Abstract: A method of making an interferometric modulator element includes forming at least two posts, such as posts formed from spin-on glass, on a substrate. In alternate embodiments, the posts may be formed after certain layers of the modulator elements have been deposited on the substrate. An interferometric modulator element includes at least two spin-on glass support posts located on the substrate. In alternate embodiments, the support posts may be located over certain layers of the modulator element, rather than on the substrate. A method of making an interferometric modulator element includes forming a rigid cap over a support post. An interferometric modulator element includes support posts having rigid cap members.

Abstract: An oscillating device includes a supporting portion, a movable portion, a torsion spring that supports the movable portion with respect to the supporting portion so that the movable portion is capable of torsionally vibrating around a torsion axis, and a driving unit that vibrates the movable portion. The torsion spring is formed of single-crystal silicon, and a crystal orientation parallel to the torsion axis of the torsion spring is a [111] orientation.

Abstract: A microshutter array has a frame having a light transmissive portion. Linear microshutter elements extend across the light transmissive portion and in parallel to each other. Each microshutter element has a flat blade extended in a length direction and first and second torsion arms extending outwards from each side of the blade in the length direction, the blade extending across the light transmissive portion. There is at least one electrode associated with each linear microshutter element and extended in the length direction parallel to the microshutter element.

Abstract: A connecting structure for micromechanical oscillating devices, in particular micromechanical oscillating mirrors. The connecting structure is at least indirectly connectable to a micromechanical oscillating structure, on the one hand, and to an elastic element, on the other hand, for measuring torsions of the micromechanical oscillating structure, and includes at least one, in particular at least two, preferably three, legs which are situated parallel to a rotation axis of the micromechanical oscillating structure, and at least one further leg which is situated perpendicularly to the rotation axis.

Abstract: The present invention provides an image display system implemented with a micro-electromechanical system (MEMS) device formed and supported on a substrate functioning as a spatial light modulator wherein the MEMS device further comprises a drive circuit disposed on the substrate; a micromirror functioning as a movable electrode supported on a deflectable hinge extended from the substrate; a stationary electrode disposed on the substrate and connected to the drive circuit to receive signals therefrom, wherein the stationary electrode comprises a first electrode, a second electrode and an insulation layer, wherein the insulation layer is disposed between the first electrode and second electrode.

Abstract: The present invention provides a projection apparatus, comprising: a light source; a spatial light modulator for modulating the incident light emitted from the light source; a spatial light modulator control unit for generating, from an inputted image signal, a control signal for driving the spatial light modulator; and a light source control unit for receiving data corresponding to the control signal for controlling the light source to operate in one of three states consisted of a driven state, a stopped state and a standby state on the basis of the data.

Abstract: A stabilizer mechanism is coupled to a deformable element of a microelectromechanical device for reducing unwanted deformation of the deformable element by increasing the stiffness of the deformable element in selected other directions than the direction along which desired deformation is performed.

Abstract: A scan element includes a bobbin having a central axis about which is wound an electromagnetic wire coil and having a flange oriented generally transverse to the central axis. At least one elastomeric support has a first end coupled to the flange. A permanent magnet has first and second surfaces, a central axis, and a magnetization direction oriented generally transverse to the central axis of the permanent magnet. The magnet is supported by a second end of the elastomeric support. A mirror has a central axis and is mounted on the second surface of the magnet. The central axes of the mirror and magnet are coaxial with the central axis of the bobbin. The elastomeric support provides a return force when the magnet and the mirror are rotated at an angle from the central axis during energization of the electromagnetic wire coil.

Abstract: An optical deflector of the present invention includes a movable mirror and torsion bars supporting the mirror and formed integrally with the mirror. The mirror reciprocatingly vibrates to reflect a light beam to thereby deflect it. The mirror is curved in the form of an arch in a section including at least the torsion bars. The mirror deforms little during vibration even if it is thin. Small power can cause such a thin mirror to vibrate with a large amplitude.

