With Specific Power Supply Patents (Class 361/235)
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Patent number: 7924544Abstract: An ionization system for a predefined area includes a plurality of emitter modules spaced around the area, a system controller for individually addressing and monitoring the emitter modules and communication lines for electrically connecting the plurality of emitter modules with the system controller. Each emitter module has an individual address and including at least one electrical ionizer.Type: GrantFiled: June 10, 2008Date of Patent: April 12, 2011Assignee: Illinois Tool Works Inc.Inventors: William S. Richie, Richard D. Rodrigo, Philip R. Hall
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Patent number: 7877036Abstract: A power supply includes a transformer to transform an input voltage into an output driving voltage for one of a plurality of components of an image forming apparatus, and an output converter to detect the driving voltage being output from the transformer, to amplify the detected driving voltage according to a power control signal, and to output the amplified driving voltage to at least one remaining component in the plurality of components of the image forming apparatus. The power supply can not only control high voltage outputs individually, but also reduces the number of switching transformers being used, as it uses at least one shared switching transformer.Type: GrantFiled: January 15, 2008Date of Patent: January 25, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Dong-kyu Kim, Min-seon Kim
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Publication number: 20110001619Abstract: A method for incapacitating an object using a non-lethal projectile equipped with a motion sensing device. The non-lethal projectile is fired at and preferably attaches to the object. Motion of the object is monitored by the motion sensing device. Upon sensing motion of the object, the non-lethal projectile provides a first or another incapacitating stimulus to the object if the motion is sensed as meeting at least one criterion. The criterion may be based on a previously determined algorithm or the threshold is previously determined.Type: ApplicationFiled: March 23, 2009Publication date: January 6, 2011Inventors: Haim Danon, Ilan Shalev
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Patent number: 7859590Abstract: An electronic device includes, in an interior of a flat housing, a battery compartment, and a device side terminal portion that contacts a side terminal portion of a battery stored in the battery compartment portion. The device side terminal portion includes a plurality of terminals that contact terminals of the side terminal portion of the battery, and a terminal holder that holds the plurality of terminals and that is attached to a printed circuit board. The terminal holder includes a printed circuit board overlap portion that supports the printed circuit board in overlapping relationship with a side portion of the terminal holder. The plurality of terminals are connected to the printed circuit board through the printed circuit board overlap portion. The device side terminal portion also includes one or more ground terminals.Type: GrantFiled: March 13, 2006Date of Patent: December 28, 2010Assignee: Sony CorporationInventors: Kenji Yanagida, Sachio Tomomori, Tomonori Watanabe, Tetsuya Okuchi
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Patent number: 7851932Abstract: An electricity-generating backpack that is substantially lighter in weight, has the multiple springs replaced with one large spring whose spring constant can be adjusted in the field in seconds, and replaces a DC generator with a brushless AC generator that permits approximately 70% generator efficiency and the generation of up to 20 W of electrical power by converting mechanical energy to electrical power. A device is provided that always removes some electricity, but not too much, as necessary to extract large levels of the electricity while controlling damping by providing electrical damping circuits including a DC-DC converter designed to emulate a desired load at its input terminals. Additional electricity generating E-MOD devices may be used for generating additional power by hooking an E-Mod device to a generator and to the backpack belt at the wearer's hip and includes a wand that fits against the wearer's femur so as to move through a range of motion as the patient walks.Type: GrantFiled: March 31, 2008Date of Patent: December 14, 2010Assignee: Lightning Packs, LLCInventors: Lawrence Craig Rome, Heath Fred Hofmann, Guanghui Wang
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Patent number: 7834327Abstract: A load circuit device having a self-biasing active load circuit, and a related high voltage power supply configured to bias an optical element in a charged particle beam processing system, such as a gas cluster ion beam (GCIB) processing system. The high voltage power supply comprises a variable voltage supply having a load terminal at a load potential and a reference terminal at a reference potential, and a self-biasing active load circuit connected between the load terminal and the reference terminal, and configured to sustain a variable voltage drop between the load potential and the reference potential while maintaining a substantially constant current.Type: GrantFiled: September 23, 2008Date of Patent: November 16, 2010Assignee: TEL Epion Inc.Inventor: Kenneth P. Regan
