Probes, Their Manufacture, Or Their Related Instrumentation, E.g., Holders (epo) Patents (Class 850/40)
  • Patent number: 11327092
    Abstract: Methods and systems for subsurface imaging of nanostructures buried inside a plate shaped substrate are provided. An ultrasonic generator at a side face of the substrate is used to couple ultrasound waves (W) into an interior of the substrate. The interior has or forms a waveguide for propagating the ultrasound waves (W) in a direction (X) along a length of the substrate transverse to the side face. The nanostructures are imaged using an AFM tip to measure an effect (E) at the top surface caused by direct or indirect interaction of the ultrasound waves (W) with the buried nanostructures.
    Type: Grant
    Filed: April 23, 2018
    Date of Patent: May 10, 2022
    Assignee: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
    Inventors: Daniele Piras, Paul Louis Maria Joseph van Neer, Hamed Sadeghian Marnani
  • Patent number: 11299646
    Abstract: An inkjet-printing-base process for depositing functional materials, for example PZT, on a substrate, in various instances platinized silicon. Substrate templating (via SAMs) and material deposition are both performed by an inkjet printing process. Additionally, a composition to be used as a SAM precursor ink which is a thiol in a solvent mixture, wherein the composition can be 1 dodecanethiol in a solvent mixture of 2-methoxyethanol and glycerol.
    Type: Grant
    Filed: April 27, 2018
    Date of Patent: April 12, 2022
    Assignee: Luxembourg Institute of Science And Technology (LIST)
    Inventors: Nicolas Godard, Daniele Sette, Sebastjan Glinsek, Emmanuel Defay
  • Patent number: 11156635
    Abstract: The invention relates to a method for obtaining a functionalised sensor tip for atomic force microscopy, which is characterised in that functionalisation takes place by means of an activated vapour silanisation process, comprising: a) evaporating an organometallic compound containing at least one silicon atom and at least one functional group selected from an amine group, a hydroxyl group, a carboxyl group and a thiol group; b) activating the vapour of the organometallic compound of step a) by heating; and c) causing the activated vapour of step b) to impinge on a sensor tip for atomic force microscopy in order to deposit a film of the organometallic compound on the sensor tip, steps b) and c) taking place consecutively. The invention also relates to the functionalised sensor tip obtained using the method.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: October 26, 2021
    Assignee: UNIVERSIDAD POLITÉCNICA DE MADRID
    Inventors: José Pérez Rigueiro, Gustavo Víctor Guinea Tortuero, Rafael Daza García, Luis Colchero Paetz
  • Patent number: 11125775
    Abstract: A manufacturing method of a probe according to the present embodiment is used to manufacture a probe for a scanning probe microscope. An insulating film is formed on the surface of a probe provided on a base. Metal ions are implanted into the insulating film. An electric field is applied to the insulating film to concentrate the metal ions in the insulating film at a tip of the probe and form a metallic filament in the insulating film.
    Type: Grant
    Filed: September 1, 2020
    Date of Patent: September 21, 2021
    Assignee: Kioxia Corporation
    Inventors: See Kei Lee, Mitsuo Koike, Masumi Saitoh
  • Patent number: 10921394
    Abstract: The vectorial magnetometer association of the detected spin-state-altering energy level and the corresponding defect orientations can be performed by generating Rabi flopping at each one of the energy levels and performing the association based on the detected Rabi flopping.
    Type: Grant
    Filed: April 7, 2017
    Date of Patent: February 16, 2021
    Assignee: SOCPRA SCIENCES ET GENIE S.E.C.
    Inventor: David Roy-Guay
  • Patent number: 10739379
    Abstract: A method for designing and processing a microcantilever-based probe with an irregular cross section applied in the ultra-low friction coefficient measurement at a nanoscale single-point contact includes: first, establishing a universal theoretical model of the friction coefficient measurement; then, combined with the structural features of the microcantilever-based probe with the irregular cross section, establishing a specific theoretical model of the friction coefficient measurement suitable for the microcantilever-based probe with the irregular cross section; and based on above, combined with constraint conditions such as the friction coefficient resolution, the loadable maximum positive pressure or the measurable minimum friction force, and the atomic force microscope characteristics, etc., designing the microcantilever-based probe with the irregular cross section meeting the measurement requirements.
