Support Positioning (e.g., Table, Stage) Patents (Class 700/60)
  • Patent number: 7333862
    Abstract: A position control device of a moving body, by which position control device a moving body can be driven in a translational manner with high precision where the moving body is not rotated in a yawing direction even if disturbance is input, a stage device using the position control device, and a position control method of a moving body, is provided.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: February 19, 2008
    Assignee: Sumitomo Heavy Industries, Ltd.
    Inventor: Kennichi Makino
  • Patent number: 7269467
    Abstract: A shelf system with computer-controlled compartment displays, whereby the displays indicate a number of articles to picked out of the compartment. The shelf system has a plurality of sliding shelves in that the shelves have at least one display element in their frontal area for order picking data. The shelf system is configured in such a way that a data exchange between the display elements and the control computer can take place irrespective of the relative position of the shelf vis-à-vis the other components of the shelf system.
    Type: Grant
    Filed: March 14, 2003
    Date of Patent: September 11, 2007
    Assignee: Deutsche Post AG
    Inventor: Susanne Schildknecht
  • Patent number: 7260438
    Abstract: An intelligent shelving system uses touch sensors to operate power-operated, adjustable shelves. Touch sensors also are used as limit switches to control shelf motion, to monitor the encroachment of shelved items on shelves, to detect spills, and to control other related devices and functions, such as shelf lighting. Display units are provided to provide information relating to objects stored in the shelving system and to the operation of the shelving system.
    Type: Grant
    Filed: October 15, 2002
    Date of Patent: August 21, 2007
    Assignee: Touchsensor Technologies, LLC
    Inventors: David W. Caldwell, Thomas M. Schreiber
  • Patent number: 7181296
    Abstract: By applying time-frequency analysis to a given standard iterative learning control or ILC an adaptive filter for the learned feed-forward loop is designed. This time varying filter varies according to the momentary frequency content of the error signal and allows to discriminate between areas of deterministic and stochastic error. Its application results in selective application of ILC to those intervals where error signals of high level are concentrated and allows application of a single ILC acquisition to different setpoint trajectories. The adaptive filter finds particular use in lithographic scanning systems where it is used for varying scan length.
    Type: Grant
    Filed: June 1, 2004
    Date of Patent: February 20, 2007
    Assignee: ASML Netherlands B.V.
    Inventors: Andreea Iuliana Rotariu, Rogier Ellenbroek, Maarten Steinbuch, Gregor Edward Van Baars
  • Patent number: 7174586
    Abstract: An MPU sends pieces of information supplied by the input signals from a hand switch to a semiconductor memory device and the memory device stores these pieces of information. These pieces of information are: input points of an operation start signal and an operation end signal to a bottom drive unit; input points of a drive start signal of each bottom and a drive end signal of each bottom or a bottom drive time, information on lift-up or lift-down of each bottom; input points of a drive start signal and a drive end signal to a frame drive unit, information on lift-up or lift-down of a frame; and the type of an operated button of a hand switch. The data about bottoms is stored for both the back bottom and knee bottom.
    Type: Grant
    Filed: October 13, 2004
    Date of Patent: February 13, 2007
    Assignee: Paramount Bed Co., Ltd.
    Inventor: Hiroshi Nagaoka
  • Patent number: 7154377
    Abstract: In a movable barrier operator, data that corresponds to force requirements to effect desired movement of a movable barrier is compressed and stored for later retrieval. Multiple compression schemes and/or compression rates can be made available. Selection of a given scheme or rate can be determined on a user-directed or an automatic basis. Automatic selection in turn can be based on various criteria including, for example, presently available memory resources.
    Type: Grant
    Filed: December 30, 2003
    Date of Patent: December 26, 2006
    Assignee: The Chamberlain Group, Inc.
    Inventor: Eric Gregori
  • Patent number: 7136708
    Abstract: A control system of a stage of a microscope includes: a stage transfer unit for transferring the stage for loading a sample perpendicular to an optical axis of the microscope; a transfer command acquisition unit for obtaining command information for a transfer of the stage; a stop position direction storage unit for storing stop position direction information which is information generated according to the command information obtained from the transfer command acquisition unit, and the information about a position and direction when an operation of the stage transfer unit is stopped; and a stage transfer control unit for controlling an operation of stage transfer unit according to the stop position direction information stored in the stop position direction storage unit.
