With Specific Power Supply Patents (Class 361/235)
  • Patent number: 7924544
    Abstract: An ionization system for a predefined area includes a plurality of emitter modules spaced around the area, a system controller for individually addressing and monitoring the emitter modules and communication lines for electrically connecting the plurality of emitter modules with the system controller. Each emitter module has an individual address and including at least one electrical ionizer.
    Type: Grant
    Filed: June 10, 2008
    Date of Patent: April 12, 2011
    Assignee: Illinois Tool Works Inc.
    Inventors: William S. Richie, Richard D. Rodrigo, Philip R. Hall
  • Patent number: 7877036
    Abstract: A power supply includes a transformer to transform an input voltage into an output driving voltage for one of a plurality of components of an image forming apparatus, and an output converter to detect the driving voltage being output from the transformer, to amplify the detected driving voltage according to a power control signal, and to output the amplified driving voltage to at least one remaining component in the plurality of components of the image forming apparatus. The power supply can not only control high voltage outputs individually, but also reduces the number of switching transformers being used, as it uses at least one shared switching transformer.
    Type: Grant
    Filed: January 15, 2008
    Date of Patent: January 25, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-kyu Kim, Min-seon Kim
  • Publication number: 20110001619
    Abstract: A method for incapacitating an object using a non-lethal projectile equipped with a motion sensing device. The non-lethal projectile is fired at and preferably attaches to the object. Motion of the object is monitored by the motion sensing device. Upon sensing motion of the object, the non-lethal projectile provides a first or another incapacitating stimulus to the object if the motion is sensed as meeting at least one criterion. The criterion may be based on a previously determined algorithm or the threshold is previously determined.
    Type: Application
    Filed: March 23, 2009
    Publication date: January 6, 2011
    Inventors: Haim Danon, Ilan Shalev
  • Patent number: 7859590
    Abstract: An electronic device includes, in an interior of a flat housing, a battery compartment, and a device side terminal portion that contacts a side terminal portion of a battery stored in the battery compartment portion. The device side terminal portion includes a plurality of terminals that contact terminals of the side terminal portion of the battery, and a terminal holder that holds the plurality of terminals and that is attached to a printed circuit board. The terminal holder includes a printed circuit board overlap portion that supports the printed circuit board in overlapping relationship with a side portion of the terminal holder. The plurality of terminals are connected to the printed circuit board through the printed circuit board overlap portion. The device side terminal portion also includes one or more ground terminals.
    Type: Grant
    Filed: March 13, 2006
    Date of Patent: December 28, 2010
    Assignee: Sony Corporation
    Inventors: Kenji Yanagida, Sachio Tomomori, Tomonori Watanabe, Tetsuya Okuchi
  • Patent number: 7851932
    Abstract: An electricity-generating backpack that is substantially lighter in weight, has the multiple springs replaced with one large spring whose spring constant can be adjusted in the field in seconds, and replaces a DC generator with a brushless AC generator that permits approximately 70% generator efficiency and the generation of up to 20 W of electrical power by converting mechanical energy to electrical power. A device is provided that always removes some electricity, but not too much, as necessary to extract large levels of the electricity while controlling damping by providing electrical damping circuits including a DC-DC converter designed to emulate a desired load at its input terminals. Additional electricity generating E-MOD devices may be used for generating additional power by hooking an E-Mod device to a generator and to the backpack belt at the wearer's hip and includes a wand that fits against the wearer's femur so as to move through a range of motion as the patient walks.
    Type: Grant
    Filed: March 31, 2008
    Date of Patent: December 14, 2010
    Assignee: Lightning Packs, LLC
    Inventors: Lawrence Craig Rome, Heath Fred Hofmann, Guanghui Wang
  • Patent number: 7834327
    Abstract: A load circuit device having a self-biasing active load circuit, and a related high voltage power supply configured to bias an optical element in a charged particle beam processing system, such as a gas cluster ion beam (GCIB) processing system. The high voltage power supply comprises a variable voltage supply having a load terminal at a load potential and a reference terminal at a reference potential, and a self-biasing active load circuit connected between the load terminal and the reference terminal, and configured to sustain a variable voltage drop between the load potential and the reference potential while maintaining a substantially constant current.
    Type: Grant
    Filed: September 23, 2008
    Date of Patent: November 16, 2010
    Assignee: TEL Epion Inc.
    Inventor: Kenneth P. Regan
  • Patent number: 7813102
    Abstract: An apparatus and method for minimizing contamination buildup on corona emitters that are employed in an ionizer. Contamination buildup control is accomplished with solely electronic means. High voltage is applied to the emitters with waveforms that serve to push contaminants away from the emitter, rather than attracting contaminants toward the emitters. The results are fewer cleaning cycles, more time between cleaning cycles, and more stable ionizer operation.
