Abstract: An improved process for the separation of carbon dioxide from the flue gas of an oxy-combustion power plant is provided. The flue gas is compressed, cleaned, cooled and dried. This clean, compressed dry flue gas is then further cooled, partially condensed and separated into liquid and vapor streams. The liquid streams, which contain a high concentration of carbon dioxide, are vaporized, compressed and exported to an end user. The vapor streams are heated and expanded, in order to extract useable energy. At least two expanders are used to extract this energy, with an intermediate warming step.

Abstract: The present disclosure sets forth an effluent treatment composition, system, and method for the comprehensive treatment of odiferous or noxious effluent formed as a result of an industrial process. The treatment composition includes an oxidant, a biocide, a scale inhibitor, and an anti-foulant agent. The oxidant may be a permanganate composition. A gas absorption system may be used to apply the treatment composition to an odorous effluent to remove primary and secondary odor components from the industrial process.

Abstract: An apparatus is provided for removing airborne moisture from a designated area. In one embodiment, the apparatus includes a bucket, a liquid absorption medium (such as ground corn cobs) placed in the bottom of the bucket to form a media bed, a tray placed over the absorption media bed, and a moisture absorption medium (such as calcium chloride) placed in the bucket over the tray. A method is also provided for absorbing moisture from a humid environment using the apparatus. When the apparatus is exposed to humid conditions, the CaCl2 will absorb moisture and become hardened. As the CaCl2 media hardens, it will expand. However, its lateral expansion is restricted by a side wall of the tray. Over further time, the CaCl2 will begin to dissolve into a brine. The brine will gravitationally seep through the through-openings in the tray and be captured by the corn cob medium.

Abstract: A power generation system. The exemplary system shown in FIGS. 1 and 2 includes a gas turbine (28), a gasifier (10) for generating gaseous fuel and a gas combustor (26) configured to receive the fuel and power the gas turbine (28). A drain collection and separation system (5) is positioned to collect gaseous fuel entrained in liquid and to separate the gaseous fuel from the liquid so the gaseous fuel can be cycled or disposed of separately from the liquid.

Abstract: A gas-liquid separation apparatus includes a crust and a separating pipe located in the crust. The crust includes an annular wall and two lids covering two ends of the wall. The crust has a cavity surrounded by the wall and the two lids. An inlet extends through one lid and an outlet extends through the other lid. The separating pipe is disposed in the cavity of the crust and in communication with the inlet and the outlet of the crust. A plurality of apertures is defined in a body of the separating pipe and in communication with a space inside the separating pipe and the cavity of the crust. The liquid with gas dissolved therein enters into the separating pipe via the inlet of the crust. The liquid is degassed by the separating pipe. The de-gassed liquid exits the separating pipe via the outlet of the crust.

Abstract: An ultrasonic solution separator including an ultrasonic atomization chamber supplied with a solution containing a target material; an ultrasonic oscillator producing mist from the solution in the ultrasonic atomization chamber with ultrasonic oscillation; a power supply for ultrasonics connected to the ultrasonic oscillator, and a collection portion transporting the mist produced by the ultrasonic oscillator with a carrier gas and aggregating and collecting the mist included in the carrier gas. The power supply supplying high-frequency power to the ultrasonic oscillator so that the ultrasonic oscillator oscillates at an ultrasonic frequency. The ultrasonic separator aggregates and collects the mist produced in the ultrasonic atomization chamber by means of the collection portion. With this ultrasonic solution separator, the temperature of carrier gas in the ultrasonic atomization chamber is at least 5° C. higher than the carrier gas in the collection portion.

Abstract: A sprinkler system and a method for mitigating scaling, microbiological influenced corrosion and oxidative corrosion are disclosed. The system includes a piping network in fluid communication with a source of pressurized water and an air pump. The network is vented to the ambient. The air pump moves initially dry ambient air through the system, either by maintaining a negative or a positive air pressure within the network. The dry air absorbs residual water within the network and exhausts it to the ambient. Rate of air flow through the system is controlled by restrictor elements such as orifices, throttle valves or venturies within the piping network.

