Including Concave Or Convex Reflecting Surface Patents (Class 359/727)
  • Publication number: 20020012107
    Abstract: An exposure apparatus includes a projection optical system of catadioptric type, and an optical element disposed on a reciprocating light path of the projection optical system, the optical element being movable to correct at least one of spherical aberration, astigmatism, and curvature of field of the projection optical system.
    Type: Application
    Filed: February 23, 2001
    Publication date: January 31, 2002
    Inventor: Masayuki Suzuki
  • Patent number: 6342967
    Abstract: A lens design having two concave mirrors or Mangins and a turning mirror is disclosed. The optical axis of the concave elements are coplanar and intersect on a turning mirror, and the normal to the surface of the turning mirror bisects the angle between the two optical axis.
    Type: Grant
    Filed: March 24, 2000
    Date of Patent: January 29, 2002
    Inventor: Janusz S. Wilczynski
  • Patent number: 6341044
    Abstract: According to one aspect of the invention there is provided a panoramic imaging arrangement comprising lens block and a system of lenses. The lens block has a substantially vertical axis of revolution and is capable of receiving light from a first, 360° surrounding panoramic scene. The system of lenses has a vertical axis of revolution substantially coinciding with the axis of revolution of the lens block and is positioned to receive light from a second scene which is at least partially located above the first, surrounding panoramic scene, and projecting the light from the second scene.
    Type: Grant
    Filed: October 19, 1998
    Date of Patent: January 22, 2002
    Assignee: Be Here Corporation
    Inventors: Edward C. Driscoll, Jr., Edward P. Wallerstein, Willard C. Lomax, James E. Parris, John Louis Warpakowski Furlan, Edward V. Bacho, Jorge E. Carbo, Jr.
  • Publication number: 20020003673
    Abstract: According to one aspect of the invention there is provided a panoramic imaging arrangement comprising a transparent component and a reflective material. The transparent component has a first surface about a vertical axis of revolution, a second surface about the axis of revolution, and an opening formed therein to define a third, internal surface about the axis of revolution. The third surface has a concave profile in a plane of the axis of revolution. The reflective material is located on the second surface to provide a reflective surface against the second surface. The first surface, the reflective surface and the third surface are positioned relative to one another so that light from a 360° surrounding panoramic scene enters the transparent component through the first surface, whereafter the light is reflected from the reflective surface, whereafter the light exits the transparent component through the third surface.
    Type: Application
    Filed: April 17, 2001
    Publication date: January 10, 2002
    Inventors: Jan Hoogland, Edward Driscoll, Willard Curtis Lomax
  • Patent number: 6332688
    Abstract: A light energy efficient and low cost optical system for providing uniform illumination of a light valve. The light source is an extended source generally emitting a non-uniform spatial distribution of light power. The source light is focused into the entrance end of a light transmitting tunnel having reflecting interior wall surfaces and having cross sectional and length dimensions chosen to deliver, at the exit end of the tunnel, light which is substantially uniform is power distribution, over the surface area of the exit end, due multiple reflections from the tunnel walls. The exiting light is advantageously used to uniformly illuminate a light valve. The invention includes a combination of mirrors arranged about the source light to most effectively collect and direct the light.
    Type: Grant
    Filed: May 15, 1995
    Date of Patent: December 25, 2001
    Assignee: Corning Incorporated
    Inventor: Simon Magarill
  • Patent number: 6324016
    Abstract: A reflective telecentric lens which uses an on-axis type concave mirror in a pseudo-off-axis manner to avoid blockage of a portion of the field of view. The concave mirror used in a pseudo-off-axis manner permits the telecentric stop, imaging lens, and film or an electronic detector to be moved outside of the field of view.
    Type: Grant
    Filed: November 3, 1999
    Date of Patent: November 27, 2001
    Inventor: Spencer D. Luster
  • Publication number: 20010024330
    Abstract: A catadioptric reduction projection optical system having a first lens unit having negative refractive power and widening a light beam from a reticle, a prism type beam splitter for transmitting therethrough a light beam from the first lens unit, a concave reflecting mirror for returning the light beam emerging from the beam splitter to the beam splitter while converging it, and a second lens unit having positive refractive power and converging the light beam returned to the beam splitter and reflected by the beam splitter, and forming the reduced image of a pattern on the reticle on a wafer.
    Type: Application
    Filed: February 7, 2001
    Publication date: September 27, 2001
    Inventors: Sumio Hashimoto, Yutaka Suenaga, Yutaka Ichihara
  • Patent number: 6294723
    Abstract: Disclosed is a photovoltaic module including a plurality of concentrators each having a light-incident plane and a reflection plane, and photo detectors. Each photo detector is in contact with one of the concentrators. The module is capable of effectively trapping light and effectively generating power throughout the year even if the module is established such that sunlight at the equinoxes is made incident on the light-incident planes not in a perpendicular manner but instead obliquely, for example, in the case where the module is established in contact with a curved plane of a roof, or the like.
