Abstract: A spectroscopic measurement apparatus includes: a wavelength tunable interference filter including a fixed substrate having a fixed reflection film, a movable substrate having a movable reflection film, and an electrostatic actuator that changes a gap value of an inter-reflection-film gap by applying a voltage to bend the movable substrate; a detector that detects a light level; and a controller that measures a spectral characteristic of light under measurement. The controller includes a filter driver that applies a drive voltage to the electrostatic actuator to change the inter-reflection-film gap, a detected light level acquisition unit that acquires light levels detected by the detector, and a target light level acquisition unit that acquires a light level corresponding to an oscillation center of the movable substrate as a target light level based on how the detected light level transitions and a natural oscillation cycle that the movable substrate has.

Abstract: An etalon is provided with a fixed substrate and a movable substrate opposed to the fixed substrate. The fixed substrate is provided with a first bonding surface to be bonded to the movable substrate via a bonding film and a first electrode surface on which a part of the first electrode is formed. The movable substrate is provided with a second bonding surface to be bonded to the first bonding surface via the bonding film and a second electrode surface on which a part of the second electrode is formed. In the state in which the fixed substrate and the movable substrate are bonded to each other with the bonding film, the first electrode formed on the first electrode surface and the second electrode formed on the second electrode surface have contact with each other.

Abstract: An optical filter includes a first substrate, a second substrate that is opposed to the first substrate, a first reflecting section that is disposed between the first substrate and the second substrate, a second reflecting section that is disposed between the first reflection section and the second substrate, a first gap existing between the first reflecting section and the second reflecting section, a first electrode that is disposed between the first substrate and the second substrate, a second electrode that is disposed between the first electrode and the second substrate, a second gap existing between the first electrode and the second electrode, and a third electrode that is disposed between the first substrate and the second electrode. The second gap is larger than the first gap.

Abstract: The disclosure generally relates to refractive polarization converters, polarized color combiners using the refractive polarization converters, and in particular polarized color combiners using the refractive polarization converters that can be useful in small size format projectors such as pocket projectors. The disclosed refractive polarization converters include at least one birefringent prism that can separate an unpolarized light beam into divergent polarized light beams having orthogonal polarization directions.

Abstract: A nanocoaxial sensor includes an outer conductor, an inner conductor, a dielectric material disposed between the outer and inner conductors, a nanocavity sized to allow target species to enter the nanocavity between the outer and inner conductors, and an active sensing element immobilized within the nanocavity on at least one of the inner or outer conductors. The active sensing element is adapted to selectively capture the at least one of the target species.

Abstract: An optical filter device includes a variable wavelength interference filter having a pair of reflecting films opposed to each other, and an electrostatic actuator adapted to change a gap dimension between the pair of reflecting films, and at least one bandpass filter disposed on an optical axis of the pair of reflecting films, and the bandpass filter includes a plurality of transmission wavelength bands in which light is transmitted.

Abstract: An optical filter includes: a first substrate; a second substrate opposed to the first substrate; a first reflecting film provided to the first substrate; a second reflecting film provided to the second substrate and opposed to the first reflecting film; a first electrode provided to the first substrate in a peripheral area of the first reflecting film; a second electrode provided to the first substrate in a peripheral area of the first electrode; a third electrode provided to the second substrate and opposed to the first electrode; and a fourth electrode provided to the second substrate and opposed to the second electrode.

Abstract: A pixel circuit includes a first control electrode and a second control electrode between which a mechanical shutter is put, and a first control voltage application circuit for inputting a first control voltage to the first control electrode according to an image signal. The first control voltage application circuit includes an input transistor, a retaining capacitor and a first transistor. One of current terminals of the input transistor is connected to a signal line. A gate of the input transistor is connected to a scanning line. One terminal of the retaining capacitor is input with a capacitor control signal and the other terminal is connected to the input transistor. The first transistor has a gate connected to the retaining capacitor and two current terminals, one of which is connected to a first control electrode and the other of which is input with a first control signal.

