Abstract: A method of determining conditions for machining a part so as to avoid vibration appearing during the machining. A machining stage is simulated by provisionally setting parameters of a function for modulating cutting speed, by deducing a corresponding surface state, by modifying parameters iteratively with the machining stage being simulated each time until the surface state reaches an acceptable value, and by performing the machining stage by causing the cutting speed to vary in application of the corresponding modulation function.

Abstract: The invention presents a method and an apparatus for optimizing or monitoring or analyzing process sequences of an automated device, such that a visualization of the data sets is implemented by means of a display means 12a, b, c, with the use of at least one first and one second data set, in such a way that a visual cross-reference 15, 16 is created between data-set segments that are relevant to the process sequence. This allows the machine operator to recognize quickly those points in the process sequence where a need exists for intervention. Manufacturing costs can thereby be lowered, and product quality improved.

Abstract: A microscopic geometry cutting device includes: a controller that outputs a timer count start command in starting a driving program which controls a drive of an X-axis or a Y-axis moving mechanism; an arrival time calculator that calculates an arrival time from when the timer count start command is output till when the cutter arrives at a machining start position in accordance with relative moving speed information of the moving mechanisms and machining start position information of a workpiece W; an elapsed time determiner that determines whether an elapsed time from when the timer count start command is output is coincident with the arrival time and outputs a trigger signal when the elapsed time is coincident with the arrival time; and a reciprocating stage driver that drives the reciprocating stage in a manner that the cutter advances and retracts in a predetermined cutting depth in response to the trigger signal.

Abstract: An electroerosion control system includes a general CNC controller being configured for controlling a general CNC machine process, a power supply for energizing a tool electrode and a workpiece to be machined, an electroerosion controller electrically connecting with the power supply for controlling an output of the power supply, and adaptively and electrically connecting with the general CNC controller for communication thereof, and a sensor sensing real-time status information of a working gap between the tool electrode and the workpiece and for sending said real-time status information to said electroerosion controller. Said electroerosion controller automatically controls the electroerosion machining process through the general CNC controller according to the real-time status information of the working gap.

Abstract: An automated computer-implemented method for generating commands for controlling a computer numerically controlled machine to fabricate an object from a workpiece, the method including the steps of selecting a maximum permitted engagement angle between a rotating cutting tool and the workpiece, selecting a minimum permitted engagement angle between the rotating cutting tool and the workpiece, and configuring a tool path for the tool relative to the workpiece in which the engagement angle gradually varies between the maximum permitted engagement angle and the minimum permitted engagement angle.

Abstract: The invention relates to a method for acquiring the optimized parameters of a machining operation in the application of COM methodology, comprising: providing a plurality of readings indicative of the specific cutting energy (Kc) during an equal plurality of tests carried out with an imposed value, that is different from one test to another by at least one variable representative of the cutting operations, one of said variables being the cutting speed (Vc) and another being the advance rate (f); next determining a range of values of each of said variables including the optimal value for said variable obtained by means of processing the results for carrying out the machining operation; characterized in that a specific program (10a) of the digital control (7) is used for obtaining a continuous variation of the values of the variable during a single machining pass for a test, and in that the data read are formed during said single pass by the different values of the torque current (Iq) of the motor of the machin

Abstract: A digital processing method of a large or medium-size sand mold includes inverting a three-dimensional CAD model of a mold into a numeric controlling code, putting a prepared sand blank on a hollow grid-shaped processing platform to proceed the digital milling procedure, bringing away waste sand generated during processing by high pressure gas blown out from a nozzle near a cutter and the waste sand entering to a collecting device below the processing platform. A device for carrying out the method is disclosed. The method and the device reduce the processing steps.

