Titanium (ti), Zirconnium (zr), Or Hafnium (hf) Metal Carbide Containing Coating Patents (Class 427/249.19)
  • Patent number: 7198820
    Abstract: A process depositing a carbon- and transition metal-containing thin film on a substrate involves placing a substrate within a reaction space and sequentially pulsing into the reaction space a transition metal chemical and an organometallic chemical. Following each chemical pulse, the reaction space is purged, and the pulse and purge sequence is repeated until a desired film thickness is obtained. A preferred deposition process uses atomic layer deposition techniques and may result in an electrically conductive thin carbide film having uniform thickness over a large substrate area and excellent adhesion and step coverage properties.
    Type: Grant
    Filed: August 15, 2003
    Date of Patent: April 3, 2007
    Assignee: Planar Systems, Inc.
    Inventors: Kari Härkönen, Mark Doczy, Teemu Lang, Nathan E. Baxter
  • Patent number: 7087266
    Abstract: A thermal barrier coating, or TBC, and method for forming the TBC. The TBC is formed of a thermal-insulating material that contains yttria-stabilized zirconia (YSZ) alloyed with at least a third oxide. The TBC is formed to also contain elemental carbon, and may potentially contain carbides and/or a carbon-containing gas that forms from the thermal decomposition of carbon. The TBC is characterized by lower density and thermal conductivity, high temperature stability and improved mechanical properties. To exhibit the desired effect, the third oxide is more particularly one that increases the lattice strain energy of the TBC microstructure as a result of having an ion size that is sufficiently different than a zirconium ion.
    Type: Grant
    Filed: June 18, 2004
    Date of Patent: August 8, 2006
    Assignee: General Electric Company
    Inventors: Ramgopal Darolia, Boris A. Movchan, Yuriy E. Rudoy, Leonella M. Nerodenko, Irene Spitsberg, David John Wortman
  • Patent number: 7067439
    Abstract: Methods of forming metal compounds such as metal oxides or metal nitrides by sequentially introducing and then reacting metal organic compounds with ozone or with oxygen radicals or nitrogen radicals formed in a remote plasma chamber. The metal compounds have surprisingly and significantly improved uniformity when deposited by atomic layer deposition with cycle times of at least 10 seconds. The metal compounds also do not contain detectable carbon when the metal organic compound is vaporized at process conditions in the absence of solvents or excess ligands.
    Type: Grant
    Filed: September 19, 2002
    Date of Patent: June 27, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Craig R. Metzner, Shreyas S. Kher, Vidyut Gopal, Shixue Han, Shankarram A. Athreya
  • Patent number: 7052585
    Abstract: A coated article is provided which includes a layer including titanium oxycarbide. In order to form the coated article, a layer of titanium oxide is deposited on a substrate by sputtering or the like. After sputtering of the layer including titanium oxide, an ion beam source(s) is used to implant at least carbon ions into the titanium oxide. When implanting, the carbon ions have sufficient ion energy so as to knock off oxygen (O) from TiOx molecules so as to enable a substantially continuous layer comprising titanium oxycarbide to form near a surface of the previously sputtered layer.
    Type: Grant
    Filed: March 11, 2003
    Date of Patent: May 30, 2006
    Assignee: Guardian Industries Corp.
    Inventors: Vijayen S. Veerasamy, Scott V. Thomsen, Rudolph Hugo Petrmichl
  • Patent number: 6849299
    Abstract: A method of introducing small amounts of a refractory element into a vapor deposition coating. A second material (30), containing at least two elements which are desired to be deposited as a coating on a base material, has placed over it a first material (20) substantially comprising such two elements and a refractory element. The first material (20) is adapted to permit transport of the at least two elements in the second material (30) through the first material (20) when the first (20) and second (30) material are in a molten state and in touching contact with the other so as to permit evaporation of the two elements and the refractory element from an exposed surface. Heat is supplied to the first (20) and second (30) materials to permit evaporation of the at least two elements of second material (30) and the refractory element in the first material (20), and the resulting vapors are condensed as a deposit on a base material (50).
    Type: Grant
    Filed: October 16, 2002
    Date of Patent: February 1, 2005
    Assignee: General Electric Company
    Inventors: Reed Roeder Corderman, Melvin Robert Jackson, Richard Arthur Nardi, Jr.
