Reflective Element Moved By Deformable Support Patents (Class 359/224.1)
  • Patent number: 8422115
    Abstract: A display device is provided. The display device includes: a substrate including a unit display area, a fixing member that is formed on the substrate and that is electrically isolated, an insulating layer that is formed on the fixing member, a fixing electrode that is formed on the insulating layer and that is electrically connected to a power source, and a plurality of moving members with one end fixed to the insulating layer and positioned apart by a distance from the fixing electrode. The plurality of moving members and the fixing electrode are positioned within the unit display area.
    Type: Grant
    Filed: August 25, 2008
    Date of Patent: April 16, 2013
    Assignee: Samsung Display Co., Ltd.
    Inventors: Jae-Hyuk Chang, Seong-Sik Shin, Nam-Seok Roh, Kyung-Ho Lee, Jun-Bo Yoon
  • Patent number: 8422108
    Abstract: An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.
    Type: Grant
    Filed: December 18, 2009
    Date of Patent: April 16, 2013
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventor: Mark W. Miles
  • Patent number: 8422109
    Abstract: An optical reflection device includes a mirror having a reflection surface configured to reflect light, a first support beam connected to the mirror, a tuning fork vibrator connected to the first support beam, a second support beam connected to the tuning fork vibrator, and a supporter connected to the second support beam. The first support beam has a first end connected to the mirror and a second end located on an opposite side to the first end, and extends along a center axis. The tuning fork vibrator includes a joining portion connected to the second end of the first support beam, a first arm extending from the first joining portion while separated from the first center axis, and a second arm extending from the first joining portion symmetrically to the first arm about the first center axis. The second support beam has a third end connected to the joining portion of the tuning fork vibrator and a fourth end located on an opposite side to the third end, and extends along the first center axis.
    Type: Grant
    Filed: January 29, 2009
    Date of Patent: April 16, 2013
    Assignee: Panasonic Corporation
    Inventors: Jirou Terada, Shinsuke Nakazono, Shigeo Furukawa, Kazuki Komaki
  • Patent number: 8416484
    Abstract: This vibrating mirror element includes a pair of first beam portions supporting a mirror portion in a vibratile manner, a pair of second beam portions connected with the pair of first beam portions respectively, and a pair of driving portions connected with the pair of second beam portions respectively. The mirror portion is arranged in a region surrounded by the pair of second beam portions and the pair of driving portions. The width of the pair of first beam portions and the width of the pair of second beam portions are rendered smaller than the width of the pair of driving portions.
    Type: Grant
    Filed: November 5, 2009
    Date of Patent: April 9, 2013
    Assignee: Funai Electric Co., Ltd.
    Inventors: Isaku Kanno, Manabu Murayama, Hitoshi Fujii
  • Publication number: 20130083381
    Abstract: In an optical deflector apparatus, an optical deflector chip includes a mirror, an actuator adapted to rock the mirror, and first pads on a front surface of the optical deflector chip and connected to the actuator. A first substrate includes second pads on a back surface of the first substrate, and an opening is formed in the first substrate. The front surface of the optical deflector chip is adhered to the back surface of the first substrate in such a way that the first pads of the optical deflector chip are in contact with respective ones of the second pads of the first substrate and the mirror opposes the opening. A back surface of said optical deflector chip is adhered to a front surface of a second substrate.
    Type: Application
    Filed: September 11, 2012
    Publication date: April 4, 2013
    Applicant: STANLEY ELECTRIC CO., LTD.
    Inventor: Yoshiaki Yasuda
  • Publication number: 20130083382
    Abstract: An actuator includes a drive beam; a lower electrode formed on the drive beam; a piezoelectric element provided on the lower electrode; an upper electrode provided on the piezoelectric element; an upper wiring connecting the upper electrode and a wiring for supplying a voltage to the upper electrode; and an insulating part providing electrical insulation between the upper electrode and the lower electrode and formed under the upper wiring such that it covers an end of the lower electrode. The insulating part includes insulating extension parts extended on opposite sides of the upper wiring in a width direction of the upper wiring.
    Type: Application
    Filed: September 24, 2012
    Publication date: April 4, 2013
    Applicant: MITSUMI ELECTRIC CO., LTD.
    Inventors: Hisamichi SEKINE, Hisanori AGA, Yuki MARUYAMA
  • Patent number: 8411343
    Abstract: An optical scanning device of the invention includes: a substrate; torsion bar portion which is connected to the substrate; a mirror portion which is supported by the torsion bar portion; a drive source which causes the substrate to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to the substrate by the drive source, and the direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, and a spring constant in a longitudinal direction of the torsion bar portion supporting the mirror portion is distributed along the longitudinal direction of the torsion bar portion.
