Metal Carbide Containing Coating Patents (Class 427/249.17)
  • Patent number: 9770412
    Abstract: The present invention provides a method for controlling the internal diameter of nanopores to afford nanopore membranes with a zero-order rate of release of a therapeutic agent.
    Type: Grant
    Filed: January 23, 2015
    Date of Patent: September 26, 2017
    Assignee: NANO PRECISION MEDICAL, INC.
    Inventors: Adam D. Mendelsohn, Kathleen Fischer, Tomoyuki Yoshie
  • Patent number: 9245745
    Abstract: A method of manufacturing a semiconductor device, includes: forming a film containing a predetermined element on a substrate by performing a cycle a predetermined number of times, the cycle including: supplying a first precursor containing the predetermined element and a halogen group to the substrate; supplying a second precursor containing the predetermined element and an amino group to the substrate; and supplying a reducing agent not containing halogen, nitrogen and carbon to the substrate.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: January 26, 2016
    Assignee: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Atsushi Sano, Yoshiro Hirose
  • Patent number: 9214334
    Abstract: Methods of depositing conformal aluminum nitride films on semiconductor substrates are provided. Disclosed methods involve (a) exposing a substrate to an aluminum-containing precursor, (b) purging the aluminum-containing precursor for a duration insufficient to remove substantially all of the aluminum-containing precursor in gas phase, (c) exposing the substrate to a nitrogen-containing precursor to form aluminum nitride, (d) purging the nitrogen-containing precursor, and (e) repeating (a) through (d). Increased growth rate and 100% step coverage and conformality are attained.
    Type: Grant
    Filed: February 18, 2014
    Date of Patent: December 15, 2015
    Assignee: Lam Research Corporation
    Inventors: Shankar Swaminathan, Ananda Banerji, Nagraj Shankar, Adrien LaVoie
  • Patent number: 8993055
    Abstract: Methods of producing metal-containing thin films with low impurity contents on a substrate by atomic layer deposition (ALD) are provided. The methods preferably comprise contacting a substrate with alternating and sequential pulses of a metal source chemical, a second source chemical and a deposition enhancing agent. The deposition enhancing agent is preferably selected from the group consisting of hydrocarbons, hydrogen, hydrogen plasma, hydrogen radicals, silanes, germanium compounds, nitrogen compounds, and boron compounds. In some embodiments, the deposition-enhancing agent reacts with halide contaminants in the growing thin film, improving film properties.
    Type: Grant
    Filed: October 27, 2006
    Date of Patent: March 31, 2015
    Assignee: ASM International N.V.
    Inventors: Antti Rahtu, Eva Tois, Kai-Erik Elers, Wei-Min Li
  • Patent number: 8920871
    Abstract: Porous nuclear fuel elements for use in advanced high temperature gas-cooled nuclear reactors (HTGR's), and to processes for fabricating them. Advanced uranium bi-carbide, uranium tri-carbide and uranium carbonitride nuclear fuels can be used. These fuels have high melting temperatures, high thermal conductivity, and high resistance to erosion by hot hydrogen gas. Tri-carbide fuels, such as (U,Zr,Nb)C, can be fabricated using chemical vapor infiltration (CVI) to simultaneously deposit each of the three separate carbides, e.g., UC, ZrC, and NbC in a single CVI step. By using CVI, the nuclear fuel may be deposited inside of a highly porous skeletal structure made of, for example, reticulated vitreous carbon foam.
    Type: Grant
    Filed: August 27, 2013
    Date of Patent: December 30, 2014
    Assignee: Sandia Corporation
    Inventors: Dennis L. Youchison, Brian E. Williams, Robert E. Benander
  • Patent number: 8911867
    Abstract: The invention relates to a protective coating, having the chemical composition CaSibBdNeOgHlMem, wherein Me is at least one metal of the group consisting of {Al, Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W, Y, Sc, La, Ce, Nd, Pm, Sm, Pr, Mg, Ni, Co, Fe, Mn}, with a+b+d+e+g+l+m=1. According to the invention, the following conditions are satisfied: 0.45?a?0.98, 0.01?b?0.40, 0.01?d?0.30, 0?e?0.35, 0?g?0.20, 0?l?0.35, 0?m?0.20. The invention relates also to a coated member having a protective coating, as well as to a method for producing a protective coating, in particular a multilayer film for a member.
    Type: Grant
    Filed: June 18, 2009
    Date of Patent: December 16, 2014
    Assignee: Oerlikon Metaplas GmbH
    Inventor: Jörg Vetter
  • Patent number: 8864917
    Abstract: One exemplary embodiment includes a process for forming a hard carbide coating onto a low chromium-containing steel article via a chemical deposition process carried out on a particulate mix, in which molybdenum in the form of a compound FeMo or titanium in the form of a compound FeTi, or a mixture of FeMo and FeTi, may be added to the particulate mix used to form the coating.
    Type: Grant
    Filed: October 7, 2009
    Date of Patent: October 21, 2014
    Assignee: BorgWarner Inc.
