Abstract: A multi-head probe suitable for an atomic force microscopy (AFM) comprises a tip base, a single cantilever beam and at least two tips. The tip base has a tip end, which is ground to form a surface. The cantilever beam is connected to the tip base and for supporting the tip base. The at least two tips are disposed on the surface.

Abstract: A method of analyzing a sample that includes applying a first set of energies at a first set of frequencies to a sample and applying, simultaneously with the applying the first set of energies, a second set of energies at a second set of frequencies, wherein the first set of energies and the second set of energies form a multi-mode coupling. The method further includes detecting an effect of the multi-mode coupling.

Abstract: Provided is a method of evaluating a probe tip shape in a scanning probe microscope, including: measuring the probe tip shape by a probe shape test sample having a needle-like structure; determining radii of cross-sections at a plurality of distances from the apex; and calculating, based on the distances and the radii, a radius of curvature when the probe tip shape is approximated by a circle.

Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.

Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.

Abstract: Provided in one embodiment is a method, comprising: forming a part comprising a bulk amorphous alloy, wherein the part comprises a sampling portion; determining a parameter related to the part by detecting by imaging on a surface of the sampling portion presence of crystals of the alloy; and evaluating the part based on the parameter.

Abstract: Provided is a friction force microscope that can measure a friction force by a cantilever in a quantitative manner. The friction force microscope includes a friction force calculating mechanism that calculates an effective probe height and a torsional spring constant of the cantilever from bending sensitivity determined from displacement information in a bending direction of the cantilever and torsional sensitivity determined from displacement information in a torsional direction of the cantilever, respectively, so as to use the calculated values for calculating the friction force.

Abstract: A method for optically controlling an atomic force microscope (AFM) includes acquiring an optical image of a sample using an optical imaging device, identifying a feature of interest on the sample using the optical image, acquiring a high resolution AFM image of the sample using an AFM imaging device, the AFM imaging device comprising a cantilever having a tip, overlaying the AFM image with the optical image at the feature of interest, and positioning the probe tip over the feature of interest using the optical image.

Abstract: In a cantilever which is used in a scanning probe microscope or the like and has a trapezoidal cross-sectional shape formed through anisotropic etching in a silicon process, a cantilever spring constant is determined without measuring a thickness directly. A cantilever thickness is determined based on upper base and lower base lengths of the trapezoidal cross-sectional shape and geometric regularity of a surface generated by the anisotropic etching. Then, the cantilever spring constant is determined based on the cantilever thickness, a cantilever length, and a Young's modulus.

Abstract: A method of creating a probe for scanned probe microscopy is disclosed. The method includes providing a wafer having a support wafer layer and a device layer. The method includes masking the wafer with a masking layer. The method includes removing a portion of the masking layer at the device layer. The method includes etching the wafer along the portion of the masking layer that has been removed to create a crystal facet surface that is oriented at a tilt angle. The method includes epitaxially growing a tip along the crystal facet surface.

Abstract: Rheology system. The system includes a first piezoelectric actuator assembly for providing microscale displacement of a sample and a second piezoelectric actuator assembly for oscillating the sample at a nano/micro scale displacement in a selected frequency range extended significantly as compared to the frequency range available on the commercial AFMs. A preferred sample is cartilage and the disclosed system can distinguish between normal cartilage and GAG-depleted cartilage.

Abstract: A system for performing atomic force measurements including: a sensor including: a beam having a first side and a second side, the beam including a tip positioned on a surface of the first side for interacting with a sample; and a grating structure positioned adjacent the second side of the beam, the grating structure including an interrogating grating coupler configured to direct light towards the beam; a light source optically coupled to an input of the sensor for inputting light; and an analyser coupled to an output of the sensor; wherein the beam and the interrogating grating coupler form a resonant cavity, a movement of the beam modulates the light source and the analyser determines a deflection of the beam according to the modulated light.