    Type: Grant
    Filed: September 26, 2007
    Date of Patent: April 2, 2013
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventors: Jun Akedo, Jaehyuk Park
  • Patent number: 8411340
    Abstract: An optical microscanner achieves wide rotation angles utilizing a curved reflector. The optical microscanner includes a moveable mirror for receiving an incident beam and reflecting the incident beam to produce a reflected beam and a Micro Electro-Mechanical System (MEMS) actuator that causes a linear displacement of the moveable mirror. The curved reflector produces an angular rotation of the reflected beam based on the linear displacement of the moveable mirror.
    Type: Grant
    Filed: April 16, 2010
    Date of Patent: April 2, 2013
    Assignee: Si-Ware Systems
    Inventors: Diaa A. Khalil, Hisham Haddara
  • Patent number: 8405899
    Abstract: An optical device includes a non-transparent substrate. The optical device further includes a first optical layer which is at least partially transmissive and at least partially reflective to incident light. The optical device further includes a second optical layer which is at least partially reflective to incident light. The second optical layer is spaced from the first optical layer. At least one of the first optical layer and the second optical layer is movable between a first position at a first distance from the first optical layer and a second position at a second distance from the first optical layer. Movement of the at least one of the first optical layer and the second optical layer between the first and second positions modulates the reflectivity of the device.
    Type: Grant
    Filed: July 20, 2009
    Date of Patent: March 26, 2013
    Assignee: Qualcomm Mems Technologies, Inc
    Inventor: Clarence Chui
  • Patent number: 8400697
    Abstract: A disclosed optical scanner apparatus can include a member having spaced apart proximal and distal portions. An optical scanning device can be configured to direct optical radiation, which is moveably coupled to the proximal portion of the member and can be configured to rotate in a plane of movement to a first position to direct the optical radiation along a first path and can be configured to rotate in the plane of movement to a second position to direct the optical radiation along a second path. A MicroElectroMechanical Systems (MEMS) actuator can be coupled to the optical scanning device, where the MEMS actuator can be configured to move in a first direction to move the optical scanning device to the first position and can be configured to move in a second direction to move the optical scanning device to the second position.
    Type: Grant
    Filed: March 12, 2010
    Date of Patent: March 19, 2013
    Assignees: Duke University, University of North Carolina at Charlotte
    Inventors: Stephen W. Smith, Kenneth L. Gentry, Jason Zara, Stephen M. Bobbio
  • Patent number: 8395834
    Abstract: The deflecting mirror includes a fixed base member; a mirror having a reflection surface; a support member swingablly supporting the mirror; a pair of driving beam members, each having a first end connected with the fixed base member and a second end connected with the support member to support the support member from both sides; and a piezoelectric member fixed to each driving beam member and extending from the first or second end of each driving beam member while having length not longer than about half the length of the driving beam member. The piezoelectric member and the driving beam members constitute piezoelectric unimorph or bimorph structure. By applying voltage to the piezoelectric member, the driving beam members are driven at the same time in the same direction, thereby vibrating the support member in a direction perpendicular to the reflection surface of the mirror, resulting in swinging of the mirror.
    Type: Grant
    Filed: January 28, 2010
    Date of Patent: March 12, 2013
    Assignee: Ricoh Company, Limited
    Inventors: Goichi Akanuma, Tomofumi Kitazawa, Fumiko Sakoh
  • Patent number: 8390909
    Abstract: A laser scanning assembly includes a coil support element having a central axis about which is wound an electromagnetic wire coil and having a flange oriented generally transverse to the central axis. An elastomeric flexural element has a first end coupled to the flange. A permanent magnet has first and second surfaces, a central axis, and a magnetization direction oriented generally transverse to the central axis of the permanent magnet. The magnet is supported by a second end of the elastomeric flexural element. A mirror has a central axis and is mounted on the second surface of the magnet. The central axes of the mirror and magnet are coaxial with the central axis of the coil support element. The elastomeric flexural element provides a return force when the magnet and the mirror are rotated at an angle from the central axis during energization of the electromagnetic wire coil.
    Type: Grant
    Filed: September 23, 2010
    Date of Patent: March 5, 2013
    Assignee: Metrologic Instruments, Inc.
