Precision Device Or Process - Or With Condition Responsive Control Patents (Class 451/1)
  • Patent number: 5562523
    Abstract: In a grinding method wherein a rotating workpiece and a rotating grinding wheel are relatively moved toward and away from each other and wherein at least three of rough, fine and finish grinding step are performed successively at high, medium and low infeed rates respectively for grinding the workpiece, the grinding wheel is retracted to a back-off position at the end of the rough grinding step.
    Type: Grant
    Filed: September 30, 1994
    Date of Patent: October 8, 1996
    Assignee: Toyoda Koki Kabushiki Kaisha
    Inventors: Hiroaki Asano, Takao Yoneda, Takayuki Hotta
  • Patent number: 5562524
    Abstract: Apparatus for polishing a side of a thin, flat wafer of a semiconductor material includes first and second polishing heads which each hold a wafer against a wetted polishing surface and which each rotate and oscillate its respective wafer over the polishing surface. When the first polishing head is moved away from the polishing surface to clean, eject, and replace its wafer, the second polishing head occupies the space over the polishing surface normally occupied by the first polishing head so that the polishing surface is used substantially continuously, and not intermittently.
    Type: Grant
    Filed: May 4, 1994
    Date of Patent: October 8, 1996
    Inventor: Gerald L. Gill, Jr.
  • Patent number: 5525091
    Abstract: A transfer tool is provided with a block which has an elongated slot. With the elongated slot a beam is formed in a lower portion of the block. The beam can be adjusted for row bow of a slider row which includes magnetic heads. Three holes extend through the block to the slot, opening three exposed portions of the beam, one exposed portion being centrally located and the other two exposed portions being located laterally on each side of the central portion near the ends of the beam. The ends of the slot have transverse slots which allow the beam to flex more readily when pressures are applied to the exposed portions near the ends of the beam. Pins extend through the holes with their downward ends engaging the exposed beam portions. Actuators are employed to apply appropriate forces to the pins so that the beam can be selectively adjusted to compensate for row bow of the slider row.
    Type: Grant
    Filed: June 24, 1994
    Date of Patent: June 11, 1996
    Assignee: International Business Machines Corporation
    Inventors: Chung-Fai Lam, Yew-Nam Yong
  • Patent number: 5494473
    Abstract: The invention provides a new method and apparatus for electrically accessing a lapping sensor positioned along a row of slider sites on a wafer. The apparatus for accessing the lapping sensor may be positioned outside of the boundaries of the slider sites. The apparatus may also provide top conductors electrically connecting target pads to contact pads. The process for lapping rows of slider sites includes coupling a measurement device to a target pad, coupling a lapping sensor to the top conductor, and lapping the row until the measurement device detects a predetermined signal from the lapping sensor.
    Type: Grant
    Filed: July 7, 1993
    Date of Patent: February 27, 1996
    Assignee: Quantum Corporation
    Inventors: David J. Dupuis, David J. Kindler, Alan B. Smith
  • Patent number: 5463805
    Abstract: A system for lapping a magnetoresistive (MR) sensor on a slider to a proper height is disclosed. The system comprises simultaneously lapping the MR lap monitor and the MR sensor positioned on the slider until a resistance of a variable resistor located within the MR lap monitor is approximately equal to a resistance of a target resistor located within the MR lap monitor. During the lapping process, a reference resistor located within the lap monitor is compared to both the variable and target resistors to prevent a lapping failure. In one preferred embodiment, the reference, target, and variable resistors are formed from a ferromagnetic metal alloy. The MR lap monitor and the MR sensor are lapped until a height of the ferromagnetic metal alloy forming the variable resistor is approximately equal to a height of the ferromagnetic metal alloy forming the target resistor.
    Type: Grant
    Filed: February 7, 1994
    Date of Patent: November 7, 1995
    Assignee: Seagate Technology, Inc.
