Probes, Their Manufacture, Or Their Related Instrumentation, E.g., Holders (epo) Patents (Class 850/40)
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Patent number: 8393009Abstract: A sensor for scanning a surface with an oscillating cantilever (12), made from piezoelectric material that is suitable for a transverse oscillation of the free end of a beam, holding an electrically conductive probe tip (14) on the free end of the beam in transverse direction, a first deflection electrode (26A, 26B) and an inversely phased second electrode (28A, 28B, 28C) being provided to collect charges that are separated within the space of the deflection electrodes (34, 36). The cantilever (12) is provided with at least one electrode (30) in addition to the deflection electrodes (26A, 26B, 28A, 28B, 28C) that provides electrical contact to the tip (14), the at least one additional electrode being located in a region on the deflecting beam where the surface charge density due to the strain caused by beam deflection (34, 36) is smaller than in the region where the deflection electrodes are located.Type: GrantFiled: November 21, 2011Date of Patent: March 5, 2013Inventor: Franz Josef Giessibl
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Patent number: 8387160Abstract: A resist medium in which features are lithographically produced by scanning a surface of the medium with an AFM probe positioned in contact therewith. The resist medium comprises a substrate; and a polymer resist layer within which features are produced by mechanical action of the probe. The polymer contains thermally reversible crosslinkages. Also disclosed are methods that generally includes scanning a surface of the polymer resist layer with an AFM probe positioned in contact with the resist layer, wherein heating the probe and a squashing-type mechanical action of the probe produces features in the layer by thermally reversing the crosslinkages.Type: GrantFiled: October 7, 2010Date of Patent: February 26, 2013Assignee: International Business Machines CorporationInventors: Michel Despont, Urs T. Duerig, Jane E. Frommer, Bernd W. Gotsmann, James L. Hedrick, Craig Jon Hawker, Robert D. Miller
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Patent number: 8381311Abstract: The invention relates to a method and to a device for examining a test sample using a scanning probe microscope. According to the method a first and a second measurement using a scanning probe microscope are carried out on the test sample using a measuring probe system in which a measuring probe and another measuring probe are formed on a common measuring probe receptacle. During the first measurement, in relation to the test sample, the measuring probe is held in a first measurement position and the other measuring probe is held in another non-measurement position, and the test sample is examined with the measuring probe using a scanning probe microscope. After the first measurement, by displacing in relation to the test sample, the measuring probe is displaced from the measurement position into a non-measurement position and the other measuring probe from the other non-measurement position into another measurement position.Type: GrantFiled: May 16, 2008Date of Patent: February 19, 2013Assignee: JPK Instruments AGInventor: Torsten Jähnke
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Patent number: 8371184Abstract: Measurement apparatus having a cantilever and a fluid flow channel, the cantilever being positioned in the channel so that it projects in a direction parallel to the direction of fluid flow. In an associated method, the cantilever is positioned in a fluid flow channel such that the cantilever extends parallel with the direction of fluid flow in the channel. Fluid is caused to flow in the channel at a known velocity. The resonant frequency of the cantilever is measured at one or more velocities of fluid flow and calculating the spring constant of the cantilever using the measured resonant frequency or frequencies. If the spring constant of the cantilever is known, the measurement of resonant frequency of the cantilever is used to determine the velocity of the fluid flow.Type: GrantFiled: January 31, 2008Date of Patent: February 12, 2013Assignee: The University Court of the University of St. AndrewsInventors: Georg Haehner, Gennady Lubarsky
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Patent number: 8370960Abstract: A modular AFM/SPM which provides faster measurements, in part through the use of smaller probes, of smaller forces and movements, free of noise artifacts, that the old generations of these devices have increasingly been unable to provide. The modular AFM/SPM includes a chassis, the foundation on which the modules of the instrument are supported; a view module providing the optics for viewing the sample and the probe; a head module providing the components for the optical lever arrangement and for steering and focusing those components; a scanner module providing the XYZ translation stage that actuates the sample in those dimensions and the engage mechanism; a isolation module that encloses the chassis and provides acoustic and/or thermal isolation for the instrument and an electronics module which, together with the separate controller, provide the electronics for acquiring and processing images and controlling the other functions of the instrument.Type: GrantFiled: October 14, 2009Date of Patent: February 5, 2013Assignee: Asylum Research CorporationInventors: Roger Proksch, Mario Viani, Jason Cleveland, Maarten Rutgers, Matthew Klonowski, Daren Walters, James Hodgson, Jonathan Hensel, Paul Costales, Anil Gannepalli