Abstract: A wavelength variable interference filter includes: a first movable mirror disposed on a first substrate; a second movable mirror disposed so as to be opposed to the first movable mirror with a predetermined gap interposed therebetween; and an electrostatic actuator which varies the length of the gap between the mirrors. The first substrate has a first movable portion on which the first movable mirror is disposed, and a first linkage portion which holds the first movable portion in such a manner that the first movable portion can shift in the thickness direction of the substrate. The second substrate has a second movable portion on which the second movable mirror is disposed, and a second linkage portion which holds the second movable portion in such a manner that the second movable portion can shift in the thickness direction of the substrate.

Abstract: An optical module (colorimetry sensor) includes an interference filter, and a transparent substrate to which a first substrate of the interference filter is fixed, having a second thermal expansion coefficient which has a value different from a first thermal expansion coefficient. The interference filter is fixed to the transparent substrate through an adhesive layer made of gel-like resin, and the adhesive layer alleviates stress generated due to a difference in the thermal expansion coefficients between the interference filter and the transparent substrate.

Abstract: An apparatus for performing spectroscopy incorporates, between an EM source and a detector, an optical filter comprising a pair of mirrors opposed along the optical axis and shaped to provide an optical cavity with stable resonance and having a cavity length of at most 50 ?m and a mode at a wavelength within said band of wavelengths for bandpass filtering EM radiation passing therethrough. The actuator system is arranged to move the mirrors relative to each other along the length of the optical cavity for tuning the wavelength of said mode.

Abstract: Methods and apparatus for providing a tunable absorption-emission band in a wavelength selective device are disclosed. A device for selectively absorbing incident electromagnetic radiation includes an electrically conductive surface layer including an arrangement of multiple surface elements. The surface layer is disposed at a nonzero height above a continuous electrically conductive layer. An electrically isolating intermediate layer defines a first surface that is in communication with the electrically conductive surface layer. The continuous electrically conductive backing layer is provided in communication with a second surface of the electrically isolating intermediate layer. When combined with an infrared source, the wavelength selective device emits infrared radiation in at least one narrow band determined by a resonance of the device. In some embodiments, the device includes a control feature that allows the resonance to be selectively modified.

Abstract: A variable wavelength interference filter includes a stationary reflecting film formed of a plurality of layers, an outermost layer of which is a stationary conductive layer, and a movable reflecting film, the stationary reflecting film includes a first region opposed to the movable reflecting film and a second region continuing from an outer circumferential edge of the first region to an outside of the first region, and a part of the stationary conductive layer in the second region is a terminal section to which wiring connection can be performed.

Abstract: A variable wavelength interference filter includes a stationary substrate, a stationary reflecting film disposed on the entire surface of the stationary substrate opposed to a movable substrate, and formed of a multilayer film, a movable reflecting film opposed to the stationary reflecting film, and a first mirror electrode disposed on the stationary reflecting film.

Abstract: An actuator drive system includes electrostatic actuators and a voltage controller that applies drive voltages to the electrostatic actuators, and the voltage controller includes a digital control device that splits an 8-bit drive variable corresponding to an overall displacement amount provided by the electrostatic actuators into 4-bit individual drive variables, a first DAC that produces a first drive voltage signal based on a first individual drive variable, and a second DAC that produces a second drive voltage signal based on a second individual drive variable.

Abstract: An optical filter device includes a wavelength variable interference filter, a housing that stores the wavelength variable interference filter, and a bonding member that fixes a movable substrate to the housing. The housing includes a fixing portion that comes into contact with the bonding member, the fixing portion includes a pedestal fixing surface (first surface) facing a portion of a surface of the movable substrate, a sidewall fixing surface (second surface), continuous with a portion of a periphery of the pedestal fixing surface, which faces a lateral side of the movable substrate, and an intersection surface (third surface) continuous from a remaining portion in a periphery of the pedestal fixing surface in a direction away from the movable substrate, and the bonding member is provided between the substrate surface and the pedestal fixing surface, and between the lateral side and the sidewall fixing surface.