Abstract: An optical reflection device includes a flexible substrate, an elastic portion connected with an end of the flexible substrate, an optical reflector coupled with the flexible substrate via the elastic portion, a first electrode layer provided on the flexible substrate, and a piezoelectric layer provided on the first electrode layer. The optical reflection device may have a small size.

Abstract: The present invention discloses an image display system implemented with a spatial light modulator (SLM) having a plurality of pixel elements wherein each of the pixel elements further comprises an electrode having a structural body comprising: a first electrically conductive layer; a second electrically conductive layer; and a semiconductor layer disposed adjacently to the first electric conductive layer and second electric conductive layer and the semiconductor layer further comprises a doped conductive area for electrically connecting the first electric conductive layer and second electric conductive layer.

Abstract: The disclosure is generally directed to fabrication steps, and operation principles for microelectromechanical (MEMS) transducers. In one embodiment, the disclosure relates to a texture morphing device. The texture morphing device includes: a plurality of supports arranged on a substrate to support a deformable mirror; an ITO layer; and a Distributed Bragg Reflector (DBR) layer. A pair of adjacent supports form a cavity with the ITO layer and the deformable mirror. When the height of the cavity changes responsive to an external pressure, the internal reflection within the cavity is changed. The change in the height of the cavity causes the exterior texture to morph. Similar principles are disclosed for constructing sensor and actuators.

Abstract: Presented herein are systems, methods and devices relating to miniature actuatable platform systems. According to one embodiment, the systems, methods, and devices relate to controllably actuated miniature platform assemblies including a miniature mirror.

Abstract: An actuator, includes: a weight part; a supporting part supporting the weight part; a connecting part coupling the weight part rotatable to the supporting part and having an elastic part; a driving member for driving and rotating the weight part; and a semiconductor circuit for driving the weight part. The driving member is operated to torsionally deform the elastic part and rotate the weight part. The elastic part has a first silicon part that is mainly made of silicon and a first resin part that is mainly made of resin and coupled to the first silicon part. The supporting part has at least a second silicon part made mainly of silicon and coupled to the first silicon part of the elastic part. The semiconductor circuit is provided on the second silicon part of the supporting part.

Abstract: A micro-electro-mechanical system (MEMS) mirror device has a mirror, a frame rotatively coupled to the mirror, and a uniaxial actuator rotatively coupled to the frame where the rotational axis of the actuator is offset from the rotational axes of the mirror and the frame. Another MEMS mirror device has a mirror, a frame rotatively coupled to the mirror, and a biaxial actuator rotatively coupled to the frame where the actuator is able to rotate about the rotational axes of the mirror and the frame with the mirror.

Abstract: An object detector has a light projecting unit that projects light, a light scanning actuator that scans the light, and a light receiving unit. The light scanning actuator includes plate springs, each having a thin-plate shape and one end in a longitudinal direction thereof being fixed; a movable part attached to the other ends in the longitudinal directions of the plate springs; and an electromagnetic driving unit having a magnet that generates a magnetic flux, a yoke that forms a closed magnetic circuit with the magnet and has a part being stacked on the magnet, and a coil held by the movable part and positioned in a gap between the magnet and the yoke such that an aperture plane is substantially orthogonal to a stacking direction of the magnet and the yoke, the electromagnetic driving unit configured to drive the movable part by an electromagnetic force applied to the coil.

Abstract: It is an object of the present invention to provide a low cost moveable mirror with 2 axes of movement that is suitable for use in an optical application where a relatively large tip of tilt of a mirror is needed in a known series of positions repeatably and rapidly. This object is achieved by providing a planar structure with 4 bending actuators that can be produced through MEMs based manufacturing. The moveable mirror is flexibly connected to the bending actuators so it can be moved on 2 axes. The bending actuators are designed to have substantial length to increase the angular movement of the mirror. Hard stops are provided to provide repeatable and accurate positioning of the mirror for selected positions.

Abstract: An optical scanning device includes, in an effective scanning area in the target surface, a mechanism that causes a scanning speed at each scanning position with respect to a scanning speed at an approximately center in the effective scanning area to be within a range under a predetermined condition.

