Abstract: A transducer of the preferred embodiment including a transducer and a plurality of adjacent, tapered cantilevered beams. Each of the beams define a beam base, a beam tip, and a beam body disposed between the beam base and the beam tip. The beams are arranged such that each of the beam tips extends toward a common area. Each beam is joined to the substrate along the beam base and is free from the substrate along the beam body. A preferred method of manufacturing a transducer can include: depositing alternating layers of piezoelectric and electrode onto the substrate in block, processing the deposited layers to define cantilever geometry in block, depositing metal traces in block, and releasing the cantilevered beams from the substrate in block.

Abstract: The resonance structure is that two rows of ground via holes are placed symmetrically along two sides of the CB-CPW central conductor; each row of the via holes are equally spaced; every via hole connects a top shield plane layer, a first middle layer and a bottom shield plane layer of the magnetic probe; every via hole is placed out of a rectangle gap at the bottom of the magnetic probe; the via holes form a fence. The construction method: 1. constructing a simulation model formed by the magnetic probe and a 50? microstrip in a CST® microwave studio; 2. simulation setting; 3. placing via holes along two sides of the central conductor; 4. connecting a 50? matching load to the second end of the microstrip and defining the first end as microstrip port1; defining the end on which mount a SMA connector as probe port2; simulating S21.

Abstract: The present invention provides a detection device, a detection method and a detection system, which are used for detecting damaged condition of a substrate. The detection device includes a probe unit and a judgement unit, and the probe unit includes a probe, a speed detection module and a driving force control module both provided on the probe, wherein the bottom end of the probe is used for contacting with the substrate to be detected; the speed detection module is used for obtaining a real-time speed of the probe in a process of detection and transmitting the real-time speed to the judgement unit; the driving force control module is used for applying a constant driving force to the probe; and the judgement unit is used for receiving the real-time speed of the probe and judging the damaged condition of the substrate to be detected according to the real-time speed.

Abstract: A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.

Abstract: A device for weighing micro- and nano-sized particles.

Abstract: A stress monitoring device includes an anchor structure, a freestanding structure and a Vernier structure. The anchor structure is over a substrate. The freestanding structure is over the substrate, wherein the freestanding structure is connected to the anchor structure and includes a free end suspended from the substrate. The Vernier structure is over the substrate and adjacent to the free end of the freestanding structure, wherein the Vernier structure comprises scales configured to measure a displacement of the free end of the freestanding structure.

Abstract: A method for manufacturing a microcantilever having a cantilever and a functional probe provided on the cantilever may include steps of: providing a probe mold which accommodates a liquid probe solution in which quantum dots for the functional probe are mixed, and has a groove corresponding to the shape of the functional probe; bringing a cantilever into contact with the probe mold on which the groove is formed to correspond to the location of the functional probe; forming the functional probe on the cantilever by curing the probe solution accommodated in the groove in a state where the cantilever contacts the probe mold; and separating the cantilever from the probe mold.

Abstract: This disclosure teaches a system and method for controlling a specimen scanner remotely. In one embodiment, a method for controlling a specimen scanner remotely can comprise the step of communicating with a specimen scanner to a network. The specimen scanner can comprise a camera, a stage, one or more lenses, and one or more light sources. The method can comprise the additional step of providing a graphical user interface to a remote computer connected to the network. The graphical user interface can be operable to control the camera, choose one of the one or more lenses, and adjust the one or more light sources. The method can further comprise the step of receiving instructions from the remote computer, and controlling the specimen scanner based on those instructions.

Abstract: A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.

Abstract: An inkjet printer includes: an optical reading device that optically reads at least one of an unprinted area on a printing paper sheet, a test chart printed area on a first printing in which a test chart is printed, and an image printed area on a second printing in which an image other than a test chart is printed, and acquires image data on the read area; an abnormal noise detecting device that analyzes the acquired image data and detects abnormal noise on a surface of a printing paper sheet; and a control device that changes at least a setting related to detection of an ejection state of an inkjet head or a printing state, or a setting related to printing correction, based on a state of the detected abnormal noise.

