Abstract: A method for inspecting a diced object that comprises multiple dies, the method includes: acquiring multiple images of multiple portions of the diced object, starting from a first portion that comprises an alignment area and continuing through adjacent portions of the diced object; assigning a die index to each die of the multiple dies of the diced object, starting from a die of the first portion and continuing through adjacent portions of the diced object; associating between dies of the diced object and a dies of a reference object in response to the assigned indexes and locations of the dies of the diced object; wherein the reference object is not diced; and comparing between a die of the diced object and another die while taking into account an association between the die of the diced object and a reference object die.

Abstract: Methods are disclosed wherein the structural health of a civil structure, such as, but not limited to, a bridge or the like is measured by electronic distance measurement (EDM) from a plurality of stable locations to a plurality of cardinal points on the structure in a methodical manner. By measuring the coordinates of the cardinal points, the dynamic and long-term static behavior of the structure provide an indication of the health of the structure. Analysis includes: comparison to a Finite Element Model (FEM); comparison to historical data; and modeling based on linearity, hysteresis, symmetry, creep, damping coefficient, and harmonic analysis.

Abstract: A system and process for laser scan alignment for vehicle trajectories is provided. A representation of the map surface allows multiple scans to be simultaneously aligned to each other. Laser scans are fit to the template surface, and the template surface is re-estimated based on the fit of the scans. The result is a pose trajectory estimate that drifts less than standard approaches, and is more robust to outliers (such as moving objects) in the laser's field of view.

Abstract: A system and process for laser scan alignment for vehicle trajectories is provided. A representation of the map surface allows multiple scans to be simultaneously aligned to each other. Laser scans are fit to the template surface, and the template surface is re-estimated based on the fit of the scans. The result is a pose trajectory estimate that drifts less than standard approaches, and is more robust to outliers (such as moving objects) in the laser's field of view.

Abstract: Disclosed is a method and apparatus for recording measured data from a patient by taking movements into account by use of a medical device designed both for recording motion-related measured data and for recording nuclear medicine measured data. The method may include recording nuclear medicine measured data by use of the medical device, simultaneously recording motion-related measured data by use of the medical device, determining at least one motion information item relating to at least one movement of the patient and/or at least one movement inside the body of the patient during the ongoing measured data recording by evaluating at least a portion of the previously recorded motion-related measured data, and carrying out motion correction for at least a portion of the nuclear medicine measured data by use of the computational device in parallel with recording the measured data.

Abstract: A method for automatic learning of software keyboard input characteristics includes the following steps. (a) An input is received. (b) Whether the input is a normal key input is determined. (c) The input value of the input is stored when the input is determined to be the normal key input. (d) Step (a)-(c) are repeated until (N+1) input values are stored, wherein N is a positive integer. (e) When there are (N+1) inputs stored, the input characteristics of the first input in the (N+1) inputs are determined according to the first stored input value in the stored (N+1) input values. A computer program product using the method and a system for automatic learning of software keyboard input characteristics are also disclosed herein.

Abstract: A contact pressure and position detecting device includes a first sensing layer, a second sensing layer located on the first sensing layer, and a processor. The first sensing layer includes a number of parallel first pipes, and the second sensing layer includes a number of parallel second pipes perpendicular to the first pipes. Each first pipe includes a first pressure sensor received therein for generating a first electrical signal according to the gas pressure therein. Each second pipe includes a second pressure sensor received therein for generating a second electrical signal according to the gas pressure therein. The processor compares the first electrical signals with a first threshold value, and the second electrical signals with a second threshold value to judge which first pipe and second pipe is pressed, and then obtains the contact position on the detecting device.

Abstract: A method of calibrating a robotic device, such as a cardiac catheter, includes oscillating the device on an actuation axis by applying an oscillation vector at an oscillation frequency. While oscillating, a location of the device is periodically measured to generate a plurality of location data points, which may express the location of the device relative to a plurality of measurement axes. The location data points are then processed using a signal processing algorithm, such as a Fourier transform algorithm, to derive a transfer function relating a position of the device to a movement vector for the actuation axis. The transfer function may be resolved into and expressed as a calibration vector for the actuation axis, which may include one or more components, including zero components, directed along each of the measurement axes. The process may be repeated for any actuation axes on which calibration is desired.