Abstract: A substrate having a plurality of zones is polished and spectra are measured. For each zone, a first linear function fits a sequence of index values associated with reference spectra that best match the measured spectra. A projected time at which a reference zone will reach the target index value is determined based on the first linear function, and for at least one adjustable zone, a polishing parameter adjustment is calculated such that the adjustable zone has closer to the target index at the projected time than without such adjustment. The adjustment is calculated based on a feedback error calculated for a previous substrate. The feedback error for a subsequent substrate is calculated based on a second linear function that fits a sequence of index values associated with reference spectra that best match spectra measured after the polishing parameter is adjusted.

Abstract: The invention relates to a method and a control device for moving a machine element of an automation machine by dividing an overall movement of the machine element into separately controlled first and a second movement sections extending in a common direction. Desired values for the first and second movement sections are monitored for compliance with a predefined movement constraint. If the first and/or second desired values fail to comply with the predefined movement constraint, the first movement component and/or the second movement component are changed in an iterative process until the changed first and/or second desired values are in compliance with the predefined movement constraint. The changed first and/or second desired values are stored as new first and/or second desired values for moving the machine element. The method and control device prevent overloading of the drive shafts of an automation machine having redundant kinematics.

Abstract: The present invention provides a method of drilling a hole in a workpiece in order to control breakthrough of the workpiece comprising the steps of: a) initiating contact between a drill bit of a drill unit and the workpiece; b) operating the drill unit to rotate the drill bit to drill the workpiece; c) during drilling of the workpiece measuring the force, F and torque, T, experienced by the drill bit; d) calculating a variable F?, based on the measured force, F, representing the rate of change of F; e) calculating a variable, T? based on the measured torque, T, representing the rate of change of T; f) calculating a variable F? representing the rate of change of F?; g) calculating a variable T? representing the rate of change of T?; h) detecting the onset of breakout of the workpiece by use of the variables F?, F?, T? and T?; i) thereby controlling the speed of rotation of the drill bit during breakthrough of the workpiece to control the degree of breakout of the drill bit from the workpiece.

Abstract: A method for machining and inspecting a workpiece includes steps of: supporting the workpiece with a workpiece support; moving a machining tool relative to the workpiece with a tool positioning system, and machining a workpiece feature into the workpiece with the machining tool as a function of reference geometry data; moving a measuring device relative to the workpiece with a measuring device positioning system that is independent of the tool positioning system, and mapping a geometry of the workpiece feature with the measuring tool to provide workpiece geometry data indicative thereof; and processing the workpiece geometry data and the reference geometry data with a processor to compare the geometry of the workpiece feature to a reference geometry.

Abstract: An optimal process determining system executes a step of calculating a temporary process that includes information of a plurality of individual processes. According to an example, each process includes a tooling including of a tool, a holder, a tool projection length, and a sequence of the plurality of individual processes. A similarity between the toolings of two individual processes is calculated. In addition, a calculation is performed relating to a plurality of integrated processes for which the tooling of one of the individual processes having a high similarity is integrated into the tooling of the other one of the individual processes. In addition, an optimal process is determined from the plurality of integrated processes on the basis of an actual machining time in each of the integrated processes, a unit integration reduction time reduced as one of the toolings of the individual processes is integrated, and the number of the individual processes integrated.

Abstract: A controller for machine tool 1 has a program analyzing section 12 for analyzing a machining program and extracting a fixed cycle command, a parameter setting section 15 for, on the basis of the extracted fixed command, determining an accuracy level being graded into a plurality of grades depending on how high machining accuracy is prioritized as compared with machining time in machining and setting parameters corresponding to the determined accuracy level and relating to control of the operation of a feed mechanism 30, and a drive control section 17 for controlling the feed mechanism 30 on the basis of the extracted fixed cycle command and the set parameters. The parameter setting section 15 calculates an arc-shaped movement trajectory of a tool moving around a virtual corner portion where two straight lines intersect with each other which corresponds to the parameters, and determines the accuracy level based thereon.

