Multiple Parallel Current Paths (e.g., Grid Gate, Etc.) Patents (Class 438/193)
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Patent number: 9219064Abstract: A semiconductor device includes a first transistor and a second transistor. The first transistor includes a first nanowire extending through a first gate electrode and between first source and drain regions. The second transistor includes a second nanowire extending through a second gate electrode and between a second source and drain regions. The first nanowire has a first size in a first direction and a second size in a second direction, and the second nanowire has a second size in the first direction and substantially the second size in the second direction. The first nanowire has a first on current and the second nanowire has a second on current. The on current of the first nanowire may be substantially equal to the on current of the second nanowire based on a difference between the sizes of the first and second nanowires. In another arrangement, the on currents may be different.Type: GrantFiled: January 24, 2014Date of Patent: December 22, 2015Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventor: Sang-Su Kim
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Patent number: 9093395Abstract: A diode includes a substrate characterized by a first dislocation density and a first conductivity type, a first contact coupled to the substrate, and a masking layer having a predetermined thickness and coupled to the semiconductor substrate. The masking layer comprises a plurality of continuous sections and a plurality of openings exposing the substrate and disposed between the continuous sections. The diode also includes an epitaxial layer greater than 5 ?m thick coupled to the substrate and the masking layer. The epitaxial layer comprises a first set of regions overlying the plurality of openings and characterized by a second dislocation density and a second set of regions overlying the set of continuous sections and characterized by a third dislocation density less than the first dislocation density and the second dislocation density. The diode further includes a second contact coupled to the epitaxial layer.Type: GrantFiled: September 2, 2011Date of Patent: July 28, 2015Assignee: Avogy, Inc.Inventors: David P. Bour, Linda Romano, Thomas R. Prunty, Isik C. Kizilyalli, Hui Nie, Andrew P. Edwards, Richard J. Brown
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Patent number: 8969180Abstract: A semiconductor structure includes a GaN substrate having a first surface and a second surface opposing the first surface. The GaN substrate is characterized by a first conductivity type and a first dopant concentration. The semiconductor structure also includes a first GaN epitaxial layer of the first conductivity type coupled to the second surface of the GaN substrate and a second GaN epitaxial layer of a second conductivity type coupled to the first GaN epitaxial layer. The second GaN epitaxial layer includes an active device region, a first junction termination region characterized by an implantation region having a first implantation profile, and a second junction termination region characterized by an implantation region having a second implantation profile.Type: GrantFiled: March 20, 2014Date of Patent: March 3, 2015Assignee: Avogy, Inc.Inventors: Hui Nie, Andrew P. Edwards, Donald R. Disney, Richard J. Brown, Isik C. Kizilyalli
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Patent number: 8911926Abstract: A method of forming a metal pattern is disclosed. In the method, a metal layer is formed on a base substrate. A photoresist composition is coated on the metal layer to form a coating layer. The photoresist composition includes a binder resin, a photo-sensitizer, a mercaptopropionic acid compound and a solvent. The coating layer is exposed to a light. The coating layer is partially removed to form a photoresist pattern. The metal layer is patterned by using the photoresist pattern as a mask.Type: GrantFiled: April 5, 2013Date of Patent: December 16, 2014Assignee: Samsung Display Co., Ltd.Inventors: Jeong-Won Kim, Min Kang, Bong-Yeon Kim, Jin-Ho Ju, Dong-Min Kim, Tae-Gyun Kim, Joo-Kyoung Park, Chul-Won Park, Jun-Hyuk Woo, Won-Young Lee, Hyun-Joo Lee, Eun Jeagal
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Patent number: 8884270Abstract: Vertical junction field effect transistors (VJFETs) having improved heat dissipation at high current flow while maintaining the desirable specific on-resistance and normalized saturated drain current properties characteristic of devices having small pitch lengths are described. The VJFETs comprise one or more electrically active source regions in electrical contact with the source metal of the device and one or more electrically inactive source regions not in electrical contact with the source metal of the device. The electrically inactive source regions dissipate heat generated by the electrically active source regions during current flow.Type: GrantFiled: March 30, 2012Date of Patent: November 11, 2014Assignee: Power Integrations, Inc.Inventors: Janna Casady, Jeffrey Casady, Kiran Chatty, David Sheridan, Andrew Ritenour
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Publication number: 20140291691Abstract: A semiconductor structure includes a GaN substrate with a first surface and a second surface. The GaN substrate is characterized by a first conductivity type and a first dopant concentration. A first electrode is electrically coupled to the second surface of the GaN substrate. The semiconductor structure further includes a first GaN epitaxial layer of the first conductivity type coupled to the first surface of the GaN substrate and a second GaN layer of a second conductivity type coupled to the first GaN epitaxial layer. The first GaN epitaxial layer comprises a channel region. The second GaN epitaxial layer comprises a gate region and an edge termination structure. A second electrode coupled to the gate region and a third electrode coupled to the channel region are both disposed within the edge termination structure.Type: ApplicationFiled: February 27, 2014Publication date: October 2, 2014Applicant: Avogy, Inc.Inventors: Donald R. Disney, Hui Nie, Isik C. Kizilyalli, Richard J. Brown