    Type: Grant
    Filed: March 14, 2008
    Date of Patent: October 12, 2010
    Assignee: Illinois Tool Works Inc.
    Inventors: Peter Gefter, Scott Gehlke, Lawrence Levit
  • Patent number: 7806952
    Abstract: Disclosed are apparatus, system, and method for enhancing air purification efficiency regarding a gaseous medium passing through an opening. Included is a high voltage source that creates an effective voltage field across the opening; and at least one charge bleeding element constructed and arranged to maintain an effective voltage field across the opening.
    Type: Grant
    Filed: August 1, 2008
    Date of Patent: October 5, 2010
    Assignee: 3M Innovative Properties Company
    Inventors: Andrew R. Fox, Marvin E. Jones, Larry J. Carson
  • Publication number: 20100158582
    Abstract: An ion generating device is arranged such that a heater electrode is wired so as to heat (i) a creeping discharge area and (ii) areas where respective terminal sections of an induction electrode, a discharge electrode, and the heater electrode are provided. This allows prevention of dew condensation and nitric acid generation in the vicinities of the respective terminal sections.
    Type: Application
    Filed: December 18, 2009
    Publication date: June 24, 2010
    Inventors: Katsumi Adachi, Shoutaro Okamoto
  • Patent number: 7706122
    Abstract: An analog control application specific integrated circuit (ASIC) apparatus for a high voltage power supply (HVPS) in an image for apparatus, and a method for controlling the HVPS are provided. The HVPS includes a transformer transforming an AC signal to a high voltage signal and a voltage doubler outputting a DC high voltage for the HVPS. The ASIC includes an analog control circuit configured as a one-chip ASIC that converts a predetermined DC level signal to a high frequency switching signal using a switching component and outputs the converted high frequency switching signal to a primary winding of the transformer. If the high voltage output signal output from the voltage doubler is not feedbacked, the switching component high frequency switches a received driving signal of a gate driver, and outputs the high frequency switched signal to the transformer.
    Type: Grant
    Filed: February 1, 2006
    Date of Patent: April 27, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Young-min Chae, Joong-gi Kwon, Chul-woo Oh, Jong-hwa Cho, Sang-yong Han
  • Publication number: 20100061033
    Abstract: A power supply is provided for an electrostatic chuck. A signal generating circuit of the power supply is configured to generate a square wave signal. An amplifying circuit is electrically connected to the square wave circuit and configured to amplify the square wave signal. A transformer has a primary and a secondary winding. The primary winding is electrically connected to the amplifying circuit and the secondary winding is configured to be electrically connected to the electrostatic chuck. The secondary winding produces a signal for the electrostatic chuck. A voltage divider circuit is electrically connected to the secondary winding and to the amplifying circuit. The voltage divider circuit is configured to reduce the voltage of the signal for the electrostatic chuck and feed back the reduced voltage signal to the amplifying circuit. The signal from the secondary winding is a trapezoidal waveform with approximately flat tops and minimal dead-time between phase reversals.
    Type: Application
    Filed: September 11, 2008
    Publication date: March 11, 2010
    Applicant: TEL EPION INC.
    Inventor: Kenneth P. Regan
  • Publication number: 20100020462
    Abstract: An ion generating element includes a positive ion discharger for generating positive ions and a negative ion discharger for generating negative ions. The ion dischargers are arranged separately from and independently of each other with a distance securing insulation between them. At least one of the dischargers includes a discharging portion for causing electric discharge, and a conducting portion having a voltage same as the discharging portion. The conducting portion surrounds a perimeter or part of the discharging portion. The conducting portion may surround a perimeter or part of the discharging portion so as to partition the ion dischargers from each other.
    Type: Application
    Filed: September 10, 2009
    Publication date: January 28, 2010
    Inventors: Yoshinori SEKOGUCHI, Ichiro Tokai, Hiromu Nishida, Satoshi Takahashi
  • Patent number: 7652431
    Abstract: An electrostatic fluid accelerator having a multiplicity of closely spaced corona electrodes. The close spacing of such corona electrodes is obtainable because such corona electrodes are isolated from one another with exciting electrodes. Either the exciting electrode must be placed asymmetrically between adjacent corona electrodes or an accelerating electrode must be employed. The accelerating electrode can be either an attracting or a repelling electrode. Preferably, the voltage between the corona electrodes and the exciting electrodes is maintained between the corona onset voltage and the breakdown voltage with a flexible top high-voltage power supply. Optionally, however, the voltage between the corona electrodes and the exciting electrodes can be varied, even outside the range between the corona onset voltage and the breakdown voltage, in to vary the flow of fluid.