    Inventor: George Plesko
  • Patent number: 8390912
    Abstract: An actuator, includes: a movable plate; a supporter to support the movable plate; a pair of linking portions to link the movable plate and the supporter so as to allow the movable plate to rotate relative to the supporter; and a piezoelectric element to rotate the movable plate. The piezoelectric element elongated and contracted by an energization twists the pair of linking portions to rotate the movable plate, and each of the pair of the linking portions includes an axial member extending from the movable plate and a returned portion that links the axial member and the supporter and is formed so as to return to a side adjacent to the movable plate.
    Type: Grant
    Filed: January 4, 2008
    Date of Patent: March 5, 2013
    Assignee: Seiko Epson Corporation
    Inventors: Tomoaki Nakamura, Yasushi Mizoguchi
  • Patent number: 8379283
    Abstract: A micromechanical element includes a movable functional element, a first retaining element, a second retaining element, a third retaining element, and a fourth retaining element. The first retaining element and the functional element are connected at a first junction, the second retaining element and the functional element are connected at a second junction, the third retaining element and the functional element are connected at a third junction, and the fourth retaining element and the functional element are connected at a fourth junction. In addition, the first retaining element and the second retaining element each include a piezoelectric driving element, the driving element of the first retaining element and the driving element of the second retaining element being configured to move the functional element in accordance with electric excitation.
    Type: Grant
    Filed: September 25, 2009
    Date of Patent: February 19, 2013
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
    Inventors: Thomas Klose, Thomas Grasshoff, Holger Conrad
  • Patent number: 8373916
    Abstract: An optical scanner, including a frame member; a pair of connection members near a coupling end with the frame member; a pair of elastic members connected with the frame member by the connection members; a mirror substrate supported by the pair of elastic members, the mirror substrate having a bending rigidity outward from the rotational axis for each area in accordance with a bending moment caused by oscillation, the mirror substrate having a slit at both connection ends with the pair of elastic members; and a piezoelectric element provided on each of the connection members, the piezoelectric element generating a torque for driving the mirror substrate oscillatable back and forth around the pair of elastic members as a torsion rotational axis.
    Type: Grant
    Filed: March 12, 2010
    Date of Patent: February 12, 2013
    Assignee: Ricoh Company, Ltd.
    Inventors: Mitsumi Fujii, Tetsurou Saitoh, Eiji Mochizuki, Kohki Sasaki
  • Patent number: 8368983
    Abstract: A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: February 5, 2013
    Assignee: Micralyne, Inc.
    Inventors: Barrie Keyworth, Kevin Kornelsen, Jared Crawford
  • Patent number: 8355191
    Abstract: An actuator includes a mass section; a support section; a coupling section for coupling the mass section rotatably to the support section so as to support the mass section with cantilever structure; and a pair of driving sources including a piezoelectric element for rotating the mass section, wherein the pair of driving sources are provided separately from each other with respect to a central axis of rotation of the mass section, each of the driving sources is provided slidably with respect to the coupling section or the support section, and the actuator is structured such that it causes the pair of piezoelectric elements to expand and contract in phases opposite to each other, so as to rotate at least a part of the coupling section while torsionally deforming the mass section.
    Type: Grant
    Filed: September 7, 2007
    Date of Patent: January 15, 2013
    Assignee: Seiko Epson Corporation
    Inventors: Yasushi Mizoguchi, Mitsuhiro Yoda, Makiko Nakamura
  • Patent number: 8345340
    Abstract: A method of adjusting a resonance frequency in an optical scanning device containing: providing the optical scanning device having a substrate composed of a substrate main body and two cantilever beam portions, a drive source, a mirror portion, and a supporting component for fixing the substrate main body at a fixed end; and reducing an area of the substrate which protrudes from the fixed end to an outside of the supporting component, thereby to increase the resonance frequency; or alternatively, increasing the area of the substrate which protrudes from the fixed end to the outside of the supporting component, thereby to reduce the resonance frequency.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: January 1, 2013
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventors: Jaehyuk Park, Jun Akedo
  • Patent number: 8345339
    Abstract: The optical deflector includes a deflector, a vibration detector, a driving signal generator, a modulation timing signal generator, and a deflection detector. The deflector has a vibrational system having a movable body with a light deflecting member, and deflects light from a light source by the movable body. The vibration detector detects the vibration condition of the vibrational system of the deflector. The driving signal generator generates a driving signal for driving the vibrational system of the deflector. The modulation timing signal generator generates a modulation timing signal as the reference time for regulating the amount of light from the light source. The deflection detector detects the deflection condition of light deflected by the deflector.