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Patent number: 7813102Abstract: An apparatus and method for minimizing contamination buildup on corona emitters that are employed in an ionizer. Contamination buildup control is accomplished with solely electronic means. High voltage is applied to the emitters with waveforms that serve to push contaminants away from the emitter, rather than attracting contaminants toward the emitters. The results are fewer cleaning cycles, more time between cleaning cycles, and more stable ionizer operation.Type: GrantFiled: March 14, 2008Date of Patent: October 12, 2010Assignee: Illinois Tool Works Inc.Inventors: Peter Gefter, Scott Gehlke, Lawrence Levit
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Patent number: 7806952Abstract: Disclosed are apparatus, system, and method for enhancing air purification efficiency regarding a gaseous medium passing through an opening. Included is a high voltage source that creates an effective voltage field across the opening; and at least one charge bleeding element constructed and arranged to maintain an effective voltage field across the opening.Type: GrantFiled: August 1, 2008Date of Patent: October 5, 2010Assignee: 3M Innovative Properties CompanyInventors: Andrew R. Fox, Marvin E. Jones, Larry J. Carson
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Publication number: 20100158582Abstract: An ion generating device is arranged such that a heater electrode is wired so as to heat (i) a creeping discharge area and (ii) areas where respective terminal sections of an induction electrode, a discharge electrode, and the heater electrode are provided. This allows prevention of dew condensation and nitric acid generation in the vicinities of the respective terminal sections.Type: ApplicationFiled: December 18, 2009Publication date: June 24, 2010Inventors: Katsumi Adachi, Shoutaro Okamoto
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Patent number: 7706122Abstract: An analog control application specific integrated circuit (ASIC) apparatus for a high voltage power supply (HVPS) in an image for apparatus, and a method for controlling the HVPS are provided. The HVPS includes a transformer transforming an AC signal to a high voltage signal and a voltage doubler outputting a DC high voltage for the HVPS. The ASIC includes an analog control circuit configured as a one-chip ASIC that converts a predetermined DC level signal to a high frequency switching signal using a switching component and outputs the converted high frequency switching signal to a primary winding of the transformer. If the high voltage output signal output from the voltage doubler is not feedbacked, the switching component high frequency switches a received driving signal of a gate driver, and outputs the high frequency switched signal to the transformer.Type: GrantFiled: February 1, 2006Date of Patent: April 27, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Young-min Chae, Joong-gi Kwon, Chul-woo Oh, Jong-hwa Cho, Sang-yong Han
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Publication number: 20100061033Abstract: A power supply is provided for an electrostatic chuck. A signal generating circuit of the power supply is configured to generate a square wave signal. An amplifying circuit is electrically connected to the square wave circuit and configured to amplify the square wave signal. A transformer has a primary and a secondary winding. The primary winding is electrically connected to the amplifying circuit and the secondary winding is configured to be electrically connected to the electrostatic chuck. The secondary winding produces a signal for the electrostatic chuck. A voltage divider circuit is electrically connected to the secondary winding and to the amplifying circuit. The voltage divider circuit is configured to reduce the voltage of the signal for the electrostatic chuck and feed back the reduced voltage signal to the amplifying circuit. The signal from the secondary winding is a trapezoidal waveform with approximately flat tops and minimal dead-time between phase reversals.Type: ApplicationFiled: September 11, 2008Publication date: March 11, 2010Applicant: TEL EPION INC.Inventor: Kenneth P. Regan
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Publication number: 20100020462Abstract: An ion generating element includes a positive ion discharger for generating positive ions and a negative ion discharger for generating negative ions. The ion dischargers are arranged separately from and independently of each other with a distance securing insulation between them. At least one of the dischargers includes a discharging portion for causing electric discharge, and a conducting portion having a voltage same as the discharging portion. The conducting portion surrounds a perimeter or part of the discharging portion. The conducting portion may surround a perimeter or part of the discharging portion so as to partition the ion dischargers from each other.Type: ApplicationFiled: September 10, 2009Publication date: January 28, 2010Inventors: Yoshinori SEKOGUCHI, Ichiro Tokai, Hiromu Nishida, Satoshi Takahashi