    Type: Grant
    Filed: May 3, 2005
    Date of Patent: January 26, 2010
    Assignee: Tessera, Inc.
    Inventor: Igor A. Krichtafovitch
  • Patent number: 7626681
    Abstract: According to an aspect of the present invention, there is provided a lithographic apparatus that includes a substrate carrier arranged to hold a substrate in position using an electrostatic force. The substrate carrier is provided with an integral power source. The apparatus also includes a substrate table for holding the substrate carrier.
    Type: Grant
    Filed: December 28, 2005
    Date of Patent: December 1, 2009
    Assignee: ASML Netherlands B.V.
    Inventors: Budiman Sutedja, Rudy Jan Maria Pellens, Johannes Paulus Adrianus Maria Van Den Heuvel, Paulus Wilhelmus Leonardus Van Dijk
  • Patent number: 7621471
    Abstract: An electrostatic spray gun includes a power supply, an enclosure having a wall and a valve providing access through the wall to evacuate the enclosure. Components of the power supply are housed in the enclosure and subject to the atmosphere within the enclosure.
    Type: Grant
    Filed: December 16, 2005
    Date of Patent: November 24, 2009
    Assignee: Illinois Tool Works Inc.
    Inventor: Varce E. Howe
  • Patent number: 7619870
    Abstract: An electrostatic chuck device includes an electrostatic chuck section including a substrate and a power supply terminal for applying a DC voltage to an electrostatic-adsorption inner electrode; and a metal base section fixed to the other main surface of the electrostatic chuck section. Here, a concave portion is formed in the main surface of the metal base section facing the electrostatic chuck section and a dielectric plate is fixed to the concave portion. The dielectric plate and the electrostatic chuck section are adhesively bonded to each other with an insulating adhesive bonding layer interposed therebetween. The dielectric plate and the concave portion are adhesively bonded to each other with an insulating adhesive bonding layer interposed therebetween. The dielectric constant of the insulating adhesive bonding layer is smaller than that of any one of the dielectric plate and the substrate.
    Type: Grant
    Filed: August 7, 2007
    Date of Patent: November 17, 2009
    Assignees: Tokyo Electron Limited, Sumitomo Osaka Cement Co., Ltd.
    Inventors: Shinji Himori, Shoichiro Matsuyama, Atsushi Matsuura, Hiroshi Inazumachi, Mamoru Kosakai, Yukio Miura, Keigo Maki
  • Patent number: 7612981
    Abstract: The present invention is relating to an ion generator and an ionizer, in which the ion generator can obtain stable ion generation even if the electrode and the power supply slightly change, satisfies voltage and frequency conditions for realizing an ozone concentration less than 50 ppb as an allowable concentration.
    Type: Grant
    Filed: January 31, 2008
    Date of Patent: November 3, 2009
    Assignees: National Institute of Advanced Industrial Science & Technology, FISA Corporation
    Inventors: Takafumi Seto, Makoto Hirasawa, Yasufumi Hozumi, Masaaki Tsuji, Akira Okuyama, Susumu Saito
  • Patent number: 7608196
    Abstract: A plasma etch process for etching a dielectric material employing two primary etchants at low flows and pressures, and a relatively low temperature environment within the etch chamber. The two primary etchant gases are CHF3 and CH2F2, delivered at flow rates on the order of between about 10 sccm and 40 sccm for CHF3 and between about 10 sccm and 40 sccm for CH2F2. Small quantities, on the order of 10 sccm or less, of other gases such as C2HF5 and CF4 may be added.
    Type: Grant
    Filed: December 14, 2006
    Date of Patent: October 27, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Kevin G. Donohoe, David S. Becker
  • Patent number: 7594958
    Abstract: A spark management device includes a high voltage power source and a detector configured to monitor a parameter of an electric current provided to a load device. In response to the parameter, a pre-spark condition is identified. A switching circuit is responsive to identification of the pre-spark condition for controlling the electric current provided to the load device so as to manage sparking including, but not limited to, reducing, eliminating, regulating, timing, and/or controlling any intensity of arcs generated.
    Type: Grant
    Filed: August 30, 2005
    Date of Patent: September 29, 2009
    Assignee: Kronos Advanced Technologies, Inc.