    Type: Grant
    Filed: March 4, 2019
    Date of Patent: August 11, 2020
    Assignees: Southwest Jiaotong University, Tsinghua University
    Inventors: Linmao Qian, Liang Jiang, Bin Lin, Jianbin Luo, Yushan Chen, Bin Li
  • Patent number: 10539591
    Abstract: The invention relates to a measuring device for a scanning probe microscope including a measuring probe a first probe holding device on which the measuring probe is arranged, a detection device including a measurement light source which is adapted to provide light beams directed toward the measuring probe, a sensor device which is adapted, during the operation to receive measurement light beams reflected from the measuring probe.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: January 21, 2020
    Assignee: Bruker Nano GmbH
    Inventors: Detlef Knebel, Torsten Jähnke, Jonas Hiller
  • Patent number: 10345337
    Abstract: According to embodiments, a cantilever probe for use with an atomic force microscope (AFM) or scanning probe microscope (SPM) has a pad of conformable material that facilitates non-permanent adhesion through van der Waals interactions. Such removable probes and probe tips facilitate use of multiple tips or probes, while reducing the need for recalibration or repositioning.
    Type: Grant
    Filed: April 13, 2018
    Date of Patent: July 9, 2019
    Assignee: Bruker Nano, Inc.
    Inventors: Chanmin Su, Izhar Medalsy, Weijie Wang
  • Patent number: 9891297
    Abstract: Systems and methods for magnetic sensing and imaging include a sensor having a network of isolated electron-spin quantum bits (qubits) disposed on the surface of the sensor; and a solid state electronic spin system disposed below the surface of the sensor, wherein the solid state electronic spin system has a spin-state dependent fluorescence; a source of light; a source of first external perturbation, wherein the source of first external perturbation generates a magnetic field; a source of second external perturbation; wherein, the source of light and the first and second external perturbations are configured to coherently and independently manipulate the spin states of at least one qubit and at least one solid state electronic spin system; and a detector to optically measure the solid-state electronic spins spin-state dependent fluorescence.
    Type: Grant
    Filed: March 13, 2015
    Date of Patent: February 13, 2018
    Assignee: President and Fellows of Harvard College
    Inventors: Alexander Sushkov, Igor Lovchinsky, Nicholas Chisholm, Ronald L. Walsworth, Hongkun Park, Mikhail D. Lukin
  • Patent number: 9568495
    Abstract: Aspects of the present invention include systems, devices, and methods of surface chemical analysis of solid samples, and particularly it relates to methods of chemical analysis of molecular compounds located either on or within thin surface layer of solid samples. Even more particularly, aspects of the present invention relate to systems, devices, and non-destructive methods combining both high sensitivity and high spatial resolution of analysis of chemical compounds located or distributed on the surface of solid samples with obtaining most important information regarding vibration spectra of atoms and molecular groups contained in thin surface layer of solid samples. These objectives are realized by implementation of computer-assisted systems that carefully regulate the motion of, and force applied to probes of atomic force microscopes.
    Type: Grant
    Filed: May 20, 2015
    Date of Patent: February 14, 2017
    Assignee: AIST-NT, Inc.
    Inventors: Sergey A. Saunin, Andrey V. Krayev, Vladimir V. Zhishimontov, Vasily V. Gavrilyuk, Leonid N. Grigorov, Alexey V. Belyaev, Dmitry A. Evplov
  • Patent number: 9310352
    Abstract: An optical fiber is combined with a photonic crystal structure (PCS) that is optically coupled to the optical fiber. The fiber has an exposed fiber surface, and the PCS is affixed to the optical fiber and disposed on or in proximity to the exposed fiber surface. The PCS includes an elongate probe member configured for biological probing. The elongate probe member includes an optical resonant cavity. In an experiment, this was accomplished using an optical fiber tip with a semiconductor template attached to its side face. The semiconductor structure had a thin, needle-like tip (including a nanobeam cavity) which can be suitably inserted inside (or broken off inside) a biological cell without causing cytotoxicity.
    Type: Grant
    Filed: December 16, 2013
    Date of Patent: April 12, 2016
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Gary Shambat, Jelena Vuckovic
  • Publication number: 20150082498
    Abstract: An SPM assembly includes an SPM and a wide field image acquisition device that can be used to rapidly locate a region of interest and position that region within a SPM scan range of 100 microns or less. The wide field image acquisition device may include a low resolution camera having wide field of view in excess of 12 mm, and a high magnification camera having a field of view in the single mm range. Alternatively, a single camera could be used if it has sufficient zoom capability to have functionalities commensurate with both cameras. Collocation preferably is employed to coordinate translation between the low magnification and high magnification cameras (if separate cameras are used) and between the high magnification camera and the SPM.
