Abstract: In a mirror driving apparatus, a pair of beam portions includes: a pair of first beams directly adjacent to a reflector to sandwich the reflector between the first beams; and a pair of second beams each coupled to one side of a corresponding one of the first beams, the one side being opposite to the reflector with respect to the corresponding one of the first beams. A plurality of electrodes are spaced from each other on a main surface of each of the first beams, a piezoelectric material being interposed between the main surface and the plurality of electrodes. The first beams are displaceable crosswise to the main surface in respective directions opposite to each other. The pair of second beams is displaceable in a direction connecting the first beams and the second beams, along the main surface of the second beams.

Abstract: The present invention relates to a Fabry-Perot interferometer including two plane mirror surfaces mounted in a frame and a system including the interferometer. The mirrors have a known distance between them, and at least one of the mirror surfaces is both partially reflective and partially reflective, where there are at least two actuator units, each including at least one actuator. The first actuator unit is adapted to adjust said distance between said mirrors and the second actuator unit is adapted to modulate said distance at a chosen frequency, both thus providing a variation over a range of mirror distances corresponding to a range of filtered wavelengths in said Fabry-Perot interferometer. At least one of said mirrors is related to the frame through a silicon membrane, at least one of said actuator units comprising a piezoelectric material on said membrane, thus constituting a bimorph or unimorph actuator unit.

Abstract: The invention relates to an optical device (1) for enhancing the resolution of an image, comprising: a transparent plate member (10) configured for refracting a light beam (20) passing through the plate member (10), which light beam (20) projects an image comprised of rows and columns of pixels (40), a carrier (50) to which said transparent plate member (10) is rigidly mounted, wherein the carrier (50) is configured to be tilted between a first and a second position about a first axis (A), such that the plate member (10) is tilted between the first and the second position about the first axis (A), whereby said projected image (30) is shifted by a fraction (?P) of a pixel, particularly by a half of a pixel, along a first direction (x), and an actuator means (60) that is configured to tilt the carrier (50) and therewith the plate member (10) between the first and the second position about the first axis (A).

Abstract: Embodiments of the invention include an optical routing device that includes an organic substrate. According to an embodiment, an array of cavities are formed into the organic substrate and an array of piezoelectrically actuated mirrors may be anchored to the organic substrate with each piezoelectrically actuated mirror extending over a cavity. In order to properly rout incoming optical signals, the optical routing device may also include a routing die mounted on the organic substrate. The routing die may be electrically coupled to each of the piezoelectrically actuated mirrors and is able to generated a voltage across the first and second electrodes of each piezoelectrically actuated mirror. Additionally, a photodetector may be electrically coupled to the routing die. According to an embodiment, an array of fiber optic cables may be optically coupled with one of the piezoelectrically actuated mirrors and optically coupled with the photodetector.

Abstract: A displacement device for pivoting a mirror element with two degrees of freedom of pivoting includes an electrode structure including actuator electrodes. The actuator electrodes are comb electrodes. All actuator electrodes are arranged in a single plane. The actuator electrodes form a direct drive for pivoting the mirror element.

Abstract: According to an aspect of the invention, there is provided a mirror structure for adaptive optics devices, characterized in that it comprises: an elastically deformable layer in response to an applied force, said deformable layer comprising a central portion reflective to said an incident light beam (F); a support substrate positioned spaced with respect to said deformable layer; a spacer element connected to said elastically deformable layer and support substrate and positioned there between, said spacer element being arranged so that the separation distance between said first and second inner surface is in the range between 2 and 100 micron; an inner chamber at least partially defined by said first and substrate and by said spacer element, said inner chamber containing a pressurized gas (G); an actuator system capable of causing a deformation of said central portion counteracting the pressure of said pressurized gas; wherein, in use, said central portion is deformed according to profiles such as to control

Abstract: An electro-optical apparatus has an element substrate that is provided with a mirror and a sealing member which seals the mirror, and the sealing member includes a light-transmitting cover which faces the mirror opposite from the element substrate. An infrared cut filter is laminated on the light-transmitting cover.