    Inventor: Manoj Thete
  • Publication number: 20140287249
    Abstract: The invention relates to a method for coating, by means of a chemical vapour deposition (CVD) technique, a part with a coating (PAO) for protecting against oxidation. The method enables the preparation of a refractory coating for protecting against oxidation, having a three-dimensional microstructure, which ensures the protection against oxidation at a high temperature, generally at a temperature above 1200° C., for materials that are sensitive to oxidation, such as composite materials, and in particular carbon/carbon composite materials.
    Type: Application
    Filed: November 23, 2012
    Publication date: September 25, 2014
    Inventors: Alexandre Allemand, Olivier Szwedek, Jean-Francois Epherre, Yann Le Petitcorps
  • Publication number: 20140127405
    Abstract: Methods of forming metal carbide films are provided. In some embodiments, a substrate is exposed to alternating pulses of a transition metal species and an aluminum hydrocarbon compound, such as TMA, DMAH, or TEA. The aluminum hydrocarbon compound is selected to achieve the desired properties of the metal carbide film, such as aluminum concentration, resistivity, adhesion and oxidation resistance. In some embodiments, the methods are used to form a metal carbide layer that determines the work function of a control gate in a flash memory.
    Type: Application
    Filed: November 1, 2013
    Publication date: May 8, 2014
    Applicant: ASM AMERICA, INC.
    Inventors: Dong Li, Steven Marcus, Suvi P. Haukka, Wei-Min Li
  • Patent number: 8657959
    Abstract: An apparatus for atomic layer deposition of a material on a moving substrate comprises a conveying arrangement for moving a substrate along a predetermined planar or curved path of travel and a coating bar having at least one precursor delivery channel. The precursor delivery channel conducts a fluid containing a material to be deposited on a substrate toward the path of travel. When in use, a substrate movable along the path of travel defines a gap between the outlet end of the precursor delivery channel and the substrate. The gap defines an impedance Zg to a flow of fluid from the precursor delivery channel. A flow restrictor is disposed within the precursor delivery channel that presents a predetermined impedance Zfc to the flow therethrough. The restrictor is sized such that the impedance Zfc is at least five (5) times, and more preferably at least fifteen (15) times, the impedance Zg. The impedance Zfc has a friction factor f.
    Type: Grant
    Filed: December 16, 2010
    Date of Patent: February 25, 2014
    Assignee: E I du Pont de Nemours and Company
    Inventors: Geoffrey Nunes, Richard Dale Kinard
  • Publication number: 20130183445
    Abstract: Methods of producing metal-containing thin films with low impurity contents on a substrate by atomic layer deposition (ALD) are provided. The methods preferably comprise contacting a substrate with alternating and sequential pulses of a metal source chemical, a second source chemical and a deposition enhancing agent. The deposition enhancing agent is preferably selected from the group consisting of hydrocarbons, hydrogen, hydrogen plasma, hydrogen radicals, silanes, germanium compounds, nitrogen compounds, and boron compounds. In some embodiments, the deposition-enhancing agent reacts with halide contaminants in the growing thin film, improving film properties.
    Type: Application
    Filed: February 13, 2013
    Publication date: July 18, 2013
    Applicant: ASM INTERNATIONAL N.V.
    Inventor: ASM International N.V.
  • Patent number: 8470434
    Abstract: The invention relates to a transparent glass substrate, associated with a transparent electro-conductive layer capable of constituting an electrode of a photovoltaic cell and composed of a doped oxide, characterized by the interposition, between the glass substrate and the transparent electroconductive layer, of a mixed layer of one or more first nitride(s) or oxynitride(s), or oxide(s) or oxycarbide(s) having good adhesive properties with glass, and one or more second nitride(s) or oxynitride(s) or oxide(s) or oxycarbide(s) capable of constituting, possibly in the doped state, a transparent electroconductive layer; a method for producing this substrate; a photovoltaic cell, a tempered and/or curved glass, a shaped heating glass, a plasma screen and a flat lamp electrode having this substrate.
    Type: Grant
    Filed: January 14, 2008
    Date of Patent: June 25, 2013
    Assignee: Saint-Gobain Glass France
    Inventors: Bernard Nghiem, Emilie Viasnoff, Bertrand Kuhn, David Le Bellac, Anne Durandeau, Fabrice Abbott, Eddy Royer, Georges Zagdoun, Olivier Dubois
  • Publication number: 20130157062
    Abstract: Provision of a laminate excellent in weather resistance and gas barrier property and also excellent in adhesion between layers and its durability; and a process for producing such a laminate. A laminate which comprises a substrate sheet containing a fluororesin, and a gas barrier layer containing, as the main component, an inorganic compound composed of a metal and at least one member selected from the group consisting of oxygen, nitrogen and carbon, the gas barrier layer being directly laminated on at least one surface of the substrate sheet; wherein in a C1s spectrum of a surface of the substrate sheet on which the gas barrier layer is laminated, that is measured by X-ray photoelectron spectroscopy, the position of the highest peak present within a binding energy range of from 289 to 291 eV is present within a range of from 290.1 to 290.6 eV.