    Type: Application
    Filed: March 19, 2013
    Publication date: March 19, 2015
    Inventor: Charles Meyer
  • Patent number: 8959661
    Abstract: An atomic force microscope probe comprising a piezo-electric resonator provided with two electrodes and coated with an insulating layer and a tip attached on the coated resonator and functionalized with at least one group or molecule of interest is disclosed. The disclosed technology also relates to preparation method and to different uses thereof.
    Type: Grant
    Filed: December 20, 2011
    Date of Patent: February 17, 2015
    Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
    Inventors: Jérôme Polesel-Maris, Thomas Berthelot, Pascal Viel
  • Patent number: 8925111
    Abstract: Provided are a scanning probe microscope and a method of operating the same. The scanning probe microscope includes a chuck configured to fix an object. A stacker is configured to load one or more cantilevers onto a head module. A stacker lifting element is configured to move the stacker in an up and down direction.
    Type: Grant
    Filed: December 24, 2013
    Date of Patent: December 30, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Wan-Sung Park, Sung-Ha Kim, Young-Hwan Kim
  • Patent number: 8914911
    Abstract: Described are methods for magnetically actuating microcantilevers and magnetically actuated and self-heated microcantilevers. Also described are methods for determining viscoelastic properties and thermal transition temperatures of materials.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: December 16, 2014
    Assignees: The Board of Trustees of the University of Illinois, Anasys Instruments
    Inventors: William P. King, Craig Prater, Byeonghee Lee, Doug Gotthard
  • Patent number: 8904561
    Abstract: An atomic force microscope based apparatus and method for detecting Raman effect on a sample of interest utilizes first and second electromagnetic sources to emit first electromagnetic radiation of frequency Vi and second electromagnetic radiation of frequency V2 onto a probe tip, which is coupled to a structure that can oscillate the probe tip. The frequency Vi and the frequency v2 are selected to induce Raman effect on a sample engaged by the probe tip that results in Raman force interactions between the probe tip and the sample. Oscillations of the probe tip due to the Raman force interactions are then measured.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: December 2, 2014
    Inventor: H. Kumar Wickramasinghe
  • Publication number: 20140310839
    Abstract: An atomic force microscope based apparatus and method for detecting Raman effect on a sample of interest utilizes first and second electromagnetic sources to emit first electromagnetic radiation of frequency Vi and second electromagnetic radiation of frequency V2 onto a probe tip, which is coupled to a structure that can oscillate the probe tip. The frequency Vi and the frequency v2 are selected to induce Raman effect on a sample engaged by the probe tip that results in Raman force interactions between the probe tip and the sample. Oscillations of the probe tip due to the Raman force interactions are then measured.
    Type: Application
    Filed: July 2, 2012
    Publication date: October 16, 2014
    Inventor: H. Kumar Wickramasinghe
  • Patent number: 8769709
    Abstract: The invention refers to a probe assembly for a scanning probe microscope which comprises at least one first probe-adapted for analyzing a specimen, at least one second probe adapted for modifying the specimen and at least one motion element associated with the probe assembly and adapted for scanning one of the probes being in a working position across a surface of the specimen so that the at least one first probe interacts with the specimen whereas the at least one second probe is in a neutral position in which it does not interact with the specimen and to bring the at least one second probe into a position so that the at least one second probe can modify a region of the specimen analyzed with the at least one first probe.
    Type: Grant
    Filed: July 30, 2013
    Date of Patent: July 1, 2014
    Assignee: Carl Zeiss SMS GmbH
    Inventors: Christof Baur, Klaus Edinger, Thorsten Hofmann, Gabriel Baralia
  • Publication number: 20140173786
    Abstract: Nanowire apparatus and methods of using the same are disclosed. The apparatus include nanowires that are attached to and extend from varying substrates and can be used in the manipulation of cells and/or sensing of cellular and subcellular characteristics. The methods include using the apparatus to sense forces exerted by a single cell or using the apparatus to manipulate one or more cells.
    Type: Application
    Filed: February 21, 2014
    Publication date: June 19, 2014
    Applicant: Kansas State University Research Foundation
    Inventors: Bret Flanders, Govind Paneru
  • Patent number: 8756710
    Abstract: Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.
    Type: Grant
    Filed: August 31, 2012
    Date of Patent: June 17, 2014
    Assignee: Bruker-Nano, Inc.