Abstract: An inclinometer using a speedometer and a forward-looking accelerometer for measuring inclination angle.

Abstract: A controller includes a calibration unit, an offset error correcting unit, an operation unit, and the like. The calibration unit obtains a reference point of an output of a magnetic sensor, and performs offset correction. The offset error correcting unit is capable of performing operation processing for both the correction of a major offset error and the correction of a minor offset error by using a radius (the magnitude of a geomagnetic vector) of a virtual circle or a virtual sphere, appropriately and easily correcting the offset error with a small amount of operation, and reducing the burden to the controller.

Abstract: A portable coordinate measurement machine for measuring the position of an object in a selected volume includes a positionable articulated arm having a plurality of jointed arm segments. The arm includes a measurement probe having an integrated line laser scanner mounted thereon. The laser may be a fiber coupled laser. Wireless data transfer and communication capability for the CMM is also possible.

Abstract: A method according to the invention includes measuring respective geometric errors that occur in a three-dimensional movement mechanism when different weights are applied to a ram, storing in a storage section respective correction parameters for correcting the respective geometric errors measured for the different weights, inputting weight information of a probe attached to the ram, reading from the storage section one of the correction parameters that corresponds to the inputted weight information, and correcting measurement data with the read correction parameter.

Abstract: A probe for measuring the dimensions of objects on a coordinate positioning machine such as a machine tool has a workpiece-contacting stylus. This is suspended via a sensor mechanism, including strain gauges which provide an output when the stylus contacts a workpiece. A processor processes the strain gauge outputs to produce a trigger signal. It does so in accordance with an algorithm or equation or look-up table which ensures equal sensitivity in all possible directions of approach to the workpiece in the three dimensions X, Y, Z.

Abstract: An optical detection system includes: a coordinate information detecting section which detects coordinate information of an object on the basis of a light reception result of reflection light obtained by reflecting irradiation light from the object; and a calibrating section which performs a calibration process for the coordinate information. The coordinate information detecting section detects at least Z coordinate information which is the coordinate information in a Z direction in a case where a detection area which is an area where the object is detected is set in a target surface along an X-Y plane, and the calibrating section performs the calibration process for the Z coordinate information.

Abstract: The invention relates to a method for picking up semiconductor chips from a wafer table and, optionally, their mounting on a substrate by means of a pick-and-place system. The position and orientation of the semiconductor chip to be mounted next are determined by means of a first camera and made available in the form of positional data relating to a first system of coordinates. The position and orientation of the substrate place on which the semiconductor chip will be mounted are determined by means of a second camera and made available in the form of positional data relating to a second system of coordinates. The conversion of coordinates of the first or second system of coordinates into coordinates of motion of the pick-and-place system occurs by means of two fixed mapping functions and two changeable correction vectors. The correction vectors are readjusted on the occurrence of a predetermined event.

Abstract: A positioning device includes a driver which moves a positioning object and a sensor which measures the distance to the positioning object in a non-contacting manner and outputs a detection signal if the positioning object is detected only in a length measuring area within a predetermined range from any detection position, shaft controller which stops the driver by detecting the detection signal from the sensor and automatically correcting for an overshoot amount between the stop position and any detection position, when the driver moves the positioning object and the sensor, and the positioning controller that stores the coordinate value after the automatic correction by the shaft controller and that performs the positioning based on the reference coordinate value.

Abstract: A location of an object is determined by arranging a sequence of bits on a substrate. The sequence of bits includes subsequence of bits, and each subsequence of bits is unique for each location along the substrate. When the object is at a particular location along the substrate a sensor detects the subsequence of bits at the particular location, and a decoder associates the location of the subsequence at the particular location with the object. The substrate can be a leaky coaxial cable with slits or not, corresponding to the bits, or lane markings on a road.

Abstract: A plurality of pieces of observation raw data observed by an observation unit are subjected to an object identifying process, and by using a parameter determined by a parameter determination unit in accordance with a period of time between a point of object identifying process completion time of one piece of data and process completion scheduled time of another piece of data, a position estimating process of the object is carried out from the data that has been subjected to the object identifying process, and the position of the object relating to the object ID is estimated based upon the object ID and positional candidates acquired by an object identifying unit.