  • Publication number: 20040265541
    Abstract: Wear resistance of the prior-art Ti(C,N) layers can be considerably enhanced by optimising the grain size and microstructure. This invention describes a method to obtain controlled, fine, equiaxed grain morphology in Ti(C,N) layers produced using moderate temperature CVD (MTCVD). The control of the grain size and shape can be obtained by doping using CO, CO2, ZrCl4 and AlCl3 or combinations of these. Doping has to be controlled carefully in order to avoid nanograined structures and oxidisation. This kind of coatings shows new enhanced wear properties. The fine grain size together with equiaxed grain morphology enhances the toughness of the coating with at least maintained wear resistance, which can be seen especially in sticky steels like stainless steels. The optimum grain size is from about 50 to about 300 nm, preferably from about 50 to about 150.
    Type: Application
    Filed: April 26, 2004
    Publication date: December 30, 2004
    Inventor: Sakari Ruppi
  • Patent number: 6800552
    Abstract: The present invention relates generally to a method of depositing transition metal carbide thin films. In particular, the invention concerns a method of depositing transition metal carbide thin films by atomic layer deposition (ALD), in which a transition metal source compound and a carbon source compound are alternately provided to the substrate. A variety of metal and carbon source gases are disclosed. The methods are applicable to forming metal carbide thin films in semiconductor fabrication, and particularly to forming thin, conductive diffusion barriers within integrated circuits.
    Type: Grant
    Filed: September 17, 2002
    Date of Patent: October 5, 2004
    Assignee: ASM International, N.V.
    Inventors: Kai-Erik Elers, Suvi P. Haukka, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Juha Soininen
  • Patent number: 6797336
    Abstract: The present invention is a method and apparatus for the synthesis of multi-component substances, comprising entities of at least two elements, molecules, grains, crystals, structural units, or phases of matter, in which the scale of the distribution of the elements, molecules, or phases of matter may range from on the order of nanometers or less, to about one millimeter, depending upon the specific materials and process conditions that are chosen. The method and apparatus of the present invention further provides processes for preparing these compositions of matter as thin films or particles.
    Type: Grant
    Filed: July 1, 2002
    Date of Patent: September 28, 2004
    Assignee: AMBP Tech Corporation
    Inventors: James F. Garvey, Gary S. Tompa, Stuart G. MacDonald, Robert L. DeLeon
  • Patent number: 6767583
    Abstract: Coated milling insert has a WC—Co cemented carbide with a low content of cubic carbides and a highly W-alloyed binder phase and a coating including an inner layer of TiCxNy with columnar grains followed by a layer of &kgr;-Al2O3 and a top layer of TiN. The coated milling insert is particularly useful for milling of grey cast iron with or without cast skin under wet conditions at low and moderate cutting speeds and milling of nodular cast iron and compacted graphite iron with or without cast skin under wet conditions at moderate cutting speeds.
    Type: Grant
    Filed: August 13, 2003
    Date of Patent: July 27, 2004
    Assignee: Sandvik Aktiebolag
    Inventors: Anders Nordgren, Ingemar Hessman, Marian Mikus
  • Patent number: 6723391
    Abstract: Method for producing cutting tools provides a first hard material coating on a first region of a tool base body containing at least one cutting edge, using a plasma vacuum coating process. A second hard material coating is provided on a second region which is adjacent the first, also via plasma vacuum coating process. Hard material for the coatings is a carbide, oxide, oxicarbide, nitride, nitrocarbide, oxinitride or nitrooxicarbide of at least two of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al. The first coating has a content of at least two of the metal elements which is at most 2 at % different from the content of the two metal elements in the second coating if the tool is for higher adhesive strength than hardness. The first coating has a content of the two metal elements that is different from the content of the two metal elements of the second coating by more than 2 at % if the tool is for higher hardness than high adhesive strength.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: April 20, 2004
    Assignee: Unaxis Balzers AG
    Inventors: Volker Derflinger, Harald Zimmermann
  • Patent number: 6706327
    Abstract: A method of making a cemented carbide body having WC with an average grain size of 0.5-4 &mgr;m, 3.5-9 wt % Co and <2 wt % carbides of Ta, Ti and Nb, and with a substoichiometric carbon content, the method including sintering the body such that an eta phase containing structure is obtained with a size of 1-15 &mgr;m and a content of 10 vol. %-35 vol. %, and subjecting the body to recarburization such that the eta phase in a 50-350 &mgr;m wide intermediate zone is transformed to WC+Co without essentially changing its Co-content.
