Abstract: A temperature measuring method measures the temperature of an object of measurement placed in a multiple reflection environment by using a radiation thermometer that uses an effective emissivity &egr;eff for measurement. The effective emissivity &egr;eff is calculated by using an expression: &egr;eff=(1−&agr;)·&egr;+&agr;·&egr;/{1−F·r·(1−&egr;)} F: View factor &egr;: Emissivity of the object r: Reflectivity of a reflecting plate included in the radiation thermometer &agr;: Weighting factor for compensating effects of multiple reflection.

Abstract: An optical radiation measurement apparatus is provided. The apparatus has at least one radiation detector for measuring electromagnetic radiation emitted from at least two radiation sources. Separate radiation channels are provided in a channel member in order to provide a radiation path between the radiation sources and the radiation detector, which is common to all of the radiation sources.

Abstract: A system and method for determining the stray radiation within a heating chamber of a thermal processing apparatus. The stray radiation is determined by moving a generally unheated wafer vertically through the heating chamber, and measuring with a detector the amount of radiation reflected from the wafer at each vertical wafer position. The total measured radiation is then correlated with the stray radiation component of the total radiation.

Abstract: An ear type thermometer for metering a body temperature includes a thermometer body, and a probe mounted in the thermometer body and adapted to be inserted into an ear. The probe is provided with a probe cover. A screwing member is provide for fixing the probe cover on the probe.

Abstract: The present invention provides a method and apparatus of using optical temperature measurement as an in-situ monitoring of etch rate. First of all, a plasma etching process is performed in a plasma etcher having a vacuum chamber. Then, an optical multi-channel analyzer (OMA) monitors a series of emission lines of a certain plasma species emitted from the vacuum chamber during the plasma etching process. Then, based on the intensity distribution of the emission lines detected, a computer computes and generates an optical temperature. Finally, the computer generates a relevant ER based on the optical temperature. The emission lines are emitted due to the transitions between different energy states of a certain plasma species. These transitions may be between different electronic energy states, vibrational energy states, or rotational energy states, whereas the plasma species may be any one of the reactants in the plasma chamber such as CO, CO2, CF, CF2, SiF, C2, HF, etc.

Abstract: A microwave thermography apparatus to measure temperatures within a dielectric body comprises a partial ellipsoidal cavity with an electrical conductive surface wherein the body can be located at one focus of the cavity. A microwave antenna located at a second focus of the cavity is connected to a radiometer. That radiometer amplifies and filters signals from the antenna before they are applied to a detector with the temperature of the body being determined from the voltage amplitude of the detected signals.

Abstract: A heating apparatus for performing heat treatment on a wafer applied with a resist before or after exposure includes a heating plate for heating a wafer which is placed on the heating plate, a light intensity detecting apparatus for irradiating light on the wafer to detect intensity of reflected light from the resist on the wafer, and a control section for controlling heating performed by the heating plate on the basis of the detected intensity of reflected light so that heating amount applied to a plurality of wafers becomes constant. Accordingly, the heating amount of the wafer can be controlled to be constant and variations in dimension of resist patterns can be reduced.

Abstract: A radiant type thermometer capable of improving the strength of a protecting member such as a protecting plate and a protecting film is provided. The radiant type thermometer comprises a main body (1), a tubular probe (2) fixed to said main body (1) with its end extruding from said main body (1) and its inside forming a path for infrared rays from the subject to the inside of said main body (1), a protecting member (11) for blocking an opening in the end side of said probe(2) and transmitting infrared rays and a supporting body (12) for supporting said protecting member (11) by touching said protecting member (11), disposed in parallel with the central axis (L1) of said probe (2) in the path inside said probe (2), with its end part disposed in the direction perpendicular to said central axis (L1) being fixed to the internal wall (2a) of said probe (2).

Abstract: In one aspect of the invention, a temperature sensing system, including: control components; and an infrared sensor to provide a temperature input signal to the control components, the infrared sensor being located remotely from the control components. In an additional aspect of the invention, a circuit board for an infrared temperature sensing system, including: a first portion; a second portion coplanar with the first portion; and at least one necked down portion joining the first portion and the second portion. In a further aspect of the invention, a housing for an infrared temperature sensing system, including: a base member; and first support members attached to the base member to permit an infrared temperature sensor to be mounted in a selected one of two positions.

Abstract: The present invention relates to a combustion temperature sensor, and, more particularly, to a combustion temperature sensor that measures infrared radiation emitted at several preselected wavelengths from a flame and/or a flame's hot gas at a turbine inlet location and applies the energy signals. to a calculation model to yield temperature.