Abstract: A sprinkler system and a method for mitigating scaling, microbiological influenced corrosion and oxidative corrosion are disclosed. The system includes a piping network in fluid communication with a source of pressurized water and an air pump. The network is vented to the ambient. The air pump moves initially dry ambient air through the system, either by maintaining a negative or a positive air pressure within the network. The dry air absorbs residual water within the network and exhausts it to the ambient. Rate of air flow through the system is controlled by restrictor elements such as orifices, throttle valves or venturies within the piping network.

Abstract: Vapor recovery systems and methods are disclosed in association with a denatured alcohol production system. Hydrocarbon vapors are miscible in a motive fluid that captures the vapors and forms a hydrocarbon-alcohol solution. The recovered hydrocarbons are not removed from the solution, but are used in production of the denatured alcohol.

Abstract: In a wet-process gas treatment method of treating an acid gas by using at least two treating columns connected in series, a ratio of the concentration of an acid gas at an outlet to a concentration of the acid gas at an inlet of a first treating column is set higher than a ratio of the concentration of the acid gas at an outlet to the concentration of acid gas at an inlet of at least one of the other treating columns, thereby preventing deposits from forming in the interior of connecting pipes between the columns and in the interiors of the treating columns, to prevent the connecting pipes from being blocked.

Abstract: A process and system for condensing a multi-component fluid is disclosed, where the process and system are designed to provide a substantial increase in a heat transfer coefficient during condensation of multi-component fluids resulting in a drastic reduction in size and cost of heat exchangers need to condense such fluids. The system and method includes a plurality of heat exchangers and at least one scrubber and splitters and mixers supporting streams that allow a mixed stream to be supplied to each heat exchange unit having parameters designed to increase, optimize or maximize the heat transfer coefficient in each heat exchanger.

Abstract: Contemplated plants comprise an acid gas removal unit that receives a compressed gas from an injection gas compressor, wherein acid gas is removed from the compressed gas in the acid gas removal unit at a pressure approximately above pipeline pressure.

Abstract: A method and apparatus for particle collection (30) that is characterized by co-aerosolizing fluids (62) into an air stream (34) containing the particles to be analyzed to significantly enhance their collection and identification efficiency is provided.

Abstract: A gas siphon type reactor (10) is used to carry out a three phase chemical reaction under pressure, such as the reduction of uranyl nitrate to uranous nitrate by hydrogen, in the presence of a catalyst made up of platinum on a silica carrier. The control of the pressure in the reactor (10) is provided by regulating the liquid and gas flow rates from separator (52), into which the liquid and the gas leaving the reactor (10) are routed. The liquid in the reactor (10) is tapped from a lateral branch pipe (32) fitted with a filter (36) and emerging in the upper area (30), behind a profiled wall (34).

Abstract: An improved apparatus and method for use with a natural gas dehydrator. The apparatus and method of the invention provide for recirculation of gaseous or combustible materials so that they are not released into the atmosphere and to provide fuel for the process. Likewise, liquid hydrocarbons are collected. Various components, including separators, an absorber, wet glycol, dry glycol, an effluent condenser, heat exchangers, and a reboiler are utilized in accordance with the present invention.

Abstract: A waste stream separator separates liquid and solid waste from a conveying air stream. The liquid and solid waste are first separated from the air steam by gravity and filtration in a removable primary waste barrel. The air is then drawn through a secondary waste barrel and vacuum chamber with a moisture separator and water-resistant HEPA filter to produce dry, filtered air at the output port of the system. The liquid passing through the filter media in the primary waste barrel and the liquid collecting in the secondary waste barrel can be withdrawn for further treatment. When filled with waste, the primary waste barrel can be readily removed and sealed for disposal. If necessary, polyacrylate can be injected into the primary waste barrel to convert any remaining liquid to a solid gel prior to disposal.