Abstract: A LiDAR device that transmits a single or multiple continuous or intermittent laser beams to the environment and detects the reflected light on one or more detectors. The LiDAR device may include a scanning mirrors array composed of a single or multiple moving mirrors capable of changing the direction of the transmitted light. The scanning mirrors array may also include sensors and actuators which can be used to precisely control or measure the position of the mirrors. The LiDAR device may also include a lens that focuses the light captured by the mirror(s) onto a single or a multitude of detectors. The device may include laser sources and detectors operating in various wavelengths. The LiDAR device may also include laser power modulation mechanisms at a single or multitude of frequencies to improve signal detection performance and remove any ambiguity in range calculation.

Abstract: A mirror unit includes a concave mirror having a mirror surface reflecting light, and a holder holding the concave mirror. The concave mirror includes first to third positioning protruding portions. The holder includes: a first holder-side positioning portion defining, through contact with the first positioning protruding portion, the position of the concave mirror with respect to the holder at least in the X direction of XY-plane coordinates along the mirror surface; a second holder-side positioning portion defining, through contact with the second positioning protruding portion, the position of the concave mirror with respect to the holder at least in the Y direction of the XY-plane coordinates; and a third holder-side positioning portion defining, through contact with the third positioning protruding portion, the position of the concave mirror with respect to the holder at least in the Z direction orthogonal to the XY lane.

Abstract: A microelectromechanical system (MEMS) ambient pressure and acoustic sensor including an enclosure having an enclosure wall that defines an interior chamber and an acoustic input opening to the interior chamber, a moving structure positioned within the interior chamber and being acoustically coupled to the acoustic input opening. The moving structure having an acoustic sensing portion that is movable in response to an acoustic pressure input and an ambient pressure sensing portion that is movable in response to an ambient pressure input. The sensor further including a circuit electrically coupled to the moving structure and that is operable to determine an acoustic output and an ambient pressure output based on a movement of the moving structure.

Abstract: The present disclosure provides a display panel and a display device. The display panel includes a first substrate and a second substrate, arranged opposite to each other to form a cell; a light-reflective pattern, formed on a side of the first substrate facing the second substrate; and a light guiding medium, arranged between the first substrate and the second substrate, and configured to guide incident light from the second substrate to the light-reflective pattern, so as to enable the incident light to be reflected by the light-reflective pattern to form reflecting light and guide the reflecting light to exit out of the second substrate.

Abstract: An electrostatic scanner has a mirror, a first outer slow-scan spring, a second outer slow-scan spring, a plurality of out-of-plane comb assemblies, circuitry for voltage or resistance measurement. Angular positions of a mirror can be determined by changes of resistance of deformed springs located in a leg of the circuitry. The determined angular positions of the mirror can be used for feedback control. The mirror is a one-dimensional mirror to rotate about a first axis or a two-dimensional mirror to rotate about the first axis and a second axis perpendicular to the first axis. In one example, the circuitry is Wheatstone bridge circuitry.

Abstract: A semiconductor light-emitting device includes a light-emitting stack including a first conductivity-type semiconductor layer, a second conductivity-type semiconductor layer, and an active layer disposed between the first conductivity-type semiconductor layer and the second conductivity-type semiconductor layer, a wavelength conversion layer disposed on the light-emitting stack and configured to convert at least some of light having a first wavelength, emitted from the active layer, into light having a second wavelength, and a light control layer disposed between the light-emitting stack and the wavelength conversion layer, and including a first insulating layer and a second insulating layer, the first insulating layer having a refractive index lower than a refractive index of the light-emitting stack, and the second insulating layer having a refractive index higher than a refractive index of the first insulating layer by 0.5 or more.

