By Optical Sensor Patents (Class 451/6)
  • Patent number: 8554356
    Abstract: A processing end point detection method detects a timing of a processing end point (e.g., polishing stop, changing of polishing conditions) by calculating a characteristic value of a surface of a workpiece (an object of polishing) such as a substrate. This method includes producing a spectral waveform indicating a relationship between reflection intensities and wavelengths at a processing end point, with use of a reference workpiece or simulation calculation, based on the spectral waveform, selecting wavelengths of a local maximum value and a local minimum value of the reflection intensities, calculating the characteristic value with respect to a surface, to be processed, from reflection intensities at the selected wavelengths, setting a distinctive point of time variation of the characteristic value at a processing end point of the workpiece as the processing end point, and detecting the processing end point of the workpiece by detecting the distinctive point during processing of the workpiece.
    Type: Grant
    Filed: October 5, 2007
    Date of Patent: October 8, 2013
    Assignees: Ebara Corporation, Kabushiki Kaisha Toshiba
    Inventors: Noburu Shimizu, Shinro Ohta, Koji Maruyama, Yoichi Kobayashi, Ryuichiro Mitani, Shunsuke Nakai, Atsushi Shigeta
  • Patent number: 8554351
    Abstract: Methods, systems, and apparatus for spectrographic monitoring of a substrate during chemical mechanical polishing are described. In one aspect, a computer-implemented method includes storing a library having a plurality of reference spectra, each reference spectrum of the plurality of reference spectra having a stored associated index value, measuring a sequence of spectra in-situ during polishing to obtain measured spectra, for each measured spectrum of the sequence of spectra, finding a best matching reference spectrum to generate a sequence of best matching reference spectra, determining the associated index value for each best matching spectrum from the sequence of best matching reference spectra to generate a sequence of index values, fitting a linear function to the sequence of index values, and halting the polishing either when the linear function matches or exceeds a target index or when the associated index value from the determining step matches or exceeds the target index.
    Type: Grant
    Filed: August 30, 2012
    Date of Patent: October 8, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey Drue David, Dominic J. Benvegnu, Harry Q. Lee, Boguslaw A. Swedek, Lakshmanan Karuppiah
  • Publication number: 20130260644
    Abstract: A method for grinding the surface of non-round workpieces. The method includes the steps of clamping a workpiece within a machining unit; machining the workpiece; without unclamping the workpiece, contactlessly measuring the workpiece using an optical measuring device having a conoscopic holography sensor with a characteristic measuring range; and machining and measuring the workpiece in an alternating manner to iteratively approach the desired measurements of a specified form by adjusting the distance between the optical measuring device and the surface of the workpiece depending on there being a deviation of the surface from the specified form so that a respectively measured area of the surface of the workpiece remains within the measuring range of the optical sensor.
    Type: Application
    Filed: February 18, 2013
    Publication date: October 3, 2013
    Applicant: L. Kellenberger & Co., AG
    Inventor: L. Kellenberger & Co. AG
  • Patent number: 8535115
    Abstract: A polishing apparatus includes a platen to hold a polishing pad having a plurality of optical apertures, a carrier head to hold a substrate against the polishing pad, a motor to generate relative motion between the carrier head and the platen, and an optical monitoring system. The optical monitoring system includes at least one light source, a common detector, and an optical assembly configured to direct light from the at least one light source to each of a plurality of separated positions in the platen, to direct light from each position of the plurality of separated positions to the substrate as the substrate passes over said each position, to receive reflected light from the substrate as the substrate passes over said each position, and to direct the reflected light from each of the plurality of separated positions to the common detector.
    Type: Grant
    Filed: January 28, 2011
    Date of Patent: September 17, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey Drue David, Boguslaw A. Swedek, Dominic J. Benvegnu, Sivakumar Dhandapani
  • Publication number: 20130237129
    Abstract: A chemical mechanical polishing system includes a carrier head having a flexible membrane and a chamber to apply pressure to the flexible membrane, a pressure control unit, a pressure supply line connecting the pressure control unit to the chamber, and a sensor located along the pressure supply line to detect a contaminant in the pressure supply line.
    Type: Application
    Filed: March 7, 2013
    Publication date: September 12, 2013
    Inventor: Ronald Vern Schauer
  • Publication number: 20130237126
    Abstract: A method for machining a profile into a silicon seed rod using a machine. The silicon seed rod is capable of being used in a chemical vapor deposition polysilicon reactor. The machine includes a plurality of grinding wheels. The method includes grinding a v-shaped profile into a first end of the silicon seed rod with one of the plurality of grinding wheels and grinding a conical profile in a second end of the silicon seed rod with another of the plurality of grinding wheels.