    Inventors: Igor A. Krichtafovitch, Vladimir L. Gorobets
  • Patent number: 7564673
    Abstract: A converter circuit, in particular having a class E converter, comprising a drive circuit for a switching transistor MOS1 having two series-connected components which operate as a function of the threshold value, in particular comparators K1, K1? and K2, K2?.
    Type: Grant
    Filed: February 1, 2005
    Date of Patent: July 21, 2009
    Assignee: Osram Gesellschaft mit beschraenkter Haftung
    Inventors: Oskar Schallmoser, Wolfram Sowa
  • Patent number: 7553353
    Abstract: A system for decontaminating a gas is provided. The system includes: a passageway containing at least one set of two or three electrodes. If the set contains three electrodes, it has two outer electrodes electrically connected together and one inner electrode.
    Type: Grant
    Filed: February 10, 2005
    Date of Patent: June 30, 2009
    Inventor: Jean-Pierre Lepage
  • Patent number: 7547353
    Abstract: The invention relates to a pulse generating system for generating high voltage pulses to energize an electrostatic precipitator (10), the system including: a first power supply (1) and a second power supply (2), where said second power supply (2) is arranged to pre-charge said electrostatic precipitator (10) to a DC voltage; a storage capacitor (7) and a series inductance; a switching device (5) coupled in parallel with an anti-parallel rectifier device (6); and wherein the system is arranged to be coupled to the electrostatic precipitator. The invention relates to provide such a pulse generating system with enhanced efficiency compared to present pulse generating systems and with enhanced protection of the components of the system in case of sparks in the electrostatic precipitator (10). This is achieved, when the switching device (5) of the system has turn-off capability and when the system includes a clamping circuit (11-13; 60-67).
    Type: Grant
    Filed: October 25, 2005
    Date of Patent: June 16, 2009
    Assignee: F.L. Smidth Airtech A/S
    Inventors: Victor Reyes, Claus Taarning
  • Patent number: 7497893
    Abstract: A method for handling a fluid may be incorporated into the operation of, for example, a corona discharge device and an electric power supply. Such a corona discharge device typically includes at least one corona discharge electrode and at least one collector electrode positioned proximate each other so as to provide a total inter-electrode capacitance within a predetermined range. The electric power supply is connected to supply an electric power signal to said corona discharge and collector electrodes so as to cause a corona current to flow between the corona discharge and collector electrodes. A relationship between alternating and direct (or constant, non-time varying) components of the voltage may be expressed as (Vac/Vdc)?(Iac/Idc).
    Type: Grant
    Filed: October 16, 2006
    Date of Patent: March 3, 2009
    Assignee: Kronos Advanced Technologies, Inc.
    Inventor: Igor A. Krichtafovitch
  • Patent number: 7477504
    Abstract: A versatile stun glove having at least two electrodes placed in the palm region, and/or on the back of the hand and/or on the fingers of the glove. A rechargeable power supply that uses simple thin diameter and thickness replaceable batteries for powering the electrodes. Batteries can include 9-volt battery, a double A, and triple A batteries. A thin watch battery can also be used so that no protrusions extend outward from the glove body. The power supply can be located in the palm region and/or on the back of the hand of the glove. The power supply can be accessed by a foldable panel cover that can be removed by hook and loop fasteners (Velcro®), snaps, a zipper and the like. The power can be activated by a simple switch located adjacent to the finger tip of the index finger of the user so that touching the tip of the thumb against the index finger tip activates the power.
    Type: Grant
    Filed: March 13, 2006
    Date of Patent: January 13, 2009
    Assignee: C.P.D. Technologies, Inc.
    Inventor: Christopher P. Delida
  • Publication number: 20080180874
    Abstract: A device for charging a headphones battery. The device includes a first module adapted to receive a first power source through a first power source connector, the first module having a connector adapted to fit the headphones battery; and a second module adapted to receive a second power source through a second power source connector, the second power source connector distinct from the first power source connector, the second module having a connector adapted to fit the headphones battery, wherein the headphones battery is removed from the headphones and charged from the first power source when the first module is connected to the headphones battery and the headphones battery is removed from the headphones and charged from the second power source when the second module is connected to the headphones battery.
    Type: Application
    Filed: January 30, 2007
    Publication date: July 31, 2008
    Inventors: Daniel M. Gauger, Joji Ueda
  • Patent number: 7405919
    Abstract: A power supply circuit produces a supply voltage to be supplied to a microprocessor which is an integrated circuit. A transmission line type noise filter includes a signal input terminal, a signal output terminal and two ground terminals corresponding respectively to the signal input terminal and the signal output terminal. The transmission line type noise filter eliminates a high-frequency component of DC voltage applied to the signal input terminal and outputs it from the signal output terminal. A first power supply line pattern, formed on a printed-circuit board, connects an output terminal of the power supply circuit with the signal input terminal of the transmission line type noise filter. A second power supply line pattern connects the signal output terminal of the transmission line type noise filter with a power supply terminal of the microprocessor. A ground land pattern is connected with an external ground potential through via holes and makes a connection between the two ground terminals.