    Type: Application
    Filed: February 12, 2013
    Publication date: June 20, 2013
    Applicant: Asahi Glass Company, Limited
    Inventor: Asahi Glass Company, Limited
  • Patent number: 8449943
    Abstract: A brake disk formed of a light weight ceramic and ceramic composite materials, the brake disk having a coating overlying at least a portion of the brake disk. The brake disk includes parallel surfaces wherein at least a portion of the parallel surfaces are coated with a coating material to increase wear resistance and decrease corrosion. The coating over the brake disk includes multiple layers of the coating material, wherein the coating material includes coating material particles configured to construct a pattern of repetition that is consistent with a lattice structure when applied over the parallel surfaces of the brake disk.
    Type: Grant
    Filed: February 20, 2008
    Date of Patent: May 28, 2013
    Assignee: Tech M3, Inc.
    Inventor: Nathan K. Meckel
  • Publication number: 20130078455
    Abstract: Described are methods for deposition of metal-aluminum films using metal PCAI precursors and aluminum precursors. Such metal-aluminum films can include metal aluminum carbide, metal aluminum nitride and metal aluminum carbonitride films. The aluminum precursors may be alkyl aluminum precursors or amine alanes.
    Type: Application
    Filed: September 14, 2012
    Publication date: March 28, 2013
    Applicant: Applied Materials, Inc.
    Inventors: David Thompson, Jeffrey W. Anthis
  • Publication number: 20130078454
    Abstract: Described are methods for deposition of metal-aluminum films using metal amidinate precursors and aluminum precursors. Such metal-aluminum films can include metal aluminum carbide, metal aluminum nitride and metal aluminum carbonitride films. The aluminum precursors may be alkyl aluminum precursors or amine alanes.
    Type: Application
    Filed: September 14, 2012
    Publication date: March 28, 2013
    Applicant: Applied Materials, Inc.
    Inventors: David Thompson, Jeffrey W. Anthis
  • Publication number: 20130065706
    Abstract: An approach is provided for coating a golf club head with a material. The approach involves securing a first golf club head component to a second golf club head component using an adhesive, resulting in a golf club head main body having an exterior surface. The approach further includes physical vapor depositing at least one layer on at least a portion of the exterior surface of the golf club head main body at a temperature less than a melting point of the adhesive.
    Type: Application
    Filed: September 14, 2011
    Publication date: March 14, 2013
    Applicant: SRI SPORTS LIMITED
    Inventors: Sharon J. PARK, Joseph C. CHEN
  • Publication number: 20120292500
    Abstract: A mass spectrometer includes an ion source, which includes a coating or surface formed of a metallic carbide, a metallic boride, a ceramic or DLC, or an ion-implanted transition metal.
    Type: Application
    Filed: November 11, 2011
    Publication date: November 22, 2012
    Applicant: MICROMASS UK LIMITED
    Inventors: Gordon A. Jones, David S. Douce, Amir Farooq
  • Publication number: 20120118686
    Abstract: A brake disk including carbon steel, stainless steel or a ceramic composite material and coated with a coating material that is wear and corrosion resistant and when applied properly allows for the coated surface to have a variety of “textured” appearances. For example, the coated surface can be made to look like woven carbon fiber. The aesthetically pleasing, wear and corrosion resistant coating overlays wear surfaces and portions of the brake disk that will be, in many cases, visible when the brake disk is installed on the vehicle. The coating includes a first layer of a metal, such as a pure titanium metal, and a second layer that can include a Nitride, Boride, Carbide or Oxide of the metal used in the first layer. The coating can be applied using a physical vapor deposition source such as a cathodic arc source with a controlled gas atmosphere.
    Type: Application
    Filed: December 23, 2011
    Publication date: May 17, 2012
    Applicant: Tech M3, Inc.
    Inventor: Nathan K. Meckel
  • Patent number: 8133429
    Abstract: In a method of forming a chalcogenide compound target, a first powder including germanium carbide or germanium is prepared, and a second powder including antimony carbide or antimony is prepared. A third powder including tellurium carbide or tellurium is prepared. A powder mixture is formed by mixing the first to the third powders. After a shaped is formed body by molding the powder mixture. The chalcogenide compound target is obtained by sintering the powder mixture. The chalcogenide compound target may include a chalcogenide compound that contains carbon and metal, or carbon, metal and nitrogen considering contents of carbon, metal and nitrogen, so that a phase-change material layer formed using the chalcogenide compound target may stable phase transition, enhanced crystallized temperature and increased resistance. A phase-change memory device including the phase-change material layer may have reduced set resistance and driving current while improving durability and sensing margin.
