Abstract: A method of transporting a substrate with a substrate support, the method includes defining a frictional breakaway force between the substrate and the substrate support in a horizontal plane, moving the substrate in the horizontal plane along a horizontal trajectory, moving the substrate in a vertical direction along a vertical trajectory simultaneously while moving the substrate in the horizontal plane, and wherein the horizontal trajectory is determined based on the acceleration profile of the vertical trajectory and wherein the horizontal trajectory prevents the moving of the substrate from overcoming the coefficient of friction in the horizontal plane.

Abstract: A support arm for a medical device includes a column and a boom rotatably coupled to the column for rotation relative to a first axis. An arm is coupled to the boom for rotation relative to a second axis. A link mount is coupled to the arm and rotatable relative to the arm about a third axis. A device mount is supported by a linkage having link members arranged such that rotation of said first link member relative to the link mount about a fourth axis rotates the medical device about a fifth axis. The device mount is rotatable relative to the linkage about a sixth axis. The third, fifth and sixth axes extend through the center of mass of a medical instrument supported by the device mount.

Abstract: A camera is used to take an image of an end surface of a honeycomb structure gripped by a hand. Based on the image, an initial rotation angle of the honeycomb structure around a vertical axis at a reference position where the image has been taken is recognized. An arm turning section is driven to convey the honeycomb structure gripped by the hand from the reference position to above a plugging mask. A rotation angle required to adjust the rotation angle of the honeycomb structure on the plugging mask to a desired final rotation angle is acquired based on the initial rotation angle recognized at the reference position and a rotation angle of the honeycomb structure around the vertical axis associated with the driving of the arm turning section from the reference position to above the plugging mask. The honeycomb structure is rotated based on the required rotation angle.

Abstract: A robot has a robot arm, a support structure, and a movable platform. The platform includes a cantilevered member coupled to a guide of the support structure such that motion of the platform is directed along a first direction. The robot further includes first and second timing belts having portions that extend along the first direction and that are disposed on opposite sides of the cantilevered member, and first and second shafts movable with the movable platform. The shafts are coupled to the respective timing belts, to the robot arm such that rotation of the first shaft imparts angular motion to the robot arm and rotation of the second shaft imparts radial motion. The robot also includes a third timing belt to which the platform is coupled and by which it is moved. Motors are provided that impart movement to the timing belts.

Abstract: In an automated process of handling slides, such as in an imaging system, a slide hander must be able to get a hold of, lift up, and move slides, with tissues samples thereon, to multiple locations quickly and efficiently. To perform this function, the arm of the slide handler needs to be free to move from one location to the next and to advantageously respond in the event of encountering any unexpected or misplaced objects and/or other obstacles without jamming, being damaged and/or causing damage to a slide. A system described herein provides for the use of a slide handler having a crash head assembly with a spring-loaded flexible joint that may disengage if an unexpected obstacle is encountered and spring back to its proper location once the obstacle is cleared. Additionally, because the crash head assembly can flex, it is less likely to break or chip the glass slides.

Abstract: A wafer transfer blade including a body including metal oxide and configured to support a wafer, and an adsorbing part on the body, the adsorbing part having at least one therein and configured to apply vacuum pressure to attach the wafer on the body may be provided. The body may include metal oxide to prevent static electricity.

Abstract: A substrate holder positioning method, capable of positioning a substrate holder without using any positioning jig, includes: measuring a first position of a substrate held on a substrate holder included in a substrate carrying mechanism; carrying the substrate held on the substrate holder to a substrate rotating unit for holding and rotating the substrate; turning the substrate held by the substrate rotating unit through a predetermined angle by the substrate rotating unit; transferring the substrate turned by the substrate rotating unit from the substrate rotating unit to the substrate holder; measuring a second position of the substrate transferred from the substrate rotating unit to the substrate holder; determining the position of the center of rotation of the substrate rotating unit on the basis of the first and the second position; and positioning the substrate holder on the basis of the position of the center of rotation.