Abstract: The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Micromechanical interferometers of the prior art have a disadvantage of significantly attenuating infrared radiation. In the inventive solution there is a gap in at least one mirror, serving as a layer of the mirror. The other layers of the mirrors can be made of polycrystalline silicon, which has a negligible attenuation at the infrared range. It is also preferable to provide a hole or a recess in a substrate at the optical area of the interferometer.

Abstract: An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The first substrate has a flat surface. The second substrate includes a first surface, a second surface and a third surface, the second surface surrounding the first surface in a plan view, the third surface surrounding the second surface in a plan view, a height of the first surface above the second surface being lower than a height of the third surface above the second surface, the first surface and the second surface facing the flat surface of the first substrate. The first mirror is disposed on the flat surface of the first substrate. The second mirror is disposed on the first surface of the second substrate, the second mirror facing the first mirror. The first electrode is disposed on the flat surface of the first substrate. The second electrode is disposed on the second surface of the second substrate, the second electrode facing the first electrode.

Abstract: An optical module comprising a tunable interference filter including a first substrate, a second substrate facing the first substrate, a first reflective film formed on the first substrate, a second reflective film formed on the second substrate and facing the first reflective film, a gap changing unit changing a gap between the first reflective film and the second reflective film, and a driving electrode line electrically connected to the gap changing unit, a temperature sensor detecting temperature of the tunable interference filter and including a first sensor wiring and a second sensor wiring, the first sensor wiring being electrically connected to the driving electrode line, a switch electrically connected to the second sensor wiring, and a temperature detecting circuit electrically connected to the switch.

Abstract: A variable wavelength interference filter includes: a first reflective film disposed on a face of a first substrate facing a second substrate; a second reflective film disposed on a face of the second substrate facing the first substrate and the first reflective film; a first electrode disposed on the face of the first substrate; and a second electrode disposed on the face of the second substrate. The second substrate includes a movable portion on which the second reflective film is disposed and a connection maintaining portion maintaining the movable portion to be movable in a substrate thickness direction, the connection maintaining portion circumscribes the movable portion and is thinner than the movable portion, and the second electrode is disposed on a portion of the second substrate that is thicker than the connection maintaining portion.

Abstract: An optical filter device includes a wavelength tunable interference filter, a lid having a second opening, a base that forms a receiving space together with the lid, a second glass member that covers the second opening and is bonded to the lid through low melting point glass, and a metal layer provided on the lid. The metal layer is provided outside a line that is separated from the outer peripheral edge of the second glass member by a predetermined distance toward a side away from the second opening and is disposed along the outer peripheral edge of the second glass member in plan view when the lid is viewed from a normal direction with respect to the opening surface of the second opening.

Abstract: An etalon (tunable interference filter) includes a fixed substrate, a movable substrate facing the fixed substrate, a fixed reflection film disposed on the fixed substrate, a movable reflection film disposed on the movable substrate and facing the fixed reflection film via a gap, a fixed electrode disposed on the fixed substrate, and a movable electrode disposed on the movable substrate and facing the fixed electrode. A movable insulating film is stacked on a surface of the movable electrode on the side of the fixed electrode, the movable electrode has a compressive stress, and the movable insulating film has a tensile stress.

Abstract: The present invention concerns the use of hybrid metal-dielectric optical coatings as the end reflectors of laser cavities and/or in the mirror structures used in other optical resonators, such as Fabry-Perot tunable filters, along with the use of such Fabry-Perot tunable filters in wavelength swept sources such as lasers. Hybrid metal-dielectric optical coatings have reflectivity spectra that can be broader than pure dielectric coatings, offer optical reflectivities higher than metal, as high as pure dielectric coatings, eliminate mirror transmission that can cause parasitic light reflections, and use fewer layers and thus have lower mass and higher mechanical resonant frequency for movable mirror applications An important characteristic of these coatings concerns the non-reflected light. Pure dielectric coatings offer high reflectivity, while the non-reflected portion of the light is transmitted by the coating to the substrate, for example.