    Type: Grant
    Filed: October 11, 2001
    Date of Patent: March 16, 2004
    Assignee: Sandvik AB
    Inventors: Per Blomstedt, Mikael Lagerqvist, Marian Mikus
  • Patent number: 6699526
    Abstract: A method of making a cutting insert includes forming a powder mixture containing WC, 2-10 wt % Co, 4-12 wt % cubic carbides, adding N in an amount of 0.9-1.7 % of the weight of the cubic carbides, mixing the powder with a pressing agent, milling and spray drying the mixture, compacting and sintering the material at 1300-1500 in an atmosphere of sintering gas 40-60 mbar, applying post-sintering treatment, and applying a coating by CVD or MTCVD.
    Type: Grant
    Filed: October 11, 2001
    Date of Patent: March 2, 2004
    Assignee: Sandvik AB
    Inventors: Lisa Palmqvist, Mikael Lindholm, Anders Lenander, Björn Lungberg, Michael Thysell
  • Patent number: 6669989
    Abstract: The invention relates to a method and apparatus for the production of protective coatings on parts. A coating formed in accordance with the invention has a chemical composition and structure gradient across its thickness. The coating is obtained by heating of a composite ingot including a body and at least one insert disposed within the body. As the composite ingot is heated it sequentially evaporates to produce a vapor with a chemical composition varying over the evaporation time period. The composition of the body and composition and location of the insert within the body function to determine the chemical composition of the vapor at any time. Condensation and/or deposition of the vapor onto a substrate forms the inventive coating.
    Type: Grant
    Filed: November 7, 2001
    Date of Patent: December 30, 2003
    Assignee: International Center for Electron Beam Technologies of E. O. Paton Electric Welding Institute
    Inventors: Boris A. Movchan, Leonila M. Nerodenko, Jury E. Rudoy
  • Patent number: 6656520
    Abstract: A non-carbon, metal-based, high temperature resistant, electrically conductive and electrochemically active anode of a cell for the production of aluminum has a metal-based substrate to which an adherent coating is applied prior to its immersion into the electrolyte and start up of the electrolysis by connection to the positive current supply. The coating is obtainable from one or more layers applied from: a liquid solution, a dispersion in a liquid or a paste, a suspension in a liquid or a paste, and a pasty or non-pasty slurry, and combinations thereof with or without one or more further applied layers, with or without heat treatment between two consecutively applied layers when at least two layers are applied.
    Type: Grant
    Filed: March 14, 2002
    Date of Patent: December 2, 2003
    Assignee: Moltech Invent-SA
    Inventor: Vittorio de Nora
  • Patent number: 6616970
    Abstract: Methods of making a coated cemented carbide body include: forming a powder mixture having WC, 5-12 wt % Co, 3-11% cubic carbides of Ta and Ti with a ratio of Ta/Ti is 1.0-4.0; adding N in an amount of 0.6-2.0% of the weight of Ta and Ti; milling and spray-drying the mixture to form a powder; compacting and sintering the powder at a temperature of 1300-1500° C., in a controlled atmosphere of about 50 mbar followed by cooling, whereby a body having a binder phase enriched and essentially gamma-phase free surface zone of 5-50 &mgr;m in thickness is obtained; applying a pre-coating treatment to the body; and appling a hard, wear-resistant coating to the body.
    Type: Grant
    Filed: November 19, 2001
    Date of Patent: September 9, 2003
    Assignee: Sandvik AB
    Inventors: Anders Lenander, Mikael Lindholm
  • Patent number: 6599572
    Abstract: A process for growing an electrically conductive metalloid thin film on a substrate with a chemical vapor deposition process. A metal source material and a reducing agent capable of reducing the metal source material to a reduced state are vaporized and fed into a reaction space, where the metal source material and the reducing agent are contacted with the substrate. The reducing agent is a boron compound having at least one boron-carbon bond, and the boron compound forms gaseous by-products when reacted with the metal source material. Generally, the boron compound is an alkylboron compound with 0-3 halogen groups attached to the boron. The metal source material and the reducing agent may be fed continuously or in pulses during the deposition process.