    Type: Grant
    Filed: February 23, 1999
    Date of Patent: September 25, 2001
    Assignee: Hitachi, Ltd.
    Inventors: Tsuyoshi Uematsu, Terunori Warabisako, Yoshiaki Yazawa, Yoshinori Miyamura, Ken Tsutsui, Shin-ichi Muramatsu, Hiroyuki Ohtsuka, Junko Minemura
  • Patent number: 6278554
    Abstract: An image pickup optical system has an optical element of a transparent, optical material including an entrance surface, at least one reflective surface, and an exit surface. The optical element has an optical power, the image pickup optical system has an image pickup element including a plurality of pixels. On the image pickup element an image is formed by light from an object through the optical element. The optical material is a material having an index change amount &Dgr;n from an absolute dry condition at the temperature of 50° C. to saturation under a circumstance of the temperature being 50° C.
    Type: Grant
    Filed: October 27, 1999
    Date of Patent: August 21, 2001
    Assignee: Canon Kabushiki Kaisha
    Inventors: Michiharu Aratani, Hiroshi Nakanishi
  • Publication number: 20010010555
    Abstract: Most camera systems only record an image from a limited viewing angle. A new panoramic camera apparatus is disclosed that instantaneously captures a 360 degree panoramic image. In the camera device, virtually all of the light that converges on a point in space is captured. Specifically, in the camera of the present invention, light striking this point in space is captured if it comes from any direction, 360 degrees around the point and from angles 50 degrees or more above and below the horizon. The panoramic image is recorded as a two dimensional annular image. Furthermore, various different systems for displaying the panoramic images and distributing the panoramic images. Specifically, methods and apparatus for digitally performing a geometric transformation of the two dimensional annular image into rectangular projections such that the panoramic image can be displayed using conventional methods such as printed images and televised images.
    Type: Application
    Filed: June 11, 1997
    Publication date: August 2, 2001
    Inventor: EDWARD DRISCOLL JR
  • Publication number: 20010008144
    Abstract: Disclosed is a photovoltaic module including a plurality of concentrators each having a light-incident plane and a reflection plane, and photo detectors each being in contact with one of the concentrators, which is capable of effectively trapping light and effectively generating power throughout the year even if the module is established such that sunlight at the equinoxes is made incident on the light-incident planes not perpendicularly but obliquely from the right, upper side, for example, in the case where the module is established in contact with a curved plane of a roof or the like.
    Type: Application
    Filed: February 23, 1999
    Publication date: July 19, 2001
    Inventors: TSUYOSHI UEMATSU, TERUNORI WARABISAKO, YOSHIAKI YAZAWA, YOSHINORI MIYAMURA, KEN TSUTSUI, SHIN-ICHI MURAMATSU, HIROYUKI OHTSUKA, JUNKO MINEMURA
  • Publication number: 20010006434
    Abstract: An optical pickup includes a light source emitting a laser beam and an optical path changing unit altering a traveling path of an incident beam. An objective lens, disposed on an optical path between the optical path changing unit and an optical disk, focuses the incident beam from the light source to form a light spot on the optical disk of the objective lens. The optical pickup further includes a photodetector and an detecting-correcting unit, arranged on the optical path between the optical path changing unit and the objective lens, performing at least one of detecting the thickness of the optical disk and correcting aberration caused by thickness variations of the optical disk. The objective lens includes a first transmitting portion divergently transmitting an incident beam, where the first transmitting portion is at a relatively near-axis region from an optical axis of the objective lens.
    Type: Application
    Filed: November 30, 2000
    Publication date: July 5, 2001
    Inventors: Jang-hoon Yoo, Kun-ho Cho, Seung-tae Jung, Chul-woo Lee, Dong-ho Shin
  • Publication number: 20010002155
    Abstract: A catoptric reduction projection optical system (5) is provided with a first catoptric optical system (10) that images an object (R) in first (object) plane (OP) into a second plane (12) and forming an intermediate image (II) therein, and a second catoptric optical system (20) that images the intermediate image in the second plane onto a third (image) plane (IP), thereby and forming a reduced image of the object in the first (object) plane onto the third (image) plane. The first catoptric optical system comprises a first mirror pair comprising two reflective mirrors (M1, M2). The second catoptric optical system comprises a second mirror pair comprising a convex mirror (M3) and a concave mirror (M4). The system also preferably satisfied a number of design conditions.