Abstract: A coordinate measuring machine (industrial machine) includes: a column and a support that extend along the Z-axis; a beam being provided between the column and the support; a slider being movable on the beam; a ram being held on the slider movably along the Z-axis direction; a temperature detecting sensor and a temperature detector that detect the respective temperatures of the column, the support and the ram; and a shift amount calculator that calculates a Z-axis shift amount based on the respective temperatures of the column, the support and the ram, reference position data indicating a positional relationship between the column, the support and the ram at a reference temperature, and respective thermal expansion coefficients for the column, the support and the ram.

Abstract: A review apparatus for reviewing a specimen by moving the specimen to pre-calculated coordinate includes: a function to measure a deviation amount between the pre-calculated coordinates and coordinates of an actual position of the specimen; a function to optimize a coordinate correcting expression to minimize the measured deviation amount; and a function to determine that the deviation amounts have converged. When the deviation amounts have converged, the measurement for the coordinate-correcting-expression optimization is terminated, and a field of view necessary for the specimen to be within the field of view is set according to a convergence value of the calculated deviation amount.

Abstract: The invention relates to a method for underwater navigation, particularly for scuba divers, and for autonomous, manned, or remote-controlled underwater vessels, wherein the signals of at least one sensor, comprising at least one acceleration sensor for determining the actual position, are integratively analyzed, accuracy is improved by means of the use of reference measurements, and a correction is carried out by way of a correction vector obtained from the transformation of the vector of the accelerations measured by the acceleration sensor in the diving computer coordinate system into the global coordinate system, the comparison to at least one of the reference measurement values, the determination of the deviation and the reverse transformation of the deviation to the diving computer coordinate system.

Abstract: Track information generating devices, methods, and programs acquire a self-contained navigation track of a vehicle indicated by time-series pieces of self-contained navigation information, acquire a matching track of the vehicle indicated by time-series pieces of information determined through a map matching process is determined as a road the vehicle is traveling, and acquire a degree of reliability of the matching track. The devices, methods, and programs acquire a GPS track that is a track of the vehicle indicated by time-series pieces of GPS information, acquire a degree of reliability of the GPS track, and set the one of the GPS track and the matching track having a higher degree of reliability as a correction target track to correct the self-contained navigation information so as to reduce a difference between the self-contained navigation track and the correction target track.

Abstract: Track information generating devices, methods, and programs acquire a self-contained navigation track of a vehicle indicated by time-series pieces of self-contained navigation information, and acquire a GPS track of the vehicle indicated by time-series pieces of GPS information. The devices, methods, and programs compare the self-contained navigation track with the GPS track to correct the self-contained navigation information so as to reduce a difference between the self-contained navigation track and the GPS track.

Abstract: A method and hand-held scanning apparatus for three-dimensional scanning of an object is described. The hand-held self-referenced scanning apparatus has a light source for illuminating retro-reflective markers, the retro-reflective markers being provided at fixed positions on or around the object, a photogrammetric high-resolution camera, a pattern projector for providing a projected pattern on a surface of the object; at least a pair of basic cameras, the basic camera cooperating with light sources, the projected pattern and at least a portion of the retro-reflective markers being apparent on the 2D images, a frame for holding all components in position within the hand-held apparatus, the frame having a handle, the frame allowing support and free movement of the scanning apparatus by a user.

Abstract: A method of error compensation for an inertial measurement unit is provided. The method comprises providing a first object including an inertial measurement unit, providing a second object proximal to the first object, and determining an initial position and orientation of the first object. A motion update is triggered for the inertial measurement unit when the second object is stationary with respect to a ground surface. At least one position vector is measured between the first object and the second object when the first object is in motion and the second object is stationary. A distance, direction, and orientation of the second object with respect to the first object are calculated using the at least one position vector. An error correction is then determined for the inertial measurement unit from the calculated distance, direction, and orientation of the second object with respect to the first object.