    Type: Grant
    Filed: April 19, 2010
    Date of Patent: March 13, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yong-Ho Ha, Bong-Jin Kuh, Han-Bong Ko, Doo-Hwan Park, Sang-Wook Lim, Hee-Ju Shin
  • Patent number: 8100083
    Abstract: A process and apparatus for depositing a ceramic coating, such as a thermal barrier coating (TBC) for a gas turbine engine component. The process deposits a coating whose composition includes multiple oxide compounds and a carbon-based constituent, e.g., elemental carbon, carbides, and carbon-based gases. The process uses at least one evaporation source to provide multiple different oxide compounds and at least one carbide compound comprising carbon and an element. The evaporation source is evaporated to produce a vapor cloud that contacts and condenses on the component surface to form the ceramic coating, and particularly so that the coating comprises the oxide compounds, an oxide of the element of the carbide compound, and the carbide compound and/or a carbon-containing gas. The process is carried out with an apparatus comprising a coating chamber in which the evaporation source is present, and a device for evaporating the evaporation source.
    Type: Grant
    Filed: September 16, 2010
    Date of Patent: January 24, 2012
    Assignee: General Electric Company
    Inventors: Ramgopal Darolia, Irene Spitsberg, Brett Allen Rohrer Boutwell
  • Patent number: 8088436
    Abstract: This invention relates to a preparation method and equipment of graphite and catalyst composite for a kind of synthetic diamond. Firstly, graphite particles shall be placed into the heating chamber for pre-heating; secondly, the heated graphite particle will be fed into the coating room with vibrator or agitator and steam of carbonyl metal complex is input for coating; finally, the coated graphite particles are fed into a cooling and passivation room for cooling and passivation of the discharging materials or enter a next round of heating and coating. The surface of each graphite particle is plated with metal layer which can promote the crystal nucleus growing into perfect diamond crystal.
    Type: Grant
    Filed: December 28, 2007
    Date of Patent: January 3, 2012
    Assignee: Jiangsu Tianyi Micro Metal Powder Co., Ltd.
    Inventors: Weixing Gao, Bin Wang, Zunbin Ke
  • Patent number: 8012535
    Abstract: The invention relates to a method for producing a coated substrate body by chemical vapor deposition at least on one layer made of a carbonitride of a metal of IVa-Vla-groups of the periodic table, wherein a monocyclic hydrocarbon is used in the gas atmosphere during the deposition, in addition to a nitrile. According to the invention, the thus produced coated substrate body has a high degree of hardness and is used, preferably, in cutting operations where the cutting speeds are ?250 m/min.
    Type: Grant
    Filed: October 7, 2006
    Date of Patent: September 6, 2011
    Assignee: Kennametal Widia Produktions GmbH & Co KG
    Inventors: Volkmar Sottke, Doris Lenk, Hartmut Westphal, Hendrikus Van Den Berg
  • Patent number: 7985449
    Abstract: A process is described for depositing a metal film on a substrate surface having a diffusion barrier layer deposited thereupon. In one embodiment of the present invention, the process includes: providing a surface of the diffusion barrier layer that is substantially free of an elemental metal and forming the metal film on at least a portion of the surface via deposition by using a organometallic precursor. In certain embodiments, the diffusion barrier layer may be exposed to an adhesion promoting agent prior to or during at least a portion of the forming step. Suitable adhesion promoting agents include nitrogen, nitrogen-containing compounds, carbon-containing compounds, carbon and nitrogen containing compounds, silicon-containing compounds, silicon and carbon containing compounds, silicon, carbon, and nitrogen containing compounds, or mixtures thereof. The process of the present invention provides substrates having enhanced adhesion between the diffusion barrier layer and the metal film.
    Type: Grant
    Filed: April 20, 2007
    Date of Patent: July 26, 2011
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Diwakar Garg, Hansong Cheng, John Anthony Thomas Norman, Eduardo Machado, Pablo Ordejon
  • Patent number: 7968218
    Abstract: A method for coating a tool or tool part, includes providing a base structure of the tool or the tool part at a temperature of 850° C. to 950° C. and applying at least one layer to the base structure. One or more layers of the at least one layer is formed of a metal carbonitride of composed of at least one of titanium, zirconium, hafnium, vanadium, niobium, tantalum and chromium. The one or more layers of the at least one layer is deposited by a deposition of a gas containing methane, nitrogen and at least one metal compound. After beginning the applying, the temperature is increased by at least 40° C. to an increased temperature and the deposition is continued for a time at the increased temperature.
    Type: Grant
    Filed: November 16, 2006
    Date of Patent: June 28, 2011
    Assignee: Boehlerit GmbH & Co. K.G.
    Inventors: Reinhard Pitonak, Jose Garcia, Ronald Weissenbacher, Klaus Ruetz-Udier
  • Patent number: 7964515
    Abstract: A method is provided for forming high dielectric constant (high-k) films for semiconductor devices. According to one embodiment, a metal-carbon-oxygen high-k film is deposited by alternately and sequentially exposing a substrate to a metal-carbon precursor and near saturation exposure level of an oxidation source containing ozone. The method is capable of forming a metal-carbon-oxygen high-k film with good thickness uniformity while impeding growth of an interface layer between the metal-carbon-oxygen high-k film and the substrate. According to one embodiment, the metal-carbon-oxygen high-k film may be treated with an oxidation process to remove carbon from the film.