Abstract: An optical filter includes a stationary substrate and a movable substrate disposed so as to be opposed to each other, a first reflecting film disposed on a movable substrate side of the stationary substrate, a second reflecting film disposed on a stationary substrate side of the movable substrate, and opposed to the first reflecting film, a first protective film disposed so as to overlap the first reflecting film, and having a light transmissive property and electrical conductivity, a second protective film disposed so as to overlap the second reflecting film, and having a light transmissive property and electrical conductivity, a first terminal connected to the first protective film, and a second terminal connected to the second protective film. An electrical connection of the first terminal and the second terminal is electrically switchable.

Abstract: A wavelength variable interference filter includes: a first movable mirror disposed on a first substrate; a second movable mirror disposed so as to be opposed to the first movable mirror with a predetermined gap interposed therebetween; and an electrostatic actuator which varies the length of the gap between the mirrors. The first substrate has a first movable portion on which the first movable mirror is disposed, and a first linkage portion which holds the first movable portion in such a manner that the first movable portion can shift in the thickness direction of the substrate. The second substrate has a second movable portion on which the second movable mirror is disposed, and a second linkage portion which holds the second movable portion in such a manner that the second movable portion can shift in the thickness direction of the substrate.

Abstract: An optical filter includes first and second substrates, first and second mirrors and first and second electrodes. The second substrate includes first, second and third surfaces. The second surface surrounds the first surface in a plan view, and the third surface surrounds the second surface in a plan view. A second height of the second surface is lower than a first height of the first surface, and a third height of the third surface is higher than the first height of the first surface. The first, second and third surfaces face a single flat surface of the first substrate. The first mirror is disposed on the first substrate. The second mirror is disposed on the first surface of the second substrate. The first electrode is disposed on the first substrate. The second electrode is disposed on the second surface of the second substrate and faces the first electrode.

Abstract: An optical filter includes a first substrate, a second substrate, a first reflecting film disposed on a first opposed surface of the first substrate, a second reflecting film disposed on a second opposed surface of the second substrate, a first electrode provided to the first substrate at a peripheral position of the first reflecting film in a plan view, and a second electrode provided to the second substrate and opposed to the first electrode. At least one of the first opposed surface and the second opposed surface is provided with a step section, and an initial gap between the first reflecting film and the second reflecting film is smaller than an initial gap between the first electrode and the second electrode, to thereby allow control of the gap between the reflecting films with good accuracy.

Abstract: A light filter includes a first substrate, a second substrate, a first bonding film provided in an entire region at the second substrate side of the first substrate, a second bonding film provided in an entire region at the first substrate side of the second substrate, a first optical film provided on the first bonding film of the first substrate, a second optical film provided on the second bonding film of the second substrate, a first electrode provided on the first bonding film of the first substrate, and a second electrode provided on the second bonding film of the second substrate, and the first substrate and the second substrate are fixed by bonding of the first bonding film and the second bonding film, and the first optical film, the second optical film, the first electrode, and the second electrode are formed of the same material.

Abstract: A variable wavelength interference filter includes: a first reflective film disposed on a face of a first substrate facing a second substrate; a second reflective film disposed on a face of the second substrate facing the first substrate and the first reflective film; a first electrode disposed on the face of the first substrate; and a second electrode disposed on the face of the second substrate. The second substrate includes a movable portion on which the second reflective film is disposed and a connection maintaining portion maintaining the movable portion to be movable in a substrate thickness direction, the connection maintaining portion circumscribes the movable portion and is thinner than the movable portion, and the second electrode is disposed on a portion of the second substrate that is thicker than the connection maintaining portion.