    Type: Grant
    Filed: September 9, 2004
    Date of Patent: November 14, 2006
    Assignee: Olympus Corporation
    Inventor: Katsuyoshi Yamaguchi
  • Patent number: 7113836
    Abstract: Reliable and at the same time simple operation of a plurality of system components using only a single control element is guaranteed by means of the combination of a control lever (10) which can be swiveled manually and a rotational control unit (11) which can be rotated manually. Translatory control motions can be executed intuitively by means of swivel movements (16) of the control lever (10) and rotatory control motions can be executed intuitively by means of rotary movements (14) of the rotational control unit (11). The embodiment of the rotational control unit (11) in the form of a ring element surrounding the control lever (10), which can be can be adjusted by raising or lowering into different operating positions, associated in each case with a specific operating function, is particularly advantageous.
    Type: Grant
    Filed: March 2, 2005
    Date of Patent: September 26, 2006
    Assignee: Siemens Aktiengesellschaft
    Inventor: Mathias Hörnig
  • Patent number: 7092768
    Abstract: A technique is disclosed for controlling a plurality of devices in a building. The technique includes detecting a first network event at a first device, updating a network state on the first device based on the first network event, determining at the first device an action based on the network state, and transmitting a second network event to a second device.
    Type: Grant
    Filed: March 9, 2004
    Date of Patent: August 15, 2006
    Assignee: Liquid Sky Studios, Inc.
    Inventor: David S. Labuda
  • Patent number: 7079914
    Abstract: A system useful in producing a three-dimensional body comprising bone or tissue-compatible material includes a detection and analysis site which identifies and simulates a portion of a body in connection with an implantation situation. A production device produces a model responsive to the simulation information. A flame-spraying apparatus provides the bone-compatible and/or tissue-compatible material in a powder form through a nozzle. Relative movement between the nozzle and a support member supporting the model or die is controlled to apply one or more layers of the bone-compatible material to the model. A method includes using a computer to identify and simulate a body in connection with a given implantation situation, and producing a model or die accordingly. the bone or tissue-compatible material is flame-sprayed in a powder form. Movements of a nozzle and/or a supporting member are controlled so as to effect a desired surface characteristic on the three-dimensional body.
    Type: Grant
    Filed: June 28, 2004
    Date of Patent: July 18, 2006
    Assignee: Nobel Biocare AB
    Inventor: Carina Berggren
  • Patent number: 7043330
    Abstract: A system is disclosed for monitoring and controlling laser cladding process by powder injection in real-time. The invention combines laser cladding technique along with automated direct feedback control to achieve a good quality clad in terms of dimensional and metallurgical characteristics. The system uses optical CCD-based detectors as the feedback system. The optical CCD-based detectors along with a pattern recognition algorithm is used to determine the clad characteristics in real-time. These characteristics are clad's dimensions, solidification rate, and roughness that are fed into a closed loop control system to adjust the laser power and table velocity to produce desired clad quality.
    Type: Grant
    Filed: October 31, 2003
    Date of Patent: May 9, 2006
    Inventors: Ehsan Toyserkani, Amir Khajepour, Stephen F. Corbin
  • Patent number: 7043335
    Abstract: A regression mirror reflects light from a light projector in a reflecting direction opposite an incident direction. A light receiver combined with the light projector in a unitary unit receives the reflected light from the regression mirror. A detecting unit including an optical sensing unit having the light projector, the light receiver and the reflecting member is disposed so that a wafer is disposed in a moving path along which an optical path of the optical sensing unit moves relative to the wafer. An information-acquiring unit acquires position information of the detecting unit relative to the wafer, an arithmetic unit calculates mapping information about an arrangement of the wafer based on the position information and light-reception information provided by the light receiver.
    Type: Grant
    Filed: April 19, 2004
    Date of Patent: May 9, 2006
    Assignee: Kawasaki Jukogyo Kabushiki Kaisha
    Inventors: Tetsuya Yoshida, Hirohiko Goto
  • Patent number: 7009359
    Abstract: A foam core chuck for use in a scanning stage of a lithography system is disclosed. In accordance with an embodiment of the present invention, the lithography stage includes a frame and a chuck supported by the frame. The chuck has a foam core structure that is covered by a shell layer. An electromagnetic device for supporting and positioning the chuck is coupled to the stage. The electromagnetic device, for example an electromagnetic motor, is coupled to the stage such that at least one coil is coupled to the frame and at least one magnet is coupled to the foam core structure of the chuck. The foam core structure acts as a distributed flexure for the magnet.