    Type: Grant
    Filed: June 12, 2008
    Date of Patent: January 1, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventors: Atsushi Kandori, Masao Majima, Kazunari Fujii
  • Publication number: 20120327495
    Abstract: In a two-dimensional optical deflector including a mirror, a movable frame supporting the mirror, a first piezoelectric actuator connected between the movable frame and the mirror and adapted to rock the mirror with respect to a first axis of the mirror, a support body supporting the movable frame, and a second piezoelectric actuator connected between the support body and the movable frame and adapted to rock the mirror through the movable frame with respect to a second axis of the mirror, at least one piezoelectric sensor is provided on the movable frame and adapted to sense rocking vibrations of the mirror caused by the first and second piezoelectric actuators.
    Type: Application
    Filed: May 31, 2012
    Publication date: December 27, 2012
    Inventor: Takanori AIMONO
  • Publication number: 20120320441
    Abstract: This vibrating mirror element (100) includes a mirror portion (10), a first driving portion (41), being cantilevered, including a first fixed end (41a) formed on a first side of a first direction and a first free end (41b) formed on a second side thereof, and linearly extending, a first mirror support portion (46) capable of supporting the mirror portion (10) in an inclined state, a second driving portion (51), being cantilevered, including a second fixed end (51a) formed on the second side of the first direction and a second free end (51b) formed on the first side thereof, being point-symmetrical to the first driving portion with respect to the center of a mirror, and linearly extending, and a second mirror support portion (56) being point-symmetrical to the first mirror support portion with respect to the center of the mirror and capable of supporting the mirror portion in an inclined state.
    Type: Application
    Filed: December 24, 2010
    Publication date: December 20, 2012
    Applicant: FUNAI ELECTRIC CO., LTD.
    Inventors: Isaku Kann, Hidetoshi Kotera, Manabu Murayama, Naoki Inoue
  • Publication number: 20120320440
    Abstract: There is provided a vibrating mirror element capable of inhibiting flexural deformation of a support portion. This vibrating mirror element (100) includes a mirror portion (10), a deformable driving portion (41, 43, 45, 51, 53, 55), and a support portion (42, 44, 46, 52, 54, 56) connected with a first connecting portion (41c, 43d, 45d, 51c, 53d, 55d) of the driving portion on the side of a first end portion (42a, 44a, 46a, 52a, 54a, 56a), while the thickness of the support portion is larger than the thickness of the driving portion.
    Type: Application
    Filed: December 20, 2010
    Publication date: December 20, 2012
    Applicant: FUNAI ELECTRIC CO., LTD.
    Inventors: Hidetoshi Kotera, Isaku Kanno, Manabu Murayama, Hitoshi Fujii
  • Patent number: 8325405
    Abstract: The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.
    Type: Grant
    Filed: April 19, 2012
    Date of Patent: December 4, 2012
    Assignee: Industrial Technology Research Institute
    Inventors: Yu-Jen Wang, Chien-Shien Yeh, Chung-De Chen, Hung-Chung Li
  • Patent number: 8325407
    Abstract: Provided is an oscillating device, which can adjust the oscillation angle and the phase of a movable plate easily with a simple constitution. A light scanning device acting as the oscillating device comprises a mirror element for oscillating the movable plate having a mirror film, a control circuit having a duty ratio adjusting unit and a function to change the duty ratio of the pulse voltage, so that it applies the pulse voltage thereby to drive a vertical comb of the mirror element, and an oscillation detecting unit for detecting the oscillations of the movable plate. On the bases of the movable plate oscillations detected by the oscillation detecting unit, the control circuit controls the duty ratio adjusting unit thereby to change the duty ratio of the pulse voltage.
    Type: Grant
    Filed: March 23, 2008
    Date of Patent: December 4, 2012
    Assignee: Panasonic Corporation
    Inventors: Kiyohiko Kawano, Hiroshi Noge, Hideki Ueda
  • Patent number: 8314984
    Abstract: An optical deflection device for a display application includes a semiconductor substrate comprising an upper surface region defining an upper surface plane. The optical deflection device also includes one or more electrode devices provided overlying the upper surface region and a hinge device including a silicon material and coupled to the upper surface region at a predetermined height above the upper surface plane. The optical deflection device further comprises a plurality of landing pads including a silicon material and coupled to the upper surface region at the predetermined height from the upper surface plane and a mirror structure. The mirror structure includes a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion.