Abstract: Electrically tunable Fabry-Perot interferometers produced with micro-optical electromechanical (MOEMS) technology. Micromechanical interferometers of the prior art require high control voltage, their production includes complicated production phases, and the forms of the movable mirrors are restricted to circular geometries. In the inventive solution, there is a gap in the movable mirror, whereby mirror layers opposite to the gap are connected with anchoring. The anchoring is such that the stiffness of the mirror is higher at the optical area than at the surrounding area. This way it is possible keep the optical area of the mirror flat even if the control electrodes extend to the optical area. Due to large electrodes, lower control voltages are required.

Abstract: Methods, systems, and apparatus for optical fiber communications. One tunable optical filter includes a light inputting assembly and a light receiving assembly; an adjustable cavity length assembly arranged between the light inputting assembly and the light receiving assembly, wherein the adjustable cavity length assembly includes an adjustable length device, a first substrate, and a second substrate, wherein the first substrate and the second substrate are positioned parallel to each other and are fixed at respective ends of the adjustable length device; and a Fabry-Perot filter arranged in the adjustable cavity length assembly, the Fabry-Perot filter including a first component which is fixed on the first substrate, and a second component which is fixed on the second substrate, the first component includes a reflecting surface facing the second substrate and the second component includes a reflecting surface facing the first substrate.

Abstract: An etalon is provided with a fixed substrate and a movable substrate opposed to the fixed substrate. The fixed substrate is provided with a first bonding surface to be bonded to the movable substrate via a bonding film and a first electrode surface on which a part of the first electrode is formed. The movable substrate is provided with a second bonding surface to be bonded to the first bonding surface via the bonding film and a second electrode surface on which a part of the second electrode is formed. In the state in which the fixed substrate and the movable substrate are bonded to each other with the bonding film, the first electrode formed on the first electrode surface and the second electrode formed on the second electrode surface have contact with each other.

Abstract: An Etalon filter includes a first substrate, a second substrate which faces the first substrate, a first optical film which is provided on the first substrate, and a second optical film which is provided on the second substrate to face the first optical film. The reflective characteristic of the first optical film determined by the reflectance of light of each wavelength in a reflective band is different from the reflective characteristic of the second optical film determined by the reflectance of light of each wavelength in the reflective band. The first optical film can have a reflective characteristic with a first wavelength ?1 as a center wavelength, and the second optical film can have a reflective characteristic with a second wavelength ?2 different from the first wavelength as a center wavelength.

Abstract: A tunable photonic crystal device comprising: alternating layers of a first material and a second material, the alternating layers comprising a responsive material, the responsive material being responsive to an external stimulus, the alternating layers having a periodic difference in refractive indices giving rise to a first reflected wavelength; wherein, in response to the external stimulus, a change in the responsive material results in a reflected wavelength of the device shifting from the first reflected wavelength to a second reflected wavelength.

Abstract: An optical device includes a telecentric optical system, a variable wavelength interference filter, and a detection section, the variable wavelength interference filter includes a first reflecting film, a second reflecting film provided to a movable section, and an electrostatic actuator adapted to displace the movable section, an effective measurement area capable of transmitting a light with a wavelength, which is within a predetermined allowable range centered on a measurement center wavelength when an amount of the displacement of the movable section takes a maximum displacement value, is set in the first reflecting film and the second reflecting film, and the telecentric optical system guides the incident light to the variable wavelength interference filter so that a principal ray of the incident light is parallel thereto and perpendicular to the first reflecting film, and at the same time, collects the incident light in the effective measurement area.

Abstract: An optical filter comprising a first substrate, a second substrate having a support portion which supports the first substrate, a first optical film provided on the first substrate, a second optical film provided on the second substrate and arranged to face the first optical film, a first protective film covering at least the first optical film, a second protective film covering at least the second optical film, a first bonding film, a portion of the first bonding film overlapping a surface of the first protective film in a plan view but does not overlapping the first optical film and a second bonding film, a portion of the second bonding film overlapping a surface of the second protective film in the plan view but does not overlapping the second optical film.

