Abstract: An apparatus is configured to receive x-rays propagating from an x-ray source. The apparatus includes first and second x-ray diffractors, the second x-ray diffractor downstream from the first x-ray diffractor and first and second x-ray detectors. The first x-ray diffractor is configured to receive the x-rays, to diffract a first spectral band of the x-rays to the first x-ray detector, and to transmit at least 2% of the received x-rays to the second x-ray diffractor. The second x-ray diffractor is configured to receive the transmitted x-rays from the first x-ray diffractor and to diffract a second spectral band of the x-rays to the second x-ray detector. The first x-ray detector is configured to measure a first spectrum of the first spectral band of the x-rays and the second x-ray detector is configured to measure a second spectrum of the second spectral band of the x-rays.

Abstract: An X-ray fluorescence analyzer comprises an X-ray tube for emitting incident X-rays in the direction of a first optical axis. A slurry handling unit is configured to maintain a constant distance between a sample of slurry and the X-ray tube. A first crystal diffractor is located in a first direction from the slurry handling unit, and configured to separate a predefined first wavelength range from fluorescent X-rays that propagate into the first direction. It is configured to direct the fluorescent X-rays in the separated predefined first wavelength range to a first radiation detector. The input power rating of said X-ray tube is at least 400 watts. The first crystal diffractor comprises a pyrolytic graphite crystal. The optical path between said X-ray tube and the slurry handling unit is direct with no diffractor therebetween.

Abstract: A spectroscopic element and a detector are disposed along a circumference of one Rowland circle. The spectroscopic element has a spectral surface whose length, measured along the Rowland circle, is shorter than a length in the Rowland circle plane, of an irradiation surface irradiated with excitation beams emitted to a sample holder. The spectroscopic element and the sample holder are disposed to separate a group of characteristic X-rays within a common spectral range of the spectroscopic element.

Abstract: An X-ray fluorescence analyzer system including an X-ray tube, a slurry handling unit, and a crystal diffractor located in a first direction from the slurry handling unit. The crystal diffractor separates a predefined wavelength range from fluorescent X-rays that propagate into the first direction, and directs the fluorescent X-rays in the separated predefined wavelength range to a radiation detector. The crystal diffractor includes a pyrolytic graphite crystal. The predefined wavelength range includes characteristic fluorescent radiation of a pre-defined element of interest with its atomic number Z between 41 and 60, the ends included. An energy resolution of the radiation detector is better than 600 eV at the energy of the characteristic fluorescent radiation.

Abstract: An X-ray spectrometer includes: an excitation source that irradiates a predetermined irradiation region on a surface of a sample with an excitation ray generating a characteristic X-ray; a flat plate analyzing crystal facing the irradiation region; a slit provided between the irradiation region and the analyzing crystal, the slit being parallel to a predetermined crystal plane of the analyzing crystal; a linear sensor including linear detection elements having a length in a direction parallel to the slit are arranged in a direction perpendicular to the slit; and an energy calibration unit that measures two characteristic X-rays in which energy is known by irradiating a surface of a standard sample generating the two characteristic X-rays with the excitation ray from the excitation source, and calibrates the energy of the characteristic X-ray detected by each detection element of the X-ray linear sensor based on the measured energies of the two characteristic X-rays.

Abstract: An X-ray spectrometer is provided with: an excitation source configured to irradiate excitation rays onto an irradiation area of a sample, a diffraction member provided to face the irradiation area; a slit member provided between the irradiation area and the diffraction member, the slit member having a slit extending parallel to the irradiation area and a prescribed surface of the diffraction member; an X-ray linear sensor having a light-incident surface in which a plurality of detection elements are arranged in a direction perpendicular to a longitudinal direction of the slit; a first moving mechanism configured to change an angle between the sample surface and the prescribed surface, and/or a distance between the sample surface and the prescribed surface by moving the diffraction member within a plane perpendicular to the longitudinal direction; and a second moving mechanism configured to position the X-ray linear sensor on a path of characteristic X-rays passed through the slit and diffracted by the prescr