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Patent number: 7652431Abstract: An electrostatic fluid accelerator having a multiplicity of closely spaced corona electrodes. The close spacing of such corona electrodes is obtainable because such corona electrodes are isolated from one another with exciting electrodes. Either the exciting electrode must be placed asymmetrically between adjacent corona electrodes or an accelerating electrode must be employed. The accelerating electrode can be either an attracting or a repelling electrode. Preferably, the voltage between the corona electrodes and the exciting electrodes is maintained between the corona onset voltage and the breakdown voltage with a flexible top high-voltage power supply. Optionally, however, the voltage between the corona electrodes and the exciting electrodes can be varied, even outside the range between the corona onset voltage and the breakdown voltage, in to vary the flow of fluid.Type: GrantFiled: May 3, 2005Date of Patent: January 26, 2010Assignee: Tessera, Inc.Inventor: Igor A. Krichtafovitch
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Patent number: 7626681Abstract: According to an aspect of the present invention, there is provided a lithographic apparatus that includes a substrate carrier arranged to hold a substrate in position using an electrostatic force. The substrate carrier is provided with an integral power source. The apparatus also includes a substrate table for holding the substrate carrier.Type: GrantFiled: December 28, 2005Date of Patent: December 1, 2009Assignee: ASML Netherlands B.V.Inventors: Budiman Sutedja, Rudy Jan Maria Pellens, Johannes Paulus Adrianus Maria Van Den Heuvel, Paulus Wilhelmus Leonardus Van Dijk
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Patent number: 7621471Abstract: An electrostatic spray gun includes a power supply, an enclosure having a wall and a valve providing access through the wall to evacuate the enclosure. Components of the power supply are housed in the enclosure and subject to the atmosphere within the enclosure.Type: GrantFiled: December 16, 2005Date of Patent: November 24, 2009Assignee: Illinois Tool Works Inc.Inventor: Varce E. Howe
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Patent number: 7619870Abstract: An electrostatic chuck device includes an electrostatic chuck section including a substrate and a power supply terminal for applying a DC voltage to an electrostatic-adsorption inner electrode; and a metal base section fixed to the other main surface of the electrostatic chuck section. Here, a concave portion is formed in the main surface of the metal base section facing the electrostatic chuck section and a dielectric plate is fixed to the concave portion. The dielectric plate and the electrostatic chuck section are adhesively bonded to each other with an insulating adhesive bonding layer interposed therebetween. The dielectric plate and the concave portion are adhesively bonded to each other with an insulating adhesive bonding layer interposed therebetween. The dielectric constant of the insulating adhesive bonding layer is smaller than that of any one of the dielectric plate and the substrate.Type: GrantFiled: August 7, 2007Date of Patent: November 17, 2009Assignees: Tokyo Electron Limited, Sumitomo Osaka Cement Co., Ltd.Inventors: Shinji Himori, Shoichiro Matsuyama, Atsushi Matsuura, Hiroshi Inazumachi, Mamoru Kosakai, Yukio Miura, Keigo Maki
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Patent number: 7612981Abstract: The present invention is relating to an ion generator and an ionizer, in which the ion generator can obtain stable ion generation even if the electrode and the power supply slightly change, satisfies voltage and frequency conditions for realizing an ozone concentration less than 50 ppb as an allowable concentration.Type: GrantFiled: January 31, 2008Date of Patent: November 3, 2009Assignees: National Institute of Advanced Industrial Science & Technology, FISA CorporationInventors: Takafumi Seto, Makoto Hirasawa, Yasufumi Hozumi, Masaaki Tsuji, Akira Okuyama, Susumu Saito
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Patent number: 7608196Abstract: A plasma etch process for etching a dielectric material employing two primary etchants at low flows and pressures, and a relatively low temperature environment within the etch chamber. The two primary etchant gases are CHF3 and CH2F2, delivered at flow rates on the order of between about 10 sccm and 40 sccm for CHF3 and between about 10 sccm and 40 sccm for CH2F2. Small quantities, on the order of 10 sccm or less, of other gases such as C2HF5 and CF4 may be added.Type: GrantFiled: December 14, 2006Date of Patent: October 27, 2009Assignee: Micron Technology, Inc.Inventors: Kevin G. Donohoe, David S. Becker
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Patent number: 7594958Abstract: A spark management device includes a high voltage power source and a detector configured to monitor a parameter of an electric current provided to a load device. In response to the parameter, a pre-spark condition is identified. A switching circuit is responsive to identification of the pre-spark condition for controlling the electric current provided to the load device so as to manage sparking including, but not limited to, reducing, eliminating, regulating, timing, and/or controlling any intensity of arcs generated.Type: GrantFiled: August 30, 2005Date of Patent: September 29, 2009Assignee: Kronos Advanced Technologies, Inc.Inventors: Igor A. Krichtafovitch, Vladimir L. Gorobets