Abstract: An inertial measurement unit (IMU) contains three linear acceleration sensors and three rotational speed sensors. For the sensors there are desired installation directions parallel to the co-ordinate axes of a Cartesian co-ordinate system which is fixed to the vehicle. The actual installation directions of the sensors may differ from the desired installation directions owing to incorrect orientations. By comparing accelerations which are measured by the linear acceleration sensors for different attitudes of the vehicle with acceleration values which are known for these different attitudes in the Cartesian co-ordinate system which is fixed to the vehicle, the actual installation directions of the linear acceleration sensors are determined. By using a co-ordinate transformation it is then possible to convert the measured accelerations into the actual accelerations.

Abstract: A pointer light tracking method wherein all black image and white square images located at four corners of the all black image are projected on the display, the display on which the all black image and the white square images are displayed is shot by a camera, a domain corresponding to the white square image is extracted from the obtained image data, central coordinates (x, y) of the extracted domain are computed, and a parameter necessary in performing distortion correction by use of projection conversion for coordinate expressing the position of the pointer light on the display is computed from the computed central coordinates (x, y) and central coordinates (X, Y) of the white square image.

Abstract: In a positioning device in gantry type of construction, due to a special arrangement of the position-measuring devices used for the positioning, errors due to thermal expansion of the positioning device may be avoided to a great extent. In particular, attention is given to the advantageous placement of fixed point of a scale relative to a straightness track of a further scale.

Abstract: A method for tracking a position of an object includes using a field sensor associated with the object to measure field strengths of magnetic fields generated by two or more field generators, wherein a measurement of at least one of the field strengths is subject to a distortion. Rotation-invariant location coordinates of the object are calculated responsively to the measured field strengths. Corrected location coordinates of the object are determined by applying to the rotation-invariant location coordinates a coordinate correcting function so as to adjust a relative contribution of each of the measured field strengths to the corrected location coordinates responsively to the distortion in the measured field strengths.

Abstract: A method for tracking a position of an object includes using a field sensor associated with the object to measure field strengths of magnetic fields generated by two or more field generators, wherein a measurement of at least one of the field strengths is subject to a distortion. Rotation-invariant location coordinates of the object are calculated responsively to the measured field strengths. Corrected location coordinates of the object are determined by applying to the rotation-invariant location coordinates a coordinate correcting function so as to adjust a relative contribution of each of the measured field strengths to the corrected location coordinates responsively to the distortion in the measured field strengths.

Abstract: The present invention provides a method of correcting coordinates so as to quickly and properly arrange a sample in a field of view in a review apparatus for moving a sample stage onto the specified coordinates to review the sample. A review apparatus according to the present invention, which is a review apparatus for moving a sample stage onto coordinates previously calculated by a checking apparatus to review the sample, has a function of retaining a plurality of coordinate correction tables to correct a deviation between a coordinate value previously calculated by a checking apparatus and an actual sample position detected by the review apparatus. The review apparatus evaluates correction accuracy of the plurality of coordinate correction tables and applies one of the coordinate correction tables with the maximum evaluation value.

Abstract: A measurement program is created for measurement performed by moving X- and Z-axes so that a central axis of a probe is perpendicular to the surface of a reference sphere, and errors are obtained between original probe position data and probe position data obtained by measurement performed at two different angles ?1 and ?2 of a rotary axis according to the created measurement program. Position coordinates of a tip end of the probe at the two different angles ?1 and ?2 of the rotary axis are corrected so that the errors are zero. Then, the X- and Z-axis coordinates are corrected based on a positive or negative phased shift amount, and measurement errors are obtained by calculation. A real probe tip position is defined by the X- and Z-axis coordinates corrected by a correction amount with which the obtained measurement errors become minimum.

Abstract: A navigation system and method for gyrocompass alignment in a mobile object. The system includes an inertial measurement device configured to provide a first set of sensor data and a positioning unit configured to provide a second set of data. In an example embodiment, the navigation system includes a processing device configured to receive the data sets provided by the inertial measurement device and the positioning device, and the processing device is configured to dynamically calibrate the received first data set the processing device includes a Kalman filter, and the processing device is further configured to generate a gyrocompass alignment using the first dynamically calibrated first data set, the second data set, and the Kalman filter. The method includes receiving sensor data from a plurality of sensors, dynamically calibrating at least a portion of the sensor data, and generating gyrocompass alignment information based on the dynamically calibrated sensor data.