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Patent number: 8716716Abstract: A semiconductor structure includes a GaN substrate having a first surface and a second surface opposing the first surface. The GaN substrate is characterized by a first conductivity type and a first dopant concentration. The semiconductor structure also includes a first GaN epitaxial layer of the first conductivity type coupled to the second surface of the GaN substrate and a second GaN epitaxial layer of a second conductivity type coupled to the first GaN epitaxial layer. The second GaN epitaxial layer includes an active device region, a first junction termination region characterized by an implantation region having a first implantation profile, and a second junction termination region characterized by an implantation region having a second implantation profile.Type: GrantFiled: December 22, 2011Date of Patent: May 6, 2014Assignee: Avogy, Inc.Inventors: Hui Nie, Andrew P. Edwards, Donald R. Disney, Richard J. Brown, Isik C. Kizilyalli
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Patent number: 8698164Abstract: A semiconductor structure includes a GaN substrate with a first surface and a second surface. The GaN substrate is characterized by a first conductivity type and a first dopant concentration. A first electrode is electrically coupled to the second surface of the GaN substrate. The semiconductor structure further includes a first GaN epitaxial layer of the first conductivity type coupled to the first surface of the GaN substrate and a second GaN layer of a second conductivity type coupled to the first GaN epitaxial layer. The first GaN epitaxial layer comprises a channel region. The second GaN epitaxial layer comprises a gate region and an edge termination structure. A second electrode coupled to the gate region and a third electrode coupled to the channel region are both disposed within the edge termination structure.Type: GrantFiled: December 9, 2011Date of Patent: April 15, 2014Assignee: Avogy, Inc.Inventors: Donald R. Disney, Hui Nie, Isik C. Kizilyalli, Richard J. Brown
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Patent number: 8679950Abstract: A semiconductor device includes a first fin formed of a first semiconductor material and a second fin comprising a layer formed of a second semiconductor material. The first semiconductor material is silicon, and the second semiconductor material is silicon-germanium (SiGe). The second fin further includes a layer of the first semiconductor material below the layer of the second semiconductor material. The semiconductor device also includes a hard mask layer on the first and second fins and an insulator layer that is disposed below the first and second fins. The first and second fins are used to form an N-channel and a P-channel semiconductor device, respectively.Type: GrantFiled: May 26, 2012Date of Patent: March 25, 2014Assignee: Semiconductor Manufacturing International (Beijing) CorporationInventor: Mieno Fumitake
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Patent number: 8642463Abstract: A routing layer for a semiconductor die is disclosed. The routing layer includes pads for attaching solder bumps; bond-pads bonded to bump-pads of a die having an integrated circuit, and traces interconnecting bond-pads to pads. The routing layer is formed on a layer of dielectric material. The routing layer includes conductive traces at least partially surrounding some pads so as to absorb stress from solder bumps attached to the pads. Parts of the traces that surround pads protect parts of the underlying dielectric material proximate the solder bumps, from the stress.Type: GrantFiled: June 26, 2012Date of Patent: February 4, 2014Assignee: ATI Technologies ULCInventors: Roden Topacio, Gabriel Wong
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Patent number: 8580584Abstract: A system and method of increasing productivity of OLED material screening includes providing a substrate that includes an organic semiconductor, processing regions on the substrate by combinatorially varying parameters associated with the OLED device production on the substrate, performing a first characterization test on the processed regions on the substrate to generate first results, processing regions on the substrate in a combinatorial manner by varying parameters associated with the OLED device production on the substrate based on the first results of the first characterization test, performing a second characterization test on the processed regions on the substrate to generate second results, and determining whether the substrate meets a predetermined quality threshold based on the second results.Type: GrantFiled: September 21, 2012Date of Patent: November 12, 2013Assignee: Intermolecular, Inc.Inventors: Yun Wang, Tony P. Chiang, Chi-I Lang
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Patent number: 8513125Abstract: A method for manufacturing a device comprising a structure with nanowires based on a semiconducting material such as Si and another structure with nanowires based on another semiconducting material such as SiGe, and is notably applied to the manufacturing of transistors.Type: GrantFiled: August 30, 2010Date of Patent: August 20, 2013Assignee: Commissariat a l'energie atomique et aux alternativesInventors: Emeline Saracco, Jean-Francois Damlencourt, Michel Heitzmann