Abstract: A method and apparatus for rapid measurement and analysis of structure and composition of poly-crystal materials by X-ray diffraction and X-ray spectroscopy, which uses a two-dimensional energy dispersive area detector having an array of pixels, and a white spectrum X-ray beam source. A related data processing method includes separating X-ray diffraction and spectroscopy signals in the energy dispersive X-ray spectrum detected by each pixel of the two-dimensional energy dispersive detector; correcting the detected X-ray diffraction signals by a correction function; summing the corrected X-ray diffraction signals and X-ray spectroscopy signals, respectively, over all pixels to obtain an enhanced diffraction spectrum and an enhanced spectroscopy spectrum; using the enhanced diffraction and spectroscopy spectrum respectively to determine the structure and composition of the sample.

Abstract: An X-ray diffraction apparatus having a solar slit, and a method for preventing the diffraction image on a detector from spreading in the in-plane direction even when an X-ray irradiation region spreads over the sample surface due to measurement by GIXD, thereby allowing for measurement with a short measurement time and a high resolution. The soller slit 100 includes a plurality of metallic thin plates 110, each being perpendicular to the bottom surface, which are arcuately arranged with a predetermined angular interval between each other so as to pass X-rays in a radiating direction from a particular focus, the soller slit being provided to be used at a position through which X-rays diffracted on a sample surface pass, the particular focus being the center of a goniometer circle, the X-rays being irradiated on a sample at an angle for GIXD.

Abstract: An X-ray spectroscopic analysis apparatus includes: a radiation source configured to irradiate a predetermined irradiation area in the surface of a sample with an excitation beam for generating a characteristic X-ray; an analyzing crystal provided facing the irradiation area; a slit provided between the irradiation area and the analyzing crystal, the slit being parallel to the irradiation area and a predetermined crystal plane of the analyzing crystal; and an X-ray linear sensor including linear detection elements arranged in a direction perpendicular to the slit, the detection elements each having a length in a direction parallel to the slit. By detecting characteristic X-rays from different linear portions of the irradiation area for each wavelength, it is possible to perform analysis with sensitivity higher than the sensitivity of a conventional X-ray spectroscopic analysis apparatus that irradiates a point-like irradiation area with an excitation beam.

Abstract: Disclosed herein is a system configured to cause an element in a sample to emit fluorescent X-ray, the system comprising a detector with a plurality of pixels, each pixel configured to count numbers of X-ray photons incident thereon whose energy falls in a plurality of bins of different energy ranges respectively, within a period of time; wherein the detector is configured to sum the numbers counted by all the pixels from only the bins of the same energy range; wherein the detector is configured to identify the element based on the summed numbers.

Abstract: An X-ray source and a corresponding method for generating X-ray radiation are disclosed. The X-ray source includes a chamber comprising an interaction region, and a first electron source operable to emit a first electron beam, including electrons of a first energy, towards the interaction region such that the first electron beam interacts with a target to generate X-ray radiation. The X-ray source further includes a second electron source adapted to be independently operated to emit a second electron beam including electrons of a second energy for ionising particles in the chamber, and an ion collection tool that is adapted to remove the ionised particles from the chamber by means of an electromagnetic field. By ionising particles and preventing them from moving freely in the chamber, problems related to contamination of the chamber may be mitigated.

Abstract: An X-ray data processing apparatus for processing X-ray data that is obtained by simultaneously measuring X-rays of multiple wavelengths. The apparatus includes a management unit 210 to receive and manage X-ray data that is detected by a detector, a calculation unit 230 which calculates a detection amount of charge sharing events in lower energy side data caused by higher energy X-ray, based on the higher energy side data obtained using a threshold value on a higher energy side and the lower energy side data obtained using a threshold value on a lower energy side of the received X-ray data, and a correction unit 250 to reconfigure the lower energy side data using the calculated detection amount. The apparatus can remove a residual image of an X-ray on a higher energy side which remains in data on a lower energy side.