    Type: Grant
    Filed: August 8, 2003
    Date of Patent: March 7, 2006
    Assignee: ASML Holding N.V.
    Inventor: Santiago E. del Puerto
  • Patent number: 6996506
    Abstract: A Process and device for displacing a moveable unit on a base. The process includes: a) a force (F) is determined which, applied to the moveable unit (4), produces a combined effect, on the one hand, on the moveable unit (4) so that it exactly carries out the envisaged displacement on the base (2), especially as regards the prescribed duration and prescribed distance of the displacement, and, on the other hand, on the elements (MA1, MA2, MA3, 4) brought into motion by this displacement so that all these elements are immobile at the end of said displacement of the moveable unit (4); and b) the force (F) thus determined is applied to the moveable unit (4).
    Type: Grant
    Filed: March 12, 2001
    Date of Patent: February 7, 2006
    Assignee: Newport Corporation
    Inventors: Van Diep Nguyen, Jean Levine
  • Patent number: 6973355
    Abstract: A positioning system including a sensor, a drive sequencer and an actuator. The sensor senses the actuator position and provides position signals to drive the sequencer which responsively computes and drives the actuator in open loop moves containing dwell intervals of position. The actuator positions a mirror or other load means to reflect an optical beam as desired. Either preprogrammed or non-repeating sequences of actuator stopping positions can be synchronized with a laser. During dwell times, mirror position accuracy better than 10 microradians is suitable for tuning CO2 pulse burst or CW lasers.
    Type: Grant
    Filed: December 31, 2003
    Date of Patent: December 6, 2005
    Inventor: J. Gilbert Tisue
  • Patent number: 6973353
    Abstract: A programmable controller for controlling one or more outputs based on position indicated from a position transducer. The controller includes an interface that converts the transducer signals into a change in position, a transducer position counter that accumulates the change in transducer position, and a net forward position counter that accumulates the net forward position. The position counter updates when the transducer signals indicate a change of position. The net forward position counter updates when the value of the net forward position counter and the value of the transducer position counter are equal and the transducer interface indicates a forward movement. Each controller output has an independent comparator and width counter. The comparator examines the net forward position to determine when to change the output or begin a pulse. The width counter counts down to zero, which ends a pulse.
    Type: Grant
    Filed: July 18, 2003
    Date of Patent: December 6, 2005
    Inventor: Craig E. Goldman
  • Patent number: 6958588
    Abstract: A machine for machining a workpiece with at least one revolving or rotating tool has a work spindle with a shaft (5), whose temperature is monitored by means of at least one temperature sensor (26). The temperature sensor is detected in contactless fashion. The sensor (26) is preferably a radiation-sensitive sensor, which detects the temperature radiation output. by the shaft (5). In triggering the positioning drive mechanisms, the control unit (35) of the machine (1) takes into account the temperature expansions of the shaft (5) that result from the temperature changes in the shaft. The positioning drive mechanisms serve to position a tool (6), carried by the shaft (5), relative to the workpiece (2). A machining precision is thus achieved that is independent of the temperature and temperature changes of the machine (1) overall, of temperature changes in the coolant—lubricant, and of temperature changes in the tool (6) and the shaft (5), that can all be caused by the power converted at the machining site.
    Type: Grant
    Filed: November 5, 2002
    Date of Patent: October 25, 2005
    Assignee: Walter AG
    Inventor: Thomas Engelfried
  • Patent number: 6937911
    Abstract: A positioning system is disclosed. The positioning system includes a movable stage. The positioning system also includes a cable carrier movable relative to the stage. The cable carrier is configured for carrying a cable so as to prevent cable drag forces from acting on the stage.
    Type: Grant
    Filed: March 18, 2002
    Date of Patent: August 30, 2005
    Assignee: Nikon Corporation
    Inventor: Douglas C. Watson
  • Patent number: 6909921
    Abstract: A room occupancy sensor, a home automation system and a method for automatic control of controlled devices throughout a home. A unique architecture of occupancy sensors includes entry/exit sensors for detecting movement through doorways that separate rooms in the home, room motion sensors for detecting room occupancy, spot sensors to detect occupancy of specific locations within the rooms, and house status sensors to detect the status of certain parameters of the home. A central controller communicates with the sensors and controlled objects over a communications network, where the sensors and controlled objects can be added to the system in a ‘plug and play’ manner. The central controller controls the controlled objects in response to the entry/exit sensors, room motion sensors, spot sensors and the house status sensors. This control is accomplished by assigning each room to one of a plurality of room states, which dictate how the controlled objects are controlled by the central controller.
