Abstract: In a pod used in an FIMS system, diffusion of dust particles or the like adhering on the lid of the pod to the interior of the system is reduced. An engaged portion is provided inside the outer surface of the lid of the pod, and a flange portion provided around a pod opening to which the lid can be fitted is provided with an insertion hole that allows access to the engaged portion from the exterior space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that the latch mechanism can slide along a direction parallel to the side wall of the flange. An engagement portion of the latch mechanism reaches the engaged portion through the insertion hole, and the state of the latch mechanism changes between an engaged state and a disengaged state with movement of the latch mechanism.

Abstract: In a load port apparatus, a door driving mechanism that supports a door through a communication opening portion leading to a mini-environment is housed in a housing chamber that is in communication with the mini-environment through the communication opening portion. Exhaust opening portions are provided in the upper portion of a wall of the housing chamber that is opposed to the communication opening portion and a bottom wall of the housing chamber. Thus, gas passages from the mini-environment to the housing chamber and then to the external space are formed. Thus, dust in the load port apparatus is removed.

Abstract: A substrate processing apparatus having a station for loading and unloading substrates from the apparatus, includes an aperture closure for sealing a loading and unloading aperture of the station, a fluidic magazine door drive for removing a door of a substrate magazine and thus opening the substrate magazine and for operating the aperture closure to open the aperture, and sensor for mapping vertical locations of substrates mounted to the magazine door of the drive. The fluidic magazine door drive may include an encoder different from the sensor, the encoder being configured for determining the vertical location of the sensor.

Abstract: A position control method for controlling a position of a movable portion, includes: performing control of allowing the movable portion to approach a predetermined position by moving the movable portion; and performing control of moving the movable portion to the predetermined position by moving the movable portion and detecting a relative position of the movable portion with respect to the predetermined position by using an imaging unit.

Abstract: A rotary actuator position sensor comprises a target with a target surface coupled to a rotatable shaft and a sensor positioned to face the target surface. The target surface is configured to vary the distance between the target surface and the position sensor as the shaft is shifted from one rotational position to another. The sensor provides an analog output signal that corresponds to distance to the target and therefore to the rotational position of the shaft. A controller processes a signal corresponding to the sensor output signal to determine the rotational position. The controller can control the rotation of the shaft from one rotational position to another. The position sensor can be used in a wafer processing system with the controller also controlling movement of a wafer cassette holder into and out of wet tanks and between tanks. The controller can also control an optional agitator and front to back and back to front movement of the shaft.

Abstract: A load port apparatus is disclosed wherein the total period of time of operation of a lid member mounting and dismounting apparatus and a mapping apparatus is minimized while avoiding interference of the two apparatus with each other. An interference avoiding sensor apparatus is provided on the lid member mounting and dismounting apparatus and the mapping apparatus and detects that a lid member suction plate of the lid member mounting and dismounting apparatus is disposed at a position lower by a value exceeding a preset value than the arm to which the mapping sensors are attached to enable pivotal motion of the arm without interfering with the lid member suction plate. Then, immediately after the preset value is detected by the interference avoiding sensor apparatus, the arm is pivoted to the mapping position to start the mapping.

Abstract: A pod opener is an apparatus for purging the inside of a reticle pod having a pod cover and an openable bottom lid by supplying and discharging a clean gas to and from the inside of the reticle pod. The pod opener includes a stage, an elevator driving mechanism, a latch mechanism, and a supplying-discharging section. The stage can attach and remove the bottom lid to and from the pod cover. The elevator driving mechanism can move the stage. The latch mechanism serves to move a latch member that locks the bottom lid to the pod cover such that it cannot be detached and to release the locked state of the bottom lid. The supplying-discharging section starts purging before the latch member has completed an operation of locking the bottom lid to the pod cover.