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Patent number: 8492228Abstract: A method includes forming a first gate stack over a portion of a fin, forming a dummy gate stack over the fin, growing an epitaxial material from exposed portions of the fin, forming a layer of dielectric material over the epitaxial material, the first gate stack, and the dummy gate stack, performing a planarizing process that removes portions of the layer of dielectric material, the first gate stack, and the dummy gate stack, pattering a first mask over portions of the layer of dielectric material and the dummy gate stack, forming a silicide material on exposed portions of the first gate stack, removing the first mask, pattering a second mask over portions of the layer of dielectric material and the first gate stack, removing a polysilicon portion of the dummy gate stack to define a cavity, removing the second mask, and forming a second gate stack in the cavity.Type: GrantFiled: July 12, 2012Date of Patent: July 23, 2013Assignee: International Business Machines CorporationInventors: Effendi Leobandung, Junli Wang
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Patent number: 8482028Abstract: According to one embodiment, a semiconductor device includes a first semiconductor layer of a first conductive type, and a periodic array structure having a second semiconductor layer of a first conductive type and a third semiconductor layer of a second conductive type periodically arrayed on the first semiconductor layer in a direction parallel with a major surface of the first semiconductor layer. The second semiconductor layer and the third semiconductor layer are disposed in dots on the first semiconductor layer. A periodic structure in the outermost peripheral portion of the periodic array structure is different from a periodic structure of the periodic array structure in a portion other than the outermost peripheral portion.Type: GrantFiled: March 19, 2012Date of Patent: July 9, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Wataru Saito, Syotaro Ono, Toshiyuki Naka, Shunji Taniuchi, Miho Watanabe, Hiroaki Yamashita
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Publication number: 20130146886Abstract: A semiconductor structure includes a GaN substrate with a first surface and a second surface. The GaN substrate is characterized by a first conductivity type and a first dopant concentration. A first electrode is electrically coupled to the second surface of the GaN substrate. The semiconductor structure further includes a first GaN epitaxial layer of the first conductivity type coupled to the first surface of the GaN substrate and a second GaN layer of a second conductivity type coupled to the first GaN epitaxial layer. The first GaN epitaxial layer comprises a channel region. The second GaN epitaxial layer comprises a gate region and an edge termination structure. A second electrode coupled to the gate region and a third electrode coupled to the channel region are both disposed within the edge termination structure.Type: ApplicationFiled: December 9, 2011Publication date: June 13, 2013Applicant: EPOWERSOFT, INC.Inventors: Donald R. Disney, Hui Nie, Isik C. Kizilyalli, Richard J. Brown
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Patent number: 8389973Abstract: A memory includes a first tunneling field effect transistor including a first drain and a first source, the first drain coupled to a first resistive memory element. The memory includes a second tunneling field effect transistor including a second drain and sharing the first source, the second drain coupled to a second resistive memory element. The memory includes a first region coupled to the first source for providing a source node.Type: GrantFiled: December 22, 2010Date of Patent: March 5, 2013Assignee: Qimonda AGInventor: Thomas Nirschl
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Patent number: 8349676Abstract: Apparatus, systems, and methods may include managing electrostatic discharge events by using a semiconductor device having a non-aligned gate to implement a snap-back voltage protection mechanism. Such devices may be formed by doping a semiconductor substrate to form a first conductive region as a well, forming one of a source region and a drain region in the well, depositing a layer of polysilicon on the substrate to establish a gating area that does not overlap the one of the source region and the drain region, and forming an integrated circuit supported by the substrate to couple to the one of the source region and the drain region to provide snap-back voltage operation at a node between the integrated circuit and the source or drain region. Additional apparatus, systems, and methods are disclosed.Type: GrantFiled: August 19, 2011Date of Patent: January 8, 2013Assignee: Synopsys, Inc.Inventors: Cong Khieu, Yanjun Ma, Jaideep Mavoori
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Patent number: 8343836Abstract: A recessed gate FET device includes a substrate having an upper and lower portions, the lower portion having a reduced concentration of dopant material than the upper portion; a trench-type gate electrode defining a surrounding channel region and having a gate dielectric material layer lining and including a conductive material having a top surface recessed to reduce overlap capacitance with respect to the source and drain diffusion regions formed at an upper substrate surface at either side of the gate electrode. There is optionally formed halo implants at either side of and abutting the gate electrode, each halo implants extending below the source and drain diffusions into the channel region. Additionally, highly doped source and drain extension regions are formed that provide a low resistance path from the source and drain diffusion regions to the channel region.Type: GrantFiled: February 1, 2012Date of Patent: January 1, 2013Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Andres Bryant, Edward J. Nowak