Abstract: A substrate handling robot having a robot body and a robot arm with an end effector is configured to exhibit angular (?), radial (R) and Z motion. A pair of coaxial shafts link the robot arm to respective motors dedicated to angular (?) and radial (R) motions. The motors are stationarily mounted with respect to the robot body. The shafts are rotatably supported by a floating platform which is motivated in the Z direction by a third motor also stationarily mounted with respect to the robot body. The third motor is coupled to the platform by a Z motion linkage. The first and second motors are coupled to the coaxial shafts by angular and radial motion linkages each of which includes primary and secondary timing belts whose relative motions are synchronized with the Z motion linkage to achieve controllable independent angular (?), radial (R) and Z motions in a simple, light-weight package.

Abstract: Provided is a method of adjusting a velocity of a transfer arm in a transfer member. The method includes, accelerating the transfer arm from a start point to a first point where a movement velocity reaches a preset reference velocity, dividing a division from the first point to a second point into movement divisions to move the transfer arm in any one of a deceleration motion, an acceleration motion, and a uniform motion according to the respective movement divisions, and decelerating the transfer arm from the second point to a target point. The motion of the transfer arm in the current movement division is different from that in the movement division just before the current movement division. Thus, a different impulse from that in the precedent movement division is applied to a substrate loaded on the transfer arm. Accordingly, the impulse response superposition cancels residual vibration of the substrate, so as to improve transfer efficiency of the transfer member.

Abstract: An industrial robot includes a hand on which a workpiece is placed, an arm that takes out the hand from a predetermined position of the workpiece and supplies the hand, an up-down moving mechanism connected to the arm by a support member, a pedestal provided at a lower portion of the up-down moving mechanism, and a pendulum stopper provided on a base on which the pedestal turns.

Abstract: A transfer robot includes a hand section, a horizontal arm mechanism, and a lift mechanism. An object is to be placed on the hand section. The horizontal arm mechanism is connected to the hand section and includes at least two rotary joints. The horizontal arm mechanism is configured to extend and contract so as to move the hand section along one direction. The lift mechanism is configured to move the horizontal arm mechanism up and down and includes a plurality of link mechanisms disposed on a base member. The horizontal arm mechanism is disposed between parts of the lift mechanism when the horizontal arm mechanism is moved to a lowest position.

Abstract: A work piece transfer mechanism for use in a chamber has at least one port through which a work piece may be passed along a linear work piece transfer path between a retracted location inside the chamber and an extended location outside the chamber. The chamber has a predetermined internal dimension of given axial extent in the direction of the transfer path, and the transfer mechanism includes a work piece support movable with a linear stroke. The work piece support is driven along the linear stroke by a drive lever pivotally attached to the work piece support by a pivot, and the drive lever is drivable such that the pivot is driven along a linear path to move the work piece support along the linear work piece transfer path. The linear work piece transfer path includes a portion beyond the port of axial extent greater than predetermined internal dimension.

Abstract: An apparatus for transferring and accepting glass substrate plates includes a double fork gripper having two superimposed, individual fork grippers that are movable relative to one another perpendicular to their extension planes. The fork grippers may be inserted simultaneously therewith into a receiving station having at least two depositing planes so that relative movement of the individual fork grippers perpendicular to their extension planes transfers a glass substrate plate to the receiving station and receives another plate from the receiving station.

Abstract: The invention provides a robotic arm for transporting a substrate in an ultrahigh vacuum including a carrier module and a drive module. The drive module includes a magnetic coupling, a first transmission module, a second transmission module, and a third transmission module. The magnetic coupling includes an inner shaft and an outer shaft. The first transmission module drives the first active unit of the magnetic coupling to turn a first passive unit of the inner shaft by magnetic force. The second transmission module drives the second active unit of the magnetic coupling to turn a second passive unit of the outer shaft by magnetic force. The third transmission module drives the magnetic coupling and the carrier module to perform vertical movement. The carrier module will achieve rotational motion or extending motion when the inner shaft and the outer shaft are driven by the first transmission module and the second transmission module of the drive module.