Abstract: A method for optimizing performance of a robot. At least one experiment is designed including at least two tests. Each test differs from at least one other test in the experiment regarding the location of the task in relation to the robot. The boundaries that are allowable for location of a task are calculated/determined. The effect on optimality for at least one test in the experiment is calculated/determined. The experimental data is fit to an algorithm. The optimal location of the task is calculated/determined.

Abstract: In a method for moving a machine element of an automation machine with separately controlled drive shafts moving in a common direction, a first controller receives a first desired control variable, which is filtered using a filter having a frequency-dependent transfer function. In one embodiment, first desired control variable represents an overall movement of a machine element. A difference is determined between the filtered first desired variable and a first actual variable, and the difference is supplied as a desired control variable to the second controller for controlling the movement of the second drive shaft. In another embodiment, the filtered first desired variable and a second desired variable are added to form a sum, and a difference between the formed sum and the first actual variable is supplied as a desired control variable to the second controller for controlling the movement of the second drive shaft.

Abstract: An apparatus and a method for tuning control parameters are disclosed. The apparatus includes a parameter database, a user interface, a processing unit and a control unit. The parameter database stores several control parameter sets, which are classified into several data groups respectively corresponding to several total machining points. The user interface is for selecting one of the total machining points, and distributing the selected total machining point to at least one machining item to generate distribution data of points. The user interface is further for inputting embryo data. The processing unit selects one of the control parameter sets corresponding to the distribution data of points and the embryo data from the parameter database. The control unit controls a machine tool according to the corresponding one of the control parameter sets.

Abstract: A method for drilling holes in a component according to an optimized sequence is provided. The sequence is determined so as to minimize a total displacement of all axes of a hole drilling machine that is required for moving between each hole in the sequence.

Abstract: A machining status monitoring apparatus is provided on a machine tool, and has a plurality of actual CCD cameras for imaging the tool and workpiece from different view points and generating actual two-dimensional image data thereof, a virtual image generating section having a plurality of virtual CCD cameras corresponding to the actual CCD cameras, in which the tool and workpiece of three-dimensional model are imaged by the virtual CCD cameras from each point and virtual two-dimensional image data thereof are generated, and a display control section for selecting one virtual CCD camera corresponding to the virtual two-dimensional image data in which the distal end of the tool is not hidden by the workpiece among the generated two-dimensional image data, and displaying the actual two-dimensional image data generated by the actual CCD camera corresponding to the selected virtual CCD camera on a display device.

Abstract: A method and system for estimating context offsets for run-to-run control in a semiconductor fabrication facility is described. In one embodiment, contexts associated with a process are identified. The process has one or more threads, and each thread involves one or more contexts. A set of input-output equations describing the process is defined. Each input-output equation corresponds to a thread and includes a thread offset expressed as a summation of individual context offsets. A state-space model is created that describes an evolution of the process using the set of input-output equations. The state-space model allows to estimate individual context offsets.

Abstract: A method for tuning operation of servo motors includes selecting a plurality of discrete positions in a guillotine blade cycle for which to determine tuning coefficients, determining tuning coefficients at the discrete positions, interpolating tuning coefficients for positions between the discrete positions, and applying the determined and the interpolated tuning coefficients to the servo motor. The servo motors may be used in connection with a guillotine cutter for separating individual sheets from a continuous web. The guillotine cutter blade may be driven by a servo motor to cyclically lower and raise to transversely cut the web transported below the cutter blade.

Abstract: A method and a device for operating a machine tool are disclosed, wherein a machining operation of the machine tool is controlled by a parts program by storing a simulated configuration of the machine tool in the parts program, determining an actual configuration of the machine tool, comparing the actual configuration with the simulated configuration of the machine tool stored in the parts program, and generating a warning message if the actual configuration is not in conformance with the simulated configuration. This prevents errors in the machining process resulting from a discrepancy between the configuration of the machine tool used in the simulation of the parts program and the configuration of the actual machine tool during the actual machining operation.

