Including Concave Or Convex Reflecting Surface Patents (Class 359/727)
  • Publication number: 20080130138
    Abstract: A radar apparatus has a light receiver that includes a refractive body and a mirror on an opposite surface of the refractive body relative to an incidence surface of the refractive body for receiving an incident light from an outside of the radar apparatus. The refractive angle of the refractive body is configured to be smaller than an incident angle of the incident light, and the mirror is configured to reflect at least a portion of the incident light toward a first light receiving element that is disposed on the incidence surface with its light receiving face facing the incidence surface of the refractive body.
    Type: Application
    Filed: June 12, 2007
    Publication date: June 5, 2008
    Applicant: DENSON CORPORATION
    Inventors: Hisaya Katoh, Noriyuki Matsushita
  • Publication number: 20080117532
    Abstract: A catadioptric projection objective has, along an optical axis, a concave mirror; a positive lens group with positive refractive power arranged adjacent to the concave mirror and spaced apart therefrom; a first prism and a second prism each having respective first fiat surfaces and second flat surfaces, wherein the second flat surfaces are arranged adjacent to the positive lens group and on opposite sides of the optical axis, and wherein the first flat surfaces are arranged adjacent to an object plane and an image plane, respectively, of the projection objective. The projection objective has unit magnification and at least one focus at a wavelength in a design wavelength band that includes mercury g-, h- and i-lines. At least the thickest optical element of the positive lens group and the first and second prism are made from optical material having an absorption coefficient k<0.001 cm?1 in the design wavelength band.
    Type: Application
    Filed: October 10, 2007
    Publication date: May 22, 2008
    Applicant: CARL ZEISS SMT AG
    Inventor: David Shafer
  • Publication number: 20080117400
    Abstract: A projection exposure apparatus for the exposure of a radiation-sensitive substrate arranged in the region of an image surface of a projection objective with at least one image of a pattern of a mask that is arranged in the region of an object surface of the projection objective has a light source for emitting ultraviolet light from a wavelength band having a bandwidth ??>10 pm around a central operating wavelength ?>200 nm; an illumination system for receiving the light from the light source and for directing illumination radiation onto the pattern of the mask; and a projection objective for the imaging of the structure of the mask onto a light-sensitive substrate.
    Type: Application
    Filed: May 11, 2007
    Publication date: May 22, 2008
    Applicant: CARL ZEISS SMT AG
    Inventors: Hans-Juergen Rostalski, Heiko Feldmann, Wilhelm Ulrich
  • Publication number: 20080112065
    Abstract: A system, method and apparatus for rapid, large angle, high-precision steering of one or more beams of light, and in particular, laser beams, using one or more concave reflectors to provide narrow, essentially collimated output beams. The rapid, beam steering device amplifies the angular deflection provided by a small angle steering element by means of one or more concave reflecting surfaces while controlling the divergence of the output beam using a divergence control lens, to produce an essentially collimated output beam in a field of regard that subtends +/?45 degrees on one axis and +/?50 degrees on an orthogonal axis.
    Type: Application
    Filed: March 29, 2006
    Publication date: May 15, 2008
    Inventors: Yei Wo, Steven A. DeChiaro
  • Patent number: 7369327
    Abstract: A variable optical-property element includes a liquid crystal the pitch of twist is less than 60 times the wavelength of light used, so that a spatially uneven electric or magnetic field or temperature is applied to the liquid crystal to thereby form an index distribution, and the electric or magnetic field or the temperature is changed to thereby alter the index distribution. In this way, the variable optical-property element is capable of changing its optical properties as a liquid crystal lens and is used in an optical apparatus.
    Type: Grant
    Filed: June 8, 1999
    Date of Patent: May 6, 2008
    Assignee: Olympus Corporation
    Inventor: Kimihiko Nishioka
  • Patent number: 7344282
    Abstract: An optical sheet includes a substrate onto which light is incident, and a convex part protruded from the substrate by a predetermined thickness. A thickness of the convex part increases from an edge to a center thereof.
    Type: Grant
    Filed: December 27, 2005
    Date of Patent: March 18, 2008
    Assignee: Miraenanotech Co., Ltd.
    Inventors: Cheul Yong Kim, Sang Mook Kim, Jong Wook Huh, Dong Ryoul Kim, Ki Won Jeon, Ju Won Lee, Eun Jung Ham, Myung Su Lee
  • Patent number: 7339753
    Abstract: In a light scanning apparatus including an optical system including a beam deflection means therein and a one-dimensional light modulation device, the one-dimensional light modulation device is disposed on the object side of the optical system, and the beam deflection means is disposed at a diaphragm position. In the optical system, a positive-power former group and a positive-power latter group are arranged, and a one-dimensional image obtained through light modulation by the one-dimensional light modulation device is scanned by the beam deflection means, to thereby form a two-dimensional image on an image plane of the optical system. In application to a projector apparatus or the like, the two-dimensional image can be enlargedly projected by a projecting optical system.