    Type: Application
    Filed: March 12, 2012
    Publication date: September 12, 2013
    Applicant: MEMC ELECTRONIC MATERIALS SPA
    Inventors: Rodolfo Bovo, Paolo Molino
  • Patent number: 8523636
    Abstract: A working object grinding method capable of grinding a working object reliably is provided. A working object 1 is irradiated with a laser beam while locating a converging point therewithin, so as to form a reformed region 7 in the working object 1 along a reformed-region forming line set at a predetermined distance inside from an outer edge of the working object 1 along the outer edge, and a rear face 21 of the working object 1 is ground. As a result, the reformed region 7 or fissures C1 extending therefrom can inhibit fissures generated in an outer edge portion 25 upon grinding the working object 1 from advancing to the inside, whereby the working object 1 can be prevented from fracturing.
    Type: Grant
    Filed: November 18, 2008
    Date of Patent: September 3, 2013
    Assignee: Hamamatsu Photonics K.K.
    Inventor: Naoki Uchiyama
  • Patent number: 8506355
    Abstract: A system and method are provided for in-situ inspection optical inspection during a parallel polishing process. The method provides a polishing device with a spindle bit for holding a metallurgical sample, and a rotatable wheel having an inner diameter with a top surface for accepting a polishing compound and a transparent outer diameter. An optical system underlies the wheel outer diameter for recording images of the metallurgical sample. The method polishes the metallurgical sample against the wheel inner diameter. Without releasing the metallurgical sample from the spindle bit, the metallurgical sample is moved to a first position overlying the wheel outer diameter, and the metallurgical sample is optically inspected. In one aspect, the polishing device has a cleaning system overlying the wheel outer diameter, and the method sprays the wheel outer diameter with cleaning solution to support an in-situ inspection.
    Type: Grant
    Filed: January 4, 2010
    Date of Patent: August 13, 2013
    Assignee: Applied Micro Circuits Corporation
    Inventor: Joseph Martin Patterson
  • Patent number: 8506354
    Abstract: A cup attaching apparatus for attaching a cup serving as a machining jig on a surface of a lens comprises: a white LED which is an illumination light source for illuminating the lens placed on a lens supporting member; a screen applied with an alignment mark, on which screen an image of the lens illuminated by illumination light from the white LED is projected; a movement device which moves the cup set in an arm toward the lens along a reference axis for cup attachment, the position of the reference axis being associated with the alignment mark; and a light intensity increasing and decreasing device which increases and decreases light intensity of the white LED in response to an operation signal from an operation member to be operated by an operator, the operation member being placed on a front of a housing of the apparatus.
    Type: Grant
    Filed: February 22, 2008
    Date of Patent: August 13, 2013
    Assignee: Nidek Co., Ltd.
    Inventor: Toshiro Matsumoto
  • Patent number: 8506356
    Abstract: An apparatus for chemical mechanical polishing (CMP) of a wafer has a rotatable platen to hold a polishing pad, a polishing head for holding the wafer against the polishing pad, an optical monitoring system and a position sensor. The platen has a hole therein, the optical monitoring system includes a light source to direct a light beam through the aperture toward the wafer from a side of the wafer contacting the polishing pad and a detector to receive reflections of the light beam from the wafer, and the position sensor senses when the hole is adjacent the wafer such that the light beam generated by the light source can pass through the hole and impinge on the wafer.
    Type: Grant
    Filed: August 4, 2010
    Date of Patent: August 13, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Manoocher Birang, Nils Johansson, Allan Gleason
  • Publication number: 20130183886
    Abstract: While data that indicate a relationship between a dressing position P defined by a distance between a rotating shaft 11 of a polishing pad 13 and a rotating shaft 31 of a dresser 30 and shape change of the polishing pad 13 based on input of a target shape of the polishing pad 13 and alternating repetition of dressing the polishing pad 13 by the dresser 30 and measurement of shape of the polishing pad 13 by a pad shape measurement instrument 20 is acquired at a stage prior to commencement of a series of polishing steps for continuously polishing a plurality of polishing target objects (semiconductor wafer W) by a polishing tool 10, the polishing pad 13 is machined to the target shape 13 while the dressing position P is controlled, whereby the dressing position P is set during the polishing steps on the basis of a processing result of this data.
    Type: Application
    Filed: March 5, 2013
    Publication date: July 18, 2013
    Applicant: NIKON CORPORATION
    Inventor: NIKON CORPORATION
  • Publication number: 20130178134
    Abstract: An abrasion arrangement is disclosed to abrade a surface of an item, the arrangement comprising a multiple axis robotic arm having at least five axes, an abrading cylinder mounted on the robotic arm and comprising abrasive means which comprise abrasive lamellae of an abrasive sheet, such as abrasive cloth, of which the front side has abrasive properties and which extend substantially radially from an elongated core and means for driving said core to rotate around a longitudinal axis of the core, and control means for controlling the operation of the robotic arm so to control e.g. the position of the abrading cylinder on said surface, the force with which the abrading cylinder is pressed towards said surface and the velocity with which the abrading cylinder is moved with respect to said surface.