Abstract: A mirror with a reflective layer formed thereon is supported within a frame-shaped support by two U-shaped arms. A plate-like arm connects fixation points (Q1, Q2), and a plate-like arm connects fixation points (Q3, Q4). A pair of piezoelectric elements (E11, E12) disposed along a longitudinal axis (L1) on an upper surface of an outside bridge of the arm, and a single piezoelectric element (E20) disposed along the longitudinal axis (L2) on the upper surface of an inside bridge. Similarly, a pair of piezoelectric elements (E31, E32) disposed on an upper surface of an outside bridge of the arm, and a single piezoelectric element (E40) disposed on the upper surface of an inside bridge. When a positive drive signal is applied to the piezoelectric elements (E11, E20, E31, E40) and a negative drive signal is applied to the piezoelectric elements (E12, E32), the mirror is displaced efficiently.

Abstract: An optical scanning device that scans incident light by causing a mirror to oscillate is provided. The optical scanning device includes a displacement sensor for detecting a swing angle of the mirror and a temperature sensor used for temperature compensation of the displacement sensor. The displacement sensor is a piezoelectric sensor that has a structure in which a lower electrode, a piezoelectric film, and an upper electrode are layered in this order. The temperature sensor is a resistance type temperature measuring body that has a same layer structure as the lower electrode.

Abstract: An optical arrangement includes an optics holder and a reflective optic fixed to the optics holder, in which the optics holder includes at least two holding members for fixing the reflective optic to the optics holder, and in which at least one of the holding members is resiliently deflectable.

Abstract: A dynamic focus and zoom system for use with wide-field, confocal and multiphoton microscopes having first, second and third MEMS mirrors situated within a housing. First and second fixed lenses form an optical relay. A prism/mirror is situated proximate to a first portal in the housing and is aligned linearly with the optical relay and a first MEMS mirror. The second MEMS mirror is proximate to and at a ninety-degree angle relative to the first MEMS mirror, which is at a forty-five-degree angle to the second fixed lens. The second MEMS mirror, third fixed lens and third MEMS mirror are aligned linearly, with the third fixed lens situated between the second and third MEMS mirrors. The third MEMS mirror is proximate to a second portal in the housing. The third MEMS mirror is situated adjacent to the prism/mirror.

Abstract: A reflector has a reflective surface on first and second directions. Each of torsion beams extends to each opposite side of the reflective surface in the first direction. Each of coupling portions is to each opposite side of the reflector in the first direction and includes a central portion with U-shape having two projection portions and a bottom portion joined to the torsion beam. The projection portions include first concave portions opposing across the torsion beam by being penetrated in thickness direction. Each first concave portion extends in the second direction from an opening to a side surface facing the torsion beam towards an opposite side surface up to a bottom. A distance between the bottoms of the first concave portions across the torsion beam is greater than a distance between the side surfaces each facing the torsion beam of the projection portions.

Abstract: A dynamic focus and zoom system with three MEMS mirrors, three prisms, three beam splitters, three fixed lenses and an optical relay, all within a housing. The second prism, first and second fixed lenses, and first beam splitter are aligned linearly along a longitudinal axis of the optical relay. The first and second MEMS mirrors are linearly aligned with one another at a ninety-degree angle to such longitudinal axis. The third MEMS mirror, third fixed lens, third wave plate, third beam splitter and third prism are linearly aligned with one another at a ninety-degree angle to the same longitudinal axis. The third prism abuts up against the center of the optical relay between the first and second fixed lenses and is linearly aligned with the first prism such that the linear alignment of the first and third prisms is parallel to the longitudinal axis of the optical relay.

Abstract: An actuator device includes a support portion; a first movable portion; a first torsion bar portion coupling the first movable portion to the support portion to be swingable around a first swing axis; and a wiring disposed on the first torsion bar portion. The torsion bar portion is of a meandering shape including a plurality of straight sections extending in a first direction along the first swing axis and juxtaposed in a second direction intersecting with the first direction, and a plurality of turnover sections alternately coupling two ends of the straight sections. The plurality of turnover sections have a curved shape. The wiring includes wiring sections embedded in grooves formed in the turnover sections.