Abstract: The present apparatus includes a casing (1) having a gas introduction opening (3) for introducing a gas into the casing and a gas discharge opening (5) for discharging the gas from the casing, a gas circulating tube passage (8) communicating with the casing for effecting circulation of the gas, a circulating fan (11) for effecting circulation of the gas in the casing through the gas circulating tube passage, and a valve (6, 7) switchable between a position for conducting the introducing and discharging of the gas into and from the casing through the gas introduction opening and the gas discharge opening and a position for effecting circulation of the gas in the casing through the gas circulating tube passage. The apparatus further includes a trap (10), a filter (4) and a heat exchanger (9) for conducting a desired treatment with respect to the circulated gas, such as removal of particles.

Abstract: An air filtration system includes a light weight container which stores a quantity of water for filtering contaminants from inhaled air. A coupling assembly is used to connect the container to a flexible hose for delivery of the filtered air to the dust mask worn by the user. The coupling assembly allows a user to interchange one light weight container with another in a quick and convenient manner if one container becomes saturated with contaminants. A user simply pulls downward on the slidable jacket to release the industrial plug and allowing the attachment of another container to the hose via the coupling assembly.

Abstract: Methods are provided for the selective removal of CO2 from a multicomponent gaseous stream to provide a CO2 depleted gaseous stream. In practicing the subject methods, an initial multicomponent gaseous stream that includes a gaseous CO2 hydrate promoter is contacted with an aqueous fluid, e.g., CO2 nucleated water, in a hydrate formation reactor under conditions of selective CO2 clathrate formation to produce a CO2 clathrate slurry and CO2 depleted gaseous stream. Also provided are systems that find use in practicing the subject methods. The subject methods and systems find use in a variety of applications where it is desired to selectively remove CO2 from a multicomponent gaseous stream.

Abstract: A waste treatment apparatus for the treatment and processing of wet material is provided. The apparatus comprises an inlet hopper adapted for receipt of the wet material. A pre-conditioning unit is provided having an input and an output end wherein the wet material is received from the inlet hopper at the input end and is conveyed to the output end wherein the wet material is processed to reduce moisture and pathogen content. A blower is provided for providing a forced air stream to direct the flow of the wet material and for directing the flow from the output end of the pre-conditioning unit. A pre-separation cyclone is provided and is operatively positioned for receiving the wet material from the output end of the pre-conditioning unit via the air stream powered by the blower, wherein the wet material is processed under the influence of cyclonic forces that further reduce the moisture content, pathogen content, and reduce the particle size of the wet material.

Abstract: Apparatus and method for utilizing recirculated exhaust gas in semiconductor manufacturing system, in a manner substantially reducing the effluent burden on the exhaust treatment system and infrastructure of the semiconductor process facility.

Abstract: An apparatus and method for producing a diffusive, continuous laminar flow for particle growth via condensation of vapors with a mass diffusivity near or higher than the thermal diffusivity of the surrounding gas. In an exemplary embodiment, the method uses the condensation of water vapor onto particles suspended in air.

Abstract: In a process for decomposing pollutants by bringing pollutants contained in air into contact with air that contains chlorine, under irradiation by light, at least part of a chlorine-generating solution present in a chlorine generation region is fed to a means for forming the functional water by electrolysis to effect regeneration and is again fed to the chlorine generation region. Also disclosed is a pollutant decomposition system used in such a process.

Abstract: An air filtration system uses a liquid to remove impurities from the air. A specialized chamber allows the air and liquid to contact each other in close proximity, so that the liquid can pick up not only particulate matter, but fumes and toxic gasses as well. The air can be bubbled through the liquid, or the liquid can be introduced into the chamber as a gentle rain, a spray, a vapor, a waterfall, or any other configuration that allows active contact between the two mediums. The liquid can then be cleaned of contaminants, e.g., by centrifugal force, while the liquid is then reused.

