Abstract: This disclosure provides systems, methods, and devices for actuating, charging and calibrating the charge on a movable electrode in electromechanical systems (EMS) devices. The electromechanical systems device can include a first electrode, a second electrode spaced apart from the first electrode by a gap, a complementary electrode, at least one electrical contact, and a movable third electrode disposed between the first electrode and the second electrode. In one implementation, a method of calibrating charge on the movable electrode of the EMS device includes electrically connecting a complementary electrode to the first electrode to form a compound electrode and applying a calibration voltage across the compound electrode and the second electrode to produce a uniform electric field in the gap. Under the electric field the third electrode moves towards the first electrode until it connects with the at least one electrical contact.

Abstract: Anti-stiction systems may include one or more anti-stiction electrodes driven to provide an electrical force that counteracts a stiction force acting upon a moveable portion of an interferometric modulator. The anti-stiction electrode(s) may be disposed on a back glass or on another such substrate. The anti-stiction electrode(s) may be configured to apply an electrical force to substantially all of the interferometric modulators in a display device at once and/or may be configured to apply an electrical force only to a selected area. In some embodiments, the sum of an anti-stiction electrical force and a mechanical restoring force of a moveable part of an interferometric modulator is sufficient to counteract a stiction force.

Abstract: An apparatus includes a reconfigurable spatial light modulator capable of spatially modulating an incident wavefront responsive to an image formed on the modulator. A light source is configured to direct a coherent illumination light beam towards the modulator such that the modulator produces a modulated outgoing light beam therefrom. A filter is configured to spatially filter a light pattern formed by the outgoing light beam on a plane to selectively transmit light from a plurality of diffraction peaks therein.

Abstract: Interferometric modulators include a movable mirror that is actuated by voltage applied to a plurality of electrodes relative to at least one other electrode, to define a cavity relative to a partially reflective mirror formed by a top plate. The depth of the cavity determines a bandwidth of light that is modulated by internal reflections within the cavity and which interferes with light that is reflected from a partially reflective mirror on the top plate, producing a desired reflected color of light for the modulator. Variations in manufacturing and material characteristics can cause the movable mirror to tilt relative to the partially reflective mirror, which degrades the modulation accuracy. To compensate, different voltages can be applied to the plurality of electrodes. The voltage can be determined at time of manufacture and stored in non-volatile memory, for use when the modulator is actuated during use.

Abstract: Various embodiments of the invention relate to methods and systems for generating the color white in displays created from interferometric modulators and more specifically, to the generation of the color white through the use of reflected light at two wavelengths. In one embodiment, a display device displays the color white. The color white is generated by reflecting light from two pluralities of interferometric modulator types. The first modulator type reflects colored light at a specific wavelength. The second modulator type reflects colored light selected to be at a wavelength complementary to the first. The combined light reflected from the two types appears white in the display.

Abstract: Embodiments of the present invention relate to interferometric display devices comprising an interferometric modulator and a solar cell and methods of making thereof. In some embodiments, the solar cell is configured to provide energy to the interferometric modulator. The solar cell and the interferometric modulator may be formed above the same substrate. A layer of the solar cell may be shared with a layer of the interferometric modulator.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.

Abstract: A flat panel display device displays an image using a micro-shutter electrode and a diffusive reflection layer. The display device has a wide viewing angle and reduces a loss of light to thus improve light efficiency. In addition, gray levels can be determined by an electrostatic force between the pixel electrode and the micro-shutter electrode. An opening/closing operation of the micro-shutter electrode is fast so that the response speed can be improved.

Abstract: The invention relates to methods to improve SLMs, in particular to reflecting micromechanical SLMs, for applications with simple system architecture, high precision, high power handling capability, high throughput, and/or high optical processing capability. Applications include optical data processing, image projection, lithography, image enhancement, holography, optical metrology, coherence and wavefront control, and adaptive optics. A particular aspect of the invention is the achromatization of diffractive SLMs so they can be used with multiple wavelengths sequentially, simultaneously or as a result of spectral broadening in very short pulses.