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Publication number: 20130019351Abstract: A high resolution AFM tip is provided which includes an AFM probe including a semiconductor cantilever having a semiconductor pyramid extending upward from a surface of the semiconductor cantilever, the semiconductor pyramid having an apex. The AFM tip also includes a single Al-doped semiconductor nanowire on the exposed apex of the semiconductor pyramid, wherein the single Al-doped semiconductor nanowire is epitaxial with respect to the apex of the semiconductor pyramid.Type: ApplicationFiled: September 10, 2012Publication date: January 17, 2013Applicants: King Abdulaziz City for Science and Technology, International Business Machines CorporationInventors: Guy M. Cohen, Mark C. Reuter, Brent A. Wacaser, Maha M. Khayyat
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Patent number: 8347696Abstract: A method of forming a microchannel as well as a thin film structure including same is made by forming a first thin film on a side of a substrate, forming a fugitive second thin film on the first thin film such that the second thin film defines a precursor of the elongated microchannel and a plurality of extensions connected to and extending transversely relative to the precursor along a length thereof A third thin film is formed on the first thin film and the fugitive second thin film such that the second thin film resides between the first thin film and the third thin film. A respective access site is formed in a region of the third thin film residing on a respective extension and penetrating to the fugitive second thin film. The fugitive second thin film forming the precursor is selectively removed from between the first thin film and the third thin film using an etching medium introduced through the access sites, thereby forming the microchannel between the first thin film and the third thin film.Type: GrantFiled: July 1, 2010Date of Patent: January 8, 2013Assignee: Northwestern UniversityInventors: Horacio D. Espinosa, Nicolaie A. Moldovan
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Publication number: 20120331593Abstract: A method of fabricating high resolution atomic force microscopy (AFM) tips including a single semiconductor nanowire grown at an apex of a semiconductor pyramid of each AFM tip is provided. The semiconductor nanowire that is grown has a controllable diameter and a high aspect ratio, without significant tapering from the tip of the semiconductor nanowire to its base. The method includes providing an AFM probe including a semiconductor cantilever having a semiconductor pyramid extending upward from a surface of said semiconductor cantilever. The semiconductor pyramid has an apex. A patterned oxide layer is formed on the AFM probe. The patterned oxide layer has an opening that exposes the apex of the semiconductor pyramid. A single semiconductor nanowire is grown on the exposed apex of the semiconductor pyramid utilizing a non-oxidized Al seed material as a catalyst for nanowire growth.Type: ApplicationFiled: September 10, 2012Publication date: December 27, 2012Applicants: KING ABDULAZIZ CITY FOR SCIENCE AND TECHNOLOGY, INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Guy M. Cohen, Mark C. Reuter, Brent A. Wacaser, Maha M. Khayyat
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Patent number: 8332961Abstract: Tips including a platinum silicide at an apex of a single crystal silicon tip are provided herein. Also, techniques for creating a tip are provided. The techniques include depositing an amount of platinum (Pt) on a single crystal silicon tip, annealing the platinum and single crystal silicon tip to form a platinum silicide, and selectively etching the platinum with respect to the formed platinum silicide.Type: GrantFiled: September 22, 2008Date of Patent: December 11, 2012Assignee: International Business Machines CorporationInventors: Harish Bhaskaran, Michel Despont, Ute Drechsler, Abu Sebastian
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Patent number: 8321961Abstract: A method of fabricating high resolution atomic force microscopy (AFM) tips including a single semiconductor nanowire grown at an apex of a semiconductor pyramid of each AFM tip is provided. The semiconductor nanowire that is grown has a controllable diameter and a high aspect ratio, without significant tapering from the tip of the semiconductor nanowire to its base. The method includes providing an AFM probe including a semiconductor cantilever having a semiconductor pyramid extending upward from a surface of said semiconductor cantilever. The semiconductor pyramid has an apex. A patterned oxide layer is formed on the AFM probe. The patterned oxide layer has an opening that exposes the apex of the semiconductor pyramid. A single semiconductor nanowire is grown on the exposed apex of the semiconductor pyramid utilizing a non-oxidized Al seed material as a catalyst for nanowire growth.Type: GrantFiled: October 7, 2010Date of Patent: November 27, 2012Assignees: International Business Machines Corporation, King Abdulazlz City for Science and TechnologyInventors: Guy Cohen, Mark C. Reuter, Brent A. Wacaser, Maha M. Khayyat
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Patent number: 8312560Abstract: The invention relates to a multifunctional scanning probe microscope comprising: a base (1); a preliminary approach unit (3) movably mounted on the base (1); a piezo-scanner (4) disposed on the preliminary approach unit (3); an object holder (5) disposed on the piezo-scanner (4); a sample (6) which comprises a measuring area (M) and is attached to the piezo-scanner (4) with the aid of the object holder (5); a platform (9) attached to the base (1) opposite the sample (6); an analyzer mounted on the platform (9) and comprising a first measuring head (13) which is oriented towards the sample (6) and is adapted for probing the measuring area (M) of the sample (6).Type: GrantFiled: February 12, 2010Date of Patent: November 13, 2012Assignee: NT-MDT Service & Logistics Ltd.Inventors: Andrey Bykov, Vladimir Kotov, Viktor Bykov