    Inventors: Gregory S. Mowry, Phillip E. Gorka, Brian D. Strayer, Alan G. Kracke
  • Patent number: 5456147
    Abstract: An automatic saw is provided having a rotatable saw blade for cutting through a workpiece which is carried on a movable arm, which permits the workpiece to be moved into engagement with the saw blade. The saw blade is mounted on a first shaft while the workpiece and arm are mounted on a second, rotary shaft. Typically, a load cell is carried on the second shaft to sense torsional stress created by the pressure of the saw against the workpiece. This torsional stress is a direct measurement of the pressure of the saw against the load cell, and may be used in a feedback system for automatic adjustment of the sawing conditions. Also, it is preferred for the second shaft to be longitudinally movable in an automatic manner by means of a threaded, rotary arrangement for longitudinally advancing and retracting the second shaft between predetermined positions. A rotary encoder may be used to monitor the rotary position of the second shaft and arm.
    Type: Grant
    Filed: May 27, 1992
    Date of Patent: October 10, 1995
    Assignee: Buehler, Ltd.
    Inventor: Horst Stange, Jr.
  • Patent number: 5441437
    Abstract: A floating-type or compliant follower system for use in conjunction with a robotic or automated workpiece finishing apparatus. The follower device in a preferred embodiment cooperates with the tool to create a contact force with the workpiece which can be maintained constant with a high degree of accuracy and with a high responsiveness. The follower device in a preferred embodiment includes a constant-torque rotatable electric motor, such as a servo motor, which torque remains constant even when the motor is held in a stall condition by an external load or is driven backwards by the load. The motor output is drivingly coupled through a rotary-to-linear drive mechanism to a follower which is coupled to a driving tool such as a belt grinder.
    Type: Grant
    Filed: February 18, 1993
    Date of Patent: August 15, 1995
    Inventor: Bryan A. Hulstedt
  • Patent number: 5413521
    Abstract: The open end of the nozzle 42 is positioned close to and facing the surface of the metal base 20 on the side were the portion of the semiconductor ingot is to be cut off. An electromagnetic valve 46 is provided in the passage through which compressed air is supplied to the nozzle 42. The initial position of the blade 19 is detected by the detector 50U and the counter 52 measures the distance the blade 19 travels downward from the detected position and then the comparator 56 detects the point at which the measured value matches the value set on the numeric value setting device 54. The electromagnetic valve 46 is opened to emit compressed air from the nozzle 42 after this detection, until the detection of the lower limit position of the blade 19 by the detector 50D.
    Type: Grant
    Filed: November 29, 1993
    Date of Patent: May 9, 1995
    Assignee: Shin-Etsu Handotai Company, Ltd.
    Inventors: Seiichi Terashima, Masao Kita
  • Patent number: 5413520
    Abstract: The conical internal teeth (7) of a spur gear grinding tool (2) mesh with the teeth (6) of a spur gear workpiece (1) or a dressing spur gear. The tool axis (4) forms an acute angle (.gamma.) with the workpiece axis (3). To grind and to dress, the spur gear tool (2) is fed relative to the workpiece (1) in the direction of the tool axis (4). In this manner an optimal tooth meshing between the tool (2) and the workpiece (1) over a wide dressing range and a constant finishing are achieved.
    Type: Grant
    Filed: August 12, 1992
    Date of Patent: May 9, 1995
    Assignee: Reishauer AG.
    Inventor: Armin Feisel
  • Patent number: 5411430
    Abstract: The present invention provides a hybrid lens having an axially asymmetrical non-spherical shape, good mass productivity, and excellent shape precision surface precision as well as environment resistant property, and a method for fabricating same, as well as a method and a device for a laser printer using that hybrid lens. In particular, there are disclosed a method, by which, when an axially asymmetrical non-spherical convex lens is formed by the replica method, the shape thereof is transcribed with a high precision, as well as a method and a device for fabricating an axially asymmetrical non-spherical concave lens (female die) serving as an original for the transcription. In a device for fabricating a female die by direct grinding, the positions of a rotation axis of an object to be worked and a rotation axis of a grinding wheel are controlled and it has further a function of correcting mounting errors, when the object to be worked and the grinding wheel are mounted.