    Type: Application
    Filed: January 17, 2001
    Publication date: May 31, 2001
    Applicant: NIKON CORPORATION
    Inventors: Tomowaki Takahashi, Yutaka Suenaga
  • Patent number: 6239915
    Abstract: A composite display apparatus has a display device for displaying image information, a display optical system for guiding light from the display device to the eye of an observer, and an image pickup optical system for focusing light from the outside on an image pickup device. An optical axis of the image pickup optical system is substantially aligned with an axis that is an extension of the eye-ball optical axis in an optical path of the display optical system. The apparatus further has an optical path separating element for separating an optical path of the image pickup optical system from the optical path of the display optical system. Each of the display optical system and the image pickup optical system has a plurality of decentered reflective surfaces having curvature. The light from the display device is alternately folded in directions along the eye-ball optical axis by the plurality of reflective surfaces of the display optical system to be guided to the eye.
    Type: Grant
    Filed: March 12, 1999
    Date of Patent: May 29, 2001
    Assignee: Mixed Reality Systems Laboratory Inc.
    Inventors: Akinari Takagi, Shoichi Yamazaki
  • Patent number: 6233100
    Abstract: A very compact, high numerical aperture, high resolution, ultra-wide field of view concentric scanning optical sensor. The concentric scanning optical sensor includes a scanning half ball lens having a flat reflective rear surface, outer and inner shell lenses, and a linear focal surface array. The outer shell lens and linear inner shell lens are concentrically disposed about the center of the scanning half ball lens. The linear focal surface array is disposed along a focal surface of the inner shell lens. The scanning optical sensor may also use a full spherical ball with multiple reflecting surfaces to allow for multiple facet scanning.
    Type: Grant
    Filed: October 7, 1999
    Date of Patent: May 15, 2001
    Assignee: Raytheon Company
    Inventors: Chungte W. Chen, J. Steve Anderson
  • Patent number: 6229647
    Abstract: A reflection and refraction optical system includes a polarization beam splitter, a concave mirror, a lens group and a quarter waveplate, wherein an additional waveplate is provided to transform S-polarized light from the polarization beam splitter into circularly polarized light.
    Type: Grant
    Filed: August 11, 1997
    Date of Patent: May 8, 2001
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kazuhiro Takahashi, Masato Muraki
  • Patent number: 6222683
    Abstract: According to one aspect of the invention there is provided a panoramic imaging arrangement comprising a transparent component and a reflective material. The transparent component has a first surface about a vertical axis of revolution, a second surface about the axis of revolution, and an opening formed therein to define a third, internal surface about the axis of revolution. The third surface has a concave profile in a plane of the axis of revolution. The reflective material is located on the second surface to provide a reflective surface against the second surface. The first surface, the reflective surface and the third surface are positioned relative to one another so that light from a 360° surrounding panoramic scene enters the transparent component through the first surface, whereafter the light is reflected from the reflective surface, whereafter the light exits the transparent component through the third surface.
    Type: Grant
    Filed: July 31, 2000
    Date of Patent: April 24, 2001
    Assignee: Be Here Corporation
    Inventors: Jan Hoogland, Edward C. Driscoll, Willard C. Lomax
  • Patent number: 6208473
    Abstract: A catadioptric projection lens comprising a first lens group (G1) disposed along a first optical axis (16a), a mirror (18) which creates a second optical axis (16b), a beam splitter (20) which creates a third optical axis (16c), a second lens group (G2) including a concave mirror (L22) disposed along the third optical axis on one side of the beam splitter, and a third lens group (G3) disposed along the third optical axis on the side of the beam splitter. The first and third optical axes are parallel, a configuration which reduces aberrations arising from gravitational deformation of the lens elements, when the first and third axes are aligned with the direction of gravity.
    Type: Grant
    Filed: April 30, 1998
    Date of Patent: March 27, 2001
    Assignee: Nikon Corporation
    Inventor: Yasuhiro Omura
  • Patent number: 6195213
    Abstract: The present invention relates to a projection exposure apparatus (10) for and method of imaging a reticle (R) having patterned surface onto a substrate (W) in photolithographic processes for manufacturing a variety of devices. The invention further relates to an optical system (C) having a folding member (M1) suited to the projection exposure apparatus, and a method for manufacturing the optical system. The projection exposure apparatus comprises an illumination optical system (IS) and a reticle stage (RS) capable of holding the reticle so the normal line to its patterned surface is in the direction of gravity. The apparatus also includes a substrate stage (WS) capable of holding the substrate with its surface normal parallel to the direction of gravity. The optical system includes a first imaging optical system (A) comprising a concave reflecting mirror and a dioptric optical member arranged along a first optical axis. The first imaging optical system (A) forms an intermediate image of the patterned surface.