    Type: Grant
    Filed: October 19, 2000
    Date of Patent: June 21, 2005
    Assignee: Destiny Networks, Inc.
    Inventor: Brent Bilger
  • Patent number: 6882899
    Abstract: Methods, apparatuses, and systems are presented for positioning a sensing head relative to a workpiece, involving a control unit operative to provide a plurality of control signals to iteratively control positioning of the sensing head relative to the workpiece, a plurality of air injectors disposed and fixedly connected on a periphery of the sensing head, each of the air injectors capable of being independently controlled to eject a gas between the sensing head and the workpiece to create an air bearing and affect positioning of the sensing head relative to the workpiece in response to at least one of the control signals, and a plurality of sensors providing a plurality of feedback signals to the control unit, the feedback signals containing information relating to positioning of an optical imaging sensing head relative to the workpiece.
    Type: Grant
    Filed: May 15, 2001
    Date of Patent: April 19, 2005
    Assignee: Photon Dynamics, Inc.
    Inventors: David L. Baldwin, Alexander J. Nagy, Jeffrey A. Hawthorne, Jeffrey P. Sample, Thanh V. Dang
  • Patent number: 6865441
    Abstract: A system and method for performing trajectory generation, interpolation, and control for a motion control application, where the trajectory generation, interpolation, and control are performed in parallel with each other. In one embodiment, an FPGA in a motion control device may be configured to perform the trajectory generation, interpolation, and control in parallel. Performing trajectory generation, interpolation, and control in parallel on an FPGA may increase the efficiency of the motion control application.
    Type: Grant
    Filed: May 8, 2003
    Date of Patent: March 8, 2005
    Assignee: National Instruments Corporation
    Inventor: Sundeep Chandhoke
  • Patent number: 6850376
    Abstract: The invention relates to a scanner, wherein a position of a moveable part of the scanner is adjusted by inputting a command variable which changes repeatedly in the same manner. A command signal corresponding to the command variable is supplied to a controller (3), the controller (3) being constructed for correcting a setpoint deviation in the presence of a command variable which is constant in time. A control error of the controller (3) which arises from the change in the command variable is corrected by evaluating a setpoint deviation of the position of the moveable part or an equivalent variable, obtaining from this a correction signal and changing an output signal of the controller (3) by using the correction signal.
    Type: Grant
    Filed: August 8, 2003
    Date of Patent: February 1, 2005
    Assignee: Zeiss Optronik GmbH
    Inventor: Josef Wohlfrom
  • Patent number: 6845274
    Abstract: An improved technique of interfacing a computer lighting device to a control computer is disclosed, wherein a hardware device is interposed between the control computer and the lighting device. The hardware device handles certain functions in hardware, thereby permitting the microprocessor at the lighting device to incur substantially less processing load.
    Type: Grant
    Filed: January 24, 2001
    Date of Patent: January 18, 2005
    Assignee: Koninklijke Philips Electronics N.V.
    Inventor: Shenghong Wang
  • Publication number: 20040249484
    Abstract: A method and apparatus is disclosed for providing a motion signal to a motion platform comprising a plurality of actuators. The apparatus comprises a formatting unit receiving a motion signal indication of a motion to perform on the motion platform and formatting the motion signal and a synchronized unit receiving the formatted signal and providing a synchronized and formatted motion signal to the motion platform.
    Type: Application
    Filed: May 13, 2004
    Publication date: December 9, 2004
    Inventor: Bruno Paillard
  • Publication number: 20040204776
    Abstract: A servo control system for a micro-electromechanical systems (MEMS)-based motion control system (and method therefor), includes a motion generator having an inherent stiffness component.
    Type: Application
    Filed: April 11, 2003
    Publication date: October 14, 2004
    Applicant: International Business Machines Corporation
    Inventors: Sri M. Sri-Jayantha, Hien Dang, Arun Sharma, Evangelos S. Eleftheriou, Mark A. Lantz, Charalampos Pozidis
  • Patent number: 6799079
    Abstract: There is provided a finite type rolling guide deviation correcting method and system capable of detecting the deviation in relative position between a rolling guide and a movable body if the deviation in relative position increases, and automatically carrying out a correcting operation for returning the deviation in relative position to a normal positional relationship. The finite type rolling guide deviation correcting method corrects a relative positional relationship between a finite type rolling guide for guiding a reciprocating motion of a movable body and the movable body.