    Type: Grant
    Filed: June 22, 2006
    Date of Patent: July 29, 2008
    Assignee: Sony Computer Entertainment Inc.
    Inventor: Kazuaki Mitsui
  • Publication number: 20080163919
    Abstract: A roadway system for energy generation and distribution is presented. In accordance with one embodiment of the invention, the roadway system comprises a plurality of solar energy generating devices, and a roadway system electricity grid. The solar energy generating devices are electrically connected to the roadway system electricity grid and are positioned on part of or near to a road in a system of roads and being optionally fixed in a position such that a multi-form, solar energy gathering network can be formed.
    Type: Application
    Filed: January 26, 2007
    Publication date: July 10, 2008
    Inventors: Gene S. Fein, Edward Merritt
  • Patent number: 7352554
    Abstract: The present invention is directed to a J-R electrostatic clamp (ESC) and method for forming same. The ESC comprises a ceramic layer for clamping a wafer thereto, and a plurality of electrodes arranged across the ceramic layer in an interior region and a peripheral region of the backside surface, wherein a plurality of electrode groups are defined by electrodes in the interior regions and peripheral regions. A first insulating layer generally isolates the electrode groups from one another, and an interconnect layer comprising a plurality of electrically conductive vias and interconnects electrically connect the electrodes associated with each respective electrode group. Each electrode group comprises a connection node, wherein the respective electrode group is operable to connect to a respective voltage potential. A second insulating layer generally encapsulates the interconnect layer.
    Type: Grant
    Filed: June 30, 2004
    Date of Patent: April 1, 2008
    Assignee: Axcelis Technologies, Inc.
    Inventor: Bryan C. Lagos
  • Publication number: 20080068774
    Abstract: A plasma processing method using a plasma processing apparatus comprising a vacuum processing chamber, a substrate electrode having an electrostatic chucking film for chucking a material to be processed, an electrostatic chucking DC power supply and a substrate bias high-frequency power supply connected to the substrate electrode, and a plasma generating unit for generating the plasma in the vacuum processing chamber. The high-frequency voltage Vpp applied to the substrate electrode is monitored, and based on the Vpp signal thus monitored, the output voltage of the electrostatic chucking DC power supply is controlled thereby to maintain the voltage applied on the electrostatic chucking film at the desired value while at the same time controlling the output of the substrate bias high-frequency power supply in ramp with time.
    Type: Application
    Filed: January 29, 2007
    Publication date: March 20, 2008
    Inventors: Masahiro Sumiya, Tsutomu Iida
  • Patent number: 7327549
    Abstract: An apparatus for impact with a target includes electrodes deployed after contact is made between the apparatus and the target. Spacing of deployed electrodes may be more accurate and/or more repeatable for more effective delivery of an immobilizing stimulus signal.
    Type: Grant
    Filed: July 12, 2006
    Date of Patent: February 5, 2008
    Assignee: TASER International, Inc.
    Inventors: Patrick W. Smith, Magne H. Nerheim
  • Patent number: 7324772
    Abstract: An electrophotographic document production device having a transformerless high voltage power supply located distal to its load and a transformer at the point of load.
    Type: Grant
    Filed: June 22, 2005
    Date of Patent: January 29, 2008
    Assignee: Xerox Corporation
    Inventors: William Ross Harris, Jerry Floyd Adams
  • Patent number: 7292426
    Abstract: A substrate holding system having a chuck for vacuum attraction and electrostatic attraction of a substrate. The system includes a ring-like rim for carrying a substrate thereon, a plurality of first protrusions disposed inside the rim, for carrying the substrate thereon, and a plurality of second protrusions disposed inside the rim, for carrying the substrate thereon. A substrate carrying surface area of at least one first protrusion is smaller than a substrate carrying surface area of at least one second protrusion and a smallest interval between the first protrusions is smaller than a smallest interval between the second protrusions. Also included are an exhaust system for exhausting a clearance between the chuck and the substrate, an electrode for electrostatic attraction, a power supplying system for supplying power to the electrode, a measuring system for measuring a pressure in the clearance, and a control system for controlling the power supply.