Abstract: Methods and systems for providing brightness control in an interferometric modulator (IMOD) display are provided. In one embodiment, an interferometric modulator display pixel is provided that includes a microelectromechanical systems (MEMS) interferometric modulator having an associated first color spectrum, and a color absorber located substantially in front of the interferometric modulator display pixel, in which the color absorber has an associated second color spectrum. The microelectromechanical systems (MEMS) interferometric modulator is operable to shift the first color spectrum relative to the second color spectrum to control a visual brightness of the interferometric modulator display pixel independent of a color of the interferometric modulator display pixel.

Abstract: A display device (10) includes an upper substrate (first substrate) (2), a lower substrate (second substrate) (3), and a conductive liquid (16) that is sealed in a display space (S) formed between the upper substrate (2) and the lower substrate (3) so as to be moved toward an effective display region (P1) or a non-effective display region (P2). Ribs (14) are provided on the lower substrate (3) so as to partition the inside of the display space (S) in accordance with each of a plurality of pixel regions (P). The height h of the ribs (14) in the direction perpendicular to the upper substrate (2) and the lower substrate (3) is set to be smaller than the gap size H of the display space (S) in the perpendicular direction.

Abstract: The present invention provides an image display system implemented with a micro-electromechanical system (MEMS) device formed and supported on a substrate functioning as a spatial light modulator wherein the MEMS device further comprises a drive circuit disposed on the substrate; a micromirror functioning as a movable electrode supported on a deflectable hinge extended from the substrate; a stationary electrode disposed on the substrate and connected to the drive circuit to receive signals therefrom, wherein the stationary electrode comprises a first electrode, a second electrode and an insulation layer, wherein the insulation layer is disposed between the first electrode and second electrode.

Abstract: A display substrate includes an insulation substrate, a gate line formed on the insulation substrate, a data line formed on the insulation substrate and crossing the gate line, a switching element formed on the insulation substrate and electrically connected to the gate line and the data line, and a pixel electrode formed on the insulation substrate. The pixel electrode is electrically connected to the switching element and includes a reflective electrode layer which reflects light and an absorption electrode layer which absorbs light.

Abstract: The present invention provides methods and apparatus for accomplishing a optical direct write phase shift lithography. A lithography system and method are provided wherein a mirror array is configured to generate vortex phase shift optical patterns that are directed onto a photosensitive layer of a substrate. The lithography methods and systems facilitate pattern transfer using such vortex phase shift exposure patterns.

Abstract: Modulator devices are selectably adjustable between at least two states, wherein the transmission and/or reflection of particular wavelengths of light are modified. Certain modulator devices are substantially uniformly adjustable over a wide range of wavelengths, including visible and infrared wavelengths. Other modulator devices are adjustable over visible wavelengths without significantly affecting infrared wavelengths. In addition, the modulator devices may be used in conjunction with fixed thin film reflective structures.

Abstract: A multi-stable electrophoretic display device has a plurality of pixels and comprises a first substrate and a second substrate. The substrates are spaced apart from each other and enclose a layer of an electrophoretic medium comprising a liquid crystal material having finely divided pigment particles dispersed therein. The device further comprises electrodes for formation of a pixel area outline and applying an electric field across at least some of the electrophoretic medium in the pixel area. The electrodes occupy substantially less than the entire field of view of the display pixels and can be used to effect switching between a first optical state in which most incident light on a pixel does not impinge on a pigment particle, and a second optical state in which most incident light on a pixel impinges on pigment particles.

Abstract: A package structure and method for packaging a MEMS device is described. In one embodiment, the MEMS base device can include a substrate having a MEMS device formed thereon, a backplate, an exposed or activated desiccant disposed between the backplate and the transparent substrate, and a cover at least partially encapsulating said desiccant. In another embodiment, a MEMS display device can be manufactured by contacting the substrate and/or backplate with a cover which at least partially encapsulates a desiccant, joining the backplate and the substrate to form a package, and exposing or activating the desiccant.