Abstract: A method of measuring a friction coefficient of a surface of a specimen includes: obtaining surface information of the specimen by using an atomic force microscope (AFM); calculating data of a friction coefficient of the surface of the specimen by using the surface information of the specimen; and mapping the data of the friction coefficient of the specimen to an image. The method of measuring a friction coefficient of a surface of a specimen may prevent a probe part of an atomic force microscope from being worn out and secure high reliability of the friction coefficient value by correcting the atomic force microscope using a specimen to be actually measured and measuring a fiction coefficient at the same time.

Abstract: This sample holder for a scanning probe microscope is constituted of (1) a container that retains a liquid and (2) a flat-plate-shaped upper cover that covers an upper opening of the container and that has a narrow slit above the position where a sample is placed. In the upper cover, the slit has a slit width with which a thin film of the liquid is formed over the upper surface of the sample when the liquid fills the space between the container and the upper cover. The thin film of the liquid has a film thickness smaller than the distance between the upper surface of the sample and the upper cover.

Abstract: A stress detector for detecting an in-situ stress profile of an electrode has a liquid cell, a holder configured to attach to one end of a sample electrode so that the sample electrode is cantilevered in the liquid cell, a piezo sensor comprising a piezo material in the liquid cell and having a movable end configured to contact the sample electrode and a fixed end fixedly engaged within the liquid cell and a measurement sensor in contact with the piezo sensor.

Abstract: A vibration sensor for a fluid environment includes a vibrissa that can be positioned in the fluid environment. The vibrissa is joined to a cantilever body having magnets positioned thereon. Cantilever body is supported by a resilient support member in an interior hollow within a housing. Support member allows movement of body in two dimensions while supporting the body in a third dimension. Magnetic sensors corresponding to the magnets on the body are positioned on the housing for detecting movement of the body caused by the vibrissa. In various embodiments, the support member can be a membrane shielding the housing interior from environmental fluid flow.

Abstract: An apparatus for in-line testing and surface analysis of a sample contains a base which stationarily supports a column and moveably supports an optical microscope, an interferometer, and at least test unit such as a scratch and abrasive wear tester that are moveable on the column in the Z-axis direction. A sample secured on a sample table, which is supported by a replaceable tribology drive unit on an X-stage that may position the sample under the microscope, interferometer, or test unit. Depending on the type of the test, the replaceable tribology unit may impart to the sample either a linear reciprocating movement or a rotating movement. The apparatus may operate in an automatic mode and is provided with a central processing unit that control movements of all moveable units through respective drivers via controllers connected to the central processing unit.

Abstract: A method for measuring mass of a micro- and nano-sized particle. The method includes placing the micro- or nano-sized particle on a resonator having an oscillator and a first and second cantilevered arms with interdigitating finger, energizing the oscillator at a selective frequency thereby causing mechanical vibration in the first and second cantilevered arms, directing a light beam from a light source onto the interdigitating fingers, sensing intensity of light of the reflected diffraction pattern by at least one photodetector positioned about at least one of the modes, varying the frequency by sweeping a range of frequencies and correlating the sensed intensity to mass to thereby determine the mass of the micro- or nano-sized particle.

Abstract: A method of controlling a scanning electrochemical microscopy probe tip comprising the following steps: oscillating the scanning electrochemical microscopy probe tip relative to the surface of interest; moving the oscillating scanning electrochemical microscopy probe tip towards the surface of interest; detecting damping of an amplitude of the oscillation of the scanning electrochemical microscopy probe tip resulting from the scanning electrochemical microscopy probe tip coming into contact with the surface of interest at the first location; using the detected damping to detect the surface of interest; retracting the scanning electrochemical microscopy probe tip away from the surface of interest without first translating the scanning electrochemical microscopy probe tip along the surface of interest while the scanning electrochemical microscopy probe tip is in intermittent contact with the surface of interest.