    Type: Grant
    Filed: August 18, 2005
    Date of Patent: March 4, 2008
    Assignee: Sony Corporation
    Inventor: Akira Nakamura
  • Patent number: 7333276
    Abstract: An optical element that condenses light emitted from a light source has: an entrance surface where the light enters; an exit surface from which the light entering inside via the entrance surface; and a reflection surface that directs, to the exit surface by total reflection, part of the light entering the inside via the entrance surface. The reflection surface has an axis of symmetry of sixfold or higher-order-fold rotation. The optical element fulfills conditional formula: 0.3<a/b<1.4, where a denotes the maximum length of the exit surface in the direction perpendicular to the axis of symmetry; and b denotes a surface gap on the axis of symmetry between the entrance surface and the exit surface. As a result, an optical element can be provided which achieves highly efficient condensation at low costs and with simple configuration and also which achieves compactification by reducing the diameter of the optical element for the size of the light emitting surface.
    Type: Grant
    Filed: August 8, 2006
    Date of Patent: February 19, 2008
    Assignee: Konica Minolta Opto, Inc.
    Inventors: Keiko Ikuno, Kenji Konno
  • Patent number: 7317571
    Abstract: A catadioptric projection optical for forming an image of the intermediate image onto a second object, the catadioptric projection optical system include, a first dioptric group including a first lens group that has a positive refractive power and a second lens group that has a positive refractive power, a catadioptric group including a concave mirror and a third lens group that an incidence light and reflected light from the concave mirror pass, and a second dioptric group. A first deflective reflector is arranged between the first lens group and the second lens group. A second deflective reflector is arranged between the second lens group and the third lens group or between the third lens group and the second dioptric group. A first intermediate image is formed between the second lens group and the concave mirror. A second intermediate image is formed between the concave mirror and the second dioptric group.
    Type: Grant
    Filed: August 2, 2005
    Date of Patent: January 8, 2008
    Assignee: Canon Kabushiki Kaisha
    Inventors: Takashi Kato, Chiaki Terasawa, Hirohiko Shinonaga
  • Patent number: 7317583
    Abstract: The present invention relates to a high numerical aperture exposure system having a wafer. The exposure system in the present invention includes a beam-splitter, a reticle, a reticle optical group, where the reticle optical group is placed between the reticle and the beam-splitter, a concave mirror, a concave mirror optical group, where the concave mirror optical group is placed between the concave mirror and the beam-splitter, a fold mirror, where the fold mirror is placed between the beam-splitter and the wafer, and a wafer optical group, where the wafer optical group is placed between the beam-splitter and the wafer. In the present invention, a beam of light is directed through the reticle and the reticle optical group to the beam-splitter, then it is reflected by the beam-splitter onto the concave mirror. Concave mirror reflects the light onto the fold mirror through the beam-splitter. Fold mirror reflects the light onto the wafer through the wafer optical group.
    Type: Grant
    Filed: August 21, 2002
    Date of Patent: January 8, 2008
    Assignee: ASML Holding, N.V.
    Inventors: Mark L Oskotsky, Stanislav Smirnov
  • Patent number: 7307783
    Abstract: A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
    Type: Grant
    Filed: March 29, 2004
    Date of Patent: December 11, 2007
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: J. Joseph Armstrong, Yung-Ho Chuang, David R. Shafer
  • Patent number: 7307797
    Abstract: A zoom lens system comprising a plurality of lens units each composed of at least one lens element, wherein an interval between at least any two lens units is changed so that an optical image is formed with a continuously variable magnification, the zoom lens system comprises a first lens unit having positive power, a second lens unit that includes a lens element having a reflecting surface and has negative power and subsequent lens units including at least one lens unit having positive power, and the condition: 0.50<(C?S)/H<1.00(C=?{square root over ( )}(2R·dR?dR2), S is a sag of the image side surface of the most object side lens element in the second lens unit at height H, H is one-half of an optical axial thickness of the lens element having a reflecting surface, R is a radius of curvature of the image side surface, and dR is an interval between the most object side lens element and the lens element having a reflecting surface) is satisfied.
    Type: Grant
    Filed: February 13, 2007
    Date of Patent: December 11, 2007
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Keiki Yoshitsugu, Takakazu Bito
  • Patent number: 7270447
    Abstract: A lens for an LED having a lens body providing total internal reflection of light emitted by the LED from a first emission point disposed proximate a first junction of the lens body and centerplane. The lens includes an arcuate light-diffusing edge for diffusing light emitted by the LED and reflected by the angular base and sidewall assembly, the light being diffused by the lens at substantially uniform luminance across a sector of at least 150 degrees centered and measured about the first junction. The light diffused by the lens provides for substantially uniform mixing of at least two different colors of light emitted by a multi-color LED apparatus disposed at the first emission point.