    Type: Grant
    Filed: January 18, 2001
    Date of Patent: July 29, 2003
    Assignee: ASM Microchemistry Oy
    Inventors: Ville Antero Saanila, Kai-Erik Elers, Sari Johanna Kaipio, Pekka Juha Soininen
  • Patent number: 6524402
    Abstract: A passivation method for the metallic surface of a nickel and iron-based superalloy which is used as the constituent material of reactor or furnace walls is described, in which the superalloy is coated on at least one of its surfaces which comes into contact with a corrosive atmosphere containing either hydrocarbons at high temperature or containing oxidizing gases at high temperature, with at least two successive layers resulting from successive chemical vapour deposition of its one or more constituent elements, the external phase, resulting from chemical vapour deposition of at least one silicon compound and the layer(s) deposited between the superalloy surface, and the external layer resulting from chemical vapour deposition of at least one of a metal or metalloid.
    Type: Grant
    Filed: June 23, 1995
    Date of Patent: February 25, 2003
    Assignee: Institut Francais du Petrole
    Inventors: Paul Broutin, Pascal Nisio, François Ropital
  • Publication number: 20020176993
    Abstract: A high temperature substrate having improved properties. The substrate is a polymer substrate having a glass transition temperature greater than about 120° C., and at least one first barrier stack adjacent to the polymer substrate. The barrier stack includes at least one first barrier layer and at least one first polymer layer. A method for making the high temperature substrate with improved properties is also disclosed.
    Type: Application
    Filed: April 20, 2000
    Publication date: November 28, 2002
    Inventors: GORDON L GRAFF, MARK E GROSS, MING K SHI, MICHAEL G HALL, PETER M MARTIN, ERIC S MAST
  • Patent number: 6482262
    Abstract: The present invention relates generally to a method of depositing transition metal carbide thin films. In particular, the invention concerns a method of depositing transition metal carbide thin films by atomic layer deposition (ALD), in which a transition metal source compound and a carbon source compound are alternately provided to the substrate. A variety of metal and carbon source gases are disclosed. The methods are applicable to forming metal carbide thin films in semiconductor fabrication, and particularly to forming thin, conductive diffusion barriers within integrated circuits.
    Type: Grant
    Filed: October 13, 2000
    Date of Patent: November 19, 2002
    Assignee: ASM Microchemistry Oy
    Inventors: Kai-Erik Elers, Suvi P. Haukka, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Juha Soininen
  • Publication number: 20020119249
    Abstract: A control system for maintaining the liquid levels in a plurality of reservoirs connected in series includes one or more nested control modules. The nested control module, one for each reservoir, includes a proportional only level controller in electrical communication with the respective level sensor of each respective reservoir and is adapted to produce an output that becomes a set point for one or more respective PID flow controllers adapted to control the respective outflows of said respective reservoirs. The control system results in maintaining liquid levels in the reservoirs while substantially eliminating flow and level oscillations.
    Type: Application
    Filed: April 6, 2002
    Publication date: August 29, 2002
    Inventor: Guy Kevin
  • Patent number: 6432022
    Abstract: A low-play planetary gear mechanism for high rotational speeds and low torque transmission and having roller bearings for the parts which rotate within the gear mechanism. The gear mechanism is designed for a long, maintenance-free service life in continuous operation at high drive speeds. To accomplish this, the running surfaces of at least some of the gears are coated with a coating that has a higher wear resistance and a lower coefficient of friction than the respectively associated base material. As such, all of the surfaces of the gear mechanism which come into contact with one another are able to run for long periods at the end of assembly of the gear mechanism. With this gear mechanism, there is no circulating lubricating oil originating from a lubricating-oil collection chamber and which flows freely around any of the moving parts of the gear mechanism.
    Type: Grant
    Filed: May 19, 2000
    Date of Patent: August 13, 2002
    Assignee: Alpha Getriebebau GmbH
    Inventor: Thomas Bayer
  • Patent number: 6376015
    Abstract: A multi-layer thermal barrier coating for a superalloy article includes a metallic matrix coating containing particles, a MCrAlY alloy bond coating on the metallic matrix coating, a thin oxide layer on the MCrAlY alloy bond coating and a columnar grain ceramic thermal barrier coating. The metallic matrix coating includes a 80 wt % nickel-20 wt % chromium alloy. The particles include metallic compounds such as carbides, oxides, borides and nitrides, which react with harmful transition metal elements such as titanium, tantalum and hafnium, in the superalloy substrate. One suitable compound is chromium carbide because the hafnium transition metal elements will take part in an exchange reaction with the chromium in the chromium carbide to form a stable carbide of the harmful transition metal element. This reduces the amount of harmful elements in the superalloy reaching the oxide layer and increases the service life of the thermal barrier coating.