Abstract: A method of reducing PFC emissions during a semiconductor manufacturing process that includes a set of sub-processes each of which produces at least one PFC includes the steps of exhausting PFC's produced by each sub-process to a common line to form a combined exhaust stream, treating the combined exhaust stream from each sub-process using a separate PFC abatement system, combining the treated exhaust streams to form a combined treated stream, and wet scrubbing the combined treated stream.

Abstract: A process and apparatus collects pigment nanoparticles by forming a vapor of a pigment that is solid at room temperature, the vapor of the pigment being provided in an inert gaseous carrying medium. At least some of the pigment is solidified within the gaseous stream. The gaseous stream and pigment material is moved in a gaseous carrying environment into or through a dry mechanical pumping system. While the particles are within the dry mechanical pumping system or after the nanoparticles have moved through the dry pumping system, the pigment material and nanoparticles are contacted with an inert liquid collecting medium.

Abstract: A gas separation apparatus and process has a first pressure swing adsorption (PSA) unit (110) receiving feed gas (112), which comprises a first and a second component. First PSA unit (110) produces first product gas (114) pre-dominantly containing the first component, and first off gas (116) containing at least some of the first component and second component. Compressor (120) is coupled to first PSA unit (110) to compress first off gas (116) to form compressed off gas (126), which is passed downstream to absorber unit (130), which employs a solvent to remove at least part of the second component from compressed off gas (126), forming an enriched compressed off gas (136B). Second PSA unit (140) receives enriched compressed off gas (136B) and produces second product gas (142) which predominantly contains the first component and a second off gas that is sent to waste or reformer burner (150).

Abstract: A method and system for retrofitting an integrated scrubber to provide maximum oxygen content in a controlled decomposition oxidation (CDO) abatement process. The system includes a thermal/wet integrated scrubber, and a compressed air supply for supplying air to an oxygen separation device that separates the air into a nitrogen-enriched component and an oxygen-enriched component. The oxygen separation device utilizes a ceramic oxide or polymeric material to separate from the supplied air an oxygen-enriched component for introduction into the integrated scrubber. The integrated scrubber is equipped with a mechanical scraping device for continuous or intermittent removal of combustion deposits formed during the controlled decomposition oxidation process.

Abstract: The present invention is a microchannel mass exchanger having a first plurality of inner thin sheets and a second plurality of outer thin sheets. The inner thin sheets each have a solid margin around a circumference, the solid margin defining a slot through the inner thin sheet thickness. The outer thin sheets each have at least two header holes on opposite ends and when sandwiching an inner thin sheet. The outer thin sheets further have a mass exchange medium. The assembly forms a closed flow channel assembly wherein fluid enters through one of the header holes into the slot and exits through another of the header holes after contacting the mass exchange medium.

Abstract: A method for the abatement of one or more pyrophoric gases in a gas stream, which includes introducing water in to the gas stream and/or mixing the gas stream with preheated air and introducing the gas stream in to a container in which the pyrophoric gases are abated.

Abstract: A method and system for retrofitting an integrated scrubber to provide maximum oxygen content in a controlled decomposition oxidation (CDO) abatement process including a thermal/wet integrated scrubber, and a compressed air supply for supplying air to an oxygen separation device that separates the air into a nitrogen-enriched component and an oxygen-enriched component. The oxygen separation device includes a module, such as a vessel containing ceramic-materials arranged in an adsorbent bed or coated on a substrate. The present invention uses a ceramic oxide material through which only oxygen can diffuse. The composition of the ceramic oxide adsorbent material is such that a significant number of oxygen vacancies exist in the material. By placing either a voltage potential or a pressure gradient across the membrane, oxygen is selectively diffused in and through the oxide material to separate the air supply into an oxygen component for introduction into the integrated scrubber.

