Laminate Patents (Class 451/533)
  • Patent number: 7455571
    Abstract: A window polishing pad having a reduced stress pad window formed therein for performing optical end point detection are provided, wherein the window polishing pad comprises a pad window and a pressure relief channel, wherein the pressure relief channel extends to an outer periphery of the window polishing pad from a cavity formed behind the pad window when the window polishing pad is interfaced with a platen and wherein a membrane is provided over at least one of an inlet and an outlet of the pressure relief channel. Also disclosed are methods of making and of using the window polishing pads to polish a semiconductor wafer.
    Type: Grant
    Filed: June 20, 2007
    Date of Patent: November 25, 2008
    Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
    Inventors: Charles C. Kuo, Jennifer M. O'Sullivan
  • Publication number: 20080287048
    Abstract: When a segmented grinding pad (11, 12, 13) of a continuous belt grinding machine is inclined, the modified position of the row (15) of key elements in relation to the original, for example, right-angled position of the row (11) of segments presents a problem. The aim of the invention is to carry out an approximate comparison of the deviations created by the lateral displacement of the segments S1 . . . Sn by means of a lever device (16) or a servomotor. The full compensation of the deviations of the segments from the longitudinal axis thereof to the key elements can be achieved by a special embodiment of one such device.
    Type: Application
    Filed: March 27, 2006
    Publication date: November 20, 2008
    Applicant: KUNDIG AG
    Inventor: Stephan Kundig
  • Patent number: 7452265
    Abstract: An abrasive article with an integral dust collection system. The abrasive article comprises a porous abrasive layer with openings, a first filter media with channels, a second filter media, a third filter media with channels, a fourth filter media, and an optional attachment layer. The openings of the porous abrasive layer cooperate with the channels to allow the flow of particles from the abrasive surface to the filter media.
    Type: Grant
    Filed: December 21, 2006
    Date of Patent: November 18, 2008
    Assignee: 3M Innovative Properties Company
    Inventors: Thomas W. Rambosek, Edward J. Woo, Curtis J. Schmidt
  • Patent number: 7442113
    Abstract: A polishing pad having an upper layer with a first visual characteristic. The upper layer is adapted to erode against a pad conditioner at a uniform rate during a pad conditioning process. At least one lower layer with at least a second visual characteristic is disposed beneath the upper layer. The first visual characteristic is visually distinguishable from the second visual characteristic. The at least one lower layer is adapted to polish a substrate, where the visual distinguishability between the upper layer and the at least one lower layer provides a visual indication of whether the pad conditioning process has been accomplished in a uniform manner.
    Type: Grant
    Filed: April 23, 2003
    Date of Patent: October 28, 2008
    Assignee: LSI Corporation
    Inventors: Michael J. Berman, Matthew R. Trattles
  • Patent number: 7435161
    Abstract: The invention is directed to a multi-layer polishing pad for chemical-mechanical polishing comprising a porous polishing layer and a porous bottom layer, wherein the bottom layer is substantially coextensive with the polishing layer, the polishing layer being joined to the bottom layer without the use of an adhesive; the polishing layer having an average surface roughness, Ra, that is greater than the Ra of the bottom layer.
    Type: Grant
    Filed: April 25, 2005
    Date of Patent: October 14, 2008
    Assignee: Cabot Microelectronics Corporation
    Inventors: Abaneshwar Prasad, Michael S. Lacy
  • Patent number: 7429210
    Abstract: A polishing article and method for manufacturing a polishing article for use in a chemical mechanical polishing process is disclosed. The polishing article has a plurality of polishing material tiles separated by grooves formed in or through a polishing material and may be adhesively bound to a base film. The polishing article may include various polygonal tiles and oval shapes formed in the polishing material which allow enhanced slurry retention and ease in rolling from a polishing material supply roll and onto a take-up roll in a web type platen assembly. The polishing article may also include an upper carrier film adapted to minimize delaminating stress placed in an area of the polishing article that is not adapted for polishing. A method and apparatus for manufacturing the various embodiments of the polishing article and a replacement supply roll are also disclosed.