    Type: Grant
    Filed: September 30, 2004
    Date of Patent: November 6, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventors: Atsushi Ito, Keiji Emoto
  • Patent number: 7285155
    Abstract: The present invention provides an air treatment device including a housing, an emitter electrode configured within the housing and a collector electrode configured within the housing and positioned downstream from the emitter electrode. The device preferably increases the ions produced for a start up period after the device is initially turned on, wherein the device automatically decreases ion production after the desired period. The device preferably includes a first and second voltage source to selectively increase and decrease voltages applied to the emitter and/or collector electrode to adjust the ion production. In one embodiment, the device includes a voltage controller to selectively adjust the voltage provided by the voltage source for the start up period and normal operation.
    Type: Grant
    Filed: March 28, 2005
    Date of Patent: October 23, 2007
    Inventors: Charles E. Taylor, Andrew J. Parker, Igor Y. Botvinnik, Shek Fai Lau, Gregory S. Snyder, John Paul Reeves
  • Patent number: 7280340
    Abstract: Systems and methods for immobilizing a target such as a human or animal with a stimulus signal coupled to the target via electrodes provide the stimulus signal in accordance with a strike stage, a hold stage, and a rest stage. Systems include a launch device and separate projectile, where the projectile includes a battery, a waveform generator, and electrodes. The strike stage and hold stage may include pulses at a pulse repetition rate, for example, from 10 to 20 pulses per second, each pulse delivering a predetermined amount of charge, for example, about 100 microcoulombs at less than about 500 volts peak. The hold stage may continue immobilization at a lesser expenditure of energy compared to the strike stage. Because the strike stage and hold stage may immobilize by interfering with skeletal muscle control by the target's nervous system, a rest stage may allow the target to take a breath.
    Type: Grant
    Filed: December 31, 2003
    Date of Patent: October 9, 2007
    Assignee: TASER International, Inc.
    Inventors: Patrick W. Smith, Magne H. Nerheim
  • Patent number: 7177133
    Abstract: A method and apparatus for generating positive and negative ions, the method comprising: generating ac high voltage; providing different polarity of the high-voltage to at least one pair of ionizing electrodes mounted in separate conducting cages located adjacent to each other, each of the cages provided with an opening opposite the electrode; balancing ion currents emitted by each of the electrodes by providing a balancing unit, output from the ac high voltage being via the balancing unit to the electrodes, each electrode provided with different polarity; and generating an external electric field by using the ion current from each electrode across to the cage in which the electrode is mounted, passing through an element for producing a voltage drop, whereby some of the ions generated from the electrodes escape outside the cages due to the presence of electric field between the cages.
    Type: Grant
    Filed: April 7, 2003
    Date of Patent: February 13, 2007
    Assignee: Ionic Systems Ltd.
    Inventor: Yefim Riskin
  • Patent number: 7163641
    Abstract: A plasma etch process for etching BPSG employing two primary etchants at low flows and pressures, and a relatively low temperature environment within the etch chamber, which includes a fluorine scavenger in the form of silicon. The two primary etchant gases are CHF3 and CH2F2, delivered at flow rates on the order of between about 10 and 40 sccm for CHF3 and between about 10 and 40 sccm for CH2F2. Small quantities, on the order of 10 sccm or less, of other gases such as C2HF5 and CF4 may be added.
    Type: Grant
    Filed: May 30, 2003
    Date of Patent: January 16, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Kevin G. Donohoe, David S. Becker
  • Patent number: 7161788
    Abstract: An ionization system for a predefined area includes a plurality of emitter modules spaced around the area, a system controller for individually addressing and monitoring the emitter modules and communication lines for electrically connecting the plurality of emitter modules with the system controller. Each emitter module has an individual address and including at least one electrical ionizer.
    Type: Grant
    Filed: July 24, 2003
    Date of Patent: January 9, 2007
    Assignee: Illinois Tool Works Inc.
    Inventors: William S. Richie, Jr., Richard D. Rodrigo, Philip R. Hall
  • Patent number: 7120007
    Abstract: An ion generating unit is made compact, yet avoids the undesired arc discharge for successfully generating the ions. The ion generating unit includes a dielectric base having a length and carrying a needle electrode and a ground electrode. The needle electrode has a pointed tip and is adapted to receive a high electric voltage relative to the ground electrode for electrically charging particles present in the surrounding air. The dielectric base being a polyhedron having multiple faces including a first face and a second face which are different from each other and have the length of the dielectric base. The needle electrode is mounted on or in a closely adjacent relation to the first face, and has its pointed tip directing forwardly along the length of the dielectric base with the pointed tip receded from the front end of the base. The ground electrode is mounted at the front end of the base in longitudinally spaced relation with the pointed tip.