Abstract: A measurement chamber of an x-ray spectrometer for analyzing x-ray fluorescence radiation from a measuring sample has an entrance opening for the entry of x-ray fluorescence radiation into the measurement chamber, a first goniometer arm for holding and adjusting an analyzer crystal, and a second goniometer arm for holding and adjusting an x-ray detector. The measurement chamber and entrance opening are sealed in a vacuum-tight manner by way of a window. The chamber contains a bearing block for receiving and holding both goniometer arms in a concentric and rotatable manner, the arms each being mechanically adjustable by means of a piezo-motor, which is securely connected to the bearing block or a drive plate of the respective goniometer arm. The measurement chamber contains all mechanical components of the goniometer and allows for a more compact, lighter and more stable x-ray spectrometer with a rotatable goniometer and little heat influx into the system.

Abstract: An x-ray tube includes a target on which electrons impinge to form a diverging x-ray beam. The target has a surface formed from first and second target materials, each tailored to emit a respective x-ray energy profile. A first x-ray optic may be provided for directing the beam toward the sample spot, the first x-ray optic monochromating the diverging x-ray beam to a first energy from the energy emitted by the first target material; and a second x-ray optic may be provided, for directing the beam toward the sample spot, the second x-ray optic monochromating the diverging x-ray beam to a second energy from the energy emitted by the second target material. Fluorescence from the sample spot induced by the first and second monochromated energies is used to measure the concentration of at least one element in the sample, or separately measure elements in a coating and underlying substrate.

Abstract: A handheld X-ray fluorescence spectrometer includes a pyroelectric radiation source for directing X-rays toward a sample to be analyzed and a detector for receiving secondary X-rays emitted from the sample and converting the secondary X-rays into one or more electrical signals representative of the received secondary X-rays. A module is configured to receive the one or more electrical signals and send a representation of the one or more signals over a communication channel to a computing device without performing any spectral analysis on the one or more electrical signals to characterize the sample. The computing device is configured to perform spectral analysis on the one or more electrical signals and send the spectral analysis to the spectrometer over the communications channel.

Abstract: An XRF (XRF=x-ray fluorescence) measurement apparatus (1) has an x-ray source (2) for generating x-rays (4), x-ray optics (3) for directing x-rays (4) from the x-ray source (2) to a sample (5) and an EDS (EDS=energy dispersive spectroscopy) detector (7) for detecting fluorescent x-rays (14) from the sample (5). The apparatus is characterized in that the sample (5) is a wafer (6), in particular a Si wafer, wherein the x-ray optics (3) is positioned to direct the x-rays (4) onto the bevel (12) of the wafer (6). The x-ray source (2) plus the x-ray optics (3) has a brilliance of at least 5*107 counts/sec mm2, preferably at least 1*108counts/sec mm2. The apparatus allows an improved contamination control of wafers, in particular silicon wafers.

Abstract: Methods are disclosed utilizing synchrotron X-ray microscopy including x-ray fluorescence and x-ray absorption spectra to probe elemental distribution and elemental speciation within a material, and particularly a solid that may have one or more elements distributed on a solid substrate. Representative materials are relatively homogeneous in composition on the macroscale but relatively heterogeneous on the microscale. The analysis of such materials, particularly on a macroscale at which their heterogeneous nature can be observed, provides valuable insights into the relationships or correlations between localized concentrations of elements and/or their species, and concentrations of other components of the materials. Sample preparation methods, involving the use of a reinforcing agent, which are advantageously used in such methods are also disclosed.

Abstract: The present invention discloses a method for determining the mineral content represented by the entire SEM-EDS dataset, including initially unknown data points. SEM-EDS data points are taken and compared to a set of known data points. Any data point that is not sufficiently similar to the known data point is classified as unknown and clustered with like unknown data points. After all data points are analyzed, any clusters of unknown data points with a sufficient number of data points are further analyzed to determine their characteristics. All clusters of unknown data points with an insufficient number of data points to allow further analysis are considered outliers and discarded.