Abstract: A processing apparatus including: a carry-in area into which a container containing substrates to be processed is carried, the container having a flange part on an upper part thereof and an opening in a front surface thereof, with a lid being detachably fixed to the opening; a transfer area whose atmosphere is maintained differently from an atmosphere of the carry-in area; a partition wall separating the carry-in area and transfer area; a through-hole formed in the partition wall; a door configured to open and close the through-hole; and a table on which the container can be placed in the carry-in area. After the container has been placed and then held on the table, the container is brought into contact with the through-hole, the door and the lid are opened, and the substrates to be processed in the container are conveyed to the transfer area so as to process the substrates.

Abstract: A curtain nozzle is located above an opening portion in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed. A cover is so provided as to cover a part of the curtain nozzle so as to prevent peripheral gas around an opening of the curtain nozzle from being involved in the gas curtain of the inert gas emitted from the curtain nozzle.

Abstract: A wafer transfer device and method capable of preventing a wafer from falling off of a carrier. A first carrier receiver holding a first carrier has a box-like shape having an opening through which the first carrier is attached/removed to/from the first carrier receiving member. A second carrier receiver holding a second carrier has a box-like shape having an opening through which the second carrier is attached/removed to/from the first carrier receiving member. The first carrier and the second carrier can be attached/removed to/from the first carrier receiver and the second carrier receiver, respectively. Owing to such a configuration, it is possible to prevent a wafer received in the first carrier and the second carrier from falling off from the first carrier and the second carrier, respectively.

Abstract: An apparatus for orientating a solid growth culture medium plate from an original orientation to a worked orientation, the plate having a lid and a bottom, the apparatus including an orientation mechanism that includes opposed jaws able to receive and hold a plate therebetween in a held position that defines a notional tube above and below the plate, the orientation mechanism being mounted on a jaw support member such that the jaw support member is rotatable such that at least the plate bottom rotates about a generally horizontal axis that intersects the notional tube to orientate at least the plate bottom from the original orientation to the worked orientation.

Abstract: A curtain nozzle is located above an opening portion (10) in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed. A cover is so provided as to cover a part of the curtain nozzle so as to prevent peripheral gas around an opening of the curtain nozzle from being involved in the gas curtain of the inert gas emitted from the curtain nozzle.

Abstract: A component feeder capable of enhancing productivity is provided by that the component feeder includes a tape feeding device intermittently feeding a component housing tape constituted of a carrier tape having component housing parts formed with predetermined interval to contain respective electronic components, and a cover tape covering the component housing parts to prevent the components from jumping out from the component housing parts while the component housing tape wound on a housing tape reel is sequentially fed to a component extracting position, and an electronic component exposing device exposing the electronic components in the component housing parts to be allowed to be extracted, wherein the tape feeding device is constituted of a first feeding device and a second feeding device, and the electronic component exposing device is provided between the first feeding device and the second feeding device.

Abstract: A loader is provided, which is disposed in a low cleanliness room along a border between the low cleanliness room and a high cleanliness room, for transporting a dust free article between an inside of a container receiving the dust free article and the high cleanliness room, comprising a movable stage for mounting the container; an opening portion through which the dust free article is transported between the container and the high cleanliness room; a door for opening and closing the opening portion; a unifying means for unifying a cover of the container and the door when the container approaches the door; and a driving apparatus for moving the cover and the door unified within the loader to open and close the opening portion and the container.

Abstract: In a pod used in an FIMS system, an engaged portion is provided on the outer surface of the lid of a pod. A through hole is provided in a flange portion that is provided around the pod opening and in which the lid is to be received. The through-hole allows access to the engaged portion from the external space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that it can slide in a direction parallel to the side wall of the flange. The engagement portion of the latch mechanism reaches the engaged portion through the aforementioned through-hole. Movement of the latch mechanism brings the engagement portion into an engaging state and a disengaged state.