Abstract: A controllable reflecting device having an array of bi-axial mirrors that are capable of pivoting in at least four directions is described. At least three primary colored light beams are directed at each of the bi-axial mirror in three of the four pivoting directions, one for each of the primary colored light beams and a single colored beam is reflected and directed toward a projection lens. In the fourth pivoting direction, no color beam is directed to the projection lens and black is projected.

Abstract: A mirror device, comprising: a mirror; an electrode which is placed on a substrate and on which surface a cavity is formed; and a hinge placed between the mirror and electrode, wherein the hinge is connected to the cavity of the electrode.

Abstract: An oscillator device includes an oscillation system having an oscillator and an elastic supporting member, a detecting member for detecting oscillation amplitude of the oscillator, a driving member for driving the oscillator, and a control unit for generating a driving signal for driving the oscillator and for supplying the driving signal to the driving member, wherein the control unit reciprocally sweeps a driving frequency of the driving signal so that a resonance frequency of the oscillation system is included within a frequency range swept, wherein the control unit determines a resonance frequency based on at least two frequencies with which an oscillation amplitude value obtainable by the reciprocal sweeping reaches a maximum, and wherein the control unit generates the driving signal based on the determined resonance frequency.

Abstract: A micro-oscillation element includes a base frame, an oscillating portion, and a link portion connecting the base frame and the oscillating portion to each other. The oscillating portion has a movable functional portion, a first driving electrode connected to the movable functional portion, and a weight portion joined to the first driving electrode. The link portion defines an axis of the oscillating motion of the oscillating portion. The second driving electrode, fixed to the base frame, generates driving force for the oscillating motion in cooperation with the first driving electrode.

Abstract: Embodiments relate to a MEMS device including a scanner rotatable about at least one rotation axis, with the scanner having a characteristic resonant frequency. According to one embodiment, the MEMS device includes drive electronics operable to generate a drive signal that causes the scanner to oscillate at an operational frequency about the at least one rotation axis. The drive signal has a drive frequency selected to be about equal to the characteristic resonant frequency or a sub-harmonic frequency of the characteristic resonant frequency. According to another embodiment, the drive electronics are operable to generate a drive signal having a plurality of drive-signal pulses that moves the scanner at an operational frequency and sensing electronics are operable to sense a position of the scanner only when the drive-signal pulses of the drive signal are not being transmitted by the drive electronics. The MEMS device embodiments may be incorporated in scanned beam imagers, endoscopes, and displays.

Abstract: The present disclosure describes, among other things, a reduced speckle contrast microelectromechanical system. One exemplary embodiment includes micromechanical structures configured to form a uniform reflective surface on a substrate, an elastic substance coupled to the substrate, and an energy source that applies a voltage to the elastic substance to alter the shape of the surface of the substrate, for example, by about 10% to about 25% of a wavelength of light projected onto the substrate at a frequency of at least 60 Hz. Another exemplary embodiment includes micromechanical structures formed on a surface of a substrate, a reflective diaphragm connected to the substrate, an elastic substance coupled to the diaphragm, and an energy source that applies a voltage to the elastic substance to vibrate the diaphragm at a frequency of at least 60 Hz.

Abstract: An optical multi-ring scanner is disclosed, which comprises: a substrate; an outer ring driving element, disposed inside the substrate and configured symmetrically at two sides thereof with a pair of first arms that are connected respectively to the substrate; at least one inner ring driving element, each configured with a first inner ring driver in a manner that the first inner ring driver has a pair of second arms symmetrically disposed at a top side and a bottom side thereof while being connected to the outer ring driving element; and a mirror element, disposed inside the first inner ring driver and having a pair of third arms symmetrically disposed at a top side of a bottom side thereof; wherein, the third arm is disposed coaxial with the second arm while enabling the first arm to be disposed perpendicular to the second arm and the third arm.