Abstract: The present application relates to a method for avoiding damage when analyzing a sample surface with a scanning probe microscope, the method comprising the step of: detecting an electrostatic interaction between a charging of the sample surface and a measuring tip of the scanning probe microscope in the course of the approach of the measuring tip to the sample surface already at a distance from the sample surface which is greater than the distance of the measuring tip when analyzing the sample surface.

Abstract: A method and a scanning probe microscope (SPM) for scanning a surface of a material. The method and SPM have a cantilever sensor configured to exhibit both a first spring behavior and a second, stiffer spring behavior. While operating the SPM in contact mode, the sensor is scanned on the material surface and a first spring behavior of the sensor (e.g. a fundamental mode of flexure thereof) is excited by deflection of the sensor by the material surface. Also while operating the SPM in contact mode, excitation means are used to excite a second spring behavior of the sensor at a resonance frequency thereof (e.g. one or more higher-order resonant modes) of the cantilever sensor to modulate an interaction of the sensor and the material surface and thereby reduce the wearing of the material surface.

Abstract: A measuring head for a nano-indentation instrument, said nano-indentation instrument comprising a positioning system arranged to position a sample relative to the measuring head, the measuring head comprising: a measuring subsystem attached to a frame adapted to be connected to the nano-indentation instrument, the measuring subsystem comprising a first actuator and an indenter adapted to indent a surface of said sample under application of a force applied by the first actuator on the indenter, the measuring subsystem further comprising a force sensing system adapted to detect said force applied by the first actuator; a reference subsystem attached to said frame, the reference subsystem comprising a second actuator, a reference structure in operative connection with the second actuator, and a separation detector adapted to determine a predetermined separation of the reference structure and said surface of said sample.

Abstract: Disclosed is a method of measurement and determination on fracture toughness of structural materials at high temperature, comprising: preliminary assessing the ductility of a material based on a high-temperature uniaxial tensile test and the fracture characteristic; designing and manufacturing a CT specimen; conducting a monotonic loading fracture test on the CT specimen at high temperature; modifying a load-displacement curve output by a testing machine; determining a passivation coefficient M for the crack of the structural material; reversely recursing instant load-displacement data pairs corresponding to the instant crack length; calculating a J_R crack extension resistance curve of the tensile test; examining the validity of the J_R crack extension resistance curve and the fracture toughness JIC; calculating the fracture toughness per equivalent of the structural material KIC. The present invention overcomes the difficulty of placing an extensometer inside a high-temperature furnace.

Abstract: An apparatus for performing a contact mechanics test on a substrate includes a stylus, a core configured to engage the stylus against the substrate, a stylus engagement mechanism configured to induce a contact load or a penetration depth to the stylus, a core engagement mechanism configured to maintain contact of the core and to move the core along the substrate surface, a frame configured to be fixed with respect to the apparatus or to be moved together with the core engagement mechanism as an assembly, a frame engagement mechanism configured to engage the frame with the substrate surface; and a substrate monitoring device configured to measure characteristics of substrate contact response and/or collect material machined from the substrate. Methods of performing a contact mechanics test are also provided.

Abstract: The disclosure concerns an actuator module (10) for actuating a load (14). The actuator module (10) comprises a deformable frame (1) and an actuator (2) connected to the deformable frame (1). A time-varying force distribution (F) couples to an excited state (V0) of an eigenmode (V) of the deformable frame (1). The force distribution (F), as well as a stiffness distribution (K) and/or mass distribution (M) of the deformable frame 1 are adapted such that static nodal points (11s) of the deformable frame 1 are coincided with mode nodal points (11m). The locations where the nodal points coincide can be used to connect the actuator module (10) to a base frame to reduce transfer of vibrations to the base frame and back which may otherwise undesirably influence the transfer function from actuator to load. The disclosure further concerns a method for designing and/or manufacturing the actuator module.

Abstract: This disclosure also teaches a system and method for scanning a specimen into a focus-stacked scan. In one embodiment, a method for scanning the specimen into a focus-stacked scan can comprise illuminating the specimen with a light. The specimen can comprise a topography. The depths of the topography can be variable along a z-axis. The method can also comprise dividing the specimen into a plurality of regions. Each of the regions can comprise a regional peak in the topography. Additionally, the method can comprise sampling each of the regions at a plurality of focal planes orthogonal to the z-axis by capturing, at each focal plane, an image of the region. The image can be focused on the focal plane. Lastly, the method can comprise focus-stacking, for each of the region the images within the region, into a focus-stacked image, and stitching together the focus-stacked images.