Abstract: Embodiments of multiple substrate transfer robots and substrate processing systems have been disclosed herein. In some embodiments, a multiple substrate transfer robot is provided and may include an arm capable of extending along a horizontal direction; and a wrist coupled to the arm and having a plurality of blades coupled thereto, each blade configured to horizontally support a substrate thereupon and vertically disposed with respect to each of the other blades. In some embodiments, a substrate processing system is provided and may include a substrate processing chamber having a plurality of susceptors, wherein each susceptor is vertically disposed and capable of holding a semiconductor substrate; and a substrate transfer robot having a plurality of blades for transferring a plurality of substrates to and from the processing chamber, each blade configured to horizontally support a substrate thereupon and vertically disposed with respect to each of the other blades.

Abstract: A partial pressure of oxidizing gas in an opened state FOUP fixed in a FIMS system is reduced when the FOUP is closed. Purge gas supply nozzles are placed outside of two vertical sides of an opening portion (10) within the FIMS. A curtain nozzle is additionally installed which can form a gas curtain from purge gas above the top side of the opening portion (10). When a pod (2) is closed with a lid (4), a door opening/closing mechanism keeps the lid (4) at a given angle with respect to the flowing direction of curtain gas for a given period of time, and hence purge gas supplied to the gas curtain is additionally put into use for the purging of the interior of the pod by the lid 4.

Abstract: A lid opening and closing device for a semiconductor manufacturing apparatus having a partition wall configured to divide a carrier conveying region and a substrate conveying region, the partition wall having a conveying gateway with an edge portion, includes an exhaust port configured to discharge therethrough an atmospheric gas from a closed space formed between a carrier making contact with the edge portion of the conveying gateway and an opening/closing door, and a purge gas injecting part provided in the opening/closing door. The purge gas injecting part is configured to enter the internal space of a carrier lid through an opening formed on the front surface of the carrier lid, to inject a purge gas into the internal space of the carrier lid and to discharge an atmospheric gas existing in the internal space of the carrier lid into the closed space through another opening of the carrier lid.

Abstract: A FOUP opening/closing device includes a housing containing a mounting table for mounting the FOUP thereon, an FOUP loading opening, and a delivery opening. The device further includes a rotator for rotating the mounting table, a door opening/closing unit to open or close the door of the FOUP and keep the door open, a mover for moving the FOUP and the door opening/closing unit in a reciprocating manner, to allow the FOUP and the door opening/closing unit to be connected to or separated from each other, and a controller to output control signals for moving the FOUP and the door opening/closing unit via operation of the mover to mount the door of the FOUP to the door opening/closing unit, separating the door from the FOUP, moving the FOUP and the door opening/closing unit away from each other, and rotating the mounting table to make the FOUP face the delivery opening.

Abstract: The present invention provides a substrate treatment apparatus which sets substrate loading intervals to treatment chambers to a fixed value and prevents the occurrence of stagnancy of substrates in the treatment chambers. The substrate treatment apparatus includes a substrate conveyance chamber 5 which has a substrate conveyance device 11, a plurality of treatment chambers 6 to 9 in which a treatment time of at least one treatment chamber differs from treatment times of other treatment chambers and the respective treatment chambers are communicated with the conveyance chamber, and a control part 12 which controls a conveyance operation of the substrate conveyance device by setting treatment schedules of the substrates.

Abstract: An assembly for enabling the release of produce from a module retained by a plastics sleeve. The apparatus comprises a primary support frame including legs fixed to ground surface via feet. A gantry supports a compression assembly capable of receiving and retaining a module. There are means to enable the compression assembly to move between a non working state in which the compression assembly is elevated above a work station and a working state in which the compression assembly is at a work station in which compression arms are capable of retaining a produce module. The compression assembly includes means to enable the arms to apply a radial force to the module sufficient to allow the compression assembly to remove the plastics sleeve and allow the produce to gravitate through a free end of the module as the plastics sleeve is elevated away from the produce.