Abstract: An optical scanner capable of preventing breakage of a shaft section due to stress concentration is provided. A mirror frame 13 is shaped so as to enclose a mirror 11, and holds the mirror 11, via torsion bars 121 and 122, so as to be vibratable. A unimorph 15 is constituted by four unimorphs 151, 152, 153, and 154 formed on upper left, lower left, upper right, and lower right sides, and holds the mirror frame 13, via a shaft section 14, so as to be vibratable. The shaft section 14 has a connection section 144. On the mirror frame 13, an adjustment member 16 for increasing a moment of inertia m1 of the mirror frame 13 is provided.

Abstract: A taut-band resonant scanner is disclosed that includes an elongated band and a sub-assembly. The elongated band has a length in an elongated direction, a width in a width direction that is orthogonal to the elongated direction, and a thickness in a thickness direction that is orthogonal to both the width direction and the elongated direction, wherein the thickness is substantially smaller than the width and wherein the width direction and elongated direction define a band width/length plane. The sub-assembly is attached to a portion of the band, and includes at least one mounting structure.

Abstract: Briefly, in accordance with one or more embodiments, a MEMS based scanning platform is arranged to have increased efficiency by driving a first frame of the scanning platform directly by applying a drive voltage to a set of comb fingers disposed on the first frame to cause the first frame to oscillate via torsional rotation of a first flexure and by driving a second frame of the scanning platform indirectly via mechanical coupling of the second frame with the first frame via a second flexure, wherein damping losses and work capacity are such that the operation of the scanning mirror is more efficient than if the set of comb fingers were disposed on the second frame and directly driven by the drive voltage. The scanning platform may comprise a 1D scanner, a 2D scanner, or a multiple-dimensional scanner.

Abstract: A scanning assembly (400) for use in a scanning display includes a reflective scanning surface, such as a scanning mirror (412). The reflected scanning surface can be mounted on a scan plate (409). The scanning assembly (400) is configured to pivot about a first axis (403) and a second axis (404) to form an image. To correct parallelogram distortion, the first axis (403) and second axis (404) are non-orthogonal relative to each other. Torsion arms (407,408) facilitating rotation of the scanning mirror (412) along one axis (403) can be oriented non-orthogonally relative to other torsion arms (413,414) by an amount sufficient to correct parallelogram distortion.

Abstract: The micro mirror unit includes a substrate, on which are provided a micro mirror reflecting light, a torsion bar supporting the micro mirror, a frame rotatably supporting the torsion bar, and a deformative supporting part which deforms itself to lift the frame away from the substrate and supports the frame in such a lifted condition. This arrangement makes it possible to realize an increased space between the micro mirror and the substrate, thereby realizing an enlarged mirror tilt angel, without increasing the thickness of the sacrifice layer.

Abstract: A scanned beam imaging system including a radiation source configured to provide a beam of radiation, a movable element configured to direct the beam of radiation onto a scanned area, and a collector configured to receive radiation returned from the scanned area. The imaging system further includes a housing that houses the movable element therein and a reference mark coupled to or received in the housing. The reference mark is positioned such that at least part of the radiation from the radiation source is directable at the reference mark.

Abstract: In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units of ladder shape with honeycombed portions are formed by twin supporting rods and crosspieces bridged between the twin supporting rods so as to support the moving plate rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units by the honeycombed portions of the hinge units.

Abstract: An oscillator device includes an oscillation system 115 having a plurality of oscillators and a plurality of torsion springs, a supporting member for supporting the oscillation system 115, driving members 114 and 1152, a signal output device 121 and 122, and a drive control unit 101-113, 123 and 124, wherein the driving member drives the oscillation system 115 so that the oscillator provides oscillation presented by an equation including the sum of a plurality of periodic functions, wherein the signal output device produces a signal corresponding to the displacement of the oscillator, and wherein the drive control unit controls the driving member based on an output signal of the signal output device and by use of a driving signal which is expressed by an equation including the sum of a plurality of periodic functions, the drive control unit including a driving signal generation circuit 109 for generating a driving signal using a trigonometric function table 110.