    Type: Grant
    Filed: June 8, 1999
    Date of Patent: February 27, 2001
    Assignee: Nikon Corporation
    Inventors: Yasuhiro Omura, Tetsuo Takahashi, Masatoshi Ikeda, Shiwen Li, Yutaka Ichihara
  • Patent number: 6185051
    Abstract: A near-field optical or MO data storage system uses an optical focusing device for focusing an incident optical beam to a small size focal spot. The optical focusing device includes an optically transmissive body which is defined by a generally flat incident surface, a flat, bottom surface disposed opposite and parallel to the incident surface, and a reflective side coated with a reflective layer for reflecting the optical beam through the body toward the bottom surface. The bottom surface defines a focal plane on which the focal spot is formed, for generating a localized evanescent field. The focal spot is located along a central axis P, in very close proximity to the data storage disk, such that the localized evanescent field interacts with the disk, for enabling data to be transduced to and from the disk by effecting near field coupling. An electro-magnetic coil or coil assembly, can optionally be formed on the bottom surface, co-axially with the focal spot, for generating a desired write magnetic field.
    Type: Grant
    Filed: June 23, 1999
    Date of Patent: February 6, 2001
    Assignee: Read-Rite Corporation
    Inventors: Hong Chen, Chuan He, Charles C. K. Cheng, Joseph J. Miceli, Jr.
  • Patent number: 6169627
    Abstract: The invention is directed to a catadioptric microlithographic reduction objective having two concave mirrors (21, 23) facing toward each other. The concave mirrors have a symmetrical configuration and a central bore. Lenses (24 to 60) are mounted downstream of the mirrors (21, 23) on the light path toward the image plane (61). Preferably, lenses (15 to 20) are moved at the object end forward into the intermediate space between the mirrors (21, 23) in the region of the central bore. The light path between the concave mirrors can then preferably be free of lenses. The formation of an intermediate image (Z) downstream of the mirrors (21, 23) affords especially good correction possibilities.
    Type: Grant
    Filed: March 5, 1999
    Date of Patent: January 2, 2001
    Assignee: Carl-Zeiss-Stiftung
    Inventor: Karl Heinz Schuster
  • Patent number: 6166860
    Abstract: In a device for directing light longitudinally forwardly, the combination comprising a light source, and a protective, transparent envelope extending about the light source; a drum lens having a body extending about the light source and envelope, for refracting light from the source; a light reflector extending about the drum lens body, for forwardly and convergently re-directing refracted light received from the drum lens body; and a correcting lens for receiving a collimating re-directed light screened from the reflector.
    Type: Grant
    Filed: August 17, 1999
    Date of Patent: December 26, 2000
    Assignee: Teledyne Lighting and Display Products, Inc.
    Inventors: Vladimir Medvedev, William A Parnyn
  • Patent number: 6157498
    Abstract: An optical imaging system especially for microlithography includes a first imaging system forming an intermediate image of an object, and a second imaging system forming, on a surface, an image of the intermediate image. A reflective surface directs light from the first imaging system to the second imaging system. An aspherical corrective optical surface is located at or near the location of the intermediate image for correcting aberrations such as high-order distortion, aberrations due to accumulation of manufacturing tolerances, and spherical aberration. The first imaging system comprises a positive power refractive element and a concave mirror. The second imaging system comprises refractive elements and no concave mirror.
    Type: Grant
    Filed: June 18, 1997
    Date of Patent: December 5, 2000
    Assignee: Nikon Corporation
    Inventor: Tomowaki Takahashi
  • Patent number: 6157497
    Abstract: It is an object to provide a high-performance and compact exposure apparatus which can perform a projection exposure operation with satisfactory optical performance by using a plurality of compact projection optical systems each capable of ensuring a sufficient working distance and having excellent imaging performance, while preventing a decrease in throughput even in a large exposure area. An exposure apparatus for projecting and exposing an image of a mask onto a plate while moving a mask and a plate has a first projection optical system and a second projection optical system each of which is real-size and both-side telecentric and forms the erect image of the mask on the plate. The first or second projection optical system has a refraction optical system having a positive refracting power, and a concave reflecting mirror for reflecting a light beam from the refraction optical system toward the refraction optical system.
    Type: Grant
    Filed: January 16, 1996
    Date of Patent: December 5, 2000
    Assignee: Nikon Corporation
    Inventor: Masato Kumazawa
  • Patent number: 6124986
    Abstract: A zoom optical system and an image pickup apparatus using the same are disclosed. The zoom optical system comprises a first optical unit having a refractive power, the first optical unit having a reflecting surface, a second optical unit having a refractive power, and a driving portion for moving a light receiving surface which receives light from an object through the first optical unit and the second optical unit. The zoom optical system performs variation of magnification by moving at least one of the first optical unit and the second optical unit, and a deviation of a focus position due to the variation of magnification is corrected by the light receiving surface being moved by the driving portion.