    Type: Grant
    Filed: January 31, 2002
    Date of Patent: September 28, 2004
    Assignee: Toshiba Kikai Kabushiki Kaisha
    Inventors: Yukio Serizawa, Katsuji Gakuhari, Kazushi Kawatsu
  • Publication number: 20040172145
    Abstract: For the purpose of providing a method of keeping an iso-center at a fixed position regardless of the tilt of a table top, and a table system having such a function, an apparatus comprises a table top member (100); lifting means n for moving the table top member up and down; forwarding/backing means (20) for longitudinally moving the table top member forward and backward; tilting means (40) for tilting the table top member from a horizontal state; and control means (50), and the table top member is tilted around an iso-center lying at a spatial position different from a mechanical center of tilt motion of the table top member by the control means controlling vertical displacement of the mechanical center and longitudinal displacement of the table top member according to a tilt angle.
    Type: Application
    Filed: November 10, 2003
    Publication date: September 2, 2004
    Inventor: Muthuvelan Varadharajulu
  • Patent number: 6785578
    Abstract: A system including a user input device for controlling a position of medical equipment is described. In an example embodiment, the user input device is configured to be coupled to the medical equipment and is responsive to an operator input representation of a desired movement of the equipment. A processor determines a direction in which the operator desires the equipment to move based on a device output.
    Type: Grant
    Filed: October 9, 2001
    Date of Patent: August 31, 2004
    Assignee: General Electric Company
    Inventors: Mark A. Johnson, Luc Mauvarin
  • Publication number: 20040138766
    Abstract: Provided is an ultra-precision positioning system. The system comprises a base, a motion stage movably provided to the top of the base, and first to sixth feeding mechanisms for moving the motion stage to have six degrees of freedom. The first to sixth feed mechanisms are fixed to the base and the motion stage, respectively. Each of the first to third feeding mechanisms has a piezo actuator and two elastic hinges provided at both sides of the piezo actuator. Each of the fourth to sixth feeding mechanisms has a piezo actuator, three hinge members, and a lever member with a notch hinge which operatively cooperates with the hinge members.
    Type: Application
    Filed: March 8, 2004
    Publication date: July 15, 2004
    Inventors: Heui-Jae Pahk, Jong-Ho Park
  • Patent number: 6697683
    Abstract: A positioning system including a sensor, a drive sequencer and an actuator. The sensor senses the actuator position and provides position signals to drive the sequencer which responsively computes and drives the actuator in open loop moves containing dwell intervals of position. The actuator positions a mirror or other load means to reflect an optical beam as desired. Either preprogrammed or non-repeating sequences of actuator stopping positions can be synchronized with a laser. During dwell times, mirror position accuracy better than 10 microradians is suitable for tuning CO2 pulse burst or CW lasers.
    Type: Grant
    Filed: April 25, 2001
    Date of Patent: February 24, 2004
    Inventor: J. Gilbert Tisue
  • Publication number: 20040034438
    Abstract: A composite system for radiation therapy includes a CT scanner for checking the position of an affected portion of a patient to be irradiated, an irradiation apparatus for disposing, on the basis of positional information of the affected portion checked by the CT scanner, the patient at a specific position at which the affected portion is aligned to an irradiation position, and performing irradiation to the affected portion, a common bed used for the CT scanner and the irradiation apparatus, in a state that the patient lies on the common bed and moving means for moving the patient from the CT scanner to the specific position of the irradiation apparatus.
    Type: Application
    Filed: July 8, 2003
    Publication date: February 19, 2004
    Inventor: Minoru Uematsu
  • Patent number: 6694197
    Abstract: A single channel reformatter having a syringe that is movable along a z-axis by a z-positioner. A x-y positioner is capable of positioning any well of a source plate having a plurality of wells, and of positioning any well of a destination plate having a plurality of wells, beneath the syringe. Liquid from a well of the source plate is aspirated by the syringe and dispensed into one or more wells of the destination plate. Since the syringe does not move in the x-y plane, it is advantageously integrated into a wash system that cleanses it between liquid transfer operations. The drive element that actuates the syringe to aspirate and dispense during liquid transfer operations is advantageously used to drive the wash cycle. In a method according to present invention for controlling the reformatting operation, well-to-well links are specified, a preferred execution order for executing the specified links is determined, and the specified links are executed in the preferred order.