    Type: Grant
    Filed: May 23, 2005
    Date of Patent: September 18, 2007
    Assignee: GE Security
    Inventors: René Goulet, Guy Drouin, Martin Beaumont
  • Patent number: 7268956
    Abstract: A dual viewpoint solid catadioptric lens has a first spherical refractive surface S1 having a center C1 located on an optical axis of the lens and having a radius r1, and a second spherical refractive surface S2 having a center C2 located on the optical axis of the lens and having a radius r2<r1. The lens also has a first ellipsoidal reflective surface E1 with foci F1 and F1? on the optical axis of the lens, and a second ellipsoidal partially reflective surface E2 having foci F2 and F2? on the optical axis of the lens. Focus F1 coincides with C1, focus F2 conincides with C2, and focus F1? coincides with F2?. The points C1 and C2 provide dual viewpoints for the lens, which may be used in a variety of imaging applications.
    Type: Grant
    Filed: January 19, 2006
    Date of Patent: September 11, 2007
    Assignee: Electronic Scripting Products, Inc.
    Inventor: Michael J. Mandella
  • Patent number: 7253970
    Abstract: A lens arrangement is presented. The lens arrangement comprises a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis. The second element is configured to allow light passage therethrough and is oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element.
    Type: Grant
    Filed: December 3, 2004
    Date of Patent: August 7, 2007
    Assignee: Nova Measuring Instruments Ltd.
    Inventors: David Scheiner, Michael Winik, Yakov Lyubchik
  • Patent number: 7253971
    Abstract: A catadioptric projection optical system for forming plural intermediate images of a first object and for imaging the image of the first object onto a second object, said catadioptric projection optical system includes at least one concave mirror, a first deflective reflector, and a second deflective reflector, wherein a light reflected by the first deflective reflector is directly led to the second deflective reflector.
    Type: Grant
    Filed: October 20, 2005
    Date of Patent: August 7, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventors: Takashi Kato, Chiaki Terasawa
  • Patent number: 7248423
    Abstract: A transparent member has a light incident surface formed in such a manner as to be oriented downwards, a light emitting surface formed in such a manner as to be oriented towards a driver M and a reflecting mirror surface having a reflecting member integrally attached thereto which is formed into a convex surface relative to the driver on an opposite side to the light emitting surface. The light incident surface is formed into the shape of an integrally angled concave surface. The light emitting surface is formed into the shape of an externally angled convex surface. The reflecting mirror surface includes a central convex mirror surface portion which is oriented further downwards at a central portion of the reflecting mirror surface.
    Type: Grant
    Filed: January 25, 2006
    Date of Patent: July 24, 2007
    Assignee: Honda Motor Co., Ltd.
    Inventors: Takayoshi Horii, Junichi Teraoka
  • Patent number: 7245443
    Abstract: The invention relates to a panoramic attachment optical system and a panoramic optical system for taking an image having a full 360°-direction angle of view or projecting an image at a full 360°-direction angle of view. These optical systems are reduced in size and flare light and improved in resolving power. A panoramic attachment optical system 10 attached to the entrance side of an image-formation lens 20 to form a full 360°-direction image on an image plane 30 comprises a transparent medium that is rotationally symmetric about a center axis 1 and includes at least two internal reflecting surfaces 12, 13 and at least two refracting surfaces 11, 14. A light beam enters the transparent medium via the refracting surface 11, and reflects at the internal reflecting surfaces 12 and 13 in this order to leave the transparent medium via the refracting surface 14, forming an image at a position of the image plane 30 off the center axis 1 via an image-formation lens 20.
    Type: Grant
    Filed: August 16, 2005
    Date of Patent: July 17, 2007
    Assignee: Olympus Corporation
    Inventor: Takayoshi Togino
  • Patent number: 7244924
    Abstract: This invention improves the use efficiency of light emitted by a solid light emitter such as a light emitting diode, and realizes a desired directional pattern. On a front boundary surface of a mold resin 13 sealing a light emitter 12, there are formed a direct emission region 18 for emitting the light from the light emitter 12 and a total reflection region 19 for totally reflecting the light from the light emitter 12. The direct emission region 18 is convex lens-shaped. A light reflecting portion 20 having a concave mirror shape is disposed on a rear wall of the mold resin 13. A part of light emitted from the light emitter 12 is emitted forward by receiving an optical lens action when it passes through the direct emission region 18. Another part of the light emitted by from the light emitter 12 is totally reflected by the total reflection region 19, and is reflected by the light reflecting portion 20, and emitted forward from the total reflection region 19.