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Patent number: 8298837Abstract: A system and method of increasing productivity of OLED material screening includes providing a substrate that includes an organic semiconductor, processing regions on the substrate by combinatorially varying parameters associated with the OLED device production on the substrate, performing a first characterization test on the processed regions on the substrate to generate first results, processing regions on the substrate in a combinatorial manner by varying parameters associated with the OLED device production on the substrate based on the first results of the first characterization test, performing a second characterization test on the processed regions on the substrate to generate second results, and determining whether the substrate meets a predetermined quality threshold based on the second results.Type: GrantFiled: March 25, 2011Date of Patent: October 30, 2012Assignee: Intermolecular, Inc.Inventors: Yun Wang, Tony P. Chiang, Chi-I Lang
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Patent number: 8241733Abstract: A method of placing a logo on an article or substrate by placing a contrast sheet behind the logo and a blocking sheet therebetween to prevent a shadow effect. The contrast sheet and blocking sheet may be hidden within the hem of an article.Type: GrantFiled: May 25, 2011Date of Patent: August 14, 2012Assignee: Kimberly-Clark Worldwide, Inc.Inventors: Walter G. Bauer, Kroy D. Johnson, Thomas D. Ehlert, Patrick S. McNichols
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Publication number: 20120139013Abstract: A static induction transistor comprising: a region of semiconductor material having a first conductivity type; at least two spaced-apart gate regions formed in the region of semiconductor material, the gate regions having a second conductivity type that is opposite to the first conductivity type; at least one source region having the first conductivity type formed in the region of semiconductor material between the spaced-apart gate regions; a drain region having the first conductivity type formed in the region of semiconductor and spaced-apart from the source region to define a channel region therebetween; and a dielectric carrier separation layer formed at the periphery of the gate regions.Type: ApplicationFiled: December 3, 2010Publication date: June 7, 2012Inventors: Sandeep Bahl, Constantin Bulucea
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Patent number: 8101486Abstract: Methods are provided for fabricating a semiconductor device. A method comprises forming a layer of a first semiconductor material overlying the bulk substrate and forming a layer of a second semiconductor material overlying the layer of the first semiconductor material. The method further comprises creating a fin pattern mask on the layer of the second semiconductor material and anisotropically etching the layer of the second semiconductor material and the layer of the first semiconductor material using the fin pattern mask as an etch mask. The anisotropic etching results in a fin formed from the second semiconductor material and an exposed region of first semiconductor material underlying the fin. The method further comprises forming an isolation layer in the exposed region of first semiconductor material underlying the fin.Type: GrantFiled: October 7, 2009Date of Patent: January 24, 2012Assignee: GLOBALFOUNDRIES Inc.Inventors: Witold Maszara, Hemant Adhikari
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Patent number: 7927938Abstract: Methods, devices, and systems integrating Fin-JFETs and Fin-MOSFETs are provided. One method embodiment includes forming at least on Fin-MOSFET on a substrate and forming at least on Fin-JFET on the substrate.Type: GrantFiled: November 19, 2007Date of Patent: April 19, 2011Assignee: Micron Technology, Inc.Inventors: Badih El-Kareh, Leonard Forbes
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Patent number: 7858429Abstract: Microelectronic imagers, methods for packaging microelectronic imagers, and methods for forming electrically conductive through-wafer interconnects in microelectronic imagers are disclosed herein. In one embodiment, a microelectronic imaging die can include a microelectronic substrate, an integrated circuit, and an image sensor electrically coupled to the integrated circuit. A bond-pad is carried by the substrate and electrically coupled to the integrated circuit. An electrically conductive through-wafer interconnect extends through the substrate and is in contact with the bond-pad. The interconnect can include a passage extending completely through the substrate and the bond-pad, a dielectric liner deposited into the passage and in contact with the substrate, first and second conductive layers deposited onto at least a portion of the dielectric liner, and a conductive fill material deposited into the passage over at least a portion of the second conductive layer and electrically coupled to the bond-pad.Type: GrantFiled: September 27, 2007Date of Patent: December 28, 2010Assignee: Round Rock Research, LLCInventors: Salman Akram, Charles M. Watkins, Kyle K. Kirby, Alan G. Wood, William M. Hiatt
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Patent number: 7851283Abstract: Therefore, disclosed above are embodiments of a multi-fin field effect transistor structure (e.g., a multi-fin dual-gate FET or tri-gate FET) that provides low resistance strapping of the source/drain regions of the fins, while also maintaining low capacitance to the gate by raising the level of the straps above the level of the gate. Embodiments of the structure of the invention incorporate either conductive vias or taller source/drain regions in order to electrically connect the source/drain straps to the source/drain regions of each fin. Also, disclosed are embodiments of associated methods of forming these structures.Type: GrantFiled: July 30, 2008Date of Patent: December 14, 2010Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Thomas Ludwig, Edward J. Nowak