    Inventors: Weijie Wang, Chanmin Quanmin Su
  • Patent number: 8739311
    Abstract: A new method in microscopy is provided which extends the domain of AFM's to nanoscale spectroscopy. Molecular resonance of nanometer features can be detected and imaged purely by mechanical detection of the force gradient between the interaction of the optically driven molecular dipole/multipole and its mirror image in a Platinum coated scanning probe tip. The method is extendable to obtain nanoscale spectroscopic information ranging from infrared to UV and RF.
    Type: Grant
    Filed: August 11, 2011
    Date of Patent: May 27, 2014
    Inventors: H. Kumar Wickramasinghe, Indrajith Rajapaksa
  • Publication number: 20140130214
    Abstract: A fiber-facet AFM probe enabling high-resolution, high sensitivity measurement of a sample surface is presented. AFM probes in accordance with the present invention include an optically resonant cavity that is defined by two mirrors, at least one of which is a photonic-crystal mirror. One of the mirrors is movable and is mechanically coupled with an AFM tip such that a force imparted on the tip by an interaction with the sample surface induces a change in the cavity length of the optically resonant cavity and, therefore, its reflectivity.
    Type: Application
    Filed: March 15, 2013
    Publication date: May 8, 2014
    Applicant: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Olav Solgaard, Antonio A. Gellineau, Xuan Wu, Jo Wonuk, Karthik Vijayraghavan
  • Publication number: 20140130213
    Abstract: A high-bandwidth AFM probe having a diffraction grating characterized by a diffraction characteristic that monotonically changes along the length of the diffraction grating is disclosed. AFM probes in accordance with the present invention are capable of high-sensitivity performance over a broad range of operating conditions, such as operating wavelength and measurement media. A method for estimating at least one physical property of a surface based on high-frequency signal components in the output signal from a high-bandwidth AFM probe is also disclosed. The method enables determination of tip-surface interaction forces based on the relationship between a first motion of the base of the AFM probe and a second motion of the tip of the AFM probe.
    Type: Application
    Filed: March 14, 2013
    Publication date: May 8, 2014
    Applicant: The Board of Trustees of the Leland Stanford Junior University
    Inventor: The Board of Trustees of the Leland Stanford Junior University
  • Patent number: 8719960
    Abstract: The present invention provides a microcantilever capable of independently measuring and/or controlling the electrical potential and/or temperature of a surface with nanometer scale position resolution. The present invention also provides methods of manipulating, imaging, and/or mapping a surface or the properties of a surface with a microcantilever. The microcantilevers of the present invention are also capable of independently measuring and/or controlling the electrical potential and/or temperature of a gas or liquid. The devices and methods of the present invention are useful for applications including gas, liquid, and surface sensing, micro- and nano-fabrication, imaging and mapping of surface contours or surface properties.
    Type: Grant
    Filed: January 30, 2009
    Date of Patent: May 6, 2014
    Assignee: The Board of Trustees of the University of Illinois
    Inventor: William P. King
  • Patent number: 8701211
    Abstract: A method of producing sharp tips useful for scanning probe microscopy and related applications is described. The tips are formed by deposition into a mold(s) formed in a sacrificial crystalline semiconductor substrate with an exposed {311} surface which has been etched with a crystallographic etchant to form a 3-sided, trihedral or trigonal pyramidal mold(s) or indentation(s). The resultant tips, when released from the sacrificial mold material or substrate, are typically formed in the shape of a trigonal pyramid or a tetrahedron. Another embodiment involves starting with a {100} surface and the formation of two tips on opposite ends of a wedge at trigonal or trihedral points of the wedge. These tips are less susceptible to the tip wedge effect typical of tips formed using known methods.
    Type: Grant
    Filed: August 25, 2010
    Date of Patent: April 15, 2014
    Assignee: Advanced Diamond Technologies, Inc.
    Inventor: Nicolae Moldovan
  • Patent number: 8689361
    Abstract: A probe for atomic force microscopy may be provided by depositing a thin film onto a wafer substrate and etching the substrate to leave the thin film behind in the form of a handle, a cantilever, and a probe tip in the cantilever. In some embodiments, a thin film substrate for the probe may be accomplished by forming the probe mold on a first wafer, bonding a second wafer onto the first wafer, and patterning out the second wafer to define the substrate for the probe on the first wafer. The thin film may be deposited onto the exposed portions of the first wafer. Thereafter, portions of the first and second wafers may be removed to leave behind the probe.