Abstract: Techniques for atomic force microscope manipulation of living cells include functionalizing a nanoscale tip of a microscale cantilever with a first ligand for a first receptor associated with a surface of a first type of cell. The method further comprises, controlling the cantilever to cause the first ligand on the nanoscale tip to contact the first receptor on a surface of a living cell of the first type in a particular temporal pattern to induce a target response by the living cell. Other techniques for controlling an atomic force microscope comprising a nanoscale tip include controlling the cantilever to cause the nanoscale tip to contact a living cardiomyocyte at a predetermined pressure. The cantilever is also controlled to turn off vertical deflection feedback after contacting the cardiomyocyte and collecting deflection data that indicates a time series of nanoscale vertical deflections of the microscale cantilever caused by the living cardiomyocyte.

Abstract: An atomic force microscopy probe configuration and a method for manufacturing the same are disclosed. In one aspect, the probe configuration includes a cantilever, and a planar tip attached to the cantilever. The cantilever only partially overlaps the planar tip, and extends along a longitudinal direction thereof. The planar tip is of a two-dimensional geometry having at least one corner remote from the cantilever, which corner during use contacts a surface to be scanned.

Abstract: A device for oscillation excitation of a leaf spring, which is fastened on one side in an atomic force microscope (AFM) and comprises semiconductor material, which has no piezoelectric properties, a free end to which a tip is attached, which is brought into contact with a sample surface to be examined. The present invention has the leaf spring connected at least sectionally to a metal layer to form a Schottky contact, and an electrical voltage or field source is provided, which generates an electrical AC voltage a vicinity or area of the Schottky contact.

Abstract: An approach for the thermomechanical characterization of phase transitions in polymeric materials (polyethyleneterephthalate) by band excitation acoustic force microscopy is developed. This methodology allows the independent measurement of resonance frequency, Q factor, and oscillation amplitude of a tip-surface contact area as a function of tip temperature, from which the thermal evolution of tip-surface spring constant and mechanical dissipation can be extracted. A heating protocol maintained a constant tip-surface contact area and constant contact force, thereby allowing for reproducible measurements and quantitative extraction of material properties including temperature dependence of indentation-based elastic and loss moduli.

Abstract: Systems and methods for preparing solid samples for analysis, such as microscopic examination in cross section or planimetric orientation. The sample preparation systems may include a sample support configured to secure a solid sample, an excitation beam source that generates an excitation beam configured to remove material from a surface of the sample, a beam shield configured to at least partially protect the sample from the excitation beam, and a beam shield holder configured to secure the beam shield, where the adjustment of the relative positions of the beam shield and sample holder permits the excitation beam to selectively expose a series of substantially planar surfaces of the sample.

Abstract: A dynamic probe detection system (29,32) is for use with a scanning probe microscope of the type that includes a probe (18) that is moved repeatedly towards and away from a sample surface. As a sample surface is scanned, an interferometer (88) generates an output height signal indicative of a path difference between light reflected from the probe (80a,80b,80c) and a height reference beam. Signal processing apparatus monitors the height signal and derives a measurement for each oscillation cycle that is indicative of the height of the probe. This enables extraction of a measurement that represents the height of the sample, without recourse to averaging or filtering, that may be used to form an image of the sample. The detection system may also include a feedback mechanism that is operable to maintain the average value of a feedback parameter at a set level.

Abstract: The invention relates to a device for an atomic force microscope (AFM) for the study and/or modification of surface properties. The device comprises a cantilever (flexible bar) having an integrated, piezoresistive sensor, an integrated bimorphic actuator, and a measuring tip. The measuring tip carries at least two metal electrodes, which can be activated via electrical terminals. The measuring tip and/or the cantilever have at least one nanoscopic hole through which synchrotron radiation or laser light is directed onto the material surface to be studied. Furthermore, the invention relates to a method for the study and modification of surface properties and surface-proximal properties, which can be executed using such a device. To this end, atomic force microscopy (AFM), surface enhanced Raman scattering (SERS), photo emission spectroscopy (XPS, XAS), and material modification by local exposure are executed in sequence or simultaneously using the same device.

Abstract: A scanning probe microscope includes: a first and second probes for scanning a sample while maintaining the distance to the sample surface; crystal oscillators holding each of the first and second probes; and a modulation oscillator for providing the first probe with a vibration of a specific frequency which is different from the resonant frequency of each crystal oscillator. A control unit monitors the vibration of the specific frequency of the first and second probes, detects proximity of the first probe and the second probe to each other based on the change of the specific frequencies, and controls the drive of the first and second probes.