    Type: Grant
    Filed: April 24, 2000
    Date of Patent: February 17, 2004
    Assignee: Pharmacopeia Drug Discovery Inc.
    Inventors: Thomas James Hatcher, Aleksandr Grinberg
  • Patent number: 6690978
    Abstract: The subject of the invention relates to a positioning system having a control that integrates a GPS receiver for determining the system's operating coordinates. The control can interface with either radio or cellular telephone transceivers, or receivers for receiving GPS coordinate data via remote radio or cellular transceivers or senders, in order to process the local GPS coordinate data using logarithms for solving triangles with various geometrical propositions to establish and control the sensor positioner and to automatically maintain a sensor fix on remote objects or vehicles transmitting their GPS coordinates. The positions control is configured with a target operating mode that permits an operator to manually steer the positioner to desired positions at which information is desired, and to engage the control to make use of, at targeted time, positioner angular data stemming from the positions dive assemblies encoders to automatically maintain a sensor fix on desired targeted positions.
    Type: Grant
    Filed: July 7, 1999
    Date of Patent: February 10, 2004
    Inventor: Jerry Kirsch
  • Patent number: 6668202
    Abstract: A position control system includes a PID controller for generating a current target value of a linear motor from a difference between a positional detected value and a positional command value, and a disturbance observer. The disturbance observer includes a signal processing unit comprising a filter for filtering a torque command value for a motor drive and an input torque estimating filter carrying out estimation for obtaining an estimated input load torque from the detected positional value. An inverse model of a motor torque constant calculates an estimated disturbance load torque from the difference between the filtered torque command value and the estimated input load torque and generates a correction value for the current target value so as to cancel a disturbance torque on the basis of the estimated disturbance load torque being calculated.
    Type: Grant
    Filed: November 21, 2001
    Date of Patent: December 23, 2003
    Assignee: Sumitomo Heavy Industries, Ltd.
    Inventors: Kenichi Makino, Masayuki Yamamoto, Yoshiyuki Tomita
  • Publication number: 20030173556
    Abstract: A positioning system is disclosed. The positioning system includes a movable stage. The positioning system also includes a cable carrier movable relative to the stage. The cable carrier is configured for carrying a cable so as to prevent cable drag forces from acting on the stage.
    Type: Application
    Filed: March 18, 2002
    Publication date: September 18, 2003
    Inventor: Douglas C. Watson
  • Patent number: 6622053
    Abstract: A lighting system operating using a digital mirror as its operative device. The digital mirror is used to shape the light which is a passed through advanced optical devices in order to produce an output.
    Type: Grant
    Filed: May 22, 2000
    Date of Patent: September 16, 2003
    Assignee: Light and Sound Design Ltd.
    Inventors: William Hewlett, Ian Clarke, Nigel Evans, Richard Parker, Mark A. Hunt, Michael Hughes
  • Patent number: 6618633
    Abstract: A method for calibrating a first co-ordinate frame of a robot and effector in a second frame of reference of a sensor when the sensor is substantially rigidly attached to the robot and effector, including the steps of measuring first positions of a plurality of first light sources relative to the sensor, with the first positions corresponding to a first absolute position of the robot and effector, moving the robot and effector, measuring second positions of the plurality of first light sources, which second positions correspond to the desired second absolute position of the robot and effector and the sensor, repeating the measurement of and movement from the first to second positions so as to provide at least two sets of measurements of first and second positions corresponding to at least two movements, each of which at least two movements is a known, unique transform, combining the at least two sets of measurements of first and second positions so as to calibrate the first co-ordinate frame in the second fra
    Type: Grant
    Filed: October 2, 2000
    Date of Patent: September 9, 2003
    Assignee: Bae Systems plc
    Inventors: Richard M Gooch, Richard Alexander
  • Publication number: 20030160401
    Abstract: A centering unit comprises a plate, centering mechanism, link mechanism, and cylinder mechanism. The plate vertically divides the interior of a frame. The support table is located substantially on the center of the plate. The centering mechanism can center each wafer on the support table. Centering plates of the centering mechanism are located on either side of the support table and have engaging surfaces and that extend along the outer peripheral surface of the wafer. The link mechanism and the cylinder mechanism serve to extend and contract the space between the centering plates.