    Type: Grant
    Filed: August 27, 1997
    Date of Patent: September 26, 2000
    Assignee: Canon Kabushiki Kaisha
    Inventors: Makoto Sekita, Tsunefumi Tanaka, Keisuke Araki, Kenichi Kimura, Norihiro Nanba, Hiroshi Saruwatari, Takeshi Akiyama
  • Patent number: 6118596
    Abstract: A catadioptric reduction projection optical system having a first lens unit having negative refractive power and widening a light beam from a reticle, a prism type beam splitter for transmitting therethrough a light beam from the first lens unit, a concave reflecting mirror for returning the light beam emerging from the beam splitter to the beam splitter while converging it, and a second lens unit having positive refractive power and converging the light beam returned to the beam splitter and reflected by the beam splitter, and forming the reduced image of a pattern on the reticle on a wafer.
    Type: Grant
    Filed: August 14, 1996
    Date of Patent: September 12, 2000
    Assignee: Nikon Corporation
    Inventors: Sumio Hashimoto, Yutaka Suenaga, Yutaka Ichihara
  • Patent number: 6109756
    Abstract: A catoptric reduction projection optical system (8), exposure apparatus (EX) including same, and a method using same for forming in a second plane (WP) a reduced image of an object (R) in a first plane (RP). The projection optical system includes, in order along a folded optical path on in optical axis (AX), from the first plane to the second plane, a first mirror (M1) having a concavely shaped reflecting surface and a first vertex, a second mirror (M2) having a second vertex, a third mirror (M3) having a convexly shaped reflecting surface and a third vertex, a single aperture stop (AS), and a fourth mirror (M4) having a concavely shaped reflecting surface and a fourth vertex. The projection optical system also preferable satisfies a number of design conditions.
    Type: Grant
    Filed: September 21, 1999
    Date of Patent: August 29, 2000
    Assignee: Nikon Corporation
    Inventor: Tomowaki Takahashi
  • Patent number: 6108140
    Abstract: A catadioptric reduction projection optical system having a first lens unit having negative refractive power and widening a light beam from a reticle, a prism type beam splitter for transmitting therethrough a light beam from the first lens unit, a concave reflecting mirror for returning the light beam emerging from the beam splitter to the beam splitter while converging it, and a second lens unit having positive refractive power and converging the light beam returned to the beam splitter and reflected by the beam splitter, and forming the reduced image of a pattern on the reticle on a wafer.
    Type: Grant
    Filed: February 8, 1999
    Date of Patent: August 22, 2000
    Assignee: Nikon Corporation
    Inventors: Sumio Hashimoto, Yutaka Suenaga, Yutaka Ichihara
  • Patent number: 6101047
    Abstract: Provided with an optical system which is applicable to an exposure apparatus used in the manufacture of semiconductors and includes a combination of a spherical mirror having a function of refraction and lenses for astigmation control, using a CaF.sub.2 lens as the last lens, thereby making it possible to use a light source operating at a short wavelength and a wide bandwidth, enhance the life of the optical system, and transfer the enlarge pattern of a mask onto the wafer for realizing fine line width.
    Type: Grant
    Filed: August 11, 1998
    Date of Patent: August 8, 2000
    Assignee: Electronics and Telecommunications Research Institute
    Inventors: Hai Bin Chung, Jong Soo Kim, Kag Hyeon Lee, Doh Hoon Kim, Sang Soo Choi, Hyung Joun Yoo
  • Patent number: 6097537
    Abstract: A catadioptric optical system (10, 110) capable of forming an image of an object. The system comprises a first optical axis (Z.sub.1) having a first end (12) and a second end (14), with a concave mirror (M.sub.C) arranged at the first end. A second surface (P.sub.2) orthogonal to the first optical axis is provided at the second end. A reflective surface (M) is arranged between the concave mirror and the second surface. A first imaging optical system (A) comprising a first plurality of lenses (L.sub.1 -L.sub.4) is arranged between the reflective surface and the concave mirror. A second imaging optical system (B) comprising a second plurality of lenses (L.sub.5 -L.sub.9) is arranged between the reflective surface and the second surface. The system further includes a second optical axis (Z.sub.2) intersecting the first optical axis at the reflective surface and having a first surface (P.sub.1) disposed along and orthogonal to the secondary optical axis.
    Type: Grant
    Filed: April 5, 1999
    Date of Patent: August 1, 2000
    Assignee: Nikon Corporation
    Inventors: Tomowaki Takahashi, Junichi Misawa
  • Patent number: 6094315
    Abstract: A high-performance and low-cost image-forming optical system made compact and thin by folding an optical path using reflecting surfaces having power. The optical system has a plurality of reflecting surfaces having power. Among the reflecting surfaces, a reflecting surface (12) of negative power is placed closest to the object side, and a reflecting surface (22) of positive power is placed closer to the image side than the reflecting surface (12). At least one reflecting surface (13) is provided between the reflecting surface (12) and the reflecting surface (22). An axial principal ray (1) incident on the reflecting surface (13) satisfies the condition of 45.degree.<.vertline..theta..vertline., where .theta. is the angle formed between the axial principal ray and a line normal to the reflecting surface (13) in the decentration direction at a point where the axial principal ray (1) intersects the reflecting surface (13).
