Element Comprises Tiltable, Material-underlying Support Patents (Class 414/182)
  • Patent number: 5158412
    Abstract: A solids charger of the type having a main support frame with a solids supply chute thereabove feeding solids to a vertically and angularly adjustable, with respect to the horizontal, reciprocable charger plate positioned under the solids supply chute for receiving solids toward its rear end and feeding the granular solid materials to a reactor from its front end. The improvement in such a solids charger of a reciprocable charger plate reciprocably mounted in fixed angular relation to a charger plate support, reciprocating drive means fixedly mounted to the charger plate support and connected by an adjustable connecting rod with the rear end of the reciprocable charger plate, the connecting rod reciprocating generally parallel to the plane of the charger plate.
    Type: Grant
    Filed: May 20, 1991
    Date of Patent: October 27, 1992
    Assignee: Merkle Engineers, Inc.
    Inventor: Frank P. Merkle
  • Patent number: 4721424
    Abstract: A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube.
    Type: Grant
    Filed: June 30, 1986
    Date of Patent: January 26, 1988
    Assignee: Thermco Systems, Inc.
    Inventors: Robert E. Aldridge, Russell Elloway, William O. Fritz, Ralph D. Goff, Michael J. Herrera
  • Patent number: 4721836
    Abstract: An improved apparatus for annealing an ion-implanted semiconductor sample duces the deleterious side effects otherwise associated with the process. A semiconductor sample, fabricated, for example, from indium phosphide or gallium arsenide, is set upon the fingers of a carrier which is displaced to the interior of an elongate furnace having its internal temperature maintained at the proper annealing temperature. Next, the fingers are rotated and the sample is placed on a number of razor blade-like edges extending up from an internal rack. The carrier is withdrawn and the sample is quickly brought to the annealing temperature for the precise period of time usually no more than 20 seconds. After the exact annealing period, the carrier is reintroduced and the fingers are rotated to lift the sample from the rack and the sample is withdrawn.
    Type: Grant
    Filed: May 14, 1986
    Date of Patent: January 26, 1988
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: Carl R. Zeisse, Edward R. Schumacher
  • Patent number: 4671726
    Abstract: A cantilevered, soft landing boat loading system for semiconductor processing furnaces includes an alignment mechanism, a paddle, and a boat loader. The alignment mechanism includes five handles for five degrees of freedom. The boat loader is supported from a vertical plane.
    Type: Grant
    Filed: November 7, 1984
    Date of Patent: June 9, 1987
    Assignee: Breed Corporation
    Inventor: Ted Thuen
  • Patent number: 4636140
    Abstract: A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube.
    Type: Grant
    Filed: April 3, 1985
    Date of Patent: January 13, 1987
    Assignee: Thermco Systems, Inc.
    Inventors: Robert E. Aldridge, Russell Elloway, William O. Fritz, Ralph D. Goff, Michael J. Herrera
  • Patent number: 4453876
    Abstract: Apparatus for delivering solid fuel into a fireplace safely and easily includes a fuel supporting rack which may be pivoted between a horizontal fuel supporting position to a downwardly angled unloading position by means of a control lever having its operating end positioned a substantial distance from the fireplace.
    Type: Grant
    Filed: May 14, 1981
    Date of Patent: June 12, 1984
    Inventor: Julien J. Arpin
  • Patent number: 4392479
    Abstract: An improved fuel loader for loading fuel through a firebox opening in a stove and into a stove firebox, the fuel loader having a base sized and adapted for supporting the fuel to be loaded into the stove firebox and a handle assembly connected to the base which is manually grippable by an individual for maneuvering a portion of the base through the firebox opening and into the firebox for loading the fuel supported thereon into the firebox.
    Type: Grant
    Filed: May 21, 1981
    Date of Patent: July 12, 1983
    Inventor: Eugene V. Stair