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Patent number: 7851832Abstract: Electrode placement which applies easy heat dispersion of a semiconductor device with high power density and high exothermic density is provided for the semiconductor device including: a gate electrode, a source electrode, and a drain electrode which are placed on a first surface of a substrate 10, and have a plurality of fingers, respectively; gate terminal electrodes G1, G2, . . . , G4, source terminal electrodes S1, S2, . . . , S5, and a drain terminal electrode D which are placed on the first surface, and governs a plurality of fingers, respectively every the gate electrode, the source electrode, and the drain electrode; active areas AA1, AA2, . . . , AA5 placed on the substrate of the lower part of the gate electrode, the source electrode, and the drain electrode; a non-active area (BA) adjoining the active areas and placed on the substrate; and VIA holes SC1, SC2, . . .Type: GrantFiled: October 22, 2008Date of Patent: December 14, 2010Assignee: Kabushiki Kaisha ToshibaInventor: Kazutaka Takagi
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Patent number: 7718480Abstract: In an NMOS active clamp device and an NMOS active clamp array with multiple source and drain contacts, the robustness against ESD events is increased by reducing channel resistance through the inclusion of one or more p+ regions formed at least partially in the source and electrically connected to the one or more source contacts.Type: GrantFiled: May 26, 2005Date of Patent: May 18, 2010Assignee: National Semiconductor CorporationInventors: Vladislav Vashchenko, Marcel ter Book, Peter J. Hopper
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Patent number: 7638379Abstract: Semiconductor devices and methods of making the devices are described. The devices can be implemented in SiC and can include epitaxially grown n-type drift and p-type trenched gate regions, and an n-type epitaxially regrown channel region on top of the trenched p-gate regions. A source region can be epitaxially regrown on top of the channel region or selectively implanted into the channel region. Ohmic contacts to the source, gate and drain regions can then be formed. The devices can include edge termination structures such as guard rings, junction termination extensions (JTE), or other suitable p-n blocking structures. The devices can be fabricated with different threshold voltages, and can be implemented for both depletion and enhanced modes of operation for the same channel doping. The devices can be used as discrete power transistors and in digital, analog, and monolithic microwave integrated circuits.Type: GrantFiled: November 6, 2007Date of Patent: December 29, 2009Assignees: SemiSouth Laboratories, Inc., Mississippi State UniversityInventors: Lin Cheng, Michael S. Mazzola
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Patent number: 7615802Abstract: The invention relates to a semiconductor structure for controlling a current (I), comprising a first n-conductive semiconductor region (2), a current path that runs within the first semiconductor region (2) and a channel region (22). The channel region (22) forms part of the first semiconductor region (2) and comprises a base doping. The current (I) in the channel region (22) can be influenced by means of at least one depletion zone (23, 24). The channel region (22) contains an n-conductive channel region (225) for conducting the current, said latter region having a higher level of doping than the base doping. The conductive channel region (225) is produced by ionic implantation in an epitaxial layer (262) that surrounds the channel region (22).Type: GrantFiled: March 19, 2003Date of Patent: November 10, 2009Assignee: SiCED Electronics Development GmbH & Co. KGInventors: Rudolf Elpelt, Heinz Mitlehner, Reinhold Schörner
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Publication number: 20090127592Abstract: Methods, devices, and systems integrating Fin-JFETs and Fin-MOSFETs are provided. One method embodiment includes forming at least on Fin-MOSFET on a substrate and forming at least on Fin-JFET on the substrate.Type: ApplicationFiled: November 19, 2007Publication date: May 21, 2009Applicant: MICRON TECHNOLOGY, INC.Inventors: Badih El-Kareh, Leonard Forbes
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Patent number: 7504677Abstract: Methods and apparatus are provided for RF switches (100, 200). In a preferred embodiment, the apparatus comprises one or more multi-gate n-channel enhancement mode FET transistors (50, 112, 114). When used in pairs (112, 114) each has its source (74, 133) coupled to a first common RF I/O port (116) and drains coupled respectively to second and third RF I/O ports (118, 120), and gates (136, 138), coupled respectively to first and second control terminals (122, 124). The multi-gate regions (66, 68) of the FETs (50) are parallel coupled, spaced-apart and serially arranged between source (72) and drain (76). Lightly doped n-regions (Ldd, Lds) are provided serially arranged between the spaced-apart multi-gate regions (66, 68), the lightly doped n-regions (Ldd, Lds) being separated by more heavily doped n-regions (84).Type: GrantFiled: March 28, 2005Date of Patent: March 17, 2009Assignee: Freescale Semiconductor, Inc.Inventors: Elizabeth C. Glass, Olin L. Hartin, Neil T. Tracht