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Patent number: 7564673Abstract: A converter circuit, in particular having a class E converter, comprising a drive circuit for a switching transistor MOS1 having two series-connected components which operate as a function of the threshold value, in particular comparators K1, K1? and K2, K2?.Type: GrantFiled: February 1, 2005Date of Patent: July 21, 2009Assignee: Osram Gesellschaft mit beschraenkter HaftungInventors: Oskar Schallmoser, Wolfram Sowa
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Patent number: 7553353Abstract: A system for decontaminating a gas is provided. The system includes: a passageway containing at least one set of two or three electrodes. If the set contains three electrodes, it has two outer electrodes electrically connected together and one inner electrode.Type: GrantFiled: February 10, 2005Date of Patent: June 30, 2009Inventor: Jean-Pierre Lepage
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Patent number: 7547353Abstract: The invention relates to a pulse generating system for generating high voltage pulses to energize an electrostatic precipitator (10), the system including: a first power supply (1) and a second power supply (2), where said second power supply (2) is arranged to pre-charge said electrostatic precipitator (10) to a DC voltage; a storage capacitor (7) and a series inductance; a switching device (5) coupled in parallel with an anti-parallel rectifier device (6); and wherein the system is arranged to be coupled to the electrostatic precipitator. The invention relates to provide such a pulse generating system with enhanced efficiency compared to present pulse generating systems and with enhanced protection of the components of the system in case of sparks in the electrostatic precipitator (10). This is achieved, when the switching device (5) of the system has turn-off capability and when the system includes a clamping circuit (11-13; 60-67).Type: GrantFiled: October 25, 2005Date of Patent: June 16, 2009Assignee: F.L. Smidth Airtech A/SInventors: Victor Reyes, Claus Taarning
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Patent number: 7497893Abstract: A method for handling a fluid may be incorporated into the operation of, for example, a corona discharge device and an electric power supply. Such a corona discharge device typically includes at least one corona discharge electrode and at least one collector electrode positioned proximate each other so as to provide a total inter-electrode capacitance within a predetermined range. The electric power supply is connected to supply an electric power signal to said corona discharge and collector electrodes so as to cause a corona current to flow between the corona discharge and collector electrodes. A relationship between alternating and direct (or constant, non-time varying) components of the voltage may be expressed as (Vac/Vdc)?(Iac/Idc).Type: GrantFiled: October 16, 2006Date of Patent: March 3, 2009Assignee: Kronos Advanced Technologies, Inc.Inventor: Igor A. Krichtafovitch
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Patent number: 7477504Abstract: A versatile stun glove having at least two electrodes placed in the palm region, and/or on the back of the hand and/or on the fingers of the glove. A rechargeable power supply that uses simple thin diameter and thickness replaceable batteries for powering the electrodes. Batteries can include 9-volt battery, a double A, and triple A batteries. A thin watch battery can also be used so that no protrusions extend outward from the glove body. The power supply can be located in the palm region and/or on the back of the hand of the glove. The power supply can be accessed by a foldable panel cover that can be removed by hook and loop fasteners (Velcro®), snaps, a zipper and the like. The power can be activated by a simple switch located adjacent to the finger tip of the index finger of the user so that touching the tip of the thumb against the index finger tip activates the power.Type: GrantFiled: March 13, 2006Date of Patent: January 13, 2009Assignee: C.P.D. Technologies, Inc.Inventor: Christopher P. Delida
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Publication number: 20080180874Abstract: A device for charging a headphones battery. The device includes a first module adapted to receive a first power source through a first power source connector, the first module having a connector adapted to fit the headphones battery; and a second module adapted to receive a second power source through a second power source connector, the second power source connector distinct from the first power source connector, the second module having a connector adapted to fit the headphones battery, wherein the headphones battery is removed from the headphones and charged from the first power source when the first module is connected to the headphones battery and the headphones battery is removed from the headphones and charged from the second power source when the second module is connected to the headphones battery.Type: ApplicationFiled: January 30, 2007Publication date: July 31, 2008Inventors: Daniel M. Gauger, Joji Ueda