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Patent number: 8307461Abstract: A microwave probe having a metal tip on the free end of a microcantilever. In one embodiment, a pyramidal pit is isotropically etched in a device wafer of monocrystalline silicon. Oxidation may sharpen the pit. Deposited metal forms the metal tip in the pit and a bottom shield. Other metal sandwiched between equally thick dielectric layers contact the tip and form a conduction path along the cantilever for the probe and detected signals. Further metal forms a top shield overlying the conduction path and the dielectrically isolated tip and having equal thickness to the bottom shield, thus producing together with the symmetric dielectric layers a balanced structure with reduced thermal bending. The device wafer is bonded to a handle wafer. The handle is formed and remaining silicon of the device wafer is removed to release the cantilever.Type: GrantFiled: January 20, 2011Date of Patent: November 6, 2012Assignee: PrimeNano, Inc.Inventors: Xinxin Li, Yongliang Yang
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Patent number: 8287745Abstract: Disclosed is a method for fabricating a probe tip, capable of preventing a rapid increase of a surface size of a front end of the probe tip as the probe tip is worn out by a frequent contact with a wafer chip and, also, capable of improving the precision of the front end of the probe tip. The method for fabricating a probe tip includes forming a front end of the probe tip on a silicon wafer; forming a first protective layer which is patterned to expose a part of the front end of the probe tip; and forming a body of the probe tip in a portion opened by the pattern of the first protective layer.Type: GrantFiled: May 29, 2008Date of Patent: October 16, 2012Assignee: M2N Inc.Inventors: Ki Pil Hong, Jong Hyeon Chae, Hac Ju Lee
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Publication number: 20120260374Abstract: Provided are atomic force microscope probes, methods for making probes for use in atomic force microscopes and systems using such probes. The probes include at least a body portion and a cantilever portion. The cantilever portion may include a first surface and a second surface opposite the first surface. The cantilever portion further includes a first material arranged on the first surface, such that the cantilever portion twists about a center axis of the cantilever portion when the cantilever portion is heated. The first material may be arranged symmetrically or non-symmetrically on a portion of the first surface, or it may be arranged non-uniformly over the first surface. The cantilever portion of the probe may also include a second material arranged on the second surface of the cantilever portion. The first and second materials have a different thermal expansion than the material forming the cantilever portion.Type: ApplicationFiled: April 6, 2012Publication date: October 11, 2012Inventor: Michael E. MCCONNEY
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Patent number: 8256018Abstract: Faster and better methods for leveling arrays including software and user interface for instruments. A method comprising: (i) providing at least one array of cantilevers supported by at least one support structure, (ii) providing at least one substrate, (iii) providing at least one instrument to control the position of the array with respect to the substrate, (iv) leveling the array with respect to the substrate, wherein the leveling is performed via a user interface on the instrument which is adapted to have the user input positional information from the motors and piezoelectric extender when at least one cantilever deflects from the substrate. Uniform z-displacements can be achieved.Type: GrantFiled: February 5, 2009Date of Patent: August 28, 2012Assignee: NanoInk, Inc.Inventors: Jason Haaheim, Vadim Val-Khvalabov
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Patent number: 8250668Abstract: A microcantilever system comprising a paddle, its use and a method of simultaneously acquiring the topography and measuring the tip-sample interactions of a sample with it.Type: GrantFiled: September 16, 2009Date of Patent: August 21, 2012Assignees: Forschungszentrum Karlsruhe GmbH, University of MarylandInventors: Hendrik Hölscher, Santiago De Jesus Solares
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Patent number: 8245317Abstract: A surface shape of a member to be measured is measured by reflecting measuring light at a reflection surface of a probe and utilizing an atomic force exerting between the probe and utilizing an atomic force exerting between the probe and the member to be measured. In addition to a first scanner for driving the probe, a second scanner for moving a focus position of an optical system is provided. Position conversion data representing a correlation between amounts of control of the first scanner and the second scanner are obtained in advance. By synchronously driving the first scanner and the second scanner, the focus position of the optical system is caused to follow the probe to improve measurement accuracy.Type: GrantFiled: August 14, 2009Date of Patent: August 14, 2012Assignee: Canon Kabushiki KaishaInventor: Mahito Negishi