Abstract: A modular mass transfer and phase separation system for a fluid comprising a mass transfer component and a second component from which the mass transfer component is separable by mass transfer. The system has a first stage and at least one later stage each stage comprising: co-current contacting means for co-currently contacting at least two fluid streams to effect mass transfer of the mass transfer component and phase separation means for separating phases from the co-currently contacted fluid streams. The stages are in fluid communication so that at least two fluid stream which has been separated by phase separation in the early stage is communicable for co-current contacting and for phase separation in a later stage. At least one fluid stream which has been separated by phase separation in a later stage is communicatable in a counter-current direction for co-current contacting and for phase separation in the early stage. The system may be modular.

Abstract: A gas production plant has a first separator receiving a feed gas and produces a first offgas stream and a first product stream, and a second separator receives the first offgas stream and produces a second product stream and a second offgas stream. A liquefaction unit receives at least part of the first product stream and at least part of the second offgas stream, and produces a third product stream and a third offgas stream. A first portion of the third offgas stream is combined with the first offgas stream, and a second portion of the third offgas stream is used as a non-waste gas. In a method of removing a first and a second gaseous component from a feed gas, a PSA unit produces a first product stream and a first offgas stream. The first offgas stream is fed into a liquefaction unit that produces a second product stream and a second offgas stream, and at least part of the second offgas stream is recycled into the PSA unit.

Abstract: A method of reducing PFC emissions during a semiconductor manufacturing process that includes a set of sub-processes each of which produces at least one PFC includes the steps of exhausting PFC's produced by each sub-process to a common line to form a combined exhaust stream, treating the combined exhaust stream from each sub-process using a separate PFC abatement system, combining the treated exhaust streams to form a combined treated stream, and wet scrubbing the combined treated stream.

Abstract: A mobile debris collection machine with an improved filter system includes a chassis, wheels for supporting the chassis, a debris collection device on the chassis, a debris container on the chassis, and a vacuum system on the chassis for moving dust and debris from the debris collector to the container. The vacuum system includes a dust and debris inlet, a vacuum fan, a dust and debris conduit extending from the inlet to a deflector which directs dust and debris from the inlet toward an area adjacent the vacuum chamber which is positioned above the debris container. There is a first filter stage upstream of the vacuum fan and attached thereto for rotation with the fan. There are a plurality of second filter stages, each downstream of the vacuum fan with the air flow from the vacuum fan being generally equally divided between the plurality of second filter stages. There is an air outlet for each second filter stage and a diffuser mounted in connection with each air outlet.

Abstract: An apparatus and process for separating perfluorocarbon compounds from a gas mixture passes an incoming stream of a gas into a cold trap, the gas stream including a plurality of perfluorocarbon compounds. The gas mixture is cooled within the cold trap to a temperature below −100° C. to produce a condensate that is enriched in at least one perfluorocarbon compound and a non-condensed stream from which the condensate was separated. The condensate is withdrawn from the cold trap. The condensate may be withdrawn by warming the cold trap to vaporize the condensate and thereafter flowing the vaporized condensate into a storage vessel. The non-condensed stream may be vented to the atmosphere, re-circulated into the cold trap or flowed through subsequent separation processes to extract additional perfluorocarbon compounds.

Abstract: A process and system for reducing the concentration of odorous contaminants, primarily hydrogen sulfide, in the vapor spaces of sewage handling and treatment systems, primarily the vapor spaces of sewage trunk lines, by injecting a fine spray, mist or fog of a dilute solution of hydrogen peroxide and a base selected from a group consisting of sodium hydroxide, potassium hydroxide, ammonium hydroxide and sodium carbonate to mix intimately with the vapor flow. The peroxide and base solutions may be pre-mixed and diluted with water and injected through atomizing nozzles utilizing compressed air as an atomizing fluid. The system may also provide for separate storage of the peroxide and base solutions, mixing of the peroxide and base solutions with dilution water with in-line mixing devices and direct injection with or without compressed air atomization into the vapor space.