Abstract: A tri wavelength diffracting modulation (TWDM) element, a TWDM imager, and methods of temporally and spatially modulating by using the same are disclosed. The TWDM element includes first and second sets of movable reflective rigid plates under independent electrical actuation, provides four different spatial configurations for reflecting and selectively diffracting incident radiation of three distinguished wavelengths. The TWDM imager is formed with a plurality of the TWDM elements in a regularly spaced planar array configuration on a planar substrate. Incident visible light is spatially modulated by the TWDM imager, either in a time sequential mode or via spatial combination with help of an aligned color filter array.

Abstract: A preferred embodiment comprises a dynamic display based on a program image element which will only generate a preprogrammed image. As an example, the image element may comprise electrically-driven MEMS mirrors. This example may be embedded in an ID card. At the time of issue of the ID card, pixels in the mirror array will be permanently programmed as either ‘alive’ or ‘dead’ in a pattern matching the photo of the person in question. When stimulated, only ‘alive’ pixels will actuate, creating an image for comparison to the adjacent printed photo. Due to its dynamic behavior, delicate mechanical structures, and single-time hard-wiring, duplication of, or tampering with, this secondary dynamic image will be nearly impossible. The ID car is but one exemplary application and other embodiments, applications, and methods are described in the specification and claims.

Abstract: A device manufacturing method comprising applying patterns to a plurality of arrays of individually controllable elements, such that they modulate a beam of radiation, and projecting the modulated beam of radiation onto a substrate. The patterns applied to the arrays of individually controllable elements are arranged such that pre-determined amounts of background radiation are included in the modulated beam of radiation. The pre-determined amounts of background radiation being different for different locations on the arrays.

Abstract: Methods and systems for providing brightness control in an interferometric modulator (IMOD) display are provided. In one embodiment, an interferometric modulator display pixel is provided that includes a microelectromechanical systems (MEMS) interferometric modulator having an associated first color spectrum, and a color absorber located substantially in front of the interferometric modulator display pixel, in which the color absorber has an associated second color spectrum. The microelectromechanical systems (MEMS) interferometric modulator is operable to shift the first color spectrum relative to the second color spectrum to control a visual brightness of the interferometric modulator display pixel independent of a color of the interferometric modulator display pixel.

Abstract: A full color range analog controlled interferometric modulation device is provided. The device includes a transparent substrate, and a transparent fixed-position electrically conductive electrode with a bottom surface overlying the substrate. A transparent spacer overlies the fixed-position electrode, and an induced absorber overlies the spacer. An optically reflective electrically conductive moveable membrane overlies the induced absorber. A cavity is formed between the induced absorber and the moveable membrane having a maximum air gap dimension less than the spacer thickness. In one aspect, the distance from the top surface of the fixed-position electrode to a cavity lower surface is at least twice as great as the cavity maximum air gap dimension. In another aspect, at least one anti-reflective coating (ARC) layer is interposed between the substrate and the fixed-position electrode, and at least one ARC layer is interposed between the fixed-position electrode and the spacer.

Abstract: An interferometric light modulating device having two viewing surfaces is provided. In some embodiments, the device can generate two distinct images, one on each side of the device, simultaneously.

Abstract: A camera includes a lens module, an image sensor, and a shutter module. The centers of the image sensor and the shutter module are on an optical axis of the lens module. The shutter module includes a frame and an electroactive telescopic unit having a first electroactive polymer layer, two compliant electrode layers, and two second electroactive polymer layers. The center of the electroactive telescopic unit has a through hole through the first electroactive polymer layer, the two compliant electrode layers, and the two second electroactive polymer layers. A central axis of the through hole and the optic axis of the lens module are coaxial. The electroactive telescopic unit is contractible or expandable along a direction perpendicularly to the optic axis of the lens module in response to a change in a voltage applied between the two compliant electrode layers.