Abstract: Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.

Abstract: An approach to determining vehicle usage makes use of a sensor that provides a vibration signal associated with the vehicle, and that vibration signal is used to infer usage. Usage can include distance traveled, optionally associated with particular ranges of speed or road type. In a calibration phase, auxiliary measurements, for instance based on GPS signals, are used to determine a relationship between the vibration signal and usage. In a monitoring phase, the determined relationship is used to infer usage from the vibration signal.

Abstract: The present invention is related to a membrane electrochemical signal detection system, which comprises a detection platform and a probe, wherein the detection platform comprises a substrate having a cavity; a hydrogel layer disposed in the cavity of the substrate; and a carrier film disposed above the substrate and the hydrogel layer with at least one through hole corresponding to the cavity of the substrate as a sample slot. The surface of the probe is covered by an insulating layer and a metal for detection is exposed at a tip portion of the probe.

Abstract: Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined, and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.

Abstract: A device for calculating a position of an actuator, the actuator including a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ?M and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ?S, where A=?S/?M?2, and the device includes a position calculation unit configured to calculating a position SA of the movement mechanism at a target position from the control signal at a time point T1, at which the sensor signal becomes (S0+m×?S) or (S0?m×?S), where m is a natural number of 1 or more, the control signal at the target position of the movement mechanism is denoted by M0, and the sensor signal is denoted by S0.

Abstract: An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.

Abstract: The present invention makes it possible to easily and efficiently observe a specimen contained in a fluid without using a filtration device separate from a scanning probe microscope by attaching a filter holding part holding a filter to a fluid cell of a specimen support. Therefore, a specimen support 10, for holding a specimen subject to observation by the scanning probe microscope, comprises a fluid cell 11, into which fluid including the specimen is introduced, and a filter unit including a filter 15, which allows the fluid passage and at least a part of the specimen is adhered to. The fluid cell 11 includes a fluid entrance, the filter unit includes a fluid exit opening, and the filter unit is attached to one side of the fluid cell 11.

Abstract: The invention relates to a measuring machine and a method for automated measurement of an object and detection of differences between a feature of the object and CAD data of the object. The measuring machine comprises a probe head, a probe system comprising a probe and measurement functionality for determining three-dimensional coordinates of a feature of the object, a local computer terminal, an assigned memory unit, and an assigned set of measurement software programs for controlling the measuring machine. The stored CAD data of the object comprise typical dimensions and tolerances of the features, and the assigned set of measurement software programs comprises an optimization algorithm for the measurement of each feature which algorithm is designed to automatically select measuring parameters of the measuring machine and/or a measurement software program from the set of measurement software programs.

Abstract: Described herein is the analysis of nanomechanical characteristics of cells. In particular, changes in certain local nanomechanical characteristics of ex vivo human cells can correlate with presence of a human disease, such as cancer, as well as a particular stage of progression of the disease. Also, for human patients that are administered with a therapeutic agent, changes in local nanomechanical characteristics of ex vivo cells collected from the patients can correlate with effectiveness of the therapeutic agent in terms of impeding or reversing progression of the disease. By exploiting this correlation, systems and related methods can be advantageously implemented for disease state detection and therapeutic agent selection and monitoring.

Abstract: Apparatus and methods are described for scanning probe microscopy and spectroscopy based on acquisition of full probe response. The full probe response contains valuable information about the probe-sample interaction that is lost in traditional scanning probe microscopy and spectroscopy methods. The full probe response is analyzed post data acquisition using fast Fourier transform and adaptive filtering, as well as multivariate analysis. The full response data is further compressed to retain only statistically significant components before being permanently stored.