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Patent number: 8239968Abstract: An atomic force microscopy system includes an imaging probe having a first thermal displacement constant and a sample placement surface. At least a portion of the sample placement surface has a second thermal displacement constant. The sample placement surface is spaced apart from the imaging probe at a predetermined displacement. The sample placement surface is configured so that the second thermal displacement constant matches the first thermal displacement constant so that when the imaging probe and the sample placement surface are subject to a predetermined temperature, both the portion of the sample placement surface and the imaging prove are displaced by a same distance.Type: GrantFiled: July 6, 2010Date of Patent: August 7, 2012Assignee: Georgia Tech Research CorporationInventors: Hamdi Torun, Fahrettin L. Degertekin, Ofer Finkler
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Patent number: 8214917Abstract: A microfluidic cell includes a compressible block and a cantilever. The compressible block includes a first horizontal surface, an opposite second horizontal surface and a plurality of vertical surfaces therebetween. A gasket structure depends downwardly from the second horizontal surface. The gasket structure defines an open cavity therein. The compressible block defines a fluid inlet passage and a fluid outlet passage each in fluid communication with the cavity and opening to a selected one of the first horizontal surface and one of the plurality of vertical surfaces. The cantilever includes body portion and a beam extending laterally therefrom. The body portion is embedded in the compressible block and a portion of the beam extends into the cavity defined by the gasket structure.Type: GrantFiled: May 28, 2010Date of Patent: July 3, 2012Assignee: Georgia Tech Research CorporationInventors: Todd A. Sulchek, Siping Roger Qiu, Damien J. Noga, David K. Schoenwald
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Patent number: 8214916Abstract: Better leveling procedures for patterning at the small scale including the nanoscale. A method comprising: providing at least one array of cantilevers comprising tips thereon, wherein the cantilevers comprise at least one relatively bright spot, or at least two relatively bright spots, near the tip upon viewing, providing a substrate, leveling the array and the substrate with respect to each other, wherein the relatively bright spot near the tip is viewed to determine a contact of the tip and substrate.Type: GrantFiled: January 25, 2010Date of Patent: July 3, 2012Assignee: NanoInk, Inc.Inventors: Nabil A. Amro, Raymond Sanedrin
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Patent number: 8205268Abstract: Improved actuation device useful in direct-write nanolithography and imaging including use of a pivot point for downward deflection of a cantilever with long travel path. A device comprising at least one holder, at least one cantilever, an extension of the said cantilever wherein the extension is integrated with an actuator, wherein the cantilever is adapted for actuated movement. The actuator can be electrostatic, thermal, or piezoelectric. The cantilever can comprise a tip, and material can be transferred from the tip to a surface.Type: GrantFiled: November 25, 2008Date of Patent: June 19, 2012Assignee: NanoInk, Inc.Inventor: Raymond Roger Shile
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Patent number: 8166568Abstract: It is an object to provide a contact probe pin for a semiconductor test apparatus, including an amorphous carbon type conductive film formed on the probe pin base material surface. The conductive film is excellent in tin adhesion resistance of preventing tin which is the main component of solder from adhering to the contact part of the probe pin during contact between the probe pin and solder. The contact probe pin for a semiconductor test apparatus, includes an amorphous carbon type conductive film formed on the conductive base material surface. The amorphous carbon type conductive film has an outer surface with a surface roughness (Ra) of 6.0 nm or less, a root square slope (R?q) of 0.28 or less, and a mean value (R) of curvature radii of concave part tips of the surface form of 180 nm or more, in a 4-?m2 scan range by an atomic force microscope.Type: GrantFiled: July 30, 2010Date of Patent: April 24, 2012Assignee: Kobe Steel, Ltd.Inventors: Hirotaka Ito, Kenji Yamamoto
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Publication number: 20120096602Abstract: The present invention includes an apparatus that holds the probes to a solid support throughout the passages of the functionalisation process, thus avoiding user-dependent breakage or damage of the fragile AFM cantilevers. The apparatus allows the tips of the AFM probes to be placed face-down, which avoids the deposition of contaminants on their functional side. The device also allows functionalising the tips with small liquid volumes and cleaning. The present invention includes a functionalisation process preventing non-specific adsorption of molecules on the tip.Type: ApplicationFiled: March 29, 2010Publication date: April 19, 2012Applicant: CTR de Investn Coop en Biomater (CIC biomaGUNE)Inventors: Elena Martines, Isabel Garcia Martin, Soledad Penades Ullate
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Publication number: 20120090057Abstract: A method of fabricating high resolution atomic force microscopy (AFM) tips including a single semiconductor nanowire grown at an apex of a semiconductor pyramid of each AFM tip is provided. The semiconductor nanowire that is grown has a controllable diameter and a high aspect ratio, without significant tapering from the tip of the semiconductor nanowire to its base. The method includes providing an AFM probe including a semiconductor cantilever having a semiconductor pyramid extending upward from a surface of said semiconductor cantilever. The semiconductor pyramid has an apex. A patterned oxide layer is formed on the AFM probe. The patterned oxide layer has an opening that exposes the apex of the semiconductor pyramid. A single semiconductor nanowire is grown on the exposed apex of the semiconductor pyramid utilizing a non-oxidized Al seed material as a catalyst for nanowire growth.Type: ApplicationFiled: October 7, 2010Publication date: April 12, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Guy M. Cohen, Mark C. Reuter, Brent A. Wacaser, Maha M. Khayyat