Abstract: A transfer robot according to an embodiment includes an arm and a body. The arm is provided, at a terminal end thereof, with a robot hand transferring a thin plate-like workpiece, and operates in horizontal directions. The body includes a lifting and lowering mechanism that lifts and lowers the arm. In the transfer robot, at least a part of the body is disposed outside a side wall of a transfer room that is connected to an opening and closing device opening and closing a storage container for the thin plate-like workpiece and to a processing room processing the thin plate-like workpiece.

Abstract: A work transfer apparatus includes a work carrying mechanism, a driving source that drives the work carrying mechanism, a sealed box that accommodates the driving source in a hermetically sealed state, and a coolant circulation path provided in the sealed box for cooling the driving source. The sealed box includes a box body with an opening, and a partition lid for closing the opening. The partition lid includes an outer plate member and an inner plate member superposed on the outer plate member. The coolant circulation path is disposed at the interface between the outer plate member and the inner plate member.

Abstract: Described herein is a conveyance robot. In certain aspects, a conveyance robot can include a first link member configured to be rotatable about a first axis, a second link member configured to be rotatable about a second axis positioned at a predetermined distance relative to the first axis, a holding member configured to be capable of holding an article and rotating about a third axis positioned at a predetermined distance relative to the second axis, an ascending and descending drive unit for driving at least the holding member to ascend and descend. In certain aspects, an arm link mechanism can be included. The arm link mechanism can be constituted by connecting the first link member, the second link member, and the holding member in this order, and the ascending and descending drive unit is placed between the first link member and the holding member so as to form a part of the arm link mechanism.

Abstract: A wrist assembly is provided for securing an end effector to a robotic arm. The wrist assembly comprises a first portion (205, 207) containing a slot for releasably engaging an end effector (231), and a second portion (203) which is attached to the first portion. The orientation of the first portion with respect to the second portion is adjustable to impart a leveling effect to the end effector.

Abstract: An industrial robot may include an arm unit equipped with a hand structured to place a workpiece on the hand, a column structured to support the arm unit so as to enable the arm unit to move in a vertical direction, a hinge provided at an intermediate position in the vertical direction structured to section and fold the column into a base column and an upper column, supporting members placed on each of the base column and the upper column, screw support members placed on each of the supporting members, a screw shaft that is screwed into the screw support members, a base column side and an upper column side of the screw shaft being threaded reversely to each other, and a screw shaft turning means for turning the screw shaft. The industrial robot carries out transfer work of the workpiece at a predetermined working space.

Abstract: This invention provides a substrate transport apparatus (100) which transports a substrate (W) placed on a hand portion (10) to a processing apparatus or a predetermined storage unit. The substrate transport apparatus (100) includes a moving means (20) for supporting the proximal side (10b) of the hand portion (10) serving as one end of the hand portion (10), and reciprocally moving the hand portion (10) in the direction of its extension, a tilt detection means (30) for detecting the tilt of a distal end (10a) of the hand portion (10) with respect to the horizontal direction, which accompanies flexure of the hand portion (10) upon placing the substrate (W) on the hand portion (10), and a tilt correction means (40) for generating a pitching motion of the hand portion (10) as a whole so as to cancel the tilt of the distal end (10a) of the hand portion (10).

Abstract: A first decelerator is placed in an arm base such that a lower end of a decelerator shaft is bared in the arm base. A first arm has a hermetic space which becomes equal in pressure to a hermetic space of the arm base when an upper end of the hollow decelerator shaft is inserted thereinto, and is secured to a first decelerator output shaft. A second decelerator is placed on a distal end of the first arm, and has an input shaft connected to the decelerator shaft. A second arm is secured to an output shaft of the second decelerator, and has no hermetic space formed therein. A link mechanism follows the first and second arms.