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Patent number: 7501297Abstract: A method of manufacturing a thin film transistor array panel is provided, The method includes: forming a gate line on a substrate; forming a gate insulating layer on the gate line; forming a semiconductor layer on the gate insulating layer; forming a data line and a drain electrode on the semiconductor layer; depositing a passivation layer on the data line and the drain electrode; forming a photoresist including a first portion and a second portion thinner than the first portion on the passivation layer; etching the passivation layer using the photoresist as a mask to expose a portion of the drain electrode at least in part; removing the second portion of the photoresist; depositing a conductive film; and removing the photoresist to form a pixel electrode on the exposed portion of the drain electrode.Type: GrantFiled: January 20, 2006Date of Patent: March 10, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Jang-Soo Kim, Soo-Jin Kim, Kyoung-Tai Han, Hee-Hwan Choe, Joo-Han Kim
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Patent number: 7432145Abstract: A low on-state resistance power semiconductor device has a shape and an arrangement that increase the channel density and the breakdown voltage The power semiconductor device comprises a plurality of individual cells formed on a semiconductor substrate (62). Each individual cell comprises a plurality of radially extending branches (80) having source regions (37) within base regions (36). The plurality of individual cells are arranged such that at least one branch of each cell extends towards at least one branch of an adjacent cell and wherein the base region (36) of the extending branches merge together to form a single and substantially uniformly doped base region (36) surrounding drain islands (39) at the surface of the semiconductor substrate (62).Type: GrantFiled: June 10, 2003Date of Patent: October 7, 2008Assignee: Freescale Semiconductor, Inc.Inventors: Jean-Michel Reynes, Ivana Deram, Adeline Feybesse
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Publication number: 20080124853Abstract: Semiconductor devices and methods of making the devices are described. The devices can be implemented in SiC and can include epitaxially grown n-type drift and p-type trenched gate regions, and an n-type epitaxially regrown channel region on top of the trenched p-gate regions. A source region can be epitaxially regrown on top of the channel region or selectively implanted into the channel region. Ohmic contacts to the source, gate and drain regions can then be formed. The devices can include edge termination structures such as guard rings, junction termination extensions (JTE), or other suitable p-n blocking structures. The devices can be fabricated with different threshold voltages, and can be implemented for both depletion and enhanced modes of operation for the same channel doping. The devices can be used as discrete power transistors and in digital, analog, and monolithic microwave integrated circuits.Type: ApplicationFiled: November 6, 2007Publication date: May 29, 2008Applicants: SEMISOUTH LABORATORIES, INC., MISSISSIPPI STATE UNIVERSITYInventors: Lin Cheng, Michael S. Mazzola
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Patent number: 7374986Abstract: In a field effect transistor (FET), and a method of fabricating the same, the FET includes a semiconductor substrate, source and drain regions formed on the semiconductor substrate, a plurality of wire channels electrically connecting the source and drain regions, the plurality of wire channels being arranged in two columns and at least two rows, and a gate dielectric layer surrounding each of the plurality of wire channels and a gate electrode surrounding the gate dielectric layer and each of the plurality of wire channels.Type: GrantFiled: September 21, 2007Date of Patent: May 20, 2008Assignee: Samsung Electronics Co., Ltd.Inventors: Sungmin Kim, Ming Li, Eungjung Yoon
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Patent number: 7282400Abstract: Improved methods and structures are provided that are lateral to surfaces with a (110) crystal plane orientation such that an electrical current of such structures is conducted in the <110> direction. Advantageously, improvements in hole carrier mobility of approximately 50% can be obtained by orienting the structure's channel in a (110) plane such that the electrical current flow is in the <110> direction. Moreover, these improved methods and structures can be used in conjunction with existing fabrication and processing techniques with minimal or no added complexity.Type: GrantFiled: February 21, 2006Date of Patent: October 16, 2007Assignee: Micron Technology, Inc.Inventors: Wendell P. Noble, Leonard Forbes, Alan R. Reinberg
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Patent number: 7115921Abstract: Gate conductors on an integrated circuit are formed with enlarged upper portions which are utilized to electrically connect the gate conductors with other devices. A semiconductor device comprises a gate conductor with an enlarged upper portion which electrically connects the gate conductor to a local diffusion region. Another semiconductor device comprises two gate conductors with enlarged upper portions which merge to create electrically interconnected gate conductors. Methods for forming the above semiconductor devices are also described and claimed.Type: GrantFiled: August 31, 2004Date of Patent: October 3, 2006Assignee: International Business Machines CorporationInventors: Lawrence A. Clevenger, Timothy Joseph Dalton, Louis L. Hsu, Carl Radens, Keith Kwong Hon Wong, Chih-Chao Yang