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Patent number: 8104332Abstract: To provide a probe 1 for use in a cantilever 2 of an scanning probe microscope (SPM) manufacturable in a simple manufacturing process and usable while allowing full use of the properties of single-crystalline material and a cantilever 2 using that probe. A probe 1 disposed at the tip of beam part 2a of a cantilever 2 used for an SPM, wherein the probe 1 comprises a needle-like part 1a having a length of not less than 10 ?m or and a flat plate part 1b having a face contacting a beam part of the cantilever, the needle-like part 1a and the flat plate part 1b are integrally formed with a single-crystalline material, and at least one side face of the flat plate part 1b contains a flat surface 1c in order to indicate the crystal orientation of the single-crystalline material.Type: GrantFiled: July 15, 2010Date of Patent: January 31, 2012Assignee: Namiki Seimitsu Houseki Kabushiki KaishaInventors: Kouji Koyama, Toshiro Kotaki, Kazuhiko Sunagawa
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Patent number: 8099792Abstract: Atomic force photovoltaic microscopy apparatus and related methodologies, as can be used to quantitatively measure spatial performance variations in functioning photovoltaic devices.Type: GrantFiled: January 7, 2009Date of Patent: January 17, 2012Assignees: Northwestern University, The United States of America as represented by the Secretary of the Air ForceInventors: Mark C. Hersam, Benjamin Leever
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Patent number: 8099793Abstract: An automatic probe exchange system for a scanning probe microscope (SPM) exchanges probes between a probe mount on the SPM and a probe mount on a probe tray based on differential magnetic force. When the magnetic force on the SPM side is greater, the probe is attached to the probe mount on the SPM. When the magnetic force on the probe tray side is greater, the probe is attached to the probe mount on the probe tray. The magnetic force on the probe tray side is varied by moving the magnets that generate the magnetic force on the probe tray side closer to or further from the probe.Type: GrantFiled: September 29, 2009Date of Patent: January 17, 2012Assignee: Park Systems Corp.Inventors: Hyeong Chan Jo, Hong Jae Lim, Seung Jun Shin, Joon Hui Kim, Yong Seok Kim, Sang-il Park
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Publication number: 20120011624Abstract: An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.Type: ApplicationFiled: March 25, 2011Publication date: January 12, 2012Applicants: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE GOVERNORS OF THE UNIVERSITY OF ALBERTAInventors: Erik J. LUBER, Colin OPHUS, David MITLIN, Brian OLSEN, Christopher HARROWER, Velimir RADMILOVIC
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Patent number: 8091143Abstract: A probe for atomic force microscopy (SM) comprising a micromechanical resonator (RMM) and a tip for atomic force microscopy (P1) projecting from said resonator, the probe being characterized in that: it also includes means (EL1) for selectively exciting a volume mode of oscillation of said resonator (RMM); and in that said tip for atomic force microscopy (P1, P1?) projects from said resonator substantially in correspondence with an antinode point (PV1) of said volume mode of oscillation. An atomic force microscope including such a probe (SM?). A method of atomic force microscopy including the use of such a probe.Type: GrantFiled: April 23, 2008Date of Patent: January 3, 2012Assignees: Centre National de la Recherche Scientifique, Universite de Bordeaux 1Inventors: Marc Faucher, Lionel Buchaillot, Jean-Pierre Aime, Bernard Louis Amand Legrand, Gerard Couturier
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Publication number: 20110309265Abstract: In a general aspect, a system includes a plurality of diamond nanowires disposed on the surface of a diamond substrate, at least some of the nanowires including a color center. The system also includes a light source configured to illuminate at least one of the plurality of nanowires with excitation light at a wavelength corresponding to an excitation wavelength of the color center included in the illuminated nanowire; and an optical receiver configured to receive a fluorescence emitted from the color center included in the illuminated nanowire in response to the excitation light.Type: ApplicationFiled: April 19, 2011Publication date: December 22, 2011Applicant: President and Fellows of Harvard CollegeInventors: Thomas M. Babinec, Birgit J.M. Hausmann, Mughees Khan, Yinan Zhang, Philip R. Hemmer, Marko Loncar
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Patent number: 8079093Abstract: One inventive aspect is related to an atomic force microscopy probe. The probe comprises a tip configuration with two probe tips on one cantilever arm. The probe tips are electrically isolated from each other and of approximately the same height with respect to the cantilever arm. The outer surface of the tip configuration has the shape of a body with a base plane and an apex. The body is divided into two sub-parts by a gap located approximately symmetrically with respect to the apex and approximately perpendicular to the base plane. Another inventive aspect related to methods for producing such an AFM probe.Type: GrantFiled: February 6, 2009Date of Patent: December 13, 2011Assignee: IMECInventor: Marc Fouchier