    Type: Grant
    Filed: September 25, 1992
    Date of Patent: May 2, 1995
    Assignees: Hitachi Ltd., Hitachi Koki Co., Ltd.
    Inventors: Takashi Nishimura, Akira Arimoto, Yoshinori Miyamura, Yumiko Anzai, Yoshimasa Kondo, Fumihiko Uchida, Shigeo Moriyama
  • Patent number: 5404680
    Abstract: A method for polishing a slight region of the surface of a workpiece utilizes an actuator or actuators having piezoelectric elements. The actuators cause slight movement of a polishing portion disposed at the leading end of a polishing tool in an XY-direction parallel with the surface of the workpiece and/or a Z-direction perpendicular to the surface of the workpiece. A polishing material, including a magnetic fluid and nonmagnetic abrasive grains dispersed in the magnetic fluid, is held magnetically in a space between the polishing portion and the workpiece.
    Type: Grant
    Filed: March 16, 1994
    Date of Patent: April 11, 1995
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Shinichi Mizuguchi, Koji Kato, Noritsugu Umehara
  • Patent number: 5405285
    Abstract: The diameter, the orientation flat width/notch depth and the length of the block 10p are measured by the measuring devices 71a, 71b and 71c respectively and then the machining errors .DELTA.Dp, .DELTA.Wp and .DELTA.Lp in the measured values against the set values are calculated at the error calculation unit 833. Then .DELTA.Dp, .DELTA.Wp and .DELTA.Lp are stored in memory at the memory unit 834 in correspondence with the identification codes IDi and IDj of the grinding device 5i (i=1-N) and the cutting device 6j (j=1-M) that performed the machining. Then at the average value calculation unit 835, the average values of .DELTA.Dp and .DELTA.Wp for each of the grinding devices 51-5N and the average value of the .DELTA.Lp for each of the cutting devices 61-6M are calculated. The average values of .DELTA.Dp and .DELTA.Wp are supplied to the corresponding grinding device 5i as the diameter correction value and the width/depth correction value respectively and the average value of .DELTA.
    Type: Grant
    Filed: January 28, 1994
    Date of Patent: April 11, 1995
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Yoshihiro Hirano, Atsushi Ozaki
  • Patent number: 5377452
    Abstract: A grinding apparatus for grinding a stamper for forming a signal recording part, of an information signal recording disc is disclosed. The grinding apparatus includes a turntable holding and rotationally driving the stamper and an abrasive head for bringing a mounting surface of the stamper opposite to its surface carrying projections and recesses for molding the signal recording part of the information signal recording disc into sliding contact with an abrasive member. The rotational velocity of the turntable is controlled depending on the position of the abrasive head with respect to the stamper for rendering the relative speed of sliding contact between the stamper and the abrasive member constant for uniform grinding of the mounting surface of the stamper uniformly across its inner and outer peripheries.
    Type: Grant
    Filed: November 30, 1992
    Date of Patent: January 3, 1995
    Assignee: Sony Corporation
    Inventor: Yoshihiro Yamaguchi
  • Patent number: 5377453
    Abstract: Apparatus for automatically polishing run-out table rolls, comprising: (a) a run-out table polisher take-up reel operatively connected to a carrier belt having abrasive material affixed thereto; and (b) control means for paying out and then retrieving the carrier belt onto the run-out table in response to one or more permissive signals indicative of the operational status of the run-out table. A method of automatically polishing run-out table rolls, comprising: (a) receiving one or more signals indicative of the operational status of a run-out table; (b) processing the signal(s) to determine whether a permissive condition for polishing the run-out table rolls exists; (c) in response to a determined permissive condition, paying out from a take-up reel a carrier belt having abrasive material affixed thereto; and (d) retrieving the carrier belt onto the take-up reel.
    Type: Grant
    Filed: February 12, 1993
    Date of Patent: January 3, 1995
    Inventor: George C. Perneczky