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Patent number: 7074657Abstract: A multiple-channel semiconductor device has fully or partially depleted quantum wells and is especially useful in ultra large scale integration devices, such as CMOSFETs. Multiple channel regions are provided on a substrate with a gate electrode formed on the uppermost channel region, separated by a gate oxide, for example. The vertical stacking of multiple channels and the gate electrode permit increased drive current in a semiconductor device without increasing the silicon area occupied by the device.Type: GrantFiled: November 14, 2003Date of Patent: July 11, 2006Assignee: Advanced Micro Devices, Inc.Inventors: James N. Pan, John G. Pellerin, Jon Cheek
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Patent number: 7049185Abstract: In a semiconductor device including active areas where transistors are formed and a field area for isolating the active areas from each other, the field area has a plurality of dummy areas where dummy gates are formed.Type: GrantFiled: December 12, 2000Date of Patent: May 23, 2006Assignee: NEC Electronics CorporationInventor: Kazuyuki Ito
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Patent number: 6933186Abstract: A method of improving the tolerance of a back-end-of-the-line (BEOL) thin film resistor is provided. Specifically, the method of the present invention includes an anodization step which is capable of converting a portion of base resistor film into an anodized region. The anodized resistor thus formed has a sheet resistivity that is higher than that of the base resistor film.Type: GrantFiled: September 21, 2001Date of Patent: August 23, 2005Assignee: International Business Machines CorporationInventors: John M. Cotte, Kenneth J. Stein, Seshadri Subbanna, Richard P. Volant
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Patent number: 6929988Abstract: The cellular structure of the power device includes a substrate that has a highly doped drain region. Over the substrate there is a more lightly doped epitaxial layer of the same doping. Above the epitaxial layer is a well region formed of an opposite type doping. Covering the wells is an upper source layer of the first conductivity type that is heavily doped. The trench structure includes a sidewall oxide or other suitable insulating material that covers the sidewalls of the trench. The bottom of the trench is filled with a doped polysilicon shield. An interlevel dielectric such as silicon nitride covers the shield. The gate region is formed by another layer of doped polysilicon. A second interlevel dielectric, typically borophosphosilicate glass (BPSG) covers the gate. In operation, current flows vertically between the source and the drain through a channel in the well when a suitable voltage is applied to the gate.Type: GrantFiled: October 1, 2003Date of Patent: August 16, 2005Assignee: Fairchild Semiconductor CorporationInventor: Jun Zeng
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Patent number: 6888182Abstract: A thin film transistor of the present invention is provided with (i) a plurality of divided channel regions formed under a gate electrode, and (ii) divided source regions and divided drain regions between which each of the divided channel regions is sandwiched, the divided source regions being connected with one another, and the divided drain regions being connected with one another. Here, the divided channel regions are so arranged that a spacing between the divided channel regions is smaller than a channel divided width which is a width of one divided channel region, the channel divided width is not more than 50 ?m, and the spacing is not less than 3 ?m. With this arrangement, it is possible to provide a thin film transistor capable of obtaining reliability with reducing the variation in threshold voltage by reducing the self-heating at the channel regions, as well as capable of reducing the increase of a layout area.Type: GrantFiled: March 18, 2003Date of Patent: May 3, 2005Assignee: Sharp Kabushiki KaishaInventors: Masahiro Mitani, Yasumori Fukushima
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Patent number: 6855989Abstract: A fin field effect transistor includes a fin, a source region, a drain region, a first gate electrode and a second gate electrode. The fin includes a channel. The source region is formed adjacent a first end of the fin and the drain region is formed adjacent a second end of the fin. The first gate electrode includes a first layer of metal material formed adjacent the fin. The second gate electrode includes a second layer of metal material formed adjacent the first layer. The first layer of metal material has a different work function than the second layer of metal material. The second layer of metal material selectively diffuses into the first layer of metal material via metal interdiffusion.Type: GrantFiled: October 1, 2003Date of Patent: February 15, 2005Assignee: Advanced Micro Devices, Inc.Inventors: Haihong Wang, Shibly S. Ahmed, Ming-Ren Lin, Bin Yu
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Patent number: 6853020Abstract: A double-gate semiconductor device includes a substrate, an insulating layer, a fin and two gates. The insulating layer is formed on the substrate and the fin is formed on the insulating layer. A first gate is formed on the insulating layer and is located on one side of the fin. A portion of the first gate includes conductive material doped with an n-type dopant. The second gate is formed on the insulating layer and is located on the opposite side of the fin as the first gate. A portion of the second gate includes conductive material doped with a p-type dopant.Type: GrantFiled: November 8, 2002Date of Patent: February 8, 2005Assignee: Advanced Micro Devices, Inc.Inventors: Bin Yu, Judy Xilin An