    Type: Application
    Filed: July 8, 2011
    Publication date: July 11, 2013
    Applicant: ELTRONIC A/S
    Inventors: Keld Eriksen, Poul Lundum
  • Patent number: 8475228
    Abstract: A polishing pad has an opaque polishing layer with an aperture therethrough and a polishing surface, and a solid light-transmissive window in the aperture. The solid light-transmissive window includes an outer portion secured to the polishing layer and an inner portion secured to the outer portion. The outer portion has a upper surface recessed relative to the polishing surface, whereas the inner portion has an upper surface that is substantially co-planar with the polishing surface.
    Type: Grant
    Filed: May 12, 2011
    Date of Patent: July 2, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Dominic J. Benvegnu, Boguslaw A. Swedek, Jimin Zhang
  • Patent number: 8465342
    Abstract: A polishing system includes a polishing pad with an aperture that extends through all layers of the polishing pad and a light transmissive film positioned on top of a light-generating or light-guiding element of an optical monitoring system.
    Type: Grant
    Filed: April 16, 2012
    Date of Patent: June 18, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Jimin Zhang, Alain Duboust, Doyle E. Bennett
  • Publication number: 20130149938
    Abstract: A method of producing a diagram for use in selecting wavelengths of light in optical polishing end point detection is provided. The method includes polishing a surface of a substrate having a film by a polishing pad; applying light to the surface of the substrate and receiving reflected light from the substrate during the polishing of the substrate; calculating relative reflectances of the reflected light at respective wavelengths; determining wavelengths of the reflected light which indicate a local maximum point and a local minimum point of the relative reflectances which vary with a polishing time; identifying a point of time when the wavelengths, indicating the local maximum point and the local minimum point, are determined; and plotting coordinates, specified by the wavelengths and the point of time corresponding to the wavelengths, onto a coordinate system having coordinate axes indicating wavelength of the light and polishing time.
    Type: Application
    Filed: December 12, 2012
    Publication date: June 13, 2013
    Applicant: EBARA CORPORATION
    Inventor: EBARA CORPORATION
  • Patent number: 8460057
    Abstract: A computer-implemented method for process control in chemical mechanical polishing in which an initial pre-polishing thickness of a substrate is measured at a metrology station, a parameter of an endpoint algorithm is determined from the initial thickness of the substrate, a substrates is polished at a polishing station, and polishing stops when an endpoint criterion is detected using the endpoint algorithm.
    Type: Grant
    Filed: April 18, 2011
    Date of Patent: June 11, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Boguslaw A. Swedek, Bret W. Adams, Sanjay Rajaram, David A. Chan, Manoocher Birang
  • Patent number: 8454407
    Abstract: A polishing method polishes and planarizes a substrate. The substrate is pressed against a polishing surface on a rotating polishing table. During polishing, the polishing table is rotated, and the surface, being polished, of the substrate is scanned by an eddy current sensor provided in the polishing table. An output of the eddy current sensor is monitored, and substrate damage is detected from a change in the output of the eddy current sensor. Further, an output of an end point detecting sensor obtained by scanning the surface of the substrate is monitored, and the polishing end point is detected from a change in the output of the end point detecting sensor. After detecting the polishing end point, an output of the end point detecting sensor or another sensor is monitored, and detecting a film left on a part of the substrate is performed.
    Type: Grant
    Filed: July 29, 2009
    Date of Patent: June 4, 2013
    Assignee: Ebara Corporation
    Inventors: Taro Takahashi, Motohiro Niijima, Akihiko Ogawa
  • Patent number: 8431489
    Abstract: A chemical mechanical polishing pad having a polishing layer with an integral window and a polishing surface adapted for polishing a substrate selected from a magnetic substrate, an optical substrate and a semiconductor substrate, wherein the formulation of the integral window provides improved defectivity performance during polishing. Also provided is a method of polishing a substrate using the chemical mechanical polishing pad.
    Type: Grant
    Filed: July 31, 2012
    Date of Patent: April 30, 2013
    Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
    Inventors: Mary Jo Kulp, Shannon H Williams
  • Patent number: 8414355
    Abstract: A substrate processing apparatus having a polishing unit for polishing a periphery of a substrate. The substrate processing apparatus includes: a polishing unit configured to polish a periphery of a substrate; an imaging module configured to take an image of the periphery of the substrate polished by the polishing unit; and an image processing section configured to inspect a polished state of the substrate based on the image taken by the imaging module. The imaging module is configured to take the image of the periphery of the substrate when the polishing unit is not polishing the periphery of the substrate.