    Type: Grant
    Filed: February 5, 2013
    Date of Patent: April 1, 2014
    Assignee: Oicmicro, LLC
    Inventor: Salleh Ismail
  • Patent number: 8661560
    Abstract: A microwave probe having a metal tip on the free end of a microcantilever. In one embodiment, a pyramidal pit is isotropically etched in a device wafer of monocrystalline silicon. Oxidation may sharpen the pit. Deposited metal forms the metal tip in the pit and a bottom shield. Other metal sandwiched between equally thick dielectric layers contact the tip and form a conduction path along the cantilever for the probe and detected signals. Further metal forms a top shield overlying the conduction path and the dielectrically isolated tip and having equal thickness to the bottom shield, thus producing together with the symmetric dielectric layers a balanced structure with reduced thermal bending. The device wafer is bonded to a handle wafer. The handle is formed and remaining silicon of the device wafer is removed to release the cantilever.
    Type: Grant
    Filed: November 5, 2012
    Date of Patent: February 25, 2014
    Assignee: PrimeNano, Inc.
    Inventors: Xinxin Li, Yongliang Yang
  • Patent number: 8656511
    Abstract: A method for attaching a conductive particle to the apex of a probe tip comprises the steps of: moving the apex of a probe tip close to a conductive particle and applying a bias voltage between the probe tip and the conductive particle so that the conductive particle can permanently attach to the apex. The method uses only a bias voltage to transfer and attach conductive particles to the apex of a probe tip, and no surface treatment of the probe tip is required.
    Type: Grant
    Filed: April 20, 2010
    Date of Patent: February 18, 2014
    Assignee: National Tsing Hua University
    Inventors: Fan Gang Tseng, Hui Wen Cheng, Wun Yuan Jheng
  • Patent number: 8646111
    Abstract: A novel way for constructing and operating scanning probe microscopes to dynamically measure material properties of samples, mainly their surface hardness, by separating the functions of actuation, indentation and sensing into separate dynamic components. The amplitude and phase shift of higher modes occurring at periodic indentations with the sample are characteristic values for different sample materials. A separate sensor cantilever, connected to the indentation probe tip, has the advantage of a high mechanical amplification of a desired higher mode while suppressing the actuation signal itself. The operational range of the sensor can be extended just by switching the actuation signal to another submultiple of the sensor cantilever's resonance frequency and/or by using more than one sensor cantilever for each indentation tip.
    Type: Grant
    Filed: February 13, 2007
    Date of Patent: February 4, 2014
    Assignee: The Regents of the University of California
    Inventors: Kimberly L. Turner, Benedikt Zeyen
  • Publication number: 20140020140
    Abstract: A multi-head probe suitable for an atomic force microscopy (AFM) comprises a tip base, a single cantilever beam and at least two tips. The tip base has a tip end, which is ground to form a surface. The cantilever beam is connected to the tip base and for supporting the tip base. The at least two tips are disposed on the surface.
    Type: Application
    Filed: November 19, 2012
    Publication date: January 16, 2014
    Applicant: NATIONAL TSING HUA UNIVERSITY
    Inventors: FAN-GANG TSENG, JOE-MING CHANG
  • Publication number: 20140007309
    Abstract: The present invention relates to a method for classifying a tissue biopsy sample obtained from a tumour, comprising determining a plurality of stiffness values for said sample by measuring a plurality of points on the sample with a spatial resolution of at least 100 ?m and assigning the sample to a probability of malignancy. A sample showing a unimodal stiffness distribution is assigned to a high probability of being non-malignant, and a sample showing an at least bimodal stiffness distribution is assigned to a high probability of being malignant, wherein said stiffness distribution is characterized by a first peak exhibiting an at least two-fold higher stiffness value than a second peak. The present invention further relates to a system for classifying a tumour tissue biopsy sample.
    Type: Application
    Filed: December 12, 2011
    Publication date: January 2, 2014
    Applicant: UNIVERSITAT BASEL
    Inventors: Marija Plodinec, Roderick Lim, Marko Loparic
  • Publication number: 20140007308
    Abstract: A probe for scanned probe microscopy is provided. The probe includes a cantilever beam and a tip. The cantilever beam extends along a generally horizontal axis. The cantilever beam has a crystal facet surface that is oriented at a tilt angle with respect to the generally horizontal axis. The tip projects outwardly from the crystal facet surface.