Abstract: The invention relates to a method for optimizing vibration of a machine tool, in which a driven shaft is rotated, in which a speed range is subsequently passed through, wherein the vibrations occurring in said speed range are sensed and wherein an optimum speed having a minimized vibration is determined and adjusted.

Abstract: A machined shape determining step of determining a machined shape machined by a basic tooling or basic tooling template of each machining efficiency group from a material shape (S19), a tooling determining step of determining an optimal tooling comprising a combination of a tool, a holder and a tool projection length on the basis of information of the tools and the holders, stored in a tool holder information storage unit, the combination having a maximum machining efficiency and being able to form the material shape into a corresponding one of the machined shapes without interfering with the machined shape (S20), a process candidate determining step of determining an optimal process candidate using the optimal tooling of each machining efficiency group (S21), and a process determining step of determining an optimal process on the basis of the optimal process candidate of each machining efficiency group (S10), are executed.

Abstract: Technology for milling selected portions of a workpiece by a cutting tool of a numerical control machine is described. The described technology can receive a main toolpath, the main toolpath comprising one or more cuts; compute one or more transition toolpaths, each transition toolpath defining a transition area intersecting one or more of the cuts of the main toolpath; trim one or more cuts of the main toolpath near two or more points of intersection between the main toolpath and the transition toolpaths; connect the trimmed portions of the main toolpath with one or more connecting moves such that each connecting move is mostly inside one or more of the transition areas; and mill the selected portions of the workpiece by moving the cutting tool in accordance with the cuts, transition toolpaths, trimmed cuts, and connecting moves.

Abstract: A discrete-time adaptive control law for stabilization, command following, and disturbance rejection that is effective for systems that are unstable, MIMO, and/or nonminimum phase. The adaptive control algorithm includes guidelines concerning the modeling information needed for implementation. This information includes the relative degree, the first nonzero Markov parameter, and the nonminimum-phase zeros. Except when the plant has nonminimum-phase zeros whose absolute value is less than the plant's spectral radius, the required zero information can be approximated by a sufficient number of Markov parameters. No additional information about the poles or zeros need be known. Numerical examples are presented to illustrate the algorithm's effectiveness in handling systems with errors in the required modeling data, unknown latency, sensor noise, and saturation.

Abstract: A vibration suppressing device and a vibration suppressing method that are capable of obtaining an accurate optimum rotation speed and shortening a time period from generation of chatter vibration to calculation of the optimum rotation speed are provided. The vibration suppressing device includes: vibration sensors for detecting time-domain vibrational accelerations of a rotary shaft in rotation; and a control device for calculating a chatter frequency and a frequency-domain vibrational acceleration of the rotary shaft at the chatter frequency on the basis of the time-domain vibrational accelerations detected by the vibration sensors, and when the calculated frequency-domain vibrational acceleration exceeds a predetermined threshold value, calculating an optimum rotation speed on the basis of a predetermined parameter, and rotating the rotary shaft at the calculated optimum rotation speed.

Abstract: During operation of a rolling mill, a rolling product running through the mill is machined by a machining device which is controlled by a controller, to which a target and an actual value of the roll product are fed after machining. The controller determines based on the target and the actual value, in conjunction with controller characteristic, a controlled variable for the machining device and outputs the controlled variable to the machining device which machines the roll product according to the output controlled variable. A detection device receives the actual value after machining and a corresponding actual value of the mill product before machining. Based on the temporal profiles of the actual values, the device dynamically determines the controller characteristic such that the variance of the actual value at least tends to be minimized after machining. The device also parameterizes the controller according to the determined control characteristic.

Abstract: An electronic system for compensating the dimensional accuracy of a 4-axis CNC machining system includes a CNC machining system configured to machine a feature into a part, a dimensional measuring device configured to measure a dimension of the part, and to provide an output corresponding to the measured dimension, and a compensation processor in communication with the CNC machining system and dimensional measuring device. The compensation processor is configured to receive the output from the dimensional measuring device, to calculate a plurality of CNC offsets, and to provide the offsets to the CNC machining system.