    Type: Grant
    Filed: July 23, 2009
    Date of Patent: April 9, 2013
    Assignee: Ebara Corporation
    Inventors: Toshifumi Kimba, Hiroaki Kusa
  • Publication number: 20130084779
    Abstract: The described embodiment relates generally to the polishing of a device housing. The device housing can be formed of a thermoplastic, or a metal such as aluminum or stainless steel. More particularly, a method and an apparatus are described for calibrating a polishing process in which a precise amount of material can be removed. Accurate measurement of such a polishing process can be especially helpful in accurately determining material removal rates and pad wear occurring across curved surfaces and edges where such parameters tend to be difficult to predict.
    Type: Application
    Filed: June 24, 2012
    Publication date: April 4, 2013
    Applicant: Apple Inc.
    Inventor: Simon R. LANCASTER-LAROCQUE
  • Patent number: 8408966
    Abstract: A glass manufacturing device includes a work container, a loading device, a sandblaster, a shield device, and a lift device. The loading device is received in the work container and loads a glass substrate in place. The sandblaster is arranged opposite to the loading device and sandblasts the glass substrate. The lift device is connected to the shield device and used for pressing the shield device onto the glass substrate during the process of sandblasting. The shield device includes a shield cover having a number of shield units. The surfaces of the shield units facing the bottom of the work container are engaged with elastic washers. The shield units are configured to shield portions of the glass substrate and prevent the portions of the glass substrate from being cut during sandblasting.
    Type: Grant
    Filed: November 4, 2010
    Date of Patent: April 2, 2013
    Assignee: Hon Hai Precision Industry Co., Ltd.
    Inventor: Shao-Kai Pei
  • Patent number: 8403725
    Abstract: An apparatus and method for machining workpieces is provided, in particular, for grinding the surface of non-round workpieces. The workpiece is clamped within a machining unit and the surface of this workpiece is contactlessly measured by means of a measuring device while the workpiece is clamped within the machine.
    Type: Grant
    Filed: August 18, 2008
    Date of Patent: March 26, 2013
    Assignee: L. Kellenberger & Co. AG
    Inventors: Daniel Honegger, Hugo Thurnherr, Claus P. Keferstein, Bernard Gschwend, Markus Ritter
  • Patent number: 8398456
    Abstract: A method of polishing a substrate includes rotating a polishing table having a polishing surface, holding the substrate by a top ring, bringing the substrate into contact with the polishing surface while swinging and rotating the top ring to polish the substrate, and monitoring a surface condition of the substrate by a monitoring sensor. A rotational speed of the polishing table and conditions of swing motion of the top ring are determined such that a position of the monitoring sensor, a position of a center of rotation of the top ring, and a direction of the swing motion of the top ring at a point of time when a predetermined period of time has elapsed after polishing of the substrate is started approximately coincide with their previous values at a point of time before the predetermined period of time has elapsed.
    Type: Grant
    Filed: April 26, 2010
    Date of Patent: March 19, 2013
    Assignee: Ebara Corporation
    Inventors: Yoichi Kobayashi, Yasumasa Hiroo
  • Patent number: 8398454
    Abstract: A method and apparatus for measuring the polishability of a solid material such as a dental restorative material includes using a series of apparatus to perform the steps of forming the material into a desired specimen with a generally planar surface, conditioning the surface by abrasion, measuring the abraded surface with a profile determination device, optionally measuring the amount of material abraded from the surface and the gloss of the abraded surface, polishing a portion of the abraded surface with a polishing device at a controlled load for a pre-determined time and measuring the roughness and/or gloss of the polished surface followed by comparison thereof to the corresponding measurements of the unpolished, conditioned portion of the specimen surface. Polishing materials and devices may also be tested using the apparatus and method for polishing a standardized material.
    Type: Grant
    Filed: September 30, 2009
    Date of Patent: March 19, 2013
    Assignee: American Dental Association
    Inventors: Nikola Njegovan, Spiro Megremis, Olga Sirovskaya, Hank Shepelak
  • Patent number: 8393933
    Abstract: A polishing system includes a polishing pad having a solid light-transmissive window, an optical fiber having an end, and a spacer having a vertical aperture therethrough. A bottom surface of the spacer contacts the end of the optical fiber, a top surface of the spacer contacts the underside of the window, and the vertical aperture is aligned with the optical fiber.