Abstract: A system and method for receiving unprocessed workpieces, moving them, orienting them and placing them in a load lock, or other end point is disclosed. The system includes a gantry module for moving workpieces from a conveyor system to a swap module. The swap module is used to remove a carrier or matrix of processed workpieces from a load lock and place a carrier of matrix of unprocessed workpieces in its place. The processed workpieces are then moved by the gantry module back to the conveyor. The gantry module may have X, Y, Z and rotational actuators and include an end effector having multiple grippers. A method of aligning a plurality of workpieces on the end effector so that the plurality can be transported at the same time is also disclosed.

Abstract: A robot has a robot arm, a support structure, and a movable platform. The platform includes a cantilevered member coupled to a guide of the support structure such that motion of the platform is directed along a first direction. The robot further includes first and second timing belts having portions that extend along the first direction and that are disposed on opposite sides of the cantilevered member, and first and second shafts movable with the movable platform. The shafts are coupled to the respective timing belts, to the robot arm such that rotation of the first shaft imparts angular motion to the robot arm and rotation of the second shaft imparts radial motion. The robot also includes a third timing belt to which the platform is coupled and by which it is moved. Motors are provided that impart movement to the timing belts.

Abstract: A method and apparatus for a transfer robot that may be used in a vacuum environment is described. The transfer robot includes a lift assembly comprising a first platform and a second platform coupled to the first platform by a plurality of support members, the plurality of support members comprising a first pair of support members and a second pair of support members, a first drive assembly coupled to a portion of the plurality of support members, the first drive assembly providing a motive force to the plurality of support members to move the second platform in a first linear direction relative to the first platform, and an end effector disposed on the second platform and movable in a second linear direction by a second drive assembly, the second linear direction being orthogonal to the first linear direction.

Abstract: A palletizing robot includes at least one rotatable pallet; a crane comprising a rotary base, a lifting frame fixed on the rotary base, and an extensible mechanical hand slidably engaged to the lifting frame to grasp a good; and a controller. The controller controls the crane and the at least one rotatable pallet to cooperatively stack the goods on the rotatable pallet, and control the at least one rotatable pallet to rotate itself to package the stacked goods.

Abstract: A handling manipulator assembly comprises a vertical extending main support (2) arranged on a rotary plate (3). Arranged on the main support (2) is a vertically travelling vertical carriage (9) to which a horizontal extension arm (12) is secured. Mounted on the horizontal extension arm (12) is an articulated arm (14) provided at the end with a manipulator gripper (18). Such a handling manipulator assembly (1) is suitable to advantage to feed/remove tools or workpieces to/from a machine tool provided with a front portal.

Abstract: A workpiece transfer apparatus includes a stationary base, an elevation base, first and second arms, a workpiece-holding hand, and a driving mechanism for the hand. The first arm is supported on the elevation base so as to be rotatable about a first vertical axis. The second arm is supported on the distal end of the first arm such that the second arm is rotatable about a second vertical axis. The hand is supported on the distal end of the second arm so as to be rotatable about a third vertical axis. A motor is arranged in the first arm, whereas a transmission is arranged to extend in a region from the interior of the first arm through the interior of the second arm.

Abstract: A robot has a robot arm, a support structure, and a movable platform. The platform includes a cantilevered member coupled to a guide of the support structure such that motion of the platform is directed along a first direction. The robot further includes first and second timing belts having portions that extend along the first direction and that are disposed on opposite sides of the cantilevered member, and first and second shafts movable with the movable platform. The shafts are coupled to the respective timing belts, to the robot arm such that rotation of the first shaft imparts angular motion to the robot arm and rotation of the second shaft imparts radial motion. The robot also includes a third timing belt to which the platform is coupled and by which it is moved. Motors are provided that impart movement to the timing belts.