Abstract: Provided are methods and systems for high resolution imaging of a material immersed in liquid by scanning probe microscopy. The methods further relate to imaging a material submersed in liquid by tapping mode atomic force microscopy (AFM), wherein the AFM has a microfabricated AFM probe comprising a nanoneedle probe connected to a cantilever beam. The nanoneedle probe is immersed in the liquid, and the rest of the AFM probe, including the cantilever beam to which the nanoneedle probe is attached, remains outside the liquid. The cantilever is oscillated and the nanoneedle probe tip taps the material to image the material immersed in liquid. In an aspect, the material is supported on a shaped substrate to provide a spatially-varying immersion depth with specially defined regions for imaging by any of the methods and systems of the present invention.

Abstract: Improved nanolithography components, systems, and methods are described herein. The systems and methods generally employ a resistively heated atomic force microscope tip to thermally induce a chemical change in a surface. In addition, certain polymeric compositions are also disclosed.

Abstract: A digital system for controlling the quality factor in a resonant device. The resonant device can be a a device that includes a cantilever within its system, such as an atomic force microscope. The quality factor can be digitally controlled to avoid noise effect in the analog components. A direct digital synthesizer implemented in a way that provides access to the output of the phase accumulator. That output is a number which usually drives a lookup table to produce a cosine or sine output wave. The output wave is created, but the number is also adjusted to form a second number that drives a second lookup table to create an adjustment factor to adjust the output from the cosine table. The adjusted digital signal than drives a DA converter which produces an output drive for the cantilever.

Abstract: In some embodiments, a system for performing microscopy at hyperbaric pressures includes a hyperbaric chamber that defines a sealed interior space, and an imaging system contained within the interior space that is operated from outside of the hyperbaric chamber to image materials within the interior space at hyperbaric pressures.

Abstract: An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.

Abstract: Provided are atomic force microscope probes, methods for making probes for use in atomic force microscopes and systems using such probes. The probes include at least a body portion and a cantilever portion. The cantilever portion may include a first surface and a second surface opposite the first surface. The cantilever portion further includes a first material arranged on the first surface, such that the cantilever portion twists about a center axis of the cantilever portion when the cantilever portion is heated. The first material may be arranged symmetrically or non-symmetrically on a portion of the first surface, or it may be arranged non-uniformly over the first surface. The cantilever portion of the probe may also include a second material arranged on the second surface of the cantilever portion. The first and second materials have a different thermal expansion than the material forming the cantilever portion.

Abstract: Methods and apparatus are described for scanning probe microscopy. A method includes generating a band excitation (BE) signal having finite and predefined amplitude and phase spectrum in at least a first predefined frequency band; exciting a probe using the band excitation signal; obtaining data by measuring a response of the probe in at least a second predefined frequency band; and extracting at least one relevant dynamic parameter of the response of the probe in a predefined range including analyzing the obtained data. The BE signal can be synthesized prior to imaging (static band excitation), or adjusted at each pixel or spectroscopy step to accommodate changes in sample properties (adaptive band excitation).

Abstract: Interatomic forces are measured with subatomic lateral resolution by in situ calibrated non-contact and passively thermal drift compensated atomic force microscopy in aqueous or generally liquidous environment; interatomic forces acting between distinct electronic orbitals of front-most tip atom and opposing sample atom can be quantitatively measured with subatomic lateral resolution. Calibration standard is a CaCO3-crystal, which undergoes a well defined pressure induced phase transition from the calcite to the aragonite crystal lattice structure providing an accurate independent force anchor point for the AFM's force versus distance curve. Furthermore, an independent actual tip-sample-distance d calibration is obtained by directly observing oscillatory (steric) solvation forces originating simply from packing effects of the liquid particles at very small tip-sample separations d.

Abstract: A high-bandwidth SPM tip scanner includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.

Abstract: This system includes non-linear interaction imaging and spectroscopy (“NIIS”) for scanning probe microscopy. Scanning probe microscopy operates with an oscillating tip and cantilever to monitor characteristics of the oscillation and NIIS measures both the linear and non-linear components of the interactions between the probe tip and the surface.