    Type: Grant
    Filed: May 18, 1999
    Date of Patent: July 25, 2000
    Assignee: Olympus Optical Co., Ltd.
    Inventor: Norihiko Aoki
  • Patent number: 6081382
    Abstract: A catadioptric reduction projection optical system (10, 30) capable of forming a reduced image of a pattern of a reticle (R) on a wafer (W) by scanning the reticle and wafer in a scanning direction (12, 14). The system comprises, in order from a first surface (OP) to a second surface (IP) along a folded optical axis (A), a first optical system (G1) having positive refracting power, and a beam splitter (BS) having a transmissoreflective surface and a reflection optical path and a transmission optical path. The beam splitter is arranged such that the plane of incidence, defined by the folded optical axis, includes the scanning direction. The system also includes a second optical system (G2) comprising a single concave mirror (M.sub.C) arranged in one of the reflection optical path and transmission optical path, and a third optical system. The latter has negative refracting power and includes a reflective plane surface (M.sub.P).
    Type: Grant
    Filed: May 5, 1999
    Date of Patent: June 27, 2000
    Assignee: Nikon Corporation
    Inventor: Yasuhiro Omura
  • Patent number: 6069755
    Abstract: A rear-view mirror for a vehicle has a convex reflecting surface composed of a plurality of distinct curved surfaces each having a selected shape that are smoothly joined with each other with a continuously varying average curvature. The average curvature increases gradually along the vertical direction from the top to the bottom of the mirror and along the transverse horizontal direction away from the body of the vehicle. The mirror provides a wide viewing around both sides and of the rear of the vehicle without blind spots and provides a clear image with little distortion that is visually acceptable to a driver.
    Type: Grant
    Filed: January 6, 1997
    Date of Patent: May 30, 2000
    Inventor: Shiqing Li
  • Patent number: 6069749
    Abstract: A catadioptric reduction optical system capable of imaging an object by scanning in a scanning direction. The system comprises, objectwise to imagewise, a first optical system, a beam splitter, and a second optical system arranged adjacent the beam splitter opposite the image side thereof. The second optical system includes at least one concave mirror. The system also includes a third optical system arranged adjacent said beam splitter imagewise thereof, an aperture stop, and a fourth optical system having positive refractive power. The third and fourth optical systems include a plurality of lens elements preferably comprising of at least two glass types for facilitating the correction of aberrations. The system is designed such that the beam splitter is of a practical size, while allowing for a suitable working distance on the image side, a large numerical aperture, and sub-quarter micron resolution in the ultraviolet wavelength range.
    Type: Grant
    Filed: September 14, 1998
    Date of Patent: May 30, 2000
    Assignee: Nikon Corporation
    Inventor: Yasuhiro Omura
  • Patent number: 6064517
    Abstract: A system for multiple mode imaging is disclosed herein. The system is a catadioptric system preferably having an NA greater than 0.9, highly corrected for low and high order monochromatic aberrations. This system uses unique illumination entrances and can collect reflected, diffracted, and scattered light over a range of angles. The system includes a catadioptric group, focusing optics group, and tube lens group. The catadioptric group includes a focusing mirror and a refractive lens/mirror element. The focusing optics group is proximate to an intermediate image, and corrects for aberrations from the catadioptric group, especially high order spherical aberration and coma. The tube lens group forms the magnified image. Different tube lens groups can be used to obtain different magnifications, such as a varifocal tube lens group to continuously change magnifications from 20 to 200.times.. Multiple imaging modes are possible by varying the illumination geometry and apertures at the pupil plane.
    Type: Grant
    Filed: March 24, 1998
    Date of Patent: May 16, 2000
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Chuang, David Shafer, Bin-Ming B. Tsai, J. Joseph Armstrong
  • Patent number: 6061188
    Abstract: In a projection printing apparatus, illumination light from a lamp housing illuminates a photomask, and a diffracted light beam from the photomask is focused on an exposed substrate via a projection optical system to project a circuit pattern, the projection optical system including first and second halfmirrors and first and second concave mirrors. The first and second halfmirrors are arranged in symmetry or similar symmetry with respect to a normal to an optical axis of a diffracted light beam directed from the first halfmirror to the second halfmirror. Thus, a projection printing apparatus and a projection printing method are obtained in which unevenness in transmissivity in the projection optical system can be compensated for and steric hindrance or degradation of image characteristics is not caused.