    Type: Grant
    Filed: February 7, 2006
    Date of Patent: July 17, 2007
    Assignee: Omron Corporation
    Inventors: Hironobu Kiyomoto, Hayami Hosokawa, Naru Yasuda, Kenji Homma, Yukari Terakawa
  • Patent number: 7239453
    Abstract: A catadioptric projection optical system includes a first optical system, for receiving light from an object, a second optical system, for forming an image of the object on an image plane, and a third optical system disposed optically between the first optical system and the second optical system. The first, second and third optical systems have a common straight optical axis. The image of the object is projected onto the image plane through a plurality of real intermediate image formations, and a pupil plane of the catadioptric projection optical system is free of a void area.
    Type: Grant
    Filed: June 23, 2006
    Date of Patent: July 3, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventors: Chiaki Terasawa, Hiroyuki Ishii, Takashi Kato
  • Patent number: 7227705
    Abstract: A wide-angle optical system (2, 40) having an objective (4, 42) and a mirror system, including a curved mirror (6, 46) for projecting a wide-angle image through the objective (4, 42) onto a detector (10, 44). At least one mirror (8, 46) of the mirror system is arranged movably relative to the objective (4, 42). It is possible to achieve a zoom function, a large elevation range and a selection of an enlarged section from the wide-angle image.
    Type: Grant
    Filed: September 29, 2005
    Date of Patent: June 5, 2007
    Assignee: Diehl BGT Defence GmbH & Co., KG
    Inventors: Dirk Krogmann, Hans Dieter Tholl, Michael Gross
  • Patent number: 7224520
    Abstract: A compact, optically fast catadioptric imager. In one embodiment, the catadioptric imager of this invention includes a first group of optical elements optically disposed to receive electromagnetic radiation from an object and having positive optical power, a second group of optical elements, optically disposed between the first group of optical elements and an image plane, having at least one optical surface and having positive optical power, a third group of optical elements, optically disposed between the object and the second group of optical elements, having at least one optical surface and having negative optical power, a fourth group of optical elements substantially centered along an optical axis of said second group of optical elements and having negative optical power, and a fifth group of optical elements having positive optical power.
    Type: Grant
    Filed: September 28, 2004
    Date of Patent: May 29, 2007
    Assignee: Wavefront Research, Inc.
    Inventor: Thomas A. Mitchell
  • Patent number: 7218453
    Abstract: A projection system for imaging an object field onto an image field, including at least two partial objectives (S1, S2); at least one intermediate image field between the partial objectives (S1, S2); and a concave reflector (119, 219) having a concave reflecting surface. The concave reflecting surface crosses an optical axis of the projection system proximate along the optical axis to the intermediate image field. Alternatively or in addition, the concave reflecting surface crosses an optical axis of the projection system at a position where the condition |HCR/HMR|?2 is met, with HCR being a chief ray height and HMR being a marginal ray height with respect to the optical axis.
    Type: Grant
    Filed: February 3, 2006
    Date of Patent: May 15, 2007
    Assignee: Carl Zeiss SMT AG
    Inventor: David Shafer
  • Patent number: 7203010
    Abstract: A catadioptric projection objective which images a pattern arranged in an object plane of the projection objective into the image plane of the projection objective while generating a real intermediate image has a catadioptric objective part having at least one concave mirror and a beam deflecting device and also a dioptric objective part. The imaging system has a system diaphragm having a variable diaphragm diameter for variably limiting the cross section of the radiation passing through the projection objective. This system diaphragm is arranged in the catadioptric objective part, preferably in direct proximity to the concave mirror. The invention enables a projection objective with a simple construction.
    Type: Grant
    Filed: January 18, 2005
    Date of Patent: April 10, 2007
    Assignee: Carl Zeiss SMT AG
    Inventors: Alexander Epple, Aurelian Dodoc
  • Patent number: 7190530
    Abstract: According to one exemplary embodiment, a projection objective is provided and includes at least two non-planar (curved) mirrors, wherein an axial distance between a next to last non-planar mirror and a last non-planar mirror, as defined along a light path, is greater than an axial distance between the last non-planar mirror and a first refracting surface of lenses following in the light path. In one exemplary embodiment, the first refracting surface is associated with a single pass type lens. The present objectives form images with numerical apertures of at least about 0.80 or higher, e.g., 0.95. Preferably, the objective does not include folding mirrors and there is no intermediate image between the two mirrors, as well as the pupil of the objective being free of obscuration.