    Type: Grant
    Filed: December 22, 2009
    Date of Patent: March 12, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Jun Qian, Dominic J. Benvegnu, Ningzhuo Cui, Boguslaw A. Swedek, Thomas H. Osterheld
  • Patent number: 8393940
    Abstract: A polishing pad includes a polishing layer having a polishing surface, an adhesive layer on a side of the polishing layer opposite the polishing layer, and a solid light-transmitting window extending through and molded to the polishing layer. The solid light-transmitting window has an upper portion with a first lateral dimension and a lower portion with a second lateral dimension that is smaller than the first lateral dimension. A top surface of the solid light-transmitting window coplanar with the polishing surface and a bottom surface of the solid light-transmitting window coplanar with a lower surface of the adhesive layer.
    Type: Grant
    Filed: April 16, 2010
    Date of Patent: March 12, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Boguslaw A Swedek, Doyle E Bennett, Dominic J Benvegnu
  • Patent number: 8392012
    Abstract: A computer-implemented method includes receiving a first sequence of current spectra of reflected light from a first zone of a substrate. A second sequence of current spectra of reflected light from a second zone of the substrate is received. Each current spectrum from the first sequence of current spectra is compared to a plurality of reference spectra from a first reference spectra library to generate a first sequence of best-match reference spectra. Each current spectrum from the second sequence of current spectra is compared to a plurality of reference spectra from a second reference spectra library to generate a second sequence of best-match reference spectra. The second reference spectra library is distinct from the first reference spectra library.
    Type: Grant
    Filed: October 27, 2008
    Date of Patent: March 5, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey Drue David, Boguslaw A. Swedek, Harry Q. Lee
  • Patent number: 8387221
    Abstract: The invention relates to a device for finishworking of a forming tool for an auto body sheet metal part in which, in a first working step for identifying a surface region of a tool surface to be remachined, a sheet metal part which has been coated with a marking paint can be formed in a pressing process by means of the tool and, using the color impression of the sheet metal part on the tool surface, the surface region which is to be remachined is acquired, and then in a second working step the surface region to be remachined can be remachined by a corresponding surface treatment. According to the invention, the device has a machining apparatus which electronically acquires the tool surface with the color impression and, depending on the intensity of the color impression, determines the location and/or dimension of the surface area to be remachined and remachines it accordingly.
    Type: Grant
    Filed: July 14, 2008
    Date of Patent: March 5, 2013
    Assignee: Audi AG
    Inventors: Matthias Kerschner, Hubert Waltl, Martin Hoernig, Nadine Mueller
  • Patent number: 8388408
    Abstract: A method of producing a diagram for use in selecting wavelengths of light in optical polishing end point detection is provided. The method includes polishing a surface of a substrate having a film by a polishing pad; applying light to the surface of the substrate and receiving reflected light from the substrate during the polishing of the substrate; calculating relative reflectances of the reflected light at respective wavelengths; determining wavelengths of the reflected light which indicate a local maximum point and a local minimum point of the relative reflectances which vary with a polishing time; identifying a point of time when the wavelengths, indicating the local maximum point and the local minimum point, are determined; and plotting coordinates, specified by the wavelengths and the point of time corresponding to the wavelengths, onto a coordinate system having coordinate axes indicating wavelength of the light and polishing time.
    Type: Grant
    Filed: August 14, 2009
    Date of Patent: March 5, 2013
    Assignee: Ebara Corporation
    Inventors: Yoichi Kobayashi, Noburu Shimizu, Shinrou Ohta
  • Publication number: 20130052916
    Abstract: A method of controlling polishing includes polishing a metal layer of a substrate. The metal layer overlies an underlying layer structure. During polishing of the metal layer, a light beam is directed onto the first substrate. The metal layer is sufficiently thin that a portion of the light beam reflects from an exposed surface of the metal layer and a portion of the light beam passes through the metal layer and reflects from the underlying layer structure to generate a reflected light beam. The reflected light beam is monitored during polishing and a sequence of measured spectra is generated from the reflected light beam. At least one of a polishing endpoint or an adjustment for a polishing rate is determined from the sequence of measured spectra.
    Type: Application
    Filed: August 13, 2012
    Publication date: February 28, 2013
    Inventors: Jeffrey Drue David, Dominic J. Benvegnu
  • Patent number: 8369978
    Abstract: A computer-implemented method includes receiving a sequence of current spectra of reflected light from a substrate; comparing each current spectrum from the sequence of current spectra to a plurality of reference spectra from a reference spectra library to generate a sequence of best-match reference spectra; determining a goodness of fit for the sequence of best-match reference spectra; and determining at least one of whether to adjust a polishing rate or an adjustment for the polishing rate, based on the goodness of fit.
    Type: Grant
    Filed: September 3, 2009
    Date of Patent: February 5, 2013
    Assignee: Applied Materials
    Inventors: Jeffrey Drue David, Dominic J. Benvegnu, Harry Q. Lee, Boguslaw A. Swedek
  • Publication number: 20130017764
    Abstract: Polishing pads with apertures are described. Methods of fabricating polishing pads with apertures are also described.