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Patent number: 7405919Abstract: A power supply circuit produces a supply voltage to be supplied to a microprocessor which is an integrated circuit. A transmission line type noise filter includes a signal input terminal, a signal output terminal and two ground terminals corresponding respectively to the signal input terminal and the signal output terminal. The transmission line type noise filter eliminates a high-frequency component of DC voltage applied to the signal input terminal and outputs it from the signal output terminal. A first power supply line pattern, formed on a printed-circuit board, connects an output terminal of the power supply circuit with the signal input terminal of the transmission line type noise filter. A second power supply line pattern connects the signal output terminal of the transmission line type noise filter with a power supply terminal of the microprocessor. A ground land pattern is connected with an external ground potential through via holes and makes a connection between the two ground terminals.Type: GrantFiled: June 22, 2006Date of Patent: July 29, 2008Assignee: Sony Computer Entertainment Inc.Inventor: Kazuaki Mitsui
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Publication number: 20080163919Abstract: A roadway system for energy generation and distribution is presented. In accordance with one embodiment of the invention, the roadway system comprises a plurality of solar energy generating devices, and a roadway system electricity grid. The solar energy generating devices are electrically connected to the roadway system electricity grid and are positioned on part of or near to a road in a system of roads and being optionally fixed in a position such that a multi-form, solar energy gathering network can be formed.Type: ApplicationFiled: January 26, 2007Publication date: July 10, 2008Inventors: Gene S. Fein, Edward Merritt
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Patent number: 7352554Abstract: The present invention is directed to a J-R electrostatic clamp (ESC) and method for forming same. The ESC comprises a ceramic layer for clamping a wafer thereto, and a plurality of electrodes arranged across the ceramic layer in an interior region and a peripheral region of the backside surface, wherein a plurality of electrode groups are defined by electrodes in the interior regions and peripheral regions. A first insulating layer generally isolates the electrode groups from one another, and an interconnect layer comprising a plurality of electrically conductive vias and interconnects electrically connect the electrodes associated with each respective electrode group. Each electrode group comprises a connection node, wherein the respective electrode group is operable to connect to a respective voltage potential. A second insulating layer generally encapsulates the interconnect layer.Type: GrantFiled: June 30, 2004Date of Patent: April 1, 2008Assignee: Axcelis Technologies, Inc.Inventor: Bryan C. Lagos
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Publication number: 20080068774Abstract: A plasma processing method using a plasma processing apparatus comprising a vacuum processing chamber, a substrate electrode having an electrostatic chucking film for chucking a material to be processed, an electrostatic chucking DC power supply and a substrate bias high-frequency power supply connected to the substrate electrode, and a plasma generating unit for generating the plasma in the vacuum processing chamber. The high-frequency voltage Vpp applied to the substrate electrode is monitored, and based on the Vpp signal thus monitored, the output voltage of the electrostatic chucking DC power supply is controlled thereby to maintain the voltage applied on the electrostatic chucking film at the desired value while at the same time controlling the output of the substrate bias high-frequency power supply in ramp with time.Type: ApplicationFiled: January 29, 2007Publication date: March 20, 2008Inventors: Masahiro Sumiya, Tsutomu Iida
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Patent number: 7327549Abstract: An apparatus for impact with a target includes electrodes deployed after contact is made between the apparatus and the target. Spacing of deployed electrodes may be more accurate and/or more repeatable for more effective delivery of an immobilizing stimulus signal.Type: GrantFiled: July 12, 2006Date of Patent: February 5, 2008Assignee: TASER International, Inc.Inventors: Patrick W. Smith, Magne H. Nerheim
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Patent number: 7324772Abstract: An electrophotographic document production device having a transformerless high voltage power supply located distal to its load and a transformer at the point of load.Type: GrantFiled: June 22, 2005Date of Patent: January 29, 2008Assignee: Xerox CorporationInventors: William Ross Harris, Jerry Floyd Adams
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Patent number: 7292426Abstract: A substrate holding system having a chuck for vacuum attraction and electrostatic attraction of a substrate. The system includes a ring-like rim for carrying a substrate thereon, a plurality of first protrusions disposed inside the rim, for carrying the substrate thereon, and a plurality of second protrusions disposed inside the rim, for carrying the substrate thereon. A substrate carrying surface area of at least one first protrusion is smaller than a substrate carrying surface area of at least one second protrusion and a smallest interval between the first protrusions is smaller than a smallest interval between the second protrusions. Also included are an exhaust system for exhausting a clearance between the chuck and the substrate, an electrode for electrostatic attraction, a power supplying system for supplying power to the electrode, a measuring system for measuring a pressure in the clearance, and a control system for controlling the power supply.Type: GrantFiled: September 30, 2004Date of Patent: November 6, 2007Assignee: Canon Kabushiki KaishaInventors: Atsushi Ito, Keiji Emoto