Abstract: A gripper unit includes a gripper body and first and second arcuate fingers that are pivotally mounted on the gripper body for rotation about parallel first and second axes. The first and second fingers have inner surfaces that face each other, each of the inner surfaces including longitudinal grooves. A gripper assembly of this configuration may be particularly suited for gripping bottles of different sizes and configurations, particularly those that have a lip or ridge on the bottle neck.

Abstract: Embodiments of dual arm substrate transfer robots are provided herein. In some embodiments, a dual arm substrate transfer robot may include a central actuator to rotate the transfer robot about a central axis; a linkage arm having a first end and a generally opposing second end, wherein the linkage arm is coupled to the central actuator proximate a center of the linkage arm between the first and second ends; a first forearm rotatably coupled to the first end of the linkage arm; a second forearm rotatably coupled to the second end of the linkage arm; a first forearm actuator to control the rotation of the first forearm with respect to the linkage arm; and a second forearm actuator to control the rotation of the second forearm with respect to the linkage arm, wherein the first and second forearm actuators are laterally offset from the central actuator.

Abstract: A product delivery system for delivering a product from a storage area to a dispensing area, such as for use in a vending machine. The product delivery system may include a vacuum holding device, a robotic positioning system, a reel and cable system, and a controller. A feature is the provision of a picker head with a built-in vacuum generating source that may be carried by a robotically movable arm system.

Abstract: A robot assembly for transporting a substrate is presented. The robot assembly having a first arm and a second arm supported by a column, the first arm further having a first limb, the first limb having a first set of revolute joint/line pairs configured to provide translation and rotation of the distalmost link of the first limb in the horizontal plane. The assembly further having a second arm further having a second limb, the second limb comprising a second set of revolute joint/link pairs configured to provide translation and rotation of a distalmost link of the second limb in the horizontal plane. The first limb and second limb further having proximal revolute joints having a common vertical axis of rotation and a proximal inner joint housed in a common housing.

Abstract: In the wafer position teaching method for a wafer carrying system, a teaching tool is mounted at a position of the container or the processing equipment where the semiconductor wafer is to be set. The teaching tool is sensed by a sensor provided at a wafer gripping portion of the robot. Prior to sensing the teaching tool by the sensor, external teaching tools mounted on a front external wall of the processing equipment are sensed by the sensor to roughly estimate the position of the teaching tool. Based on the estimated position, the sensor approaches and senses the teaching tool to obtain the position of the semiconductor wafer. Thus, the wafer position can be taught precisely and automatically without causing interference, even when the frontage of processing equipment is narrow.

Abstract: A load balancing pneumatic manipulator comprising an inflatable reservoir for establishing via an amplifier a pressure within a lift cylinder that is sufficient to balance the weight of an object being lifted. The reservoir is inflated and deflated by inflation and deflation valves, respectively, that may be operated from an operator control center proximal an end effector of the manipulator. The valves may be actuated via pushbuttons or actuated in a mutually exclusively fashion via a neutrally biased reciprocating actuator. The manipulator advantageously allows loads of different weights to be lifted in a semi-automatic fashion with operator involvement to select the load balancing pressure. The manipulator further comprises an air release system that closes a blocking valve in the event of release of the object being lifted and optionally in the event of a loss of air supply pressure.

Abstract: A method is provided for teaching a transfer robot used in conjunction with a workpiece processing system including a pedestal assembly, a light sensor having an optical input fixedly coupled to the pedestal assembly, a transfer robot having an end effector, and a processing chamber containing the pedestal assembly and light sensor. The method includes the steps of producing light within the processing chamber, moving the end effector over the optical input such that amount of light reaching the light sensor varies in relation to the position of the end effector, and recording the signal gain as the end effector is moved over the optical input. The method also includes the step of establishing from the recorded signal gain a desired position of the end effector relative to the pedestal assembly.

Abstract: A tool-changing device includes a tool gripper and a stroke and pivoting actuator for operating the tool gripper. The stroke and pivoting actuator can be driven by a first direct drive for producing a linear movement and by a second direct drive for producing a rotational movement, wherein the first and the second direct drives have a common rotor which serves as the stroke and pivoting actuator.