Abstract: Provided is a display element, which has simple member configuration, can be driven at a low voltage, and has high display contrast, white display reflectance and high display speed and less display nonuniformity in a long term. The display element has an electrolyte layer, which includes silver or a compound having silver in the chemical structure, between counter electrodes and drives the counter electrodes to melt and deposit the silver. The electrolyte layer contains a butyral resin, a coloring material having an average primary grain diameter of 200 nm or more but not more than 1,000 nm, and an organic solvent having a boiling point of 120° C. or higher but not higher than 300° C. The mass ratio of the organic solvent to the butyral resin is 10:1 or more but not more than 10:5.

Abstract: Methods and devices for calibrating and controlling the actuation of an analog interferometric modulator configured to have a plurality of actuation states. Devices and methods for calibrating an analog interferometric modulator to respond in linear relation to an applied voltage.

Abstract: The present invention provides an image display system implemented with a mirror device comprises a plurality of pixel elements formed on a substrate: wherein: each of said pixel elements comprises a micromirror disposed above and supported on a hinge extended from said substrate; and; a drive electrode disposed on the substrate for receiving signals to control and drive the mirror, wherein the drive electrode comprises an insulation layer, and a first electrode connected to a memory and a second electrode connected to a plate line with the insulation layer disposed between and insulating the first and the second electrode.

Abstract: A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.

Abstract: A MEMS device such as an interferometric modulator includes an integrated ESD protection element capable of shunting to ground an excess current carried by an electrical conductor in the MEMS device. The protection element may be a diode and may be formed by depositing a plurality of doped semiconductor layers over the substrate on which the MEMS device is formed.

Abstract: A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

Abstract: Various embodiments include interferometric optical modulators comprising a substrate layer having a thickness between about 0.1 mm to about 0.45 mm thick and a method for manufacturing the same. The interferometric modulator can be integrated together with a diffuser in a display device. The thin substrate permits use of a thicker diffuser. The thinner substrate may increase resolution and reduce overall thickness of the interferometric modulator. The thicker diffuser may provide increased diffusion and durability.

Abstract: A color display apparatus includes a color changeover unit for changing over colors of an illumination light or a projection light, and a control circuit for applying a video signal for generating a control signal for controlling a spatial light modulator, wherein the control circuit further applying the video signal for generating a control signal during a transition period when the illumination and/or the projection light are projected with a first color coexisting with a second color as the color changeover unit changing over the colors of the illumination light or projection light from the first color to the second color.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.

Abstract: A deformable reflective surface is disclosed that may be used with a retroreflector to provide a modulated retroreflector. The modulated retroreflector may be used in communication systems such as optical laser communication systems wherein an incident beam is reflected back to the source, as modulated by the modulated retroreflector. The deformable reflective surface uniformly reflects or disperses an incident light, depending on a deformation state of the surface. The different states of the deformable reflective surface permits modulation of the reflected beam, based on an input modulation signal that can contain voice or sensor data, for example. A sensor may be used to sense the incident beam and activate the retroreflector. The deformable reflective surface may be arranged to be switched between a diffractive reflective surface and a uniform reflective surface.

Abstract: In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.

Abstract: A shutter includes a first light-pervious electrode, a second light-pervious electrode, a light-shielding layer sandwiched between the first and second light-pervious electrodes and a voltage supplying system. The light-shielding layer is comprised of an electrostrictive material. The light-shielding layer has a fixed end positioned adjacent to one edge of the first light-pervious electrode, and a free end facing toward the opposite edge. The free end is extendable towards the opposite edge of the first light-pervious electrode to block light from in response to a voltage applied to the light-shielding layer. The voltage supplying system is electrically connected with the first and second light-pervious electrodes for supplying a voltage between the first and second light-pervious electrodes.