    Type: Grant
    Filed: December 21, 2007
    Date of Patent: June 21, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Robert D. Clark, Cory Wajda
  • Publication number: 20110135897
    Abstract: A tool or wear part has a coating formed over a substrate. The coating includes at least one sequence of a ductile nano-layer located between two hard layers, though the coating may have several such sequences created by alternating ductile nano-layers with hard layers, with adjacent sequences sharing a hard layer. The various hard layers may differ in composition from one another, as can the ductile nano-layers. An optional adhesion layer may be provided between the substrate and the sequence, and an optional top layer may be provided over the outermost hard layer. The various layers may be deposited by physical vapor deposition in a single chamber.
    Type: Application
    Filed: November 23, 2010
    Publication date: June 9, 2011
    Applicant: Iscar, Ltd.
    Inventor: Albir Layyous
  • Publication number: 20110086167
    Abstract: An apparatus for atomic layer deposition of a material on a moving substrate comprises a conveying arrangement for moving a substrate along a predetermined planar or curved path of travel and a coating bar having at least one precursor delivery channel. The precursor delivery channel conducts a fluid containing a material to be deposited on a substrate toward the path of travel. When in use, a substrate movable along the path of travel defines a gap between the outlet end of the precursor delivery channel and the substrate. The gap defines an impedance Zg to a flow of fluid from the precursor delivery channel. A flow restrictor is disposed within the precursor delivery channel that presents a predetermined impedance Zfc to the flow therethrough. The restrictor is sized such that the impedance Zfc is at least five (5) times, and more preferably at least fifteen (15) times, the impedance Zg. The impedance Zfc has a friction factor f.
    Type: Application
    Filed: December 16, 2010
    Publication date: April 14, 2011
    Applicant: E. I. DU PONT DE NEMOURS AND COMPANY
    Inventors: GEOFFREY NUNES, RICHARD DALE KINARD
  • Patent number: 7910210
    Abstract: In a method of producing a layer arrangement, a substantially carbon-comprising, electrically conductive carbon layer is formed. A protective layer is formed on the carbon layer. An electrically insulating layer is formed on the protective layer, the protective layer protecting the carbon layer from damage during the formation of the electrically insulating layer. Furthermore, a layer arrangement is provided, having a substantially carbon-comprising, electrically conductive carbon layer, a protective layer formed on the carbon layer, and an electrically insulating layer formed on the protective layer, the protective layer being used to avoid damage to the carbon layer by the electrically insulating layer.
    Type: Grant
    Filed: November 20, 2006
    Date of Patent: March 22, 2011
    Assignee: Rising Silicon, Inc.
    Inventors: Franz Kreupl, Maik Liebau, Georg Duesberg, Christian Kapteyn
  • Publication number: 20110052931
    Abstract: The present disclosure is directed to cutting tools. The disclosed cutting tools may have a wear resistant coating on a substrate. The substrate may have hard particles cemented in a binder phase. The binder may have a near-surface concentration gradient of at least one platinum group element and/or rhenium. Processes for producing cutting tools are also disclosed.
    Type: Application
    Filed: August 25, 2009
    Publication date: March 3, 2011
    Applicant: TDY Industries, Inc.
    Inventors: Craig W. Morton, Dewitt Dortch, John Bost, David J. Wills
  • Publication number: 20110003075
    Abstract: A process and apparatus for depositing a ceramic coating, such as a thermal barrier coating (TBC) for a gas turbine engine component. The process deposits a coating whose composition includes multiple oxide compounds and a carbon-based constituent, e.g., elemental carbon, carbides, and carbon-based gases. The process uses at least one evaporation source to provide multiple different oxide compounds and at least one carbide compound comprising carbon and an element. The evaporation source is evaporated to produce a vapor cloud that contacts and condenses on the component surface to form the ceramic coating, and particularly so that the coating comprises the oxide compounds, an oxide of the element of the carbide compound, and the carbide compound and/or a carbon-containing gas. The process is carried out with an apparatus comprising a coating chamber in which the evaporation source is present, and a device for evaporating the evaporation source.
    Type: Application
    Filed: September 16, 2010
    Publication date: January 6, 2011
    Applicant: GENERAL ELECTRIC COMPANY
    Inventors: Ramgopal Darolia, Irene Spitsberg, Brett Allen Rohrer Boutwell
  • Publication number: 20100291298
    Abstract: The present embodiments relate methods of preparing metal carbides, for example some embodiments relate to methods of preparing metal carbides that do not contain the formation of an intermediate oxide compound. Some embodiments relate to methods that do not employ hydrocarbons in the reaction. Some embodiments relate to a method of preparing metal carbides that involves citrate gel precursors and a non-hydrocarbon gas but does not use a hydrocarbon gas, does not form an oxide intermediate species and does not produce carbon monoxide. In some embodiments, the metal carbides are transition metal carbides.