Abstract: A temperature measuring apparatus, comprises a light splitting section for splitting the light radiated from a substrate into plural light components having wavelengths over a predetermined wavelength region, a detection section for detecting the intensities of the light components obtained by the light splitting section, an integrated value calculating section for calculating an integrated value of radiation intensity by cumulatively adding the intensities of the light components detected by the detecting section, and a surface temperature calculating section for calculating the surface temperature of the substrate from the integrated value, on the basis of reference data representing the relation between the temperature and the integrated value.

Abstract: Use of an optical fibre for the direct receipt of heat radiation for transmission to a remote pyrometer is enabled by the provision of an apertured, contaminant free compartment in the component being heated, and aligning the heat receiving end of the optical fibre with the aperture so as to receive radiated heat from within the compartment.

Abstract: A device for temperature measurement uses an optical system to image the heat radiation emanating from a measurement spot on an object of measurement onto a detector. A sighting arrangement is also provided which has a diffractive optical system by which a light intensity distribution is produced which corresponds to the position and size of the measurement spot on the object of measurement.

Abstract: The present invention relates to a combustion temperature sensor, and, more particularly, to a combustion temperature sensor that measures infrared energy emitted at several preselected wavelengths from a flame and/or a flame's hot gas at a turbine inlet location and applies the energy signals to a calculation model to yield temperature.

Abstract: A source of thermal radiation for calibrating or testing infrared thermometers or detectors, in which improved temperature uniformity of the radiation-emitting surface is achieved by supplying heat to that surface by condensation of a working fluid as in a heat pipe. With appropriate selection of the working fluid, a wide range of temperatures is possible. Air convection currents at the radiation-emitting opening of the device may be suppressed by creation of a transition region of heated air by a baffle and air heater, further improving the temperature uniformity of the radiation-emitting surface.

Abstract: A device for the non-contact temperature measurement on an object comprises a detector device with a detector and IR optics, which image the detector along a measuring beam path with an optical axis onto a measuring spot on the object, and a sighting device for the visualization of the measuring spot with a light source for the creation of marking light and ring optics, which form a marking beam path that surrounds the outer circumference of the measuring beam path. The marking light is aligned so that on each location of the marking beam path its cross section, vertical to the optical axis, forms a circular ring surface.

Abstract: The invention relates to modification of a laser beam produced, for purposes of aiming at a target, by instruments for measuring, controlling and treatment, such as pyrometers. It is known to provide such instruments with a single laser beam for aiming purposes. It is also known to provide such instruments with a plurality of divergent beams serving to define an area of a target. In a first embodiment the present invention provides a carrier having a beam splitter movable out of and into the path of the laser beam so as to provide respectively a single aiming beam and a plurality of fractional beams for defining an area of a target. In a preferred form, provision is made for periodical and repeated movement of the beam splitter into and out of the path of the aiming laser beam.

Abstract: In a sake/milk heating process, the field of view of an infrared sensor is moved by a predetermined pattern in a heating chamber as an initial search. When the field of view is fixed after the initial search, if the temperature variation of an object within the field of view after a predetermined time has passed is equal to or lower than a specified value, various determinations are made, and the field of view of the infrared sensor is again moved in the heating chamber as a re-search. Thus, even if the field of view is fixed at a position where no food item is placed for some reason in the initial search, the field of view will not be fixed in the incorrect position and can be moved again.

Abstract: A system and method for determining the reflectivity of a workpiece during processing in a heating chamber of a thermal processing apparatus. The system first determines directly the reflectivity of the workpiece outside of the heating chamber of the thermal processing apparatus, and then determines the reflectivity of the workpiece during processing within the heating chamber of the thermal processing apparatus by correlating the ex situ wafer reflectivity with the intensity of the radiation reflected from the wafer within the heating chamber.

Abstract: The present invention relates to a combustion temperature sensor, and, more particularly, to a combustion temperature sensor that measures infrared energy emitted at several preselected wavelengths from a flame and/or a flame's hot gas at a turbine inlet location and applies the energy signals to a calculation model to yield temperature.

Abstract: A probe cover detaching mechanism for detaching a probe cover mounted to abut against a probe that is to be inserted into the earhole from the probe includes an operating member to which is applied an operating force for detaching the probe cover from the probe, a push member pushing the probe cover toward the distal end of the probe upon receipt of the operating force applied to the operating member and transmitted from the operating member, and a mechanism joining the operating member with the push member and changing the direction of the operating force applied to the operating member by substantially 90° so as to transmit the operating force to the push member.