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Patent number: 8074293Abstract: For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.Type: GrantFiled: May 26, 2009Date of Patent: December 6, 2011Assignee: Hitachi High-Technologies CorporationInventors: Eiichi Hazaki, Yasuhiro Mitsui, Takashi Furukawa, Hiroshi Yanagita, Susumu Kato, Osamu Satou, Osamu Yamada, Yoshikazu Inada
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Patent number: 8046843Abstract: An instrument includes a probe having a porous tip, a tip positioning apparatus to position the tip with respect to a sample material, a probe positioning apparatus to position the probe and sample material with respect to each other, and a controller. The controller controls the probe positioning apparatus in positioning the probe over the sample and controls the tip positioning apparatus in lowering the tip into the sample material to produce an interaction between the porous tip and the sample material.Type: GrantFiled: April 14, 2009Date of Patent: October 25, 2011Assignee: General Nanotechnology LLCInventor: Victor B. Kley
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Patent number: 8028567Abstract: AFM tweezers that include a first probe, including a triangular prism member having a tip of a ridge which is usable as a probe tip in a scanning probe microscope, and a second probe, including a triangular prism member provided so as to open/close with respect to the first probe, are provided. The first probe and the second probe are juxtaposed such that a predetermined peripheral surface of the triangular prism member of the first probe and a predetermined peripheral surface of the triangular prism member of the second probe face substantially in parallel to each other, and the first probe formed of a notch that prevents interference with a sample when the sample is scanned by the tip of the ridge.Type: GrantFiled: June 20, 2008Date of Patent: October 4, 2011Assignees: AOI Electronics Co., Ltd., SII Nano Technology Inc.Inventors: Tatsuya Kobayashi, Masato Suzuki, Masatoshi Yasutake, Takeshi Umemoto
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Patent number: 7997123Abstract: A dispensing device has a cantilever comprising a plurality of thin films arranged relative to one another to define a microchannel in the cantilever and to define at least portions of a dispensing microtip proximate an end of the cantilever and communicated to the microchannel to receive material therefrom. The microchannel is communicated to a reservoir that supplies material to the microchannel. One or more reservoir-fed cantilevers may be formed on a semiconductor chip substrate. A sealing layer preferably is disposed on one of the first and second thin films and overlies outermost edges of the first and second thin films to seal the outermost edges against material leakage. Each cantilever includes an actuator, such as for example a piezoelectric actuator, to impart bending motion thereto. The microtip includes a pointed pyramidal or conical shaped microtip body and an annular shell spaced about the pointed microtip body to define a material-dispensing annulus thereabout.Type: GrantFiled: June 19, 2007Date of Patent: August 16, 2011Assignee: Northwestern UniversityInventors: Horacio D. Espinosa, Nicolaie A. Moldovan, Keun-Ho Kim
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Patent number: 7971266Abstract: The present invention relates to a method for providing a measuring probe (1, 1a, 2) for a probe microscopic examination of a sample in a probe microscope, in particular a scanning probe microscope, in which the measuring probe (1), which has a probe base (1a) and a probe extension (2) formed thereon, is held on a carrier device and the measuring probe (1) is processed before or after a measurement by detaching a section of the probe extension (2). The invention further relates to an arrangement having a probe microscope for the probe microscopic examination of a sample, in particular a scanning probe microscope.Type: GrantFiled: January 16, 2009Date of Patent: June 28, 2011Assignee: JPK Instruments AGInventors: Torsten Jähnke, Torsten Müller, Detlef Knebel, Kathryn Poole
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Patent number: 7966867Abstract: The invention provides a scanning probe microscope capable of performing highly accurate three-dimensional profile measurement in a state in which no sliding of the probe or deformation of the sample substantially occurs.Type: GrantFiled: April 8, 2008Date of Patent: June 28, 2011Assignee: Hitachi, Ltd.Inventors: Masahiro Watanabe, Shuichi Baba, Toshihiko Nakata
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Patent number: 7958566Abstract: Disclosed is an atomic force microscope (AFM) probe for use in an AFM, and more particularly, an AFM probe suitable for testing the topography and mechanical properties of a microstructure having a size on the order of micrometers or nanometers. To this end, an AFM probe according to the present invention comprises an elastically deformable frame having a fixed end and a movable end on one axis; an AFM tip supported by the movable end to be movable against a test sample in a direction of the axis; and a stopper provided on an inner surface of the frame to control a movement of the AFM tip within a predetermined range.Type: GrantFiled: December 20, 2007Date of Patent: June 7, 2011Assignee: Korea Institute of Machinery & MaterialsInventors: Hak-Joo Lee, Seung Min Hyun, Jae Hyun Kim, Jung Yup Kim, Seung Woo Han, Jung Min Park, Byung Ik Choi