    Type: Grant
    Filed: February 16, 2006
    Date of Patent: March 13, 2007
    Assignee: Carl Zeiss SMT AG
    Inventors: Hans-Jurgen Mann, Russell Hudyma, Alexander Epple
  • Patent number: 7186983
    Abstract: There is provided a projection objective for a projection exposure apparatus that has a primary light source for emitting electromagnetic radiation having a chief ray with a wavelength ?193 nm. The projection objective includes an object plane, a first mirror, a second mirror, a third mirror, a fourth mirror; and an image plane. The object plane, the first mirror, the second mirror, the third mirror, the fourth mirror and the image plane are arranged in a centered arrangement around a common optical axis. The first mirror, the second mirror, the third mirror, and the fourth mirror are situated between the object plane and the image plane. The chief ray, when incident on an object situated in the object plane, in a direction from the primary light source, is inclined away from the common optical axis.
    Type: Grant
    Filed: August 17, 2004
    Date of Patent: March 6, 2007
    Assignee: Carl Zeiss SMT AG
    Inventors: Hans-Juergen Mann, Wolfgang Singer, Joerg Schultz, Johannes Wangler, Karl-Heinz Schuster, Udo Dinger, Martin Antoni, Wilhelm Ulrich
  • Patent number: 7180658
    Abstract: A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective comprises a focusing lens group configured to receive the light energy and comprising at least one focusing lens. The objective further comprises at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy. The objective also includes a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy for transmission to a specimen. The Mangin mirror arrangement imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90, and the design may be employed in various environments.
    Type: Grant
    Filed: May 7, 2003
    Date of Patent: February 20, 2007
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: David R. Shafer, Yung-Ho Chuang, J. Joseph Armstrong
  • Patent number: 7177094
    Abstract: The invention relates to a zoom lens that has high optical performance specifications such as high zoom ratios, wide angles of view, reduced F-numbers and limited aberrations, and enables an optical path to be easily bent. The zoom lens comprises a moving lens group B(G2) that has positive refracting power and moves only toward the object side upon zooming from the wide-angle end to the telephoto end, and a lens group A(G1) remaining fixed during zooming, which is located on the object side of the zoom lens with respect to the moving lens group B and has negative refracting power. The moving lens group B is composed of, in order from its object side, a positive lens element, a positive lens element and a negative lens element, three lens elements in all.
    Type: Grant
    Filed: April 4, 2003
    Date of Patent: February 13, 2007
    Assignee: Olympus Corporation
    Inventors: Shinichi Mihara, Ayami Imamura
  • Patent number: 7170688
    Abstract: A retroreflective device comprising a substantially spherical graded refractive index lens, referred to as a GRIN-sphere lens (2), a reflective part for retroreflecting (6) a radiation beam (B) passing through the graded refractive index lens and, at least partially surrounding the lens, a transparent material (4) having a substantially uniform refractive index.
    Type: Grant
    Filed: August 27, 2004
    Date of Patent: January 30, 2007
    Assignee: BAE Systems PLC
    Inventors: Vincent Andrei Handerek, Leslie Charles Laycock
  • Patent number: 7158215
    Abstract: An exposure system for manufacturing flat panel displays (FPDs) includes a reticle stage adapted to support a reticle. A substrate stage is adapted to support a substrate. A reflective optical system is adapted adapted to image the reticle onto the substrate. The reflective optical system includes a primary mirror including a first mirror and a second mirror, and a secondary mirror. The reflective optical system has sufficient degrees of freedom for both alignment and correction of third order aberrations when projecting an image of the reticle onto the substrate by reflections off the first mirror, the secondary mirror, and the second mirror.
    Type: Grant
    Filed: April 26, 2004
    Date of Patent: January 2, 2007
    Assignee: ASML Holding N.V.
    Inventors: Robert D. Harned, Patrick de Jager, Cheng-Qun Gui
  • Patent number: 7133217
    Abstract: An image-taking optical system according to the present invention for forming an image of a two-dimensional object on an image-taking surface comprises a plurality of reflecting surfaces which reflect light from the two-dimensional object sequentially and guides the light to the image-taking surface, and a reference axis passing through the center of the pupil of the image-taking system and the center of the optical image formed on the image-taking surface is inclined with respect to the normal line of the two-dimensional object. The present invention provides an image-taking optical system which achieves a reduction in size, ensures a ratio of an amount of peripheral light, allows correction of trapezoidal distortion of a formed image, and is suitable for oblique image-taking.
    Type: Grant
    Filed: September 4, 2002
    Date of Patent: November 7, 2006
    Assignee: Canon Kabushiki Kaisha
    Inventors: Sawako Chatani, Toshihiro Sunaga
  • Patent number: 7116496
    Abstract: An optical system for projection photolithography is disclosed. The optical system is a modified Dyson system capable of imaging a large field over both a narrow and a broad spectral range. The optical system includes a positive lens group having a positive subgroup of elements that includes at least a plano-convex element and a negative subgroup that includes at least a negative meniscus element. The lens subgroups are separated by a small air space. The positive and negative subgroups constitute a main lens group arranged adjacent to but spaced apart from a concave mirror along the mirror axis. The system also includes a variable aperture stop so that the system has a variable NA. A projection photolithography system that employs the optical system is also disclosed.