Abstract: The present invention is a microchannel mass exchanger having a first plurality of inner thin sheets and a second plurality of outer thin sheets. The inner thin sheets each have a solid margin around a circumference, the solid margin defining a slot through the inner thin sheet thickness. The outer thin sheets each have at least two header holes on opposite ends and when sandwiching an inner thin sheet. The outer thin sheets further have a mass exchange medium. The assembly forms a closed flow channel assembly wherein fluid enters through one of the header holes into the slot and exits through another of the header holes after contacting the mass exchange medium.

Abstract: In the present process for the preparation of urea, an off-gas stream released during the synthesis of melamine in a high-pressure melamine process which consists predominantly of ammonia and carbon dioxide, is introduced into at least one high-pressure section of a urea stripping plant and is used in the synthesis of urea. The off-gas stream can be used directly without any further treatment.

Abstract: The invention relates to a method for biological cleaning of a contaminated gas flow containing gaseous and/or particulate contaminants comprising the steps of contacting the contaminated gas flow counter-currently with a jet of suitable microorganism-containing scrubbing liquid in order to enhance absorption of gaseous and particulate contaminants in the scrubbing liquid; recovering the scrubbing liquid in a vessel; draining part of the scrubbing liquid from the vessel and compensating the drained part with fresh liquid. The method is carried out in a reverse jet scrubber and does not use any packing material for support to the microorganisms.

Abstract: A wet electrostatic scrubber unit for extracting from a polluted air stream particulate matter entrained therein, whereby emerging from the unit is an environmentally acceptable air stream. The unit includes a treatment station having a cylindrical duct through which is blown the polluted air stream. Coaxially disposed within the duct is a water delivery pipe having nozzles along its length from each of which is projected a radial beam of water. The radial beam collides with the inner surface of the duct to create a turbulent mist which is intercepted by the polluted air stream flowing through the duct. The velocity of the radial beam is such as to cause it to collide with the duct surface with sufficient force to triboelectrically generate negative ions. These cause the mist to acquire an electrostatic charge to capture the contaminates entrained in the polluted air stream. The negative ions also react with oxygen in the air stream to produce ozone that oxidizes the particulate matter captured by the mist.

Abstract: An exhaust gas treatment apparatus for treating exhaust gases generated in semiconductor manufacturing processes. It includes a main pipe, a U pipe, a discharge pipe and a tank. The main pipe has an inlet to receive exhaust gases, a heater surrounding the main pipe to heat the exhaust gases to form exhaust gas powder, a sprinkler to spray cooling water to cool the heated exhaust gases to form vapor and waste water and an outlet to discharge vapor and waste water into the U pipe. The U pipe has a first connector connecting with the main pipe and a second connector connecting with the discharging pipe. The tank is located below the U pipe under the first connector for receiving lump type exhaust gas powder scrapping from the inside wall of the main pipe. The U pipe will not be blocked by the lump type exhaust gas powder so that exhaust gas treatment efficiency won't be harmfully affected.

Abstract: The present invention is a fundamental method and apparatus of a microcomponent assembly that overcomes the inherent limitations of state of the art chemical separations. The fundamental element enabling miniaturization is the porous contactor contained within a microcomponent assembly for mass transfer of a working compound from a first medium to a second medium. The porous contactor has a thickness, and a plurality of pores extending through the thickness. The pores are of a geometry cooperating with a boundary tension of one or the other or both of the media thereby preventing migration of one, other or both through the microporous contactor while permitting passage of the working compound. In the microcomponent assembly, the porous contactor is placed between a first laminate such that a first space or first microplenum is formed between the microporous contactor and the first laminate. Additionally, a cover sheet provides a second space or second plenum between the porous contactor and the cover sheet.