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Patent number: 7954166Abstract: An improved method of loading tips and other surfaces with patterning compositions or inks for use in deposition. A method of patterning is described, the method comprising: (i) providing at least one array of tips; (ii) providing a plurality of patterning compositions; (iii) ink jet printing at least some of the patterning compositions onto some of the tips; and (iv) depositing at least some of the patterning compositions onto a substrate surface; wherein the ink jet printing is adapted to prevent substantial cross-contamination of the patterning composition on the tips. Good printing reproducibility and control of printing rate can be achieved. The surfaces subjected to ink jet printing can be treated to encourage localization of the ink at the tip. The method is particularly important for high density arrays.Type: GrantFiled: August 8, 2008Date of Patent: May 31, 2011Assignee: Northwestern UniversityInventors: Chad A. Mirkin, Yuhuang Wang, Louise R. Giam, Matthew Park
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Patent number: 7945964Abstract: Provided are a structure of an apparatus for analysis, inspection, and measurement in which a support structure supporting a detection unit is resistant to disturbance, suppresses a reduction in resolution during large-sample measurement, and has high rigidity, and a probe microscope using the apparatus structure. The apparatus structure supporting the detection unit which is opposed to a sample which is located on a unit movable in at least one axis direction and is an object to be analyzed has an arch shape. In the apparatus structure having the arch shape and supporting the detection unit, a surface substantially perpendicular to a flat surface portion of a sample holder located immediately under the apparatus structure is formed. The detection unit is supported on the perpendicular surface. The arch-shaped apparatus structure is a curved structure consistent with a catenary curve.Type: GrantFiled: March 31, 2009Date of Patent: May 17, 2011Assignee: SII NanoTechnology Inc.Inventors: Shigeru Wakiyama, Kenichi Akamatsu
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Patent number: 7926328Abstract: There is provided a sample manipulating apparatus which is an apparatus for manipulating a sample mounted on a substrate surface, in which at least position data and shape data are acquired by observing the sample. Thereafter, tweezers are positioned by moving means such that the sample is positioned between an observing probe and a grasping probe based on the two set of data. After positioning, a height of the tweezers is set to a position of being remote from the substrate surface by a constant distance by moving means while monitoring a result of measurement by displacement measuring means. Thereafter, the grasping probe is moved to a side of the observing probe while monitoring the result of measurement by the displacement measuring means at the set height and the sample is grasped while detecting a grasping start point.Type: GrantFiled: May 29, 2008Date of Patent: April 19, 2011Assignee: SII Nano Technology Inc.Inventors: Masatoshi Yasutake, Takeshi Umemoto, Masafumi Watanabe
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Patent number: 7921465Abstract: A system (100) for characterizing surfaces can include a nanotip microscope (104) in a first pressure envelope (102) at a first pressure with an electrically conductive nanotip (110) mounted thereon for characterizing a sample surface. The system can also include an ion imaging system (122, 124, 128) within a second pressure envelope (120) at a second pressure. The second pressure can less than or equal to the first pressure and the pressure envelopes (102, 120) can be separated by a pressure limiting aperture (PLA) (132). The system can further include gas sources (116, 118) for introducing into the first pressure envelope (102) at least one gas, and a voltage supply (114) coupled to the nanotip (110) for generating an electric field between the nanotip (114) and the PLA (132).Type: GrantFiled: August 14, 2008Date of Patent: April 5, 2011Assignee: Texas Instruments IncorporatedInventor: Vladimir Ukraintsev
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Patent number: 7913544Abstract: The present invention is directed to scanning probes in which a cantilever contacts a stylus via an integrated stylus base pad, and methods for fabricating such probes. The probe offer many advantages over other types of scanning probes with respect to eliminating the need for a soft, reflective coating in some applications and providing for the simple fabrication of sharp stylus tips, flexibility with respect to functionalizing the tip, and minimal thermal drift due to reduced bimorph effect. The advantage of these features facilitates the acquisition of high resolution images of samples in general, and particularly in liquids.Type: GrantFiled: November 15, 2007Date of Patent: March 29, 2011Assignee: Applied NanoStructures, Inc.Inventor: Ami Chand
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Patent number: 7900506Abstract: The present invention provides a multi-dimensional standing wave probe for microscale and nanoscale measurement, manipulation, and surface modification, including: a filament having a first free end and a second end that is attached to at least one actuator to apply oscillation cycles to the filament; wherein the oscillation of the filament during at least one complete cycle of oscillation of the actuator causes the free end to move in a multi-dimensional envelope, producing a defined virtual probe tip at the free end, wherein a shape of the virtual probe tip is defined by both a characteristic shape of the oscillation of the free end and a geometry of the filament. Optionally, the actuator includes a monolithic crystal actuator. Preferably, the monolithic crystal actuator includes a crystal having zero grain boundaries. The monolithic crystal actuator also includes a plurality of thin flexure structures.Type: GrantFiled: December 14, 2007Date of Patent: March 8, 2011Assignee: Insitutec, Inc.Inventors: Shane C. Woody, Marcin B. Bauza, Stuart T. Smith