Abstract: A MEMS micro-mirror device comprising, a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure, wherein the first and second torsional arms are arranged to define a first oscillation axis about which the MEMS micro-mirror can oscillate; a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis, at least a portion of the single actuation coil being arranged to cooperate with the MEMS micro mirror; a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror; wherein the single actuation coil is configured to extend along the first and second torsional arms.

Abstract: A microelectromechanical device, a microelectromechanical system, and a method of manufacturing a microelectromechanical device, wherein the microelectromechanical device may include: a substrate; a diaphragm mounted to the substrate; a first electrode mounted to the diaphragm; a second electrode mounted to the substrate; wherein the first electrode is laterally adjacent to the second electrode; and wherein the diaphragm is arranged over a gap between the first electrode and the second electrode.

Abstract: The present invention concerns the use of hybrid metal-dielectric optical coatings as the end reflectors of laser cavities and/or in the mirror structures used in other optical resonators, such as Fabry-Perot tunable filters, along with the use of such Fabry-Perot tunable filters in wavelength swept sources such as lasers. Hybrid metal-dielectric optical coatings have reflectivity spectra that can be broader than pure dielectric coatings, offer optical reflectivities higher than metal, as high as pure dielectric coatings, eliminate mirror transmission that can cause parasitic light reflections, and use fewer layers and thus have lower mass and higher mechanical resonant frequency for movable mirror applications An important characteristic of these coatings concerns the non-reflected light. Pure dielectric coatings offer high reflectivity, while the non-reflected portion of the light is transmitted by the coating to the substrate, for example.

Abstract: The actuation range obtained with a bending piezoelectric actuator in MEMS mirror system is mechanically amplified by fixing the moving end of the actuator to a suspender which suspends a reflector from a frame. The fixing point lies somewhere between the two ends of the suspender. The actuator and the suspender together form an actuator unit with a greater actuation range than one actuator can obtain by itself. In one embodiment, the suspender is a rigid lever. In another embodiment, the suspender is another bending actuator so that an additional increase in the actuation range can be obtained from the actuating movement of the second actuator.

Abstract: A microelectromechanical system (MEMS) mirror assembly includes a base substrate defining a cavity and a plurality of first features extending upwards from a bottom of the cavity. The MEMS mirror assembly includes a mirror substrate coupled to the base substrate and defining a MEMS actuator and a MEMS mirror platform. Actuation of the MEMS actuator moves the MEMS mirror platform from a first positional state to a second positional state. The MEMS mirror platform defines a plurality of second features on a side of the MEMS mirror platform facing the base substrate that are sized, shaped, and positioned such that the plurality of second features extend into spaces separating the plurality of first features when the mirror platform is in the second positional state. The MEMS mirror assembly includes a reflective material disposed on a side of the MEMS mirror platform facing away from the base substrate.

Abstract: Certain embodiments of the present disclosure provide a method for communicating data flows. The method generally includes receiving control flow information corresponding to a data flow for communication from a first device to a second device, and determining one or more characteristics of the data flow based on the control flow information. For example, the one or more characteristics may include whether the data flow is a mice flow or an elephant flow. In certain aspects, the method further includes communicating the data flow based on the determined characteristics.

Abstract: A reflector assembly includes a monolithic and adaptive reflector having a single and continuous reflecting surface and a focusing shape. The reflector assembly further includes a plurality of trusses for supporting the monolithic and adaptive reflector and a plurality of actuators, each of the plurality of actuators operatively connected to one of the plurality of trusses. Actuation of each of the plurality of actuators exerts a force which flexes at least a portion of the continuous reflecting surface.

Abstract: A MEMS device includes a fixed structure and a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure. Each of the first and second deformable structures includes a respective number of main piezoelectric elements, with the main piezoelectric elements of the first and second deformable structures configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively. The first deformable structure further includes a respective number of secondary piezoelectric elements configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis.