    Type: Application
    Filed: May 12, 2009
    Publication date: November 18, 2010
    Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Karen Swider Lyons, Arnold M. Stux
  • Patent number: 7824733
    Abstract: A process for producing a wear-resistant coating and to a wear-resistant coating on predetermined surfaces (2) of machine or engine parts (1) consisting of a sintered material which are exposed to frictional wear, for fuel feed units in particular, comprising at least one metal-free amorphous hydrocarbon layer (5) with sp2- and sp3-hybridized carbon applied to the predetermined surface (2) of the machine or engine part (I) for reducing friction and increasing the wear resistance of the predetermined surface (2) of the machine or engine part (1), and at least one intermediate layer of a metal-containing hydrocarbon layer formed between the predetermined surface of the machine or engine part and the amorphous hydrocarbon layer wherein the metal is a combination of W, Ti, Hf and Ge.
    Type: Grant
    Filed: July 23, 2008
    Date of Patent: November 2, 2010
    Assignee: Schaeffler KG
    Inventors: Tim Matthias Hosenfeldt, Martin Kramer, Alexander Freiburg
  • Patent number: 7799163
    Abstract: This invention relates to a process for preparing a substrate-supported aligned carbon nanotube film including: synthesizing a layer of aligned carbon nanotubes on the substrate capable of supporting nanotube growth, applying a layer of a second substrate to a top surface of aligned carbon nanotube layer, removing said substrate capable of supporting nanotube growth to provide an aligned carbon nanotube film supported on said second substrate.
    Type: Grant
    Filed: May 25, 2000
    Date of Patent: September 21, 2010
    Assignee: University of Dayton
    Inventors: Albert Mau, Li-ming Dai, Shaoming Huang
  • Publication number: 20100227176
    Abstract: A transparent conductive film containing magnesium, at least one element (A) selected from the group consisting of carbon, silicon and boron, plus oxygen, and hydrogen. For example, this transparent conductive film may be manufactured by forming a film containing magnesium and an element (A) on a substrate and holding the film in an atmosphere containing water, which forming uses a target containing magnesium and a target containing the element (A) being at least one selected from the group consisting of carbon, silicon and boron.
    Type: Application
    Filed: October 10, 2008
    Publication date: September 9, 2010
    Applicants: TOKAI UNIVERSITY EDUCATIONAL SYSTEM, AISEKKU NANO TYUBU CO., LTD.
    Inventors: Toshiro Kuji, Masafumi Chiba, Takamitsu Honjo, Koichiro Kotoda
  • Patent number: 7666463
    Abstract: Methods for manufacturing porous nuclear fuel elements for use in advanced high temperature gas-cooled nuclear reactors (HTGR's). Advanced uranium bi-carbide, uranium tri-carbide and uranium carbonitride nuclear fuels can be used. These fuels have high melting temperatures, high thermal conductivity, and high resistance to erosion by hot hydrogen gas. Tri-carbide fuels, such as (U,Zr,Nb)C, can be fabricated using chemical vapor infiltration (CVI) to simultaneously deposit each of the three separate carbides, e.g., UC, ZrC, and NbC in a single CVI step. By using CVI, a thin coating of nuclear fuel may be deposited inside of a highly porous skeletal structure made, for example, of reticulated vitreous carbon foam.
    Type: Grant
    Filed: May 17, 2006
    Date of Patent: February 23, 2010
    Assignee: Sandia Corporation
    Inventors: Dennis L. Youchison, Brian E. Williams, Robert E. Benander
  • Patent number: 7645484
    Abstract: A method for forming a metal carbide or metal carbonitride film on a substrate using a vapor deposition process. The method includes comprises introducing a first process material, such as a film precursor, to the substrate followed by introducing a second process material, such as a film reducing agent, to the substrate, whereby plasma can be formed during the introduction of the second process material in order to assist reduction of the first process material on the substrate. Additionally, the temperature of the substrate is elevated to a value approximately equal to or greater than the decomposition temperature of the first process material in order to improve adhesion properties for the metal carbide or metal carbonitride film.
    Type: Grant
    Filed: March 31, 2006
    Date of Patent: January 12, 2010
    Assignee: Tokyo Electron Limited
    Inventor: Tadahiro Ishizaka
  • Publication number: 20090263613
    Abstract: An optical information recording medium that can simultaneously achieve both a high transmittance and high signal quality of an information layer, improve the reliability of long-term conservation, and reduce the manufacturing cost, and a manufacturing method thereof are provided. To achieve this, according to the present invention, in an optical information recording medium comprising at least one information layer on a substrate, at least one of the information layers has a recording layer and a dielectric layer, the recording layer contains Te, O, and M (M is one or a plurality of elements selected from Au, Pd, and Pt) as major components, the dielectric layer has a thermal conductivity of 0.01 W/K·cm or more, and the dielectric layer has an extinction coefficient of 0 through 1.0 inclusive.