    Type: Grant
    Filed: October 29, 2004
    Date of Patent: October 3, 2006
    Assignee: Ultratech, Inc.
    Inventor: Romeo I. Mercado
  • Patent number: 7110191
    Abstract: The invention has now found out why ghost light occurs in an imaging optical system using a decentered reflecting prism for the purpose of reducing ghost light. The invention provides an imaging optical system comprising at least one decentered prism 10 having a rotationally asymmetric reflecting surface, at least located on an image side of an aperture stop. The prism 10 comprises three or more surfaces including an entrance surface 11, a reflecting surface 12 and an exit surface 13. The reflecting surface has an effective area A+B+C, and a reflection-enhancing member is applied onto an area B+C except a sub-area A at which an effective light beam is totally reflected.
    Type: Grant
    Filed: March 7, 2005
    Date of Patent: September 19, 2006
    Assignee: Olympus Corporation
    Inventor: Tohru Nakamura
  • Patent number: 7102664
    Abstract: The camera system consists of a folded optical system that focuses object in the visible waveband on a plurality of CCD detector arrays (6). The camera system is a push-broom imager with a plurality of long, substantially linear CCD arrays (6) arranged orthogonal to the scan direction S. The camera system is capable of image resolutions down to 1 m from a space orbit.
    Type: Grant
    Filed: January 23, 2003
    Date of Patent: September 5, 2006
    Assignee: The Council for the Central Laboratory of the Research Councils
    Inventors: Richard Holdaway, Nicholas Richard Waltham, Peter Frank Gray
  • Patent number: 7088526
    Abstract: A lens collimator according to the present invention includes a plurality of lens elements bonded together. The lens elements, preferably three, each include spherical surfaces and are generally concentrically disposed relative to each other. The lens elements are arranged to produce an increased quantity of reflections and refractions within a lens optical path. The reflections and refractions reduce aberrations and control signal intercept angles relative to an image plane, thereby enabling the lens to match the performance of an optical signal carrier utilized with the lens. The lens element arrangement basically serves to provide an optical path with a quantity of reflections similar to that achieved with a lens having a greater quantity of elements or surfaces. The reflections and refractions enable the lens to cancel out or remove undesired characteristics (e.g., aberrations, etc.) from the resulting optical signals.
    Type: Grant
    Filed: August 7, 2003
    Date of Patent: August 8, 2006
    Assignee: ITT Manufactruing Enterprises, Inc.
    Inventor: Leroy O. Braun
  • Patent number: 7085072
    Abstract: An optical path bending optical system includes, in order from the object side, a first lens unit, a second lens unit with negative power, and at least one lens unit with positive power. When the magnification of the optical system is changed in the range from a wide-angle position to a telephoto position, the lens unit with positive power is moved along the optical axis. The first lens unit is constructed with a prism including a reflecting surface for bending the optical path, an entrance surface, and an exit surface, and has negative power. The entrance surface of the prism is configured as a curved surface with negative power which is rotationally symmetrical with respect to the optical axis.
    Type: Grant
    Filed: May 25, 2004
    Date of Patent: August 1, 2006
    Assignee: Olympus Corporation
    Inventor: Keiichi Kuba
  • Patent number: 7085075
    Abstract: According to one exemplary embodiment, a projection objective is provided and includes at least two non-planar (curved) mirrors, wherein an axial distance between a next to last non-planar mirror and a last non-planar mirror, as defined along a light path, is greater than an axial distance between the last non-planar mirror and a first refracting surface of lenses following in the light path. In one exemplary embodiment, the first refracting surface is associated with a single pass type lens. The present objectives form images with numerical apertures of at least about 0.80 or higher, e.g., 0.95. Preferably, the objective does not include folding mirrors and there is no intermediate image between the two mirrors, as well as the pupil of the objective being free of obscuration.
    Type: Grant
    Filed: August 12, 2003
    Date of Patent: August 1, 2006
    Assignee: Carl Zeiss SMT AG
    Inventors: Hans-Juergen Mann, Russell Hudyma, Alexander Epple
  • Patent number: 7079314
    Abstract: A catadioptric optical system comprising a first imaging optical system for forming an intermediate image of a first plane surface, a second imaging optical system for forming a final image of the first plane surface onto a second plane surface which is substantially parallel to the first plane surface, and a catadioptric type optical system disposed in the optical path from the first plane surface to the second plane surface and including a first reflecting surface which reflects light coming from through the first plane surface and a second reflecting surface for directing the light reflected by the first reflecting surface toward the second plane surface. At least one of the first and second reflecting surfaces is a concave reflecting surface. All of the optical elements of the catadioptric optical system are disposed on a single linear optical axis.