Abstract: A micro-electro-mechanical system (MEMS) mirror system has an actuator that imparts a motion with a first periodic movement of high frequency superimposed a second periodic movement of low frequency to a frame and a mirror coupled to the frame so that the mirror rotates about two axes. The mirror is coupled by springs to the frame so the mirror is rotatable about a first axis. The frame has pivots each coupled by springs to actuators so the frame is rotatable about a second axis. The mirror has a first resonant frequency and the frame including the mirror has a second resonant frequency. The low frequency of the second periodic movement is equal to one of the first and the second resonant frequencies, and the high frequency of the first periodic movement is equal to the other one of the first and the second resonant frequencies.

Abstract: It is aimed to provide a drive device capable of realizing appropriate rotation of a driven body about a plurality of drive axes by a drive element while preventing the drive device from requiring higher performance and becoming intricate, and thus leading to higher power consumption and higher cost. In order to achieve the above-mentioned object, the drive device includes: a drive element including first and second signal input sections and driving a driven body about first and second drive axes upon a voltage being applied between the first signal input section, and the second signal input section; and a signal supply section supplying the first signal input section with a first drive signal for driving the driven body about the first drive axis and supplying the second signal input section with a second drive signal for driving the driven body about the second drive axis.

Abstract: In one embodiment, an apparatus for reducing adherence in a micro-electromechanical system (MEMS) device comprises a substrate. A MEMS is disposed outwardly from the substrate. The MEMS comprises structures and corresponding landing pads. Dibs are disposed outwardly from the substrate. Each dib has a surface with depressions. An adherence-reducing material is disposed within each depression. The adherence-reducing material reduces adherence between at least a portion of a structure and a corresponding landing pad.

Abstract: A digital micromirror projection display system is disclosed in which “off” pixel light is recaptured and recycled. In the disclosed system, a digital micromirror device directs incident light for “on” pixels in the image to be displayed through projection lenses to a projection screen. The digital micromirror device directs incident light for “off” pixels back toward the light source for recapture by a light integrator. Both the incident and projected light can pass through a rear group of projection lenses, with the first projection lens being disposed near the digital micromirror device. A mirror directs the incident light toward the digital micromirror device, and the “off” pixel light from the digital micromirror device toward the light integrator. As a result, “off” pixel light can be recycled without degrading image contrast, in a manner that can place fast projection lenses close to the digital micromirror device to save cost.

Abstract: A laser beam steering apparatus includes a beam steering cell with an adjustable shape, with the cell having opposing Fabry-Perot filters, and a steering mechanism coupled to the cell to adjust its shape so that the direction of a laser beam emitted from the cell is changed in response to a change in the cell shape.

Abstract: Apparatus for marking a bitmap image on tape includes a scanning mirror which is incorporated in a micro-electro-mechanical system (MEMS). The MEMS is torsionally resonant at two frequencies one being about three time the other. The MEMS is excited to resonance by applying an AC signal to the actuators, causing the mirror to oscillate. The AC signal has components at the two frequencies. The magnitude and phase-relationship of the components can be selected such that the mirror oscillates in an approximation of a triangle-wave.

Abstract: A control section of an optical switch calculates information relating to a polarization amount in an insulating film at each predetermined time, to update the information relating to the polarization amount in the insulating film. On the other hand, when a drive voltage is applied to a MEMS mirror, an initial value of the drive voltage corresponding to an input setting command is read out from an initial value memory, and also, the information relating to the polarization amount in the insulating film is read out from the polarization amount memory, and the initial value of the drive voltage is corrected according to the read information relating to the polarization amount in the insulating film, to thereby set a new drive voltage, and the new drive voltage is applied on electrodes of the MEMS mirror.

Abstract: The present invention provides an image display system implemented with a mirror device comprises a plurality of pixel elements formed on a substrate: wherein: each of said pixel elements comprises a micromirror disposed above and supported on a hinge extended from said substrate; and; a drive electrode disposed on the substrate for receiving signals to control and drive the mirror, wherein the drive electrode comprises an insulation layer, and a first electrode connected to a memory and a second electrode connected to a plate line with the insulation layer disposed between and insulating the first and the second electrode.