    Type: Grant
    Filed: June 30, 2004
    Date of Patent: October 10, 2006
    Assignee: Matsushita Electric Works, Ltd.
    Inventors: Hidetoshi Nakasone, Itaru Saida, Kengo Ito
  • Patent number: 7075772
    Abstract: An electrostatic gripper for moving wafers includes bipolar electrodes with an insulating layer of zirconium oxide, which are positioned on a circuit board. The gripper is produced by a pressing process and can be operated with a DC voltage of less than 900 V. As a result, heating of the wafer is almost completely prevented even under a vacuum.
    Type: Grant
    Filed: July 5, 2003
    Date of Patent: July 11, 2006
    Assignee: Integrated Dynamics Engineering GmbH
    Inventor: Peter Heiland
  • Patent number: 6947274
    Abstract: The present invention is directed to a method for clamping a wafer to an electrostatic chuck using a single-phase square wave AC clamping voltage. The method comprises determining a single-phase square wave clamping voltage for the electrostatic chuck, wherein the determination is based, at least in part, on an inertial response time of the wafer. The wafer is placed on the electrostatic chuck, wherein a gap between the electrostatic chuck and the wafer is defined. The determined single-phase square wave clamping voltage is then applied, wherein the wafer is generally clamped to the electrostatic chuck within a predetermined distance, while an amount of electrostatic charge is generally not allowed to accumulate, thereby enabling a fast de-clamping of the wafer.
    Type: Grant
    Filed: September 8, 2003
    Date of Patent: September 20, 2005
    Assignee: Axcelis Technologies, Inc.
    Inventors: Peter L. Kellerman, Shu Qin, William F. DiVergilio
  • Patent number: 6937455
    Abstract: A spark management device includes a high voltage power source and a detector configured to monitor a parameter of an electric current provided to a load device. In response to the parameter, a pre-spark condition is identified. A switching circuit is responsive to identification of the pre-spark condition for controlling the electric current provided to the load device so as to manage sparking including, but not limited to, reducing, eliminating, regulating, timing, and/or controlling any intensity of arcs generated.
    Type: Grant
    Filed: July 3, 2002
    Date of Patent: August 30, 2005
    Assignee: Kronos Advanced Technologies, Inc.
    Inventors: Igor A. Krichtafovitch, Vladimir L. Gorobets
  • Patent number: 6924724
    Abstract: A method and apparatus for transformer bandwidth enhancement is disclosed. In one embodiment, a transformer is provided for use in a high frequency communication environment. In one configuration, the transformer is configured with one or more compensation networks to improve high frequency operation and to reduce insertion loss at all frequencies. The compensation networks may be designed, in combination with a transformer, to create an equivalent all-pass symmetric lattice network having a frequency response in the desired range. In one embodiment, the compensation networks comprise a capacitance creating device which, when cross-connected to the transformer, increases transformer bandwidth.
    Type: Grant
    Filed: January 24, 2003
    Date of Patent: August 2, 2005
    Assignee: Solarflare Communications, Inc.
    Inventors: Jorge Alberto Grilo, Larance B. Cohen
  • Patent number: 6888314
    Abstract: An electrostatic fluid accelerator having a multiplicity of closely spaced corona electrodes. The close spacing of such corona electrodes is obtainable because such corona electrodes are isolated from one another with exciting electrodes. Either the exciting electrode must be placed asymmetrically between adjacent corona electrodes or an accelerating electrode must be employed. The accelerating electrode can be either an attracting or a repelling electrode. Preferably, the voltage between the corona electrodes and the exciting electrodes is maintained between the corona onset voltage and the breakdown voltage with a flexible top high-voltage power supply. Optionally, however, the voltage between the corona electrodes and the exciting electrodes can be varied, even outside the range between the corona onset voltage and the breakdown voltage, in to vary the flow of fluid.
    Type: Grant
    Filed: November 18, 2002
    Date of Patent: May 3, 2005
    Assignee: Kronos Advanced Technologies, Inc.
    Inventors: Igor A. Krichtafovitch, Robert L. Fuhriman, Jr.
  • Patent number: 6829130
    Abstract: A power supply apparatus supplies electric power to a substrate carrier container having a rechargeable cell. The power supply apparatus comprises a body for seating a substrate carrier container thereon, a seating detecting device provided on the body for detecting whether the substrate carrier container is seated on the body or not, and a power supply connector movably provided on the body. The power supply apparatus further comprises a control mechanism for bringing the power supply connector into contact with a charging terminal of the substrate carrier container to charge the rechargeable cell in the substrate carrier container according to a detected signal from the seating detecting device.