    Type: Application
    Filed: July 2, 2012
    Publication date: January 2, 2014
    Applicants: CORNELL UNIVERSITY, INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Mark C. Reuter, Brian A. Bryce, Bojan R. Ilic, Sandip Tiwari
  • Publication number: 20130347147
    Abstract: A control-based approach is provided for achieving accurate indentation quantification in broadband and in-liquid nanomechanical property measurements using atomic force microscope (AFM). Accurate indentation measurement is desirable for probe-based material property characterization because the force applied and the indentation generated are the fundamental physical variables that are measured in the characterization process. Large measurement errors, however, occur when the measurement frequency range becomes large (i.e., broadband), or the indentation is measured in liquid on soft materials. Such large measurement errors are generated due to the inability of the conventional method to account for the convolution of the instrument dynamics with the viscoelastic response of the soft sample when the measurement frequency becomes large, and the random-like thermal drift and the distributive hydrodynamic force effects when measuring the indentation in liquid.
    Type: Application
    Filed: June 24, 2013
    Publication date: December 26, 2013
    Inventors: Qingze Zou, Juan Ren
  • Patent number: 8595860
    Abstract: A method of producing a probe device for a metrology instrument such as an AFM includes providing a substrate and forming a tip stock extending upwardly from the substrate. The tip stock is preferably FIB milled to form a tip of the probe device. The tip preferably has a high aspect ratio, with a height that is at least about 1 micron for performing critical dimension (e.g., deep trench) atomic force microscopy. The stock is preferably pedestal shaped having a distal end that is substantially planar which can be machined into a tip in at least less than about 2 minutes. With the preferred embodiments, the FIB milling step can be completed in substantially fewer and less complicated steps than known techniques to produce a high aspect ratio tip suitable for DT-AFM in less than about one minute.
    Type: Grant
    Filed: December 29, 2008
    Date of Patent: November 26, 2013
    Assignee: Bruker Nano, Inc.
    Inventors: Weijie Wang, Steven Nagle
  • Publication number: 20130298295
    Abstract: A method is provided for manufacturing near-field optical probes including at least one organo-mineral material with an organic part and a mineral part, the method including steps of irradiating at least partially the organo-mineral material with a radiation beam to polymerize the organic part in the irradiated areas, and polycondensing the mineral part by sol-gel process. Also disclosed are near-field optical probes and AFM and SNOM systems using the probes.
    Type: Application
    Filed: January 9, 2012
    Publication date: November 7, 2013
    Applicants: Universite Montpellier 2 Sciences et Techniques, Centre National De La Recherche Scientifique
    Inventors: Pascal Falgayrettes, Raphael Kribich, Laurent Nativel, Bachar Mourched, Pascale Gall-Borrut, Benoit Belier
  • Patent number: 8578511
    Abstract: A thermal probe includes a support element, a conductive pattern and a tip. The support element has a slit or a through hole and has a first surface and a second surface which is opposite to the first surface. The conductive pattern is disposed at the first surface. The tip has a base and a pinpoint. The pinpoint is disposed at the base and passes through the slit or the through hole and highlights from the first surface. The base is connected with the second surface. The tip of the thermal probe of the invention can be replaced, and user can choose the best combination of the tip, conductive pattern and support element according to their needs.
    Type: Grant
    Filed: July 10, 2012
    Date of Patent: November 5, 2013
    Assignee: National Cheng Kung University
    Inventors: Bernard HaoChih Liu, Fang-Yi Liao, Jian-Hong Chen
  • Publication number: 20130283487
    Abstract: A new method in microscopy is provided which extends the domain of AFM's to nanoscale spectroscopy. Molecular resonance of nanometer features can be detected and imaged purely by mechanical detection of the force gradient between the interaction of the optically driven molecular dipole/multipole and its mirror image in a Platinum coated scanning probe tip. The method is extendable to obtain nanoscale spectroscopic information ranging from infrared to UV and RF.
    Type: Application
    Filed: August 11, 2011
    Publication date: October 24, 2013
    Inventors: H. Kumar Wickramasinghe, Indrajith Rajapaksa
  • Publication number: 20130276176
    Abstract: An atomic force microscope probe comprising a piezo-electric resonator provided with two electrodes and coated with an insulating layer and a tip attached on the coated resonator and functionalized with at least one group or molecule of interest is disclosed. The disclosed technology also relates to preparation method and to different uses thereof.
    Type: Application
    Filed: December 20, 2011
    Publication date: October 17, 2013
    Applicant: Commissariat a l energie atomique et aux energies alternatives
    Inventors: Jérôme Polesel-Maris, Thomas Berthelot, Pascal Viel
  • Publication number: 20130276175
    Abstract: Described are methods for magnetically actuating microcantilevers and magnetically actuated and self-heated microcantilevers. Also described are methods for determining viscoelastic properties and thermal transition temperatures of materials.