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Patent number: 7285155Abstract: The present invention provides an air treatment device including a housing, an emitter electrode configured within the housing and a collector electrode configured within the housing and positioned downstream from the emitter electrode. The device preferably increases the ions produced for a start up period after the device is initially turned on, wherein the device automatically decreases ion production after the desired period. The device preferably includes a first and second voltage source to selectively increase and decrease voltages applied to the emitter and/or collector electrode to adjust the ion production. In one embodiment, the device includes a voltage controller to selectively adjust the voltage provided by the voltage source for the start up period and normal operation.Type: GrantFiled: March 28, 2005Date of Patent: October 23, 2007Inventors: Charles E. Taylor, Andrew J. Parker, Igor Y. Botvinnik, Shek Fai Lau, Gregory S. Snyder, John Paul Reeves
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Patent number: 7280340Abstract: Systems and methods for immobilizing a target such as a human or animal with a stimulus signal coupled to the target via electrodes provide the stimulus signal in accordance with a strike stage, a hold stage, and a rest stage. Systems include a launch device and separate projectile, where the projectile includes a battery, a waveform generator, and electrodes. The strike stage and hold stage may include pulses at a pulse repetition rate, for example, from 10 to 20 pulses per second, each pulse delivering a predetermined amount of charge, for example, about 100 microcoulombs at less than about 500 volts peak. The hold stage may continue immobilization at a lesser expenditure of energy compared to the strike stage. Because the strike stage and hold stage may immobilize by interfering with skeletal muscle control by the target's nervous system, a rest stage may allow the target to take a breath.Type: GrantFiled: December 31, 2003Date of Patent: October 9, 2007Assignee: TASER International, Inc.Inventors: Patrick W. Smith, Magne H. Nerheim
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Patent number: 7177133Abstract: A method and apparatus for generating positive and negative ions, the method comprising: generating ac high voltage; providing different polarity of the high-voltage to at least one pair of ionizing electrodes mounted in separate conducting cages located adjacent to each other, each of the cages provided with an opening opposite the electrode; balancing ion currents emitted by each of the electrodes by providing a balancing unit, output from the ac high voltage being via the balancing unit to the electrodes, each electrode provided with different polarity; and generating an external electric field by using the ion current from each electrode across to the cage in which the electrode is mounted, passing through an element for producing a voltage drop, whereby some of the ions generated from the electrodes escape outside the cages due to the presence of electric field between the cages.Type: GrantFiled: April 7, 2003Date of Patent: February 13, 2007Assignee: Ionic Systems Ltd.Inventor: Yefim Riskin
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Patent number: 7163641Abstract: A plasma etch process for etching BPSG employing two primary etchants at low flows and pressures, and a relatively low temperature environment within the etch chamber, which includes a fluorine scavenger in the form of silicon. The two primary etchant gases are CHF3 and CH2F2, delivered at flow rates on the order of between about 10 and 40 sccm for CHF3 and between about 10 and 40 sccm for CH2F2. Small quantities, on the order of 10 sccm or less, of other gases such as C2HF5 and CF4 may be added.Type: GrantFiled: May 30, 2003Date of Patent: January 16, 2007Assignee: Micron Technology, Inc.Inventors: Kevin G. Donohoe, David S. Becker
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Patent number: 7161788Abstract: An ionization system for a predefined area includes a plurality of emitter modules spaced around the area, a system controller for individually addressing and monitoring the emitter modules and communication lines for electrically connecting the plurality of emitter modules with the system controller. Each emitter module has an individual address and including at least one electrical ionizer.Type: GrantFiled: July 24, 2003Date of Patent: January 9, 2007Assignee: Illinois Tool Works Inc.Inventors: William S. Richie, Jr., Richard D. Rodrigo, Philip R. Hall