Abstract: A radiation thermometer that avoids deterioration of measurement accuracy or loss of hygiene due to a dirty front end of a probe portion of the radiation thermometer, lowers running costs which are created if a probe cover is used, and reduces the labor of procuring the probe cover. To this end, the front end of the probe portion of the radiation thermometer has a waterproof structure so that the front end of the probe portion can be wiped with alcohol or the like.

Abstract: A calibration instrument for calibrating a temperature probe, such as pyrometer, uses a stable light source and a filter to simulate a blackbody of a known temperature. An alignment tool aligns a light-emitting surface of the calibration instrument to the input of the temperature probe. The calibration instrument may include a fiber optic bundle to transmit light from the light source to the light emitting surface.

Abstract: Method and apparatus are provided for visibly outlining the energy zone to be measured by a radiometer. The method comprises the steps of providing a laser sighting device on the radiometer adapted to emit more than two laser beams against a surface whose temperature is to be measured and positioning said laser beams about the energy zone to outline said energy zone. The apparatus comprises a laser sighting device adapted to emit more than two laser beams against the surface and means to position said laser beams about the energy zone to outline said energy zone. The laser beams may be rotated about the periphery of the energy zone. In another embodiment, a pair of laser beams are projected on opposite sides of the energy zone. The laser beams may be further pulsed on and off in a synchronised manner so as to cause a series of intermittent lines to outline the energy zone. Such an embodiment improves the efficiency of the laser and results in brighter laser beams being projected.

Abstract: Method and apparatus are provided for visibly outlining the energy zone to be measured by a radiometer. The method comprises the steps of providing a laser sighting device on the radiometer adapted to emit at least one laser beam against a surface whose temperature is to be measured and positioning said laser beam about the energy zone to visibly outline said energy zone. The apparatus comprises a laser sighting device adapted to emit at least one laser beam against the surface and means to position said laser beam about the energy zone to visibly outline said energy zone. The laser beam may be rotated about the periphery of the energy zone. In another embodiment, a pair of laser beams are projected on opposite sides of the energy zone. The laser beam may be further pulsed on and off in a synchronized manner so as to cause a series of intermittent lines to outline the energy zone. Such an embodiment improves the efficiency of the laser and results in a brighter laser beam being projected.

Abstract: A method for forming thermal isolation for a micro thermopile device comprises steps of forming a narrow etching window on the membrane and forming a plurality of micro connection structures each crossing the narrow etching window and connecting the edge portion of the membrane on both sides of the narrow etching window, and etching the silicon substrate through the narrow etching window to form a pit between the silicon substrate and the membrane, whereby the membrane becomes a floating membrane and has thermal isolation with the silicon substrate. By this method, the area of the floating membrane is increased and the strain of the floating membrane is reduced.

Abstract: This invention relates to an infrared clinical thermometer having a probe projecting forward from the main thermometer body. The probe is designed to be inserted into an ear canal and detect infrared radiation from a human eardrum in order to measure body temperature. A measurement start switch is located on the upper portion of the rear side of the thermometer main body, substantially in line with the probe. When the measurement start switch is pressed, the probe does not rotate or tilt, allowing a accurate temperature measurement to be obtained. The thermometer also has a display which shows the measurement results after the operation of the measurement start switch. The display is located on the upper portion of the rear side of the main body, so that it can be clearly seen as the thermometer is held by the operator.

Abstract: There is provided a radiation clinical thermometer which does not require experience and can measure an accurate body temperature easily and quickly since the user recognizes that a probe is correctly directed toward an eardrum. When a measured temperature is in a predetermined range, it is determined that the probe is inserted in an ear, and a level 1 is displayed. When a first maximum value of temperature measurement values appears, a level 2 is displayed. When a second maximum value of temperature measurement values appears, a level 3 is displayed to notify the user of the optimum insertion state for body temperature measurement.

Abstract: The invention is directed to an infrared radiation thermometer, in particular an ear thermometer, having a probe head (10) whose outer diameter and/or shape is variable by an elastic arrangement (4, 14, 24). This enables the probe head to conform itself automatically to the size and/or contour of the body cavity or to be conformed manually. The thermometer is therefore equally well suited for both children and adults, although their ear canals differ in diameter.

Abstract: In a temperature measurement method for determining the adiabatic temperature of a flame, in particular in the combustion chamber of a gas turbine, the chemiluminescence radiation from the flame, emitted by OH radicals and CH radicals, is detected using a spectrograph via an optical sensor fiber. The spectrally resolved raw signal of the chemiluminescence radiation is then corrected and compared with a multiplicity of theoretically determined emission spectra, until a theoretical emission spectrum coincides with the chemiluminescence spectrum. The Boltzmann temperature associated with this coinciding emission spectrum is then assigned to the chemiluminescence spectrum, the adiabatic flame temperature being derived from the Boltzmann temperature by correlation.