Abstract: Provided are an AFM measuring method and a system thereof. The tip of a cantilever is provided to a plurality of points on a substrate, to which incident light is radiated from a light source. Scattered light is generated between the tip of the cantilever and the substrate by the incident light and the intensity of the scattered light is measured. The measured intensity of the scattered light is input to a data processing unit so as to find a point where the intensity of the incident is highest. The tip of the cantilever is moved to the point where the intensity of the incident light is highest.

Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Significant issues as to size, cost of implementation, and repeatability/robustness of results exist in commercializing the technique. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.

Abstract: The present invention relates to a method for investigating a sample using scanning probe photon microscopy or optical force microscopy, and to an apparatus which is designed accordingly. The method or the apparatus provides for two optical traps which can be moved in a local region of the sample, wherein in at least one of the two traps a probe is held. The sample is scanned using the two traps and the measured data from the two traps are captured separately and evaluated by correlation. In particular interference signals resulting from an interaction between sample and light trap can be eliminated by the method.

Abstract: Advanced atomic force microscopy (AFM) methods and apparatuses are presented. An embodiment may comprise performing a first scan at a first angle, a second scan at a second angle, and correcting a system drift error in the first scan based on the second scan. Another embodiment may comprise performing a global scan of a first area, a local scan of a second area within the first area, correcting a leveling error in the local scan based on the global scan, and outputting a corrected sample image. Another embodiment may comprise performing a first scan at a first position at a first angle, a second scan at a flat region using the same scan angle and scan size to correct a scanner runout error in the first scan based on the second scan.

Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Significant issues as to size, cost of implementation, and repeatability/robustness of results exist in commercializing the technique. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.

Abstract: In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.

Abstract: A sensor for scanning a surface with an oscillating cantilever (12), made from piezoelectric material that is suitable for a transverse oscillation of the free end of a beam, holding an electrically conductive probe tip (14) on the free end of the beam in transverse direction, a first deflection electrode (26A, 26B) and an inversely phased second electrode (28A, 28B, 28C) being provided to collect charges that are separated within the space of the deflection electrodes (34, 36). The cantilever (12) is provided with at least one electrode (30) in addition to the deflection electrodes (26A, 26B, 28A, 28B, 28C) that provides electrical contact to the tip (14), the at least one additional electrode being located in a region on the deflecting beam where the surface charge density due to the strain caused by beam deflection (34, 36) is smaller than in the region where the deflection electrodes are located.

Abstract: The present invention relates to a method of rapidly and repeatably bringing sharp objects into close proximity to a particular region of interest of a sample with high precision and accuracy in two or three dimensions using a laser guided tip approach with three dimensional registration to the surface.

Abstract: A first instrument (230) is used to image a first semiconductor article having a trench (110) of defined cross-section, while a second instrument (220) is used to simultaneously prepare a second semiconductor article with a trench of defined cross-section. Furthermore, a method is disclosed to prepare a trench (110) of defined cross-section in a semiconductor article by rough milling and subsequent fine milling.

Abstract: An elongate probe (50) for use in probe microscopy comprises a module (51) provided between a probe tip (53) and a driver (52). In use the driver (52) applies oscillations to the module (51) which are transmitted by the module to the tip (53). With the probe tip (53) positioned close to the surface of a sample, any phase variance in the oscillation of the tip with respect to the driving oscillation is representative of an interaction between the tip and the sample surface. The elongate arrangement of the probe (50) is particularly beneficial when used to probe samples which require a liquid environment.

Abstract: A resist medium in which features are lithographically produced by scanning a surface of the medium with an AFM probe positioned in contact therewith. The resist medium comprises a substrate; and a polymer resist layer within which features are produced by mechanical action of the probe. The polymer contains thermally reversible crosslinkages. Also disclosed are methods that generally includes scanning a surface of the polymer resist layer with an AFM probe positioned in contact with the resist layer, wherein heating the probe and a squashing-type mechanical action of the probe produces features in the layer by thermally reversing the crosslinkages.