Abstract: Provided are an encapsulation structure and encapsulation method for an integrated sensor. The encapsulation structure comprises: a first substrate (1) and a first outer housing (2), the first outer housing and first substrate enclosing a first encapsulation cavity; a plurality of sensors arranged inside the first encapsulation cavity, each of the sensors comprising MEMS sensor chips (3, 8) and ASIC chips (5, 7) electrically connected to the MEMS sensor chips; inside the first encapsulation cavity, the exterior of the ASIC chip of at least one of the sensors is provided with a shielding structure.

Abstract: An electrooptical apparatus includes a torsion hinge and a mirror support post that are formed integrally with an electroconductive member. Of the mirror support post (second support post), a first end portion at a substrate side has an open end whose opening faces the substrate. Of the mirror support post, a second end portion at a mirror side is a flat plate portion that closes the opening of the mirror support post. A mirror is in contact with the opposite side of the flat plate portion to the substrate. A first sacrificial layer for use for production of the electrooptical apparatus is formed by exposing and developing a photosensitive resist.

Abstract: The current invention concerns an apparatus and a method for positioning an optical element, said apparatus comprising a positionable part to which the optical element can be mounted; a base part; a suspension system, said positionable part being mounted on said base part in a movable manner with said suspension system; an actuation system for actuating movement of said positionable part with respect to said base part; and a control system for controlling movement of said positionable part.

Abstract: The present invention relates to magnetoelastic resonators, sensors, and tunable devices, as well as methods for making such components. The resonators can be used as tags and/or sensors. In general, the resonators include one or more micron-sized resonator portions affixed on a substrate. For use as a tag, each tag includes a plurality of resonator portions that allow for multiplexed coding, and methods for making tags and arrays of such tags include use of electrodeposition processes. In particular embodiments, these components include an electrodeposited material that exhibits magnetostrictive properties.

Abstract: A deformable mirror comprises a deformable membrane extending at rest in a first plane and having a reflecting front face and a back face opposite the front face, a supporting structure, an actuator having a first and second end, the first end fixed to the supporting structure, the second end displaced relative to the first end on a first axis substantially at right angles to the first plane to exert, on the back face, an axial load on the first axis, to locally deform the deformable membrane. The mirror comprises a plate that is substantially flat in a second plane substantially parallel to the first plane, positioned between the actuator and deformable membrane, linked to the back face and deformed when the actuator exerts the axial load, and the plate is rigid in the second plane to take up loads applied to the mirror in the second plane.

Abstract: An optical scanner comprises a light source, an MEMS mirror and a position detector. The light source emits a light beam. The MEMS mirror deflects the light beam emitted from the light source. The position detector detects the position of the MEMS mirror. The position detector is configured on the same semiconductor substrate with the MEMS mirror.

Abstract: An assembly body for micromirror chips that partly encloses an internal cavity, the assembly body including at two sides oriented away from one another, at least one respective partial outer wall that is fashioned transparent for a specified spectrum, and the assembly body having at least one first outer opening on which a first micromirror chip can be attached, and a second outer opening on which a second micromirror chip can be attached, in such a way that a light beam passing through the first partial outer wall is capable of being deflected by the first micromirror chip onto the second micromirror chip, and is capable of being deflected by the second micromirror chip through the second partial outer wall. A mirror device and a production method for a mirror device are also described.

Abstract: A micromirror device including a drive unit, which includes a movable drive element, which is situated in a first plane, and a guiding device, and a mirror, which is elastically coupled to the drive element and is situated in the idle position in a second plane, which is in parallel to the first plane, the guiding device being designed to guide a movement of the drive element on a straight line situated in the first plane. Furthermore, a corresponding projection device is described.

Abstract: There are provided an image processing apparatus and a control method thereof. An image processing apparatus includes an image sensor for acquiring a target image, an image processing module for performing focusing on a specific area of the acquired target image and determining a focal surface of the target image on the basis of the performed focusing, and a drive control module for controlling the curvature of the image sensor, based on the determined focal surface.