Abstract: Provided is a method of detecting whether or not a lid is fixed to a pod appropriately when performing an operation of closing an opening of the pod by the lid in an FIMS system. Determination is made whether or not a door is present at a predetermined position when the lid is attached to the pod and whether or not the pod is displaced from a position of opening/closing the lid, and determination is made again, after the lid engages with the pod, whether or not the door is present at the predetermined position and whether or not the pod is displaced from the position of opening/closing the lid. When it is confirmed in both the determinations that the door is present at the predetermined position and the pod is not displaced, determination that fixation of the lid is appropriate is made.

Abstract: A substrate treating apparatus includes a treating section, a table for receiving a FOUP (Front Opening Unified Pod) storing the substrates, and an attaching and detaching unit for a lid to/from an access opening of the FOUP placed on the table. A transport unit is movable to a transfer position opposed to the access opening of the FOUP, and has support members for supporting the substrates, the transport unit transporting the substrates held by the support members between the treating section and the FOUP. A substrate detecting unit detects the substrates stored in the FOUP with the lid detached, a support member detecting unit detects the support members of the transport unit, and a control unit determines whether to transport the substrates, with the lid detached and the transport unit moved to the transfer position, based on detection of the substrates, and detection of the support members.

Abstract: A transfer chamber is partitioned into a second chamber in which a transfer robot moving through an opening portion which can be opened/closed by a door is arranged, and a minute first chamber which serves as a FIMS system and includes a door capable of retaining a lid of a pod. The second chamber maintains a state in which an inert gas constantly circulates owing to minute nitrogen while having a pressure higher than that inside the first chamber. The first chamber is normally sealed while an oxide gas is suppressed in advance. In addition, at a time of transferring wafers, a partial pressure of the oxide gas is lowered with use of a downflow which is caused by the inert gas. Further, the first chamber and the second chamber are communicated with each other after a level of the partial pressure is confirmed with use of an oxygen level meter.

Abstract: A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.

Abstract: An unloading apparatus capable of automatically unloading agricultural materials from a storage bag is disclosed. The unloading apparatus includes a drive mechanism for advancing the apparatus along the direction of an elongate storage bag, a collection mechanism for withdrawing material from the bag, and mechanisms for both sensing resistance imposed on the advancing apparatus by material in the bag and controlling further advancement of the apparatus in accordance with the level of that resistance.

Abstract: A substrate processing apparatus comprises a storage container for storing multiple substrates and whose substrate loading and unloading opening is shut by a lid, a loading and unloading port for carrying the storage container into and out of the case, a placement unit for placing the storage container in the loading and unloading port, a storage chamber provided adjacent to the loading and unloading port for storing the storage container, an opening and closing device for opening and closing the substrate loading and unloading opening of the storage container placed in the placement unit, a transfer device containing a holding mechanism for supporting the bottom of the storage container and transferring the storage container supported in the holding mechanism, over the opening and closing device between the inside and outside of the storage chamber, and an elevator mechanism for raising and lowering the placement unit between the placement unit height position where the opening and closing device opens and c

Abstract: An intermediate transfer chamber that can prevent formation of defects in substrates. The intermediate transfer chamber is provided between a loader module being in a first environment where the interior thereof is at a first pressure and contains moisture, and a chamber of a process module being in a second environment where the interior thereof is at a second pressure lower than the first pressure. The intermediate transfer chamber comprises a transfer arm comprising a pick that bidirectionally transfers a substrate between the loader module and the chamber and supports the substrate, a load-lock module exhaust system that exhausts the interior of the intermediate transfer chamber so as to reduce pressure in the intermediate transfer chamber from the first pressure to the second pressure, and a plate-like member that controls the conductance of exhaust on at least a principal surface of the substrate opposite to the pick when the interior of the intermediate transfer chamber is exhausted.