Abstract: The disclosed technology relates generally to probe configurations, and more particularly to probe configurations and methods of making probe configurations that have a diamond body and a diamond layer covering at least an apex region of the diamond body. In one aspect, a method of fabricating a probe configuration includes forming a probe tip. Forming the probe tip includes providing a substrate and forming a recessed mold into the substrate on a first side of the substrate, wherein the recessed mold is shaped to form a probe body having an apex region. Forming the probe tip additionally includes forming a first diamond layer on the substrate on the first side, wherein forming the first diamond layer includes at least partially filling the recessed mold with the first diamond layer such that a probe body having an apex region is formed in the recessed mold.

Abstract: The present invention is provided to remove scattering from other parts, except for an end part of a nano-probe, in a near-field microscope, and to enable a spectral analysis by delaying the generation of multiple reflections caused through the shaft of the nano-probe. A first characteristic of the present invention is to temporally delay generation of multiple reflections by manufacturing a probe portion to have a predetermined length or more in a tuning-fork based near-field probe. A second characteristic of the present invention is to provide a near-field microscope which includes a tuning-fork based near-field probe having a structure as above, and can measure a time-domain transient reaction of a scattered wave. A third characteristic of the present invention is to provide a method for performing a spectral analysis on a time-domain signal measured by the near-field microscope.

Abstract: A scanning probe microscope comprising: a signal generator providing a drive signal for an actuator to move a probe repeatedly towards and away from a sample. In response to the detection of an interaction of the probe with the sample the drive signal is modified to cause the probe to move away from the sample. The drive signal comprises an approach phase in which an intensity of the drive signal increases to a maximum value; and a retract phase in which the intensity of the drive signal reduces from the maximum value to a minimum value in response to the detection of the surface position. The intensity of the drive signal is held at the minimum value during the retract phase and then increased at the end of the retract phase. The duration of the retract phase is dependent on the maximum value in the approach phase.

Abstract: A tension and compression tester for a fracture stress test of a compact pipe sample having a crack portion formed thereon, comprises: a pair of holders each of which is configured to surround both ends of the compact pipe sample respectively such that the crack portion is interposed between both ends of the compact pipe; fixing portions each of which is disposed between the compact pipe sample and the holder to enhance fastening between the compact pipe sample and the holder; levers each of which is connected with the fixing portion and the holder to deliver tension or bending to the compact pipe sample; and separation preventing portions for fixing both ends of the holder and the lever with each other to prevent separation of the lever and the holder. Accordingly, the tester can conduct both tension and compression tests, while easily applying loads on the sample during the test.

Abstract: Provided are a defect classifying method and an inspection apparatus which are capable of classifying a defect by distinguishing a basal plane dislocation, which is a killer defect in bipolar high-voltage elements, from other defects. The defect classifying method according to the present invention includes: projecting an illumination beam toward a silicon carbide substrate and forming a reflection image and a photoluminescence image; a first inspection step of detecting a defect image from the reflection image formed; a second inspection step of detecting a defect image from the photoluminescence image formed; and a defect classification step of classifying detected defects based on whether or not the defect image is detected and the shape of the detected defect image.

Abstract: A processing system cooperates with an atomic force microscope operating in ramp mode at a ramp frequency is configured to collect data indicative of at least one of physical and chemical properties of a sample. The system collects data indicative of probe movement at a frequency that is higher than the ramp frequency. This data comprises a second-order portion of the probe's signal. Based at least in part on the second-order portion, the processor obtains a parameter that is indicative at least one of a physical and a chemical property of a sample.

Abstract: An intermittent contact atomic force microscope includes: a cantilever configured to receive a contact resonance modulation; a sample disposed proximate to the cantilever; a contact resonance modulator in communication with the cantilever and configured to provide the contact resonance modulation to the cantilever; and a scan modulator in mechanical communication with the sample to provide a scan modulation to the sample.