    Type: Application
    Filed: January 27, 2003
    Publication date: August 28, 2003
    Inventors: Ki Sang Kang, Shuji Akiyama, Hiroki Hosaka
  • Patent number: 6584367
    Abstract: A Y stage is capable of translational driving in the Y-axial direction, by independently controllable Y1 linear motor and Y2 linear motor. The amount of movement of the Y stage is detected by a Y1 linear encoder and Y2 linear encoder, and fed back to a Y control system and &thgr; control system. The Y control system outputs a translational thrust command value, by receiving the average value of each positional detecting value measured by the Y1 linear encoder and Y2 linear encoder as the stage translational direction position feedback value. The &thgr; control system receives the difference between each position detecting value as a stage yawing direction position feedback value, and outputs a yawing direction thrust command value. A non-interference block outputs Y1 linear motor thrust command value and Y2 linear motor thrust command value, by the use of the translational thrust command value and the thrust command value.
    Type: Grant
    Filed: June 30, 2000
    Date of Patent: June 24, 2003
    Assignee: Sumitomo Heavy Industries, Ltd.
    Inventors: Kenichi Makino, Yoshiyuki Tomita, Hidehiko Mori
  • Publication number: 20030097205
    Abstract: This invention provides a platform and stage support apparatus and method that isolates the platform from vibration and maintains platform position within an exposure apparatus while the stage is moved about. The apparatus includes a base, platform, stage, pneumatic and electromagnetic supports from the base to the stage, and a controller for positioning the platform in response to data from stage and platform position sensors and pneumatic support pressure sensors. The method includes using a model that provides a target pressure for each pneumatic support in response to an input stage location. The apparatus and method use the pneumatic supports to carry the majority of platform and stage weight, thus requiring less force from the electromagnetic supports to maintain a desired platform position.
    Type: Application
    Filed: November 20, 2001
    Publication date: May 22, 2003
    Inventors: Bausan Yuan, Ting-Chien Teng, Katsumi Toma
  • Publication number: 20030060906
    Abstract: The control system includes a microprocessor based radio frequency receiver module and a radio frequency handset transmitter module. The microprocessor receives a specific input from the remote transmitter. The handset transmitter module contains two joysticks. Two different sets of eight peripheral initiating positions are located in a circular formation with one of the joysticks at the center of each circular formation. Each initiating position activates a switch. Each switch activates a different radio frequency (RF) signal that activates a particular vehicle actuator.
    Type: Application
    Filed: September 25, 2001
    Publication date: March 27, 2003
    Inventor: Boo Y. Kim
  • Publication number: 20030050716
    Abstract: In relation to a vibration isolation system, which comprises at least one vibration isolation device that can be assigned to an isolation element, the fact that a method of recording the system with the aid of a closed-loop and/or open-loop control device is provided, in which a closed-loop and/or open-loop control structure can be predefined and in which signals and/or variables related to the isolation system are picked up, processed and/or provided, and in which, on the basis of the definable structures and variables, at least one isolation system characteristic data set for assessing the vibration isolation system is formed, means that for the first time the indicative fundamentals for an open system for evaluation, closed-loop and open-loop control are provided.
    Type: Application
    Filed: August 2, 2002
    Publication date: March 13, 2003
    Inventor: Peter Heiland
  • Publication number: 20030040818
    Abstract: A vibration control system which comprises an actuator assembly, serves to replace the friction block entirely while improving settling time, or, alternatively, to operate in conjunction with the friction block, providing additional accuracy or speed of operation. In a preferred embodiment of the invention special dynamic modeling techniques are utilized to investigate structural movements and to provide precise motion control.
    Type: Application
    Filed: March 22, 2002
    Publication date: February 27, 2003
    Inventors: Baruch Pletner, Mordechay Karpel, Huckleberry B. Dorn, Richard Perkins, Leonard Lublin
  • Patent number: 6438461
    Abstract: The present invention relates to a method and a device for displacing a moving body (4) on a base (2) mounted elastically with respect to the ground (S), the moving body (4) being displaced linearly with a predetermined displacement under the action of a controllable force (F). According to the invention: a) a mathematical relationship illustrating the movements of the entity formed by the base (2) and the moving body (4) is defined; b) using said mathematical relationship there is determined a force (F) which, applied to the moving body (4), produces a combined effect on the moving body (4) so that it performs said predetermined displacement, and on the base (2) at least so that it is immobile at the end of the displacement of the moving body (4); and c) the force (F) thus determined is applied to the moving body (4).