    Type: Grant
    Filed: July 12, 2000
    Date of Patent: July 18, 2006
    Assignee: Nikon Corporation
    Inventors: Yutaka Suenaga, Tomohiro Miyashita, Kotaro Yamaguchi
  • Patent number: 7075726
    Abstract: A projection optical system projects an image of an object onto an image plane, and includes a first imaging optical system for forming an image of the object, and a second imaging optical system for re-imaging the image upon the image plane, wherein the first and second imaging optical systems are disposed in an order from the object side and are disposed along a common straight optical axis. The first imaging optical system includes a first mirror for reflecting and collecting abaxial light from the object, wherein one of the first and second imaging optical systems includes a second mirror for reflecting light from the first mirror to the image plane side, and wherein, with the second mirror, the abaxial light is caused to pass an outside of an effective diameter of the first mirror.
    Type: Grant
    Filed: February 16, 2001
    Date of Patent: July 11, 2006
    Assignee: Canon Kabushiki Kaisha
    Inventors: Chiaki Terasawa, Hiroyuki Ishii, Takashi Kato
  • Patent number: 7072102
    Abstract: An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.
    Type: Grant
    Filed: December 26, 2002
    Date of Patent: July 4, 2006
    Assignee: ASML Netherlands B.V.
    Inventor: James P. McGuire, Jr.
  • Patent number: 7068446
    Abstract: A nonimaging optical system for processing a first and second light distribution. The nonimaging optical system includes at least two refractive surfaces, at least one reflective surface nearer to the first light distribution along at least one ray path than the nearer of the two refracting surfaces and the reflective surface and the refractive surfaces cooperating to redirect light edge rays of the first light distribution into the neighborhood of the edge of the second light distribution with a single reflection from the reflecting surface.
    Type: Grant
    Filed: May 4, 2004
    Date of Patent: June 27, 2006
    Assignee: Illumitech Inc.
    Inventors: Benjamin D. Jacobson, Robert D. Gengelbach
  • Patent number: 7048388
    Abstract: A projection optical system guiding and projecting a light beam from a projected object surface onto a projection surface in an upstream-downstream direction through a transmission dioptric system and a reflection dioptric system. An intermediate image surface of the projected object surface is positioned closer to the reflection dioptric system than to the transmission dioptric system, and an intermediate image on the intermediate image surface is formed as the final image on the projection surface via the reflecting mirrors, which include at least one anamorphic polynomial free-formed surface having different vertical and lateral powers. A light beam from the reflection dioptric system to the projection surface is guided at an angle to a normal of the projection surface and the transmission dioptric system is decentered with respect to a normal of the projected object surface, the transmission refractive elements prevented from being decentered with respect to each other.
    Type: Grant
    Filed: February 5, 2004
    Date of Patent: May 23, 2006
    Assignee: Ricoh Company, Ltd.
    Inventors: Atsushi Takaura, Kazuhiro Fujita, Nobuo Sakuma
  • Patent number: 7046459
    Abstract: A catadioptric projection lens for imaging a pattern arranged in an object plane while creating a real intermediate image, having a catadioptric first lens section having a concave mirror and a beam-deflection device, as well as a dioptric second lens section that follows the catadioptric lens section, between its object plane and image plane. The beam-deflection device deflects radiation coming from the object plane to the concave mirror. Positive refractive power is arranged following the first reflective surface, between the latter and the concave mirror, within an optical near-field of the object plane, within which the height of the principal ray of the outermost field point of radiation coming from the object exceeds the marginal-ray height.
    Type: Grant
    Filed: June 18, 2004
    Date of Patent: May 16, 2006
    Assignee: Carl Zeiss SMT AG
    Inventors: David R. Shafer, Alexander Epple
  • Patent number: 7031077
    Abstract: An optical reduction system for use in the photolithographic manufacture of semiconductor devices having one or more quarter-wave plates operating near the long conjugate end. A quarter-wave plate after the reticle provides linearly polarized light at or near the beamsplitter. A quarter-wave plate before the reticle provides circularly polarized or generally unpolarized light at or near the reticle. Additional quarter-wave plates are used to further reduce transmission loss and asymmetries from feature orientation. The optical reduction system provides a relatively high numerical aperture of 0.7 capable of patterning features smaller than 0.25 microns over a 26 mm×5 mm field. The optical reduction system is thereby well adapted to a step and scan microlithographic exposure tool as used in semiconductor manufacturing. Several other embodiments combine elements of different refracting power to widen the spectral bandwidth which can be achieved.
    Type: Grant
    Filed: November 8, 2004
    Date of Patent: April 18, 2006
    Assignee: ASML Holding N.V.