    Type: Application
    Filed: October 30, 2006
    Publication date: October 22, 2009
    Inventors: Haruhiko Habuta, Morio Tomiyama, Hideki Kitaura
  • Patent number: 7550385
    Abstract: A method for forming a metal carbide layer begins with providing a substrate, an organometallic precursor material, at least one doping agent such as nitrogen, and a plasma such as a hydrogen plasma. The substrate is placed within a reaction chamber; and heated. A process cycle is then performed, where the process cycle includes pulsing the organometallic precursor material into the reaction chamber, pulsing the doping agent into the reaction chamber, and pulsing the plasma into the reaction chamber, such that the organometallic precursor material, the doping agent, and the plasma react at the surface of the substrate to form a metal carbide layer. The process cycles can be repeated and varied to form a graded metal carbide layer.
    Type: Grant
    Filed: September 30, 2005
    Date of Patent: June 23, 2009
    Assignee: Intel Corporation
    Inventors: Adrien R. Lavoie, Valery M. Dubin, Juan E. Dominguez, Kevin P. O'Brien, Steven W. Johnston, John D. Peck, David M. Thompson, David W. Peters
  • Patent number: 7524791
    Abstract: A method for producing a substrate having a carbon-doped titanium oxide layer, which is excellent in durability (high hardness, scratch resistance, wear resistance, chemical resistance, heat resistance) and functions as a visible light responding photocatalyst, is provided. The surface of a substrate, which has at least a surface layer comprising titanium, a titanium alloy, a titanium alloy oxide, or titanium oxide, is heat-treated in a combustion gas atmosphere of a gas consisting essentially of a hydrocarbon, or in a gas atmosphere consisting essentially of a hydrocarbon, such that the surface temperature of the substrate is 900 to 1,500° C.; or a combustion flame of a gas consisting essentially of a hydrocarbon, is directly struck against the surface of the substrate for heat treatment such that the surface temperature of the substrate is 900 to 1,500° C., thereby forming a carbon-doped titanium oxide layer, whereby the substrate having the carbon-doped titanium oxide layer is obtained.
    Type: Grant
    Filed: December 8, 2004
    Date of Patent: April 28, 2009
    Assignee: Central Research Institute of Electric Power Industry
    Inventor: Masahiro Furuya
  • Patent number: 7506440
    Abstract: A method for surface treating a titanium gas turbine engine component. The method includes providing a gas turbine engine component having a titanium-containing surface. The component is heated to a temperature sufficient to diffuse carbon into the titanium and below 1000° F. The surface is contacted with a carbon-containing gas to diffuse carbon into the surface to form carbides. Thereafter, the carbide-containing surface is coated with a lubricant comprising a binder and a friction modifier. The binder preferably including titanium oxide and the friction modifier preferably including tungsten disulfide. The coefficient of friction between the surface and another titanium-containing surface is less than about 0.6 in high altitude atmospheres.
    Type: Grant
    Filed: October 11, 2005
    Date of Patent: March 24, 2009
    Assignee: General Electric Company
    Inventor: Robert William Bruce
  • Publication number: 20090047510
    Abstract: A coated product is disclosed consisting of a metallic substrate and a composite coating wherein at least one component of the composite coating is of MAX material type. Furthermore, a method of producing such a coated product is disclosed using vapour deposition technique in a continuous roll to roll process.
    Type: Application
    Filed: November 28, 2005
    Publication date: February 19, 2009
    Inventors: Mikael Schuisky, Jen-Petter Palmquist
  • Publication number: 20080280038
    Abstract: Methods of using thin metal layers to make Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. Carbon nanotube growth catalyst is applied on to a surface of a substrate, including one or more thin layers of metal. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst on to a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric is substantially uniform density.
    Type: Application
    Filed: March 9, 2007
    Publication date: November 13, 2008
    Applicant: Nantero, Inc.
    Inventors: Jonathan W. Ward, Thomas Rueckes, Brent M. Segal
  • Patent number: 7435363
    Abstract: A method for manufacturing a diamond film is provided. The material with a low thermal decomposition point is used as a substrate. A buffer layer is formed on the substrate by coating or deposition, and then a diamond film is coated thereon, fitting the shape of the required diamond film. With the buffer layer, the coating or deposition uniformity of the diamond film is improved, and the problems such as thermal stress cracking and assembly damage are solved as well. During a subsequent process of forming the diamond film, the substrate is thermally decomposed due to a high temperature, such that the problems such as stripping and die loss are overcome.
    Type: Grant
    Filed: June 28, 2006
    Date of Patent: October 14, 2008
    Assignee: Kinik Company
    Inventor: Hsiao-Kuo Chang
  • Patent number: 7357975
    Abstract: The carbon-containing hard coating (1) according to the invention comprises nano-crystalline grains being separated from each other by grain boundaries, wherein said hard coating comprises aluminum (Al), at least one additional metal (Me1, Me2), carbon (C) and at least one further element (E1, E2) and has the chemical composition: (AlxMe1yMe2z)CuE1vE2w wherein Me1 is a metal, and Me2 is a metal, with x>0.4 and x+y+z=1 and y,z?0, and E1 and E2 are further chemical elements with 1>u>0 and u+v+w=1 and v,w?0. The grain boundaries have a higher concentration of carbon atoms than the nano-crystalline grains.