    Type: Grant
    Filed: January 23, 2007
    Date of Patent: September 30, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Benjamin A. Bonner, Peter McReynolds, Gregory E. Menk, Anand N. Iyer, Gopalakrishna B. Prabhu, Erik S. Rondum, Robert L. Jackson, Garlen Leung
  • Patent number: 7427340
    Abstract: A method and apparatus for a processing pad assembly for polishing a substrate is disclosed. The processing pad assembly has a conductive processing pad having a plurality of raised features made of a conductive composite disposed on a conductive carrier. The raised features are adapted to polish the feature surface of a substrate and define channels therebetween. The conductive processing pad may have lower features made of a conductive composite that extend into the sub-pad from the conductive carrier. The conductive processing pad is adhered to a sub-pad bound to an opposing conductive layer and the opposing conductive layer bound to a platen assembly.
    Type: Grant
    Filed: April 8, 2005
    Date of Patent: September 23, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Rashid A. Mavliev, Ralph M. Wadensweiler
  • Patent number: 7422516
    Abstract: Embodiments of a polishing article for polishing a substrate are provided. In one embodiment, the polishing article includes an annular upper layer made of a dielectric material coupled to an annular lower layer made of a conductive material, and an annular subpad sandwiched between the annular upper layer and the annular lower layer forming a replaceable assembly therewith.
    Type: Grant
    Filed: October 8, 2007
    Date of Patent: September 9, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Paul D. Butterfield, Liang-Yuh Chen, Yonqi Hu, Antoine P. Manens, Rashid Mavliev, Stan D. Tsai, Feng Q. Liu, Ralph Wadensweiler, Lizhong Sun, Siew S. Neo, Alain Duboust
  • Publication number: 20080207101
    Abstract: An abrasive element has a first surface region which coincides with an enveloping surface of the element, and a second surface region which does not. When the element is pressed against a planar surface, part of the second surface region, which is provided with abrasive material, comes into contact with the surface. Also disclosed are a system comprising at least two part-elements which can be connect to form an abrasive element, and methods for making and using the abrasive element.
    Type: Application
    Filed: February 22, 2008
    Publication date: August 28, 2008
    Applicant: SIA ABRASIVES INDUSTRIES AG
    Inventor: Patrick Muller
  • Patent number: 7393269
    Abstract: An abrasive filter assembly with an integral dust collection system. The abrasive filter assembly comprises a porous element, a first filter media with channels, a second filter media, and an attachment interface layer. The openings of the porous element cooperate with the channels to allow the flow of particles from the porous element to the second filter media. The porous element can be an abrasive article or an attachment surface for an abrasive article.
    Type: Grant
    Filed: September 16, 2005
    Date of Patent: July 1, 2008
    Assignee: 3M Innovative Properties Company
    Inventors: Thomas W. Rambosek, Rufus C. Sanders, Jr.
  • Patent number: 7390244
    Abstract: An abrasive article mounting assembly with an integral dust collection system. The abrasive attachment interface is configured to releasably engage and support an abrasive article, such as, for example, a porous abrasive sheet or disc.
    Type: Grant
    Filed: September 16, 2005
    Date of Patent: June 24, 2008
    Assignee: 3M Innovative Properties Company
    Inventors: Edward J. Woo, Thomas W. Rambosek, Rufus C. Sanders, Jr., Ehrich J. Braunschweig, Seyed A. Angadjivand, Suresh Kalatoor, Curtis J. Schmidt, Charles R. Wald, Donna W. Bange
  • Publication number: 20080139093
    Abstract: This invention relates to reinforcement of various items by the use of a fibre substrate such as filament tape. The reinforced items may be used for strengthening abrasive paper, packaging and cabling.
    Type: Application
    Filed: September 6, 2007
    Publication date: June 12, 2008
    Inventor: Stephen Arthur Dickens
  • Patent number: 7381121
    Abstract: Disclosed is a base pad of polishing pad, which is used in conjunction with polishing slurry during a chemical-mechanical polishing or planarizing process, and a multilayer pad using the same. Since the base pad according to the present invention does not have fine pores, it is possible to prevent permeation of polishing slurry and water and to avoid non uniformity of physical properties. Thereby, it is possible to lengthen the lifetime of the polishing pad.
    Type: Grant
    Filed: February 16, 2005
    Date of Patent: June 3, 2008
    Assignee: SKC Co., Ltd.
    Inventors: Eu-Gene Song, Ju-Yeol Lee, Sung-Min Kim, Jae-Seok Kim, Hyun-Woo Lee
  • Patent number: 7377018
    Abstract: A subpad support for use in a web format or belt format polishing apparatus for polishing one or more layers of semiconductor device structures. The subpad support includes a subpad retention element for nonadhesively securing the subpad thereto. The subpad support may also include one or more lips protruding therefrom so as to at least substantially inhibit lateral movement of the subpad relative to the subpad support. Polishing apparatus including the subpad support are also disclosed. The polishing pads of such polishing apparatus may be at least partially moved away from the subpad or subpad support so as to facilitate assembly of a subpad with the subpad support or removal of the subpad from the subpad support without damaging the polishing pad. Methods of removably securing a subpad to the subpad support, removing the subpad from the subpad support, and replacing another subpad on the subpad support, as well as polishing methods, are also disclosed.