Abstract: A duplex-type product bag unloading apparatus including two downwardly opening and closing chucks and a chuck-moving mechanism for reciprocating the chucks between positions for receiving and discharging product bags. The relative positions of the two chucks are changed as they are moved from the receiving position to the discharging position by the chuck-moving mechanism, so that in the receiving position, the chucks are arranged in a single row in the bag width direction of the grasped product bags, and in the discharging position, the chucks are in a single row in the thickness direction of the grasped product bags. The chuck-moving mechanism is comprised of a pivot arm and a chuck-supporting frame rotatably mounted to the pivot arm, and the two chucks are rotatably mounted on both sides of the chuck-supporting frame. The chuck-supporting frame and the chucks rotate in synchronism with the pivotal motion of the pivot arm.

Abstract: A curtain nozzle is located above an opening portion (10) in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed. A cover is so provided as to cover a part of the curtain nozzle so as to prevent peripheral gas around an opening of the curtain nozzle from being involved in the gas curtain of the inert gas emitted from the curtain nozzle.

Abstract: Scalable storage can be achieved with linear array storage of wafers, comprising two linear arrays of storage compartments on opposite walls, with a middle transfer mechanism. Together with a buffer station for automatic material handling system, a scalable bare wafer stocker can provide flexible and uninterrupted services to a fabrication facility.

Abstract: Automatically processing secure containers housing valuable documents includes receiving a secure container in a secure container processing unit, opening the secure container using an extraction module operatively coupled to the secure container processing unit, removing the valuable documents from the secure container using the extraction module, transferring the valuable documents to an external processing apparatus, and closing the secure container using the extraction module.

Abstract: The FOUP door positioning device of a FOUP opener is compatible with all kinds of FOUPs, is inexpensive, and has a simple positioning-ping adjustment mechanism. In a state in which a flange portion (a portion having a taper 13) of a proximal end portion of a positioning pin 10 is seated in a recess portion 31 of a port door 30, and an air suction bore 14 of the positioning pin 10 and an air suction bore 32 of the port door 30 are aligned with each other, a pin insertion hole 23 of a suction pad 20 is fitted to a straight portion 11 of the positioning pin 10, and the suction pad 20 is screwed to the port door 30. By this procedure, the suction pad 20 is attached to the outer surface of the port door 30, and a portion of the suction pad 20 which is sunk into a recess portion 31 presses the flange portion of the proximal end portion of the positioning pin 10. A reinforcing metal plate 25 is embedded in a base portion 21 of the suction pad 20.

Abstract: In a load port apparatus, a clearance is formed between an inner circumferential surface of an opening of the chamber and an outer circumferential surface of a door. The area of the clearance between the plate and the opening portion on a plane flush with an interior side of the chamber is larger than the area of the clearance between the plate and the opening portion on a plane flush with the exterior of the chamber. A fan located at an upper side of the chamber generates a first flow of air in the downward direction. The clearance generates a second flow of air from the interior of the chamber to the exterior of the chamber. The second flow of air is generated by the difference in the area of the interior cross section of the clearance and area of the exterior cross section of the clearance.

Abstract: Provided is a chip mounter for recognizing a Ball Grid Array (BGA) package through a chip mounter. The chip mounter includes a BGA package recognition apparatus which includes an image acquisition unit which acquires image information of a BGA package which includes a plurality of solder balls having n patterns (n?1), a pattern recognition unit which analyzes the image information and outputs information about the BGA package, and a storage unit which stores the information about the BGA package, wherein the pattern recognition unit recognizes the n patterns, selects n seeds respectively corresponding to the n patterns and performs a seed growing operation which groups solder balls which are continuously located adjacent to the seed and have the same pattern as the seed into the same group as the seed, with respect to each of the n seeds.