Abstract: A structural optimization engine generates a response profile based on a vibrational analysis of a three-dimensional (3D) structure. The structural optimization engine determines whether the 3D structure complies with one or more design goals set for the 3D structure based on the response profile. When the 3D structure does not comply with the design goals, the structural optimization engine retrieves dependency data from a structure database. The dependency data indicates various dependencies between response characteristics included in the response profile and specific regions of the 3D model. Based on the dependency data, the structural optimization engine determines structural modifications that can be made to the 3D structure to bring the 3D structure into compliance with the design goals. A multi-axis computer-aided manufacturing unit then makes the structural modifications to the 3D structure.

Abstract: A control system of a manual pulse generator for controlling a rotation speed and a rotation direction of a motor includes a touch panel, a timer, a coordinate calculation unit, and a wave generation unit. The touch panel receives a contact signal and generates an electrical signal according to the contact signal. The timer records the amount of time used to input the contact signal. The coordinate calculation unit calculates coordinates of each input point of the contact signal on the touch panel according to the electrical signal to determine direction of the contact signal and input speed for the contact signal. The wave generation unit generates a pulse signal to control the motor according to the direction of the contact signal and the input speed for the contact signal.

Abstract: A method for machining a slide core hole in a mold and a measurement/correction system for use in machining of a slide core hole. A spindle head is pivoted to meet the inclination angle of the slide core hole to be machined in the mold. A shallow flat-bottomed spot-faced hole is spot-faced in the surface of the mold. A guide hole is drilled in the bottom surface of the spot-faced hole. A rod hole is drilled using the guide hole as a guide. An intermediate pocket hole is formed while expanding the spot-faced hole. A reference point is corrected based on measurement of the shape of the intermediate pocket. A corrected machining program is executed with the corrected reference point to carry out precision shaping machining of the core pocket while expanding the intermediate pocket.

Abstract: A machine tool has an oscillating axis that reciprocates in an optional region. A numerical controller that controls the machine tool designates positions of a lower dead point and a upper dead point when the oscillating axis of the machine tool reciprocates, and a reference speed during the oscillating operation when the oscillating axis reciprocates. The numerical controller then calculates, from the current position of the oscillating axis, a current phase in the case where one stroke of the oscillating axis is defined as one cycle, and calculates the speed of the oscillating axis at the current phase based upon the calculated current phase and the reference speed.

Abstract: A method of control of rotation of a spindle device and a control system of a machine tool which enable machining without generation of chatter vibration without using special tools of variable pitch cutting edges or chatter vibration detecting means. The method of control of rotation of a spindle device and control system of a machine tool according to the present invention store spindle rotational speed change data, which determines how to change a rotational speed of a spindle in accordance with an instructed speed, linked with machining conditions and stability limit data, select, from an instructed spindle rotational speed and machining conditions and the stored stability limit data, spindle rotational speed change data giving less vibration, and use the selected spindle rotational speed change data as the basis to change the rotational speed of the spindle.

Abstract: A substrate having a plurality of zones is polished and spectra are measured. For each zone, a first linear function fits a sequence of index values associated with reference spectra that best match the measured spectra. A projected time at which a reference zone will reach the target index value is determined based on the first linear function, and for at least one adjustable zone, a polishing parameter adjustment is calculated such that the adjustable zone has closer to the target index at the projected time than without such adjustment. The adjustment is calculated based on a feedback error calculated for a previous substrate. The feedback error for a subsequent substrate is calculated based on a second linear function that fits a sequence of index values associated with reference spectra that best match spectra measured after the polishing parameter is adjusted.

Abstract: In a thermal displacement compensation method for a machine tool, in which a feed shaft thermal displacement amount is obtained and an amount which cancels the obtained feed shaft thermal displacement amount is added as a thermal displacement compensation amount to a position command for a feed axis, a position where a signal is first output by a position sensor for detecting the position of a movable part of the machine tool is first stored as an initial position. Then, the position where the signal is output by the position sensor is detected, and the thermal displacement compensation amount is modified according to a compensation error, which is the difference between the detected position (actual position) and the initial position.