    Type: Grant
    Filed: December 4, 2002
    Date of Patent: May 27, 2008
    Assignee: Micron Technology, Inc.
    Inventor: Theodore M. Taylor
  • Patent number: 7374477
    Abstract: A polishing system can have a rotatable platen, a polishing pad secured to the platen, a carrier head to hold a substrate against the polishing pad, and an eddy current monitoring system including a coil or ferromagnetic body that extends at least partially through the polishing pad. A polishing pad can have a polishing layer and a coil or ferromagnetic body secured to the polishing layer. Recesses can be formed in a transparent window in the polishing pad.
    Type: Grant
    Filed: April 16, 2002
    Date of Patent: May 20, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Manoocher Birang, Boguslaw A. Swedek
  • Patent number: 7364501
    Abstract: A sanding block includes a compressible core having at least one pair of sides characterized such that an abrasive material is adhered to said sides substantially along the surface thereof and having a juncture area defined between said two sides which does not have said abrasive material adhered thereto such that the abrasive material does not run continuously about the sides of the core thereby providing the two sides to be readily compressed toward one another. A method of forming the same is also provided.
    Type: Grant
    Filed: June 26, 2006
    Date of Patent: April 29, 2008
    Inventors: Terry Ali, Christopher Ali
  • Patent number: 7364497
    Abstract: A polishing pad for use in chemically mechanically polishing a semiconductor substrate enhances the uniformity of the rate at which material is removed from the surface of the semiconductor substrate, thereby ensuring the reproducibility of the chemical mechanical polishing process. The polishing pad has main grooves that divide an upper portion of the pad into a plurality of cells. At least one of the cells includes a land portion and a grooved portion substantially enclosed by the land portion. A respective slurry hole extends through the pad to the grooved portion such that slurry supplied through the slurry hole feeds into the grooved portion but is impeded by the land portion from flowing outwardly of the cell.
    Type: Grant
    Filed: June 30, 2005
    Date of Patent: April 29, 2008
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Moo-yong Park, Tae-hoon Lee, Jae-eung Koo
  • Patent number: 7354527
    Abstract: A chemical mechanical polishing pad which has a storage elastic modulus E?(30° C.) at 30° C. of 120 MPa or less and an (E?(30° C.)/E?(60° C.)) ratio of the storage elastic modulus E?(30° C.) at 30° C. to the storage elastic modulus E?(60° C.) at 60° C. of 2.5 or more when the storage elastic moduli of a polishing substrate at 30° C. and 60° C. are measured under the following conditions: initial load: 100 g maximum bias: 0.01 % frequency: 0.2 Hz. A chemical mechanical polishing process makes use of the above chemical mechanical polishing pad. The chemical mechanical polishing pad can suppress the production of a scratch on the polished surface in the chemical mechanical polishing step and can provide a high-quality polished surface, and the chemical mechanical polishing process provides a high-quality polished surface by using the chemical mechanical polishing pad.
    Type: Grant
    Filed: September 7, 2005
    Date of Patent: April 8, 2008
    Assignee: JSR Corporation
    Inventors: Hiroyuki Tano, Hideki Nishimura, Hiroshi Shiho
  • Patent number: 7344432
    Abstract: An article of manufacture and apparatus are provided for processing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including polishing article comprising a body having at least a partially conductive polishing surface. An electrode is disposed below the polishing surface having a dielectric material therebetween. A plurality of apertures may be formed in the polishing surface and the dielectric material to at least partially expose the electrode to the polishing surface. A membrane may be disposed between the electrode and the polishing surface that is permeable to ions and current to promote continuity between the electrode and the polishing surface.
    Type: Grant
    Filed: October 31, 2006
    Date of Patent: March 18, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Liang-Yun Chen, Yuchun Wang, Yan Wang, Alain Duboust, Daniel A. Carl, Ralph Wadensweiler, Manoocher Birang, Paul D. Butterfield, Rashid A. Mavliev, Stan D. Tsai, You Wang, Jie Diao, Renhe Jia, Lakshmanan Karuppiah, Robert Ewald
  • Patent number: 7338355
    Abstract: An abrasive article having an apertured coated abrasive member, filter media, and an attachment interface member is formed by an ultrasonic welding process. The abrasive article is useful for abrading a workpiece.