    Type: Application
    Filed: March 14, 2013
    Publication date: October 17, 2013
    Inventors: William P. KING, Craig PRATER, Byeonghee LEE
  • Patent number: 8539611
    Abstract: A method of creating a probe for scanned probe microscopy is disclosed. The method includes providing a wafer having a support wafer layer and a device layer. The method includes masking the wafer with a masking layer. The method includes removing a portion of the masking layer at the device layer. The method includes etching the wafer along the portion of the masking layer that has been removed to create a crystal facet surface that is oriented at a tilt angle. The method includes epitaxially growing a tip along the crystal facet surface.
    Type: Grant
    Filed: July 12, 2012
    Date of Patent: September 17, 2013
    Assignees: International Business Machines Corporation, Cornell University
    Inventors: Mark C. Reuter, Brian A. Bryce, Bojan R. Ilic, Sandip Tiwari
  • Publication number: 20130227749
    Abstract: An atomic force microscope probe includes a carbon nanotube micro-tip structure. The carbon nanotube micro-tip structure includes an insulating substrate and a patterned carbon nanotube film structure. The insulating substrate includes a surface. The surface includes an edge. The patterned carbon nanotube film structure is partially arranged on the surface of the insulating substrate. The patterned carbon nanotube film structure includes two strip-shaped arms joined together to form a tip portion protruding and suspending from the edge of the surface of the insulating substrate. The two strip-shaped arms include a number of carbon nanotubes parallel to the surface of the insulating substrate.
    Type: Application
    Filed: August 23, 2012
    Publication date: August 29, 2013
    Applicants: HON HAI PRECISION INDUSTRY CO., LTD., TSINGHUA UNIVERSITY
    Inventors: YANG WEI, SHOU-SHAN FAN
  • Patent number: 8505110
    Abstract: An apparatus and method for the controlled fabrication of nanostructures using catalyst retaining structures is disclosed. The apparatus includes one or more modified force microscopes having a nanotube attached to the tip portion of the microscopes. An electric current is passed from the nanotube to a catalyst layer of a substrate, thereby causing a localized chemical reaction to occur in a resist layer adjacent the catalyst layer. The region of the resist layer where the chemical reaction occurred is etched, thereby exposing a catalyst particle or particles in the catalyst layer surrounded by a wall of unetched resist material. Subsequent chemical vapor deposition causes growth of a nanostructure to occur upward through the wall of unetched resist material having controlled characteristics of height and diameter and, for parallel systems, number density.
    Type: Grant
    Filed: October 9, 2008
    Date of Patent: August 6, 2013
    Assignee: Eloret Corporation
    Inventor: Cattien Nguyen
  • Patent number: 8484758
    Abstract: The present invention includes an apparatus that holds the probes to a solid support throughout the passages of the functionalization process, thus avoiding user-dependent breakage or damage of the fragile AFM cantilevers. The apparatus allows the tips of the AFM probes to be placed face-down, which avoids the deposition of contaminants on their functional side. The device also allows functionalizing the tips with small liquid volumes and cleaning. The present invention includes a functionalization process preventing non-specific adsorption of molecules on the tip.
    Type: Grant
    Filed: March 29, 2010
    Date of Patent: July 9, 2013
    Assignee: Centro de Investigacion Cooperativa en Biomateriales (CIC Biomagune)
    Inventors: Elena Martines, Isabel Garcia Martin, Soledad Penades Ullate
  • Patent number: 8484757
    Abstract: A device for oscillation excitation of a leaf spring, which is fastened on one side in an atomic force microscope (AFM) and comprises semiconductor material, which has no piezoelectric properties, a free end to which a tip is attached, which is brought into contact with a sample surface to be examined. The present invention has the leaf spring connected at least sectionally to a metal layer to form a Schottky contact, and an electrical voltage or field source is provided, which generates an electrical AC voltage a vicinity or area of the Schottky contact.
    Type: Grant
    Filed: June 30, 2006
    Date of Patent: July 9, 2013
    Assignee: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung E.V.