Abstract: The X-ray fluorescence spectrometer of the present invention includes a sample table (8) for a sample (S) having a crystalline structure, an X-ray source (1), a detecting unit (7) for detecting secondary X-rays (4) from the sample (S), a rotating unit (11) for rotating the sample table (8), a parallel translating unit (12) for causing the sample table (8) to undergo a parallel translational movement, a selecting unit (17) for selecting three of circumvent angles, at which diffracted X-rays can be circumvented, based on a diffraction profile obtained from the angle of rotation of the sample (S) and the intensity of secondary X-rays (4), the interval between the neighboring circumvent angles being smaller than 180°, and a control unit (15) for controlling the rotating unit (11) so as to set the sample (S) at the circumvent angle at which the sample table (8) will not interfere with any other structures.

Abstract: A method for identifying a substance includes determining a first molecular interference function (MIF) for a first substance. The method also includes determining a second MIF for a second substance. The method further includes generating a residual MIF at least partially based on a comparison of the second MIF to the first MIF. The method also includes identifying the type of substance based on the residual MIF.

Abstract: A radiation detector assembly and a method for using the same are provided. The radiation detector assembly includes an aperture, a window covering the aperture, the window is configured to permit radiation to pass through, the window is configured to prevent the passage of fluids and particles through the aperture, and a protective device covers the window. The protective device includes a plurality of holes at least partially aligned with the aperture, is configured to permit at least some radiation to pass through the holes, is configured to prevent objects larger than the holes to contact the window and is configured to withstand external forces and prevent those forces from damaging the window.

Abstract: A system that incorporates teachings of the present disclosure may include, for example, an apparatus having a collimator having at least one aperture and a fluorescence detector. The collimator can be positioned next to a compound. The compound can emit fluorescence X-rays when impacted by an X-ray beam generated by an X-ray source. The collimator can absorb at least a first portion of the fluorescence X-rays emitted by the compound and release at least a second portion of the fluorescence X-rays at the at least one aperture. The second portion of the fluorescence X-rays released by the at least one aperture have known directional information based on a position of the collimator. The fluorescence detector can detect the second portion of the fluorescence X-rays released by the at least one aperture. A three-dimensional (3-D) rendering of an elemental distribution of the compound can be determined from the fluorescence X-rays detected and the directional information. Additional embodiments are disclosed.

Abstract: Systems for sorting materials, such as those made of metal, are described. The systems may operate by irradiating the materials with x-rays and then detecting fluoresced x-rays, transmitted x-rays, or both. Detection of the fluoresced x-rays may be performed using an x-ray fluorescence detector array. The systems may be configured to provide high throughput sorting of small pieces of materials.

Abstract: A cup assembly for holding a sample to be analyzed spectrochemically, includes a tubular longitudinal member which is disposed symmetrical about a central axis. The tubular member extends longitudinally between a first end and a second end. An indented peripheral flange is defined at the second end. The indented flange has an inverted L shaped cross-section. An annular collar extends longitudinally between a first end and a second end. An internal peripheral flange is defined at the first end. The internal flange has an inverted L shaped cross-section complementing the indented flange of the tubular member. When a substantially thin film is interposed between the second end of the tubular member and the first end of the annular collar, the film is retained between the sample cell body and the collar between the indented flange and the internal flange. The cup may have a funnel shaped sample retaining chamber.

Abstract: A method of determining the feasibility of a proposed structure analysis process is disclosed. The process involved the electron beam excitation of x-rays from a multi-layered structure. The method comprises generating predicted x-ray data represents the x-ray excitation response of the multi-layered structure according to one or more sets of process conditions. The x-ray data are generated using structure data defining the structure and composition of the layers. The effects upon the x-ray data of changes to the structure data are then analyzed in accordance with one or more predetermined feasibility criteria, so as to determine the feasibility of performing the proposed structure analysis process upon the multi-layered structure.