Abstract: A receiving device in a dosage-dispensing device, which serves to receive any insertion unit that can be inserted in the receiving device, includes a plurality of support arms that are arranged parallel to each other and extend in their lengthwise direction substantially orthogonal to the direction of gravity. At least two support arms are arranged in planes lying above one another relative to the direction of gravity. Each support arm includes at least one support location, so that, when the dosage-dispensing device is in its operating state, the insertion unit can be supported through the support locations against the force of gravity. Each support arm includes at least one protrusion which serves to position the insertion unit in a plane that extends orthogonal to the direction of gravity. The main dimension of the protrusion is directed essentially against the direction of gravity.

Abstract: A transfer apparatus includes a stationary base, a lift base, a lifting mechanism for vertically moving the lift base, a rotary base mounted to the lift base, a rotating mechanism for rotating the rotary base about a vertical rotation axis, a linear moving mechanism supported by the rotary base, and a work hand supported by the linear moving mechanism. The lifting mechanism includes a slide guide mechanism for vertical movement of the lift base, and first and second screw-feeding mechanisms. Each screw-feeding mechanism includes a rotatable vertical screw shaft, and a nut member provided on the lift base and screwed onto the screw shaft. The first and the second screw-feeding mechanisms are spaced from each other, with the rotation axis of the rotary base being located between the first and the second screw-feeding mechanisms.

Abstract: A robot that includes an end effector for holding a substrate in a substantially horizontal state; a vertical driving unit for driving the end effector to move in a vertical direction; a horizontal driving unit for driving the vertical driving unit to move in a horizontal direction; and a rotation driving unit for rotating the horizontal driving unit about a rotation axis extending in the vertical direction. In this case, one end of the end effector is connected with the vertical driving unit. One end of the vertical driving unit is connected with the horizontal driving unit.

Abstract: A wireless controller for controlling and/or monitoring a device arranged mounted on or relative to an industrial robot. A wireless communicator including a processor arranged with software means handles wireless communication to and from the device. A control carries out at least one control function for one or more actuators of the device. Also, a method, a computer program and a graphic user interface.

Abstract: A transfer apparatus includes a fixed base, a swivel, a lift mechanism for raising and lowering the swivel relative to the fixed base, a swivel mechanism for turning the swivel about a vertical swivel axis, a linear movement mechanism supported by the swivel, and a hand supported by the linear movement mechanism for transportation of a work along a linear horizontal travel stroke. The lift mechanism includes N (N is an integer equal to or greater than 2) lift members arranged for telescopic expansion and retraction relative to the fixed base. The lift mechanism also includes N lift drive mechanisms each for raising and lowering one of the lift members relative to an immediate lower-stage lift member. The swivel is supported by an uppermost one of the lift members. (FIG.

Abstract: A robot comprises a fixed member that has a lower end, a movable member, and an elastic sheet member. The movable member is supported by the fixed member to be movable between an uppermost position and a lowermost position of a movable range given to the movable member in a vertical direction relative to the fixed member. This movable member has a lower end at which an operation tool is provided The elastic sheet member has both ends. Of these ends, one end is fixed to the lower end of the fixed member and the other end is fixed to the lower end of the movable member. This sheet member droops when the movable member moves up to the uppermost position of the fixed member.

Abstract: An automation apparatus and method includes a first unit rotationally moving objects from one area to another, and a second unit connected to the first unit and holding the objects, moving through or offset from the body of the first unit from a first side of the first unit to the other side the first unit in a direction other than the rotational movement by the first unit. Moreover, the apparatus and method provides moving the objects through a vertical axis of the body of the first unit.