    Type: Grant
    Filed: November 14, 2001
    Date of Patent: December 7, 2004
    Assignee: Ebara Corporation
    Inventors: Akira Tanaka, Takashi Kishi
  • Patent number: 6826030
    Abstract: A method of offset voltage control for pulse mode ionization systems is provided wherein the ionization system has positive and negative power supplies. The duty cycle and overlap of outputs of the positive and negative power supplies are controlled, and an overlap that achieves a desired offset voltage is determined. The offset voltage and the corresponding overlap are stored in memory. The duty cycle and overlap of the outputs of the positive and negative power supplies are controlled to achieve the desired offset voltage based upon the stored offset voltage comparison.
    Type: Grant
    Filed: September 11, 2003
    Date of Patent: November 30, 2004
    Assignee: Illinois Tool Works Inc.
    Inventors: John Gorczyca, David D. Reagan
  • Publication number: 20040223287
    Abstract: An ion sening circuit comprises a bridge sensing circuit and a differential amplifying circuit. The bridge sensing circuit detects the ion concentration of the solution in the operation mode of constant voltage and constant current. The differential amplifying circuit compares the output of the bridge sensing circuit and a floating reference voltage, thereby the delivered voltage to the bridge sensing circuit, such that the opeation mode of constant voltage and constant current is formed accordingly. The main features of the disclosed circuit are that it grounds the reference electrode and floats the source terminal. The drawbacks of not being manufactured with intergrated circuits by CMOS technology and low benefits when applied to sensor arrays are avoided by the disclosed circuit.
    Type: Application
    Filed: August 26, 2003
    Publication date: November 11, 2004
    Inventors: Wen-Yaw Chung, Alfred Krzyskow, Yeong-Tsair Lin, Dorota Genowefa Pijanowska, Chung-Huang Yang, Wladyslaw Torbicz
  • Patent number: 6741444
    Abstract: An apparatus for charging a substrate including a dielectric substrate, a support member having a first end and a second end between which the member extends substantially parallel to the substrate, a row of electrodes distributed over the support member between the first and second ends, the electrodes extending from the support member in the direction of the substrate, the electrodes having a free end for spraying a charge on the substrate, each free end having a substantially fixed distance from the substrate, wherein the distance in the case of the electrode located at the first and second end of the support member differs substantially from the distance in the case of the electrode located in the middle of the support member.
    Type: Grant
    Filed: July 10, 2002
    Date of Patent: May 25, 2004
    Assignee: Océ-Technologies B.V.
    Inventors: Gerardus Matheas Hubertus Maria Jacobs, Albin Bernhard Werner Haas, Gerardus Johannes Marie Hendericks
  • Patent number: 6724014
    Abstract: A hybrid semiconductor circuit adjustable by a control current for controlling voltage comprising a single high-voltage reversely polarized diode surrounded by at least two diodes emitting infrared radiation fed in series by the control signal and arranged to allow optical interaction with the high-voltage diode, wherein the diodes are encapsulated with a coating resin having a high transmission rate in an infrared domain.
    Type: Grant
    Filed: May 24, 2002
    Date of Patent: April 20, 2004
    Assignee: Centre National de la Recherche Scientifique C.N.R.S.
    Inventors: Jean-Louis Medale, Claude Aoustin, Jacques Coutelier, Pierre Souleille
  • Patent number: 6690897
    Abstract: A charging device includes a rotatable elastic charging roller, contactable to a member to be charged, for electrically charging the member to be charged. The charging device also includes a DC voltage source for applying a DC voltage to the charging roller. The voltage source is capable of controlling the width of a variation of the DC voltage, the variation being caused by passage of a deformed portion of the charging roller, resulting from contact between the member to be charged and the charging roller, by a charging region of the charging roller for the member to be charged, to be not more than 1%.
    Type: Grant
    Filed: January 30, 2002
    Date of Patent: February 10, 2004
    Assignee: Canon Kabushiki Kaisha
    Inventor: Norio Takami
  • Patent number: 6667875
    Abstract: A pulse generator produces a voltage pulse for an inductive or capacitive load, in particular for an electrostatic dust extractor, having an energy-storage capacitor which is connected in series with a controllable switch. The switch is self-opening at the zero crossing of the current flowing to the load, in a series of tuned circuits. The energy-storage capacitor is discharged to the load by closing and opening the controllable switch in a single discharging process during only one half oscillation period of the series tuned circuit.
    Type: Grant
    Filed: May 25, 2001
    Date of Patent: December 23, 2003
    Inventor: Werner Hartmann