    Type: Grant
    Filed: June 13, 2006
    Date of Patent: March 4, 2008
    Assignee: 3M Innovative Properties Company
    Inventors: Rufus C. Sanders, Jr., Timothy J. Rowell, Satinder K. Nayar
  • Patent number: 7335239
    Abstract: A Chemical Mechanical Planarization (CMP) Pad. The CMP pad may be hydrophobic due to the incorporation of metal complexing agents. The CMP pad substantially retaining planarazation characteristics throughout planarization applications. Shearing, hardness, wearing, water absorbtion and electrical characteristics of the CMP pad remain substantially constant during CMP applications.
    Type: Grant
    Filed: November 17, 2003
    Date of Patent: February 26, 2008
    Assignee: Advanced Technology Materials, Inc.
    Inventor: Thomas H. Baum
  • Patent number: 7335094
    Abstract: A foamed plastic is cut to form a single-layer polishing pad having a desired rigidity and compressibility. A polishing surface of the polishing pad has a higher density than a mounting surface of the polishing pad. The polishing surface and the mounting surface may have different areas having different densities for achieving desired rigidity and compressibility property. Furthermore, methods of making such single-layer polishing pads are also disclosed.
    Type: Grant
    Filed: July 22, 2006
    Date of Patent: February 26, 2008
    Assignee: IV Technologies Co., Ltd.
    Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu
  • Patent number: 7331847
    Abstract: A carrier head for chemical mechanical polishing, includes a base, a support structure attached to the base having a surface for contacting a substrate, and a retaining structure attached to the base to prevent the substrate from moving along the surface. The retaining structure and the surface define a cavity for receiving the substrate. A polishing station includes a platen, a vibration damper mounted on the platen and a substrate polishing pad mounted on the vibration damper. The vibration damper includes a material that does not rebound to its original shape when subjected to a deformation.
    Type: Grant
    Filed: January 17, 2006
    Date of Patent: February 19, 2008
    Assignee: Applied Materials, Inc
    Inventors: Hung Chih Chen, John M. White, Shijian Li, Fred C. Redeker, Ramin Emami
  • Patent number: 7329175
    Abstract: A porous abrasive article that allows air and dust particles to pass through. The abrasive article has a screen abrasive and a porous attachment interface. The screen abrasive has an abrasive layer comprising a plurality of erectly oriented abrasive particles and at least one binder. The porous attachment interface cooperates with the screen abrasive to allow the flow of particles through the abrasive article.
    Type: Grant
    Filed: December 29, 2005
    Date of Patent: February 12, 2008
    Assignee: 3M Innovative Properties Company
    Inventors: Edward J. Woo, Thomas W. Rambosek, Curtis J. Schmidt
  • Patent number: 7329171
    Abstract: An abrasive article that includes a fixed abrasive element having a plurality of abrasive particles, a resilient element, and a plurality of rigid segments disposed between the fixed abrasive element and the resilient element.
    Type: Grant
    Filed: September 12, 2003
    Date of Patent: February 12, 2008
    Assignee: 3M Innovative Properties Company
    Inventor: Douglas P. Goetz
  • Patent number: 7316605
    Abstract: The present invention relates to a sheet for mounting a polishing workpiece. The sheet comprises a substrate and a surface layer. The substrate has a surface. The surface layer is located on the surface of the substrate, with no hole structure existing in the interior thereof, and has a plurality of through holes. Accordingly, when the polishing workpiece contacts the surface layer, the air therebetween is vented to the substrate via the through holes and then is easily vented out, without the phenomenon of air wrapping, which increases the adsorption force between the polishing workpiece and the sheet, thereby improving the polishing effect of the polishing workpiece.
    Type: Grant
    Filed: July 3, 2006
    Date of Patent: January 8, 2008
    Assignee: San Fang Chemical Industry Co., Ltd.
    Inventors: Chung-Chih Feng, I-Peng Yao, Chen-Hsiang Chao
  • Patent number: 7311592
    Abstract: An article of manufacture and apparatus are provided for planarizing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including polishing article comprising a body having at least a partially conductive surface adapted to polish the substrate. A plurality of perforations may be formed in the polishing article for flow of material therethrough. An electrode is also exposed to the polishing surface by at least a portion of the plurality of perforations. The article of manufacture may also include a polishing surface having a plurality of grooves, wherein a portion of the plurality of grooves intersect with a portion of the plurality of perforations.