    Type: Grant
    Filed: March 9, 2005
    Date of Patent: April 15, 2008
    Assignee: Metaplas Ionon Oberflachenveredelungstechnik GmbH
    Inventor: Joerg Vetter
  • Patent number: 7323219
    Abstract: The invention relates to a coating and apparatus and method for applying the same, said coating including Diamond Like Carbon (DLC) applied by chemical vapor deposition using a pulsed DC biased power supply, typically having an initial metal layer and followed by a transitional metal carbide layer and a DLC layer. The depths and transitions between the materials can be selected to suit requirements. The apparatus also includes the use of an arrangement with at least one electrode with an RF power supply and the selective control of the power supplies to the electrode and substrates is used to improve the efficiency of application.
    Type: Grant
    Filed: March 14, 2003
    Date of Patent: January 29, 2008
    Assignee: Teer Coatings Ltd
    Inventor: Denis Teer
  • Patent number: 7311946
    Abstract: A process is described for depositing a metal film on a substrate surface having a diffusion barrier layer deposited thereupon. In one embodiment of the present invention, the process includes: providing a surface of the diffusion barrier layer that is substantially free of an elemental metal and forming the metal film on at least a portion of the surface via deposition by using a organometallic precursor. In certain embodiments, the diffusion barrier layer may be exposed to an adhesion promoting agent prior to or during at least a portion of the forming step. Suitable adhesion promoting agents include nitrogen, nitrogen-containing compounds, carbon-containing compounds, carbon and nitrogen containing compounds, silicon-containing compounds, silicon and carbon containing compounds, silicon, carbon, and nitrogen containing compounds, or mixtures thereof. The process of the present invention provides substrates having enhanced adhesion between the diffusion barrier layer and the metal film.
    Type: Grant
    Filed: May 2, 2003
    Date of Patent: December 25, 2007
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Diwakar Garg, Hansong Cheng, John Anthony Thomas Norman, Eduardo Machado, Pablo Ordejon
  • Patent number: 7285312
    Abstract: A method and superalloy component for depositing a layer of material onto gas turbine engine components by atomic layer deposition. A superalloy component may have a ceramic thermal barrier coating on at least a portion of its surface, comprising a superalloy substrate and a bonding coat; and aluminum oxide (Al2O3) layer may be deposited on top of an yttria-stabilized zirconia layer and form a bonding coat by atomic layer deposition. The yttria-stabilized zirconia layer may have a plurality of micron sized gaps extending from the top surface of the ceramic coating towards the substrate and defining a plurality of columns of the yttria-stabilized zirconia layer. Also, atomic layer deposition may be used to lay an aluminum oxide (Al2O3) layer over a tantalum oxide (Ta2O5) layer on a silicon-based substrate.
    Type: Grant
    Filed: January 16, 2004
    Date of Patent: October 23, 2007
    Assignee: Honeywell International, Inc.
    Inventor: Chien-Wei Li
  • Patent number: 7214406
    Abstract: A method of forming a hydrogenated amorphous germanium carbon (?-GeCx:H) film on a surface of an infrared (IR) transmissive material such as a chalcogenide is provided. The method includes positioning an IR transmissive material in a reactor chamber of a parallel plate plasma reactor and thereafter depositing a hydrogenated amorphous germanium carbon (?-GeCx:H) film on a surface of the IR transmissive material. The depositing is performed at a substrate temperature of about 130° C. or less and in the presence of a plasma which is derived from a gas mixture including a source of germanium, an inert gas, and optionally hydrogen. Optical transmissive components, such as IR sensors and windows, that have improved abrasion-resistance are also provided.
    Type: Grant
    Filed: November 18, 2004
    Date of Patent: May 8, 2007
    Assignee: Lockheed Martin Corporation
    Inventors: James Neil Johnson, Kevin Warner Flanagan, George Theodore Dalakos
  • Patent number: RE40082
    Abstract: Coated milling insert has a WC—Co cemented carbide with a low content of cubic carbides and a highly W-alloyed binder phase and a coating including an inner layer of TiCxNy with columnar grains followed by a layer of ?-Al2O3 and a top layer of TiN. The coated milling insert is particularly useful for milling of grey cast iron with or without cast skin under wet conditions at low and moderate cutting speeds and milling of nodular cast iron and compacted graphite iron with or without cast skin under wet conditions at moderate cutting speeds.
    Type: Grant
    Filed: June 8, 2006
    Date of Patent: February 19, 2008
    Assignee: Sandvik Intellectual Property AB
    Inventors: Anders Nordgren, Ingemar Hessman, Marian Mikus