Abstract: A method and system for controlling an overlay shift on an integrated circuit is disclosed. The method and system comprises utilizing a scanning electron microscope (SEM) to measure the overlay shift between a first mask and a second mask of the circuit after a second mask and comparing the overlay shift to information about the integrated circuit in a database. The method and system includes providing a control mechanism to analyze the overlay shift and feed forward to the fabrication process before a third mask for error correction. A system and method in accordance with the present invention advantageously utilizes a scanning electron microscope (SEM) image overlay measurement after the fabrication process such as etching and chemical mechanical polishing (CMP).

Abstract: A turntable (230) is installed so that an upper side (231) of the turntable is horizontal (S10). A posture detection device (1) is secured on a side (211) of a cubic jig (210) so that an X-axis (first axis) perpendicularly intersects a side (212) (second side), a Y-axis (second axis) perpendicularly intersects a side (213) (third side), and a Z-axis (third axis) perpendicularly intersects the side (211) (first side) (S12). The side of the cubic jig opposite to the side (212), (213), or (211) is sequentially secured on the upper side of the turntable (S14, S20, and S26). Detection values of the posture detection device are acquired in a state in which the turntable is stationary or rotated at a predetermined angular velocity (S16, S18, S22, S24, S28, and S30), and correction parameters are created (S32).

Abstract: A person is detected by an observer device. A person detection history is recorded in a person detection history database. A position where the person is detected for the first time is estimated by a first-time detection position estimating unit, to be stored in a first-time detection position history database. The position of the door of the room in terms of local coordinates is estimated by a doorway position estimating unit. The calibration information as to the position of the observer device is calculated by a position calibration information calculating unit based on the door position in terms of local coordinates and that in terms of global coordinates.

Abstract: Implementing a portable articulated arm coordinate measuring machine includes receiving a first request to perform a function. The portable AACMM includes a manually positionable articulated arm portion having opposed first and second ends, the arm portion including a plurality of connected arm segments, each arm segment including at least one position transducer for producing a position signal, a measurement device attached to a first end of the AACMM, and an electronic circuit which receives the position signals from the transducers and provides data corresponding to a position of the measurement device.

Abstract: A portable articulated arm coordinate measurement machine (AACMM) having integrated software controls. The AACMM includes a manually positionable articulated arm portion having opposed first and second ends, the arm portion including a plurality of connected arm segments, each of the arm segments including at least one position transducer for producing position signals. The AACMM also includes a measurement device attached to the first end of the AACMM, and an electronic circuit having a self-contained operating environment for the AACMM. The self-contained operating environment includes a user interface application, an application programming interface, and logic.

Abstract: A portable articulated arm coordinate measurement machine (AACMM) that includes a manually positionable articulated arm, a measurement device attached to a first end of the AACMM, and an electronic circuit for receiving the position signal and for providing data corresponding to a position of the measurement device. The AACMM further includes an environmental recorder. The environmental recorder includes a sensor for outputting a value of a parameter, a memory, and logic executable by the environmental recorder to implement a method. The method includes monitoring the value of the parameter, and determining that the value of the parameter is outside of a programmable threshold. The value of the parameter and a timestamp are stored in the memory in response to the value of the parameter being determined to be outside of the programmable threshold. The contents of the memory are transmitted to the electronic circuit.

Abstract: Measurement data collected within a measurement frame of reference is fitted to geometric tolerance zones having regard for the uncertainties of the measurement. Geometric freedoms for fitting the measurement data are exploited to fit uncertainty zones associated with the measurement data within the tolerance zones. Typically, the measurement data is multidimensional and the uncertainty zones have different sizes.

Abstract: A registration detection system realizes both substrate-by-substrate correction and highly accurate correction of an exposure process.

Abstract: An information processing apparatus includes: a receiving device receiving a distribution data series; first adjusting device adjusting first function parameter set to reduce an error, the first function parameter set specifying the position of the extreme value, and the ratio of a value at first distance on the coordinate axis from the position of the extreme value in first direction to the extreme value; second adjusting device adjusting second function parameter set to reduce an error, the second function parameter set specifying the position of the extreme value, and the ratio of a value at second distance on the coordinate axis from the position of the extreme value in second direction to the extreme value; a calculator calculating a characteristic coefficient identifying a Pearson function from a moment of a function including the first and second functions; and a distribution data calculator for calculating distribution data by a Pearson function.