    Type: Application
    Filed: July 15, 2011
    Publication date: January 17, 2013
    Inventors: William C. Allison, Diane Scott, Rajeev Bajaj
  • Patent number: 8342907
    Abstract: A polishing state monitoring apparatus measures characteristic values of a surface, being polished, of a workpiece to determine the timing of a polishing end point. The polishing state monitoring apparatus includes a light-emitting unit for applying light from a light source to a surface of a workpiece being polished, a light-receiving unit for receiving reflected light from the surface of the workpiece, a spectroscope unit for dividing the reflected light received by the light-receiving unit into a plurality of light rays having respective wavelengths, and light-receiving elements for accumulating the detected light rays as electrical information.
    Type: Grant
    Filed: November 30, 2009
    Date of Patent: January 1, 2013
    Assignees: Ebara Corporation, Shimadzu Corporation
    Inventors: Yoichi Kobayashi, Shunsuke Nakai, Hitoshi Tsuji, Yasuo Tsukuda, Junki Ishimoto, Kazunari Shinya
  • Patent number: 8337277
    Abstract: A polishing pad forms a planar surface on glass, semiconductors, dielectric material/metal composites and integrated circuits, as well as a polishing apparatus where it is difficult for the surface of the substrate to be scratched, the state of polishing can be accurately measured optically during polishing, and whether or not the entire surface of the workpiece is uniformly polished can be measured.
    Type: Grant
    Filed: January 29, 2007
    Date of Patent: December 25, 2012
    Assignee: Toray Industries, Inc.
    Inventors: Kuniyasu Shiro, Tomoyuki Honda, Miyuki Hanamoto
  • Publication number: 20120309266
    Abstract: The present disclosure relates to apparatus for grinding rotary blades, in particular scythe-like blades or circular blades, in particular for machines for slicing food products. The apparatus includes at least one mount for a rotary blade to which the rotary blade can be attached and at least one grinding tool. The grinding tool and the rotary blade attached in the mount are movable relative to one another such that a blade edge extending at the periphery of the rotary blade can be ground by the grinding tool. The apparatus includes a measuring device for determining the extent of the blade edge and a control which is designed to use the determined blade edge extent for controlling the relative movement between the grinding tool and the rotary blade.
    Type: Application
    Filed: June 1, 2012
    Publication date: December 6, 2012
    Applicant: Weber Maschinenbau GmbH Breidenbach
    Inventors: Jens Schroeder, Sabine Spillner, Gerd Lischinski, Maik Herrmann, Thomas Lunow
  • Publication number: 20120289124
    Abstract: A method of polishing includes polishing a substrate, making a sequence of measurements of light reflected from the substrate while the substrate is being polished, at least some of the measurements of the sequence of measurements differing due to material being removed during polishing, for each measurement in the sequence, determining a first value of a first characteristic and a second value of a different second characteristic of the light to generate a sequence of first values and second values, storing a predetermined path in a coordinate space of the first characteristic and the second characteristic, for each measurement in the sequence, determining a position on the path based on the first value and the second value, and determining at least one of a polishing endpoint or an adjustment for a polishing rate based on the position on the path.
    Type: Application
    Filed: May 9, 2011
    Publication date: November 15, 2012
    Inventors: Dominic J. Benvegnu, Boguslaw A. Swedek
  • Patent number: 8292693
    Abstract: A method of controlling the polishing of a substrate includes polishing a substrate on a first platen using a first set of parameters, obtaining first and second sequences of measured spectra from first and second regions of the substrate with an in-situ optical monitoring system, generating first and second sequences of values from the first and second sequences of measured spectra, fitting first and second linear functions to the first and second sequences of values, determining a difference between the first linear function and the second linear function, adjusting at least one parameter of the first set of parameters based on the difference, and polishing the second substrate on the first platen using the adjusted parameter.
    Type: Grant
    Filed: November 24, 2009
    Date of Patent: October 23, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey Drue David, Harry Q. Lee, Boguslaw A. Swedek, Dominic J. Benvegnu, Zhize Zhu, Wen-Chiang Tu
  • Publication number: 20120264354
    Abstract: A distance monitoring device is provided. The device is suitable for a chemical mechanical polishing (CMP) apparatus. A polishing head of the CMP apparatus includes a frame and a membrane. The membrane is mounted on the frame, and a plurality of air bags is formed by the membrane and the frame in the polishing head. The distance monitoring device includes a plurality of distance detectors disposed on the frame corresponding to the air bags respectively to set a location of each of the distance detectors on the frame as a reference point, wherein each of the distance detectors is configured to measure a distance between each of the reference points and the membrane.
