substrate to form an optical switch device to thereby integrate the optical switch with variable optical attenuators on the substrate.

Abstract: An actuator, includes: a weight part; a supporting part supporting the weight part; a connecting part coupling the weight part rotatable to the supporting part and having an elastic part; a driving member for driving and rotating the weight part; and a semiconductor circuit for driving the weight part. The driving member is operated to torsionally deform the elastic part and rotate the weight part. The elastic part has a first silicon part that is mainly made of silicon and a first resin part that is mainly made of resin and coupled to the first silicon part. The supporting part has at least a second silicon part made mainly of silicon and coupled to the first silicon part of the elastic part. The semiconductor circuit is provided on the second silicon part of the supporting part.

Abstract: A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane.

Abstract: A laser system employs a window integrated in the surface of a weapon platform. A high energy laser is mounted in the weapon platform to provide a laser beam which is received by a Coude' path for internal direction of the beam. A beam director receives the laser beam from the Coude' path and employs an outer steering assembly and an inner steering assembly to cooperatively provide pointing of a centerline of the laser beam at a substantially single location on the window for a full conical field of regard.

Abstract: According to one embodiment, a reinforcing strut of the invention is a polyhedron attached to a plate and having at least two slanted facets, with each of the slanted facets oriented with respect to the plane of the plate at an angle different from about 90 degrees. Two slanted facets intersect to form an edge that causes the strut to have a tapered profile along the longitudinal axis of the strut.

Abstract: A device for analysing a specimen by fluorescence includes a confocal microscope, illumination means capable of emitting a light beam that converges, by means of an objective, on a focal spot, means for successively positioning the focal spot at various points on the specimen during analysis. The confocal microscope includes an objective mounted on a movable rapid-scan carriage driven in a reciprocating linear movement along a traverse direction by a rotating motor by means of a device of the connecting rod type. The specimen is placed on a movable support driven in a longitudinal movement and is able to move along the axis of the objective of the microscope in order to position the specimen relative to the focal spot.

Abstract: In certain embodiments, a device is provided including a substrate and a plurality of supports over the substrate. The device may further include a mechanical layer having a movable portion and a stationary portion. The stationary portion may disposed over the supports. In certain embodiments, the device further includes a reflective surface positioned over the substrate and mechanically coupled to the movable portion. The device of certain embodiments further includes at least one movable stop element displaced from and mechanically coupled to the movable portion. In certain embodiments, the at least a portion of the stop element may be positioned over the stationary portion.

Abstract: A micro movable element including a movable portion; first and second driving electrodes; first and second conductor portions electrically connected to the first and second driving electrodes, respectively; an intermediate insulating portion disposed between the first conductor portion and the second conductor portion; and a partly laminated structure portion including the first conductor portion, the intermediate insulating portion and the second conductor portion, wherein the first conductor portion has an opposed face making contact with the intermediate insulating portion, a side face adjacent to the opposed face and an edge portion forming the boundary between the opposed face and the side face, part of the edge portion opposed to the second conductor portion is covered with an insulating film, and parts of the first and second driving electrodes are not covered with an insulating film.

Abstract: A beam steering device is disclosed which includes an outer assembly rotatable about an axis by a motor assembly, and an inner assembly rotatable about the axis by another motor assembly and positioned radially within the outer assembly. The beam steering device also includes a first prism or grating connected to the outer assembly and a second prism or grating connected to the inner assembly. Both motor assemblies are axially displaced from the steering devices. The beam steering device also consists of beam expansion optics carried by either the inner assembly or the stationary assembly. In a further embodiment, an array of steerable sub-apertures are maintained within the inner and outer assemblies.

Abstract: A light deflector includes: a movable plate; an elastic support section having a first end coupled to the movable plate and adapted to support the movable plate rotatably around a predetermined axis; a support member coupled to a second end of the elastic support section; and a light absorbing section having a light absorbing property, wherein the elastic support section has an upper surface, a lower surface, and at least one side surfaces, each of the side surfaces being formed of one or more tilted surfaces existing outside either one of the upper surface and the lower surface, and the light absorbing section is disposed on the upper surface and the at least one side surfaces of the elastic support section.