Abstract: Methods are disclosed utilizing synchrotron X-ray microscopy including x-ray fluorescence and x-ray absorption spectra to probe elemental distribution and elemental speciation within a material, and particularly a solid that may have one or more elements distributed on a solid substrate. Representative materials are relatively homogeneous in composition on the macroscale but relatively heterogeneous on the microscale. The analysis of such materials, particularly on a macroscale at which their heterogeneous nature can be observed, provides valuable insights into the relationships or correlations between localized concentrations of elements and/or their species, and concentrations of other components of the materials. Sample preparation methods, involving the use of a reinforcing agent, which are advantageously used in such methods are also disclosed.

Abstract: A method of improving a resolution of an image using image reconstruction is provided. The method includes acquiring scan data of an object and forward projecting a current image estimate of the scan data to generate calculated projection data. The method also includes applying a data-fit term and a regularization term to the scan data and the calculated projection data and modifying at least one of the data fit term and the regularization term to accommodate spatio-temporal information to form a reconstructed image from the scan data and the calculated projection data.

Abstract: A hand-held XRF analyzer including an x-ray source for emitting x-rays through a window to a sample. A detector behind the window is responsive to x-rays irradiated by the sample. A controlled volume about the x-ray source and the detector is maintained in a vacuum or a predetermined purge condition for a predetermined amount of time for increasing the sensitivity of the analyzer. A processor is responsive to the detector for analyzing the spectrum of irradiated x-rays and responsive to a pressure sensor for detecting a pressure change inside the controlled volume. The processor is configured to detect if the vacuum or the predetermined purge condition has been compromised.

Abstract: The present invention provides a multilayer structure including a substrate having formed on a surface thereof at least one period of individual layers, the period having at least two layers including a first layer which includes magnesium silicide and a second layer which includes at least one of tungsten, tantalum, cobalt, nickel, copper, iron, chromium, alloys, oxides, borides, silicides, and nitrides of these elements, silicon, carbon, silicon carbide, boron, and boron carbide. If the period includes three layers, the second layer includes one of silicon, carbon, silicon carbide, boron, and boron carbide and a third layer includes one of tungsten, tantalum, cobalt, nickel, copper, iron, chromium, and alloys, oxides, borides, silicides, and nitrides of these elements, the second layer being disposed between the first and the third layers.

Abstract: An X-ray diffraction and X-ray fluorescence instrument for analyzing samples having no sample preparation includes a X-ray source configured to output a collimated X-ray beam comprising a continuum spectrum of X-rays to a predetermined coordinate and a photon-counting X-ray imaging spectrometer disposed to receive X-rays output from an unprepared sample disposed at the predetermined coordinate upon exposure of the unprepared sample to the collimated X-ray beam. The X-ray source and the photon-counting X-ray imaging spectrometer are arranged in a reflection geometry relative to the predetermined coordinate.

Abstract: The invention relates to a method and a device for determining the distribution of an X-ray fluorescence (XRF) marker (16) in a body volume (14). The body volume (14) is irradiated with a beam of rays (12) from an X-ray source (10) with a first ray component with a quantum energy just above and a second ray component with a quantum energy just below the K-edge of the XRF marker (16). Secondary radiation emitted from the body volume (14) is detected in a location-resolved way by a detector (30). To separate the X-ray fluorescence components in the secondary radiation from background radiation, the body volume is irradiated for a second time with a beam of rays from which the first ray component has been substantially removed by a filter (22) made from the material of the XRF marker.

Abstract: The press formability of a galvanized steel sheet including an oxide film, which has a thickness of 10 nm to 100 nm, as a surface layer is nondestructively speedily evaluated.

Abstract: An ionising particle analyser comprises a source of ionising particles, a charged particle detector, and an ionisable gas located between the source and the detector. The analyser further comprises a charged particle impeding device located between the source and the detector. The charged particle impeding device is arranged to be maintained in a first configuration at a potential to impede the passage of charged particles and pass uncharged particles.