Abstract: A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.

Abstract: Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.

Abstract: A scanning beam projection system includes a scanning mirror having a fast-scan axis and a slow-scan axis. Movement on the slow-scan axis is controlled by a slow-scan scanning mirror control system. The control system receives position information describing angular displacement of the mirror. An outer loop of the control system operates in the frequency domain and determines harmonic drive coefficients for a scanning mirror drive signal. An inner loop of the control system operates in the time domain and compensates for a scanning mirror resonant vibration mode at a frequency within the frequency band occupied by the harmonic drive coefficients.

Abstract: A scanning beam projection system includes a scanning mirror having a fast-scan axis and a slow-scan axis. Movement on the slow-scan axis is controlled by a slow-scan scanning mirror control system. The control system receives position information describing angular displacement of the mirror. An outer loop of the control system includes least mean square (LMS) tone adders that determine harmonically related signals that when combined produce a scanning mirror drive signal. An inner loop of the control system compensates for a scanning mirror resonant vibration mode at a frequency within the frequency band occupied by the harmonically related signals.

Abstract: An oscillation system includes first and second oscillation movable elements supported by respective elastic supporting elements. The oscillation system has a first natural oscillation mode of a resonance frequency f1 and a second natural oscillation mode of a resonance frequency of f2 which is approximately N-fold of f1 where N is a natural number. A control device determines set driving frequencies Df1 and Df2 in accordance with a predetermined equation while satisfying a relation Df2=N×Df1 and drives the oscillation system at the set driving frequencies through a driving member.

Abstract: The present invention provides a spatial light modulator, comprising a mirror modulating a light emitted from a light source, wherein the mirror is further controlled to operate with at least three stationary states whereby an image is projected with a gray scale expression through a combination of modulation of the light operated in the three stationary states.

Abstract: An electro-mechanical actuator includes a comb drive and a deformable connector. The comb drive has a first capacitor plate and a second capacitor plate. The capacitor plates have teeth capable of inter-digitating. The deformable connector is configured to apply a mechanical restoring force to the first capacitor plate. The deformable connector is configured to restore the first capacitor plate to be at an equilibrium rest position in response to no control voltage being applied across the capacitor. The comb drive is more engaged at the equilibrium rest position than at a mechanical stability threshold of the comb drive. The capacitor plates are disengaged at the equilibrium rest position.

Abstract: A disclosed optical scanning device includes: a light source unit having plural luminous sources; a light source driving unit modulating each luminous source in accordance with pixel information; an oscillating mirror supported on a twist beam as a rotation shaft, the oscillating mirror collectively deflecting light beams from the luminous sources and performing reciprocating scanning on a surface to be scanned; an imaging optical system imaging the light beams from the luminous sources on the surface to be scanned; an oscillating mirror driving unit setting a scanning frequency f in accordance with a resonance frequency of the oscillating mirror; and a pitch adjustment unit adjusting beam spot intervals p in a sub-scanning direction in accordance with the scanning frequency f of the oscillating mirror that has been set.

Abstract: An oscillator device includes an oscillation system having a first oscillator, a second oscillator, a first resilient supporting member and a second resilient supporting member, wherein the oscillation system has at least two frequencies of natural oscillation mode around the torsion axis which include a first resonance frequency f1 and a second resonance frequency f2, wherein there is a relationship that f2 is approximately two-fold of f1, wherein ?f which is expressed as ?f=f2?f×f1 has a relationship of ?f<0, and wherein the drive control means supplies, to the driving means, a driving signal which is comprised of a driving signal based on synthesizing a first driving signal having a first driving frequency and a second driving signal having a second driving frequency, and which is such driving signal that, when a lower-frequency side driving frequency among the first and second driving frequencies is denoted by Df1 and a higher-frequency side driving frequency is denoted by Df2, it satisfies relationshi