Abstract: The invention provides a tread thickness measuring method for accurately measuring the tread thickness from a belt surface located in an outermost position in a tire to the tread surface by an ultrasonic measurement irrespective of the material of the belt. The method includes the steps of spraying the same liquid as the liquid pooled in a tank on the tread surface of the tire under inspection before immersing the tread surface in the liquid in the tank and measuring the depth of the belt located in the outermost position in the tire by emitting ultrasonic waves to the tread surface immersed in the liquid in the tank and receiving the reflected waves.

Abstract: A MEMS device and a method to manufacture a MEMS device are disclosed. An embodiment includes forming trenches in a first main surface of a substrate, forming conductive fingers by forming a conductive material in the trenches and forming an opening from a second main surface of the substrate thereby exposing the conductive fingers, the second main surface opposite the first main surface.

Abstract: The purpose of the present invention is to increase the detection light amount of near-field light, which is generated in a liquid between a measurement probe and a sample-to-be-inspected, at the time of employing a near-field scanning microscope for measurement in a liquid, and to improve measurement reproducibility and the SN ratio of near-field light images. The present invention provides a scanning probe microscope comprising: a measurement probe that is relatively scanned over a sample-to-be-inspected; a laser beam irradiation system that irradiates the measurement probe with a laser beam; a sample cell that holds the sample-to-be-inspected and that transmits scattered light of near-field light generated between the measurement probe and the sample-to-be-inspected by the laser beam irradiation; and a detector that detects the scattered light that has passed through the sample cell.

Abstract: A scanning probe microscope includes a stage on which a sample is mounted, a probe configured to measure a characteristic of the sample, and a controller configured to move the probe and the stage relative to each other along a scanning trajectory during measurement of the characteristic of the sample. The scanning trajectory includes a plurality of linear segments, wherein each pair of adjacent linear segments form an angle that is 90 degrees or less.

Abstract: The present invention provides a method and an apparatus for measuring a force (which will be referred to as surface force) acting between two material surfaces. A surface force measuring method includes moving an object (1) toward a probe (4) until the probe (4) is adsorbed to the object (1), then applying a load from an electromagnetic-force generator (20) to a supporting member (6) in a direction as to separate the probe (4) from the object (1) while gradually increasing an electric current supplied to the electromagnetic-force generator (20), obtaining a value of the electric current supplied to the electromagnetic-force generator (20) when the probe (4) is separated from the object (1), and converting the value of the electric current into a surface force acting between the probe (4) and the object (1).

Abstract: A microelectromechanical transducer and test system is disclosed. One embodiment includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe.

Abstract: A microscope focusing mechanism includes a fixing part attached to a microscope main body, a fixing-side guide member attached to the fixing part, a plate-shaped base part that supports at least one of a stage for placing a specimen and a revolver to which multiple objective lenses are detachably attached, a moving-side guide member that is fixed to the base part, that is connected to the fixing-side guide member, and that is movable in a direction of an optical axis of one of the objective lenses, and a plate member that is arranged on a side of the base part opposite to a side where the moving-side guide member is arranged. A linear expansion coefficient of a material of each of the moving-side guide member and the plate member differs from a linear expansion coefficient of a material of the base part.

Abstract: Multi-actuator system. The system includes at least two nano positioners having different ranges and bandwidths located in cascaded serial form to contact and move an object. A control system employs data-based control design to combine the at least two nano positioners so as to apportion actuation responsibilities among the at least two nano positioners so as to compensate for their coupled dynamics while moving the object. It is preferred to provide a separate controller for controlling separately each of the at least two nano positioners. Parameters of the separate controllers may be determined by minimizing output error.

Abstract: A differential displacement sensor is disclosed that includes a pair of aligned stationary carbon nanostructures and a moveable carbon nanostructure. The moveable carbon nanostructure is configured to engage and move with respect to the pair of aligned stationary carbon nanostructures throughout a range of motion. Circuitry applies an excitation voltage across the pair of aligned stationary carbon nanostructures and the moveable carbon nanostructure to generate an output voltage proportional to a displacement of the moveable carbon nanostructure with respect to the pair of aligned stationary carbon nanostructures throughout the range of motion. Graphene sheets or carbon nanotubes may form the moveable carbon nanostructure or the pair of aligned stationary carbon nanostructures.