    Type: Grant
    Filed: November 2, 2006
    Date of Patent: December 25, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Liang-Yuh Chen, Yuchun Wang, Yan Wang, Alain Duboust, Daniel A. Carl, Ralph Wadensweiler, Manoocher Birang, Paul D. Butterfield, Rashid Mavliev, Stan D. Tsai
  • Patent number: 7300338
    Abstract: A method of making and the resulting non-metallic CMP conditioning pad comprising a non-metallic substrate and a single layer of abrasive particles bonded to the substrate by a non-metallic bonding medium. Preferred substrates include aluminum oxide and graphite. A bonding system employing finely powdered aluminum oxide particles mixed with a suitable adhesive is employed to bond the abrasive layer to the aluminum oxide substrate. Silicon carbide particles mixed into a compatible adhesive carrier including a polymer composition is preferred for bonding the abrasive particle layer to a graphite or carbide substrate.
    Type: Grant
    Filed: August 23, 2006
    Date of Patent: November 27, 2007
    Assignee: Abrasive Technology, Inc.
    Inventors: Roy F. Wielonski, Loyal M. Peterman, Jr.
  • Patent number: 7300335
    Abstract: A polishing pad is used when a surface of a glass workpiece is polished for manufacturing a glass substrate of information recording medium. The polishing pad has a nap layer. The nap layer includes an inner layer that contains a plurality of closed cells, and an outer layer. A plurality of pores are formed on the surface of the outer layer. The sizes of the pores are minute compared to those of the closed cells.
    Type: Grant
    Filed: February 11, 2004
    Date of Patent: November 27, 2007
    Assignee: Hoya Corporation
    Inventors: Hirokazu Tajima, Tamaki Horisaka
  • Patent number: 7297049
    Abstract: A disposable sanding device is fabricated as a continuous rope-like article which is adapted for selective segmentation and application as a plurality of serially arranged disposable hand sanding devices or ropes. Each hand sanding device is formed as a generally elongated rod shaped base portion formed of lightweight material such as closed cellfoam having a relatively constant cross-section along its line of elongation. An abrasive surface is permanently applied to the external surface of the base portion via an intermediate adhesive layer. As constructed, the sanding device is operable to conform to curvilinear contours of a work piece to be sanded upon application of user induced loading against the work piece. A dispenser holds a rolled length of sanding rope and includes a cutter feature for severing pieces of sanding rope from the coil as required as well as a retainer for the free end of the coil. A tensioning hand tool holds a severed length of sanding rope for precise applications.
    Type: Grant
    Filed: November 10, 2006
    Date of Patent: November 20, 2007
    Inventor: James M. Pontieri
  • Patent number: 7294048
    Abstract: An abrasive article includes a substrate having opposed first and second surfaces, a make coat on at least a portion of the first surface, abrasive mineral particles on at least a portion of the make coat to provide an abrasive surface and a size coat arranged over at least a portion of the abrasive surface, wherein the size coat has a Young's modulus of less than 100,000 psi.
    Type: Grant
    Filed: June 18, 2004
    Date of Patent: November 13, 2007
    Assignee: 3M Innovative Properties Company
    Inventors: Eric W. Nelson, Chris A. Minick
  • Patent number: 7291063
    Abstract: The present invention relates to an article for altering a surface of a workpiece, or a polishing pad having a window. In particular, the polishing pad includes a polyurethane urea material wherein the polyurethane urea material contains cells which are at least partially filled with gas. The polyurethane urea material can be prepared by combining polyisocyanate and/or polyurethane prepolymer, hydroxyl-containing material, amine-containing material and blowing agent. The polishing pad according to the present invention is useful for polishing articles, and is especially useful for chemical mechanical polishing or planarization of microelectronic and optical electronic devices such as but not limited to semiconductor wafers. The window of the polishing pad is at least partially transparent and thus, can be particularly useful with polishing or planarizing tools that are equipped with through-the-platen wafer metrology.
    Type: Grant
    Filed: July 19, 2006
    Date of Patent: November 6, 2007
    Assignee: PPG Industries Ohio, Inc.