Abstract: A method is provided for reporting location of a buried object detected by a utility locator device. The method includes: determining location of a buried object using electromagnetic field emissions emitted from a utility locator device, determining global coordinates for the location of the buried object using a global positioning system (GPS), determining an accuracy measure for the global coordinates using the accuracy of the location determined by the locator and the accuracy of the GPS; and reporting the global coordinates for the buried object, along with the accuracy measure, to an operator of the utility locator device. An operator of the locator may be notified when the accuracy measure for the global coordinates exceeds a tolerance for reporting the location of the buried object.

Abstract: A method of operating an articulated arm CMM is provided. One or more coordinates on an object can be measured with the articulated arm CMM. At least one of the encoders can then be at least partially powered-off. The encoder can then be powered on and one or more coordinates on the same object can be measured without recalibrating the encoder.

Abstract: Provided is a charged particle beam device wherein a secondary signal generated from an alignment pattern having known coordinate values in a sample coordinate system is detected, and a positional deviation quantity between the coordinate system of a sample (10) and the coordinate system of a stage (21) is calculated so as to generate coordinate correction data. At the time of observing a sample image, the secondary signal generated from the alignment pattern is detected at least once so as to perform realignment, and the coordinate correction data is updated. Thus, the charged particle beam device performs long-time inspection at a high observation magnification by accurately correcting the sample coordinate information obtained by temperature change, while suppressing device cost increase and throughput deterioration.

Abstract: A method for restoring navigation failure information in a fluoroscopy-based imaging system is disclosed. The method includes obtaining a plurality of receiver navigation information using a calibration target rigidly attached to a supporting member of the imaging system. The calibration target may include a plurality of receivers providing navigation information and the supporting member may be a C-arm. The method identifies a navigation failure and corresponding to the navigation failure a calibrated receiver navigation information is generated. The calibrated receiver navigation information is generated using a calibration information and a C-arm imaging position obtained during navigation failure. A receiver navigation information corresponding to the navigation failure is estimated using the calibrated receiver navigation information, and a transmitter navigation information.

Abstract: A computer-implemented method for positioning a coordinate system in relation to a workpiece receives positioning elements including feature elements selected from the workpiece. A normal vector of a first axis, an origin, a normal vector of a second axis are determined according to the positioning elements. A positioned coordinate system is generated according to the normal vectors of the first axis and the second axis, and the origin, for positioning the coordinate system.

Abstract: Optical distortion calibration for an Electro-Optical sensor in a chamber eliminates calibration of the mirror controller and allows for calibration while the target is in motion across the FOV thus providing a more efficient and accurate calibration. A target pattern is projected through sensor optics with line of sight motion across the sensor FOV to generate a sequence of frames. Knowing that the true distances between the same targets remain constant with line of sight motion across the sensor's FOV, coefficients of a function F representative of the non-linear distortion in the sensor optics are fit from observed target positions in a subset of frames to true line of sight so that distances between targets are preserved as the pattern moves across the FOV. The coefficients are stored as calibration terms with the sensor.

Abstract: Positioning recognition marks are read by movable recognition device for positioning objects to be bonded to each other. An alignment method includes a step of reading the recognition marks during movement of the recognition device before its complete stop, and a step of identifying absolute positions of the recognition marks by correcting the mark recognition positions having been read based on a position feedback signal of the moving recognition device. A mounting method using the alignment method is also disclosed. It is possible to maintain a high alignment accuracy, eliminate necessity of assuring a settling time for complete stop of the movable recognition device, and significantly reduce the alignment time and mounting tact.

Abstract: A coordinate measuring machine has a probe head, a calibrating body and an apparatus for recording and correcting measured values obtained by the probe head. A mechanical flexibility at predetermined points on the surface of the calibrating body is determined. The mechanical flexibility is stored in the apparatus in the form of a data record. The calibrating body is scanned point by point by means of the probe head in order to obtain the measured values. Thereafter, the probe head is calibrated by correcting the measured values using the data record. A similar approach can also be used on workpieces having a known mechanical flexibility.