    Type: Grant
    Filed: February 14, 2008
    Date of Patent: November 20, 2012
    Assignee: Miradia Inc.
    Inventors: Xiao Yang, Ye Wang, Yuxiang Wang, Justin Payne, Wook Ji
  • Patent number: 8305674
    Abstract: A method of manufacturing an oscillator device having an oscillator supported relative to a fixed member by a torsion spring for oscillation around a torsion axis and arranged to be driven at a resonance frequency, which method includes a first step for determining an assumed value of an inertia moment weight of the oscillator, a second step for measuring the resonance frequency, a third step for calculating a spring constant of the torsion spring, from the assumed value of the inertia moment weight and the measured resonance frequency obtained at said first and second steps, a fourth step for calculating an adjustment amount for the inertia moment of the oscillator or for the spring constant of the torsion spring, based on the spring constant calculated at said third step and a target resonance frequency determined with respect to the resonance frequency of the oscillator, so as to adjust the resonance frequency to the target resonance frequency, and a fifth step for adjusting the resonance frequency of the
    Type: Grant
    Filed: October 28, 2008
    Date of Patent: November 6, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventors: Suguru Miyagawa, Takahiro Akiyama, Kazutoshi Torashima, Takahisa Kato, Kazunari Fujii
  • Patent number: 8305672
    Abstract: A magnetically actuated system includes a conductor and a magnetic field apparatus to generate a magnetic field. The magnetic field apparatus includes magnets and magnetically permeable materials to focus the magnetic field in areas of the conductor that produce a drive torque when the conductor carries a current.
    Type: Grant
    Filed: February 23, 2010
    Date of Patent: November 6, 2012
    Assignee: Microvision, Inc.
    Inventors: Selso Luanava, Matthew Ellis
  • Patent number: 8305669
    Abstract: An optical scanning device of the invention includes: a substrate main body; two cantilever beam portions which protrude from both-side portions of one side of the substrate main body; a mirror portion whose both-sides are supported by torsion bar portions between the cantilever beam portions; a drive source which causes the substrate main body to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to a substrate by the drive source, and a direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, and where a fixed end portion of the substrate main body which is located on the opposite side thereof from the mirror portion side is fixed to a supporting component, and the drive source is provided on a portion of the substrate main body.
    Type: Grant
    Filed: September 26, 2007
    Date of Patent: November 6, 2012
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventors: Jun Akedo, Harumichi Sato, Jaehyuk Park
  • Patent number: 8300292
    Abstract: An optical scanner including a base body, a drive unit, a deflection status detector and a controller is provided. The base body has a non-linear frequency characteristic and has a first resonance frequency and a second resonance frequency. The controller includes a first upsweep unit which upsweeps a drive frequency from a frequency lower than the first resonance frequency; a dropping phenomenon detector which detects the dropping phenomenon; a target drive frequency determination unit which determines a frequency lower than a frequency at which the dropping phenomenon is detected, as a target drive frequency; a second upsweep unit which upsweeps the drive frequency toward the target drive frequency from a frequency lower than the first resonance frequency; and an adjustment unit which adjusts the drive frequency of the drive signal to keep the deflection status at the target drive frequency after the operation of the second upsweep unit.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: October 30, 2012
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Masatoshi Kouyama
  • Patent number: 8294969
    Abstract: A scan element includes a bobbin having a central axis about which is wound an electromagnetic wire coil and having a flange oriented generally transverse to the central axis. At least one elastomeric support has a first end coupled to the flange. A permanent magnet has first and second surfaces, a central axis, and a magnetization direction oriented generally transverse to the central axis of the permanent magnet. The magnet is supported by a second end of the elastomeric support. A mirror has a central axis and is mounted on the second surface of the magnet. The central axes of the mirror and magnet are coaxial with the central axis of the bobbin. The elastomeric support provides a return force when the magnet and the mirror are rotated at an angle from the central axis during energization of the electromagnetic wire coil.
    Type: Grant
    Filed: September 23, 2009
    Date of Patent: October 23, 2012
    Assignee: Metrologic Instruments, Inc.
    Inventor: George A. Plesko
  • Patent number: 8294968
    Abstract: An optical scanning element is provided and includes: a substrate; a first movable section supported on the substrate so as to be capable of rocking displacement about a first axis parallel to a surface of the substrate; a second movable section arranged integrally on the first movable section and supported so as to be capable of rocking displacement about a second axis perpendicular to the first axis, the second movable section having a micro mirror on an upper surface thereof; and a driving section that applies a physical action force on the first movable section and the second movable section so as to cause the micro mirror to perform rocking displacement in two axial directions about the first axis and the second axis.