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Patent number: 7120007Abstract: An ion generating unit is made compact, yet avoids the undesired arc discharge for successfully generating the ions. The ion generating unit includes a dielectric base having a length and carrying a needle electrode and a ground electrode. The needle electrode has a pointed tip and is adapted to receive a high electric voltage relative to the ground electrode for electrically charging particles present in the surrounding air. The dielectric base being a polyhedron having multiple faces including a first face and a second face which are different from each other and have the length of the dielectric base. The needle electrode is mounted on or in a closely adjacent relation to the first face, and has its pointed tip directing forwardly along the length of the dielectric base with the pointed tip receded from the front end of the base. The ground electrode is mounted at the front end of the base in longitudinally spaced relation with the pointed tip.Type: GrantFiled: June 30, 2004Date of Patent: October 10, 2006Assignee: Matsushita Electric Works, Ltd.Inventors: Hidetoshi Nakasone, Itaru Saida, Kengo Ito
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Patent number: 7075772Abstract: An electrostatic gripper for moving wafers includes bipolar electrodes with an insulating layer of zirconium oxide, which are positioned on a circuit board. The gripper is produced by a pressing process and can be operated with a DC voltage of less than 900 V. As a result, heating of the wafer is almost completely prevented even under a vacuum.Type: GrantFiled: July 5, 2003Date of Patent: July 11, 2006Assignee: Integrated Dynamics Engineering GmbHInventor: Peter Heiland
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Patent number: 6947274Abstract: The present invention is directed to a method for clamping a wafer to an electrostatic chuck using a single-phase square wave AC clamping voltage. The method comprises determining a single-phase square wave clamping voltage for the electrostatic chuck, wherein the determination is based, at least in part, on an inertial response time of the wafer. The wafer is placed on the electrostatic chuck, wherein a gap between the electrostatic chuck and the wafer is defined. The determined single-phase square wave clamping voltage is then applied, wherein the wafer is generally clamped to the electrostatic chuck within a predetermined distance, while an amount of electrostatic charge is generally not allowed to accumulate, thereby enabling a fast de-clamping of the wafer.Type: GrantFiled: September 8, 2003Date of Patent: September 20, 2005Assignee: Axcelis Technologies, Inc.Inventors: Peter L. Kellerman, Shu Qin, William F. DiVergilio
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Patent number: 6937455Abstract: A spark management device includes a high voltage power source and a detector configured to monitor a parameter of an electric current provided to a load device. In response to the parameter, a pre-spark condition is identified. A switching circuit is responsive to identification of the pre-spark condition for controlling the electric current provided to the load device so as to manage sparking including, but not limited to, reducing, eliminating, regulating, timing, and/or controlling any intensity of arcs generated.Type: GrantFiled: July 3, 2002Date of Patent: August 30, 2005Assignee: Kronos Advanced Technologies, Inc.Inventors: Igor A. Krichtafovitch, Vladimir L. Gorobets
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Patent number: 6924724Abstract: A method and apparatus for transformer bandwidth enhancement is disclosed. In one embodiment, a transformer is provided for use in a high frequency communication environment. In one configuration, the transformer is configured with one or more compensation networks to improve high frequency operation and to reduce insertion loss at all frequencies. The compensation networks may be designed, in combination with a transformer, to create an equivalent all-pass symmetric lattice network having a frequency response in the desired range. In one embodiment, the compensation networks comprise a capacitance creating device which, when cross-connected to the transformer, increases transformer bandwidth.Type: GrantFiled: January 24, 2003Date of Patent: August 2, 2005Assignee: Solarflare Communications, Inc.Inventors: Jorge Alberto Grilo, Larance B. Cohen
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Patent number: 6888314Abstract: An electrostatic fluid accelerator having a multiplicity of closely spaced corona electrodes. The close spacing of such corona electrodes is obtainable because such corona electrodes are isolated from one another with exciting electrodes. Either the exciting electrode must be placed asymmetrically between adjacent corona electrodes or an accelerating electrode must be employed. The accelerating electrode can be either an attracting or a repelling electrode. Preferably, the voltage between the corona electrodes and the exciting electrodes is maintained between the corona onset voltage and the breakdown voltage with a flexible top high-voltage power supply. Optionally, however, the voltage between the corona electrodes and the exciting electrodes can be varied, even outside the range between the corona onset voltage and the breakdown voltage, in to vary the flow of fluid.Type: GrantFiled: November 18, 2002Date of Patent: May 3, 2005Assignee: Kronos Advanced Technologies, Inc.Inventors: Igor A. Krichtafovitch, Robert L. Fuhriman, Jr.