    Inventors: Robert G. Swisher, Alan E. Wang, William C. Allison
  • Patent number: 7285146
    Abstract: A resilient hand-held abrasive article includes a flexible conformable backing layer having opposed first and second major surfaces, a flexible reinforcing layer affixed to at least one of the backing layer first and second major surfaces, and abrasive particles arranged on the reinforcing layer, thereby defining an abrasive surface. The backing layer comprises a multiplicity of separated resilient bodies connected to each other in a generally planar array in a pattern that provides open spaces between adjacent connected bodies.
    Type: Grant
    Filed: December 28, 2005
    Date of Patent: October 23, 2007
    Assignee: 3M Innovative Properties Company
    Inventor: John G. Petersen
  • Patent number: 7285036
    Abstract: Embodiments of a pad assembly for processing a substrate are provided. The pad assembly includes a processing layer having a working surface adapted to process a substrate, a lower layer coupled to and disposed below the processing layer, and an electrode having an upper surface disposed above the lower layer and below the working surface of the processing layer. The upper surface of the electrode is at least partially exposed to the working surface by a plurality of apertures to provide an electrolyte pathway between the upper surface of the electrode and the working surface of the pad assembly.
    Type: Grant
    Filed: November 21, 2006
    Date of Patent: October 23, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Shou-Sung Chang, Stan D. Tsai, Donald J. K. Olgado, Liang-Yuh Chen, Alain Duboust, Ralph M. Wadensweiler
  • Patent number: 7278911
    Abstract: Embodiments of a polishing article for polishing a substrate are provided. In one embodiment, the polishing article includes a ring-shaped upper layer having a polishing surface, and a conductive layer coupled to the upper layer and forming a replaceable assembly therewith.
    Type: Grant
    Filed: August 30, 2005
    Date of Patent: October 9, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Paul D. Butterfield, Liang-Yuh Chen, Yonqi Hu, Antoine P. Manens, Rashid Mavliev, Stan D. Tsai, Feng Q. Liu, Ralph Wadensweiler, Lizhong Sun, Siew S. Neo, Alain Duboust
  • Publication number: 20070224923
    Abstract: A polishing pad with reduced cost and easy manufacturability without waste is provided. A disc-shaped polishing layer 31 having a plurality of through holes 34 formed therein, an adhesive layer 33 provided only in a position in a back surface of the polishing layer 31 where no through hole 34 is formed and a disc-shaped support plate 32 having a flat surface, which is joined to the back surface of the polishing layer 31 by the adhesive layer 33 are provided. Since an adhesive layer 33 is not exposed to bottoms of the through holes 34 of the polishing layer 31, acting the slurry over the adhesive layer 33 to strip the polishing layer 31 from the support plate 32 is inhibited. Since the through holes 34 formed in the polishing layer 31 do not extend to the support plate 32, a decrease in the mechanical strength is not caused.
    Type: Application
    Filed: March 26, 2007
    Publication date: September 27, 2007
    Applicant: NEC ELECTRONICS CORPORATION
    Inventor: Masafumi Shiratani
  • Patent number: 7267609
    Abstract: A dual purpose abrading device for smoothing, sanding or finishing a surface of an object while simultaneously surrounding, collecting and containing the particles or debris as they are being generated. The abrading device includes a porous member having a collecting surface with a recess defined therein and a three dimensional abrading member adapted in shape and size to be received within the recess of the porous member. When the abrading member is inserted into the recess of the porous member the abrading member has an exposed abrading surface at least a portion of which is covered with an abrading material. The abrading member is circumscribed by the porous member thereby surrounding, collecting and containing the particles or debris as it is being produced by the abrading device.
    Type: Grant
    Filed: September 8, 2005
    Date of Patent: September 11, 2007
    Inventor: John J. Hackett
  • Patent number: 7267601
    Abstract: A polishing cloth to be produced has a surface layer stacked over a base material. The surface layer is made of a foamed layer and a non-foamed layer, the foamed layer including air bubble cells and the non-foamed layer having an externally exposed surface where linear cuts are formed. These linear cuts reach the air bubble cells such that the air bubble cells communicate with the exterior through the linear cuts. These linear cuts are controlled to be 10 ?m or less in length. Such a polishing cloth is produced by applying a foamable coating material such as a foamable resin over a surface of the base material, foaming the foamable coating material to form the surface layer, and forming the linear cuts through the non-foamed layer.
    Type: Grant
    Filed: August 8, 2006
    Date of Patent: September 11, 2007
    Assignee: NIHON Micro Coating Co., Ltd.