    Type: Grant
    Filed: September 19, 2008
    Date of Patent: October 23, 2012
    Assignee: FUJIFILM Corporation
    Inventor: Shinya Ogikubo
  • Patent number: 8289599
    Abstract: A piezoelectric actuator corrects for imperfections in printed material caused by the vertical rotation of a photosensitive image forming surface, such as a photoconductive drum. The piezoelectric actuator may be mounted to the base of a reflective surface holder, such as a mirror holder, that holds a mirror. The reflective surface holder may be operable to horizontally rotate the mirror as the mirror reflects a laser onto the photosensitive image forming surface. A power supply in communication with the piezoelectric actuator applies a voltage to the piezoelectric actuator. The resulting voltage allows the piezoelectric actuator to tilt the mirror in a vertical direction. A memory storage device may store tilt adjustment data usable by a microprocessor or controller to control the amount of voltage the power supply supplies to the piezoelectric actuator.
    Type: Grant
    Filed: December 17, 2007
    Date of Patent: October 16, 2012
    Assignee: Marvell International Ltd.
    Inventor: Douglas G. Keithley
  • Publication number: 20120249804
    Abstract: A work hardening treatment which decreases the Young's modulus, and an age hardening treatment which recovers or increases the Young's modulus decreased by the work hardening treatment are performed to form a vibrating portion, thereby attaining a vibrating element (30) advantageous in downsizing while ensuring desired fatigue characteristics and vibration characteristics. This downsizes, for example, an actuator device (1), an optical scanning device, a video projection apparatus, and an image forming apparatus.
    Type: Application
    Filed: June 11, 2012
    Publication date: October 4, 2012
    Applicant: CANON DENSHI KABUSHIKI KAISHA
    Inventors: Naruki Suzuki, Katsumi Arai, Takayuki Wakabayashi
  • Patent number: 8277088
    Abstract: In various embodiments, an optical element may include at least one elastically deformable support, on which at least one reflective layer is applied; and in addition at least one deformation apparatus for elastically deforming the at least one support.
    Type: Grant
    Filed: July 14, 2009
    Date of Patent: October 2, 2012
    Assignee: Osram AG
    Inventor: Harald Dellian
  • Patent number: 8274723
    Abstract: In a piezoelectric transducer element, on a base body having a fixing part and a movable part which are connected with each other, a piezoelectric body which is sandwiched between a lower electrode and an upper electrode is formed in a state where the piezoelectric body extends between and over the fixing part and the movable part of the base body. The piezoelectric body converts a change in potential between the lower electrode and the upper electrode into mechanical displacement of the movable part relative to the fixing part or the mechanical displacement into the change in potential. The upper electrode includes a pad electrode for connection which is formed above the fixing part, and the lower electrode is not formed in a region above the fixing part and below the pad electrode.
    Type: Grant
    Filed: March 19, 2010
    Date of Patent: September 25, 2012
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Masahiro Sakakibara
  • Patent number: 8274722
    Abstract: A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) based on a silicon-on-insulator (SOI) process with wafer bonding and coarsely aligned orthogonal vertical comb and/or parallel plate actuator. The present invention relates to a micro-mirror in a MEMS linear piano micro-mirror array comprising a micro-mirror layer, a hinge layer and an electrode/substrate layer. The structure is formed by fabricating the layers separately in SOI structure and then bonding them together.
    Type: Grant
    Filed: January 5, 2010
    Date of Patent: September 25, 2012
    Inventor: Abdul Jaleel K. Moidu
  • Patent number: 8274724
    Abstract: Implementations of actuators that use flexures to provide support to actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that include a magnet stator and a coil rotor mounted on a flexure. A positioning sensor, such as a capacitor sensor, is provided to measure and monitor positioning of the actuator and is coupled to a feedback circuit which uses the measured positioning of the actuator to control the actuator.
    Type: Grant
    Filed: September 23, 2011
    Date of Patent: September 25, 2012
    Assignee: Prysm, Inc.