Abstract: The material composition of a thin film formed on a substrate or covered by a cap layer that shares one or more elements with the thin film can be determined by combining characteristic material data, such as characteristic x-ray data, from a material composition analysis tool, such as an electron probe-based x-ray metrology (EPMA) operation, with thickness data and (optionally) possible material phases for the thin film. The thickness data and/or the material phase options can be used to determine, for example, the penetration depth of a probe e-beam of the EPMA tool. Based on the penetration depth and the thin film thickness, the characteristic x-ray data from the EPMA operation can be analyzed to determine the composition (e.g., phase or elemental composition) of the thin film. An EPMA tool can include ellipsometry capabilities for all-in-one thickness and composition determination.

Abstract: Systems and methods for process monitoring based upon X-ray emission induced by a beam of charged particles such as electrons or ions. Concept as expressed herein.

Abstract: A system, including a particulate matter analyzer and collecting filter, provides a method of analyzing and collecting samples from fluids, such as collecting particulate matter from air. A mass measuring unit and composition analyzing unit can be provided for either simultaneous or immediately consecutive measurements within a single instrument. The filter material can have an antistatic electricity characteristic and can be impregnated with reference material to enable calibration of the composition analyzing unit.

Abstract: This invention pertains to an x-ray microprobe that can be placed very close the sample surface. A practical implementation is an x-ray target material integrated to an atomic force microscope (AFM) tip and an electron beam is focused to the target materials to generate x-ray emission. This microprobe can be combined with energy-resolved detector or a fluorescence imaging system for material analysis applications.

Abstract: In a fluorescent X-ray analysis apparatus, a diffraction X-ray is removable from a sample even if it is formed of a mixture of fine crystals. A movable collimator mechanism capable of detecting only a collimate component of an X-ray optical flux is provided in a secondary X-ray path extending between a sample and an X-ray detector. Spectrum measurement is conducted on the same sample when the collimator mechanism is inserted and removed from the secondary X-ray path.

Abstract: An electron microscope including an apparatus for x-ray analysis, is capable of performing elemental analysis with X-rays emitted from a specimen by electron beam irradiation, that is, inspection of foreign particles, for enhancement of yields in manufacturing, at high speed and with high precision and high space resolving power. The current quantity of the electron beam is automatically controlled such that an X-ray count rate falls within a range of 1000 to 2000 counts per second, a plurality of X-ray energy regions are set up when checking an X-ray spectrum against reference spectra stored in a database for analysis of the X-ray spectrum, matching is performed for each of the X-ray energy regions, and the distribution of the elements observed is analyzed on the basis of an intensity ratio between X-ray sample spectra obtained by electron beam irradiation at not less than two varied acceleration voltages.

Abstract: An x-ray fluorescence analyzer and method. The analyzer and method use a single radio-active source, such as, 241Am to determine the composition of a metal alloy or precious metal. The method compensates for Rayleigh scattering by first determining a scaling factor using a particular energy line in the spectrum of the test material and comparing that line to the same energy line for a pure metal. Based on the scaling factor the energy spectrum for the pure is compensated and then subtracted from the energy spectrum of the test material at discrete points.

Abstract: The present invention consists of a multilayer structure having at least one triad of layers where each of the three layers is a predetermined material. One of the materials is from a group including lanthanum, lanthanum oxide, or lanthanum-based alloys. A second material is disposed between the first material and a third material. The second material is from a group including carbon, silicon, boron, boron carbide or silicon carbide. The third material is from a group including boron or boron carbide. Alternatively, a fourth material is added to further strengthen and increase the water resistance of the multilayer structure. The fourth material is selected from a group including silicon, boron, boron carbide or silicon carbide. The fourth material is disposed between the third layer of multilayer period n and the first layer of multilayer period n−1.

Abstract: An electron microscope is offered which is fitted with an X-ray spectrometer having a compact optical system and high resolution. The spectrometer has a spectrometer chamber whose inside is evacuated by a vacuum pumping system. A diffraction grating having unequally spaced grooves is placed in the chamber. An X-ray detector is mounted to an end of the chamber. The X-ray spectrometer is mounted to the sidewall of the electron microscope via a gate valve. A specimen is irradiated with an electron beam and emits characteristic X-rays, which are made to impinge on the face of the grating at a large angle with respect to the normal line to the face. Diffracted X-rays from the grating reach the X-ray detector and are detected.