    Inventor: Justin L. Kreuzer
  • Patent number: 7016124
    Abstract: An image-formation optical system is disclosed which is an off-axial optical system configured using reflective surfaces, with which the performance deterioration with respect to manufacturing discrepancies is reduced, and which can be made sufficiently compact. The image-formation optical system comprises a reflective optical unit including a plurality of reflective surfaces. Each of the reflective surfaces has a curvature and a rotationally asymmetric shape. Moreover, L/{Er(S?1)} is smaller than 2.2 and L/{Eo (S?1)} is larger than 3.
    Type: Grant
    Filed: June 3, 2004
    Date of Patent: March 21, 2006
    Assignee: Canon Kabushiki Kaisha
    Inventors: Koshi Hatakeyama, Toshihiro Sunaga
  • Patent number: 7012756
    Abstract: A display optical system for guiding light from an image to an observer or a surface projecting an image thereon with a first optical system and second optical system. The first optical system having a first surface formed on a transparent body with a reflecting action, a second surface reflecting light reflected on the first surface toward the first surface again, and a third surface formed on the transparent body transmitting light from the image. The light transmitted through the third surface travels toward the first surface and is reflected for the first time. In addition, a principal ray, central angle of view to be reflected for the last time on the first surfaces is reflected to a side opposite a side of the first reflection on the first surface with respect to a normal line of a surface on a hit point thereof.
    Type: Grant
    Filed: November 12, 2002
    Date of Patent: March 14, 2006
    Assignee: Canon Kabushiki Kaisha
    Inventors: Akinari Takagi, Shoichi Yamazaki, Hideki Morishima, Kazutaka Inoguchi, Motomi Matsunaga
  • Patent number: 7006306
    Abstract: The present embodiments provide methods and apparatuses for providing prescribed illumination. Some embodiments provide lenses that include a two-dimensional beam-forming lens-profile where the profile acts to deflect light rays from a light source into a relatively narrow output beam. A zone of higher refractive index than that of the area outside the profile is enclosed where the higher refractive-index zone admits the light rays, a transverse axis of revolution is further included and extends transversely across and outside of the lens-profile so that the transverse axis extends generally laterally with respect to a luminous centroid-direction of the output beam. The lens further includes a surface of revolution formed by circularly sweeping the lens-profile about the axis of revolution forming a circumferential beam from the output beam emitted by said surface of revolution.
    Type: Grant
    Filed: July 29, 2004
    Date of Patent: February 28, 2006
    Assignee: Light Prescriptions Innovators, LLC
    Inventors: Waqidi Falicoff, William A. Parkyn, Jr., Yupin Sun, Juan Carlos Minano, Pablo Benitez
  • Patent number: 7006304
    Abstract: A catadioptric projection lens configured for imaging a pattern arranged in an object plane (2) onto an image plane (4) while creating a single, real, intermediate image (3) has a catadioptric imaging group (5) having a concave mirror (6) and a beam-deflector (7), and a dioptric imaging lens group (20) that commences after the beam-deflector. The system is configured such that the intermediate image follows the first lens (17) of a dioptric section (8) and is preferably readily accessible. Arranging the intermediate image both between a pair of lenses (17, 21) of the dioptric section and at a large distance behind the final reflective surface of the beam-deflector helps to avoid imaging aberrations.
    Type: Grant
    Filed: February 6, 2004
    Date of Patent: February 28, 2006
    Assignee: Carl Zeiss SMT AG
    Inventors: Alexander Epple, Helmut Beierl
  • Patent number: 6995930
    Abstract: A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical elements for separating beams, a second double pass lens system arranged between the optical elements for separating beams and the concave mirror, a third lens system arranged between the optical elements for separating beams and the image plane. The second lens system has a maximum of five lenses.
    Type: Grant
    Filed: December 15, 2003
    Date of Patent: February 7, 2006
    Assignee: Carl Zeiss SMT AG
    Inventors: David R. Shafer, Alexander Epple, Aurelian Dodoc, Helmut Beierl, Wilhelm Ulrich
  • Patent number: RE39296
    Abstract: Catadioptric projection systems are disclosed for projecting an illuminated region of a reticle onto a corresponding region on a substrate. The systems are preferably used with ultraviolet light sources (e.g., 193 nm). The systems comprise a first imaging system, a concave mirror, and a second imaging system. The first imaging system comprises a single-pass lens group and a double-pass lens group. The single-pass lens group comprises a first negative subgroup, a positive subgroup, and a second negative subgroup. Light from the illuminated region of the reticle passes through the single-pass lens group and the double-pass lens group, and reflects from the concave mirror to pass back through the double-pass lens group to form an intermediate image of the illuminated region of the reticle. The light is then directed to the second imaging system that re-images the illuminated region of the reticle on the substrate.
    Type: Grant
    Filed: September 8, 2000
    Date of Patent: September 19, 2006
    Assignee: Nikon Corporation
    Inventor: Tomowaki Takahashi