    Type: Grant
    Filed: December 1, 1997
    Date of Patent: May 9, 2000
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Kazuya Kamon
  • Patent number: 6038387
    Abstract: A method for precise design of light distribution for lighting equipment that use light-emitting devices, and for subsequently producing such equipment. By modeling the internal structure of an LED device with respect to the geometry and characteristics of a chip portion, chip reflector and lens portion, illuminating light from an LED device is classified into direct light from the chip portion and the reflected light from the chip reflector. The unknown values necessary for the modeling are specified preliminarily by actual measurements. Subsequently, the original geometry of the lens step is determined roughly based on the target direction and the diffusion angle of the light transmitted through the step. The manner in which the direct light from the chip portion and the reflected light from the chip reflector are transmitted through the lens portion and the lens step is simulated by ray tracing.
    Type: Grant
    Filed: May 19, 1997
    Date of Patent: March 14, 2000
    Assignee: Koito Manufacturing Co., Ltd.
    Inventor: Tsutomu Machida
  • Patent number: 5999333
    Abstract: To use a beam splitting optical system smaller than the conventional beam splitters and to set a longer optical path between a concave, reflective mirror and an image plane. A light beam from an object surface travels through a first converging group to enter a beam splitter, and a light beam reflected by the beam splitter is reflected by a concave, reflective mirror to form an image of patterns on the object surface inside the concave, reflective mirror. A light beam from the image of the patterns passes through the beam splitter and thereafter forms an image of the patterns through a third converging group on an image plane.
    Type: Grant
    Filed: December 9, 1997
    Date of Patent: December 7, 1999
    Assignee: Nikon Corporation
    Inventor: Tomowaki Takahashi
  • Patent number: 5982563
    Abstract: A projection-type display apparatus including an elliptical condenser mirror having a concave reflecting surface consisting of part of a substantially elliptical surface, a light source arranged near a first focal point of the elliptical surface, a collimator lens having a focal point near a second focal point of the elliptical surface, and an optical modulation element array having a lens array on the collimator lens side, in which optical modulation elements each having an area S are two-dimensionally arranged.
    Type: Grant
    Filed: February 27, 1998
    Date of Patent: November 9, 1999
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hiroki Nakamura, Yoshihiro Watanabe
  • Patent number: 5973858
    Abstract: The present invention relates to a reflecting optical system, wherein the reflecting optical system comprises a first reflecting surface having a positive power and a second reflecting surface having a negative power, wherein at least one of the surfaces is inclined and the reflecting optical system comprises a substantially afocal optical system of the surfaces.
    Type: Grant
    Filed: January 28, 1997
    Date of Patent: October 26, 1999
    Assignee: Canon Kabushiki Kaisha
    Inventor: Makoto Sekita
  • Patent number: 5969882
    Abstract: In a catadioptric optical system, the first focusing lens system A includes a concave mirror Mc, and it forms an intermediate image of the first plane R. The second focusing lens system B includes an aperture stop AS, and it forms a refocused image of the intermediate image on the second plane W. A reflecting surface M.sub.P1 is placed so that the light flux leaving the first focusing lens system A is guided to the second focusing lens system B. There are one or more lens surfaces that satisfy the conditionh/.phi.<0.85 (1)and one or more lens surfaces that satisfy the condition0.85<h/.phi.<1.2 (2)where h is the height at each lens surface of the light beam that is assumed to be emitted from the intersection of the optical axis of the first plane and passes through the lens surfaces with the maximum numerical aperture, and .phi. is the radius of the diaphragm of the aperture stop.
    Type: Grant
    Filed: March 31, 1998
    Date of Patent: October 19, 1999
    Assignee: Nikon Corporation
    Inventor: Tomowaki Takahashi
  • Patent number: 5966250
    Abstract: A structure and method for a collection system for a projector includes a collector for reflecting light and a correcting mechanism for receiving the reflected light. The collector and the correcting mechanism, in combination, correct the light and output a light beam having a uniform image size.
    Type: Grant
    Filed: November 30, 1995
    Date of Patent: October 12, 1999
    Assignee: Philips Electronics North America Corp.
    Inventor: Jeffrey A. Shimizu
  • Patent number: 5930055
    Abstract: A unitary, at least partially dielectric, element having formed thereon plural electromagnetic radiation reflecting surfaces, at least one of which is a total internal reflection surface.
    Type: Grant
    Filed: March 26, 1997
    Date of Patent: July 27, 1999
    Inventor: Yeshayahu S. Eisenberg
  • Patent number: 5909325
    Abstract: An ocular optical system suitable for a head- or face-mounted image display apparatus which is compact, lightweight and satisfactorily corrected for aberrations, and in which no intermediate image is formed. The image display apparatus includes an image display unit (9) and an optical system (10) for projecting a displayed image into an eyeball (7). The optical system (10) is arranged such that light rays which are emitted from the image display unit (9) and enter the eyeball (7) are reflected at least three times by surfaces (12, 13 and 14) having power in backward ray tracing.