Abstract: The feed rate of an ultrasonic knife used to cut composite material is optimized using adaptive control. One or more parameters such as ultrasonic power or side load on the knife is sensed and used to generate feedback control signals. The feedback control signals are used to optimize the commanded feedrate of the knife.

Abstract: A machining time predicting apparatus of a numerically controlled machine tool divides a tool path into a plurality of segments, obtains a speed in a tangential direction of each of the divided segments, calculates a time taken for the tool to move on each segment, and obtains the total of the calculated times taken for the tool to move on each segment as a tool moving time, in order to calculate a time (tool moving time) taken for the tool to move on the designated tool path according to an NC command.

Abstract: A vibration suppressing method and a vibration suppressing device are disclosed. After detection of chatter vibration using at least one vibration detecting device, a stable rotation speed for suppressing the chatter vibration is calculated using a stable rotation speed calculating device. A determination device then compares a detection value detected by the vibration detecting device, a predetermined setting value, and/or a current value that is calculated based on at least one of the detection value and the setting value, to a predetermined determination reference value that is previously set. Thereafter, the determination device determines whether or not the stable rotation speed is adopted in accordance with the comparison result, and changes rotation speed of the rotary shaft to the stable rotation speed if the stable rotation speed is adopted.

Abstract: A machine tool is fitted with a position detector for detecting a position of a moving axis of the machine tool and an on-machine measuring device for measurement on the machine tool. An axial position detection signal output from the position detector and a measurement signal output from the on-machine measuring device are received through interfaces by a numerical controller that controls the machine tool. These interfaces are designed so that the numerical controller receives the axial position detection signal and the measurement signal with the same timing.

Abstract: A method and a device for position-dependent compliance compensation in a machine tool is disclosed. The compliance of the machine tool is derived at a position of a tool of the machine tool from machine data stored in memory, a machining force acting on the tool during a machining process at this position is determined, and at least one machining parameter that has an influence on the machining process is derived at this position in dependence on the derived compliance and the machining force so as to counteract a displacement of the tool with respect to a desired position caused by the compliance of the machine tool and the machining force. This optimizes the machining time and/or contour fidelity when machining a workpiece with a machine tool.

Abstract: In a numerical control apparatus, a rotation-axis filtering processor subjects an angle change amount between interpolation points between rotation angles of a rotation axis to moving average filtering thereby smoothing the angle change amount between the interpolation points. A translation-axis timing synchronization unit subjects a moving amount between interpolation points between tool-tip positions of a translation axis to moving average filtering, to synchronize timing of rotation of the rotation axis being smoothed and timing of movement of the translation axis. A coordinate transformation unit transforms the tool-tip position into coordinates of a machine position of the translation axis according to a configuration of the machine tool, from each tool-tip position after timing synchronization between axes of the translation axis is performed and from each rotation angle of the rotation axis after being filtered.

Abstract: A vibration suppressing device includes a memory unit storing a stable rotation speed calculated by an arithmetical unit in association with a rotation speed range that includes the stable rotation speed, in which, when a command rotation speed that is a rotation speed of a rotary shaft is inputted in starting machining operation by rotation of the rotary shaft and, the arithmetical unit determines whether the command rotation speed is included in the rotation speed range or not, reads out the stable rotation speed when the command rotation speed is included in the rotation speed range and outputs the stable rotation speed to an NC device instead of the command rotation speed, and starts the machining operation at the stable rotation speed.