Abstract: A method and apparatus for removing TDI from a gas in which the gas containing the TDI is forced through a scrubber tank. A first water spray is in fluid communication with the gas flowing through an inlet pipe and initially reacts the TDI in the gas with water. The gas is directed against a water surface at the bottom of the tank and thereafter, flows up an interior side wall of the tank. Deflectors mounted on the side wall disrupt the laminar flow of the gas and redirect it in a turbulent manner through a second water spray prior to the gas exiting the scrubber tank.

Abstract: The production of naphtha gas from landfill gas is preferably accomplished through a gas purification step, a catalytic conversion of methane gas to hydrogen gas, and a blending step in which various process streams are blended to produce the naphtha gas stream. The landfill gas stream is first treated through a gas purification/separation procedure to produce a substantially pure methane stream. The purified methane stream is then split into at least two portions. The first portion is fed into a hydrogen reformer and a shift reactor, where the methane gas is converted into a hydrogen-bearing stream which includes hydrogen and carbon dioxide. The second portion of the stream is preferably fed into a mixer. In the mixer, the pure methane stream, the hydrogen-bearing stream and a portion of the purified landfill gas stream are preferably blended together to form a naphtha gas stream.

Abstract: A system for cleaning building ductwork utilizing the equipment generally used to clean carpets. The system utilizes the vacuum unit and liquid waste tank from a carpet cleaning system. A flexible hose runs between the waste tank and the building ductwork. A water injection system is connected to the hose and is used to spray a stream of water into the air flowing through the flexible ductwork which will entrap any particles contained therein. The "dirty" water flowing out of the hose will flow to the waste tank for collection and disposal.

Abstract: The present invention especially for machine applications, also improves the invention air cleaning device, U.S. Pat. No. 4,585,599 dated Apr. 29, 1986. The present invention is the said air cleaning method U.S. Pat. No. 4,585.599 and which is in addition forming a multipurpose combinatory oil, air, gas, and pollution filtration system based on processing oil through purified water mixtures, includes water of hydration, in general, is based on the interaction of two liquid systems distinguished in nature and viscosity from each other. For example: oil as the solute which include polluted particles mixed within and purified water (H20) as the solvent and which are optionally charged electrostatically with opposite charges positive and negative. In addition, electro-magnetic separator is provided within for attracting magnetic particles from the oil into the water, for disposal.

Abstract: A gas cleaning apparatus is disclosed which comprises a housing having an inlet adjacent a bottom portion thereof and an outlet adjacent a top portion thereof. The housing preferably has at least one radially-extending vane disposed along a longitudinal axis of the housing. A settling tank is fluidly connected at a top portion thereof to the base of the housing, at least one outlet fluidly connected to a waste treatment apparatus, and at least one outlet fluidly connected to the housing between the inlet and the outlet of the housing. The waste treatment apparatus preferably has at least one outlet fluidly connected to the housing between the inlet and the outlet of the housing.

Abstract: An exhaust system for a semiconductor etcher that utilizes corrosive gas. Specifically, the present invention exhausts residual corrosive gas from the exit load lock compartment of a semiconductor etcher. For instance, at the completion of the etching process of semiconductor wafers, the exit load lock compartment of an etcher contains the etched wafers along with residual corrosive gas. When the exit load lock compartment pressure returns to about 1 atmosphere, the residual corrosive gas begins to escape. Within an embodiment of the present invention, an exhaust box is adjacently located to the exit load lock compartment to exhaust the residual corrosive gas from it. The exhaust box is a specifically shaped hollow box that has an intake slot and an exhaust aperture. Two edges that partly form the intake slot are parallel to the outer side edge of the exit load lock compartment when its door is open. The intake slot length matches the outer side edge length of the exit load lock compartment.

Abstract: One or more contaminants selected from the group consisting of acidic gases, inert particulates, and mixtures thereof are removed from steam by contacting the contaminated steam with a nonaqueous sorbent such as crystalline molecular sieves, silica gels, soda ash, carbonaceous adsorbents, and amine liquid ion exchange resins.