Abstract: A light deflecting device which suppresses a vibration caused by swing of a light deflecting unit and transmitted to a fixed unit and prevents noise from being made on a housing to which the fixed unit is attached, including a light deflecting unit having paired beams on both sides of a movable unit having a light reflecting unit and a coil, and a fixed unit to which the light deflecting unit is swingably fixed through the beams and which includes a magnetic field forming unit, swings the movable unit with the beams as torsional rotation axes by an electromagnetic force generated by a driving current flowing to the coil and a magnetic field formed by the magnetic field forming unit, and a counter swing member in the fixed unit to be swung in a reverse phase to the light deflecting unit so it is opposed to the light deflecting unit.

Abstract: An optical device includes: an optical portion that has a light incident surface on which light is incident; a movable portion that supports the optical portion; a shaft portion that supports the movable portion so that the movable portion is oscillatable; and a fixing portion that is connected to the shaft portion, wherein the fixing portion has a thickness greater than the shaft portion and includes a portion of which an end not connected to the shaft portion serves as a free end.

Abstract: A MEMS-micro-mirror (30) is provided comprising a mirror body (50) that is rotatably arranged in a mirror frame (60) around a rotation axis (58) extending in a plane defined by the mirror body. The rotation axis extends through a first and a second mutually opposite end-portion (51, 53) of the mirror body. The mirror has a reflective first main surface (55) and opposite said first main surface a second main surface (57) provided with a first and a second pair of reinforcement beams. The pair of reinforcement beams (91a, 91b) extends from the first end-portion (51) in mutually opposite directions away from the rotation axis. The second pair of reinforcement beams (93a, 93b) extends from the second end-portion (53) in mutually opposite directions away from the rotation axis. Reinforcement beams of said first pair extend towards respective ones of said second pair.

Abstract: In a driver for driving an optical deflector including a mirror, a piezoelectric actuator and a piezoelectric sensor adapted to sense vibrations of the piezoelectric actuator, a saw-tooth voltage generating unit; a combined saw-tooth voltage generating unit; and a control unit, the control unit applies a saw-tooth voltage and its inverted voltage to the piezoelectric actuator; performs a low-pass filtering process using a cut-off frequency upon a sense voltage; calculates a half period of fluctuations included in a low-pass-filtered saw-tooth voltage; combines the low-pass-filtered saw-tooth voltage with a delayed low-pass-filtered saw-tooth voltage; and to applies a combined saw-tooth voltage and its inverted voltage to the piezoelectric actuator.

Abstract: According to embodiments, an electric field sensor having a sensor electrode is constructed of an electrically conductive material and having one or more outwardly protruding pillars. A screen electrode overlies the sensor electrode and has one or more openings which register with the one or more pillars on the sensor electrode. At least one piezoelectric actuator is connected to the screen electrode so that, when excited by a voltage signal, the piezoelectric actuator modulates the screen electrode toward and away from the sensor electrode at the frequency of the periodic voltage signal. An output circuit configured to detect a voltage, a current output, or both, between the sensor electrode and the screen electrode which is proportional in magnitude to the strength of the electric field.

Abstract: There is disclosed a directional multi-band antenna comprising: a primary reflector, at least one secondary reflector, a multi-layer dielectric layer selectively reflective or transmissive of incident radiation according to wavelength, the layer being provided at the surface of either the primary or the secondary reflector, an RF unit comprising a collocated sensor and transmitter, an Optical unit comprising a collocated sensor and transmitter, arranged such that the primary reflector is for passing signals between the secondary reflector and the environment, the secondary reflector is firstly for passing signals between the primary reflector and the RF unit, and secondly for passing signals between the primary reflector and the Optical unit and arranged such that the antenna is operable to transmit or receive, RF or Optical signals, along a common beam axis.

Abstract: A support device for an optical apparatus is disclosed. The support device includes first and second support elements. The support device also includes first and second flexure bearings. The first flexure bearing and the second flexure bearing each connect the first support element and the second support element to one another in a thermally conductive manner and hold the first support element in a manner movable in at least one first direction relative to the second support element. Spring forces generated by the first flexure bearing and the second flexure bearing partly or completely cancel one another out in the case of a movement of the first support element relative to the second support element in the first direction.