    Type: Grant
    Filed: July 27, 1999
    Date of Patent: August 20, 2002
    Assignee: Newport Corporation
    Inventors: Roger Desailly, Jean Levine, Van Diêp Nguyen, Serge Maneuf
  • Publication number: 20020111701
    Abstract: A patient support system comprises an articulated frame having a plurality of segments, a frame controller coupled to the frame to move at least one of the segments, a mattress having at least one chamber, a mattress controller coupled to the mattress to control an amount of fluid in the at least one chamber, and a user interface controller configured to send control signals to the frame controller and to the mattress controller.
    Type: Application
    Filed: February 26, 2002
    Publication date: August 15, 2002
    Applicant: Hill-Rom Services, Inc.
    Inventor: Richard L. Borders
  • Publication number: 20020099475
    Abstract: A motion control system is provided which optimizes the desired motion of a structure being controlled by the system. The system may be used in conjunction with existing structural control systems, or replace such structural control systems entirely. Optimization of a desired motion occurs by applying a mathematical controller to a theoretical desired motion, the controller optimizing the desired motion by taking into account one or more state parameters.
    Type: Application
    Filed: October 1, 2001
    Publication date: July 25, 2002
    Inventors: Ronald Spangler, Robert Jacques, Kenneth Lazarus
  • Patent number: 6385493
    Abstract: A stage installation for vertical movement of multiple stage elements has a computer controlled winch assembly comprising a support member having a channel, a platform adjacent the support member, electrical control and electrical power raceways in the channel, and a multiplicity of winches supported on the platform. The winches include a housing, a bidirectional servomotor, a rotating drum driven by the motor in either direction to haul or pay out cables operatively connected to the stage elements. Connectors are coupled to the electrical power and electrical control raceways, and a remote computer terminal transmits signals to the winches to initiate and terminate operation of the servomotor.
    Type: Grant
    Filed: July 31, 2000
    Date of Patent: May 7, 2002
    Assignee: Production Resource Group L.L.C.
    Inventors: John M. Hennessey, James S. Crossley
  • Publication number: 20020002425
    Abstract: The present invention relates to an adaptable controller for controlling environmental systems, and more particularly to an improved computer-controlled irrigation and lighting system. Scheduling is selected using a unique graphical user interface and is transmitted to the controller remotely. Sensing devices for water flow to determine leaks and calculate usage using venturi are provided which communicate with the controller to adjust output in real time based on the measurements.
    Type: Application
    Filed: November 30, 2000
    Publication date: January 3, 2002
    Inventors: James F. Dossey, Lyle W. Finn, David G. Ujhelji, Steven J. Magrino, Gerald L. Martin, Larry J. Scarborough, Brandt Emerson, Mark Skelly
  • Patent number: 6269284
    Abstract: A machine tool is controlled through a process incorporating the steps of (1) measuring geometric and thermal errors with accurate instruments, (2) creating a global differential wet model of machine tool position, and (3) using this model to control real time compensation of machine tool operation. A controller modifies encoder-type position feedback signals used by the machine to compensate for geometric and thermal errors in the manner dictated by the global differential wet model.
    Type: Grant
    Filed: April 20, 1998
    Date of Patent: July 31, 2001
    Inventors: Kam C. Lau, Quanhe Ma, Herbert Lau
  • Patent number: 6260282
    Abstract: A positioning system used, by way of example, for lithography, uses the position of the wafer stage as the trajectory command for the reticle fine stage control circuit. The reticle fine stage position is combined with the position of the wafer stage to generate a synchronous error. The reticle fine stage control circuit uses a Jacobian differential transformation to convert the synchronous error into an positional error for the center of gravity of the reticle fine stage. Thus, any inaccuracies due to measurement errors caused by rotation of reticle fine stage are avoided. A controller filter circuit uses the positional error for the center of gravity to calculate the force on the center of gravity that will minimize the synchronous error. The controller filter circuit includes saturation limited integration behavior that minimizes the settling time. A feedforward loop also generates a feedforward force, which reduces settling time, and is combined with the force signal from the controller filter.
    Type: Grant
    Filed: March 27, 1998
    Date of Patent: July 17, 2001
    Assignee: Nikon Corporation
    Inventors: Bausan Yuan, Susumu Makinouchi, Hideyaki Hashimoto