Abstract: An optical radiation measurement apparatus is provided. The apparatus has at least one radiation detector for measuring electromagnetic radiation emitted from at least two radiation sources. Separate radiation channels are provided in a channel member in order to provide a radiation path between the radiation sources and the radiation detector, which is common to all of the radiation sources.

Abstract: A device and method for detecting bearing overheating in oil-lubricated turbine pumps comprising and temperature transmitting collar and infrared sensor. The temperature transmitting collar is mounted on the pump line shaft immediately adjacent to the stretch bearing, which is the top bearing in the pump system. The infrared sensor is positioned within sensing distance of the temperature transmitting collar and control circuitry is provided to warn of abnormal temperatures and to turn the pump off if temperatures continue to rise to an alarm condition.

Abstract: A method and system for calibrating radiation sensing devices, such as pyrometers, in thermal processing chambers are disclosed. The system includes a reflective device positioned opposite the radiation sensing devices and a calibrating light source which emits light energy onto the reflective device. The system is designed so that each radiation sensing device is exposed to the same intensity of light being reflected off the reflective device, which has a preset value. The radiation sensing devices are then used to measure the amount of light energy being reflected which is then compared to the preset value for making any necessary adjustments.

Abstract: Body temperature measurements are obtained by scanning a thermal radiation sensor across the side of the forehead over the temporal artery. A peak temperature measurement is processed to compute an internal temperature of the body as a function of ambient temperature and the sensed surface temperature. The function includes a weighted difference of surface temperature and ambient temperature, the weighting being varied with target temperature through a minimum in the range of 96° F. and 100° F. The radiation sensor views the target surface through an emissivity compensating cup which is spaced from the skin by a circular lip of low thermal conductivity.

Abstract: The invention relates to a device for temperature measurement. The heat radiation emanating from a measurement spot on an object of measurement is imaged by an optical system onto a detector. A sighting arrangement is also provided which has a diffractive optical system by which a light intensity distribution is produced which corresponds to the position and size of the measurement spot on the object of measurement.

Abstract: This invention relates to an infrared clinical thermometer having a probe projecting forward from the main thermometer body. The probe is designed to be inserted into an car canal and detect infrared radiation from a human eardrum in order to measure body temperature. A measurement start switch is located on the upper portion of the rear side of the thermometer main body, substantially in line with the probe. When the measurement start switch is pressed, the probe does not rotate or tilt, allowing a accurate temperature measurement to be obtained. The thermometer also has a display which shows the measurement results after the operation of the measurement start switch. The display is located on the upper portion of the rear side of the main body, so that it can be clearly seen as the thermometer is held by the operator.

Abstract: A configuration for measuring a temperature of a semiconductor disk is described and contains a supporting device for holding the disk, and at least two digital camera monitoring systems for locating edges of the disk. A data processing unit is connected to the digital camera monitoring systems for monitoring disk edge movement. The digital camera monitoring systems are placed in the supporting device in different positions. The digital camera monitoring systems face toward the disk. The supporting device further has transparent windows placed in the surface of the supporting device that are oriented towards the disk. With this configuration, disk dimensional growth due to disk heating during a manufacturing process can be measured in order to derive a disk temperature. Thus, a precise disk temperature measurement with real time data acquisition can be performed.

Abstract: Device for contactless temperature measurement of an object with an optical system which images into the finite and a detector, wherein an image of the detector is imaged by the optical system along an optical axis onto a measurement spot on the object in such a way that the image of the detector reduces from the optical system to a sharp point measurement spot and then enlarges, and also with a sighting arrangement which identifies the outer limit of the measurement spot by means of visible sighting rays. Each sighting ray is aligned obliquely with respect to the optical axis in such a way that each sighting ray can be used both before and also after the sharp point measurement spot to identify the measurement spot.

Abstract: A calibration current source and methods of calibrating temperature measurements made during, e.g., an RTP process are described. The calibration current source preferably includes a biasing circuit, an output transistor current source, and an offset circuit. The biasing circuit has an input, a reference voltage output and a biasing voltage output. The output transistor current source is coupled to the biasing voltage output and is configured to produce an output current. The offset circuit is coupled in a feedback loop between the reference voltage output and the biasing circuit input and is configured to generate from the reference voltage output a variable offset voltage for selectively controlling the biasing voltage applied to the output transistor current source. In a temperature calibrating method a calibration table is generated by applying a plurality of input signals to a calibration current source to produce a plurality of output signals. The calibration table is stored.