Abstract: To ensure that an abnormality in a closed state of a FOUP door serving as a lid of a FOUP can be detected quickly and reliably, a FOUP opener includes a port door attached detachably to an opening window in a port plate for separating the interior and exterior of a semiconductor processing device, and a dock unit for positioning the FOUP in a FOUP door attachment/detachment position. A suction disc mechanism and a lock mechanism for fixing the FOUP door to a FOUP main body and releasing the FOUP door are disposed on the port door. A FOUP door detection sensor for determining whether or not the FOUP door fixed to the FOUP main body, which is positioned in the FOUP door attachment/detachment position on the dock unit, is attached correctly to an opening portion of the FOUP main body is disposed on the port plate.

Abstract: An apparatus to tilt, flip, or rotate a round cotton module on a conveying system employs actuated arms includes that support a bar which fits in place of a roller on a provided conveyor system having multiple rollers. A cotton module can be easily rotated or flipped to a vertical position when the bar rotates between initial reclined and final elevated positions. The wrapping can be removed once the cotton module reaches the final elevated position.

Abstract: This invention relates to a FOUP opener in which a FOUP is placed and the FOUP door of the FOUP can be detached so as to allow access to the interior of the FOUP. The FOUP opener includes a port door having an attaching/detaching mechanism for attaching and detaching the FOUP door and a holding mechanism for holding the FOUP door to be detached, and a port door moving unit for moving said port door holding the FOUP door so as that the FOUP is opened. The port door has a main structure in which said attaching/detaching mechanism is arranged and a surface panel to cover said main structure. The surface panel is detachable from said main structure at a front side of the FOUP opener.

Abstract: Provided are an apparatus and method for transferring substrates. The substrate transferring apparatus is provided with a plurality of blades capable of withdrawing wafers from inside a container. Withdrawing members are elevated within coupling holes formed in the blades, and wafers are withdrawn by elevating and protruding the withdrawing members from the coupling holes of the blades. The withdrawing members are formed to be hollow, and are selectively elevated from the blades by supplying gas therein. Alternately, the withdrawing members are rotatably connected to the blades, and wafers are withdrawn when the withdrawing members are pivoted to protrude from the blades. Here, a withdrawing member includes a rotating shaft, and is pivoted when tension is applied to a wire wound around the rotating shaft. The wound wire is rotated by a driver that is selectively operated by a controller.

Abstract: A vacuum robot includes an arm portion on which a work is to be disposed under a reduced pressure environment and a motor portion for rotatably driving the arm portion, the vacuum robot being configured to transfer the work by causing a rotational movement of the arm portion by the motor portion. The motor portion comprises a rotor portion connected to the arm portion, a stator portion disposed at an external periphery of the rotor portion, a housing disposed under an atmospheric pressure environment, and a thin cylindrical can disposed in an electromagnetic gap formed between the rotor portion and the stator portion and secured to the housing so that the stator portion is air-tightly encapsulated in a space formed by the housing and the can. The space is maintained in a depressurized state by a seal.

Abstract: In the present invention, a base 43 of a robot 27 is fixed to a fixing portion 53 of a frame divided body 50. The base 43 allows force exerted from a robot main body 27A to be transmitted to the fixing portion 53 of the frame divided body 50. Contrary, the fixing portion 53 of the frame divided body 50 has rigidity which can prevent the force exerted from the base 43 of the robot 27 from being transmitted to a main body constituting member 51. Accordingly, the base 43 of the robot 27 has only to possess a function for connecting the robot main body 27A and the frame divided body 50. Therefore, even though reducing its rigidity, transmission of vibration to the wafer processing apparatus can be prevented, as well as occurrence of malfunctioning in the substrate processing work can be prevented. In addition, increasing the rigidity of the frame divided body 50 can be achieved easier with a simpler construction and more effective than increasing the rigidity of the robot.

Abstract: A composite laminar tape (1) for mass-sealing bottles (15) or similar containers consists, according to the invention, of at least one extensible laminar tape (16), made of an extensible plastomeric film, which is possibly provided with closed lines for a predetermined separation of areas being meant to act as sealing membranes. The invention also relates to an apparatus for mass-sealing containers with said tape, and to an apparatus for mass-unsealing the containers sealed with said tape.