    Inventors: Walter Arnold, Kerstin Meder, Ute Rabe
  • Patent number: 8474061
    Abstract: A method of fabricating high resolution atomic force microscopy (AFM) tips including a single semiconductor nanowire grown at an apex of a semiconductor pyramid of each AFM tip is provided. The semiconductor nanowire that is grown has a controllable diameter and a high aspect ratio, without significant tapering from the tip of the semiconductor nanowire to its base. The method includes providing an AFM probe including a semiconductor cantilever having a semiconductor pyramid extending upward from a surface of said semiconductor cantilever. The semiconductor pyramid has an apex. A patterned oxide layer is formed on the AFM probe. The patterned oxide layer has an opening that exposes the apex of the semiconductor pyramid. A single semiconductor nanowire is grown on the exposed apex of the semiconductor pyramid utilizing a non-oxidized Al seed material as a catalyst for nanowire growth.
    Type: Grant
    Filed: September 10, 2012
    Date of Patent: June 25, 2013
    Assignees: International Business Machines Corporation, King Abdulaziz City for Science and Technology
    Inventors: Guy Cohen, Mark C. Reuter, Brent A. Wacaser, Maha M. Khayyat
  • Patent number: 8468611
    Abstract: Improved nanolithography components, systems, and methods are described herein. The systems and methods generally employ a resistively heated atomic force microscope tip to thermally induce a chemical change in a surface. In addition, certain polymeric compositions are also disclosed.
    Type: Grant
    Filed: June 1, 2010
    Date of Patent: June 18, 2013
    Assignee: Georgia Tech Research Corporation
    Inventors: Elisa Riedo, Seth R. Marder, Walt A. de Heer, Robert J. Szoskiewicz, Vamsi K. Kodali, Simon C. Jones, Takashi Okada, Debin Wang, Jennifer E. Curtis, Clifford L. Henderson, Yueming Hua
  • Patent number: 8443461
    Abstract: Interatomic forces are measured with subatomic lateral resolution by in situ calibrated non-contact and passively thermal drift compensated atomic force microscopy in aqueous or generally liquidous environment; interatomic forces acting between distinct electronic orbitals of front-most tip atom and opposing sample atom can be quantitatively measured with subatomic lateral resolution. Calibration standard is a CaCO3-crystal, which undergoes a well defined pressure induced phase transition from the calcite to the aragonite crystal lattice structure providing an accurate independent force anchor point for the AFM's force versus distance curve. Furthermore, an independent actual tip-sample-distance d calibration is obtained by directly observing oscillatory (steric) solvation forces originating simply from packing effects of the liquid particles at very small tip-sample separations d.
    Type: Grant
    Filed: September 8, 2011
    Date of Patent: May 14, 2013
    Inventor: Frank Michael Ohnesorge
  • Publication number: 20130111637
    Abstract: The present invention relates to a method for covering Atomic Force Microscopy (AFM) tips by depositing a material in the form of nanoparticles with an aggregate source.
    Type: Application
    Filed: May 4, 2011
    Publication date: May 2, 2013
    Applicant: CONSEJO SUPERIOR DE INVESTICACIONES CIENTÍFICAS (CSIC)
    Inventors: Elisa Leonor Roman Garcia, Lidia Martinez Orellana, Mercedes Diaz Lagos, Yves Huttel
  • Patent number: 8397555
    Abstract: The present invention is directed to scanning probes in which a cantilever contacts a stylus via an integrated stylus base pad, and methods for fabricating such probes. The probe offer many advantages over other types of scanning probes with respect to eliminating the need for a soft, reflective coating in some applications and providing for the simple fabrication of sharp stylus tips, flexibility with respect to functionalizing the tip, and minimal thermal drift due to reduced bimorph effect. The advantage of these features facilitates the acquisition of high resolution images of samples in general, and particularly in liquids.
    Type: Grant
    Filed: February 28, 2011
    Date of Patent: March 19, 2013
    Assignee: Applied NanoStructures, Inc.
    Inventor: Ami Chand
  • Patent number: 8393009
    Abstract: A sensor for scanning a surface with an oscillating cantilever (12), made from piezoelectric material that is suitable for a transverse oscillation of the free end of a beam, holding an electrically conductive probe tip (14) on the free end of the beam in transverse direction, a first deflection electrode (26A, 26B) and an inversely phased second electrode (28A, 28B, 28C) being provided to collect charges that are separated within the space of the deflection electrodes (34, 36). The cantilever (12) is provided with at least one electrode (30) in addition to the deflection electrodes (26A, 26B, 28A, 28B, 28C) that provides electrical contact to the tip (14), the at least one additional electrode being located in a region on the deflecting beam where the surface charge density due to the strain caused by beam deflection (34, 36) is smaller than in the region where the deflection electrodes are located.
    Type: Grant
    Filed: November 21, 2011
    Date of Patent: March 5, 2013
    Inventor: Franz Josef Giessibl