Abstract: Apparatus and methods in which an elemental constituent, especially low Z elemental constituents, that are intrinsically located—or extrinsically placed—in an object (such as a pharmaceutical) are detected by x-ray fluorescence analysis to identify or verify the object or its point of manufacture. The elemental constituent is manufactured as part of the object or placed into a coating, packaging, label, or otherwise embedded within the object for the purpose of later verifying the presence or absence of these elements by x-ray fluorescence to determine the unique elemental composition of the elemental constituent(s). The apparatus and methods of the invention are simple and easy to use, as well as provide detection by a non line-of-sight method to establish the origin of objects, as well as their point of manufacture, authenticity, verification, or security. The invention is extremely advantageous because it is difficult to replicate, simulate, alter, transpose, or tamper with.

Abstract: An X-ray examination apparatus includes an X-ray source, an X-ray detector and an exposure control system. The exposure control system is arranged to control the X-ray source so as to perform a test exposure at a low X-ray dose and to perform an X-ray exposure at a higher X-ray dose. The X-ray detector applies a control signal resulting from the test exposure to the exposure control system and the X-ray source is adjusted on the basis of this control signal. The X-ray exposure produces an X-ray image and the X-ray detector supplies an image signal representing this X-ray image. The exposure control system is arranged to adjust the X-ray detector to a low spatial resolution during the test exposure and to a high spatial resolution during the X-ray exposure. The X-ray detector preferably includes a sensor matrix having sensor elements arranged in columns and rows. The spatial resolution is adjusted by deriving the control signal and the image signal from large and small groups of sensor elements, respectively.

Abstract: In an apparatus and a method for the analysis of atomic or molecular elements contained in a sample by wavelength dispersive X-ray spectrometry, wherein primary x ray or electron radiation is directed onto the sample whereby fluorescence radiation is emitted from the sample, the fluorescence radiation is directed onto a mirror or focussing device consisting of a multi-layer structure including pairs of layers of which one layer of a pair consists of lanthanum and the other consists of carbon and the fluorescence radiation is reflected from the mirror or focussing device onto an analysis detector for the analysis of the atomic or molecular elements contained in the sample.

Abstract: In order provide an energy dispersive X-ray analyzer that can perform efficient measurement by optimizing signal processing time of an X-ray counting section, an energy dispersive X-ray analyzer is provided with an energy dispersive X-ray detector, an X-ray counting section for analyzing the signal from the energy dispersive X-ray detector and generating a frequency distribution for each energy level, namely an energy spectrum, and a data control section for performing data processing, user interface etc. The X-ray counting section of the energy dispersive X-ray analyzer has signal processing methods with different processing times for a single X-ray input, and a function for selecting which method result to make use of using input X-ray energy.

Abstract: The invention provides device which is capable of performing both wave dispersive and energy dispersive x-ray fluorescence spectrometry on a single sample, and utilizing a single radiation detector, such as a PIN diode detector.

Abstract: A grating that includes a multilayer structure that has alternating layers of materials, a plurality of grooves formed between a plurality of lands, wherein at least one structural parameter of the plurality of grooves and plurality of lands is formed randomly in the multilayer structure.

Abstract: A method of X-ray analysis includes irradiating a spot on a sample with X-rays along an X-ray beam axis. X-rays emitted from the sample, responsive to irradiating the spot, are simultaneously detected at a plurality of different azimuthal angles relative to the beam axis. X-ray intensities detected at the different angles in a common energy range are compared in order to determine a property of the sample.

Abstract: A method of X-ray analysis includes irradiating a spot on a sample with X-rays along an X-ray beam axis. X-rays emitted from the sample, responsive to irradiating the spot, are simultaneously detected at a plurality of different azimuthal angles relative to the beam axis. X-ray intensities detected at the different angles in a common energy range are compared in order to determine a property of the sample.