Abstract: A wafer processing system has a wafer loading system accommodating sufficient wafer carriers to substantially maximize the processing speed capability of the processing system. Wafer carriers are placed into and removed from the loading system by one or two overhead carrier loading tracks. Carriers may be loaded or removed while other carriers are in work. One or more transfer robots may move wafers from the carriers to buffers. One or more process robots in a process module move wafers from buffers, or other locations, to processors in the process module.

Abstract: The invention is directed to a pod clamping unit for fixing a pod to a support table in a load port, the pod including a pod body capable of storing a wafer in the interior thereof and a lid, the load port having a pod opener that opens/closes the lid. The pod clamping unit includes a clamp portion that is provided on the support table and adapted to engage with a first engagement portion provided on a lower surface of the pod body to restrict upward movement of the pod relative to the support table, a restriction pin that is movable upwardly and downwardly relative to the support table and adapted to engage with a second engagement portion provided on the lower surface of the pod body to restrict movement of the pod in a disengaging direction that causes disengagement between the first engagement portion and the clamp portion, and a vertically driving portion that moves the restriction pin up to/down from the second engagement portion.

Abstract: There is provided a processing apparatus capable of modifying an existing processing apparatus having a single loading port to one having dual loading ports by providing an additional loading port without increasing a foot print thereof and also capable of realizing a complete automation of a wafer transfer by utilizing an existing automatic transfer line. The processing apparatus includes a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon waters; a sub-chuck, disposed under the second loading port, for positioning the wafers; and a wafer transfer unit having a transfer arm for transferring the wafers between the sub-chuck and the prober chamber, the transfer arm being rotatable and movable vertically.

Abstract: A tape feeder 1 includes a carrying sprocket 4 for carrying a carrier tape 3 at inside of a cabinet 2, a motor 5 for driving to rotate the carrying sprocket 4, a driven sprocket 6 driven to rotate by a movement of the carrier tape 3 carried at inside of the cabinet 2, and an exfoliating roller 7 rotated cooperatively with rotation of the driven sprocket 6 for reeling to exfoliate a cover tape 12 pasted onto the carrier tape 3 for sealing a part, in which driving of the motor 5 is transmitted as an operation of carrying the carrier tape 3 and is transmitted to the driven sprocket 6 by way of the carrier tape 3.

Abstract: A curtain nozzle is located above an opening portion (10) in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed. A cover is so provided as to cover a part of the curtain nozzle so as to prevent peripheral gas around an opening of the curtain nozzle from being involved in the gas curtain of the inert gas emitted from the curtain nozzle.

Abstract: An unloading mechanism capable of automatically unloading agricultural materials from a storage bag is disclosed. The unloading mechanism includes a collection mechanism, discharge mechanism and a sensor arrangement configured to engage the storage bag. The sensor arrangement controls the unloading mechanism so that it automatically advances in a direction towards the storage bag as material is unloaded therefrom.

Abstract: Adjacent to an opening portion 10 in an FIMS system is provided an enclosure that encloses the operation space of a door and has a second opening portion 31 opposed to the opening portion 10. A curtain nozzle is provided above the upper edge of the opening portion 10 in the upper portion in the enclosure. A purge gas is supplied from the curtain nozzle along a direction from the upper edge to the lower edge of the opening portion. In addition, a gas outlet through which the purge gas flows from the interior of the enclosure out into the exterior is provided on the wall of the enclosure to which the purge gas flowing in the above described direction is directed, whereby an increase in the partial pressure of oxidizing gases in the interior of the FOUP is prevented.

Abstract: Methods for preventing or treating damage to sensory hair cells and cochlear neurons are disclosed. The methods comprise the administration of an effective amount of a compound of Formula I or Formula II. The method provides for the prevention/treatment of both hearing loss and loss of the sense of balance.