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Publication number: 20110055987Abstract: A method of producing sharp tips useful for scanning probe microscopy and related applications is described. The tips are formed by deposition into a mold(s) formed in a sacrificial crystalline semiconductor substrate with an exposed {311} surface which has been etched with a crystallographic etchant to form a 3-sided, trihedral or trigonal pyramidal mold(s) or indentation(s). The resultant tips, when released from the sacrificial mold material or substrate, are typically formed in the shape of a trigonal pyramid or a tetrahedron. Another embodiment involves starting with a {100} surface and the formation of two tips on opposite ends of a wedge at trigonal or trihedral points of the wedge. These tips are less susceptible to the tip wedge effect typical of tips formed using known methods.Type: ApplicationFiled: August 25, 2010Publication date: March 3, 2011Inventor: Nicolae MOLDOVAN
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Publication number: 20110041224Abstract: A microcantilever used in Atomic Force Microscopy (AFM) includes an elongated cantilevered body with a probe tip placed preferably near its free end and preferably along the cantilever's axis. Some embodiments of the present invention integrate into the microcantilever body an embedded or etched paddle that rotates rigidly about an axis parallel to that of the cantilever with hinges that connect the paddle to the cantilever body. In one embodiment the resonance frequency of this paddle resonator is higher than the fundamental resonance of the microcantilever so that the paddle rotation is proportional to the vertical microcantilever acceleration at the hinge location. The motion of the paddle can be detected using radiation irradiating the paddle; the reflected beam is centered onto a four quadrant photodiode as commonly found in AFM.Type: ApplicationFiled: August 6, 2010Publication date: February 17, 2011Applicant: PURDUE RESEARCH FOUNDATIONInventors: Arvind Raman, Ronald G. Reifenberger, John T. Melcher
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Patent number: 7884323Abstract: The present invention relates generally to atom probes, atom probe specimens, and associated methods. For example, certain aspects are directed toward methods for analyzing a portion of a specimen that includes selecting a region of interest and moving a portion of material in a border region proximate to the region of interest so that at least a portion of the region of interest protrudes relative to at least a portion of the border region. The method further includes analyzing a portion of the region of interest. Other aspects of the invention are directed toward a method for applying photonic energy in an atom probe process by passing photonic energy through a lens system separated from a photonic device and spaced apart from the photonic device. Yet other aspects of the invention are directed toward a method for reflecting photonic energy off an outer surface of an electrode onto a specimen.Type: GrantFiled: August 15, 2006Date of Patent: February 8, 2011Assignee: Cameca Instruments, Inc.Inventors: Thomas F. Kelly, Joseph H. Bunton, Scott A. Wiener
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Patent number: 7861315Abstract: A simple method for integrating a circuit onto a probe with a handle, a cantilever and a tip is provided. By fabricating a probe whose surface has recessed patterns of the desirable profile, a circuit can be formed on one part of the handle out over the cantilever and back onto a different part of the handle without employing a circuit lithography step. The circuit material constituting the circuit is deposited orthogonally to the probe surface with a line-of-sight technique.Type: GrantFiled: December 11, 2008Date of Patent: December 28, 2010Assignee: Asylum Research CorporationInventors: Roger Proksch, Hector Cavazos
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Patent number: 7854015Abstract: A scanning probe microscope and method for operating the same are disclosed. The microscope includes a probe mount for attaching a probe, an electro-mechanical actuator, a probe position signal generator, an impulse signal generator and a servo. A probe tip is mounted on a first end of a cantilever arm, a second end of the cantilever arm being mounted on a mechanical vibrator that causes the second end to vibrate in response to a drive signal. The probe position signal generator generates a position signal indicative of a position of the probe relative to the second end of the cantilever arm. The impulse signal generator measures a quantity related to an impulse imparted to the probe tip by the interaction between the tip and the local characteristics of the sample. The servo operates the electro-mechanical actuator so as to maintain the measured quantity at a predetermined value.Type: GrantFiled: November 24, 2008Date of Patent: December 14, 2010Assignee: Agilent Technologies, Inc.Inventor: Storrs Hoen
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Patent number: 7814565Abstract: Techniques for forming a nanostructure on a probe tip are provided.Type: GrantFiled: August 27, 2008Date of Patent: October 12, 2010Assignee: SNU R&DB FoundationInventors: Yong Hyup Kim, Tae June Kang