Abstract: According to the present invention there is provided a method of controlling the position of a MEMS mirror in a MEMS device, wherein the MEMS device comprises, a MEMS mirror, a magnet which provides a magnetic field (B), an actuating means which operatively cooperates with the MEMS mirror so that it can apply a force to the MEMS mirror which can tilt the MEMS mirror about at least one rotational axis when the actuating means is provided with a drive signal, wherein the magnitude force applied by the actuating means to the MEMS mirror is dependent on the amplitude of the drive signal, and a detection coil which is mounted on the MEMS mirror, the method comprising the steps of, detecting a change in the resistance (R) of the detection coil so as to detect a change in temperature of the MEMS mirror; determining the drive signal amplitude required to maintain the MEMS mirror at a predefined angular position (?); providing the actuating means with a drive signal which has an amplitude which is equal to the determi

Abstract: An optical reflecting device includes a mirror part, a pair of joints, a pair of vibration parts, a plurality of driving parts, and a fixed part. Each of the joints has a first end connected to respective one the facing positions to each other on the mirror part and a second end opposite to the first end, and extends along a first axis. Each of the vibration parts has a central portion connected to the second end of respective one of the joints. A plurality of driving parts is disposed in each of the pair of vibration parts, and rotates the mirror part. Both ends of each of the pair of vibration parts are connected to the fixed part. The beam width defined as the length of each of the joints in a direction orthogonal to the first axis is greater than the beam width of each of the pair of vibration parts.

Abstract: A mirror drive device is provided as one capable of efficiently gaining a driving force. The mirror drive device 1 has a fixed frame 5; a movable portion 7 supported so as to be swingable relative to the fixed frame 5, through torsion bars 10a, 10b extending on an identical straight line, and being of a circular shape; a mirror 9 arranged on a principal surface 7a of the movable portion 7; and a permanent magnet 3 forming a magnetic field around the movable portion 7; the movable portion 7 has a drive coil 12 arranged below the mirror 9; the drive coil 12 is of a 2n-sided polygon shape (where n is an integer of 3 or more) when viewed from a direction orthogonal to the principal surface 7a, at least one side of which is orthogonal to a direction of the magnetic field F.

Abstract: A novel optical assembly apparatus for coupling optical energy and a related method for creating the novel optical assembly apparatus are disclosed. In one embodiment, the novel optical assembly apparatus includes a high-index contrast waveguide constructed on a semiconductor die or another base substrate with an aligned optical coupling section, a grating coupler etched onto a surface, a micro mirror with an acute angle relative to the surface, and a waveguide taper that narrows an optical beam width. A light ray entered into the optical coupling section is redirected by the micro mirror to form a perpendicular ray entry angle with the grating coupler. The grating coupler then efficiently couples the light ray with the waveguide taper, which in turn narrows the optical beam width. The light ray may originate from a semiconductor die or from an optical fiber, which is purposefully aligned with the high-index contrast waveguide.

Abstract: A new and useful illumination device, e.g. for a lithographic optical imaging system, is provided, and comprises a mirror array located between a radiation source and an illumination pupil. Each mirror element of the mirror array is individually steerable (controllable), and the polarization state of light from each mirror element of the mirror array can be selectively controlled, so that the illumination pupil can be filled with a distribution of light that is selectively controlled.

Abstract: A torsion bar portion is of a meandering shape including a plurality of straight sections and a plurality of turnover sections. The plurality of straight sections extends in a first direction along a swing axis and is juxtaposed in a second direction intersecting with the first direction. The plurality of turnover sections alternately couples two ends of the straight sections. Wiring is disposed on the torsion bar portion. The wiring includes first wiring sections and second wiring sections. The first wiring sections include damascene wiring sections that are disposed so as to be embedded in grooves formed in the turnover sections and that are made of a first metal material including Cu. The second wiring sections are disposed on the straight sections and are made of a second metal material more resistant to plastic deformation than the first metal material.