    Type: Grant
    Filed: June 26, 1996
    Date of Patent: June 1, 1999
    Assignee: Olympus Optical Co., Ltd.
    Inventors: Keiichi Kuba, Koichi Takahashi
  • Patent number: 5907442
    Abstract: A reflective optical system includes, in traveling order of light, a correction plate having an aspherical surface and a reflecting mirror for concentrating the light. An image is formed out of an optical path between the correction plate and the reflecting mirror.
    Type: Grant
    Filed: January 17, 1997
    Date of Patent: May 25, 1999
    Assignee: Canon Kabushiki Kaisha
    Inventor: Toru Matsuda
  • Patent number: 5903403
    Abstract: An imaging system includes a compound elliptical concentrator having an illumination source at an entry aperture and having an exit aperture directed to project light onto the surface of an object. The compound elliptical concentrator includes first and second reflective surfaces that are arcs of different ellipses. The ellipse that defines the arc of the first reflective surface has one focus that is proximate to an entry end of the second reflective surface. The ellipse that defines the arc of the second reflective surface has a focus that is proximate to the entry end of the first reflective surface. The other foci of the ellipses are at or beyond the exit aperture of the compound elliptical concentrator and are preferably symmetrically aligned with respect to the surface to be imaged. The reflective surfaces are on the opposite sides of a plane of symmetry and are configured such that multiple reflections of extreme rays from the illumination source are deterred.
    Type: Grant
    Filed: January 24, 1997
    Date of Patent: May 11, 1999
    Assignee: Hewlett-Packard Company
    Inventor: James B. Williamson
  • Patent number: 5861997
    Abstract: A catadioptric projection optical system is provided, which can use a beam splitting optical system smaller in size than a conventional polarizing beam splitter, can set a long optical path from a concave reflecting mirror to an image plane, allows easy adjustment of the optical system, and has excellent imaging performance. A light beam from an object surface forms a first intermediate image through a refracting lens group. A light beam from the first intermediate image passes through a polarizing beam splitter and is reflected by a concave reflecting mirror to form a second intermediate image in the polarizing beam splitter. A light beam from the second intermediate image is reflected by the polarizing beam splitter means to form a final image on the image plane via a refracting lens group. The polarizing beam splitter means is arranged near the positions at which the intermediate images are formed.
    Type: Grant
    Filed: August 16, 1995
    Date of Patent: January 19, 1999
    Assignee: Nikon Corporation
    Inventor: Tomowaki Takahashi
  • Patent number: 5844728
    Abstract: A catadioptric reduction projection optical system having a first lens unit having negative refractive power and widening a light beam from a reticle, a prism type beam splitter for transmitting therethrough a light beam from the first lens unit, a concave reflecting mirror for returning the light beam emerging from the beam splitter to the beam splitter while converging it, and a second lens unit having positive refractive power and converging the light beam returned to the beam splitter and reflected by the beam splitter, and forming the reduced image of a pattern on the reticle on a wafer.
    Type: Grant
    Filed: June 26, 1996
    Date of Patent: December 1, 1998
    Assignee: Nikon Corporation
    Inventors: Sumio Hashimoto, Yutaka Suenaga, Yutaka Ichihara
  • Patent number: 5835275
    Abstract: Catadioptric systems are provided, comprising a first imaging system, a plane mirror, and a second imaging system. The first imaging system comprises a single-pass optical system and a double-pass optical system that further comprises a concave mirror and a double-pass lens group. The second imaging system comprises a plane mirror and an aperture. The first imaging system forms an intermediate image of an object; the second imaging system re-images the intermediate image on a substrate. The catadioptric systems satisfy various conditions.
    Type: Grant
    Filed: June 27, 1997
    Date of Patent: November 10, 1998
    Assignee: Nikon Corporation
    Inventors: Tetsuo Takahashi, Yasuhiro Omura
  • Patent number: RE36740
    Abstract: In a cata-dioptric optical system having a combination of a reflection system and a refraction system for reduction-projecting an object on a first plane onto a second plane, a polarization beam splitter and a quarter wavelength plate are provided to split the incident light and the reflected light. The light beam directed to the polarization beam splitter is converted to a substantially collimated light beam by a first group of lenses. A second group of lenses are arranged between the polarization beam splitter and a concave reflection mirror to diverge the light beam. The light reflected by the concave reflection mirror is directed back to the polarization beam splitter with a substantially collimated state by the second group of lenses. The light beam from the second group of lenses transmitted through the polarization beam splitter is focused by a third group of lenses having a positive refraction power to form a reduced image.
    Type: Grant
    Filed: June 14, 1995
    Date of Patent: June 20, 2000
    Assignee: Nikon Corporation
    Inventors: Yutaka Ichihara, Hideo Mizutani, Sumio Hashimoto, Yutaka Suenaga