Abstract: A projector for use in a measuring device is provided with an emitter which emits a beam of visible light to a measurement object along a predetermined optical axis, a rotary optical member which is operable to change the propagation direction of the visible light beam with respect to the predetermined optical axis in accordance with rotation of the rotary optical member, and a driver which rotates the rotary optical member about a rotation axis. The projector accurately indicates a measurement area on a measurement object in simpler construction.

Abstract: A probe cover detaching mechanism for detaching a probe cover mounted to abut against a probe that is to be inserted into the earhole from the probe includes an operating member to which is applied an operating force for detaching the probe cover from the probe, a push member pushing the probe cover toward the distal end of the probe upon receipt of the operating force applied to the operating member and transmitted from the operating member, and a mechanism joining the operating member with the push member and changing the direction of the operating force applied to the operating member by substantially 90° so as to transmit the operating force to the push member.

Abstract: An apparatus is provided for visibly outlining an energy zone to be measured by a radiometer. The apparatus includes a laser beam generator and an optical means. The optical means directs the laser beam to the energy zone to form a continuous ring for identifying the energy zone.

Abstract: Apparatus for and methods of meauring heat flux comprises first and second sensors arranged to pass through an oven in line astern. Each sensor measures the temperature difference across a thermally insulating layer by having one surface of each sensor being exposed to the heat flux, each sensor including thermocouple measuring junctions for measuring the temperature of the exposed surface. The first sensor is radiation-absorbing and the second sensor is reflecting. The apparatus includes additional thermocouple junctions for measuring the gas temperature and a device for recording data from the sensors and from additional thermocouple junctions. The signals from one of the sensors at one instant are correlated with the corresponding signals from the other sensor at a later instant, the time difference being the time taken for one sensor to reach a position formerly occupied by the other sensor.

Abstract: A device for temperature measurement uses an optical system to image the heat radiation emanating from a measurement spot on an object of measurement onto a detector. A sighting arrangement is also provided which has a diffractive optical system by which a light intensity distribution is produced which corresponds to the position and size of the measurement spot on the object of measurement.

Abstract: A probe tip in combination with a seal assembly that prevents debris and other contaminants from entering the probe tip. In the preferred embodiment, the seal comprises a tube with a filter holder assembly attached at the distal end of the holder. The filter holder assembly includes an infrared filter seated inside a screw-on member that is attached to a holder member with a sealing member located directly behind the infrared filter. During manufacturing, a predetermined force is applied to the proximal end of the tube which drives the distal end of the tube and filter holder assembly against the probe tip opening, thereby forming a watertight seal thereto. In alternative embodiments, the seal assembly may be comprised of a collar and gasket combination instead of a filter holder assembly.

Abstract: Device for contactless temperature measurement of an object with an optical system which images into the finite and a detector, wherein an image of the detector is imaged by the optical system along an optical axis onto a measurement spot on the object in such a way that the image of the detector reduces from the optical system to a sharp point measurement spot and then enlarges, and also with a sighting arrangement which identifies the outer limit of the measurement spot by means of visible sighting rays. Each sighting ray is aligned obliquely with respect to the optical axis in such a way that each sighting ray can be used both before and also after the sharp point measurement spot to identify the measurement spot.

Abstract: A temperature probe has a light conductor for optically transmitting temperature information to a pyrometer. The light conductor has a first portion which is adapted to capture temperature information and a second portion which is connected to the pyrometer. The probe also has an enclosure for protecting the second portion of the light conductor. The enclosure in turn has a passageway for housing the second portion of the light conductor and an opening for projecting the first portion of the light conductor from the passageway to the outside of the enclosure. Additionally, a seal is provided in the passageway adjacent the opening to encapsulate the second portion of the light conductor inside the passageway.

Abstract: A clinical thermometer is described, based on the measurement of the infrared radiation emitted by the patient, in which the body temperature of the patient in obtained in a non-invasive way and (normally) without any contact between the thermometer and the patient. During measurement of the temperature, the thermometer (1) is put at a preset distance (d) from the body of the patient, a distance which is normally determined by an optical aiming system consisting of two converging rays of light (5). A thermometer according to the invention may be used to obtain the temperature of the patient also by contact.

Abstract: This invention provides a method of manufacturing a wafer heating furnace having a desired heating distribution with less trials and errors by predicting heating distributions in the process of designing the heating furnace.

Abstract: A spark plug system for measuring the thermal profile across the surface of a piston in an operating internal combustion engine in characterizing the combustion process within a combustion chamber of the engine is described that includes a specially constructed spark plug containing a coherent fiber optic bundle and lens system optically connected to a remote sensing thermometer and high-speed triggerable imaging infrared video camera.