Abstract: An optical filter includes a first substrate, a second substrate opposed to the first substrate, a first optical film provided on a surface of the first substrate facing the second substrate, a second optical film provided on the second substrate and opposed to the first optical film via a gap, a first electrode provided on the surface of the first substrate facing the second substrate, and a second electrode provided on the second substrate and opposed to the first electrode, wherein a first charged body film with charge is formed on top of the first optical film, a second charged body film with charge is formed on top of the second optical film, and the first charged body film and the second charged body film are charged with the same polarity and opposed.

Abstract: An optical filter device includes a wavelength variable interference filter provided with a movable substrate on which respective electrode pads are provided; a base substrate on which the wavelength variable interference filter is mounted, facing the movable substrate; and a fixing member that is disposed between the movable substrate and the base substrate and fixes the movable substrate and the base substrate. The fixing member is disposed at a position that overlaps the respective electrode pads, in a filter plan view.

Abstract: An interference filter includes a first substrate on which a fixed reflection film is provided, a second substrate which faces the first substrate and on which a movable reflection film is provided, a first bonding film that bonds the first substrate and the second substrate to each other, and a sealer that is disposed between the first substrate and the second substrate in a first interspace that allows a first internal space sandwiched between the first substrate and the second substrate to communicate with a space outside the interference filter, the sealer sealing the first internal space, and an inter-substrate distance between the first substrate and the second substrate in the first interspace decreases in a direction from outer circumferential edges of the substrates toward an inner portion of the first interspace in a plan view viewed in a substrate thickness direction.

Abstract: A light filter has a first reflecting film and a second reflecting film opposed to each other, a first electrode, a second electrode, a third electrode, a fourth electrode, and a potential difference control unit, the first electrode and the third electrode are opposed at a first distance, the second electrode and the fourth electrode are opposed at a second distance different from the first distance, the potential difference control unit brings the first electrode and the third electrode into contact by producing a potential difference between the first electrode and the third electrode and brings the second electrode and the fourth electrode into contact by producing a potential difference between the second electrode and the fourth electrode, and thereby, a gap between the first reflecting film and the second reflecting film may be controlled with high accuracy.

Abstract: An integrated apertured micromirror is provided in which the micromirror is monolithically integrated with a micro-optical bench fabricated on a substrate using a lithographic and deep etching technique. The micromirror has an aperture therein and is oriented such that the micromirror is optically coupled to receive an incident beam having an optical axis in a plane of the substrate and to at least partially transmit the incident beam therethrough via the aperture.

Abstract: An optical filter device includes a housing including a light passage hole making light incident on the inner side, an aperture on the outer side of the housing and limiting the light made incident on the incident light passage hole, and an interference filter on the inner side of the housing and including a fixed reflection film and a movable reflection film. In a plan view of the fixed reflection film and the movable reflection film, an opening of the aperture, the light passage hole, and the fixed reflection film and the movable reflection film overlap one another. When the diameter of the fixed reflection film close to the light passage hole is ?m, the bore of the light passage hole is ?p, and the opening diameter of the aperture is ?a, ?a<?m<?p.

Abstract: A method for manufacturing a multi-dimensional target waveguide grating and volume grating with micro-structure quasi-phase-matching. An ordinary waveguide grating is used as a seed grating, and on this basis, a two-dimensional or three-dimensional sampling structure modulated with a refractive index, that is, a sampling grating, is formed. The sampling grating comprises multiple shadow gratings, and one of the shadow gratings is selected as a target equivalent grating. A sampled grating comprises Fourier components in many orders, that is, shadow gratings, a corresponding grating wave vector is [Formula 1], and the grating profile of all the shadow gratings changes with the sampling structure [Formula 2]. In a case where a seed grating wave vector [Formula 3] and a required two-dimensional or three-dimensional grating wave vector do not match, a certain Fourier periodic structure component of the Fourier components of the sampling structure is used to compensate for the wave vector mismatch.