    Inventors: Bruce Borchers, Robert Stark
  • Patent number: 8270057
    Abstract: An oscillator device including an oscillation system with oscillators and torsion springs, a driving member for driving the oscillation system, and a drive control member for supplying a driving signal to the driving member, the oscillation system having at least a first oscillation mode and a second oscillation mode, the second oscillation mode having an angular frequency approximately n-fold the angular frequency of the first oscillation mode where n is an integer, the driving member driving the oscillation system so that it simultaneously oscillates in the first and second oscillation modes, wherein a natural angular frequency calculating member calculates the natural angular frequency of the second oscillation mode based on an output signal from a photodetector, being outputted at a timing whereat the reflection light passes over the photodetector.
    Type: Grant
    Filed: June 16, 2008
    Date of Patent: September 18, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kazunari Fujii, Suguru Miyagawa
  • Patent number: 8269396
    Abstract: An electro-mechanical actuator includes a comb drive and a deformable connector. The comb drive has a first capacitor plate and a second capacitor plate. The capacitor plates have teeth capable of inter-digitating. The deformable connector is configured to apply a mechanical restoring force to the first capacitor plate. The deformable connector is configured to restore the first capacitor plate to be at an equilibrium rest position in response to no control voltage being applied across the capacitor. The comb drive is more engaged at the equilibrium rest position than at a mechanical stability threshold of the comb drive. The capacitor plates are disengaged at the equilibrium rest position.
    Type: Grant
    Filed: February 28, 2011
    Date of Patent: September 18, 2012
    Assignee: Alcatel Lucent
    Inventors: Vladimir Anatolyevich Aksyuk, Carl Jeremy Nuzman, Maria Elina Simon, Alan Weiss
  • Patent number: 8270056
    Abstract: An electromechanical systems device includes a plurality of supports disposed over a substrate and a deformable reflective layer disposed over the plurality of supports. The deformable reflective layer includes a plurality of substantially parallel columns extending in a first direction. Each column has one or more slots extending in a second direction generally perpendicular to the first direction. The slots can be created at boundary edges of sub-portions of the columns so as to partially mechanically separate the sub-portions without electrically disconnecting them. A method of fabricating an electromechanical device includes depositing an electrically conductive deformable reflective layer over a substrate, removing one or more portions of the deformable layer to form a plurality of electrically isolated columns, and forming at least one crosswise slot in at least one of the columns.
    Type: Grant
    Filed: March 23, 2009
    Date of Patent: September 18, 2012
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventors: Yi Tao, Fan Zhong, Marc Mignard
  • Patent number: 8264758
    Abstract: A total length of members (11, 13, 15, 17, 19, 21, 23, 25) formed in an X-axis direction of a spring (1) is larger than a spring length of the spring (1) and larger than a total length of members (12, 14, 16, 18, 20, 22, 24) formed in a Y-axis direction. With this arrangement, spring constants of respective axes can be increased, and a spring constant in a direction R can be set appropriately and freely within a wider range.
    Type: Grant
    Filed: December 26, 2006
    Date of Patent: September 11, 2012
    Assignee: Nippon Telegraph and Telephone Corporation
    Inventors: Shingo Uchiyama, Makoto Sato, Fusao Shimokawa
  • Patent number: 8254005
    Abstract: The invention relates to arrangements of micromechanical elements, preferably microoptical elements, which are each held by means of spring elements. In this respect, they can be pivoted or also deflected in translation around a rotational axis by the effect of electrostatic forces. It is the object of the invention to provide an arrangement having micromechanical elements which can be operated over a long time period without drift without any frequent recalibration being necessary. The arrangement in accordance with the invention having micromechanical elements is made in this connection such that electrodes are likewise arranged beneath micromechanical elements, that is, on the side onto which no electromagnetic radiation can be directly incident. In this respect, a respective electrode is arranged and made such that it is associated with at least two micromechanical elements. It can in this connection effect a deflection of the micromechanical elements associated with it by electrostatic force effect.
    Type: Grant
    Filed: June 3, 2006
    Date of Patent: August 28, 2012
    Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
    Inventors: Ingo Wullinger, Peter Dürr
  • Patent number: 8254006
    Abstract: An oscillator device includes at least one movable element supported for oscillatory motion around a rotational axis, and a damper member for applying a damping function to the oscillatory motion of the movable element, the damper member being provided along at least a portion of a locus plane defined by an edge of the movable element during oscillatory motion thereof, so that, based on a viscosity of a fluid which is present between the edge of the movable element and a portion of the damper member opposed to the edge of the movable element, the damping function is applied to applied to the oscillatory motion of the movable element.