    Type: Application
    Filed: April 13, 2011
    Publication date: October 18, 2012
    Applicant: NANYA TECHNOLOGY CORPORATION
    Inventors: Chien-Mao Liao, Yi-Nan Chen, Hsien-Wen Liu
  • Patent number: 8287330
    Abstract: A chemical mechanical polishing pad is described. A chemical mechanical polishing pad has an outer layer that includes a polishing surface, a first thinned region defined by a recess on a bottom surface of the pad, a first thick region surrounding the first thinned region, a second thinned region surrounding the first thick region, and a second thick region surrounding the second thinned region. The first thick region is not vertically extendable. The second thinned region defines one or more flexure mechanisms configured to make the first thinned region and the first thick region movable relative to the second thick region in a direction parallel or substantially parallel to the polishing surface.
    Type: Grant
    Filed: November 24, 2009
    Date of Patent: October 16, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Doyle E. Bennett, Boguslaw A. Swedek, David J. Lischka
  • Publication number: 20120258649
    Abstract: A polishing system includes a polishing pad with an aperture that extends through all layers of the polishing pad and a light transmissive film positioned on top of a light-generating or light-guiding element of an optical monitoring system.
    Type: Application
    Filed: April 16, 2012
    Publication date: October 11, 2012
    Inventors: Jimin Zhang, Alain Duboust, Doyle E. Bennett
  • Patent number: 8284560
    Abstract: An apparatus for monitoring the thickness of a conductive layer on a substrate includes a support to hold a substrate having a conductive layer, an eddy current monitoring system including a first plurality of core portions, and a motor to cause relative motion between the support and the eddy current monitoring system such that the substrate moves across the first plurality of core portions in a direction that defines a first axis. At least one core portion is positioned further from a second axis than at least two other core portions. The second axis is orthogonal to the first axis.
    Type: Grant
    Filed: November 11, 2009
    Date of Patent: October 9, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Hassan G. Iravani, Ingemar Carlsson, Boguslaw A. Swedek
  • Patent number: 8277281
    Abstract: A method and system are presented for monitoring a process sequentially applied to a stream of substantially identical articles by a processing tool, so as to terminate the operation of the processing tool upon detecting an end-point signal corresponding to a predetermined value of a desired parameter of the article being processed. The article is processed with the processing tool. Upon completing the processing in response to the end-point signal generated by an end-point detector continuously operating during the processing of the article, integrated monitoring is applied to the processed article to measure the value of the desired parameter. The measured value of the desired parameter is analyzed to determine a correction value thereof to be used for adjusting the end-point signal corresponding to the predetermined value of the desired parameter for terminating the processing of the next article in the stream.
    Type: Grant
    Filed: April 12, 2011
    Date of Patent: October 2, 2012
    Assignee: Nova Measuring Instruments Ltd.
    Inventor: Moshe Finarov
  • Publication number: 20120231702
    Abstract: A method of phasing a threaded grinding stone and a gear grinding machine are disclosed, wherein phasing of the threaded grinding stone with respect to a gear to be machined or to a dresser can be performed at high speed. A threaded grinding stone is phased with respect to a workpiece or a disk dresser prior to engagement. The phase of the threaded grinding stone is adjusted so that a tooth tip of the workpiece or a blade tip of the disk dresser faces the central position of an edge groove of the grinding stone. Subsequently an edge surface of the threaded grinding stone contacts an edge surface of the workpiece or an edge surface of the disk dresser. The phase of the threaded grinding stone is adjusted so that the tooth tip of the workpiece or the blade tip of the disk dresser is disposed in this latter phase.
    Type: Application
    Filed: September 28, 2009
    Publication date: September 13, 2012
    Applicant: MITSUBISHI HEAVY INDUSTRIES, LTD.
    Inventors: Yoshikoto Yanase, Kazuyuki Ishizu
  • Patent number: 8260446
    Abstract: Methods, systems, and apparatus for spectrographic monitoring of a substrate during chemical mechanical polishing are described. In one aspect, a computer-implemented method includes storing a library having a plurality of reference spectra, each reference spectrum of the plurality of reference spectra having a stored associated index value, measuring a sequence of spectra in-situ during polishing to obtain measured spectra, for each measured spectrum of the sequence of spectra, finding a best matching reference spectrum to generate a sequence of best matching reference spectra, determining the associated index value for each best matching spectrum from the sequence of best matching reference spectra to generate a sequence of index values, fitting a linear function to the sequence of index values, and halting the polishing either when the linear function matches or exceeds a target index or when the associated index value from the determining step matches or exceeds the target index.