Abstract: The thickness of a first drive electrode is greater than the sum of the thickness of a first reflective film and the thickness of a first conductive film, the first drive electrode extends from the surface of a fixed substrate to the surface of the outer edge portion of the first conductive film and is in contact with the first conductive film, the thickness of a second drive electrode is greater than the sum of the thickness of a second reflective film and the thickness of a second conductive film, and the second drive electrode extends from the surface of a movable substrate to the surface of the outer edge portion of the second conductive film and is in contact with the second conductive film.

Abstract: A variable-wavelength interference filter includes a pair of substrates, a pair of reflection films provided on these substrates, a first electrode, a second electrode, a first conduction electrode provided on the first substrate and provided from the first electrode up to an outer peripheral edge side of the first substrate over the first electrode, a second conduction electrode provided on the second substrate and electrically connected to the first conduction electrode. The first substrate has a first conduction electrode surface facing a contact surface where the first conduction electrode and the second conduction electrode contact each other. The second substrate has a second conduction electrode surface facing the contact surface. A minimum distance from the first conduction electrode surface to the second conduction electrode surface is different from a minimum distance from the first bonding surface to the second bonding surface.

Abstract: A wavelength variable interference filter includes a first drive electrode electrically connected to a first reflective film and a second drive electrode electrically connected to a second reflective film. The thickness of the first drive electrode is greater than the thickness of the first reflective film, and the thickness of the second drive electrode is greater than the thickness of the second reflective film. The first drive electrode has a first step portion having a thickness smaller than the thickness of the first reflective film in an end portion connected to the first reflective film, and the second drive electrode has a second step portion having a thickness smaller than the thickness of the second reflective film in an end portion connected to the second reflective film.

Abstract: An optical filter includes fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode formed to cover the first reflection film and to extend beyond an outer circumference of the first reflection film, and a second electrode provided on a surface of the movable substrate facing the fixed substrate and opposed to a part of the first electrode, and the first electrode is formed of a light-transmissive material, and the first electrode and the second reflection film are electrically connected at the same potential.

Abstract: An apparatus and method for noninvasive measurement of a fluorescent analyte concentration in the blood of a patient by exciting the blood and the analyte at two wavelength ranges and measuring the emission spectrum of the fluorescent analyte when (i) the difference of emission intensities at the excitation wavelength ranges of the fluorescent analyte is greater than that of background fluorophores, and (ii) when blood absorbance at the two excitation wavelength ranges is similar. An apparatus and method for measurement of a fluorescent analyte concentration in the blood of a patient is provided.

Abstract: An optical module includes a fixed reflection film, a movable reflection film, a first driver having a plurality of sub-drivers that can be driven independently of each other via voltage application in a plan view, a second driver that changes the dimension of a gap between the fixed reflection film and the movable reflection film, and a voltage controller that applies first drive voltages to the sub-drivers and applies a second drive voltage to the second driver, and the voltage controller applies a first drive voltage set for each of the sub-drivers in accordance with parallelism between the fixed reflection film and the movable reflection film at the time when the dimension of the gap is changed.

Abstract: An optical filter device has a light interference filter and a casing. The light interference filter has a fixed substrate, a movable substrate joined to the fixed substrate, a fixed reflection film provided on the fixed substrate, and a movable reflection film provided on the movable substrate. The casing has a base substrate and a lid that forms an internal space with the base substrate. The movable substrate has a holding portion provided on a surface opposite to the fixed substrate, outside a light interference region, as viewed in a plan view. The base substrate has a light transmission hole corresponding to a light transmission region. An outer peripheral edge of the light transmission hole faces the holding portion. The surface opposite to the fixed substrate of the movable substrate is joined to the base substrate.