    Type: Grant
    Filed: July 7, 2008
    Date of Patent: August 28, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventors: Suguru Miyagawa, Koichi Hara
  • Patent number: 8238011
    Abstract: A micro-electro-mechanical system (MEMS) mirror device has a mirror, a frame rotatively coupled to the mirror, and a biaxial actuator rotatively coupled to the frame where the actuator is able to rotate about the rotational axes of the mirror and the frame with the mirror.
    Type: Grant
    Filed: September 2, 2011
    Date of Patent: August 7, 2012
    Assignee: Advanced NuMicro Systems, Inc.
    Inventor: Yee-Chung Fu
  • Patent number: 8238223
    Abstract: For a recording and playback optical head used for a dual layer disc, it is difficult to reduce the size and the cost due to the need to correct spherical aberration caused by a difference in thickness of a light-transmitting layer. A reflection mirror having a reflection surface on which light is reflected and provided with a member having ferromagnetism at the center, and a switching device that switches between a deformed state and a non-deformed state of the reflection mirror using a magnetic force are provided. The switching device includes a hard magnetic member, and a magnetizing member that magnetizes and demagnetizes the hard magnetic member. When light is concentrated on a first recording layer farther from the light-incident surface, the reflection mirror is used as a plane mirror, and when light is concentrated on a second recording layer closer to the light-incident surface, the reflection mirror is deformed in the shape of a concave surface by means of the switching device.
    Type: Grant
    Filed: October 29, 2004
    Date of Patent: August 7, 2012
    Assignee: Panasonic Corporation
    Inventors: Akira Kurozuka, Yoshihiro Mushika
  • Patent number: 8223409
    Abstract: An optical device equipped with a mirror which reflects light, include a plurality of first receiving parts that touch one face of one of ends in a lengthwise direction of the mirror; a plurality of first pressing parts that touch a face opposing to the face to which the first receiving parts touch, and press the mirror with elastic force toward the first receiving parts.
    Type: Grant
    Filed: May 11, 2009
    Date of Patent: July 17, 2012
    Assignees: NEC Access Technica, Ltd., NEC Engineering, Ltd.
    Inventors: Namie Sugiyama, Keisuke Hatomi, Kohshi Takano, Satoshi Komatsu
  • Patent number: 8218228
    Abstract: A two-terminal, variable capacitance device is described that is constructed by connecting multiple MEMS devices having different actuation or “pull in” voltages in parallel.
    Type: Grant
    Filed: December 18, 2009
    Date of Patent: July 10, 2012
    Assignee: Qualcomm MEMS Technologies, Inc.
    Inventors: Je-Hsiung Lan, Evgeni Gousev, Ernest Tadashi Ozaki
  • Patent number: 8218216
    Abstract: An object of the present invention is to provide an image projector capable of projecting a high-quality image while realizing small size. In the image projector, a light flux is deflected two-dimensionally by turning a reflector for reflecting a light flux emitted from a light source around a second axis almost orthogonal to a first axis as a center by resonant drive while turning the reflector around the first axis as a center by non-resonant drive. Shape of one or more optical surfaces of a projection optical system for projecting an image onto a projection plane by guiding light onto the projection plane includes a shape for performing a correction for maintaining scanning speed of the light flux along one scan direction on the projection plane almost constant and a shape for performing a correction for suppressing a distortion in an image along the other scan direction almost orthogonal to the one scan direction on the projection plane.
    Type: Grant
    Filed: March 27, 2008
    Date of Patent: July 10, 2012
    Assignee: Konica Minolta Opto, Inc.
    Inventors: Kenji Konno, Kenji Mizumoto
  • Patent number: 8218214
    Abstract: The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.
    Type: Grant
    Filed: December 8, 2010
    Date of Patent: July 10, 2012
    Assignee: Industrial Technology Research Institute
    Inventors: Yu-Jen Wang, Chien-Shien Yeh, Chung-De Chen, Hung-Chung Li
  • Patent number: 8218218
    Abstract: A microelectromechanical system (MEMS) includes a conductor with improved reliability. The conductor flexes with a moving member in the MEMS device, and the improved reliability is achieved through material selections that provides increased fatigue resistance, reduced crack propagation, and/or mechanisms for improved live at a given strain level. The conductor may include a single material, or may include layers of different materials.
    Type: Grant
    Filed: April 8, 2009
    Date of Patent: July 10, 2012
    Assignee: Microvision, Inc.
    Inventors: Jason B. Tauscher, Matthew Ellis, Dean R. Brown, Mark P. Helsel, Wyatt O. Davis, Yunfei Ma, Michael E. Sherwood, John Wyatt Coy, David Malametz