    Type: Grant
    Filed: August 11, 2000
    Date of Patent: April 23, 2002
    Assignees: Rolls-Royce, PLC, Chromalloy United Kingdon Limited
    Inventor: David S Rickerby
  • Patent number: 6331332
    Abstract: In accordance with the present invention, there is provided a process for depositing diamond-like carbon (DLC) films by cathodic arc evaporation (CAE), wherein the high energy of CAE metal ions causes the cracking reaction of the hydrocarbon gases fed into the vacuum reaction chamber and then results in the deposition of DLC films having high hardness and lubrication. Due to the metallic constituents doped in the DLC films, the films also have good toughness. Moreover, prior to the feeding of hydrocarbon gases for the DLC deposition, the same metal arc source may deposits one or more interlayers of metal, metal nitride, or metal carbide on the substrate so as to further enhance the adhesion of the DLC films to be deposited.
    Type: Grant
    Filed: November 5, 1999
    Date of Patent: December 18, 2001
    Inventor: Da-Yung Wang
  • Patent number: 6326093
    Abstract: The present invention relates to a coated cemented carbide cutting tool particularly for turning applications with high toughness demands, of stainless steels of different compositions and microstructures, and of low and medium alloyed non-stainless steels. The cemented carbide is WC−Co based with a composition of 9−12 wt % Co, 0.2−2.0 wt % cubic carbides from elements from group IVa, Va or VIa of the periodic table and balance WC with a grain size of 1.5−2 &mgr;m. The binder phase is W-alloyed with a CW-ratio in the range of 0.77−0.95. The coating includes a multilayered structure of the composition (TixA11−x,)N in which x varies repeatedly between the two ranges 0.45<x<0.55 and 0.70<x<0.80, adding up to a total thickness of 2-9 &mgr;m.
    Type: Grant
    Filed: September 6, 2000
    Date of Patent: December 4, 2001
    Assignee: Sandvik AB
    Inventors: Mikael Lindholm, Anders Lenander, Per Lindskog
  • Publication number: 20010006724
    Abstract: For coating a cutting tool with an aluminum oxide layer, a bonding layer has been provided that is preferably formed by aluminum titanate and has a flake-like crystal structure. This bonding layer improves the adherence of an aluminum oxide layer, in particular to underlying titanium nitride, titanium carbide, or titanium carbonitride layers.
    Type: Application
    Filed: December 22, 2000
    Publication date: July 5, 2001
    Inventor: Helga Holzschuh
  • Patent number: 6235416
    Abstract: A composite in which a substrate body is coated with a single layer or multiple layers and at least one layer has two or three phases comprised of cubic ZrCN and monoclinic or tetragonal ZrO2. The composite can be in the form of a lathe or milling cutter cutting insert.
    Type: Grant
    Filed: June 21, 1999
    Date of Patent: May 22, 2001
    Assignee: Widia GmbH
    Inventors: Udo Kõnig, Hartmut Westphal, Volkmar Sottke
  • Patent number: RE39814
    Abstract: The present invention relates to a coated cemented carbide cutting tool particularly for turning applications with high toughness demands, of stainless steels of different compositions and microstructures, and of low and medium alloyed non-stainless steels. The cemented carbide is WC-Co based with a composition of 9-12 wt % Co, 0.2-2.0 wt % cubic carbides from elements from group IVa, Va or VIa of the periodic table and balance WC with a grain size of 1.5-2 ?m. The binder phase is W-alloyed with a CW-ratio in the range of 0.77-0.95. The coating includes a multilayered structure of the composition (TixAl1?x,)N in which x varies repeatedly between the two ranges 0.45<x<0.55 and 0.70<x<0.80, adding up to a total thickness of 2-9 ?m.
    Type: Grant
    Filed: June 8, 2006
    Date of Patent: September 4, 2007
    Assignee: Sandvik Intellectual Property AB
    Inventors: Mikael Lindholm, Anders Lenander, Per Lindskog