Abstract: The invention relates to a method and to a device for examining a test sample using a scanning probe microscope. According to the method a first and a second measurement using a scanning probe microscope are carried out on the test sample using a measuring probe system in which a measuring probe and another measuring probe are formed on a common measuring probe receptacle. During the first measurement, in relation to the test sample, the measuring probe is held in a first measurement position and the other measuring probe is held in another non-measurement position, and the test sample is examined with the measuring probe using a scanning probe microscope. After the first measurement, by displacing in relation to the test sample, the measuring probe is displaced from the measurement position into a non-measurement position and the other measuring probe from the other non-measurement position into another measurement position.

Abstract: An atomic force microscope (AFM) apparatus for determining a topography of a sample surface is disclosed. The AFM apparatus comprises: a controller having a controller frequency response and being configured to provide a controller output signal. The controller comprises an integrator that provides an integrator output signal, and a filter block. The AFM apparatus also comprises a physical system having a physical system response and being configured to receive the controller output signal and to provide a probe height in response to the controller output signal. The physical system comprises an actuator configured to maintain a deflection of a probe tip relative to the sample surface. The deflection being is indicated by a deflection signal, and the filter block of the controller provides an inverse of the physical system response, such that the probe height is substantially equal to the integrator output signal.

Abstract: The invention provides a method of detecting a chemical species with an oscillating cantilevered probe. A cantilevered beam is driven into oscillation with a drive mechanism coupled to the cantilevered beam. A free end of the oscillating cantilevered beam is tapped against a mechanical stop coupled to a base end of the cantilevered beam. An amplitude of the oscillating cantilevered beam is measured with a sense mechanism coupled to the cantilevered beam. A treated portion of the cantilevered beam is exposed to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species. A second amplitude of the oscillating cantilevered beam is measured, and the chemical species is determined based on the measured amplitudes.

Abstract: Provided is a highly selective and non-destructive method and apparatus for the measurement of one or more target molecules within a target environment. The apparatus comprises of a modified AFM (atomic force microscope) tip to create a tapered nanoscale co-axial cable, and wherein the application of an alternating potential between the inner and outer electrodes of the co-axial cable creates a dielectrophoretic force for attracting molecules toward the tip-end which is pre-treated with one or more specific ligands.

Abstract: The scanning probe microscope has a primary control loop (7, 11, 12) for keeping the phase and/or amplitude of deflection at constant values as well as a secondary control loop (9) that e.g. keeps the frequency of the cantilever oscillation constant by applying a suitable DC voltage to the probe while, at the same time, a conservative AC excitation is applied thereto. By actively controlling the frequency with the first control loop (7, 11, 12) and subsequently controlling the DC voltage in order to keep the frequency constant, a fast system is created that allows to determine the contact potential difference or a related property of the sample (3) quickly.

Abstract: In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.

Abstract: An atomic force microscope (AFM) (1) is one type of SPM, and detects a resonance frequency shift as an amount of interaction between a probe and a sample. The AFM (1) performs distance modulation control while performing feedback control of a probe-sample distance so as to keep the amount of interaction constant. The distance modulation control varies the probe-sample distance at a distance modulation frequency higher than a response speed of the feedback control. The AFM (1) further acquires the interaction amounts detected during the variation of the probe-sample distance by the distance modulation control while performing relative scanning between the probe and the sample, and detects a distribution of the interaction amounts in a three-dimensional space having a dimension within a scanning range and a thickness within a variation range of the probe-sample distance.

Abstract: A controller of a cantilever evaluation system calculates a stream function value ?z(x, y; t+1) and vorticity ?z(x, y; t+1) at a subsequent time step t+1 using boundary conditions according to displacement h(z; t) of a cantilever and velocity ?h/?t(z; t), a stream function value ?z(x, y; t) and vorticity ?z(x, y; t) in two-dimensional planes. The controller uses the calculated stream function value ?z(x, y) and vorticity ?z(x, y) to calculate a fluid drag force acting on the cantilever. The controller substitutes the calculated fluid drag force into a displacement calculation equation to calculate the displacement h(z; t+1) of the one-dimensional beam at the subsequent time step t+1. The controller repeats such calculation for each grid point and further repeats it at each time step.

Abstract: A method for optimizing loop gain of an atomic force microscope (AFM) apparatus includes determining a change in gain of the physical system and adjusting a controller frequency response of the controller in an AFM loop to compensate for the determined change in gain. The AFM loop has a corresponding loop response that includes the product of the controller frequency response and a physical system response of the physical system.