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Patent number: 6829130Abstract: A power supply apparatus supplies electric power to a substrate carrier container having a rechargeable cell. The power supply apparatus comprises a body for seating a substrate carrier container thereon, a seating detecting device provided on the body for detecting whether the substrate carrier container is seated on the body or not, and a power supply connector movably provided on the body. The power supply apparatus further comprises a control mechanism for bringing the power supply connector into contact with a charging terminal of the substrate carrier container to charge the rechargeable cell in the substrate carrier container according to a detected signal from the seating detecting device.Type: GrantFiled: November 14, 2001Date of Patent: December 7, 2004Assignee: Ebara CorporationInventors: Akira Tanaka, Takashi Kishi
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Patent number: 6826030Abstract: A method of offset voltage control for pulse mode ionization systems is provided wherein the ionization system has positive and negative power supplies. The duty cycle and overlap of outputs of the positive and negative power supplies are controlled, and an overlap that achieves a desired offset voltage is determined. The offset voltage and the corresponding overlap are stored in memory. The duty cycle and overlap of the outputs of the positive and negative power supplies are controlled to achieve the desired offset voltage based upon the stored offset voltage comparison.Type: GrantFiled: September 11, 2003Date of Patent: November 30, 2004Assignee: Illinois Tool Works Inc.Inventors: John Gorczyca, David D. Reagan
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Publication number: 20040223287Abstract: An ion sening circuit comprises a bridge sensing circuit and a differential amplifying circuit. The bridge sensing circuit detects the ion concentration of the solution in the operation mode of constant voltage and constant current. The differential amplifying circuit compares the output of the bridge sensing circuit and a floating reference voltage, thereby the delivered voltage to the bridge sensing circuit, such that the opeation mode of constant voltage and constant current is formed accordingly. The main features of the disclosed circuit are that it grounds the reference electrode and floats the source terminal. The drawbacks of not being manufactured with intergrated circuits by CMOS technology and low benefits when applied to sensor arrays are avoided by the disclosed circuit.Type: ApplicationFiled: August 26, 2003Publication date: November 11, 2004Inventors: Wen-Yaw Chung, Alfred Krzyskow, Yeong-Tsair Lin, Dorota Genowefa Pijanowska, Chung-Huang Yang, Wladyslaw Torbicz
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Patent number: 6741444Abstract: An apparatus for charging a substrate including a dielectric substrate, a support member having a first end and a second end between which the member extends substantially parallel to the substrate, a row of electrodes distributed over the support member between the first and second ends, the electrodes extending from the support member in the direction of the substrate, the electrodes having a free end for spraying a charge on the substrate, each free end having a substantially fixed distance from the substrate, wherein the distance in the case of the electrode located at the first and second end of the support member differs substantially from the distance in the case of the electrode located in the middle of the support member.Type: GrantFiled: July 10, 2002Date of Patent: May 25, 2004Assignee: Océ-Technologies B.V.Inventors: Gerardus Matheas Hubertus Maria Jacobs, Albin Bernhard Werner Haas, Gerardus Johannes Marie Hendericks
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Patent number: 6724014Abstract: A hybrid semiconductor circuit adjustable by a control current for controlling voltage comprising a single high-voltage reversely polarized diode surrounded by at least two diodes emitting infrared radiation fed in series by the control signal and arranged to allow optical interaction with the high-voltage diode, wherein the diodes are encapsulated with a coating resin having a high transmission rate in an infrared domain.Type: GrantFiled: May 24, 2002Date of Patent: April 20, 2004Assignee: Centre National de la Recherche Scientifique C.N.R.S.Inventors: Jean-Louis Medale, Claude Aoustin, Jacques Coutelier, Pierre Souleille
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Patent number: 6690897Abstract: A charging device includes a rotatable elastic charging roller, contactable to a member to be charged, for electrically charging the member to be charged. The charging device also includes a DC voltage source for applying a DC voltage to the charging roller. The voltage source is capable of controlling the width of a variation of the DC voltage, the variation being caused by passage of a deformed portion of the charging roller, resulting from contact between the member to be charged and the charging roller, by a charging region of the charging roller for the member to be charged, to be not more than 1%.Type: GrantFiled: January 30, 2002Date of Patent: February 10, 2004Assignee: Canon Kabushiki KaishaInventor: Norio Takami
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Patent number: 6667875Abstract: A pulse generator produces a voltage pulse for an inductive or capacitive load, in particular for an electrostatic dust extractor, having an energy-storage capacitor which is connected in series with a controllable switch. The switch is self-opening at the zero crossing of the current flowing to the load, in a series of tuned circuits. The energy-storage capacitor is discharged to the load by closing and opening the controllable switch in a single discharging process during only one half oscillation period of the series tuned circuit.Type: GrantFiled: May 25, 2001Date of Patent: December 23, 2003Inventor: Werner Hartmann