Abstract: A system for controlling a work machine and work tool from a remote controller. The remote controller sends a control signal to a receiver assembly and machine controller. The machine controller processes the control signal to determine the location of the remote controller relative to the receiver assembly and to alter operational characteristics of the machine or work tool based on the control signal or the location of the remote controller relative to the receiver assembly. The system may include a tag system to detect the presence of workers at the jobsite and to alter operation of the machine and work tool based upon the location of the workers relative to the machine or work tool. In another embodiment, a signal may be transmitted from the work machine and detected by a remote receiver assembly. A processor uses the detected signal to determine the position of the remote receiver assembly relative to the work machine.

Abstract: A manipulator apparatus carries tools for connecting drillpipes to the drillstring in a wellbore on a drilling platform. A telescopically extendable horizontal work arm is carried on a telescopically extendable vertical column, and the tools are to be mounted on a free end of the work arm. The column is manually rotatable about a vertical axis. The column and the work arm are each respectively formed of a fixed element and a telescopically extendable element. The fixed element is preferably formed of two U-profile members arranged back-to-back, and the extendable element includes an H-profile member with its web received between the webs of the two U-profile members. This forms a telescopic slide bearing of the H-profile member sliding along the two U-profile members. The hydraulic cylinders are received in the recessed spaces of the profile members.

Abstract: A linear transfer mechanism includes a guide member, a transfer carriage movable along a horizontal linear transfer path provided on the guide member, and a drive mechanism provided with a drive pulley and an output belt wound around the drive pulley for reciprocating movement in a reciprocating movement section in parallel to the transfer path. The transfer mechanism also includes a drive source for driving the drive pulley. The transfer carriage is connected with the output belt of the drive mechanism by a connecting member. Both the drive mechanism and the drive source are supported by the guide member.

Abstract: A handling device and method utilizes a clamping arm that is mounted on a guide rod. The axial direction and the rotation direction of the guide rod are intersected each other at right angles. Makes the clamping arm rotate in the rotation direction of the guide rod when the clamping arm is not restricted, and makes the clamping arm move in the axial direction of the guide rod when the clamping arm is restricted. By such arrangements, the clamping arm can perform handling in the horizontal direction and in the vertical direction.

Abstract: The present invention is a wafer engine for transporting wafers. The wafer engine includes a linear drive for moving the wafer along an x axis, a rotational drive for rotating the wafer about a theta axis, a linear drive for moving the wafer along a z axis, and a linear drive for moving the wafer along a radial axis. The linear drive for moving the wafer along a z axis is offset from the rotational drive. When the rotational drive rotates about the theta axis, both the z axis and radial axis drives are also rotated about the theta axis. Preferably, the linear drive for moving the wafer along a radial axis is a dual or rapid swap slide body mechanism having an upper and lower end effector. The slide body mechanism preferably also has means to align the wafer and perform various inspection and marking procedures.

Abstract: A handling apparatus for information storage disks includes a conveying apparatus and a mounting base. The conveying apparatus includes a body, a conveying arm, a transmission device and a driving device. The body includes an arm holder. The arm holder has a guide channel. The guide channel includes a transverse passage and a longitudinal passage. The conveying arm is movably mounted in the arm holder and moves along the guide channel. The transmission device connects the driving device to the conveying arm so that the driving device moves the conveying arm in the guide channel. When the conveying arm moves in the transverse passage, the conveying arm has at least one linear self-alignment for positioning.

Abstract: A manipulator apparatus carries tools for connecting drillpipes to the drillstring in a wellbore on a drilling platform. A telescopically extendable horizontal work arm is carried on a telescopically extendable vertical column, and the tools are to be mounted on a free end of the work arm. The column is manually rotatable about a vertical axis. The column and the work arm are each respectively formed of a fixed element and a telescopically extendable element. The fixed element is preferably formed of two U-profile members arranged back-to-back, and the extendable element includes an H-profile member with its web received between the webs of the two U-profile members. This forms a telescopic slide bearing of the H-profile member sliding along the two U-profile members. The hydraulic cylinders are received in the recessed spaces of the profile members.