    Inventors: Yuji Horie, Hiromitsu Okuyama, Kazuei Yamaguchi
  • Patent number: 7264536
    Abstract: A polishing layer of a polishing has a window member with a top surface positioned a predetermined distance below the polishing surface. A transparent layer can be positioned below the polishing layer and supporting the window member.
    Type: Grant
    Filed: September 23, 2003
    Date of Patent: September 4, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Andreas Norbert Wiswesser, Ramiel Oshana, Kerry F. Hughes, Jay Rohde, David Datong Huo, Dominic J. Benvegnu
  • Patent number: 7254861
    Abstract: A device for cleaning the tip portion and the side surfaces of a probe has two or more different kinds of intermediate sheets affixed to a substrate in a side-by-side relationship with respect to each other. One of these intermediate sheets is an elastic sheet having an elastic property. Another intermediate sheet of a different kind is a plastic sheet which is less elastic. The tip portion of a probe is cleaned by a polishing layer affixed to the elastic sheet. The side surfaces of the probe are cleaned by a polishing layer affixed to the plastic sheet. A porous foamed sheet having openings on its surface and having air bubbles inside may be used as the elastic sheet. A polishing layer is formed on the surface of the foamed sheet, having a porous surface with openings corresponding to the openings on the foamed sheet. A spacer may be provided between the substrate and the plastic sheet for adjusting the heights of the polishing layers formed over the intermediate sheets.
    Type: Grant
    Filed: November 5, 2002
    Date of Patent: August 14, 2007
    Assignee: NIHON Micro Coating Co., Ltd.
    Inventors: Izuru Morioka, Satoru Sato
  • Patent number: 7252582
    Abstract: A polishing pad for a chemical mechanical polishing has a body rotatable in a predetermined direction and having a working surface, the working surface being provided with grooves, the grooves being formed so that over the course of a single revolution of the pad said grooves extend in all directions in the plane of the working surface. Such an arrangement of grooves is the optimum configuration for CMP, especially copper CMP.
    Type: Grant
    Filed: August 25, 2004
    Date of Patent: August 7, 2007
    Assignee: JH Rhodes Company, Inc.
    Inventor: Peter Renteln
  • Patent number: 7252871
    Abstract: The present invention provides a chemical mechanical polishing pad comprising a window formed in the polishing pad, the window having a void provided on a side thereof. The polishing pad further comprises a void-pressure relief channel provided in the polishing pad from the void to a periphery of the polishing pad.
    Type: Grant
    Filed: June 16, 2004
    Date of Patent: August 7, 2007
    Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
    Inventors: T. Todd Crkvenac, Robert T. Gamble, Jason M. Lawhorn
  • Patent number: 7244170
    Abstract: An abrasive article with an integral dust collection system. The abrasive article comprises a porous abrasive layer with openings, a first filter media with channels, a second filter media, and an attachment interface layer. The openings of the porous abrasive layer cooperate with the channels to allow the flow of particles from the abrasive surface to the second filter media.
    Type: Grant
    Filed: September 16, 2005
    Date of Patent: July 17, 2007
    Assignee: 3M Innovative Properties Co.
    Inventors: Edward J. Woo, Thomas W. Rambosek, Rufus C. Sanders, Jr., Ehrich J. Braunschweig, Seyed A. Angadjivand, Suresh Kalatoor, Curtis J. Schmidt, Charles R. Wald, Donna W. Bange
  • Patent number: 7241204
    Abstract: A polishing pad has a resin sheet having a flat surface and abrading particles fixed inside and on the surface of this resin sheet. Its tensile strength is in the range of 30 MPa or greater and 70 MPa or less and preferably in the range of 40 MPa or greater and 60 MPa or less. Its tensile tear elongation is in the range of 50% or less, preferably 20% or less and more preferably 5% or less. The average diameter of the primary particles of the abrading particles is in the range of 0.005 ?m or greater and less than 0.5 ?m, and preferably in the range of 0.005 ?m or greater and 0.2 ?m or less. The content of the abrading particles fixed to the resin sheet is 10 volume % or greater and 50 volume % or less, or preferably 10 volume % or greater and 24 volume or less.
    Type: Grant
    Filed: September 7, 2006
    Date of Patent: July 10, 2007
    Assignee: Nihon Micro Coating Co., Ltd.
    Inventors: Jun Watanabe, Takuya Nagamine, Jun Tamura, Takashi Arahata
  • Patent number: 7238097
    Abstract: A transparent pad having a polishing surface with an average surface roughness of 5 ?m or less is used as a polishing pad. An indentation is formed on the back surface of the transparent pad such that its rate of light transmission is locally changed. The transparent pad has a rate of light transmission equal to or greater than 10% or preferably 30% for light of at least one wavelength in the range of 350 nm–900 nm.