Abstract: A spatial light modulator includes a pixel array including a plurality of pixel elements arranged in a form of a matrix; a word line extending along and connected to a row of the pixel elements pixel elements; and a drive line for transmitting additional modulating signals to said pixel array extended along each row of the pixel array and connected to the pixel elements in a first row and a second row constituting two different rows.

Abstract: A display system is built up of at least one display cell comprising an assembly which has at least a first electrode and a second electrode and in which there are mutually non-miscible first and second liquids filled, wherein either one of the first and second electrodes is electrically insulated from the first and second liquids, the first liquid has electrical conductivity or polarity, and voltage is applied to one or both of the first and second electrodes, whereby the first liquid and the second liquid can vary in position to produce a display. Even after an applied voltage is shut off at a position to which the first and second liquids have migrated, the positions of the first and second liquids that have migrated are retained to keep memory capability going on.

Abstract: A MEMS device is electrically actuated with a voltage placed across a first electrode and a moveable material. The device may be maintained in an actuated state by latch electrodes that are separate from the first electrode.

Abstract: A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes. The mirror device further comprises a barrier layer is disposed between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Furthermore, this invention discloses a projection apparatus implemented with a mirror device manufactured and assembled according to the configuration as described.

Abstract: An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.

Abstract: Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal.

Abstract: An electro-optical display includes a first substrate and a second substrate opposing to each other, a display layer disposed between the first substrate and the second substrate, and a cover layer covering a surface of the second substrate on an opposite side of the display layer. A surface of the display layer disposed on the first substrate is a display face, and the first substrate and the cover layer are bonded with a moisture-proof resin disposed at a sealing region surrounding the display face. The first substrate and/or the cover layer have a groove in the surface that is in contact with the moisture-proof resin, and the groove is filled with the moisture-proof resin.

Abstract: A micromechanical device and system utilizing a supplemental reset pulse to ensure deflectable members deflect to the desired position. After loading data into a micromechanical device, a reset pulse is used to position the deflectable member to a position indicated by the data. A supplemental reset pulse is then applied to ensure the deflectable member is driven to the position indicated by the data. The method and system are also used to ensure the deflectable members are driven to a neutral position.

Abstract: An iterferometric modulator array is configured to reflect a broad band spectrum of optical wavelengths by arranging a reflector and a partially transparent substrate in a non-parallel relationship.

Abstract: Improvements in an interferometric modulator that has a cavity defined by two walls.

Abstract: A micro-mechanical structure system according to the present invention includes: a movable structure 5, at least a portion of the movable structure 5 being formed of a single-crystalline material; an elastic supporting member 10 for supporting the movable structure 5; a stationary electrode section 13, 25 at least partially opposing the movable structure 5; and a base 22 which has a circuit section and to which the stationary electrode 13, 25 is affixed. The stationary electrode section 13, 25 includes a first electrode layer (upper stationary electrode layer) 13 positioned relative to the movable structure 5 and a second electrode layer (lower stationary electrode layer) 25 positioned relative to the base 22, the first electrode layer 13 and the second electrode layer 25 being bonded to each other via adhesion layers 15 and 16.

Abstract: The invention relates to methods and apparatus for forming a display apparatus. According to one aspect of the invention, the display apparatus includes a first substrate having an aperture layer formed thereon, a light guide for guiding light towards the aperture layer, a plurality of MEMS light modulators for modulating light passing through the aperture layer from the light guide, and a spacer substantially surrounding the light guide for keeping the light guide and the first substrate a predetermined distance apart from one another, thereby forming a gap between the first substrate and the light guide. Alternatively or in addition, the first substrate may have a control matrix formed thereon.

Abstract: A micro electro mechanical system device includes a fixed electrode that includes a first electrode group, and a movable electrode that moves with respect to the fixed electrode as voltage is applied and includes a second electrode group that opposes the first electrode group, wherein electrodes of at least one among the first electrode group and the second electrode group are connected via a resistor.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.