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Publication number: 20040014263Abstract: A high-voltage and low on-resistance semiconductor device incorporates a trench structure that provides improved switching characteristics. In a preferred embodiment, a Trench Lateral Power MISFET is provided having a gate, channel and drift regions that are built on the side-walls of the trench. The process used to form the MISFET involves a self-aligned trench bottom contact hole to contact a source provided at the bottom of the trench to achieve minimum pitch and very low on-resistance. An example of a MISFET with 80 V breakdown voltage having a cell pitch of 3.4 microns is disclosed in which an on-resistance of 0.7 m&OHgr;-cm2 is realized. The switching characteristics of the MISFET are twice as good as that of prior MISFET device structures.Type: ApplicationFiled: June 10, 2003Publication date: January 22, 2004Inventors: Naoto Fujishima, C. Andre T. Salama
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Patent number: 6558996Abstract: Plural p+-type regions are formed on a silicon substrate, and thereafter, an n-type epitaxial growth layer is formed. Narrow concave portions are formed to extend between the surface of the epitaxial growth layer 14 and the silicon substrate and to have the almost the same lateral sectional shape. As a result, remaining parts, which are defined by the concave portions, of the epitaxial growth layer on p+-type field limiting rings are separated from the silicon substrate. Thus, a depletion layer is spread beyond the field limiting rings and a large forward voltage-resistance can be realized.Type: GrantFiled: October 18, 2000Date of Patent: May 6, 2003Assignee: NGK Insulators, Inc.Inventor: Naohiro Shimizu
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Patent number: 6551865Abstract: Openings are formed in a laminate of a polycrystalline silicon film and an LTO film on a channel layer. While the laminate is used as a mask, impurities are implanted into a place in the channel layer which is assigned to a source region. Also, impurities are implanted into another place in the channel layer which is assigned to a portion of a second gate region. A portion of the polycrystalline silicon film which extends from the related opening is thermally oxidated. The LTO film and the oxidated portion of the polycrystalline silicon film are removed. While a remaining portion of the polycrystalline silicon film is used as a mask, impurities are implanted into a place in the channel layer which is assigned to the second gate region. Accordingly, the source region and the second gate region are formed on a self-alignment basis which suppresses a variation in channel length.Type: GrantFiled: March 28, 2002Date of Patent: April 22, 2003Assignee: Denso CorporationInventors: Rajesh Kumar, Hiroki Nakamura, Jun Kojima
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Patent number: 6524876Abstract: A conductive layer, including a lower layer made of refractory metal such as chromium, molybdenum, and molybdenum alloy and an upper layer made of aluminum or aluminum alloy, is deposited and patterned to form a gate wire including a gate line, a gate pad, and a gate electrode on a substrate. At this time, the upper layer of the gate pad is removed using a photoresist pattern having different thicknesses depending on position as etch mask. A gate insulating layer, a semiconductor layer, and an ohmic contact layer are sequentially formed. A conductive material is deposited and patterned to form a data wire including a data line, a source electrode, a drain electrode, and a data pad. Next, a passivation layer is deposited and patterned to form contact holes respectively exposing the drain electrode, the gate pad, and the data pad.Type: GrantFiled: April 7, 2000Date of Patent: February 25, 2003Assignee: Samsung Electronics Co., Ltd.Inventors: Bum-Ki Baek, Mun-Pyo Hong, Jang-Soo Kim, Sung-Wook Huh, Jong-Soo Yoon, Dong-Gyu Kim
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Patent number: 6486011Abstract: This invention discloses the present invention discloses a junction field effect transistor (JFET) device supported on a substrate. The JFET device includes a gate surrounded by a depletion region. As the distance between the gates is large enough, there is a gap between the depletion regions surrounding adjacent gates. Depletion mode JFET transistor which is normally on is provided. The normally on transistors respond to negative bias applied to the gates to shut of the current path in the substrate. The current path in the substrate is normally available with a zero gate bias. As the distance between the gates is reduced, the JFET transistor is normally off because the depletion regions surround the gates shut of the current channel. The depletion region responding to a positive bias applied to the gate to open a current path in the substrate wherein the current path in the substrate is shut off when the gate is zero biased.Type: GrantFiled: October 16, 2000Date of Patent: November 26, 2002Assignee: Lovoltech, Inc.Inventor: Ho-Yuan Yu
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Patent number: 6355513Abstract: A semiconductor device efficiently providing the DC currents required in both discrete and integrated circuits operated at low DC supply voltages. The device disclosed in the present invention is an asymmetrical, enhancement mode, Junction Field Effect Transistor (JFET). The device consists of an epitaxial layer on the surface of a substrate, both of which are doped with the same polarity. The epitaxial layer has a graded doping profile with doping density increasing with distance from the substrate. A grill-like structure is constructed within the upper and lower bounds of, and extending throughout the length and width of the epitaxial layer, and is doped with a polarity opposite to that of the epitaxial layer. A first electrical connection made to the exposed side of the substrate is defined as the drain electrode. A second electrical connection made to the exposed surface of the epitaxial layer is defined as the source electrode.Type: GrantFiled: September 25, 2000Date of Patent: March 12, 2002Assignee: Lovoltech, Inc.Inventor: Ho-Yuan Yu