    Type: Grant
    Filed: December 10, 2004
    Date of Patent: July 3, 2007
    Assignee: NIHON Microcoating Co., Ltd.
    Inventors: Hisatomo Ohno, Toshihiro Izumi, Mitsuru Saito, Takuya Nagamine, Claughton Miller, Ichiro Kodaka
  • Patent number: 7235114
    Abstract: A resilient flexible abrasive article includes a continuous backing layer including a support layer coated with foam, the continuous backing layer having opposed major surfaces, at least one of the major surfaces including a three dimensional surface topography including raised and recessed regions, and wherein the raised and recess regions are at least partially coated with abrasive particles, thereby defining an abrasive surface.
    Type: Grant
    Filed: March 16, 2006
    Date of Patent: June 26, 2007
    Assignee: 3M Innovative Properties Company
    Inventors: Chris A. Minick, Ian R. Owen
  • Patent number: 7235296
    Abstract: The present invention is directed to an abrasive article and methods of making the abrasive article. An abrasive coating on the abrasive article comprises at least 20% by weight of a superabrasive particle. The abrasive coating is derived from an abrasive slurry. The abrasive slurry may comprise and a dispersant having an AV wherein AV=1000*[(Amine Value)/(Mw)]. The dispersant comprises a polymer having a molecular weight (Mw) of greater than 500 g/mol and an AV of greater than 4.5, a polymer having a molecular weight (Mw) of greater than 10,000 g/mol and an AV of greater than 1.0, or a polymer having a molecular weight (Mw) of greater than 100,000 g/mol and an AV of greater than 0.
    Type: Grant
    Filed: March 5, 2002
    Date of Patent: June 26, 2007
    Assignee: 3M Innovative Properties Co.
    Inventors: William J. Hunt, Philip E. Kendall, Gregg D. Dahlke
  • Patent number: 7217179
    Abstract: A polishing pad having a polishing layer which has specific composition and a ratio of the storage elastic modulus at 30° C. to the storage elastic modulus at 60° C. of 2 to 15 and a ratio of the storage elastic modulus at 30° C. to the storage elastic modulus at 90° C. of 4 to 20 and is made of a polyurethane or polyurethane-urea. This polishing pad suppresses the scratching of the surface to be polished and planarizes the surface efficiently. A polishing pad having a polishing layer containing water-soluble particles can achieve a higher removal rate.
    Type: Grant
    Filed: October 11, 2005
    Date of Patent: May 15, 2007
    Assignee: JSR Corporation
    Inventors: Fujio Sakurai, Tomoo Koumura, Yoshinori Igarashi
  • Patent number: 7214124
    Abstract: Double-sided polishing equipment configured to polish a rectangular substrate, comprising a carrier having a pocket configured to accommodate a rectangular substrate, a lateral linear moving mechanism configured to move the carrier, first and second polishing pads with first and second rotational axes, respectively, offset from centers of the pads, the polishing surfaces of the first and second polishing pads being parallel. The equipment further includes at least one elevating mechanism coupled to at least one of the polishing pads, first and second rotary drive mechanisms coupled to each of the first and second polishing pads, respectively; and configured to rotate the first and second pads about the first and second rotational axes. A polishing-agent supplying device is present and configured to supply polishing agent to a plane where a substrate that is accommodated in the pocket to accommodate the substrate comes into contact with the polishing pads.
    Type: Grant
    Filed: September 13, 2006
    Date of Patent: May 8, 2007
    Assignee: Okamoto Machine Tool Works Ltd.
    Inventors: Kazuo Kobayashi, Katsuhiro Tsuji
  • Patent number: 7204742
    Abstract: The invention provides a chemical-mechanical polishing pad comprising a polishing layer comprising a hydrophobic region, a hydrophilic region, and an endpoint detection port. The hydrophobic region is substantially adjacent to the endpoint detection port. The hydrophobic region comprises a polymeric material having a surface energy of 34 mN/m or less and a polymeric material having a surface energy of more than 34 mN/m. The invention further provides a method of polishing a substrate comprising the use of the polishing pad.
    Type: Grant
    Filed: March 25, 2004
    Date of Patent: April 17, 2007
    Assignee: Cabot Microelectronics Corporation
    Inventor: Abaneshwar Prasad