    Type: Grant
    Filed: February 2, 2010
    Date of Patent: September 4, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey Drue David, Dominic Benvegnu, Harry Q. Lee, Boguslaw A. Swedek, Lakshmanan Karuppiah
  • Patent number: 8257545
    Abstract: A chemical mechanical polishing pad is provided, comprising: a polishing layer having a polishing surface; and, a light stable polymeric endpoint detection window, comprising: a polyurethane reaction product of an aromatic polyamine containing amine moieties and an isocyanate terminated prepolymer polyol containing unreacted —NCO moieties; and, a light stabilizer component comprising at least one of a UV absorber and a hindered amine light stabilizer; wherein the aromatic polyamine and the isocyanate terminated prepolymer polyol are provided at an amine moiety to unreacted —NCO moiety stoichiometric ratio of <95%; wherein the light stable polymeric endpoint detection window exhibits a time dependent strain of ?0.02% when measured with a constant axial tensile load of 1 kPa at a constant temperature of 60° C. at 100 minutes and an optical double pass transmission of ?15% at a wavelength of 380 nm for a window thickness of 1.
    Type: Grant
    Filed: September 29, 2010
    Date of Patent: September 4, 2012
    Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
    Inventors: Adam Loyack, Alan Nakatani, Mary Jo Kulp, David G. Kelly
  • Patent number: 8251774
    Abstract: A structured abrasive article comprises an at least translucent film backing and an abrasive layer disposed on the backing. The abrasive layer comprises a plurality of shaped abrasive composites. The shaped abrasive composites comprise abrasive particles dispersed in a binder. The abrasive particles consist essentially of ceria particles having an average primary particle size of less than 100 nanometers. The binder comprises a polyether acid and a reaction product of components comprising a carboxylic(meth)acrylate and a poly(meth)acrylate, and, based on a total weight of the abrasive layer, the abrasive particles are present in an amount of at least 70 percent by weight. Methods of making and using the structured abrasive article are also disclosed.
    Type: Grant
    Filed: August 12, 2009
    Date of Patent: August 28, 2012
    Assignee: 3M Innovative Properties Company
    Inventors: William D. Joseph, Julie Y. Qian, Jimmie R. Baran, Jr., John J. Gagliardi
  • Patent number: 8246417
    Abstract: The present invention relates to a polishing apparatus and a polishing method for polishing a substrate, such as a semiconductor wafer, to planarize the substrate.
    Type: Grant
    Filed: September 6, 2007
    Date of Patent: August 21, 2012
    Assignee: Ebara Corporation
    Inventors: Yoichi Kobayashi, Yasumasa Hiroo, Tsuyoshi Ohashi
  • Publication number: 20120196511
    Abstract: A polishing apparatus includes a platen to hold a polishing pad having a plurality of optical apertures, a carrier head to hold a substrate against the polishing pad, a motor to generate relative motion between the carrier head and the platen, and an optical monitoring system. The optical monitoring system includes at least one light source, a common detector, and an optical assembly configured to direct light from the at least one light source to each of a plurality of separated positions in the platen, to direct light from each position of the plurality of separated positions to the substrate as the substrate passes over said each position, to receive reflected light from the substrate as the substrate passes over said each position, and to direct the reflected light from each of the plurality of separated positions to the common detector.
    Type: Application
    Filed: January 28, 2011
    Publication date: August 2, 2012
    Inventors: Jeffrey Drue David, Boguslaw A. Swedek, Dominic J. Benvegnu, Sivakumar Dhandapani
  • Patent number: 8231429
    Abstract: An apparatus has a motor, a shaft attached to the motor arranged to be turned by the motor when the motor operates, an attachment at an end of the shaft opposite the motor arranged to allow mounting of components to be ground, a loading block arranged under the end of the shaft having the attachment to support the components to be ground, and an interface to a grinding tool arranged adjacent to the loading block. An apparatus has a motor mounted on a slide, a shaft attached to the motor arranged to spin when the motor operates, an attachment on the end of the shaft to allow attachment of a component, a loading block at least partially supporting the shaft, an interface to a manufacturing tool, the motor and shaft arranged to insert the shaft into the interface when moved along the slide to an engaged position.
    Type: Grant
    Filed: August 31, 2009
    Date of Patent: July 31, 2012
    Assignee: Xerox Corporation
    Inventors: Greg A. Hildebrand, John Wollseiffen, Russell Muhlestein
  • Patent number: 8221193
    Abstract: A chemical mechanical polishing apparatus includes a metrology system that detects the thickness of the polishing pad as semiconductor wafers are processed and the thickness of the polishing pad is reduced. The chemical mechanical polishing apparatus includes a controller that adjusts the rate of material removal of a conditioning disk when areas of the polishing surface are detected that are higher or lower than the adjacent areas of the polishing pad.
    Type: Grant
    Filed: August 7, 2008
    Date of Patent: July 17, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Shou-Sung Chang, Hung Chih Chen, Stan D Tsai, Yuchun Wang