Abstract: A method, system, and apparatus for an adaptive controller for controlling a machining operation on a workpiece by a machining tool are provided. The system includes a sensor for measuring a present value of a spindle load on a spindle drive, and an adaptive controller for comparing the present value of the spindle load to a present value of a target spindle load. The adaptive controller includes a computing element configured to determine a first feed rate value of a machining tool, and a number generator configured to generate a first feed rate dither adjustment value used for adding noise to the first feed rate value. The adaptive controller is configured to control the feed rate of the machining tool relative to the workpiece to maintain the present value of the spindle load approximately equal to the present value of the target spindle load using one or more of the first feed rate value, the first feed rate dither adjustment value, and the second feed rate dither adjustment value.

Abstract: A servo control system capable of using an angle-based synchronization learning control, even when a reference position is not given, while maintaining the advantage of the angle-based synchronization method. The servo control system has X-, y- and z-axes servo controllers, each configured to control x-, y- and z-axes servomotors, respectively. Each of x- and y-axes servo controllers has a reference signal generating part configured to generate a reference signal which monotonically increases or varies in one direction, based on the position command of each axis transmitted from a higher-level controller.

Abstract: Disclosed herein is a chatter suppressing method for a work machine. The method comprises the steps of detecting vibration occurring when a bar tool or a workpiece is started to rotate, determining whether the vibration detected from the start of rotation has exceeded a threshold, and analyzing the vibration by Fourier series expansion when it is determined that the vibration has exceeded the threshold and adjusting the number of rotations of the spindle.

Abstract: A method of determining a desired power level (P) as a function of relative tool to workpiece position, thereby enabling adaptive control advantages that were previously inaccessible for machining, such as bevel gear grinding, from solid applications. Preferably, set point power is expressed as a function of specific power (P?, P?) and roll position (Q) for a generated gear or as a function of specific power and plunge position for a non-generated (i.e. Formate) gear. Specific power is defined and preferably remains as defined during machining even as process conditions vary during machining.

Abstract: A system for controlling a machine includes a first controller, a second controller, and a comparator. During a first cycle, the first controller generates a control signal to the machine while the second controller generates a predicted parameter signal. During the first cycle, the comparator transmits a feedback signal to the second controller if a predetermined threshold is not met. A method for controlling a machine includes transmitting a control signal from a first controller to the machine and generating a predicted parameter value in a second controller. The method further includes transmitting a feedback signal to the second controller if a predetermined threshold is not met.

Abstract: The invention relates to a method for the simplification of process sequences and the control of a machine, and particularly of a machining tool, wherein the tool has a plurality of sub-systems, and each individual sub-system of the tool operates with process sequences having clock conditions that differ at least partially. According to the invention, data sets are collected by means of a data collection device, said sets characterising the clock conditions of the individual clock systems, and at least two data sets are output to the user at least in a partially mutual manner by means of a display device.

Abstract: Change in a torque waveform is monitored while removing continuously-varied periodic noise in real time, and the change in the torque waveform caused purely by the wafer state is detected by separating noise components while removing the noise not caused by the wafer state such as drift noise caused by dressing conditions and the polishing pad state, thereby reliably detecting a polishing end point with high precision when polishing is finished. A polishing end point detection device utilizing torque change for analyzing periodic components in data by subjecting Fourier transformation to the measured data, and calculating moving average processing time for removing periodic noise components based on the analyzed periodic components, and correcting the waveform by performing averaging process based on the moving average processing time calculated in real time for the data, and detecting the polishing end point of a predetermined film based on a change in the corrected torque waveform.

Abstract: A numerical controller for controlling a multi-axis machine tool having three linear axes and three rotating axes obtains an interpolated tool direction vector by interpolating a tool direction command and computes multiple solutions for three rotating axes from the vector. The three rotating axis positions are computed by synthesizing these multiple solutions. The three linear axis positions on a machine coordinate system are computed by adding to the interpolated tool center point position the product of the interpolated tool direction vector, or a verified tool direction vector based on the three rotating axis positions determined by the rotating axis position computing means, and a tool length compensation amount. The three rotating axes are moved to the positions computed above and the three linear axes are moved to the positions computed above.